Patents Issued in February 15, 2018
  • Publication number: 20180046064
    Abstract: A diffuser for a camera, the diffuser including a base configured to be accommodated on a hotshoe assembly of the camera; a body configured to cover a display screen of the camera and also configured to act as a light diffuser; and a bridge being directly coupled to and extending between the base and the body; wherein the diffuser can be oriented in a first orientation in the hotshoe assembly such that the body extends away from the camera to act as a light diffuser or in a second orientation in the hotshoe assembly such that the body covers a display screen of the camera.
    Type: Application
    Filed: August 15, 2016
    Publication date: February 15, 2018
    Inventor: GARY FONG
  • Publication number: 20180046065
    Abstract: A system for the collection of visual and related data on marine and other underwater habitats and fauna, in particular and without limitation for benthic habitats over significant spatial scales. The system can include elements such as a digital or video camera to receive visual images, various sensors to sense other related data and waterproof housings to protect various elements of the device. A sensor may for example be a global positioning system. The device can also include elements to control the device and to record, transfer & process the data.
    Type: Application
    Filed: March 11, 2016
    Publication date: February 15, 2018
    Applicant: OCEAN VISION ENVIRONMENTAL RESEARCH PTY LTD
    Inventors: Matthew HARVEY, Nicholas DOBSON
  • Publication number: 20180046066
    Abstract: An interchangeable lens to be detachably attached to a camera body, that includes a holding unit at which a plurality of contacts is arranged, the interchangeable lens includes: a first communication contact system arranged at the holding unit; and a second communication contact system different from the first communication contact system, arranged at the holding unit at a position different from a position at which the first communication contact system is arranged. The fourth contact is arranged at a position closer to the second communication contact system than the first contact, the second contact, and the third contact are, and the seventh contact and the eighth contact are arranged at positions closer to the first communication contact system than the fifth contact and the sixth contact are.
    Type: Application
    Filed: October 26, 2017
    Publication date: February 15, 2018
    Applicant: NIKON CORPORATION
    Inventors: Kazuharu IMAFUJI, Masafumi OIKAWA
  • Publication number: 20180046067
    Abstract: The multi-camera mount includes a base plate having a center portion and a plurality of L-shaped brackets. Each L-shaped bracket includes a horizontal portion extending radially outward from the center portion, and a vertical portion. The horizontal portion includes a proximal end connected to the center portion of the base plate and an opposing distal end. The vertical portion includes a first end connected to the distal end of the horizontal portion and an opposing second end. The multi-camera mount also includes a plurality of adjustable support members, each adjustable support member being pivotally attached to the second end of the vertical portion of the corresponding L-shaped bracket. Further, the multi-camera mount may also include an actuating mechanism including a motor having a drive shaft and a worm gear mounted on the drive shaft, the worm gear configured for allowing for finer and remote adjustments of each camera module.
    Type: Application
    Filed: August 7, 2017
    Publication date: February 15, 2018
    Inventor: BRANDON T. ROOTS
  • Publication number: 20180046068
    Abstract: A projection optical device includes a fourth lens group movable along an optical axis, a fifth lens group provided in a position maintained within the projection optical device, a fourth lens frame holding the fourth lens group and having cam pins, a guide tube having a rectilinear groove, the cam pins inserted into the rectilinear groove, and a cam tube rotated with respect to the guide tube to guide the cam pins with the rectilinear groove and the cam groove, and moving the fourth lens frame along the optical axis, wherein the cam pins are formed on an upstream side in an optical path of the fourth lens group in a direction along the optical axis, and the fifth lens group is provided on the upstream side in the optical path of the fourth lens group.
    Type: Application
    Filed: March 2, 2016
    Publication date: February 15, 2018
    Applicant: SEIKO EPSON CORPORATION
    Inventors: Takuya HATANO, Naoto TAKEHANA
  • Publication number: 20180046069
    Abstract: A projector is provided. The projector includes: a fluorescent wheel; at least one first light source that emits light toward the fluorescent wheel; and a fly eye lens that uniformalizes light, having transmitted the fluorescent wheel. Therefore, a fly eye lens is used instead of a light tunnel and a transmissive fluorescent wheel is used and thus it is unnecessary to divide a lens configuration of transmitting light and reflecting light. Accordingly, the number of optical systems can be reduced and thus efficiency of a projector can be enhanced and a size and production cost of the projector can be reduced.
    Type: Application
    Filed: June 30, 2017
    Publication date: February 15, 2018
    Applicant: LG ELECTRONICS INC.
    Inventors: Shingyu KANG, Heechul SHIN, Junho JEONG
  • Publication number: 20180046070
    Abstract: An apparatus comprising: including a light source; a pixel control element; and an input transmission polarizer configured to: polarize incident light from the light source into transmitted first and second light portions, wherein the first light portion has a first polarization and the second light portion has a second polarization and wherein the first and second polarizations are orthogonal; to provide the first light portion as input to the pixel control element; and to output the second light portion to provide the second light portion for illumination.
    Type: Application
    Filed: February 5, 2016
    Publication date: February 15, 2018
    Applicant: Nokia Technologies Oy
    Inventors: Jan ESKOLIN, Petri PIIPPO, Toni JARVENPAA, Marja SALMIMAA
  • Publication number: 20180046071
    Abstract: A method for producing a pellicle according to the one embodiment of the present invention produces a pellicle including a pellicle film and a pellicle frame supporting an outer peripheral portion of the pellicle film. The method includes forming the pellicle film on a substrate, and bonding a pressure-sensitive adhesive sheet, that is elastic and has a pressure-sensitive adhesive force thereof decreased upon receipt of external stimulation, to each of two surfaces of the substrate; making a notch inside a part of the substrate, the part having the pressure-sensitive adhesive sheets bonded thereto; separating a substrate outer peripheral portion outer to the notch of the substrate, in a state where the pressure-sensitive adhesive sheets are bonded to the substrate, to form a pellicle frame; and stimulating the pressure-sensitive adhesive sheets to peel off the pressure-sensitive adhesive sheets.
    Type: Application
    Filed: October 26, 2017
    Publication date: February 15, 2018
    Applicants: MITSUI CHEMICALS, INC., TAZMO CO., LTD.
    Inventors: Kazuo KOHMURA, Daiki TANEICHI, Yosuke ONO, Hisako ISHIKAWA, Tsuneaki BIYAJIMA, Yasuyuki SATO, Toshiaki HIROTA
  • Publication number: 20180046072
    Abstract: An illustrative method includes reading in a layout as current layout to be analyzed, splitting the current layout into n sub-layouts, where n is a positive integer, such that each sub-layout fits into a predetermined memory, performing a clustering step for each of the sub-layouts, including scanning the respective sub-layout for features and converting each sub-layout into a set of feature vectors defining individual patterns, searching each set of feature vectors for clusters having predetermined cluster parameters, and selecting m characteristic representatives of patterns from each cluster, where m is a positive integer, merging the characteristic representatives of each of the n sub-layouts into a new single layout, searching the characteristic representatives discovered for the individual sub-layouts for clusters having predetermined cluster parameters, selecting M characteristic representatives of patterns from each cluster, where M is a positive integer, and outputting the characteristic representati
    Type: Application
    Filed: August 10, 2016
    Publication date: February 15, 2018
    Inventor: Andrey Lutich
  • Publication number: 20180046073
    Abstract: A method and system for: forming a first rectangular shape with photomask writing equipment, using a first sub-threshold dosage on a photoresist layer of a photomask substrate; forming an overlapping second rectangular shape with the photomask writing equipment using a second sub-threshold dosage on the photoresist layer, the second rectangular shape being rotated relative to the first rectangular shape to form one of: a hexagonal overlap area and an octagonal overlap area, that exposes the photoresist layer to at least a threshold dosage; and forming a photomask, based on developing the exposed photoresist layer, to provide optical transmission corresponding to the one of: the hexagonal overlap area of at least the threshold dosage and the octagonal overlap area of at least the threshold dosage, for use by a photolithography system to write any of a contact, a via, or a curvilinear shape on an integrated circuit substrate.
    Type: Application
    Filed: August 11, 2016
    Publication date: February 15, 2018
    Applicant: GLOBALFOUNDRIES INC.
    Inventors: JED H. RANKIN, ADAM C. SMITH
  • Publication number: 20180046074
    Abstract: A method is provided for fabricating a photolithographic mask. The method includes providing a transparent substrate; and forming an opaque layer on the transparent substrate. The method also includes writing layout patterns with at least one sub-resolution assistant feature with non-uniform size along a longitudinal direction to increase an adhesion force between the sub-resolution assistant feature with non-uniform size along the longitudinal direction and the transparent substrate in the opaque layer. Further, the method include cleaning residual matters generated by writing the layout patterns in the opaque layer. Further, the method also includes spin-drying the transparent substrate with the layout patterns and the sub-resolution assistant feature with non-uniform size along the longitudinal direction.
    Type: Application
    Filed: October 25, 2017
    Publication date: February 15, 2018
    Inventors: BOXIU CAI, YI HUANG
  • Publication number: 20180046075
    Abstract: A method of manufacturing an imprint master template including forming a cutting line guide at an edge of a first fine pattern unit having an upper surface on which a fine pattern is formed; cutting the wafer substrate by a cleaving process along the cutting line guide so that a cutting surface is formed, the cutting surface having a preliminary second surface where the cutting line guide was formed and a first surface which is formed by the cleaving process; polishing the preliminary second surface to form a second surface which is inclined at a predetermined angle with respect to the first surface; and bonding the first fine pattern unit and the second fine pattern unit to each other with the first surface of the first fine pattern unit facing the first surface of the second fine pattern unit.
    Type: Application
    Filed: March 27, 2017
    Publication date: February 15, 2018
    Inventors: Kang Soo HAN, Moonjung AN, Gugrae JO, Hyungbin CHO
  • Publication number: 20180046076
    Abstract: A three-dimensional printing photocurable composition includes from 20 wt % to 70 wt % of an urethane acrylate component, from 20 wt % to 60 wt % of a multifunctional epoxide component, from 1 wt % to 15 wt % of a monomer component, and from 1 wt % to 8 wt % of a photoinitiator component, based on the total weight of the composition. The urethane acrylate component includes the capping reaction product of an acrylate and an isocyanate terminated prepolymer and the isocyanate-terminated prepolymer is the reaction product of a polyisocyanate and at least one polyol having a molecular weight of at least 3000 g/mol. The multifunctional epoxide component includes one or more multifunctional epoxides. The monomer component includes at least one of a multifunctional acrylate monomer and a multifunctional vinyl ether monomer.
    Type: Application
    Filed: February 25, 2016
    Publication date: February 15, 2018
    Inventors: Christopher S. Letko, William H. Heath, Nathan Wilmot, Sven Claessens, William L. Heaner, IV, Adam C. Colson, Stephen W. King, John G. Pendergast, Jr.
  • Publication number: 20180046077
    Abstract: Non-ionic photo-acid generating (PAG) compounds were prepared that contain an aryl ketone group having a perfluorinated substituent alpha to the ketone carbonyl. The non-polymeric PAGs release a sulfonic acid when exposed to high energy radiation such as deep UV or extreme UV light. The photo-generated sulfonic acid has a low diffusion rate in an exposed resist layer subjected to a post-exposure bake (PEB) at 100° C. to 150° C., resulting in formation of good line patterns after development. At higher temperatures, the PAGs can also undergo a thermal reaction to form a sulfonic acid. The perfluorinated substituent provides improved thermal stability and hydrolytic/nucleophilic stability.
    Type: Application
    Filed: August 12, 2016
    Publication date: February 15, 2018
    Inventors: Takehisa Ishimaru, Satoru Narizuka, Daniel P. Sanders, Ratnam Sooriyakumaran, Hoa D. Truong, Rudy J. Wojtecki
  • Publication number: 20180046078
    Abstract: A method forms a resist underlayer film that has high resistance to dry etching using a gas containing a fluorocarbon. A method for forming a resist underlayer film includes the steps of: applying to a substrate a resist underlayer film-forming composition containing a fullerene derivative in which one to six molecules of malonic acid diester of the following Formula (1): wherein two Rs are each independently a C1-10 alkyl group, are added to one molecule of fullerene, a compound having at least two epoxy groups, and a solvent; and baking the substrate applied with the resist underlayer film-forming composition at least one time at a temperature of 240° C. or higher under an atmosphere of nitrogen, argon, or a mixture thereof.
    Type: Application
    Filed: February 5, 2016
    Publication date: February 15, 2018
    Applicant: NISSAN CHEMICAL INDUSTRIES, LTD.
    Inventors: Ryo KARASAWA, Tetsuya SHINJO, Keisuke HASHIMOTO
  • Publication number: 20180046079
    Abstract: The present invention is a photosensitive resin composition to be used in an etching process in which an etching treatment is conducted with an etching solution containing hydrofluoric acid or ammonium fluoride. The photosensitive resin composition comprises at least (A) an acid-modified epoxy acrylate, (B) a photopolymerization initiator, (C) a blocked isocyanate compound, and (D) a filler. The etching process involves forming a photosensitive resin layer comprising said photosensitive resin composition, on at least one surface of a substrate; exposing and then developing the photosensitive resin layer; baking the photosensitive layer; and conducting an etching treatment with an etching solution containing hydrofluoric acid or ammonium fluoride.
    Type: Application
    Filed: March 16, 2016
    Publication date: February 15, 2018
    Applicant: MITSUBISHI PAPER MILLS LIMITED
    Inventors: Munetoshi IRISAWA, Norihiko GOKAN, Kunihito KAJIYA, Yuji TOYODA, Kunihiro NAKAGAWA
  • Publication number: 20180046080
    Abstract: The present invention relates to a photosensitive composition comprising at least one nanosized fluorescent material and polysiloxane, to a color conversion film, and to a use of the color conversion film in an optical device. The invention further relates to an optical device comprising the color conversion film and a method for preparing the color conversion film and the optical device.
    Type: Application
    Filed: February 5, 2016
    Publication date: February 15, 2018
    Applicants: Merck Patent GmbH, AZ Electronic Materials (Luxembourg) S.a.r.l.
    Inventors: Masayoshi SUZUKI, Tadashi KISHIMOTO, Yuki HIRAYAMA, Stephan DERTINGER, Toshiaki NONAKA, Daishi YOKOYAMA
  • Publication number: 20180046081
    Abstract: A resist underlayer film-forming composition includes a solvent, and a compound comprising an aromatic ring. The solvent includes a first solvent having a normal boiling point of less than 156° C., and a second solvent having a normal boiling point of no less than 156° C. and less than 300° C. The resist underlayer film-forming composition is for use in forming a resist underlayer film to be overlaid on a patterned substrate. A production method of a patterned substrate includes applying the resist underlayer film-forming composition on a patterned substrate to obtain a coating film on the patterned substrate. The coating film is heated to obtain a resist underlayer film. A resist pattern is formed on an upper face side of the resist underlayer film. The resist underlayer film and the substrate are etched using the resist pattern as a mask.
    Type: Application
    Filed: August 9, 2017
    Publication date: February 15, 2018
    Applicant: JSR CORPORATION
    Inventors: Masayuki MIYAKE, Goji WAKAMATSU, Tsubasa ABE, Kazunori TAKANASHI, Kazunori SAKAI
  • Publication number: 20180046082
    Abstract: Techniques herein include a bladder-based dispense system using an elongate bladder configured to selectively expand and contract to assist with dispense actions. This dispense system compensates for filter-lag, which often accompanies fluid filtering for microfabrication. This dispense system also provides a high-purity and high precision dispense unit. A modular hydraulic unit houses the elongate bladder and hydraulic fluid in contact with an exterior surface of the bladder. When pressurized process fluid is in the elongate bladder, hydraulic controls can selectively reduce pressure on the bladder to cause expansion, and then selectively increase hydraulic pressure to assist with a dispense action.
    Type: Application
    Filed: August 11, 2017
    Publication date: February 15, 2018
    Inventors: Anton J. deVilliers, Ronald Nasman, David Travis, James Grootegoed, Norman A. Jacobson, JR.
  • Publication number: 20180046083
    Abstract: Provided downstream of an on-off valve are a needle and a diaphragm that cooperates with the needle. The needle is driven by a motor. A controller causes the motor to move the diaphragm cooperating with the needle for increasing a volume of a flow path downstream of the on-off valve. Accordingly, this allows suck back, leading to prevention of drips of the processing liquid. In addition, the controller causes the motor to move the needle for regulating the flow rate of the processing liquid when the on-off valve is opened. This facilitates flow regulation of the processing liquid by the motor which is current1y made by the operator's sense. Moreover, since prevention of the drips of the processing liquid as well as the flow regulation of the processing liquid are performable with the same motor, a needless configuration is omittable to achieve space saving.
    Type: Application
    Filed: February 12, 2016
    Publication date: February 15, 2018
    Inventor: Masahito KASHIYAMA
  • Publication number: 20180046084
    Abstract: A photoresist pre-baking method, a photoresist pre-baking device and a lithographic apparatus are disclosed. The device includes a heating plate and a temperature controller. The heating plate includes a plurality of heating units, and the heating plate is configured to heat a substrate to be baked through the plurality of heating units, and the temperature controller is electrically connected with each of the heating units, and configured to adjust a heating parameter of each of the heating units of the heating plate, the heating parameter including at least one of a heating temperature and a heating duration.
    Type: Application
    Filed: July 25, 2017
    Publication date: February 15, 2018
    Inventor: Yanchun LU
  • Publication number: 20180046085
    Abstract: Embodiments described herein generally relate to methods for mitigating patterning defects. More specifically, embodiments described herein relate to utilizing field guided post exposure bake processes to mitigate microbridge photoresist defects. An electric field may be applied to a substrate being processed during a post exposure bake process. Photoacid generated as a result of the exposure may be moved along a direction defined by the electric field. The movement of the photoacid may contact microbridge defects and facilitate the removal of the microbridge defects from the surface of a substrate.
    Type: Application
    Filed: October 25, 2017
    Publication date: February 15, 2018
    Inventors: Ludovic GODET, Sang Ki NAM, Christine Y. OUYANG
  • Publication number: 20180046086
    Abstract: Methods are described for removing edge bead on a wafer associated with a resist coating comprising a metal containing resist compositions. The methods can comprise applying a first bead edge rinse solution along a wafer edge following spin coating of the wafer with the metal based resist composition, wherein the edge bead solution comprises an organic solvent and an additive comprising a carboxylic acid, an inorganic fluorinated acid, a tetraalkylammonium compound, or a mixture thereof. Alternatively or additionally, the methods can comprise applying a protective composition to the wafer prior to performing an edge bead rinse. The protective composition can be a sacrificial material or an anti-adhesion material and can be applied only to the wafer edge or across the entire wafer in the case of the protective composition. Corresponding apparatuses for processing the wafers using these methods are presented.
    Type: Application
    Filed: August 11, 2017
    Publication date: February 15, 2018
    Inventors: Mollie Waller, Brian J. Cardineau, Kai Jiang, Alan J. Telecky, Stephen T. Meyers, Benjamin L. Clark
  • Publication number: 20180046087
    Abstract: The invention concerns a numerical calculation procedure of the diffraction of a structure (1) whose numerical model defines the dielectric permittivity at each point comprizing the steps of: definition of a numerical modellization of the diffraction model of a structure including: the splitting of the numerical model of the dielectric permittivity into N numerical models of dielectric permittivity; the determination of the diffraction model of the said layers from the numerical model of this layer; numerical calculation of the diffraction of the structure including: an initial iteration during which one performs: one wave propagation in the direction of layers 1 to N, and one wave propagation in the direction of the layers N to 1, ulterior iterations, each ulterior iteration of index k including: one wave propagation in the direction of layers 2 to N: one wave propagation in the direction of layers N?1 to 1.
    Type: Application
    Filed: February 22, 2016
    Publication date: February 15, 2018
    Applicants: Universite Jean Monnet Saint Etienne, Centre National De la Recherche Scientifique
    Inventors: Wolfgang IFF, Alexandre TISHCHENKO
  • Publication number: 20180046088
    Abstract: Implementations described herein generally relate to methods for leveling a component above a substrate. In one implementation, a test substrate is placed on a substrate support inside of a processing chamber. A component, such as a mask, is located above the substrate. The component is lowered to a position so that the component and the substrate are in contact. The component is then lifted and the particle distribution on the test substrate is reviewed. Based on the particle distribution, the component may be adjusted. A new test substrate is placed on the substrate support inside of the processing chamber, and the component is lowered to a position so that the component and the new test substrate are in contact. The particle distribution on the new test substrate is reviewed. The process may be repeated until a uniform particle distribution is shown on a test substrate.
    Type: Application
    Filed: August 11, 2017
    Publication date: February 15, 2018
    Inventors: Hiroyuki OGISO, Jianhua ZHOU, Zonghui SU, Juan Carlos ROCHA-ALVAREZ, Jeongmin LEE, Karthik Thimmavajjula NARASIMHA, Rick GILBERT, Sang Heon PARK, Abdul Aziz KHAJA, Vinay PRABHAKAR
  • Publication number: 20180046089
    Abstract: In a lithographic apparatus, a localized area of the substrate surface under a projection system is immersed in liquid. The height of a liquid supply system above the surface of the substrate can be varied using actuators. A control system uses feedforward or feedback control with input of the surface height of the substrate to maintain the liquid supply system at a predetermined height above the surface of the substrate.
    Type: Application
    Filed: October 23, 2017
    Publication date: February 15, 2018
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Bob STREEFKERK, Johannes Jacobus Matheus BASELMANS, Henrikus Herman Marie COX, Antonius Theodorus Anna Maria DERKSEN, Sjoerd Nicolaas Lambertus DONDERS, Christiaan Alexander HOOGENDAM, Joeri LOF, Erik Roelof LOOPSTRA, Jeroen Johannes Sophia Maria MERTENS, Frits VAN DER MEDLEN, Johannes Catharinus Hubertus MULKENS, Gerardus Petrus Matthijs VAN NUNEN, Klaus SIMON, Bernardus Antonius SLAGHEKKE, Alexander STRAAIJER, Jan-Gerard Cornelis VAN DER TOORN, Martijn HOUKES
  • Publication number: 20180046090
    Abstract: In an immersion lithography apparatus in which immersion liquid is supplied to a localized space, the space is substantially polygonal in plan substantially parallel to the substrate. In an embodiment, two corners of the space have a radius of curvature no greater than the width of a transition zone between the space configured to contain liquid and a surrounding configured not to contain liquid.
    Type: Application
    Filed: October 23, 2017
    Publication date: February 15, 2018
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Jacobus Johannus Leonardus Hendricus VERSPAY, Hans JANSEN, Marco Koert STAVENGA
  • Publication number: 20180046091
    Abstract: Disclosed is a patterning device configured to pattern a beam of radiation according to a desired pattern during a lithographic process. The patterning device comprises first features configured to form a first target on a substrate during the lithographic process and second features configured to form a second target on the substrate during the lithographic process. The second features are taller, in a direction transverse to the plane of the first and second targets, than the first features, such that the first and second targets have a relative best focus offset.
    Type: Application
    Filed: October 24, 2017
    Publication date: February 15, 2018
    Applicant: ASML Netherlands B.V.
    Inventors: Anton Bernhard VAN OOSTEN, Paul Christiaan HINNEN, Robertus Cornelis Martinus DE KRUIF, Robert John SOCHA
  • Publication number: 20180046092
    Abstract: A linear motor with high heat recovery efficiency that inhibits the rise in surface temperature is offered. The linear motor is disposed in a surrounding member (142) and facing a flow passage (142a) of a liquid for regulating temperature, and is provided with a coil unit (141) having at least a part thereof in contact with the liquid. The coil unit (141) is provided with a coil body (144), a mold layer (143) that covers the coil body and holds it in specific form, and a liquid protection layer (150) that covers the mold layer (143) and has liquid protection properties.
    Type: Application
    Filed: October 19, 2017
    Publication date: February 15, 2018
    Inventors: Shigeru MORIMOTO, Tadahiro Kominami
  • Publication number: 20180046093
    Abstract: A movable body apparatus includes a base member, a movable body that is movable at least two-dimensionally, parallel to a predetermined plane, on the base member, a planar motor of a magnetic levitation method having a stator provided at the base member and a mover provided at the movable body, a measurement system that measures a position of the movable body in a direction parallel to the predetermined plane, and a controller. The controller limits movement of the movable body in the direction parallel to the predetermined plane by applying, to the movable body, a driving force generated by the planar motor, directed from the movable body to the base member in a direction intersecting the predetermined plane.
    Type: Application
    Filed: October 4, 2017
    Publication date: February 15, 2018
    Applicant: NIKON CORPORATION
    Inventor: Tomoki MIYAKAWA
  • Publication number: 20180046094
    Abstract: A liquid supply system for an immersion lithographic projection apparatus is disclosed in which a space is defined between the projection system, a barrier member and a substrate. The barrier member is not sealed such that, during use, immersion liquid is allowed to flow out the space and between the barrier member and the substrate.
    Type: Application
    Filed: October 26, 2017
    Publication date: February 15, 2018
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Helmar VAN SANTEN, Aleksey Yurievich Kolesnychenko
  • Publication number: 20180046095
    Abstract: In a lithographic projection apparatus, a liquid supply system maintains liquid in a space between a projection system of the lithographic projection apparatus and a substrate. A sensor positioned on a substrate table, which holds the substrate, is configured to be exposed to radiation when immersed in liquid (e.g., under the same conditions as the substrate will be exposed to radiation). By having a surface of an absorption element of the sensor, that is to be in contact with liquid, formed of no more than one metal type, long life of the sensor may be obtained.
    Type: Application
    Filed: October 26, 2017
    Publication date: February 15, 2018
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Timotheus Franciscus SENGERS, Sjoerd Nicolaas Lambertus DONDERS, Hans JANSEN, Arjen BOOGAARD
  • Publication number: 20180046096
    Abstract: A measurement device has: a slider which holds a substrate and is movable parallel to the XY plane; a drive system that drives the slider; a position measurement system which emits beams from a head section to a measurement surface in which grating section are provided on the slider, which receives respective return beams of the beams from the measurement surface, and which is capable of measuring position information in at least directions of three degrees of freedom including the absolute position coordinates of the slider; a mark detection system that detects a mark on the substrate; and a controller which detects the marks on the substrate using the mark detection system while controlling the drive of the slider, and which obtains the absolute position coordinates of each mark based on the detection result of each mark and measurement information by the position measurement system at the time of detection.
    Type: Application
    Filed: August 9, 2017
    Publication date: February 15, 2018
    Applicant: NIKON CORPORATION
    Inventor: Yuichi SHIBAZAKI
  • Publication number: 20180046097
    Abstract: A method for pre-aligning a substrate includes the steps of: 1) providing a substrate having a plurality of marks are arranged circumferentially on a surface thereof, wherein each of the plurality of marks consists of at least one first stripe extending in a first direction and at least one second stripe extending in a first direction; 2) aligning a center of the substrate with a given point on a substrate carrier stage; 3) illuminating a mark selected from the plurality of marks on the surface of the substrate with light and obtaining an image of the selected mark; 4) processing the image to obtain first projection data corresponding to the first direction and second projection data corresponding to the second direction; 5) identifying a set of first peak values corresponding to the at least one first stripe of the selected mark from the first projection data and a set of second peak values corresponding to the at least one second stripe of the selected mark from the second projection data; 6) selecting firs
    Type: Application
    Filed: February 26, 2016
    Publication date: February 15, 2018
    Applicant: Shanghai Micro Electronics Equipment (Group) Co., Ltd.
    Inventors: Xiwen ZHOU, Weiwang SUN, Cuixia TIAN, Jiaozeng ZHENG
  • Publication number: 20180046098
    Abstract: An electrophotographic photosensitive member includes a conductive substrate and a photosensitive layer. The photosensitive layer is a single layer. The photosensitive layer contains a charge generating material, a hole transport material, an electron transport material, and a binder resin. The photosensitive layer has a scratch resistance depth of no greater than 0.50 ?m.
    Type: Application
    Filed: August 3, 2017
    Publication date: February 15, 2018
    Applicant: KYOCERA Document Solutions Inc.
    Inventors: Tomofumi SHIMIZU, Keiji MARUO
  • Publication number: 20180046099
    Abstract: An electrophotographic photosensitive member includes a photosensitive layer. The photosensitive layer contains a charge generating material, a hole transport material, and a binder resin. The binder resin contains a polyarylate resin represented by general formula (1). In general formula (1), r and s each represent an integer of at least 0 and no greater than 49 and t and u represents an integer of at least 1 and no greater than 50. Furthermore, r+s+t+u=100 and r+t=s+u. X and Y each represent, independently of one another, a divalent group represented by chemical formula (1-1), (1-2), (1-3), or (1-4).
    Type: Application
    Filed: August 4, 2017
    Publication date: February 15, 2018
    Applicant: KYOCERA Document Solutions Inc.
    Inventors: Jun AZUMA, Kensuke OKAWA, Seiki HASUNUMA, Tomofumi SHIMIZU
  • Publication number: 20180046100
    Abstract: An electrophotographic photosensitive member includes a conductive substrate and a photosensitive layer. The photosensitive layer is a single-layer photosensitive layer. The photosensitive layer contains a charge generating material, a hole transport material, an electron transport material, and a binder resin. The binder resin contains a polyarylate resin. The polyatylate resin is represented by general formula (1). The hole transport material contains a compound represented by general formula (HTM1), (HTM2), (HTM3), (HTM4), (HTM5), (HTM6), or (HTM7). The photosensitive layer has a scratch resistance depth of no greater than 0.50 ?m. The photosensitive layer has a Vickers hardness of at least 17.0 HV.
    Type: Application
    Filed: August 4, 2017
    Publication date: February 15, 2018
    Applicant: KYOCERA Document Solutions Inc.
    Inventors: Keiji MARUO, Tomofumi SHIMIZU, Jun AZUMA
  • Publication number: 20180046101
    Abstract: An electrophotographic photosensitive member includes a conductive substrate and a photosensitive layer. The photosensitive layer is a single-layer photosensitive layer. The photosensitive layer contains a charge generating material, a hole transport material, an electron transport material, and a binder resin. The binder resin contains a polyarylate resin (1). The polyarylate resin is represented by general formula (1). The photosensitive layer has a scratch resistance depth of no greater than 0.50 ?m. The photosensitive layer has a Vickers hardness of at least 17.0 HV.
    Type: Application
    Filed: August 3, 2017
    Publication date: February 15, 2018
    Applicant: KYOCERA Document Solutions Inc.
    Inventors: Tomofumi SHIMIZU, Keiji MARUO, Jun AZUMA
  • Publication number: 20180046102
    Abstract: A liquid developer containing a curable insulating liquid, a cationic polymerization initiator, and a toner particle containing a binder resin and carbon black, wherein the carbon black is basic, or wherein the toner particle contains a carbon black dispersing agent, and the carbon black dispersing agent has a dispersing group and an adsorptive group, and the adsorptive group is an amino group.
    Type: Application
    Filed: August 3, 2017
    Publication date: February 15, 2018
    Inventors: Naohiko Tsuchida, Yasutaka Akashi, Yuzo Tokunaga
  • Publication number: 20180046103
    Abstract: A carrier core material includes, a main component, a material represented by a composition formula MnXMYFe3-(X+Y)O4 (where M is selected from Mg, Ti, Cu, Zn and Ni, 0<X, 0?Y, 0<X+Y<1), in which 0.1 to 1.0 mol % of at least one of Sr element and Ca element is contained as the total amount by conversion to SrO or CaO and in which the frequency of a grain whose length RSm is equal or more than 8.0 ?m among grains appearing on the surface of particles of the carrier core material is equal to or less than 2.0 number percent. In this way, the degradation of a carrier caused by long-term use such as the separation of a coating resin is significantly reduced, stable charging performance is maintained and the cracking or chipping of the particles is reduced.
    Type: Application
    Filed: March 22, 2016
    Publication date: February 15, 2018
    Applicants: DOWA ELECTRONICS MATERIALS CO., LTD., DOWA IP CREATION CO., LTD.
    Inventors: Yuto KAMAI, Takeshi KAWAUCHI
  • Publication number: 20180046104
    Abstract: There is provided a toner including toner base particles and an external additive in which the external additive is prevented from being buried in the base particles. The toner can maintain a high transfer efficiency over an extended period of use. The toner includes: (1) toner base particles containing a cycloolefin copolymer and a polyethylene; or (2) toner base particles whose surfaces contain a resin having an elastic deformation rate of 70% or more and a melting temperature of 125.0° C. or less.
    Type: Application
    Filed: October 25, 2017
    Publication date: February 15, 2018
    Inventors: Makoto Fukatsu, Manami Haraguchi, Atsushi Nakamoto, Masayoshi Kato, Kazuhisa Kemmochi, Takahiro Kawamoto, Takeshi Yamamoto
  • Publication number: 20180046105
    Abstract: Provided is a curable liquid developer having sufficient fixability while being a curable liquid developer containing a polymer material. The curable liquid developer includes: a cationic polymerizable liquid monomer including a vinyl ether monomer; and toner particles insoluble in the cationic polymerizable liquid monomer, in which the curable liquid developer further includes a polymerizable polyolefin including a polyolefin in a main chain thereof, the polymerizable polyolefin having a vinyl ether group at at least one terminal of the polyolefin.
    Type: Application
    Filed: April 20, 2016
    Publication date: February 15, 2018
    Inventors: Hiroshi Tanabe, Junji Ito, Yasuhiro Aichi, Jun Shirakawa
  • Publication number: 20180046106
    Abstract: Provided is a liquid developer that gives a high image density, has a high resistance, suppresses the appearance of image blurring, can be reused, is readily cured by ultraviolet radiation, and can accommodate higher process speeds. This liquid developer contains a carrier liquid, a toner particle insoluble in the carrier liquid, and a compound with the following formula (1) [In formula (1), R1 and R2 each independently represent an alkyl group having at least 13 and not more than 23 carbons.].
    Type: Application
    Filed: May 27, 2016
    Publication date: February 15, 2018
    Inventors: Jun Shirakawa, Junji Ito, Yasuhiro Aichi
  • Publication number: 20180046107
    Abstract: A part material for printing three-dimensional parts with an electrophotography-based additive manufacturing system, the part material including a composition having a high-performance thermoplastic material and a charge control agent. The part material is provided in a powder form having a controlled particle size, and is configured for use in the electrophotography-based additive manufacturing system having a layer transfusion assembly for printing the three-dimensional parts in a layer-by-layer manner.
    Type: Application
    Filed: October 6, 2017
    Publication date: February 15, 2018
    Inventors: James E. Orrock, Steven A. Chillscyzn, Trevor I. Martin
  • Publication number: 20180046108
    Abstract: A method of converting a CMYK color toner printer to a CMYX color toner printer for under print printing in a single pass, comprising the steps: providing a color toner printer with four toner printing cartridges: a cyan toner printing cartridge, a magenta toner printing cartridge, a yellow toner printing cartridge, and a black toner printing cartridge; wherein the black toner printing cartridge is in a first toner cartridge position; removing the back toner printing cartridge from the first toner cartridge position; providing a non-standard toner printing cartridge; installing the non-standard toner printing cartridge into the first toner cartridge position; providing a raster image processor software; wherein the raster image processor software is configured to remap the four toner printing cartridges of the color toner printer and allows the color toner printer to print a layer of non-standard toner under an image in a single pass; and wherein the image is printed from at least one of a cyan toner, a yello
    Type: Application
    Filed: October 2, 2017
    Publication date: February 15, 2018
    Applicant: UI Technologies, Inc.
    Inventors: Michael Raymond Josiah, Joseph Dovi
  • Publication number: 20180046109
    Abstract: An image forming apparatus includes a control unit configured to change, to a light quantity different from a plurality of reference light quantities, a light quantity per unit area of a surface of an electrical charge retention layer of a photosensitive member when an exposure unit exposes the surface in correspondence with a plurality of gradation levels, based on a plurality of exposure potentials corresponding to the plurality of gradation levels which is acquired by exposing with the exposure unit the surface with each of the plurality of reference light quantities corresponding to the plurality of gradation levels, and measuring with the measurement unit the plurality of exposure potentials of the photosensitive member which is formed by the exposure with the plurality of reference light quantities.
    Type: Application
    Filed: August 7, 2017
    Publication date: February 15, 2018
    Inventors: Norihito Naito, Masataka Mochizuki, Takayoshi Kihara, Kosuke Ikada
  • Publication number: 20180046110
    Abstract: A developer case (10) according to the present invention includes a case main body (30), a rotator (55, 56), a coupling (57), and a holder (49, 70, 80, 90). The case main body (30) contains developer. The rotator (55, 56) is rotatably arranged between a pair of sidewalls (43F, 43B) of the case main body (30). The pair of sidewalls (43F, 43B) are opposed to each other. The coupling (57) is coupled to the rotator (55, 56) with at least one of the pair of sidewalls (43F, 43B) in between. The holder (49, 70, 80, 90) protrudes on an inner face of at least the one of the pair of sidewalls (43F, 43B) and holds an end in an axis direction of the rotator (55, 56) at a position where the end is capable of coupling to the coupling (57).
    Type: Application
    Filed: December 11, 2015
    Publication date: February 15, 2018
    Applicant: KYOCERA Document Solutions Inc.
    Inventor: Tatsuhiko YOSHII
  • Publication number: 20180046111
    Abstract: A developer storage container includes a container body having a developer discharge port, a shaft body extending in a first direction and rotatably disposed in the container body, and a stirring member to be attached to the shaft body. The stirring member is made of a flexible film-like member and stirs the developer stored in the container body by rotating according to the rotation of the shaft body. The stirring member includes an attaching portion serving as an area part for attachment to the shaft body, and a stirring piece having a base portion extending from the attaching portion toward the inner peripheral surface of the container body in a second direction perpendicular to the first direction and an extending portion extending from the base portion in a third direction intersecting with the second direction to approach the developer discharge port.
    Type: Application
    Filed: August 9, 2017
    Publication date: February 15, 2018
    Inventor: Daisuke Eto
  • Publication number: 20180046112
    Abstract: An image forming apparatus includes a cartridge storage portion that is installed in an image forming apparatus main body, and a toner cartridge that is configured so as to be able to be inserted into and removed from the cartridge storage portion. The cartridge storage portion has a storage opening that receives the toner cartridge, and has a gap between an end part of the toner cartridge and the storage opening, through which the end part of the toner cartridge is not able to be held, when the toner cartridge is stored in the cartridge storage portion.
    Type: Application
    Filed: October 12, 2017
    Publication date: February 15, 2018
    Inventor: Takeshi OKUDA
  • Publication number: 20180046113
    Abstract: A cleaner includes first and second cleaning plates. The first cleaning plate includes a first free end and performs cleaning by causing the first free end to be in contact with an outer circumferential surface of a cylindrical second transfer rotating body including an elastic layer, so that the outer circumferential surface is elastically deformed. The second cleaning plate includes a second free end and performs cleaning by causing the second free end to be in contact with a portion of the outer circumferential surface downstream of, in a rotational direction of the second transfer rotating body, a position where the first free end is in contact with the outer circumferential surface and where the outer circumferential surface is elastically deformed due to the contact of the outer circumferential surface with the first free end so as to have a smallest surface curvature in the outer circumferential surface.
    Type: Application
    Filed: April 18, 2017
    Publication date: February 15, 2018
    Applicant: FUJI XEROX CO., LTD.
    Inventors: Masahiro KATAHIRA, Yoshinori TAKAHASHI, Yuki NAGAMORI