Abstract: A liquid crystal lens panel device is provided. The liquid crystal lens panel device includes a first substrate, a second substrate, a bottom electrode, a top electrode, a first alignment layer, a lens liquid crystal layer, a common electrode, and a second alignment layer. The bottom electrode is disposed on the first substrate. The top electrode is disposed on the bottom electrode. The first alignment layer is disposed on the top electrode and has a first alignment direction. The lens liquid crystal layer is disposed on the first alignment layer and includes liquid crystal molecules. The common electrode is disposed on the lens liquid crystal layer. The second alignment layer is disposed on the common electrode and has a second alignment direction. The first alignment direction is the same as the second alignment direction. The second substrate is disposed on the second alignment layer.

Abstract: The present invention provides a method for manufacturing a liquid crystal display device, which hardly causes display unevenness in joining parts in which mutually neighboring exposure regions are overlapped upon carrying out a photo-alignment treatment for forming a horizontal alignment film.

Abstract: A display device includes a first substrate provided with a first alignment film and a second substrate provided with a second alignment film, which are cell-assembled and sealed by sealant. A separating wall is provided between the first substrate and the second substrate and is further located between a display area and the sealant. The separating wall extends through the first alignment film and the second alignment film to separate the sealant and alignment films in the display area. The display device can avoid contamination of alignment films in the display area and enhance the display quality of the display device.

Abstract: A system for displaying images including a display panel is provided. The display panel has a display area and a peripheral area. The display panel includes a metal layer disposed on a first substrate. A second substrate is disposed opposite to the first substrate. A seal is disposed at the peripheral area and between the first and the second substrates and at the peripheral area. A patterned planarization layer is disposed on the first substrate, including an opening and two sidewalls, wherein the opening is located between the two sidewalls and corresponding to the peripheral area. A passivation layer is disposed between the seal and the first substrate, and wherein a portion of the seal is disposed between the two sidewalls of the patterned planarization layer.

Abstract: A liquid crystal panel and manufacturing method thereof are provided. The liquid crystal panel includes: an array substrate provided with thin film transistors; a color filter substrate provided with primary photo-spacers and secondary photo-spacers. The primary photo-spacers correspond to the thin film transistors. Stage differences between the secondary photo-spacers and the primary photo-spacers decrease from the center of the panel to the boundaries thereof. Liquid crystal is filled within space between two substrates, which are then sealed. By applying a design that utilizes stage differences between the primary and secondary photo-spacers being different, optical performance decrease caused by non-uniform box thickness in different regions is prevented.

Abstract: A display device is provided. The display device includes a pixel-displaying region, including: at least two pixels including a plurality of sub-pixels; and a light-shielding layer including a matrix portion and an enlarged portion, wherein the enlarged portion is disposed at an intersection of two of the adjacent sub-pixels and is adjacent to the matrix portion; wherein the matrix portion defines the sub-pixels, and a total area of the sub-pixels is defined as a first area and a ratio of an area of the enlarged portion to the first area is about 1.5% to 6%.

Abstract: An embodiment of the present invention provides an array substrate, its manufacturing method and a display device. The method for manufacturing the array substrate comprises forming a common electrode with a slit structure on a substrate, and a pixel electrode with a slit structure not overlapping the common electrode. According to the present invention, it is able to reduce storage capacitance between the common electrode and the pixel electrode, thereby to ensure the image quality.

Abstract: A first interlayer insulating film is arranged on a gate line and a source line. A first common electrode includes a first sub-common electrode extending in a first direction so as to face the gate line and a first main common electrode extending in a second direction so as to face the source line on the first interlayer insulating film. The first common electrode has a slit extending in the second direction. A second interlayer insulating film covers the first common electrode. A main pixel electrode extends in the second direction on the second interlayer insulating film so as to face the slit. A second common electrode includes a second sub-common electrode extending on the second interlayer insulating film so as to face the first sub-common electrode and a second main common electrode facing the first main common electrode.

Abstract: The present invention provides a liquid crystal display panel and device. The liquid crystal display panel includes a first subpixel and a second subpixel each having a plurality of display domains. The first subpixel includes a first pixel electrode and a first common electrode. The second subpixel includes a second pixel electrode and a second common electrode. The display domains of the first subpixel and the display domains of the second subpixel are respectively formed by patterning the first common electrode and the second pixel electrode.

Abstract: Interconnects (34) include an inside interconnect section (40) and an outside interconnect section (41). The inside interconnect section (40) includes a first interconnect layer (42), a second interconnect layer (43), and a connection section (44) that connects the first interconnect layer (42) and the second interconnect layer (43). The outside interconnect section (41) includes a third interconnect layer (45). Of a plurality of interconnects (34), in one interconnect (X) of neighboring interconnects the second interconnect layer (43) and the third interconnect layer (45) are connected, and in another of the neighboring interconnects (Y), the first interconnect layer (42) and the third interconnect layer (45) are connected.

Abstract: An electro-optical display device according to the present invention includes a TFT substrate having a first electrode; a flexible circuit substrate extended in such a way as to protrude outwardly from the TFT substrate, wherein a second electrode is formed at the flexible circuit substrate and is connected to the electrode; a reinforcement plate which is extended from the TFT substrate to the flexible circuit substrate in such a way as to cover portions of the first electrode and the second electrode which are connected to each other and, further, is protruded from the flexible circuit substrate; and a resin formed to extend over a portion of a surface of the flexible circuit substrate which is protruded from the substrate, a portion of a surface of the reinforcement plate which is protruded from the flexible circuit substrate, and an end surface of the TFT substrate.

Abstract: A liquid crystal panel includes an array substrate and a counter substrate facing the array substrate that are bonded to each other through a seal located along a peripheral edge. Vcom wiring and GND wiring are provided in a peripheral region of the array substrate. The Vcom wiring is provided between a display region and the GND wiring. The GND wiring extends beyond an edge of the seal.

Abstract: An array substrate and a display panel are provided. The array substrate includes a transparent substrate including a display area and a rim area; a pixel structure and an antistatic switching tube which are arranged on a same side of the transparent substrate. The pixel structure includes a pixel thin-film transistor located in the display area, and the antistatic switching tube is located in the rim area. The pixel structure also includes first grounding wire located on a side of the antistatic switching tube facing away from the transparent substrate, and a second grounding wire located between the antistatic switching tube and the transparent substrate.

Abstract: An electro-optical device includes a first light shielding film; a transistor element formed on the first light shielding film to overlap the first light shielding film; a second light shielding film formed on the transistor element to overlap the transistor element and electrically connected to an input terminal of the transistor element; a transparent conductive film extended toward an upper layer side of the second light shielding film in an opening region, through which light penetrates, of the display region; a dielectric film formed on the transparent conductive film in the opening region; and a transparent pixel electrode formed on the dielectric film in the opening region, constituting a storage capacitor together with the transparent conductive film and the dielectric film, and having a transparent pixel electrode which is electrically connected to the transistor element.

Abstract: A liquid crystal display panel includes: a transparent insulating substrate; a signal line and a scanning line arranged in a display region on the transparent insulating substrate and crossing each other in a matrix; a protective insulating film arranged so as to cover at least the signal line and the scanning line from above; a first insulating film that covers the protective insulating film from above; and a first contact hole that penetrates at least the first insulating film and the protective insulating film to reach a surface of a common interconnect. The first contact hole has a bottom and an inner side surface covered with a first stacked film composed of a first transparent conductive film made of the same material as the lower electrode and a second transparent conductive film made of the same material as the upper electrode.

Abstract: A TFT substrate (100A) of a liquid crystal display panel includes: an organic interlayer insulating layer (24) covering a TFT; a first transparent electrically-conductive layer (25) provided in the first region of a surface of the organic interlayer insulating layer (24); and an inorganic dielectric layer (26) covering the first transparent electrically-conductive layer (25) and provided in a second region of the surface of the organic interlayer insulating layer (24) which is different from the first region, the inorganic dielectric layer (26) containing SiN, wherein an arithmetic mean roughness Ra of the first region and the second region of the surface of the organic interlayer insulating layer (24) is not less than 3.45 nm and not more than 5.20 nm.

Abstract: An active matrix substrate includes: a first inorganic insulating film (first insulating layer) provided on a gate insulating film (insulating film); an organic insulating film (second insulating layer) provided on the first inorganic insulating film and having a thermal expansion coefficient different from that of the first inorganic insulating film; and a second inorganic insulating film (third insulating layer) provided in such a manner as to cover the organic insulating film and partially contacting the first inorganic insulating film. A notch is provided above the gate insulating film and in a portion of the second inorganic insulating film where the organic insulating film is not present.

Abstract: A display surface where a plurality of source lines are arrayed thereon and each receives a video signal; and an inspection wiring portion that transmits an inspection signal to the source lines. The inspection wiring portion includes a first conductive layer connected to a part of the source lines, a second conductive layer connected to another part of the source lines, and an insulating portion that insulates the first conductive layer and the second conductive layer, and the second conductive layer is laminated on the first conductive layer.

Abstract: The present invention discloses an array substrate and a display panel. The array substrate comprises a plurality of data lines and a plurality of gate lines which are provided to intersect each other. The data lines are provided in parallel and the gate lines are provided in parallel, and the data lines and the gate lines vertically intersect to divide the array substrate into a plurality of pixel units each having a pixel electrode provided therein. The pixel electrode comprises a sub-pixel electrode comprising a root portion and a branch portion group connected to the root portion, the branch portion group consisting of a plurality of branch portions, adjacent ones of which are separated by slits. The branch portion group partially overlaps the data lines and/or the gate lines.

Abstract: A DC-DC converter (600) generates a supply voltage VPW1, etc. for supplying to a drive circuit (500), by converting a voltage level through an operation of a switching element which changes an electric current passing through an inductor. A mode control signal Cm is generated in a power supply control section (220) of the display control circuit (200), and is supplied to the DC-DC converter (600), whereby the DC-DC converter (600) is operated in a PFM control mode during a period when a load condition is light such as during a non-refreshing period in an intermittent driving, whereas the mode is changed to a PWM control mode in the other periods.

Abstract: The present invention provides a liquid crystal lens image forming device and an image forming method. The image forming device includes: at least one liquid crystal lens; a drive circuit, which is connected to the liquid crystal lens to set, at a first moment, the liquid crystal lens in a non-lens state and to set, at a second moment, the liquid crystal lens in a lens state; at least one image pick-up unit generating a first image signal and a second image signal; and an image processing unit, which processes the first image signal and the second image signal to form a target image signal. The liquid crystal lens image forming device and image forming method do not involve the use of a polarization device, allows a single liquid crystal lens to clearly form an image, and reduces the thickness of the entire image forming device.

Abstract: A diffraction grating comprises a liquid crystal (LC) cell configured to apply an electric field through a cholesteric LC material that induces the cholesteric LC material into a heliconical state with an oblique helicoid director. The applied electric field produces diffracted light from the cholesteric LC material within the visible, infrared or ultraviolet. The axis of the heliconical state is in the plane of the liquid crystal cell or perpendicular to the plane, depending on the application. A color tuning device operates with a similar heliconical state liquid crystal material but with the heliconical director axis oriented perpendicular to the plane of the cell. A power generator varies the strength of the applied electric field to adjust the wavelength of light reflected from the cholesteric liquid crystal material within the visible, infrared or ultraviolet.

Abstract: This disclosure provides connectors for smart windows. A smart window may incorporate an optically switchable pane. In one aspect, a window unit includes an insulated glass unit including an optically switchable pane. A wire assembly may be attached to the edge of the insulated glass unit and may include wires in electrical communication with electrodes of the optically switchable pane. A floating connector may be attached to a distal end of the wire assembly. The floating connector may include a flange and a nose, with two holes in the flange for affixing the floating connector to a first frame. The nose may include a terminal face that present two exposed contacts of opposite polarity.

Abstract: This invention enables obtainment of a reflectance variable element having a high cold tolerance. Two transparent substrates are disposed so as to face each other across a gap. On respective surfaces of the transparent substrates, the surfaces facing each other, respective transparent conductive films are formed. An electrolytic solution is charged in the gap. The electrolytic solution has a composition in which at least silver ions and copper ions, a content by weight of the copper ions being smaller than that of the silver ions, are contained in a non-aqueous solvent containing a non-aqueous solvent having a boiling point that is higher than that of methanol and methanol, a content by weight of the methanol being smaller than that of the non-aqueous solvent.

Abstract: An acousto-optic crystal optical waveguide is applicable to an acoustic wave sensor for sensing acoustic wave, wherein the acousto-optic crystal optical waveguide includes an acousto-optic crystal core and an inner cladding layer covering the acousto-optic crystal core. The acoustic wave is able to change the refraction index of the acousto-optical crystal optical waveguide to make a light beam with specific wavelength refracting to outside of the acousto-optic crystal waveguide when a light beam transmits through the acousto-optic crystal optical waveguide. Objective of acoustic wave sensing is achieved by detecting wavelength and intensity variation of the light beam transmits through the acousto-optic crystal optical waveguide.

Abstract: According to a first aspect, the invention relates to a generator of at least three coherent laser beams at least one beam of which is in the infrared domain and at least one beam of which is in the visible domain, comprising: an elementary source for emitting a first continuous-wave laser beam, at a first given infrared wavelength; a nonlinear crystal frequency doubler, allowing, from a first beam sampled from the first laser beam at the first wavelength, a second laser beam to be generated at a second wavelength; and a nonlinear crystal sum frequency generator, allowing, from a second beam sampled from the first laser beam at the first wavelength and from the second laser beam at the second wavelength, a third laser beam to be generated at a third wavelength.

Abstract: An apparatus that is wearable by a solo video camera man that allows for solo focusing of subjects without the need for a “focus follow” The device allows for one operator to work the camera and focus it without touching the lens through one hand operation of the lens. There is silent operation for sound recording while filming. The device is modifiable for left hand or right hand use. The device is foldable for portability. The device provides a stable platform for portable camera operation. There is adjustable focus tension for micro control and operator preference. There is an add-on surround frame to support sound and lighting equipment that moves with the camera and that can also house a monitor. The system includes a vest and adjustable support strut that makes hands-free use fatigue-free between scenes. A scale linked to the lens focus makes pre-set focus points easy to mark and visually reference by the single operator. The unit can be tripod mounted for stationary filming.

Abstract: An angular velocity sensor detects a shake of an image pickup apparatus and a signal divide unit divides a shake detection signal to output it to each of a first drive amount calculating unit and a second drive amount calculating unit. A first drive amount and a second drive amount are calculated based on the divided shake detection signal to drive each of a first correction lens and a second correction lens. An aberration determination unit changes a limiter used in a drive amount limiting unit based on the first drive amount and the second drive amount so as not to increase the eccentric aberration of an imaging optical system generated by the movement of the two correction lenses. The drive amount limiting unit limits the drive amount based on the limiter set according to the result of the determination for the aberration to correct the image shake while suppressing the eccentric aberration.

Abstract: According to some aspects, a method for assisting the adjusting of a focus of an image includes providing a graphical representation of a detected image. The method can also include receiving an indication of a user selection of a region of the image and providing a magnified graphical representation of the selected image region. The method may further include providing a graphical indication of a degree of focus for at least a portion of the selected image region. The graphical indication in some instances is visually correlated with the magnified graphical representation of the selected image region. The size, shape, and/or color of the graphical indication in some instances can be correlated with the degree of focus for at least a portion of the selected image region.

Abstract: Photographic lighting devices and systems having multiple electrical energy storage/discharge (EESD) elements and/or multiple light sources in a single photographic lighting device to perform one or more photographic lighting effects. In one exemplary aspect, independent control of one or more light sources connected to a first EESD bank and another one or more light sources connected to a second EESD bank, such as via control circuitry, may be utilized in producing various lighting effects.

Abstract: A remote-controllable camera dolly and a system for television, film or video recording, including a camera dolly is disclosed. The remote-controllable camera dolly comprises a planar first main part, at least four first wheels that are connected to the first main part and whose rotational axes are each arranged parallel to one another, at least four second wheels that are connected to the first main part and whose rotational axes are each arranged in a first plane that is substantially orthogonal to the rotational axes of said at least four first wheels such that the camera dolly can be moved, guided along a guide element, by means of said at least four first wheels and at least four second wheels, as well as a motorized camera holder which is detachably connected to the fast main part and can be pivoted an at least two axes.

Abstract: A two-piece extendable L-plate provides clearance between a camera and a quick-release receiver securing the camera to a support permitting a camera having cables connected to the side of the camera's body to be secured in either a landscape or a portrait orientation.

Abstract: An omnidirectional user configurable multi-camera housing includes a top plate including one or more electronic circuit boards thereon; a track plate secured to the top plate by a plurality of first fasteners, wherein the track plate is rotationally movable with respect to the top plate via a respective curve-shaped opening that accommodates movement of a respective first fastener within the respective curve-shaped opening; a plurality of camera assemblies secured to the track plate by a plurality of magnetic devices, each of the camera assemblies including a camera and a bracket, movably installed on the track, wherein each of the camera is rotatable on a respective bracket in a plane perpendicular to the track plate, and wherein each of the bracket are rotatable in a plane including the track plate; and a transparent cover for covering the plurality of camera assemblies installed on the track plate.

Abstract: A rotating mount includes an imaging device, a stand cover connected to the imaging device, a mounting plate configured to fix a position of the imaging device and having an insertion hole formed in one area thereof, and a pivot joint connected to the stand cover and having a protrusion inserted into the insertion hole.

Abstract: A window apparatus comprises a first layer including a liquid crystal microdroplet (LCMD) display switchable between transparent and opaque states in response to a change in an applied electrical voltage and a second layer coupled to the first layer. The second layer is changeable between a light transmitting configuration and a light blocking configuration.

Abstract: Disclosed herein is a method of correcting the distortion of an image overlap area. The method includes identifying an overlap area between images projected by a plurality of projectors, obtaining information about the brightness of an image projected on the overlap area, and controlling the brightness of the image projected on the overlap area. Controlling the brightness of the image includes incorporating a transparency variable ? into the image, and the transparency variable of an image projected by a specific projector is reduced toward remaining boundaries of the overlap area at a boundary of a non-overlap area and the overlap area.

Abstract: In a projection optical apparatus, a refractive system includes a plurality of lens groups, one of which includes a first lens located in a position closest to a reflective system and a first lens frame having an accommodation section that accommodates the first lens. The first lens has a lens cutoff section, and the accommodation section has a wall section that is located outside the lens cutoff section and a first opening section that exposes a side surface of the first lens that is opposite the lens cutoff section. The wall section is provided with an open section that exposes the lens cutoff section. A guide barrel is so formed as to expose the first opening section and the open section. A projection optical apparatus enclosure has a second opening section that exposes the first opening section and is configured to be capable of exposing the open section.

Abstract: A lighting device includes a supporting section configured to support a light source device unit, a fan housing section in which an outflow port for causing the air discharged by a cooling fan to flow out is formed, and a circulating device supported by the light source device unit. The outflow port is opened in a direction along a second direction. The light source device unit includes an inflow port opened to a side opposed to the outflow port and a channel for leading the air flowing in from the inflow port to a light source. The circulating device includes a moving section disposed between the light source device unit and the fan housing section in a predetermined position, a ventilation hole for causing the outflow port and the inflow port to communicate being formed in the moving section, and an urging section configured to urge the moving section.

Abstract: In a light emitting device, a second electrode is provided over a ridge portion having a constant width in a plan view, a second cladding layer includes an electrical connection region electrically connected to the second electrode, the active layer constitutes a light waveguide through which light is guided in a region overlapping the ridge portion in the plan view, the light waveguide is provided with a first light emission surface and a second light emission surface from which the light is emitted, and, in the plan view, a width of the electrical connection region at a central position equidistant from the first light emission surface and the second light emission surface is smaller than a width of an end of the electrical connection region in an extending direction of the light waveguide.

Abstract: An illumination unit includes a light source, an optical mixer to form secondary light sources from a light beam from the light source, and an illumination system to illuminate an optical modulator with the light beam from the optical mixer, including an optical element having an anamorphic surface, in which the optical element is rotated at a certain rotational angle about a rotational axis which is a normal line from a vertex of a surface of the optical element.

Abstract: A prism group including a first, a second, and a third prisms is provided. The first prism has a first light incidence surface, a first light emitting surface, and a first connecting surface. The second prism has a second light incidence surface, a second light emitting surface, and a second connecting surface. The second light incidence surface is located between the first light emitting surface and the second light emitting surface. A first air gap is between the second light incidence surface and the first light emitting surface. The third prism has a third light incidence surface, a third light emitting surface, and a third connecting surface. The third light incidence surface is located between the second light emitting surface and the third light emitting surface. A second air gap is between the third light incidence surface and the second light emitting surface. A projection apparatus is also provided.

Abstract: A display screen includes a filter layer, a fluorescent layer having parallel fluorescent stripes, and an attachment layer between an excitation side of the fluorescent layer and a first side of the filter layer to attach the excitation side of fluorescent layer to the filter layer while providing vertical separation therebetween. The attachment layer includes attachment regions that are separated from each other by lateral spacings such that excitation-side air gaps are formed between areas of the fluorescent layer and the filter layer that correspond to the lateral spacings. During display operation, excitation light received on a second side of the filter layer propagates through to the first side of the filter layer, and at least a portion of the excitation light that propagates from the second side of the filter layer travels through the excitation-side air gaps to excite the fluorescent stripes.

Abstract: There is provided a magnet screen device capable of satisfactorily displaying an image projected from a projector even at an edge portion of a screen sheet thereof. The magnet screen device comprises a screen sheet having a projection surface and a magnet surface opposed to the projection surface, and a roll part for rolling up the screen sheet. In non-use state of the device, the screen sheet is in a rolled-up position on the roll part such that the magnet surface is situated on the inside with respect to the projection surface in the rolled-up screen sheet.

Abstract: A display apparatus including: an image projecting unit for emitting projection light of an image; and a screen unit including: a Fresnel lens disposed correspondingly to the projection light; and a transmitting diffuser which includes a first display section disposed on a light-emitting side corresponding to a first area of the Fresnel lens and a second display section disposed on a light-emitting side corresponding to a second area different from the first area of the Fresnel lens, a part of the second display section being separated from the Fresnel lens for a predetermined distance.

Abstract: A rotatable video surveillance system is configured with a drive mechanism that rotates a bracket for a camera up to 360 degrees. The drive mechanism comprises a plurality of gears that rotate a camera back and forth up to at least 180 degrees. The drive mechanism comprises a control arm connecting between the first gear and a second gear, and a third output gear connected to a rotatable bracket. The drive mechanism typically rotates the bracket at a non-linear speed. A switch may be connected to produce back and forth rotation or pause. An electronic control can be used to control the speed of said drive mechanism and/or pan angle and pause. The rotatable surveillance camera covers at least up to 180 degrees. At night, a camera may see 10 to 30 feet, but with a spotlight the camera may see 300? to 600?. Doppler radar range is about 1 mile.

Abstract: A substrate processing method performs a photolithography processing on a wafer to form a resist pattern on the wafer. Ultraviolet ray is irradiated onto the resist pattern to cut side chains of the resist pattern to improve line edge roughness of the resist pattern. A processing agent is caused to enter the resist pattern and a metal is caused to be infiltrated into the resist pattern through the processing agent. Thereafter, the wafer is heated to vaporize the processing agent from the resist pattern to form a cured resist pattern.

Abstract: An extreme ultraviolet lithography (EUVL) process is disclosed. The process comprises receiving a mask. The mask includes a low thermal expansion material (LTEM) substrate, a reflective multilayer (ML) over one surface of the LTEM substrate, a first region having a phase-shifting layer over the reflective ML, and a second region having no phase-shifting layer over the reflective ML. The EUVL process also comprises exposing the mask by a nearly on-axis illumination with partial coherence less than 0.3 to produce diffracted light and non-diffracted light, removing at least a portion of the non-diffracted light, and collecting and directing the diffracted light and the not removed non-diffracted light by a projection optics box (POB) to expose a target.

Abstract: Methods for selecting the best measurement sites for OPC model calibration are disclosed. Embodiments include selecting a predetermined number, n, of structures representing an IC design layout eligible for SEM measurement; specifying an image parameter space of image parameters for the n structures; optimizing a redundancy in the image parameter space of measurement sites for the n structures; and calibrating an OPC model for the IC design layout based on the optimized redundancy.

Abstract: A method for manufacturing a photomask is provided. The method includes providing a flexible substrate, forming a plurality of microstructures on the flexible substrate, coating the flexible substrate with a shading material to form a shading layer on the substrate, and solidifying the shading layer which is a single layer.

Abstract: Provided are a mask blank substrate which has effectively and extremely high principal surface flatness while a reduction in the manufacturing throughput of the mask blank substrate is suppressed, a mask blank, and a transfer mask. Also provided are manufacturing methods therefor. A virtual reference surface that becomes an optically effective flat reference surface defined by a Zernike polynomial which is composed of only terms in which the order of a variable related to a radius is the second or lower order, and includes one or more terms in which the order of the variable related to the radius is the second order is set, and a mask blank substrate satisfying the condition that data (PV value) relating to the difference between the maximum value and the minimum value of the difference data between the reference surface and the measured shape of the mask blank substrate is one-eighth or less of an exposure wavelength (A) is selected.