Abstract: The present disclosure relates to a display device including a display module, cover bottom, a PCB, and a cover shield. The PCB includes a guide hole formed therethrough in a thickness direction and coupled to the cover bottom to be disposed on a rear surface of the cover bottom. The cover shield includes a guide protrusion configured to protrude from one surface at a position corresponding to the guide hole to be inserted into the guide hole and configured to be coupled to the cover bottom to cover the PCB. Accordingly, the cover shield is configured in such a way that the guide protrusion of the cover shield is inserted into the guide hole of the PCB interposed between the cover bottom and the cover shield while the cover shield is coupled to the cover bottom, thereby more easily and accurately guiding an assembly position of the cover shield.

Abstract: According to one embodiment, a display device, including a first insulating, a first common electrode located on a side of the first insulating layer, a second common electrode being adjacent to the first common electrode, and a second insulating, wherein the first insulating layer is in contact with the second insulating layer at a position corresponding to the first boundary portion, the second common electrode is contact with any one of the first and second insulating layers at a position corresponding to the second boundary portion, and being in contact with both the first and second insulating layers at a position corresponding to the third boundary portion.

Abstract: The invention provides a manufacturing method of color resist layer to manufacture the color resist layer by micro transfer printing (MTP), comprising forming a color resist thin film on a first substrate, using a MTP transfer stamp to adsorb a part of the color resist thin film to the plurality of protrusions of the MTP transfer stamp, and transferring the color resist thin film adsorbed by the plurality of protrusions of the MTP transfer stamp to the second substrate to form the color resist layer on the second substrate. The method uses the protrusions of the MTP transfer stamp to form the pattern to control the pattern of the color resist layer instead of exposure and development. No color resist material is wasted, the cost is reduced and the process is simple and widely applicable.

Abstract: An optical member for a multi-panel display device includes a first optical member located on a first display device and including optical fibers; a second optical member located on a second display device neighboring the first display device and including optical fibers; and an optical fiber triangular bar located to overlap a region where the first and second optical members are adjacent to each other, and including optical fibers, wherein each of the first and second optical members includes a chamfer portion corresponding to the optical fiber triangular bar at the region where the first and second optical members are adjacent to each other.

Abstract: A display panel and a manufacturing method therefor, a drive method and a display device. The display panel includes a first substrate and a second substrate which are arranged opposite to each other. The first substrate includes a first base substrate, and a plurality of first wire grid polarizers and a plurality of pixel units, which are successively located on a side of the first base substrate facing the second substrate in an array arrangement; polarization directions of two adjacent first wire grid polarizers are perpendicular to each other. The second substrate includes: a second base substrate, and a plurality of second wire grid polarizers in an array arrangement which are located on a side of the second base substrate facing the first substrate, and polarization directions of two adjacent second wire grid polarizers are perpendicular to each other.

Abstract: A display device and a controlling method are disclosed to achieve peep-proof effect while increasing utilization rate of light. The display device includes a display panel including a first substrate, a second substrate and a plurality of display units, wherein a first light source is disposed on one side of the first substrate; light emitted by the first light source is incident onto the first substrate and propagated in the first substrate in a manner of total reflection; and a light adjusting structure is disposed on a surface of the first substrate close to the second substrate, and is configured to reduce a divergence angle of light emitted by each of the display units of the display panel.

Abstract: A display device includes a display panel, a backlight under the display panel, and an adhesive placed so as to extend over a side face of the display panel and a side face of the backlight. An outer face of the adhesive opposite to a face of the adhesive bonded to the side face of the display panel and the side face of the backlight is formed as a flat face along one or both of the side face of the display panel and the side face of the backlight.

Abstract: A downconversion film element comprises quantum dots and phosphor, wherein either (a) the quantum dots emit a peak red wavelength in a range from 615 to 660 nm and a FWHM of less than 50 nm, and the phosphor emits a peak green wavelength in a range from 515 to 555 nm and a FWHM of less than 80 nm and has an internal fluorescence quantum yield of 75% or greater or (b) the quantum dots emit a peak green wavelength in a range from 515 to 555 nm and a FWHM of less than 40 nm, and the phosphor emits a peak red wavelength in a range from 615 to 645 nm and a FWHM of less than 80 nm and has an internal fluorescence quantum yield of 75% or greater.

Abstract: A display device including a display panel and a backlight module is provided. The backlight module is correspondingly disposed below the display panel and includes light-emitting elements providing light beams and disposed on a circuit board, lens units each being disposed on a corresponding light-emitting element and having a concave inside surface covering the corresponding light-emitting element and a convex outside surface covering the concave inside surface, and an inverse prism sheet disposed between the lens units and the display panel, and the inverse prism sheet having inverse prisms with a vertex corner. At least a portion of the light beams emitted from the convex outside surface each has a predetermined light-emitting angle ?o larger than 30 degrees and less than 90 degrees. The backlight module has a height of cavity D being a distance between the vertex corner and the circuit board, and 10 ?m?D<30 mm.

Abstract: The present application provides a material of alignment film, a method of fabricating a liquid crystal display panel, and a liquid crystal display panel. The material of alignment film of the present application is obtained by mixing a polymerizable monomer in the polyamic acid solution, thus is easy to fabricate. The method of fabricating the liquid crystal display panel of the present application obtains an alignment film including a polyimide film and polymer protrusions located on a surface of the polyimide film by coating the material of alignment film on a substrate, and going through a series of processes; the alignment film can allow liquid crystal molecules arrange in vertical alignment and generate a pre-inclination angle, and a risk of the polymerizable monomer contaminating the liquid crystal molecules does not exist, so as to enhance quality of the liquid crystal display panel.

Abstract: A liquid crystal display apparatus includes a first substrate, a thin film transistor (TFT), a pixel electrode, an organic layer, a second substrate, and a liquid crystal layer. The TFT is disposed on the first substrate. The pixel electrode is electrically connected to the TFT. The pixel electrode includes side surfaces forming a first angle with respect to the first substrate. The organic layer substantially covers the side surfaces of the pixel electrode. The organic layer includes side surfaces forming a second angle with respect to the first substrate. The second angle is smaller than the first angle. The second substrate faces the first substrate. The liquid crystal layer is disposed between the first substrate and the second substrate.

Abstract: A photo alignment including a copolymer of a diamine and a dianhydride, wherein the copolymer includes a repeating unit including a first group derived from the diamine and a second group derived from the dianhydride, and wherein any one of the first group and the second group includes a photoreactive group and the other one of the first group and the second group includes at least one selected from a tert-butyl group, a tert-butoxy group, a tert-butyloxycarbonyl group, and a di-tert-butyloxycarbonyl group.

Abstract: A method for preparing a liquid crystal alignment layer, a liquid crystal alignment layer, and a display device. The method for preparing a liquid crystal alignment layer includes: S1, dripping liquid crystals and performing cell-assembling, wherein a liquid alignment material is added to the liquid crystals and the alignment material is curable and includes molecules capable of inducing alignment of liquid crystal molecules S2, applying an electric field or a magnetic field, wherein the direction of the electric field is approximately the same as a preset direction of the liquid crystal alignment layer, and the direction of the magnetic field is perpendicular to the preset direction of the liquid crystal alignment layer; and S3, performing curing while maintaining the electric field or the magnetic field until the alignment material completes the curing reaction.

Abstract: A method is disclosed for realizing a liquid crystal tri-dimensional aligned structure, including: providing a first substrate having a first surface; forming a liquid crystal layer in contact to said first surface, said liquid crystal layer including a polymerizable liquid crystal compound; realizing a first aligning formation within said liquid crystal layer by irradiating a first portion of said liquid crystal layer with electromagnetic or electron beam radiation according to a given first pattern, so that said first portion of liquid crystal compound becomes polymerized and said first aligning formation is made of said polymerized liquid crystal compound according to said given first pattern, said first aligning structure defining a first aligning axis; locally orienting optical axes of molecules of said liquid crystal layer along said first aligning axis.

Abstract: A liquid crystal pixel structure is disclosed. The liquid crystal pixel structure includes: a pixel electrode, located in a pixel aperture. The pixel electrode has two or more display domains applied with the same voltage level. The pixel electrode extends in different directions in the display domains. A gate line is located at an intersection of the display domains. An edge of the intersection of the display domains overlaps the gate line. A data line is located at an edge of the pixel aperture. The pixel electrode is controlled by the gate line and the data line via a transistor. The aperture of the pixel structure is divided by the gate lines. Therefore, the edge of the display domains overlaps the gate lines. The dark line can be covered by the gate lines and thus the aperture rate and the transparent rate can be raised.

Abstract: An array substrate and drive method thereof, a display panel and a display device. The array substrate includes: a base substrate; and a plurality of pixel units and a plurality of fingerprint identifying units located on the base substrate; each pixel unit including a plurality of sub-pixel units with color filters of different colors. Orthogonal projections of sub-pixel units on the base substrate and orthogonal projections of fingerprint identifying units on the base substrate are arranged in an matrix. The array substrate can prevent interference between the fingerprint recognition signal and the display signal.

Abstract: A liquid crystal includes first and second substrates, the first substrate including intersecting data lines and scan lines. A liquid crystal layer is sandwiched therebetween. Also, a plurality of sub-pixels districted by data lines and gate lines, and arranged along the long-axis and the short-axis directions in a matrix. A pixel electrode in the sub-pixels includes a central portion. A common electrode including linear electrodes arranged along the data lines and disposed with gaps therebetween. Sub-pixels are bent at the center portion, such that the linear electrodes or the gaps in both sides of the sub-pixels are inclined in opposite directions with respect to the long-axis direction. At least one of the linear electrodes or at least one of the gaps has a bent portion at the central portion of the respective pixel electrode. The common electrode is provided on liquid crystal layer side over the pixel electrode.

Abstract: The liquid crystal display device includes: a TFT substrate including scanning lines extending in a first direction and being arranged in a second direction, Video signal lines extending in the second direction and being arranged in the first direction, pixel electrodes arranged in regions surrounded by the scanning lines and the video signal lines, and common electrodes formed with an insulating film arranged between the common electrodes and the pixel electrodes; a counter substrate opposed to the TFT substrate; and a liquid. crystal. The first common electrode extends between the first and second scanning lines in the first direction, and the second common electrode extends between the second and third scanning lines in the first direction. The first and second common electrodes are electrically connected by a bridge. The bridge covers the first video signal line without covering the second video signal line, when seen in a plan view.

Abstract: The liquid crystal display panel includes: storage capacitors respectively provided for a plurality of pixels on a substrate; a plurality of storage capacitor lines 37 arrayed in a column direction and each connected to corresponding ones of the storage capacitors, each storage capacitor line 37 belonging to one of N groups (where N is an integer equal to or greater than 2), such that every Nth storage capacitor line 37 belongs to an identical group; a plurality of branch lines 38 arrayed in a row direction, each branch line 38 being connected to more than one of the plurality of storage capacitor lines 37 that belong to an identical group; a plurality of trunk lines 71 to 82 at a column-direction edge of the substrate, each supplying an identical signal to a number of storage capacitor lines 37 that belong to one of the N groups via one or more of the plurality of branch lines 38; and a plurality of signal sending sections 7 each being coupled to associated trunk lines among the plurality of trunk lines 71 t

Abstract: We describe a multimode reconfigurable optical spatial mode multiplexing system having first and second first and second input beams and a beam combiner to combine these into an optical output. At least one of the paths comprises a polarisation-independent reconfigurable phase modulator to impose a controllable phase profile on an input beam in an input beam phase modulating optical path, to controllably convert a spatial mode order of the input beam from a lower to a higher order spatial mode. The system also has a control input to control the phase modulator to configure the phase profile for the mode conversion. The input beams are combined into a multiple spatial mode combined beam output independent of a polarisation of the input beams. The number of spatial modes of the combined beam can be more than a number of spatial modes in either of the first and second input beams separately.

Abstract: Methods are provided for fabricating electrochromic devices that mitigate formation of short circuits under a top bus bar without predetermining where top bus bars will be applied on the device. Devices fabricated using such methods may be deactivated under the top bus bar, or may include active material under the top bus bar. Methods of fabricating devices with active material under a top bus bar include depositing a modified top bus bar, fabricating self-healing layers in the electrochromic device, and modifying a top transparent conductive layer of the device prior to applying bus bars.

Abstract: Disclosed is a high quality display device which avoids complicated element structure, and does not unnecessarily reduce portability. The display device comprises: a pair of substrates which are disposed facing each other, and on each of which electrodes are formed; and a material layer which is sandwiched between the pair of substrates. The material layer contains: a coloring material which changes color upon the application of a voltage; and a light-emitting material which emits light upon photoexcitation.

Abstract: The present disclosure provides a smart window including a first base layer and a second base layer positioned to face each other; a first conductive layer and a second conductive layer respectively positioned at inner surfaces of the first base layer and the second base layer; and an electrolyte layer interposed between the first conductive layer and the second conductive layer, wherein the first conductive layer includes a plurality of first nanostructures, and the second conductive layer includes a plurality of second nanostructures having a different average length from the plurality of first nanostructures.

Abstract: The embodiments herein relate to electrochromic stacks, electrochromic devices, and methods and apparatus for making such stacks and devices. In various embodiments, an anodically coloring layer in an electrochromic stack or device is fabricated to include nickel tungsten tantalum oxide (NiWTaO). This material is particularly beneficial in that it is very transparent in its clear state.

Abstract: An electrical control system for controlling a variable transmittance window is disclosed. The system comprises a driver circuit in communication with an electro-optic element. A controller is in communication with the driver circuit. The controller is configured to identify a temperature condition of the electro-optic element and adjust an output voltage supplied to the electro-optic element in response to the temperature condition.

Abstract: The embodiments herein relate to methods for controlling an optical transition in an optically switchable device, and optically switchable devices configured to perform such methods. In various embodiments, non-optical (e.g., electrical) feedback is used to help control an optical transition. The feedback may be used for a number of different purposes. In many implementations, the feedback is used to control an ongoing optical transition.

Abstract: The invention relates to an electrically controlled interference colour filter comprising at least two transparent electrodes, at least one nematic liquid crystal layer and alignment layers for alignment of the liquid crystals. When an electrical field is applied the liquid crystals can be realigned and thus the transmission wavelength range of the interference colour filter can be shifted.

Abstract: A viewing angle controlling light source device and a display apparatus are provided. The viewing angle controlling light source device includes a base substrate; a light emitting array arranged on the base substrate, wherein the light emitting array includes a plurality of light emitting units; at least one liquid crystal lens array arranged on the light emitting array, wherein the liquid crystal lens array includes a plurality of liquid crystal lens units corresponding to the light emitting units one by one, each liquid crystal lens unit includes a first electrode and a second electrode, and a liquid crystal layer arranged between the first electrode and the second electrode a light emergent direction of light emitted by the light emitting unit after the light transmitting through the liquid crystal lens unit by regulating a voltage difference between the first electrode and the second electrode.

Abstract: According to embodiments of the present invention, an optical device is provided. The optical device includes a waveguide structure including a floating gate, and an optical waveguide arranged spaced apart from the floating gate, wherein the optical waveguide overlaps with the floating gate, a carrier injection portion arranged spaced apart from the floating gate, and an electrode arrangement, wherein, in response to a first voltage difference applied to the electrode arrangement, the optical device is configured to inject charge carriers from the carrier injection portion to the floating gate to cause a change in refractive index of the waveguide structure, and wherein, in response to a second voltage difference applied to the electrode arrangement, the optical device is configured to drive the charge carriers from the floating gate to the optical waveguide to deplete the charge carriers.

Abstract: An integrated optical beam steering device includes a planar dielectric lens that collimates beams from different inputs in different directions within the lens plane. It also includes an output coupler, such as a grating or photonic crystal, that guides the collimated beams in different directions out of the lens plane. A switch matrix controls which input port is illuminated and hence the in-plane propagation direction of the collimated beam. And a tunable light source changes the wavelength to control the angle at which the collimated beam leaves the plane of the substrate. The device is very efficient, in part because the input port (and thus in-plane propagation direction) can be changed by actuating only log2 N of the N switches in the switch matrix. It can also be much simpler, smaller, and cheaper because it needs fewer control lines than a conventional optical phased array with the same resolution.

Abstract: Described embodiments include a plasmonic apparatus and method. The plasmonic apparatus includes a substrate having a first negative-permittivity layer comprising a first plasmonic surface. The plasmonic apparatus includes a plasmonic nanoparticle having a base with a second negative-permittivity layer comprising a second plasmonic surface. The plasmonic apparatus includes a dielectric-filled gap between the first plasmonic surface and the second plasmonic surface. The plasmonic apparatus includes a plasmonic cavity created by an assembly of the first plasmonic surface, the second plasmonic surface, and the dielectric-filled gap, and having a spectrally separated first fundamental resonant cavity wavelength ?1 and second fundamental resonant cavity wavelength ?2. The plasmonic apparatus includes a plurality of fluorescent particles located in the dielectric-filled gap.

Abstract: A device for the generation of supercontinuum in infrared fiber with a pump light comprising a microchip laser operating with a wavelength of 1.0 ?m or greater that can be wavelength shifted though a nonlinear element to a wavelength beyond the two-photon absorption of the infrared fiber and launched into infrared fiber whereby the spectrum is broadened in the infrared fiber through various nonlinear processes to generate a supercontinuum within the mid-IR from 2 to 14 ?m.

Abstract: A camera apparatus is described that includes a frame housing and a camera module affixed to the frame housing. The camera module may include a lens and an image sensor. The camera apparatus may include a reflective element and a motor. The reflective element may be disposed within the frame housing, the reflective element being movable relative to the lens to select a direction from which the lens collects light. The motor may be adapted to move the reflective element in response to detecting a magnetic field change generated by at least one magnet disposed within the frame housing.

Abstract: An imaging apparatus includes an imaging element, an imaging lens, an AF controller, an image synthesis unit, and a display. The imaging element captures multiple images of an object to obtain a plurality of image data. The imaging lens includes a focus lens and is used for generating an image of the object in the imaging element. The AF controller controls a focus state of the imaging lens. The image synthesis unit synthesizes a region with a large amount of blurriness in image data of a current frame and a region with a small amount of blurriness in image data of a preceding frame obtained before the image data of the current frame, among the plurality of image data obtained by the imaging element by the plurality of times of image capturing during the drive of the focus lens. The display displays an image synthesized by the image synthesis unit.

Abstract: An anti-shake compensation structure is provided. The anti-shake compensation structure includes an auto-focus module driving a lens to move along a light entering path of the lens. The auto-focus module includes a lens holder holding the lens, a coil adjacent to the lens holder, and a magnet corresponding to the coil. The anti-shake compensation structure further includes an outer frame supporting the lens holder, and a compensation driving unit driving the lens to sway relative to the outer frame along a direction not parallel to the light entering path. The compensation driving unit includes a compensation coil corresponding to the magnet.

Abstract: A cooling device for an emitting module of a projector includes a base, a guiding portion installed on the base, and a latch portion installed on the base. The guiding portion includes a positioning plate secured on one side of the base and a guiding plate secured on the other side of the base. The positioning plate and the guiding plate are foldable relative to the base to be connected with each other and so define an inlet channel. Air flow can pass through the inlet channel to cool the emitting module. The latch portion is configured to form an outlet in different directions to adjust a direction and strength of the air flow.

Abstract: A wavelength conversion device includes a wavelength conversion element configured to convert at least a part of incident excitation light into converted light having a wavelength different from a wavelength of the excitation light and emit the converted light and a substrate connected to the wavelength conversion element in a crossing direction crossing an incident direction of the excitation light on the wavelength conversion element and configured to radiate heat transferred from the wavelength conversion element. A dimension of the substrate along the incident direction is larger than a dimension of the wavelength conversion element along the incident direction.

Abstract: A projection mechanism of a vehicle projection device projects a graphic of a graphic film toward an outer side of a vehicle. A projection direction of the graphic from the projection mechanism is inclined with respect to a rotation axis of the projection mechanism. Thus, by manually rotating a dial to rotate the projection mechanism about the rotation axis, the projection direction of the graphic from the projection mechanism can be altered, and the projection position of the graphic from the projection mechanism can be altered.

Abstract: A light source system and a projection system, comprising a light source; a switching system switching light emitted by the light source into at least two light beams having a preset proportion in the manner of time division or light intensity division; a color wheel assembly located in a transmission light path of each light beam of the at least two light beams, with the color wheel assembly generating light having different colors and a preset proportion under the irradiation of each light beam of the at least two light beams, and light of different colors being able to synthesize a projection image after being modulated by a light modulation system, wherein the switching system can adjust the proportion of the at least two light beams according to the parameters of the projection image, so as to adjust the proportion of the light of different colors.

Abstract: The present invention provides a projection method for a robot, the method comprises: receiving a playing command, according to a preset path, obtaining depth data of a projection area corresponding to the robot currently; according to a variation value of the depth data, determining whether the projection area is a flat surface; when the projection area is the flat surface, playing a film according to the playing command. The robot in the present invention can automatically search for the projection area that meets a projection requirement according to depth information of the projection area, such that operation procedures for a user can be greatly reduced, and an applicability of the user can be improved.

Abstract: A mask for photolithography includes: a transparent substrate; a phase shift pattern on the transparent substrate and configured to change a phase of light; a dielectric layer on the transparent substrate; and a negative refractive-index meta material layer on the dielectric layer.

Abstract: A method and apparatus for removing a pellicle from a photomask wherein the adhesive between the pellicle frame and photomask is cooled sufficiently to allow the adhesive property of the adhesive to diminish to the point where the adhesive will release from the photomask with little or no mechanical force and leaving minimal adhesive on the photomask. The adhesive is cooled by way of manifolds containing coolant being brought in contact with the pellicle frame or by way of a coolant spray nozzles spraying coolant directly onto the pellicle frame.

Abstract: A nanoimprint lithography method includes disposing a pretreatment composition including a polymerizable component on a substrate to form a pretreatment coating. Discrete imprint resist portions are disposed on the pretreatment coating, with each discrete portion of the imprint resist covering a target area of the substrate. The imprint resist is a polymerizable composition and includes a fluorinated photoinitiator. A composite polymerizable coating is formed on the substrate as each discrete portion of the imprint resist spreads beyond its target area. The composite polymerizable coating includes a mixture of the pretreatment composition and the imprint resist. The composite polymerizable coating is contacted with a template, and is polymerized to yield a composite polymeric layer on the substrate. The interfacial surface energy between the pretreatment composition and air exceeds the interfacial surface energy between the imprint resist and air or between at least a component of the imprint resist and air.

Abstract: A resist composition containing a resin component having a structural unit represented by general formula (a0-1), and a compound represented by general formula (b1). In general formula (a0-1), R is a hydrogen atom, an alkyl group, or a halogenated alkyl group. Va1 is a divalent hydrocarbon group. na1 represents an integer of 0 to 2. Ra?12 and Ra?13 are a monovalent chain saturated hydrocarbon group having 1 to 10 carbon atoms or a hydrogen atom. Ra?14 is a phenyl group, a naphthyl group, or an anthryl group. In general formula (b1), Rb1 represents a cyclic hydrocarbon group. Yb1 represents a divalent linking group containing an ester bond. Vb1 represents an alkylene group, a fluorinated alkylene group, or a single bond. m is an integer of 1 or more, and Mm+ is an m-valent organic cation.

Abstract: The object of the present invention is to provide resist underlayer film-forming composition for forming resist underlayer film usable as hard mask and removable by wet etching process using chemical solution such as sulfuric acid/hydrogen peroxide. A resist underlayer film-forming composition for lithography comprises a component (A) and component (B), the component (A) includes a hydrolyzable silane, hydrolysis product thereof, or hydrolysis-condensation product thereof, the hydrolyzable silane includes hydrolyzable silane of Formula (1):R1aR2bSi(R3)4?(a+b) (where R1 is organic group of Formula (2): and is bonded to silicon atom through a Si—C bond; R3 is an alkoxy group, acyloxy group, or halogen group; is an integer of 1; b is an integer of 0 to 2; and a+b is an integer of 1 to 3), and the component (B) is cross-linkable compound having ring structure having alkoxymethyl group or hydroxymethyl group, cross-linkable compound having epoxy group or blocked isocyanate group.

Abstract: In this invention use of silicone hard-coated polycarbonate (SHC-PC) as direct photo definable, thermally, chemically and optically stable polymer that can be patterned using conventional microfabrication and drying etching process is reported. As a result of the increased resistance to thermal and chemical deformations and flow of the silicone hard-coated polycarbonate (SHC-PC), it has been shown for the first time that the illustrated process herein to be compatible with a variety of conventional thin film deposition, micro and nano fabrication approaches such as metal evaporation, photoresist deposition/developing and electroplating that are typically incompatible to polycarbonate. As such high optical clarity surfaces with ultra-hydrophobic-hydrophilic properties with well-defined micro and nano patterned surface features of high surface roughness were fabricated with high fidelity.

Abstract: A composition for forming an upper layer film is applied onto a resist film formed using an actinic ray-sensitive or radiation-sensitive resin composition, and includes a resin X and a compound A having a radical trapping group. A pattern forming method includes applying an actinic ray-sensitive or radiation-sensitive resin composition onto a substrate to form a resist film, applying the composition for forming an upper layer film onto the resist film to form an upper layer film on the resist film, exposing the resist film having the upper layer film formed thereon, and developing the exposed resist film using a developer including an organic solvent to form a pattern.

Abstract: A substrate treating apparatus and a substrate treating method are provided. The substrate treating apparatus comprises: a process chamber; a support member positioned in an inner space of the process chamber to support the substrate; an exhaust line provided to communicate with the interior of the process chamber; an exhaust member for providing a suction pressure to the exhaust line; and a controller for controlling the exhaust member when dividing the substrate treating step in which the treating for the substrate is performed into the first treating step and the second treating step, a difference is generated between the pressure that the exhaust member provides to the exhaust line in the first treating step and the pressure that the exhaust member provides to the exhaust line in the second treating step.

Abstract: Methods include inputting an array of pixels, where each pixel in the array of pixels has a pixel dose. The array of pixels represents dosage on a surface to be exposed with a plurality of patterns, each pattern of the plurality of patterns having an edge. A target bias is input. An edge of a pattern in the plurality of patterns is identified. For each pixel which is in a neighborhood of the identified edge, a calculated pixel dose is calculated such that the identified edge is relocated by the target bias. The array of pixels with the calculated pixel doses is output. Systems for performing the methods are also disclosed.

Abstract: A KrF (248 nm) photoresist patterning process flow is disclosed wherein photoresist patterns having a sub-100 nm CD are formed on a dielectric antireflective coating (DARC) thereby lowering cost of ownership by replacing a more expensive ArF (193 nm) photoresist patterning process. A key feature is treatment of a DARC such as SiON with a photoresist developer solution that is 0.263 N tetramethylammonium hydroxide (TMAH) prior to treatment with hexamethyldisilazane (HMDS) in order to significantly improve adhesion of features with CD down to about 60 nm. After the HMDS treatment, a photoresist layer is coated on the DARC, patternwise exposed, and treated with the photoresist developer solution to form a pattern therein. Features that were previously resolved by KrF patterning processes but subsequently collapsed because of poor adhesion, now remain upright and intact during a subsequent etch process used to transfer the sub-100 nm features into a substrate.