Patents Issued in August 24, 2017
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Publication number: 20170242305Abstract: A liquid crystal display panel includes multiple pixel units. At least one pixel unit includes first and second substrates, a scan line, data lines, first and second pixel structures, a shielding electrode layer, and a negative liquid crystal layer. The first pixel structure includes a first active device, a first pixel electrode, and a first common electrode. The second pixel structure includes a second active device, a second pixel electrode, and a second common electrode. The first common electrode and the second common electrode are provided with different voltages. One of the first pixel electrode and the first common electrode and one of the second pixel electrode and the second common electrode respectively include a frame and two strip electrodes. The frame has two sides, and two ends of each strip electrode are respectively connected to the two sides. The shielding electrode layer overlaps with the data lines.Type: ApplicationFiled: September 16, 2016Publication date: August 24, 2017Inventor: Pei-Chun LIAO
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Publication number: 20170242306Abstract: A liquid crystal display device includes a base unit, a gate line disposed on the base unit, a data line disposed on the base unit and crossing the gate line while being insulated from the gate line, a shielding electrode disposed on the data line and overlapping the data line and isolated from the pixel electrode and a conductive bar, the conductive bar disposed on the same layer as that on which the shielding electrode is disposed, isolated from the shielding electrode, and extending in parallel to the data line.Type: ApplicationFiled: January 25, 2017Publication date: August 24, 2017Inventors: Hak Sun CHANG, Cheol SHIN, Ki Chul SHIN, Se Hyun LEE, Yun Seok LEE
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Publication number: 20170242307Abstract: A display device is disclosed, which includes: a first substrate; a plurality of scan lines and a plurality of data lines, wherein the scan lines intersects with the data lines, the scan and the data lines are disposed above the first substrate, and the scan lines extend along a first direction; a common electrode disposed above the first substrate; a second substrate; a display medium layer disposed between the first substrate and the second substrate, wherein the common electrode has a first part extending along the first direction, a second part corresponding to the data lines, and an end part, wherein the first part connects to the second part, the end part connects to the second part, a first angle included between the end part and the second part greater than 0 degree and less than 180 degrees. The end part overlaps partially with the data line adjacent thereto.Type: ApplicationFiled: February 10, 2017Publication date: August 24, 2017Inventors: Chien-Hung CHEN, Bo-Chin TSUEI, Hsia-Ching CHU, Mei-Chun SHIH
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Publication number: 20170242308Abstract: According to one embodiment, a display device comprises image signal lines, scanning signal lines, pixels, a display area, pixel electrodes, and common electrodes. The common electrodes are configured to detect an object and to display an image in the display area. The common electrodes include first and second common electrodes which are arranged in a first direction. A first slit is provided between the first and second common electrodes. The first and second common electrodes are supplied a signal different from each other. A second slit is provided in the first common electrode. Each of the first slit and the second slit overlaps one of the image signal lines and extends in an extension direction in which the image signal line extends.Type: ApplicationFiled: February 24, 2017Publication date: August 24, 2017Applicant: Japan Display Inc.Inventors: Kenta Seki, Gen Koide, Hayato Kurasawa
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Publication number: 20170242309Abstract: According to one embodiment, a liquid crystal display apparatus includes a display region including a plurality of display pixels arrayed in a matrix, an array substrate including a plurality of first electrodes which are arrayed in a matrix, second electrodes which are arranged on the same layer as a layer of the first electrodes and connect the first electrodes to each other, and third electrodes which are arrayed in a matrix on the first electrodes and the second electrodes, a countersubstrate which is arranged to face the array substrate, and a liquid crystal layer which is interposed between the array substrate and the countersubstrate.Type: ApplicationFiled: May 8, 2017Publication date: August 24, 2017Applicant: Japan Display Inc.Inventors: Takashi Doi, Toshihiro Ninomiya
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Publication number: 20170242310Abstract: According to one embodiment, a liquid crystal display device comprises a liquid crystal and first and second substrates. The first substrate comprises pixel electrodes, a common electrode and sub-pixel areas. The sub-pixel areas each have a first area in which the pixel electrodes is provided and the second area in which the pixel electrode is not provided. The sub-pixel areas include first and second sub-pixel areas. A shortest distance between the first area of the each first sub-pixel area and the first area of the associated second sub-pixel area is 5 ?m or less. When an image is displayed, a polarities of the pixel electrodes in the first and second sub-pixel areas are different from each other.Type: ApplicationFiled: February 23, 2017Publication date: August 24, 2017Applicant: Japan Display Inc.Inventor: Toshiharu MATSUSHIMA
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Publication number: 20170242311Abstract: The present invention relates to a display panel having a plurality of GOA circuits and an image display area. The image display area has a plurality of pixel units. The display panel further includes a plurality of tilted wiring channels configured for connecting the plurality of GOA circuits to the plurality of corresponding pixel units, respectively.Type: ApplicationFiled: January 13, 2016Publication date: August 24, 2017Inventors: Yafeng LI, Xiangyi PENG
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Publication number: 20170242312Abstract: A display panel and a display device are disclosed, the display panel includes an opposed substrate and an array substrate opposite to each other, and a flexible printed circuit. The opposed substrate includes a conductive layer, which is configured for electrostatic prevention, the flexible printed circuit includes a first conductive structure connected to the conductive layer, and the conductive layer is grounded through the first conductive structure.Type: ApplicationFiled: August 16, 2016Publication date: August 24, 2017Inventors: Yi Wang, Xuebing Jiang
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Publication number: 20170242313Abstract: The present disclosure concerns an encapsulated electrochromic display and a method for encapsulating the same. The method includes forming the electrochromic display on a first encapsulation layer, conditioning the electrochromic display in an environment having a predetermined minimum water vapor therein, and applying a second encapsulation layer on the electrochromic display. The electrochromic display includes at least a first electrode, a second electrode, and an electrochromic layer between the first and second electrodes. At least one of the first and second electrodes is formed by a roll-to-roll printing process and comprises a material having an air or water vapor permeability sufficient to allow water vapor to permeate the electrochromic layer during the roll-to-roll printing process, and at least one of the first and second encapsulation layers is optically transparent.Type: ApplicationFiled: February 22, 2017Publication date: August 24, 2017Applicant: Thin Film Electronics ASAInventors: Annelie EVEBORN, Olle HAGEL, Jakob NILSSON, Susanne NORLEN, Mikko PAAKKOLANVAARA
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Publication number: 20170242314Abstract: Provided is an organic electrochromic device which has a high response speed and is excellent in durability even when a large current is flowed transiently, in which: an electrochromic layer arranged between a pair of electrodes contains an organic electrochromic material, a redox substance, and a solvent; the organic electrochromic material and the redox substance are each a material to be reversibly subjected to a redox reaction; and a potential at which the redox substance is oxidized (or reduced) is present between a potential at which the organic electrochromic material is reversibly oxidized (or reduced) and a potential at which the organic electrochromic material is irreversibly oxidized (or reduced).Type: ApplicationFiled: November 4, 2015Publication date: August 24, 2017Inventors: Wataru Kubo, Shinjiro Okada, Kenji Yamada
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Publication number: 20170242315Abstract: A control system for variable transmittance windows is disclosed. The system comprises at least one electro-optic element, a local control circuit, and a feedback circuit. The local control circuit is in communication with the electro-optic element via a conductive supply. The feedback circuit is in communication with the conductive supply and configured to communicate a feedback signal to the local control circuit. The local control circuit is configured to receive the feedback signal and adjust an output voltage transmitted to the conductive supply in response to the feedback signal.Type: ApplicationFiled: February 21, 2017Publication date: August 24, 2017Inventors: Kevin L. Ash, Michael T. Stephenson, Carl N. Wassink
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Publication number: 20170242316Abstract: An optical modulator element includes first and second optical modulators, an optical input terminal, and a branch coupler. Each of the first and second optical modulators includes a pair of Mach-Zehnder waveguides, a first optical coupler to split rays from the branch coupler into the pair of Mach-Zehnder waveguides, and a second optical coupler to combine rays transmitted through the pair of Mach-Zehnder waveguides. The first and second optical modulators are disposed in such a manner that a traveling direction of rays propagating through the pair of Mach-Zehnder waveguides of the first optical modulator and a traveling direction of rays propagating through the pair of Mach-Zehnder waveguides of the second optical modulator are angled toward each other.Type: ApplicationFiled: February 6, 2017Publication date: August 24, 2017Applicant: Mitsubishi Electric CorporationInventors: Yuichiro HORIGUCHI, Satoshi NISHIKAWA, Koichi AKIYAMA, Shusaku HAYASHI, Yohei HOKAMA, Kentaro ENOKI, Toshiyuki TANAKA
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Publication number: 20170242317Abstract: Certain exemplary embodiments can provide a system, machine, apparatus, device, manufacture, circuit, composition of matter, and/or user interface adapted for and/or resulting from, and/or a process, method, and/or machine-readable medium comprising machine-implementable instructions for, activities that can comprise and/or relate to, generating a gradient in an index of refraction of a material.Type: ApplicationFiled: April 14, 2017Publication date: August 24, 2017Inventors: LIWEI LI, ANTHONY VAN HEUGTEN, DWIGHT DUSTON, PHIL BOS, DOUGLAS BRYANT
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Publication number: 20170242318Abstract: An optical apparatus includes an optical unit driven by an actuator, a holder configured to hold the optical unit, and an elastic member that contacts the holder via a first contacting portion and a second contacting portion, and contacts the optical unit via a connecting portion provided between the first contacting portion and the second contacting portion. The elastic member is spaced from the holder between the first contacting portion and the second contacting portion, and spaced from the optical unit between the first contacting portion and the connecting portion and between the connecting portion and the second contacting portion. Part of the elastic member opposite to the connecting portion that contacts the optical unit is spaced from the holder.Type: ApplicationFiled: February 17, 2017Publication date: August 24, 2017Inventors: Takehiko Sato, Koji Sato, Kota Asano, Daisuke Shiraishi, Makoto Hayakawa
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Publication number: 20170242319Abstract: An image recording device having a projected viewfinder is described that projects individual, or multiple sets of synchronized framing beams onto a target image that are coaxially aligned with the field of view of the camera. The set of framing beams is projected onto the target image beyond the scope of the field of view being recorded by the image recording device but still within the field of vision of the operator of the device. In this way, the operator of the image recording device will be able to clearly see the framing beams identifying the limits of the recorded areas, while not having any portion of the field of view of the image recording device obscured by the framing beams themselves.Type: ApplicationFiled: August 6, 2014Publication date: August 24, 2017Inventors: Kevin J. WARRIAN, Adrian GOOI, Patrick GOOI
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Publication number: 20170242320Abstract: An illumination apparatus includes: a light-guiding portion including a light-introducing opening through which light is introduced from a light-emitting portion of an image pickup apparatus, a reflective surface that reflects light introduced from the light-introducing opening toward an image pickup optical axis of the image pickup apparatus, and a diffusion portion that diffuses the light reflected by the reflective surface toward an object as diffused light; and a reflective body including an opening portion allowing an image pickup opening of the image pickup apparatus to be exposed, and a reflective portion provided around the opening portion and including a reflective surface formed to expand from the opening portion toward the object, wherein the diffusion portion is disposed at a part of the reflective portion and the reflective body includes a wall portion extending to the object side at a boundary between the opening portion and the diffusion portion.Type: ApplicationFiled: February 10, 2017Publication date: August 24, 2017Inventors: Kei MATSUOKA, Hitoshi YOSHIDA
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Publication number: 20170242321Abstract: The invention relates to a housing assembly (2) for a camera (1) of a motor vehicle including a camera housing (3) for disposing the camera (1), including a connector housing (4) for protecting an electrical connecting element (10) of the motor vehicle and/or of the camera (1), wherein the camera housing (3) is connected to the connector housing (4) such that the connector housing (4) covers a backside (7) of the camera housing (3) at least in certain areas, and including a venting element (11) for avoiding humidity in the camera housing (3) and/or the connector housing (4), wherein the camera housing (3) has a first vent (12) in the backside (7) and the venting element (11) is disposed between the backside (7) of the camera housing (3) and the connector housing (4) such that the venting element (11) completely covers the first vent (12).Type: ApplicationFiled: September 8, 2015Publication date: August 24, 2017Applicant: Connaught Electronics Ltd.Inventor: Colin Patrick Hehir
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Publication number: 20170242322Abstract: One embodiment provides an apparatus, including: an arm; a head that attaches to the arm; the head comprising a camera; and a base attached to the arm; the base including: a power and data connector; a device operatively coupled to the power and data connector; wherein the camera shares the power and data connector with the device of the base. Other aspects are described and claimed.Type: ApplicationFiled: February 23, 2016Publication date: August 24, 2017Inventors: Cyan Godfrey, Ali Kathryn Ent, Peter Carlson Rane, Thomas Perelli, Matthew Ian Tucker, Samuel Jackson Patterson
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Publication number: 20170242323Abstract: An image display apparatus including a light source; a light source control unit configured to control electric power to be supplied to the light source; a light source cooling unit configured to cool the light source; a cooling control unit configured to control the light source cooling unit; an image display device; an illumination optical system configured to introduce light from the light source to the image display device, and a projecting optical system configured to project light modulated by the image display device. When the light source control unit receives a turn-off command, the light source control unit first lowers electric power to be supplied to the light source to a predetermined electric power lower than normal electric power to be supplied when the lamp is on, and then blocks the supply of the electric power to the light source, thereby turning the light source off.Type: ApplicationFiled: May 5, 2017Publication date: August 24, 2017Inventor: Yuya Kurata
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Publication number: 20170242324Abstract: A projector 10 includes an image forming panel 14 on which an image is formed, and a projection lens 15 which projects the image of the image forming panel 14 onto a screen 20. The center of the image forming panel 14 is fixed with being shifted in a direction opposite to a direction, in which a central position of a projection surface of the screen 20 is deviated with respect to an optical axis L of the projection lens 15. A lens barrel 31 of the projection lens 15 has an opening 34 as a heat release structure which is formed in a portion of a lens barrel 31 in a direction, in which the image forming panel 14 is shifted, on the image forming panel 14 side from a diaphragm position 32 where an F-Number of the projection lens 15 is determined.Type: ApplicationFiled: May 9, 2017Publication date: August 24, 2017Applicant: FUJIFILM CorporationInventor: Yasuto KURODA
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Publication number: 20170242325Abstract: Provided is a projection system, a light source system, and a light source assembly. The light source system (100) comprises an excitation light source (101), a wavelength conversion device (106), a color filtering device (107), a drive device (108), and a first optical assembly. The wavelength conversion device (106) comprises at least one wavelength conversion region. The optical filtering device (107) is fixed face-to-face with the wavelength conversion device (106), and comprises at least a first optical filtering region. The drive device (108) drives the wavelength conversion device (106) and the optical filtering device (107), allowing the wavelength conversion region and the first optical filtering region to act synchronously, and the wavelength conversion region is periodically set on the propagation path of the excitation light, thereby converting the excitation light wavelength into converted light.Type: ApplicationFiled: April 24, 2017Publication date: August 24, 2017Applicant: APPOTRONICS CHINA CORPORATIONInventors: Fei HU, Yi LI, Yi Yang
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Publication number: 20170242326Abstract: Provided is a projection system, a light source system, and a light source assembly. The light source system (100) comprises an excitation light source (101), a wavelength conversion device (106), a color filtering device (107), a drive device (108), and a first optical assembly. The wavelength conversion device (106) comprises at least one wavelength conversion region. The optical filtering device (107) is fixed face-to-face with the wavelength conversion device (106), and comprises at least a first optical filtering region. The drive device (108) drives the wavelength conversion device (106) and the optical filtering device (107), allowing the wavelength conversion region and the first optical filtering region to act synchronously, and the wavelength conversion region is periodically set on the propagation path of the excitation light, thereby converting the excitation light wavelength into converted light.Type: ApplicationFiled: April 24, 2017Publication date: August 24, 2017Applicant: APPOTRONICS CHINA CORPORATIONInventors: Fei HU, Yi LI, Yi Yang
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Publication number: 20170242327Abstract: Provided is a projection system, a light source system, and a light source assembly. The light source system (100) comprises an excitation light source (101), a wavelength conversion device (106), a color filtering device (107), a drive device (108), and a first optical assembly. The wavelength conversion device (106) comprises at least one wavelength conversion region. The optical filtering device (107) is fixed face-to-face with the wavelength conversion device (106), and comprises at least a first optical filtering region. The drive device (108) drives the wavelength conversion device (106) and the optical filtering device (107), allowing the wavelength conversion region and the first optical filtering region to act synchronously, and the wavelength conversion region is periodically set on the propagation path of the excitation light, thereby converting the excitation light wavelength into converted light.Type: ApplicationFiled: April 24, 2017Publication date: August 24, 2017Applicant: APPOTRONICS CHINA CORPORATIONInventors: Fei HU, Yi LI, Yi Yang
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Publication number: 20170242328Abstract: Provided is a light shielding device including a light shielding wall configured to include a plurality of panels, the light shielding wall being used as a partition of a first space and a second space, the plurality of panels being controllable in either a light transmission state in which light is transmitted or a light shielding state in which light is shielded, an optical path specifying unit configured to specify a predetermined optical path to be passed through the light shielding wall, a panel specifying unit configured to specify a panel on the light shielding wall, the panel being corresponded to a position at which the predetermined optical path specified by the optical path specifying unit passes through the light shielding wall, and a controller configured to control a light transmission state or a light shielding state for the plurality of panels on the light shielding wall.Type: ApplicationFiled: December 5, 2016Publication date: August 24, 2017Inventor: Junichi Rekimoto
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Publication number: 20170242329Abstract: A projection screen including a substrate, Fresnel structures and a protective layer is provided. The Fresnel structures are located on a surface of the substrate facing an image-source side and arranged along a first direction. Each Fresnel structure extends along a second direction. The protective layer has a first surface facing the image-source side. The first surface has optical microstructures. The optical microstructures are orthographically projected on a reference plane to form orthographic projection patterns. Each of the orthographic projection patterns has a first axis and a second axis substantially perpendicular to each other. The first axis passes through two end points having a maximum distance in the first direction. The second axis passes through two end points having a maximum distance in the second direction. Each of the orthographic projection patterns is symmetry to at least one of the first axis and the second axis.Type: ApplicationFiled: February 14, 2017Publication date: August 24, 2017Applicant: Coretronic CorporationInventors: Hung-Ta Chien, Fang-Hsuan Su, Fu-Chiang Hsu
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Publication number: 20170242330Abstract: To provide a reflective mask blank having pseudo defects significantly excluded. The reflective mask blank comprises a substrate, a reflective layer for reflecting EUV light, formed on the substrate, and an absorber layer for absorbing EUV light, formed on the reflective layer, wherein Ssk<1.0 is satisfied, where Ssk is skewness in a region of 1 ?mĆ1 ?m on the absorber layer side surface.Type: ApplicationFiled: February 3, 2017Publication date: August 24, 2017Applicant: Asahi Glass Company, LimitedInventor: Hiroshi HANEKAWA
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Publication number: 20170242331Abstract: A phase shift mask including a substrate, a phase shift layer and a transparent layer is provided. The phase shift layer is disposed on the substrate and has an opening. The transparent layer is disposed in the opening. The phase shift mask can have a large DOF window.Type: ApplicationFiled: April 21, 2016Publication date: August 24, 2017Inventor: Yi-Kai Lai
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Publication number: 20170242332Abstract: A photomask includes a light transmission substrate having a transfer region and a frame region, a light-transmitting region exposing a portion of the light transmission substrate in the transfer region corresponding to a transfer pattern, a phase shift region surrounding the light-transmitting region in the transfer region. The phase shift region includes a first phase shift region surrounding the light-transmitting region and a second phase shift region surrounding the first phase shift region. A first phase shift pattern is disposed on the light transmission substrate in the first phase shift region, and a plurality of second phase shift patterns are disposed on the light transmission substrate in the second phase shift region.Type: ApplicationFiled: April 28, 2017Publication date: August 24, 2017Inventor: Byung Ho NAM
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Publication number: 20170242333Abstract: A method, an apparatus, and a non-transitory computer readable medium for full chip mask pattern generation include: generating, by a processor, an initial mask image from target polygons, performing, by the processor, a global image based full chip optimization of the initial mask image to generate new mask pattern polygons, wherein the global image based full chip optimization co-optimizes main feature polygons and SRAF image pixels, determining performance index information based on the global image based full chip optimization, wherein the performance index information comprises data for assisting a global polygon optimization, generating a mask based on the global polygon optimization of the new mask pattern polygons using the performance index information, and generating optimized mask patterns based on a localized polygon optimization of the mask.Type: ApplicationFiled: February 23, 2017Publication date: August 24, 2017Inventors: Jiangwei Li, Jihui Huang, Ke Zhao
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Publication number: 20170242334Abstract: The disclosure is related to a photo-alignment method, comprising the following steps. A top panel and a bottom panel each with an alignment film are provided; a mask plate for shielding the top panel and the bottom panel is provided, and a transparent section of the mask plate is disposed; an ultraviolet is emitted along a first incident direction by the mask plate for exposing the alignment film of the top panel and the bottom panel; the transparent section of the mask plate is adjusted, an ultraviolet is emitted along a second incident direction by the mask plate for exposing the alignment film of the top panel and the bottom panel. The manufacture of the alignment film in the whole liquid crystal display device can be accomplished by a mask plate undergoing exposure twice, so that the exposure times decrease and the process is simplified.Type: ApplicationFiled: May 8, 2017Publication date: August 24, 2017Applicant: Shenzhen China Star Optoelectronics Technology Co., Ltd.Inventor: Jie SUN
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Publication number: 20170242335Abstract: The present disclosure relates to a patterned structure, the structure comprising: i) a substrate, ii) a first layer on top of the substrate, comprising a filler material and a guiding material, wherein at least a top surface of the first layer comprises one or more zones of filler material and one or more zones of guiding material, and iii) a second layer on top of the first layer comprising a pattern of a first material, the pattern being either aligned or anti-aligned with the underlying one or more zones of guiding material; wherein the first material comprises a metal or a ceramic material and wherein the guiding material and the filler material either both comprise or both do not comprise the metal or ceramic material.Type: ApplicationFiled: February 15, 2017Publication date: August 24, 2017Applicants: IMEC VZW, KATHOLIEKE UNIVERSITEIT LEUVEN, KU LEUVEN R&DInventors: Boon Teik Chan, Arjun Singh, Safak Sayan
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Publication number: 20170242336Abstract: A radiation-sensitive composition includes particles including a metal oxide as a principal component, a radiation-sensitive acid generator, and an organic solvent. A metal atom constituting the metal oxide includes a first metal atom that is a zinc atom, a boron atom, an aluminum atom, a gallium atom, a thallium atom, a germanium atom, an antimony atom, a bismuth atom, a tellurium atom, or a combination thereof. A van der Waals volume of an acid generated from the radiation-sensitive acid generator is no less than 2.0Ć10?28 m3. A percentage content of the first metal atom with respect to total metal atoms in the radiation-sensitive composition is no less than 50 atomic %.Type: ApplicationFiled: February 17, 2017Publication date: August 24, 2017Applicant: JSR CORPORATIONInventor: Kazuki KASAHARA
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Publication number: 20170242337Abstract: A radiation-sensitive composition includes particles including a metal oxide as a principal component, and an organic solvent. A metal atom constituting the metal oxide includes a first metal atom that is a zinc atom, a boron atom, an aluminum atom, a gallium atom, a thallium atom, a germanium atom, an antimony atom, a bismuth atom, a tellurium atom, or a combination thereof. A percentage content of the first metal atom with respect to total metal atoms in the radiation-sensitive composition is no less than 50 atomic %. A pattern-forming method includes applying the radiation-sensitive composition to form a film on a substrate, exposing the film, and developing the film exposed.Type: ApplicationFiled: February 17, 2017Publication date: August 24, 2017Applicants: JSR CORPORATION, CORNELL UNIVERSITYInventors: KAZUKI KASAHARA, VASILIKI KOSMA, JEREMY ODENT, HONG XU, MUFEI YU, EMMANUEL P. GIANNELIS, CHRISTOPHER K. OBER
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Publication number: 20170242338Abstract: Provided are an active-light-sensitive or radiation-sensitive resin composition in which the sensitivity is excellent, and an active-light-sensitive or radiation-sensitive film, a pattern forming method, and a method for manufacturing an electronic device, each using the active-light-sensitive or radiation-sensitive resin composition. The active-light-sensitive or radiation-sensitive resin composition contains a resin (Ab) whose polarity is changed by the action of an acid, and a compound that generates an acid upon irradiation with active light or radiation, in which the resin (Ab) includes a metal ion, and the metal type of the metal ion is at least one of metal types belonging to Groups 1 to 10 and 13 to 16 (here, excluding Mg and Cs).Type: ApplicationFiled: March 1, 2017Publication date: August 24, 2017Applicant: FUJIFILM CorporationInventor: Shuji HIRANO
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Publication number: 20170242339Abstract: A non-chemically-amplified positive resist composition comprising a polymer comprising both recurring units derived from a sulfonium salt capable of generating a fluorinated acid and recurring units containing an amino group as a base resin exhibits a high resolution and a low edge roughness and forms a pattern of good profile after exposure and organic solvent development.Type: ApplicationFiled: February 16, 2017Publication date: August 24, 2017Applicant: Shin-Etsu Chemical Co., Ltd.Inventors: Jun Hatakeyama, Teppei Adachi, Masaki Ohashi
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Publication number: 20170242340Abstract: A substrate treatment apparatus includes a substrate treatment unit configured to provide a chemical solution to a substrate to treat the substrate, and a chemical supply unit configured to supply the chemical solution to the substrate treatment unit. The chemical supply unit includes a loader configured to load a canister containing the chemical solution to the chemical supply unit, a clamp configured to clamp the canister in place, a chemical supply line through which the chemical solution is supplied to the substrate treatment unit, and a coupler configured to couple the chemical supply line to the canister.Type: ApplicationFiled: January 9, 2017Publication date: August 24, 2017Inventors: SUNGMIN JANG, SU-HWAN KIM, DAI-HEE LEE
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Publication number: 20170242341Abstract: A lithography developing composition is disclosed. In an exemplary aspect, the composition comprises an alkaline aqueous solution having a first organic base and a second organic base, wherein the first organic base is a quaternary ammonium hydroxide with pendant groups on its side chains and the second organic base is another quaternary ammonium hydroxide with electron withdrawing groups on its side chains. In another exemplary aspect, the composition comprises an alkaline aqueous solution having an organic base that is a quaternary ammonium hydroxide with at least one electron withdrawing group on its side chains and the organic base has basicity weaker than Tetramethylammonium hydroxide (TMAH). In yet another exemplary aspect, the composition comprises an alkaline aqueous solution having an organic base that is Trimethylphenylammonium hydroxide or Benzyldimethyltetradecylammonium hydroxide.Type: ApplicationFiled: May 8, 2017Publication date: August 24, 2017Inventors: Lilin Chang, Ching-Yu Chang
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Publication number: 20170242342Abstract: Methods and systems for PS-CAR photoresist simulation are described. In an embodiment, a method includes determining by simulation at least one process parameter of a lithography process using a radiation-sensitive material. In such an embodiment, the radiation-sensitive material includes: a first light wavelength activation threshold that controls the generation of acid to a first acid concentration in the radiation-sensitive material and controls generation of photosensitizer molecules in the radiation-sensitive material, and a second light wavelength activation threshold that can excite the photosensitizer molecules in the radiation-sensitive material that results in the acid comprising a second acid concentration that is greater than the first acid concentration, the second light wavelength being different from the first light wavelength. In such an embodiment, the method also includes performing a lithography process using the previously-determined at least one process parameter.Type: ApplicationFiled: February 19, 2016Publication date: August 24, 2017Inventors: Michael Carcasi, Benjamen M. Rathsack, Mark H. Somervell, Wallace P. Printz, Seiji Nagahara, Seiichi Tagawa
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Publication number: 20170242343Abstract: A scatterometer performs diffraction based measurements of one or more parameters of a target structure. To make two-color measurements in parallel, the structure is illuminated simultaneously with first radiation (302) having a first wavelength and a first angular distribution and with second radiation (304) having a second wavelength and a second angular distribution. The collection path (CP) includes a segmented wavelength-selective filter (21, 310) arranged to transmit wanted higher order portions of the diffracted first radiation (302X, 302Y) and of the diffracted second radiation (304X, 304Y), while simultaneously blocking zero order portions (302?, 304?) of both the first radiation and second radiation.Type: ApplicationFiled: February 17, 2017Publication date: August 24, 2017Applicant: ASML Netherlands B.V.Inventors: Nitesh PANDEY, Arie Jeffrey DEN BOEF, Marinus Johannes Maria VAN DAM
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Publication number: 20170242344Abstract: Methods and systems for PS-CAR photoresist simulation are described. In an embodiment, a method includes calibrating initial conditions for a simulation of at least one process parameter of a lithography process using a radiation-sensitive material. In such an embodiment, the radiation-sensitive material includes a first light wavelength activation threshold that controls the generation of acid to a first acid concentration in the radiation-sensitive material and controls generation of photosensitizer molecules in the radiation-sensitive material, and a second light wavelength activation threshold that can excite the photosensitizer molecules in the radiation-sensitive material that results in the acid comprising a second acid concentration that is greater than the first acid concentration, the second light wavelength being different from the first light wavelength. Further, the method may include performing a lithography process using the previously-determined at least one process parameter.Type: ApplicationFiled: February 19, 2016Publication date: August 24, 2017Inventors: Michael Carcasi, Mark Somervell, Carlos Fonseca
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Publication number: 20170242345Abstract: An electrostatic clamp (300) and a method for manufacturing the same is disclosed. The electrostatic clamp includes a first layer (302) having a first ultra-low expansion (ULE) material, a second layer (304) coupled to the first layer, having a second ULE material, and a third layer (306), coupled to the second layer, having a third ULE material. The electrostatic clamp further includes a plurality of fluid channels (316) located between the first layer and the second layer and a composite layer (308) interposed between the second layer and the third layer. The method for manufacturing the electrostatic clamp includes forming the plurality of fluid channels, disposing the composite layer on the third layer, and coupling the third layer to the second layer. The plurality of fluid channels is configured to carry a thermally conditioned fluid for temperature regulation of a clamped object.Type: ApplicationFiled: July 9, 2015Publication date: August 24, 2017Applicant: ASML Holding N.V.Inventors: Matthew LIPSON, Vincent DIMILIA, Ronald Peter TOTILLO, Tammo UITTERDIJK, Steven Michael ZIMMERMAN
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Publication number: 20170242346Abstract: The present invention provides a lithography apparatus which performs a process of forming a pattern on a substrate, the apparatus comprising a processing device configured to perform the process, an actuator configured to exert an action to the processing device, a detector configured to detect vibrations of a support for supporting the processing device, and a controller configured to control the actuator, wherein the controller is configured to perform an estimation of vibration transferred from the processing device to the detector, and control the actuator based on vibration obtained by the estimation and vibration detected by the detector.Type: ApplicationFiled: February 9, 2017Publication date: August 24, 2017Inventors: Tetsuji Okada, Tosiya Asano, Naoki Maruyama
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Publication number: 20170242347Abstract: A lithographic projection apparatus includes a support structure configured to hold a patterning device, the patterning device configured to pattern a beam of radiation according to a desired pattern; a substrate table configured to hold a substrate; a projection system configured to project the patterned beam onto a target portion of the substrate; a liquid supply system configured to provide liquid to a space between the projection system and the substrate; and a shutter configured to isolate the space from the substrate or a space to be occupied by a substrate.Type: ApplicationFiled: March 2, 2017Publication date: August 24, 2017Applicant: ASML NETHERLANDS B.V.Inventors: Christiaan Alexander HOOGENDAM, Antonius Theodorus Anna Maria DERKSEN, Sjoerd Nicolaas Lambertus DONDERS, Joeri LOF, Erik Roelof LOOPSTRA, Johannes Catharinus Hubertus MULKENS, Hans JANSEN, Jacobus Johannus Leonardus Hendricus VERSPAY, Alexander STRAAIJER, Bob STREEFKERK
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Publication number: 20170242348Abstract: A liquid confinement system for use in immersion lithography is disclosed in which the meniscus of liquid between the liquid confinement system and the substrate is pinned substantially in place by a meniscus pinning feature. The meniscus pinning feature comprises a plurality of discrete outlets arranged in a polygonal shape.Type: ApplicationFiled: May 8, 2017Publication date: August 24, 2017Applicant: ASML NETHERLANDS B.V.Inventors: Michel RIEPEN, Christiaan Alexander HOOGENDAM, Paulus Martinus Maria LIEBREGTS, Ronald VAN DER HAM, Wilhelmus Franciscus Johannes SIMONS, Daniƫl Jozef Maria DIRECKS, Paul Petrus Joannes BERKVENS, Eva MONDT, Gert-Jan Gerardus Johannes Thomas BRANDS, Koen STEFFENS, Han Henricus Aldegonda LEMPENS, Mathieus Anna Karel VAN LIEROP, Christophe DE METSENAERE, Marcio Alexandre Cano MIRANDA, Patrick Johannes Wilhelmus SPRUYTENBURG, Joris Johan Anne-Marie VERSTRAETE, Franciscus Johannes Joseph JANSSEN
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Publication number: 20170242349Abstract: A lithographic apparatus having a first outlet to provide a thermally conditioned fluid with a first flow characteristic to at least part of a sensor beam path, and a second outlet associated with the first outlet and to provide a thermally conditioned fluid with a second flow characteristic, different to the first flow characteristic, adjacent the thermally conditioned fluid from the first outlet.Type: ApplicationFiled: December 21, 2016Publication date: August 24, 2017Inventors: Jan Steven Christiaan Westerlaken, Gerardus Arnoldus Hendricus Franciscus Janssen, Peter Paul Steijaert, Engelbertus Antonius Fransiscus Van Der Pasch, Franciscus Van De Mast
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Publication number: 20170242350Abstract: An electrophotographic photosensitive member including a surface layer containing a charge generating material and a polyester resin is provided. The polyester resin contains a structure having a 12- or higher-membered cycloalkylene group.Type: ApplicationFiled: February 14, 2017Publication date: August 24, 2017Inventors: Kazumichi Sugiyama, Kazunori Noguchi, Harunobu Ogaki
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Publication number: 20170242351Abstract: An electrophotographic photoreceptor includes a conductive substrate, an organic photosensitive layer on the conductive substrate, and an inorganic protective layer on the organic photosensitive layer. A layer that constitutes a surface of the organic photosensitive layer contains a charge transport material, a binder resin, silica particles, and a silicone compound.Type: ApplicationFiled: July 6, 2016Publication date: August 24, 2017Applicant: FUJI XEROX CO., LTD.Inventors: Tatsuki SANO, Hideya KATSUHARA, Masaki HIRAKATA, Takeshi IWANAGA
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Publication number: 20170242352Abstract: An electrophotographic photosensitive member including a surface layer containing a specific polyester resin is provided. The polyester resin contains specific structures.Type: ApplicationFiled: February 14, 2017Publication date: August 24, 2017Inventors: Harunobu Ogaki, Kazunori Noguchi, Kazumichi Sugiyama
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Publication number: 20170242353Abstract: The present invention relates to an electrophotographic photoreceptor which is a positive charging type electrophotographic photoreceptor comprising a conductive support and a photosensitive layer on the conductive support, wherein the photosensitive layer contains at least a charge generating material, a hole transport material, an electron transport material, and a binder resin in the same layer, and a residual potential VL1 at a point at which an exposure amount for forming a latent image is 0.3 ?J/cm2 is equal to or lower than 130 V when an initial surface potential V0 is set to +700 V, exposure with monochromatic light of 780 nm is performed and measurement is performed by a dynamic method.Type: ApplicationFiled: May 10, 2017Publication date: August 24, 2017Applicant: Mitsubishi Chemical CorporationInventors: Hiroe FUCHIGAMI, Mitsuo WADA
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Publication number: 20170242354Abstract: An electrostatic charge image developing toner includes a toner particle, a polishing agent particle, and a fatty acid metal salt particle, wherein a rate of the fatty acid metal salt particles strongly attached to the surface of the toner particles is equal to or greater than 50% by number with respect to the fatty acid metal salt particles attached to the surface of the toner particles.Type: ApplicationFiled: August 2, 2016Publication date: August 24, 2017Applicant: FUJI XEROX CO., LTD.Inventors: Yutaka SAITO, Fusako KIYONO, Mona TASAKI, Hiroki OMORI, Yuka YAMAGISHI