Patents Issued in December 21, 2017
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Publication number: 20170363940Abstract: A projection lens includes: first to fifth lenses; a light shielding ring; an aperture stop; and a lens barrel. The light shielding ring is rotated in a circumferential direction of the lens barrel by a rotation mechanism. In a case where an image forming panel is shifted with respect to an optical axis of the projection lens, a part, through which the light passes, is biased in the projection lens, whereby temperature distribution occurs in the lens barrel in the direction perpendicular to the optical axis. The thermal deformation of the high temperature side of the lens barrel due to the temperature distribution is greater than that on the low temperature side. The respective lenses may be tilted due to thermal deformation. By rotating the light shielding ring through the rotation mechanism, the temperature increases uniformly in the circumferential direction of the light shielding ring.Type: ApplicationFiled: September 6, 2017Publication date: December 21, 2017Applicant: FUJIFILM CorporationInventor: Hironobu KAYANO
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Publication number: 20170363941Abstract: A light source unit according to an aspect of the invention includes a first semiconductor light emitting device disposed centrally and a second semiconductor light emitting device disposed outwards of the first semiconductor light emitting device, the first and second semiconductor light emitting devices emitting lights, and a first collimator lens disposed centrally and a second collimator lens disposed outwards of the first collimator lens, the first and second collimator lenses being disposed so as to correspond to the first and second semiconductor light emitting devices, respectively, on sides of the first and second semiconductor light emitting devices from which the lights are emitted, and a degree at which the light of the first semiconductor light emitting device is collected onto an illuminated surface differs from a degree at which the light of the second semiconductor light emitting device is collected onto the illuminated surface.Type: ApplicationFiled: March 24, 2017Publication date: December 21, 2017Inventor: Chihaya Sugiyama
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Publication number: 20170363942Abstract: An image projection apparatus includes a light source to emit light, an image generation unit including an image generation element to generate an image using the light emitted from the light source, an optical unit to guide the light emitted from the light source to the image generation unit, and to enlarge and project the image generated by the image generation unit, a drive unit to change any one of a position of the image generation element and a position of at least a part of the optical unit at specific timing, and a cooling device to cool one or more parts disposed in the image projection apparatus. An operation sound generated by the cooling device while the cooling device is being operated has a given frequency characteristic settable according to a drive frequency of the drive unit.Type: ApplicationFiled: June 19, 2017Publication date: December 21, 2017Inventors: Takahiro HIRAMATSU, Yasunari MIKUTSU, Satoshi TSUCHIYA, Yukimi NISHI
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Publication number: 20170363943Abstract: There is provided a light source unit including a semiconductor light emitting device, and a rotary mirror device having a mirror surface on a first side, and a second side to which a rotational shaft of a motor is connected, wherein the mirror surface has an undulating section shape of convex and concave shape portions, wherein the rotary mirror device is disposed so as to reflect light emitted from the semiconductor light emitting device on the mirror surface.Type: ApplicationFiled: March 27, 2017Publication date: December 21, 2017Inventor: Hideyuki Kurosaki
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Publication number: 20170363944Abstract: A projection optical system (2) projects from a DMD (7) on a reducing side onto a screen (9) on an enlargement side, and includes: a first refractive optical system (10) that forms a first intermediate image (51) on the enlargement side using light incident from the reducing side; a second refractive optical system (20) that forms the first intermediate image (51) on the reducing side into a second intermediate image (52) on the enlargement side; and a first reflective optical system (30) including a first reflective surface (31a) with positive refractive power that is positioned on the enlargement side of the second intermediate image (52), wherein the second refractive optical system (20) includes a first focus lens group (61) that moves when focusing is carried out, and the first focus lens group (61) includes at least one lens (L13) included in the second refractive optical system (20).Type: ApplicationFiled: September 5, 2017Publication date: December 21, 2017Inventor: Takahiko Matsuo
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Publication number: 20170363945Abstract: A display screen includes a filter layer, a fluorescent layer having parallel fluorescent stripes, and an attachment layer between an excitation side of the fluorescent layer and a first side of the filter layer to attach the excitation side of fluorescent layer to the filter layer while providing vertical separation therebetween. The attachment layer includes attachment regions that are separated from each other by lateral spacings such that excitation-side air gaps are formed between areas of the fluorescent layer and the filter layer that correspond to the lateral spacings. During display operation, excitation light received on a second side of the filter layer propagates through to the first side of the filter layer, and at least a portion of the excitation light that propagates from the second side of the filter layer travels through the excitation-side air gaps to excite the fluorescent stripes.Type: ApplicationFiled: June 23, 2017Publication date: December 21, 2017Applicant: Prysm, Inc.Inventors: Robert L. Graves, Michael P. McMahon, Philip J. Ralli
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Publication number: 20170363946Abstract: A screen can be vibrated by vibrators that are drivable by signals. Each vibrator can be adjacent in position to other vibrators that are drivable by different types of drive signals than a drive signal associated with the vibrator. The number of drive signals can be equal to or less than the number of vibrators. A vibrator assembly for a vibrator can include a baffle and a transducer that couples to the baffle. The transducer can vibrate at least a portion of the screen. The vibrating screen can be monitored by a sensor and an analyzer unit that can analyze image speckle and screen displacement artifacts in captured images of images projected onto the screen and output results of the analysis.Type: ApplicationFiled: December 8, 2015Publication date: December 21, 2017Inventors: Denis Gilles Tremblay, Gashtaseb Ariana
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Publication number: 20170363947Abstract: An image projection device is disclosed having a body defining an aperture that includes a slide frame receiving slot that is transverse to the aperture and a magnifying lens positioned in alignment with the aperture at the front of the body. The image projection device can be attached to a mobile device and uses the camera flash of the mobile device to provide the light source to illuminate a slide transparency. The mobile device can identify a particular slide transparency through information encoded on the slide frame in order to coordinate audio or video output with the projected slide.Type: ApplicationFiled: July 22, 2016Publication date: December 21, 2017Inventor: Natalie Rosanna Rebot
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Publication number: 20170363948Abstract: A fluid handling structure for a lithographic apparatus configured to contain immersion fluid to a region, the fluid handling structure having, at a boundary of a space: at least one gas knife opening in a radially outward direction of the space; and at least one gas supply opening in the radially outward direction of the at least gas knife opening relative to the space. The gas knife opening and the gas supply opening both provide substantially pure CO2 gas so as to provide a substantially pure CO2 gas environment adjacent to, and radially outward of, the space.Type: ApplicationFiled: December 7, 2015Publication date: December 21, 2017Inventors: Cornelius Maria ROPS, Walter Theodorus Matheus STALS, David BESSEMS, Giovanni Luca GATTOBIGIO, Victor Manuel BLANCO CARBALLO, Erik Henricus Egidius Catharina EUMMELEN, Ronald VAN DER HAM, Frederik Antonius VAN DER ZANDEN, Wilhelmus Antonius WERNAART
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Publication number: 20170363949Abstract: In on the general aspect, a camera rig can include a first tier of images sensors including a first plurality of image sensors where the first plurality of image sensors are arranged in a circular shape and oriented such that a field of view of each of the first plurality of image sensors has an axis perpendicular to a tangent of the circular shape. The camera rig can include a second tier of image sensors including a second plurality of image sensors where the second plurality of image sensors are oriented such that a field of view of each of the second plurality of image sensors has an axis non-parallel to the field of view of each of the first plurality of image sensors.Type: ApplicationFiled: August 17, 2017Publication date: December 21, 2017Inventors: Matthew Thomas VALENTE, Robert ANDERSON, David GALLUP, Christopher Edward HOOVER
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Publication number: 20170363950Abstract: Disclosed are methods of generating a proximity-corrected design layout for photoresist to be used in an etch operation. The methods may include identifying a feature in an initial design layout, and estimating one or more quantities characteristic of an in-feature plasma flux (IFPF) within the feature during the etch operation. The methods may further include estimating a quantity characteristic of an edge placement error (EPE) of the feature by comparing the one or more quantities characteristic of the IFPF to those in a look-up table (LUT, and/or through application of a multivariate model trained on the LUT, e.g., constructed through machine learning methods (MLM)) which associates values of the quantity characteristic of EPE with values of the one or more quantities characteristics of the IFPF. Thereafter, the initial design layout may be modified based on at the determined quantity characteristic of EPE.Type: ApplicationFiled: June 21, 2016Publication date: December 21, 2017Inventors: Saravanapriyan Sriraman, Richard Wise, Harmeet Singh, Alex Paterson, Andrew D. Bailey, III, Vahid Vahedi, Richard A. Gottscho
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Publication number: 20170363951Abstract: A modeling technique is provided. The modeling technique includes inputting tool parameters into a model and inputting basic model parameters into the model. The technique further includes generating a simulated, corrected reticle design using the tool parameters and the basic model parameters. An image of test patterns is compared against the simulated, corrected reticle design. A determination is made as to whether ?1<?1, wherein ?1 represents model vs. exposure difference and ?1 represents predetermined criteria. The technique further includes completing the model when ?1<?1.Type: ApplicationFiled: August 30, 2017Publication date: December 21, 2017Inventors: Jacek TYMINSKI, Raluca POPESCU, Tomoyuki MATSUYAMA
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Publication number: 20170363952Abstract: The object is to provide a mask blank substrate, a mask blank, and a transfer mask which can achieve easy correction of a wavefront by a wavefront correction function of an exposure apparatus. The further object is to provide methods for manufacturing them. A virtual surface shape, which is an optically effective flat reference surface shape defined by a Zernike polynomial, is determined, wherein the Zernike polynomial is composed of only terms in which the order of variables related to a radius is second or lower order and includes one or more terms in which the order of the variables related to a radius is second-order; and the mask blank substrate, in which difference data (PV value) between the maximum value and the minimum value of difference shape between a virtual surface shape and a composite surface shape obtained by composing respective surface shapes of two main surfaces is 25 nm or less, is selected.Type: ApplicationFiled: October 26, 2015Publication date: December 21, 2017Inventors: Yohei IKEBE, Masaru TANABE
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Publication number: 20170363953Abstract: The present invention relates to a device for carrying out a capillary nanoprinting method, comprising at least one monolithic combination of a substrate (1) and one or more contact elements (2), at least parts of said contact elements (2) having a porous structure, preferably also at least parts of the substrate having a porous structure, particularly the entire monolithic combination having a porous structure.Type: ApplicationFiled: November 3, 2015Publication date: December 21, 2017Inventors: Martin STEINHART, Longjian XUE
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Publication number: 20170363954Abstract: The invention relates in particular to a method for producing subsequent patterns in an underlying layer (120), the method comprising at least one step of producing prior patterns in a carbon imprintable layer (110) on top of the underlying layer (120), the production of the prior patterns involving nanoimprinting of the imprintable layer (110) and leave in place a continuous layer formed by the imprintable layer (110) and covering the underlying layer (120), characterized in that it comprises the following step: at least one step of modifying the underlying layer (120) via ion implantation (421) in the underlying layer (120), the implantation (421) being carried out through the imprintable layer (110) comprising the subsequent patterns, the parameters of the implantation (421) being chosen in such a way as to form, in the underlying layer (120), implanted zones (122) and non-implanted zones, the non-implanted zones defining the subsequent patterns and having a geometry that is dependent on the prior patteType: ApplicationFiled: December 22, 2015Publication date: December 21, 2017Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESInventors: Stephan LANDIS, Nicolas POSSEME, Lamia NOURI
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Publication number: 20170363955Abstract: The disclosed nanoimprinting method suppresses fluctuations in thickness of residual film and defects due to residual gas in a resist film, onto which a pattern of protrusions and recesses is transferred, in a nanoimprinting method that employs the ink jet method to coat a substrate with droplets of resist material. Droplets are coated onto a substrate such that the spaces between the droplets along an A direction which is substantially parallel to the direction of the lines of a linear pattern of protrusions and recesses are longer than the spaces between the droplets in a B direction which is substantially perpendicular to the A direction, in a nanoimprinting method that coats a substrate with the droplets of a resist material using the ink jet method.Type: ApplicationFiled: August 2, 2017Publication date: December 21, 2017Inventors: Satoshi WAKAMATSU, Tadashi OMATSU
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Publication number: 20170363956Abstract: Provided is a method for manufacturing a conductive pattern forming member that is formed on a substrate and that has excellent resistance to ion migration between a conductive pattern and a photosensitive resin layer, while suppressing generation of residues in the dissolution and removal of unexposed portions.Type: ApplicationFiled: August 23, 2017Publication date: December 21, 2017Applicant: TORAY INDUSTRIES, INC.Inventors: Tsukuru MIZUGUCHI, Tomotaka KAWANO
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Publication number: 20170363957Abstract: The invention relates to naphthyl urethane acrylates particularly useful as writing monomers in photopolymer formulations for holographic media. The invention further relates to a photopolymer formulation comprising matrix polymers, writing monomers and photoinitiators, wherein the writing monomers comprise a naphthyl urethane acrylate according to the invention, to a holographic medium comprising matrix polymers, writing monomers and photoinitiators, wherein the writing monomers comprise a naphthyl urethane acrylate according to the invention, and also to a display comprising a holographic medium according to the invention.Type: ApplicationFiled: December 9, 2015Publication date: December 21, 2017Inventors: Thomas ROELLE, Horst BERNETH, Friedrich-Karl BRUDER, Dennis HÖNEL, Serguei KOSTROMINE, Thomas FÄCKE
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Publication number: 20170363958Abstract: A low dielectric constant (Dk) and dissipation factor (Df) of solder resistant mask composition having excellent photo and thermocurability, and high developability resolution with an alkaline aqueous solution, wherein the dielectric constant is below 3.20 (1 GHz), and the dissipation factor is less than 0.015 (1 GHz); and wherein the composition comprises (A) a photopolymerizable prepolymer; (B) a photopolymerizable vinyl monomer; (C) an epoxy compound; (D) a photopolymerization initiator; (E) an inorganic filler; (F) a catalyst; and (G) an organic solvent.Type: ApplicationFiled: June 17, 2016Publication date: December 21, 2017Inventors: Cheng-Chung LEE, Yeong-Tong HWANG, Shih-Hung HSU, Shao-En HWANG
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Publication number: 20170363959Abstract: A coloring photosensitive composition includes an oxime ester-based photopolymerization initiator containing a fluorine atom, a polymerizable compound having an ethylenically unsaturated double bond, an alkali-soluble resin, and a colorant, in which in a case where a film having a film thickness after drying of 2.0 ?m is formed using the coloring photosensitive composition, the optical density of the film at a wavelength of 365 nm is 1.5 or more.Type: ApplicationFiled: September 7, 2017Publication date: December 21, 2017Applicant: FUJIFILM CorporationInventors: Kazutaka TAKAHASHI, Daisuke HAMADA, Shunsuke KITAJIMA, Hirokazu KYOTA, Kaoru AOYAGI, Mitsuji YOSHIBAYASHI
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Publication number: 20170363960Abstract: Embodiments described herein relate to methods and apparatus for performing immersion field guided post exposure bake processes. Embodiments of apparatus described herein include a chamber body defining a processing volume. A pedestal may be disposed within the processing volume and a first electrode may be coupled to the pedestal. A moveable stem may extend through the chamber body opposite the pedestal and a second electrode may be coupled to the moveable stem. In certain embodiments, a fluid containment ring may be coupled to the pedestal and a dielectric containment ring may be coupled to the second electrode.Type: ApplicationFiled: August 31, 2017Publication date: December 21, 2017Inventors: Viachslav BABAYAN, Douglas A. BUCHBERGER, Jr., Qiwei LIANG, Ludovic GODET, Srinivas D. NEMANI, Daniel J. WOODRUFF, Randy HARRIS, Robert B. MOORE
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Publication number: 20170363961Abstract: A radiation-sensitive resin composition comprises: a polymer, and a radiation-sensitive acid generator. The polymer comprises a structural unit comprising: an acid-labile group; and an oxoacid group or phenolic hydroxyl group protected by the acid-labile group. The acid-labile group is represented by formula (1). R1 and R2 each independently represent a divalent organic group having 1 to 20 carbon atoms. R3 represents a monovalent group having 1 to 40 atoms and having at least one selected from the group consisting of an oxygen atom, a sulfur atom and a nitrogen atom. * denotes a binding site to the oxy group in the oxoacid group or phenolic hydroxyl group protected.Type: ApplicationFiled: March 24, 2016Publication date: December 21, 2017Applicant: JSR CORPORATIONInventor: Hayato NAMAI
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Publication number: 20170363962Abstract: A simulation apparatus has: a first processing part configured to obtain a value of a parameter in a first set relating to the forming of the pattern; a second processing part configured to obtain a value of a parameter in a second set that is at least partially same as the parameter in the first set and relating to the forming of the pattern; and an integration processing part configured to evaluate, based on the value of the parameter in the first set and the value of the parameter in the second set, a state of the pattern formed on the substrate and a forming condition when the pattern is formed, and to determine based on the result of the evaluation whether or not to make at least one of the first processing part and the second processing part recalculate the value of the parameter in the corresponding set.Type: ApplicationFiled: June 1, 2015Publication date: December 21, 2017Applicant: NIKON CORPORATIONInventors: Tomoyuki MATSUYAMA, Shintaro KUDO, Hirotaka KOHNO
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Publication number: 20170363963Abstract: A catadioptric projection objective has a first objective part, defining a first part of the optical axis and imaging an object field to form a first real intermediate image. It also has a second, catadioptric objective part forming a second real intermediate image using the radiation from the first objective part. The second objective part has a concave mirror and defines a second part of the optical axis. A third objective part images the second real intermediate image into the image plane and defines a third part of the optical axis. Folding mirrors deflect the radiation from the object plane towards the concave mirror; and deflect the radiation from the concave mirror towards the image plane. The first part of the optical axis defined by the first objective part is laterally offset from and aligned parallel with the third part of the optical axis.Type: ApplicationFiled: June 30, 2017Publication date: December 21, 2017Inventors: Aurelian Dodoc, Wilhelm Ulrich, Alexander Epple
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Publication number: 20170363964Abstract: A sensor for use in lithographic apparatus of an immersion type and which, in use, comes into contact with the immersion liquid is arranged so that the thermal resistance of a first heat path from a transducer of the sensor to a temperature conditioning device is less than the thermal resistance of a second heat flow path from the transducer to the immersion liquid. Thus, heat flow is preferentially towards the temperature conditioning device and not the immersion liquid so that temperature-induced disturbance in the immersion liquid is reduced or minimized.Type: ApplicationFiled: September 1, 2017Publication date: December 21, 2017Applicant: ASML Netherlands B.V.Inventors: Thibault Simon Mathieu LAURENT, Johannes Henricus Wilhelmus JACOBS, Haico Victor KOK, Yuri Johannes Gabriël VAN DE VIJVER, Johannes Antonius Maria VAN DE WAL, Bastiaan Andreas Wilhelmus Hubertus KNARREN, Robbert-Jan VOOGD, Jan Steven Christiaan WESTERLAKEN, Johannes Hubertus Antonius VAN DE RIJDT, Allard Eelco KOOIKER, Wilhelmina Margareta Jozef HURKENS-MERTENS, Yohann Bruno Yvon TEILLET
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Publication number: 20170363965Abstract: A projection system (PS1) for a lithographic apparatus comprises: an optical path (100); a plurality of sensors (S1-S4); one or more actuators (A1-A4); and a controller (CN). The optical path is operable to receive an input radiation beam (Bin) and to project an output radiation beam (Bout) onto a substrate to form an image. The optical path comprises: a plurality of optical elements (M1-M4), the plurality of optical elements comprising: a first set of at least two optical elements (M1, M4) and a second set of at least one optical element (M2, M3). Each sensor is associated with one of the plurality of optical elements and is operable to determine a position of that optical element. Each actuator is associated with one of the second set of optical elements and is operable to adjust that optical element.Type: ApplicationFiled: November 16, 2015Publication date: December 21, 2017Applicant: ASML Netherlands B.V.Inventors: Hans BUTLER, Raoul Maarten Simon KNOPS, Bob STREEFKERK, Christiaan Louis VALENTIN, Jan Bernard Plechelmus VAN SCHOOT, Wilhelmus Franciscus Johanne SIMONS, Leon Leonardus Franciscus MERKX, Robertus Johannes Marinus DE JONGH, Roel Johannes Elisabeth MERRY, Michael Frederik YPMA
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Publication number: 20170363966Abstract: The invention provides a display device that allows formation of the boundary of exposure at an arbitrary position on its substrate. A display device includes: a display area; a terminal; and a wire formed between the display area and the terminal and connected to the terminal. The wire includes a first part, a second part, and a third part. The first part extends in a first direction. The second part and the third part extend in a direction different from the first direction. The first part is located between the second and third parts and includes a protruding portion protruding in a second direction perpendicular to the first direction.Type: ApplicationFiled: June 7, 2017Publication date: December 21, 2017Inventors: Keita SASANUMA, Hideki KURIYAMA, Kohei HANASAKI, Syou YANAGISAWA, Kentaro AGATA
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Publication number: 20170363967Abstract: The present disclosure relates to a substrate unit of a nanostructure assembly type, an optical image apparatus including the same, and a controlling method thereof, and the substrate unit of the nanostructure assembly type according to an exemplary embodiment includes: a lower substrate; an upper substrate separated from the lower substrate, an observation object being able to be positioned at the upper substrate; and at least one metal nanostructure positioned on the lower substrate, wherein the at least one metal nanostructure is capable of being assembled on the lower substrate or separated from the lower substrate.Type: ApplicationFiled: June 19, 2017Publication date: December 21, 2017Inventors: Donghyun KIM, Wonju LEE, Hongki LEE, Taehwang SON
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Publication number: 20170363968Abstract: A method forms a pattern of metallic nanofeatures that generates by plasmonic resonance a desired image having a distribution of colors. The method includes providing a substrate having a layer of photosensitive material, exposing the layer to a high-resolution periodic pattern of dose distribution, and determining a low-resolution pattern of dose distribution such that the sum of the low-resolution pattern and the high-resolution periodic pattern of dose distribution is suitable for forming the pattern of metallic nanofeatures. The lateral dimensions of the metallic nano-features have a spatial variation across the pattern that corresponds to the distribution of colors in the desired image. The layer of photosensitive material is exposed to the low-resolution pattern of dose distribution. The layer of photosensitive material is developed to produce a pattern of nanostructures in the developed photosensitive material.Type: ApplicationFiled: December 18, 2015Publication date: December 21, 2017Inventors: Harun H. SOLAK, Christian DAIS, Francis CLUBE
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Publication number: 20170363969Abstract: A diagnostic apparatus monitors a lithographic manufacturing system. First measurement data representing local deviations of some characteristic across a substrate is obtained using sensors within a lithographic apparatus, and/or a separate metrology tool. Other inspection tools perform substrate backside inspection to produce second measurement data. A high-resolution backside defect image is processed into a form in which it can be compared with lower resolution information from the first measurement data. Cross-correlation is performed to identify which of the observed defects are correlated spatially with the deviations represented in the first measurement data. A correlation map is used to identify potentially relevant clusters of defects in the more detailed original defect map. The responsible apparatus can be identified by pattern recognition as part of an automated root cause analysis. Alternatively, reticle inspection data may be used as second measurement data.Type: ApplicationFiled: September 21, 2015Publication date: December 21, 2017Applicant: ASML NETHERLANDS B.V.Inventors: Marc HAUPTMANN, Dylan John David DAVIES, Paul JANSSEN, Naoko TSUGAMA, Richard Joseph BRULS, Kornelis Tijmen HOEKERD, Edwin Johannes Maria JANSSEN, Petrus Johannes VAN DEN OEVER, Ronald VAN DER WILK, Antonius Hubertus VAN SCHIJNDEL, Jorge Alberto VIEYRA SALAS
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Publication number: 20170363970Abstract: A test structure and method of its manufacture are presented for use in metrology measurements of a sample pattern.Type: ApplicationFiled: December 10, 2015Publication date: December 21, 2017Applicant: Nova Measuring Instruments Ltd.Inventors: Oded COHEN, Gilad BARAK, Igor TUROVETS
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Publication number: 20170363971Abstract: A controller of an exposure apparatus is coupled to an alignment system, an aerial image measurement device and an encoder system, to control a drive system based on correction information and measurement information of the encoder system, the correction information compensating a measurement error of the encoder system that occurs due to a plurality of scale members. In an exposure operation of a substrate, a detection operation of a mark of the substrate and a fiducial mark, and a detection operation of an aerial image, the positional information of the stage is measured with the encoder system. In the exposure operation, the substrate is placed facing a lower surface of a nozzle member by a stage, and alignment between a pattern image and the substrate is performed based on detection information of the alignment system and the aerial image measurement device.Type: ApplicationFiled: August 11, 2017Publication date: December 21, 2017Applicant: NIKON CORPORATIONInventor: Yuichi SHIBAZAKI
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Publication number: 20170363972Abstract: A liquid immersion exposure apparatus includes a projection system, a liquid supply inlet, a first liquid collection outlet, and a separator fluidically connected to the first liquid collection outlet, the separator separating one of liquid and gas, which have been collected via the first liquid collection outlet, from the other. A stage which holds a substrate has a second liquid collection outlet that collects a portion of the liquid supplied from the liquid supply inlet which comes from a gap between an upper surface of the substrate and an upper surface of the stage.Type: ApplicationFiled: August 29, 2017Publication date: December 21, 2017Applicant: NIKON CORPORATIONInventors: Nobutaka MAGOME, Naoyuki KOBAYASHI
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Publication number: 20170363973Abstract: An apparatus, system, and method cool a patterning device by supplying a non-uniform gas flow. The apparatus and system include a gas supply structure that supplies a gas flow across the first surface of the patterning device. The gas supply structure includes a gas supply nozzle specially configured to create a non-uniform gas flow distribution. A greater volume or velocity of the gas flow is directed to desired portion of the patterning device.Type: ApplicationFiled: December 2, 2015Publication date: December 21, 2017Applicants: ASML Holding N.V., ASML Netherlands B.V.Inventors: Thomas VENTURINO, Geoffrey Alan SCHULTZ, Daniel Nicholas GALBURT, Daniel Nathan BURBANK, Santiago E. DELPUERTO, Herman VOGEL, Johannes ONVLEE, Laurentius Johannes Adrianus VAN BOKHOVEN, Christopher Charles WARD
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Publication number: 20170363974Abstract: An apparatus for generating at least one particle shield. The at least one particle shield includes a first component and a second component. The first component and the second component are usable to form a first particle shield of the at least one particle shield for blocking particles from contacting a proximate surface of an object, the first particle shield is substantially parallel to and physically separated from the proximate surface of the object, and the first particle shield includes an energy gradient force or a velocity gradient force.Type: ApplicationFiled: January 5, 2017Publication date: December 21, 2017Inventors: Chue San YOO, Ching-Yueh CHEN, Wen-Hao CHENG
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Publication number: 20170363975Abstract: A lithographic apparatus injects gas between a patterning device and a patterning device masking blade to help protect the patterning device from contamination. The gas may be injected into the space defined between the patterning device and the patterning device blade by one or more gas supply nozzles that are arranged on at least one side of the patterning device. The one or more gas supply nozzles are coupled to a frame which a patterning device support structure moves relative to. Each nozzle may be constructed and arranged to supply gas over at least the patterning region of the reflective patterning device.Type: ApplicationFiled: December 7, 2015Publication date: December 21, 2017Applicant: ASML Holding N.V.Inventors: Peter KOCHERSPERGER, David RAMIREZ
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Publication number: 20170363976Abstract: Provided is an electrophotographic photosensitive member capable of suppressing a ghost image. The electrophotographic photosensitive member includes, in this order: a support; an intermediate layer containing metal oxide particles; and a photosensitive layer, in which the intermediate layer contains at least one kind of compound X selected from the group consisting of a compound represented by the formula (1) and a compound represented by the formula (2).Type: ApplicationFiled: June 16, 2017Publication date: December 21, 2017Inventors: Takeshi Murakami, Daisuke Kawaguchi, Kazumichi Sugiyama, Daisuke Tanaka
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Publication number: 20170363977Abstract: A quinone derivative is represented by general formula (1), (2), or (3). In general formulae (1), (2), and (3), R1, R2, R3, R4, R11, R12, R13, R14, R21, R22, R23, and R24 each represent, independently of one another, a hydrogen atom, a cyano group, a halogen atom, an optionally substituted alkyl group having a carbon number of 1-6, or an optionally substituted alkoxy group having a carbon number of 1-6. R5, R6, R15, R16, R25, and R26 each represent, independently of one another, an optionally substituted alkyl group having a carbon number of 1-6, an optionally substituted alkoxy group having a carbon number of 1-6, an optionally substituted aryl group having a carbon number of 6-14, an optionally substituted aralkyl group having a carbon number of 7-12, or an optionally substituted cycloalkyl group having a carbon number of 3-10.Type: ApplicationFiled: June 7, 2017Publication date: December 21, 2017Applicant: KYOCERA Document Solutions Inc.Inventors: Hideki OKADA, Fumio SUGAI, Kensuke KOJIMA
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Publication number: 20170363978Abstract: A quinone derivative is represented by general formula (1). In general formula (1), at least one of R1-R3 and at least one of R4-R6 each represent, independently of one another, an alkyl group having 4 to 10 carbon atoms or an alkyl group having 2 to 5 carbon atoms that has an aryl group having 6 to 14 carbon atoms. All other of R1-R3 and all other of R4-R6 each represent, independently of one another, an alkyl group having 1 to 6 carbon atoms, an aryl group having 6 to 14 carbon atoms, or a cycloalkyl group having 3 to 10 carbon atoms.Type: ApplicationFiled: June 9, 2017Publication date: December 21, 2017Applicant: KYOCERA Document Solutions Inc.Inventor: Hideki OKADA
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Publication number: 20170363979Abstract: A method for producing a toner particle include: (a) mixing a binder resin A, resin fine particles containing a resin B, a resin C, an organic solvent, and carbon dioxide, thereby forming a droplet of a resin solution containing the binder resin A, covered with the resin fine particles; (b) applying a pressure by introducing carbon dioxide, thereby precipitating the resin C at the surface of the droplet; and (c) passing carbon dioxide so as to remove the organic solvent from the droplet with the carbon dioxide. The resin C has an organic polysiloxane structure and a weight average molecular weight of 50,000 to 500,000. The ratio of the weight average molecular weight to the number average molecular weight of the resin C is not more than 5.0. The proportion of the resin C to the rein fine particles is 5.0% by mass to 50.0% by mass.Type: ApplicationFiled: June 14, 2017Publication date: December 21, 2017Inventors: Kenji Aoki, Yusuke Kosaki, Noritaka Toyoizumi, Tetsuya Kinumatsu, Toshifumi Mori, Sakae Suda, Shinnosuke Koji, Shuntaro Watanabe, Kazumichi Nakahama, Atsushi Tani, Takashige Kasuya
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Publication number: 20170363980Abstract: A toner is provided. The toner includes an amorphous resin, a crystalline resin dispersed in the amorphous resin, and a release agent. The toner satisfies the following inequality: B/A<0.8 where A represents a perimeter of the crystalline resin and B represents a length of a part of the perimeter A of the crystalline resin at which the crystalline resin is in contact with the amorphous resin, A and B being measured from a cross-sectional image of the toner observed with transmission electron microscope.Type: ApplicationFiled: June 14, 2017Publication date: December 21, 2017Inventors: Kohsuke NAGATA, Ryuuta YOSHIDA, Shinya NAKAYAMA, Tsuyoshi SUGIMOTO, Akinori SAITOH, Hideyuki SANTO, Suzuka KARATO, Koh OHNUMA, Takahiro KADOTA, Shinsuke NAGAI, Akihiro TAKEYAMA
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Publication number: 20170363981Abstract: A toner for electrophotography containing a resin binder containing a crystalline resin and an amorphous resin, and a releasing agent, wherein the crystalline resin contains a crystalline composite resin C containing a polycondensation resin component and a styrenic resin component, wherein the polycondensation resin component is obtained by polycondensing a specified alcohol component and a specified carboxylic acid component, and wherein the amorphous resin contains an amorphous composite resin AC containing a polycondensation resin component and a styrenic resin component, wherein the polycondensation resin component is obtained by polycondensing an alcohol component and a specified carboxylic acid component, and an amorphous polyester AP obtained by polycondensing an alcohol component and a specified carboxylic acid component, wherein a softening point of the amorphous polyester AP is higher than a softening point of the amorphous composite resin AC, wherein a difference in softening points between the amType: ApplicationFiled: November 25, 2015Publication date: December 21, 2017Applicant: Kao CorporationInventors: Shogo WATANABE, Kohei KATAYAMA, Yasuhiro HIDAKA, Hiroki KAKIUCHI
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Publication number: 20170363982Abstract: Provided is a toner that achieves low-temperature fixability, storability and charging performance all at a high level, in which a toner containing a crystalline resin and an amorphous resin, wherein a standard deviation of hydrogen nuclear relaxation times (HT1?-C) of the toner as measured by solid-state 13C-NMR is from 0.0 to 5.0, and a hydrogen nuclear relaxation time (HT1?-C1) of a 13C peak with the longest relaxation time out of the hydrogen nuclear relaxation times (HT1?-C) and a hydrogen nuclear relaxation time (HT1?-A1) of a 13C peak with the shortest relaxation time out of the hydrogen nuclear relaxation times (HT1?-A) satisfy 3.0?{(HT1?-C1)/(HT1?-A1)}?6.0.Type: ApplicationFiled: December 8, 2015Publication date: December 21, 2017Inventors: Junichi Tamura, Hayato Ida, Takaho Shibata, Yuya Chimoto, Ryuji Murayama
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Publication number: 20170363983Abstract: A developer having low-temperature fixability and storage stability, and capable of prolonging the service life is provided. A toner includes a coloring agent, an amorphous polyester, a crystal line polyester, ester wax containing multiple ester compounds, each having a carbon number selected from 32 to 54, and hydrophobic silica having an average primary particle diameter of 8 to 35 nm. When the ion intensity ratio of each ester compound having a different carbon number is expressed as percentage, the content (a) of the ester compound having a carbon number of (Cn) showing the maximum intensity ratio is from 20 to 55% by weight of the entire ester wax, the sum (g) of the content (e) of the ester compound having a carbon number of (Cn+2) and the content (f) of the ester compound having a carbon number of (Cn+4) satisfies the following formula: 0.065?g/a?0.200.Type: ApplicationFiled: August 31, 2017Publication date: December 21, 2017Inventors: Koichi Kuroyama, Tsutomu Katsumata
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Publication number: 20170363984Abstract: A hybrid toner includes a core having at least one amorphous polyester resin and at least one crystalline polyester resin, and at least one styrene/acrylate resin, a shell comprising at least one styrene/acrylate resin, at least one wax, and optionally a pigment dispersion, the first modulated differential calorimetry scan of the hybrid toner shows at least two melting point peaks below about 80° C., and the difference between the two melting point peaks is less than or equal to about 15° C.Type: ApplicationFiled: June 20, 2016Publication date: December 21, 2017Inventors: Richard P. N. Veregin, Valerie M. Farrugia, Frank Ping-Hay Lee, Michael J. D'Amato, Michael S. Hawkins, Edward G. Zwartz, Yulin Wang, Abdisamed Sheik-Qasim, Sandra J. Gardner
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Publication number: 20170363985Abstract: A silicone oil-treated silica particle according to the present invention includes a silica particle body and silicone oil. The silica particle body has a BET specific surface area of 70 m2/g to 120 m2/g. The silica particle body has been surface-treated with the silicone oil. The amount of free silicone oil liberated from the surface of the silica particle body in the silicone oil accounts for 2.0 mass % to 5.0 mass % with respect to the silica particle body. A surface-treated styrene acrylic resin particle, in which 2 parts by mass of the silicone oil-treated silica particle has been added to 100 parts by mass of a styrene acrylic resin particle having a particle size median of 5 ?m to 8 ?m, has a degree of agglomeration of 18 % or less.Type: ApplicationFiled: January 21, 2016Publication date: December 21, 2017Applicant: TOKUYAMA CORPORATIONInventors: Yuya YAMANO, Masahiro NAKAMURA, Tadaharu KOMATSUBARA
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Publication number: 20170363986Abstract: An image forming apparatus includes an image carrier and a charge removing portion. An electrostatic latent image is formed on the image carrier. The charge removing portion includes: a light source configured to emit light to be used for removing charge from the image carrier; a light concentrating portion configured to concentrate the light emitted from the light source on a surface of the image carrier; and a light source supporting portion formed integrally with the light concentrating portion and supporting the light source at a supporting position in which the light source and the light concentrating portion have a predetermined positional relationship.Type: ApplicationFiled: June 19, 2017Publication date: December 21, 2017Inventor: Yosuke Saito
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Publication number: 20170363987Abstract: A powder container includes a powder chamber for containing powder for forming images, a powder outlet formed in a face of the powder container, and a shutter assembly to open and close the powder outlet and including first and second shutters. The first shutter is movable between a sealing position to close the powder outlet and an open position to open the powder outlet and includes a pressed member to cancel retention of the first shutter at the sealing position. The second shutter includes a pressing projection that interferes with the pressed member of the first shutter and is movable between a shielding position to cover the pressed member without interference between the pressing projection and the pressed member and a releasing position to press the pressed member with the pressing projection.Type: ApplicationFiled: August 30, 2017Publication date: December 21, 2017Inventors: Kentaro NODERA, Emi KITA, Akihiro TAKAYAMA, Susumu TATEYAMA, Shinnosuke KOSHIZUKA, Tatsuya KUBO, Teppei KIKUCHI
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Publication number: 20170363988Abstract: A process unit has an image carrying unit having an image carrying member configured to be rotatable about a first axis extending in a first direction, and a developing agent removing member, a developing unit having a developing agent carrying member configured to be rotatable about a second axis parallel to the first axis, and a waste developing agent collecting unit configured to collect the developing agent removed by the removing member from the image carrying member. The waste developing agent collecting unit is arranged on one side in the first direction with respect to the developing unit such that the waste developing agent collecting unit faces the developing unit, and the developing unit is connected to the waste developing agent collecting unit such that the developing unit being movable in a second direction which is perpendicular to the first direction with respect to the waste developing agent collecting unit.Type: ApplicationFiled: August 30, 2017Publication date: December 21, 2017Inventor: Shougo Sato
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Publication number: 20170363989Abstract: A developer container includes a developer storage chamber that stores developer and includes an opening, a sealing member that seals the opening, an unsealing member that opens the opening by rotating such that the sealing member, a part of which is attached to the unsealing member, is peeled away, a stirring member that is attached to the unsealing member; and a regulating portion that regulates rotation of the unsealing member by contacting the stirring member. The regulating portion is provided to regulate the rotation of the unsealing member when the developer container receives an external force, and allow the unsealing member to rotate such that the opening is opened when the unsealing member receives driving power.Type: ApplicationFiled: September 1, 2017Publication date: December 21, 2017Inventors: Yu Fukasawa, Naoki Hayashi, Ryota Shibuya