Patents Issued in August 14, 2018
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Patent number: 10048552Abstract: This invention envisages flexible wiring substrate terminals serving to connect with the wires for preventing dielectric breakdown caused by static electricity during the manufacturing process, and reducing the number of the flexible wiring substrate terminals. On a mother TFT substrate, signal lines extend over each liquid crystal cell in a manner flanking a scribe line between the adjacent liquid crystal cells. The signal lines of each liquid crystal cell are connected with connecting lines striding the scribe line. This reduces the number of static electricity countermeasure wires extending from the flexible wiring substrate terminals of each liquid crystal cell. Once completed, the individual liquid crystal cells are separated from one another, with no adverse effects caused by the connecting lines.Type: GrantFiled: August 11, 2016Date of Patent: August 14, 2018Assignee: Japan Display Inc.Inventors: Tomonori Nishino, Syou Yanagisawa, Kentaro Agata, Hiroyuki Abe, Takayuki Suzuki
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Patent number: 10048553Abstract: The present invention provides a BOA liquid crystal display panel and a manufacturing method thereof. The BOA liquid crystal display panel is structured to have a TFT (T) entirely located on a first black matrix (12) and further, a second black matrix (17) is arranged between the TFT (T) and the passivation protection layer (18) such that the second black matrix (17) and the first black matrix (12) completely enclose the TFT (T) to block light emitting from a backlight module located under an array substrate (1) in a direction toward an active layer (14) and also to block reflecting light irradiating the active layer (14) from lateral sides and a top side to better prevent light irradiating the active layer of the TFT for preventing photo leakage current, ensuring stable performance of the TFT device, and improving image displaying quality.Type: GrantFiled: August 21, 2015Date of Patent: August 14, 2018Assignee: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.Inventor: Mian Zeng
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Patent number: 10048554Abstract: A liquid crystal display includes pixels including a display area that includes a thin film transistor forming area connected to a corresponding data line among data lines, a corresponding gate line among gate lines, and a reference voltage line, two low gray subpixel areas, and one high gray subpixel area disposed between the two low gray subpixel areas, a data driver supplying data signals corresponding to the pixels to the data lines, a gate driver supplying gate voltages corresponding to the pixels to the gate lines, and a voltage supplier supplying a reference voltage to the two low gray subpixel area of the pixels through the reference voltage line, where the reference voltage line extends in a vertical direction along a boundary formed by the high gray subpixel and a first low gray subpixel adjacent to the thin film transistor forming area among the two low gray subpixels.Type: GrantFiled: January 25, 2016Date of Patent: August 14, 2018Assignee: SAMSUNG DISPLAY CO., LTD.Inventors: Yoo Mi Ra, Jae Won Kim, Kyung-Ho Park
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Patent number: 10048555Abstract: An array substrate includes: a first metal area disposed at an edge portion of the array substrate and electrically connected with a common electrode line or common electrodes; a second metal area disposed at the edge portion of the array substrate, corresponding to and insulated from the first metal area, and configured for access of a stabilized voltage that is a fixed voltage. At least one capacitor is formed by the first metal area and the second metal area. The array substrate can obtain more stable pixel common electrode voltage.Type: GrantFiled: October 1, 2014Date of Patent: August 14, 2018Assignees: BOE TECHNOLOGY GROUP CO., LTD., HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD.Inventor: Rongcheng Liu
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Patent number: 10048556Abstract: An array substrate and a manufacturing method for the same. The array substrate includes a substrate, and multiple gate lines, data lines and common electrode lines. The gate lines are disposed on a first surface, and are insulated from the multiple gate lines by a first insulation layer. Among two adjacent gate lines and data lines, one pixel region is defined. The array substrate further includes a thin-film transistor, a common electrode and a pixel electrode. The thin-film transistor includes a gate electrode, a first insulation layer, a channel layer, a source electrode and a drain electrode. The multiple common electrode and gate lines are parallel and are transparent conductive layers. The channel layer, the source electrode, the drain electrode and the pixel electrode are disposed on the first insulation layer. The pixel electrode corresponds to the common electrode and electrically connected to the drain electrode.Type: GrantFiled: May 13, 2016Date of Patent: August 14, 2018Assignee: Shenzhen China Star Optoelectronics Technology Co., LtdInventor: Xiangyang Xu
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Patent number: 10048557Abstract: An LCD array substrate, an LCD panel and an LCD pixel circuit are disclosed. The LCD array substrate includes: a substrate and a plurality of gate lines and data lines, wherein the gate lines and the data lines are crossed with each other to form a plurality of pixel units; each of the pixel units is provided with a pixel electrode, a first thin-film transistor, and a connecting switch controlled by the corresponding gate line; the switch is controlled to be turned on.Type: GrantFiled: March 17, 2017Date of Patent: August 14, 2018Assignee: Shenzhen China Star Optoelectronics Technology Co., Ltd.Inventor: Liyang An
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Patent number: 10048558Abstract: An object of the invention is to provide a circuit technique which enables reduction in power consumption and high definition of a display device. A switch controlled by a start signal is provided to a gate electrode of a transistor, which is connected to a gate electrode of a bootstrap transistor. When the start signal is input, a potential is supplied to the gate electrode of the transistor through the switch, and the transistor is turned off. The transistor is turned off, so that leakage of a charge from the gate electrode of the bootstrap transistor can be prevented. Accordingly, time for storing a charge in the gate electrode of the bootstrap transistor can be shortened, and high-speed operation can be performed.Type: GrantFiled: March 6, 2017Date of Patent: August 14, 2018Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Atsushi Umezaki, Hiroyuki Miyake
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Patent number: 10048559Abstract: The present disclosure provides an array substrate. The array substrate includes a substrate having a display region with a plurality of pixel regions, each pixel region having two or more first regions; a common electrode line between two adjacent pixel regions; a gate line; a data line intersecting with the gate line; at least one of the gate line and the data line being in a second region between two adjacent first regions; and a pixel electrode having a hollowed-out pattern within a corresponding first region, pixel electrodes corresponding to the two or more first regions being a pixel electrode unit.Type: GrantFiled: October 10, 2016Date of Patent: August 14, 2018Assignees: BOE TECHNOLOGY GROUP CO., LTD, HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO. LTD.Inventor: Jideng Zhou
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Patent number: 10048560Abstract: Aspects of the present disclosure involve a transparent structure. The structure may include at least one light source, a transparent light-carrying guide layer optically coupled with the at least one light source. The structure may include refractive layers where a light absorbing feature is operably associated with the light-carrying guide layer to absorb any light not internally reflected in the light guide layer, at least adjacent the light source.Type: GrantFiled: December 1, 2016Date of Patent: August 14, 2018Assignee: Apple Inc.Inventors: Clarisse Mazuir, Matthew E. Last, Ryan J. Garrone, Budhadipta Dan, Khadijeh Bayat, Gregory A. Cohoon, Jack E. Graves
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Patent number: 10048561Abstract: A method of controlling tint of a tintable window to account for occupant comfort in a room of a building. The tintable window is between the interior and exterior of the building. The method predicts a tint level for the tintable window at a future time based on a penetration depth of direct sunlight through the tintable window into the room at the future time and space type in the room. The method also provides instructions over a network to transition tint of the tintable window to the tint level.Type: GrantFiled: November 9, 2016Date of Patent: August 14, 2018Assignee: View, Inc.Inventor: Stephen Clark Brown
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Patent number: 10048562Abstract: This invention relates to electrophoretic fluid comprising solvents, a highly absorbing dye, and charged particles of different color, and electrophoretic display devices comprising such fluids.Type: GrantFiled: June 13, 2013Date of Patent: August 14, 2018Assignee: Merck Patent GmbHInventor: Nathan Smith
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Patent number: 10048563Abstract: A first electro-optic display comprises first and second substrates, and an adhesive layer and a layer of electro-optic material disposed between the first and second substrates, the adhesive layer comprising a mixture of a polymeric adhesive material and a hydroxyl containing polymer having a number average molecular weight not greater than about 5000. A second electro-optic display is similar to the first but has an adhesive layer comprising a thermally-activated cross-linking agent to reduce void growth when the display is subjected to temperature changes. A third electro-optic display, intended for writing with a stylus or similar instrument, is produced by forming a layer of an electro-optic material on an electrode; depositing a substantially solvent-free polymerizable liquid material over the electro-optic material; and polymerizing the polymerizable liquid material.Type: GrantFiled: April 22, 2015Date of Patent: August 14, 2018Assignee: E Ink CorporationInventors: Richard J. Paolini, Jr., Michael D. McCreary, Charles Howie Honeyman, Bin Wu
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Patent number: 10048564Abstract: A first electro-optic display comprises first and second substrates, and an adhesive layer and a layer of electro-optic material disposed between the first and second substrates, the adhesive layer comprising a mixture of a polymeric adhesive material and a hydroxyl containing polymer having a number average molecular weight not greater than about 5000. A second electro-optic display is similar to the first but has an adhesive layer comprising a thermally-activated cross-linking agent to reduce void growth when the display is subjected to temperature changes. A third electro-optic display, intended for writing with a stylus or similar instrument, is produced by forming a layer of an electro-optic material on an electrode; depositing a substantially solvent-free polymerizable liquid material over the electro-optic material; and polymerizing the polymerizable liquid material.Type: GrantFiled: April 22, 2015Date of Patent: August 14, 2018Assignee: E Ink CorporationInventors: Richard J. Paolini, Jr., Michael D. McCreary, Charles Howie Honeyman, Bin Wu
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Patent number: 10048565Abstract: An optical modulation device includes: a first substrate and a second substrate that face each other; and a liquid crystal layer provided between the first substrate and the second substrate that includes a plurality of liquid crystal molecules. The first substrate includes a plurality of unit regions, a common electrode and a first aligner, and the second substrate includes a plurality of unit regions, a plurality of upper-plate electrodes that include a plurality of first electrodes extending in a first direction and a plurality of second electrodes extending in a second direction crossing the first direction, and a second aligner.Type: GrantFiled: January 14, 2016Date of Patent: August 14, 2018Assignee: SAMSUNG DISPLAY CO., LTD.Inventor: Kyung Ho Jung
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Patent number: 10048566Abstract: An apparatus and method that reduces laser speckle by using stimulated Raman scattering in an optical fiber. The fiber core diameter and length are selected to achieve a desired output color. An adjustable despeckler is formed by combining two optical fibers in parallel and adjusting the amount of light in each path.Type: GrantFiled: December 23, 2013Date of Patent: August 14, 2018Inventors: Barret Lippey, Ian Turner, William Beck, Katherine Snell
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Patent number: 10048567Abstract: An electronic light synthesizer electronically synthesizes supercontinuum light and includes: a microwave modulator that: receives a continuous wave light including an optical frequency; modulates the continuous wave light at a microwave repetition frequency; and produces a frequency comb modulated at the microwave repetition frequency; a self-phase modulator that: receives the frequency comb; spectrally broadens an optical wavelength range of the frequency comb; and produces broadened light modulated at the microwave repetition frequency; an optical filter that: receives the broadened light from the self-phase modulator; and optically filters electronic noise in the broadened light; and a supercontinuum generator that: receives the broadened light from the optical filter; spectrally broadens the optical wavelength range of the broadened light; and produces supercontinuum light modulated at the microwave repetition frequency.Type: GrantFiled: March 20, 2017Date of Patent: August 14, 2018Assignee: THE UNITED STATES OF AMERICA, AS REPRESENTED BY THE SECRETARY OF COMMERCEInventors: Scott Papp, Scott Diddams, Katja Beha, Daniel Cole
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Patent number: 10048568Abstract: A nonlinear nanocomposite optical-element comprising a nanocomposite comprising one or more optically nonlinear (NLO) nanofillers dispersed in a cured organic-matrix. The NLO nanofillers have a high ?(3) susceptibility relative to a linear nanofiller. The distribution of the NLO nanofiller has a nanofiller gradient that changes based on optical radiation intensity.Type: GrantFiled: June 29, 2016Date of Patent: August 14, 2018Assignee: Vadient Optics LLCInventor: George Williams
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Patent number: 10048569Abstract: A VCM is disclosed, the VCM including a rotor having a first driving unit and arranged therein with a lens, a stator having a second driving unit wrapping the first driving unit and being opposite to the first driving unit, a base supporting the stator and having an opening formed at a position corresponding to that of the lens, a connection terminal including a pair of first and second connection terminals arranged at an upper surface of the base, and an elastic member including a first elastic member coupled to the rotor and electrically connected the first connection terminal and a second elastic member coupled to the rotor and electrically connected the second connection terminal.Type: GrantFiled: October 19, 2017Date of Patent: August 14, 2018Assignee: LG INNOTEK CO., LTD.Inventors: Seong Min Lee, Sang Ok Park, Jun Taek Lee
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Patent number: 10048570Abstract: In certain embodiments, a video camera system includes a modular attachment to couple to a video camera housing, the modular attachment including a slot extending into the modular attachment and a base support including a ball-and-socket joint providing a range of motion for the base support and a tongue fixed to the ball-and-socket joint and extending therefrom, where the slot is configured to receive the tongue such that the modular attachment couples and secures to the base support according to a first friction, and where an orientation of the battery pack with respect to the base support is adjustable according to the range of motion of the ball-and-socket joint according to a second friction. The second friction can be greater than the first friction such that coupling or decoupling the battery pack from the base support does not cause the ball-and-socket joint to rotate.Type: GrantFiled: May 1, 2017Date of Patent: August 14, 2018Assignee: Logitech Europe S.A.Inventors: Andrew Gartrell, Aron Michael Rosenberg, Gaurav Bradoo, Timucin Kip
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Patent number: 10048571Abstract: An action camera having a camera body joined to the cover, at least one optical unit disposed inside the cavity of the cover, and connection means used to connect the cover to the base support in such manner that the cover rotates with respect to the base support around an axis. The cover being a cap shaped as a portion of geoid cut at a parallel of 50°-60° in such a manner that the cap has a basically flat upper surface and a lateral surface that is curved.Type: GrantFiled: July 22, 2015Date of Patent: August 14, 2018Assignee: MONDO NOVO ELECTRONICS SOCIETA' A RESPONSABILITA' LIMITATAInventor: Marco Ciccolini
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Patent number: 10048572Abstract: A camera cover includes a cover outer surface which is a convex curved surface of which a lowermost part in a vertical direction is downwardly projected in the vertical direction; a first region which is provided at a predetermined radius around a substantially lowermost point of the convex curved surface; and a second region which is provided on the cover outer surface other than at the first region. The second region includes a first hydrophilic region having hydrophilic properties, and the first region has lower hydrophilic properties than those of the second region.Type: GrantFiled: November 1, 2016Date of Patent: August 14, 2018Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.Inventors: Hideki Yasuda, Toyokazu Yoshino
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Patent number: 10048573Abstract: In an imaging section (imaging device), optical filters constituting an optical filter device are inserted and extracted, and an aperture varies an f-number in accordance with the insertion and the extraction of the optical filters. Thus, during the writing operation to the surface of the projection screen, namely during the interactive projector operation, entering of the light in the wavelength band other than that of the detected light DL is suppressed while capturing the detected light DL with the necessary light intensity, and during an alignment (a calibration), the axial chromatic aberration caused by the difference in wavelength band between the pattern image light GL as the image light and the detected light DL is suppressed to achieve an improvement in accuracy.Type: GrantFiled: September 21, 2017Date of Patent: August 14, 2018Assignee: SEIKO EPSON CORPORATIONInventor: Makoto Otani
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Patent number: 10048574Abstract: An embodiment provides an electronic device, including: a support arm; a base portion connected to one end of the support arm; a head portion connected to the other end of the support arm; a projector disposed within the head portion; and a projector adjustment element that adjusts an image projected by the projector; wherein a portion of the projector adjustment element is exposed on an underside of the head portion. Other embodiments are described and claimed.Type: GrantFiled: March 30, 2016Date of Patent: August 14, 2018Assignee: Lenovo (Beijing) LimitedInventor: Yulong Xu
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Patent number: 10048575Abstract: According to the present invention, a projection type image display apparatus enables control of a large amount of light masking through a light-masking unit while maintaining a uniform illumination distribution in an area to be illuminated by the illumination light. The apparatus uses two array lenses on which lens cells are arranged in matrix form, where light-masking unit masks the array lens installed on the light source side in their particular area. The light-masking unit adjusts the amount of light emitted from the light source. The light-masking area of lens cells adjacent to lens cells closest to an optical axis is made smaller than the light-masking area of other cells.Type: GrantFiled: July 17, 2017Date of Patent: August 14, 2018Assignee: MAXELL, LTD.Inventors: Takuya Shimizu, Kentaro Kato
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Patent number: 10048576Abstract: The present disclosure relates to a laser light source and a projection display device. The laser light source includes: N groups of laser devices, N convex lenses, a concave lens and at least one reflector component; each convex lens corresponds to a group of laser devices, and is configured to converge light beams emitted by the corresponding group of laser devices; each reflector component corresponds to at least one convex lens and is disposed in a emergent light direction of a corresponding convex lens, and the concave lens is disposed in a emergent light direction of the at least one reflector component; and an emergent light beam of the convex lens corresponding to each reflector component passes through the reflector component and then arrives at the concave lens.Type: GrantFiled: December 23, 2014Date of Patent: August 14, 2018Assignees: HISENSE CO., LTD., HISENSE USA CORPORATION, HISENSE INTERNATIONAL CO., LTD.Inventors: Hongyan Liu, Xianrong Liu, Wei Li
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Patent number: 10048577Abstract: An imaging apparatus includes an omnidirectional imaging unit that captures and generates an image of a visual field all around an axis as omnidirectional image data; an image converter that converts at least a part of the omnidirectional image data, which is generated by the omnidirectional imaging unit, to image data having a rectangular display area and thereby generates conversion image data; and a display unit that displays an image corresponding to the conversion image data, which is generated by the image converter. The omnidirectional image data forms an annular shape.Type: GrantFiled: July 13, 2015Date of Patent: August 14, 2018Assignee: Olympus CorporationInventors: Shinsuke Homma, Hiroshi Kodama, Ryosuke Mochizuki
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Patent number: 10048578Abstract: A method of identifying repeating design cells in a layout is disclosed. The method includes: providing a layout including a plurality of first leaf cells and a plurality of second leaf cells; identifying a plurality of groups each consisting of overlapping first and second leaf cells; for each of the groups, selecting a first or second leaf cell as an observational cell and establishing a coordinate system originated at a single reference position of the observational cell, thereby obtaining a plurality of coordinates of the overlapping first and second cells; for each of the groups, sorting the coordinates and generating a hash; and identifying ones of the groups having identical hashes as repeating design cells.Type: GrantFiled: December 22, 2015Date of Patent: August 14, 2018Assignee: Shanghai Huahong Grace Semiconductor Manufacturing CorporationInventors: Xiaoliang Jin, Zheng Zhong, Chunyu Yuan
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Patent number: 10048579Abstract: The disclosure is related to a photo-alignment method, comprising the following steps. A top panel and a bottom panel each with an alignment film are provided; a mask plate for shielding the top panel and the bottom panel is provided, and a transparent section of the mask plate is disposed; an ultraviolet is emitted along a first incident direction by the mask plate for exposing the alignment film of the top panel and the bottom panel; the transparent section of the mask plate is adjusted, an ultraviolet is emitted along a second incident direction by the mask plate for exposing the alignment film of the top panel and the bottom panel. The manufacture of the alignment film in the whole liquid crystal display device can be accomplished by a mask plate undergoing exposure twice, so that the exposure times decrease and the process is simplified.Type: GrantFiled: May 8, 2017Date of Patent: August 14, 2018Assignee: Shenzhen China Star Optoelectronics Technology Co., LtdInventor: Jie Sun
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Patent number: 10048580Abstract: The present invention provides a halftone mask comprising an assist pattern and a manufacturing method of the halftone mask, which uses an ArF excimer laser as an exposing source, is used for a projection exposure by an off axis illumination, does not resolve the assist pattern while keeping the focal depth magnification effect as the assist pattern, and may form a transferred image having high contrast of a main pattern.Type: GrantFiled: November 2, 2016Date of Patent: August 14, 2018Assignee: DAI NIPPON PRINTING CO., LTD.Inventors: Takaharu Nagai, Hiroshi Mohri, Yasutaka Morikawa, Katsuya Hayano
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Patent number: 10048581Abstract: Arrangement information regarding shot areas is obtained in an imprinting method. When a pattern is sequentially formed in the shot areas, the attraction force of a first attraction area is reduced to less than that of the second attraction area. After the pattern is formed in the shot area corresponding to the first attraction area, the attraction forces of the first and second attraction areas are changed. The position information regarding the shot area corresponding to the second attraction area is obtained, which is compared with the position information regarding the shot area corresponding to the second attraction area based on the arrangement information. If the difference between the compared position information is a threshold value or less, positioning of a substrate and a mold is achieved using the arrangement information. If the difference is greater than the threshold value, the arrangement information regarding the shot areas is obtained again.Type: GrantFiled: July 21, 2014Date of Patent: August 14, 2018Assignee: CANON KABUSHIKI KAISHAInventor: Hiroshi Sato
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Patent number: 10048582Abstract: A photo-imprinting resin composition, a photo-imprinting resin film and a patterning process are provided. The photo-imprinting resin composition includes a novolac resin; a monomer having acrylic group, a polymer having acrylic group or a combination thereof; and a radical type photopolymerization initiator. The novolac resin has a Mw of 500 to 50000. The novolac resin does not react with the monomer having acrylic group nor the polymer having acrylic group described above.Type: GrantFiled: March 30, 2016Date of Patent: August 14, 2018Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTEInventors: Yaw-Ting Wu, Ping-Chen Chen
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Patent number: 10048583Abstract: Provided is a method for manufacturing a conductive pattern forming member that is formed on a substrate and that has excellent resistance to ion migration between a conductive pattern and a photosensitive resin layer, while suppressing generation of residues in the dissolution and removal of unexposed portions.Type: GrantFiled: August 23, 2017Date of Patent: August 14, 2018Assignee: TORAY INDUSTRIES, INC.Inventors: Tsukuru Mizuguchi, Tomotaka Kawano
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Patent number: 10048584Abstract: A thinner composition includes propyleneglycol alkylether acetate, cycloketone, and methyl 2-hydroxy isobutyrate. The thinner composition has excellent EBR, RRC, and rework properties, as well as effects of improving photoresist application uniformity, and in particular, exhibiting excellent solubility to photoresist having a high polarity, so as to be applicable to various photoresists.Type: GrantFiled: August 30, 2016Date of Patent: August 14, 2018Assignee: DONGWOO FINE-CHEM CO., LTD.Inventors: Cheol Min Choi, In Kak Song, Kyong Ho Lee
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Patent number: 10048585Abstract: A resin composition for forming an insulating film including a polymer having a structural unit of the following formula (1a) and a structural unit of the following formula (1b); and an organic solvent; wherein T0 is a divalent organic group containing at least one arylene group in which at least one hydrogen atom is substituted with an amino group; and T1 is a divalent organic group containing at least one arylene group having at least one substituent, wherein the substituent is a substituent of the following formula (2); and wherein Z is a divalent, aliphatic, aromatic, or alicyclic group optionally having a substituent.Type: GrantFiled: March 9, 2016Date of Patent: August 14, 2018Assignee: NISSAN CHEMICAL INDUSTRIES, LTD.Inventors: Mamoru Tamura, Tomoyuki Enomoto
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Patent number: 10048586Abstract: A radiation-sensitive resin composition includes a first polymer including an acid-labile group, an acid generator to generate an acid upon exposure to radiation, and a second polymer including a fluorine atom and a functional group shown by a general formula (x). The second polymer has a fluorine atom content higher than a fluorine atom content of the first polymer. R1 represents an alkali-labile group. A represents an oxygen atom, —NR?—, —CO—O—# or —SO2—O—##, wherein the oxygen atom represented by A is not an oxygen atom bonded directly to an aromatic ring, a carbonyl group, or a sulfoxyl group, R? represents a hydrogen atom or an alkali-labile group, and “#” and “##” each indicate a bonding hand bonded to R1. -A-R1??(x).Type: GrantFiled: February 29, 2016Date of Patent: August 14, 2018Assignee: JSR CORPORATIONInventors: Yuusuke Asano, Mitsuo Sato, Hiromitsu Nakashima, Kazuki Kasahara, Yoshifumi Oizumi, Masafumi Hori, Takanori Kawakami, Yasuhiko Matsuda, Kazuo Nakahara
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Patent number: 10048587Abstract: An apparatus for dispensing a liquid onto a substrate may comprise a reservoir for storing the liquid to be dispensed; a filter comprising an inlet and an outlet, the filter inlet in fluidic communication with the reservoir via a first valve; a dosing pump comprising an inlet, a first outlet, and a second outlet, the dosing pump inlet in fluidic communication with the reservoir and the dosing pump second outlet in fluidic communication with the filter inlet via a second valve, the dosing pump configured to dose an amount of the liquid and pump the liquid; and a dispense nozzle in fluidic communication with the dosing pump first outlet, the dispense nozzle configured to dispense the liquid onto the substrate.Type: GrantFiled: May 15, 2015Date of Patent: August 14, 2018Assignee: TOKYO ELECTRON LIMITEDInventors: Michael Andrew Carcasi, Wallace Paul Printz, Joshua Steven Hooge
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Patent number: 10048588Abstract: By a lithographic printing plate precursor including a support having provided thereon an image-recording layer capable of forming an image by supplying at least any of printing ink and dampening water on a printing machine after image exposure to remove an unexposed area thereof, wherein the image-recording layer contains an infrared absorbing agent, a polymerization initiator, a polymerizable compound and a polysaccharide having a sulfonic acid group or a group made by a salt thereof and a plate making method of a lithographic printing plate using the same, a lithographic printing plate precursor which exhibits good development property while maintaining printing durability of a lithographic printing plate after development and a plate making method of a lithographic printing plate using the same can be provided.Type: GrantFiled: September 30, 2016Date of Patent: August 14, 2018Assignee: FUJIFILM CorporationInventor: Genki Takanashi
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Patent number: 10048589Abstract: Embodiments described herein generally relate to methods for mitigating patterning defects. More specifically, embodiments described herein relate to utilizing field guided post exposure bake processes to mitigate microbridge photoresist defects. An electric field may be applied to a substrate being processed during a post exposure bake process. Photoacid generated as a result of the exposure may be moved along a direction defined by the electric field. The movement of the photoacid may contact microbridge defects and facilitate the removal of the microbridge defects from the surface of a substrate.Type: GrantFiled: October 25, 2017Date of Patent: August 14, 2018Assignee: Applied Materials, Inc.Inventors: Ludovic Godet, Sang Ki Nam, Christine Y. Ouyang
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Patent number: 10048590Abstract: Provided is a photoresist that includes a polymer having a backbone that is breakable and a photo acid generator that is free of bonding from the polymer. Further, provided is a method of fabricating a semiconductor device. The method includes providing a device substrate. A material layer is formed over the substrate. A photoresist material is formed over the material layer. The photoresist material has a polymer that includes a backbone. The photoresist material is patterned to form a patterned photoresist layer. A fabrication process is then performed to the material layer, wherein the patterned photoresist layer serves as a mask in the fabrication process. Thereafter, the patterned photoresist layer is treated in a manner that breaks the backbone of the polymer. The patterned photoresist layer is then removed.Type: GrantFiled: June 1, 2015Date of Patent: August 14, 2018Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chien-Wei Wang, Ming-Feng Shieh, Ching-Yu Chang
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Patent number: 10048591Abstract: A catadioptric optical system operates in a wide spectral range. In an embodiment, the catadioptric optical system includes a first reflective surface positioned and configured to reflect radiation; a second reflective surface positioned and configured to reflect radiation reflected from the first reflective surface as a collimated beam, the second reflective surface having an aperture to allow transmission of radiation through the second reflective surface; and a channel structure extending from the aperture toward the first reflective surface and having an outlet, between the first reflective surface and the second reflective surface, to supply radiation to the first reflective surface.Type: GrantFiled: January 8, 2015Date of Patent: August 14, 2018Assignee: ASML HOLDING N.V.Inventors: Stanislav Y. Smirnov, Yevgeniy Konstantinovich Shmarev
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Patent number: 10048592Abstract: A projection lens is disclosed for imaging a pattern arranged in an object plane of the projection lens into an image plane of the projection lens via electromagnetic radiation having an operating wavelength ? from the extreme ultraviolet range. The projection lens includes a multiplicity of mirrors having mirror surfaces arranged in a projection beam path between the object plane and the image plane so that a pattern of a mask in the object plane is imagable into the image plane via the mirrors. A first imaging scale in a first direction running parallel to a scan direction is smaller in terms of absolute value than a second imaging scale in a second direction perpendicular to the first direction. The projection lens also includes a dynamic wavefront manipulation system for correcting astigmatic wavefront aberration portions caused by reticle displacement.Type: GrantFiled: February 24, 2017Date of Patent: August 14, 2018Assignee: Carl Zeiss SMT GmbHInventors: Stephan Andre, Daniel Golde, Toralf Gruner, Johannes Ruoff, Norbert Wabra, Ricarda Schoemer, Sonja Schneider
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Patent number: 10048593Abstract: In immersion exposure, a resist pattern forming method suppressing resist pattern defects comprises mounting a substrate formed a resist film thereon and a reticle formed a pattern thereon onto an exposure apparatus, supplying a first chemical solution onto the resist film to selectively form a first liquid film in a local area on the resist film and draining the solution, the first liquid film having a flow and being formed between the resist film and a projection optical system, transferring the pattern of the reticle to the resist film through the first liquid film to form a latent image, supplying a second chemical solution onto the resist film to clean the resist film, heating the resist film, and developing the resist film to form a resist pattern from the resist film.Type: GrantFiled: June 30, 2017Date of Patent: August 14, 2018Assignee: Toshiba Memory CorporationInventor: Shinichi Ito
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Patent number: 10048594Abstract: Methods and systems for PS-CAR photoresist simulation are described. In an embodiment, a method includes calibrating initial conditions for a simulation of at least one process parameter of a lithography process using a radiation-sensitive material. In such an embodiment, the radiation-sensitive material includes a first light wavelength activation threshold that controls the generation of acid to a first acid concentration in the radiation-sensitive material and controls generation of photosensitizer molecules in the radiation-sensitive material, and a second light wavelength activation threshold that can excite the photosensitizer molecules in the radiation-sensitive material that results in the acid comprising a second acid concentration that is greater than the first acid concentration, the second light wavelength being different from the first light wavelength. Further, the method may include performing a lithography process using the previously-determined at least one process parameter.Type: GrantFiled: February 19, 2016Date of Patent: August 14, 2018Assignee: Tokyo Electron LimitedInventors: Michael Carcasi, Mark Somervell, Carlos Fonseca
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Patent number: 10048595Abstract: A method of controlling a manufacturing process, the method including the steps of a) providing a testing area with a periodic structure, where the periodic structure includes a series of sets of patterned features, b) illuminating the periodic structure with a light, thereby producing a non-zero order diffraction signal, c) collecting the diffraction signal to produce a test signature, d) matching the test signature with a reference signature, where the reference signature was previously produced by performing steps a), b), and c) with respect to a reference structure that is at least similar to the periodic structure, and e) controlling a manufacturing process using a control setting set associated with the matching reference signature.Type: GrantFiled: February 13, 2017Date of Patent: August 14, 2018Assignee: NOVA MEASURING INSTRUMENTS LTD.Inventor: Boaz Brill
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Patent number: 10048596Abstract: An method for generating illuminating radiation in an illumination apparatus for use in an inspection apparatus for use in lithographic processes is described. A driving radiation beam is provided that comprises a plurality of radiation pulses. The beam is split into first and second pluralities of driving radiation pulses. Each plurality of driving radiation pulses has a controllable characteristic. The first and second pluralities may be used to generate an illuminating radiation beam with an output wavelength spectrum. The first and second controllable characteristics are controlled so as to control first and second portions respectively of the output wavelength spectrum of the illuminating radiation beam.Type: GrantFiled: May 2, 2017Date of Patent: August 14, 2018Assignee: ASML Netherlands B.V.Inventors: Nan Lin, Sander Bas Roobol, Simon Gijsbert Josephus Mathijssen
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Patent number: 10048597Abstract: An exposure apparatus includes a stage apparatus having an upper surface in which a recess that holds a substrate is formed. A liquid immersion system has a supply port via which a liquid is supplied and a collection port via which the liquid is collected forms a liquid immersion region. A projection optical system has an optical element and is configured to project an exposure light onto the substrate through the liquid of the liquid immersion region. A light-transmissive member is provided at the stage apparatus and has an upper surface substantially coplanar with an upper surface of the substrate held on the stage apparatus and with the upper surface of the stage apparatus. A groove is provided at the stage apparatus, into which the liquid is allowed to flow.Type: GrantFiled: November 7, 2017Date of Patent: August 14, 2018Assignee: NIKON CORPORATIONInventor: Kazuya Ono
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Patent number: 10048598Abstract: A supporting member on which a wafer table is mounted is substantially kinematically supported, via six rod members placed on a slider. Further, coupling members are placed facing in a non-contact manner via a predetermined gap, thin plate-shaped edges provided at both ends in the Y-axis direction of the supporting member. By this arrangement, vibration-damping is performed by the coupling members (squeeze dampers) facing the edges, on vibration of the supporting member mounted on the wafer table. Further, because the supporting member is kinematically supported via the plurality of rod members, it becomes possible to reduce deformation of the wafer table that accompanies deformation of the slider.Type: GrantFiled: June 26, 2014Date of Patent: August 14, 2018Assignee: NIKON CORPORATIONInventor: Yuichi Shibazaki
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Patent number: 10048599Abstract: The invention relates to a substrate exposure system comprising a frame, a substrate support module for carrying a substrate, an exposure apparatus for exposing said substrate, and adjustment assembly for adjusting the position of the exposure apparatus with respect to the substrate support module. The adjustment assembly comprises a hydraulic actuator, a hydraulic generator and a conduit, wherein the conduit interconnects said hydraulic actuator and said hydraulic generator for forming a hydraulic system. The exposure apparatus, the frame, the adjustment assembly and the substrate support module are arranged as parts of a series of mechanically linked components. A first part of said series of mechanically linked components comprises the exposure apparatus, and a second part comprises the substrate support module. Said hydraulic actuator is arranged between said first part and said second part. Preferably the hydraulic actuator comprises a first bellows and the hydraulic generator comprises a second bellows.Type: GrantFiled: December 30, 2016Date of Patent: August 14, 2018Assignee: MAPPER LITHOGRAPHY IP B.V.Inventor: Jerry Johannes Martinus Peijster
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Patent number: 10048600Abstract: Provided is a substrate stage apparatus that is provided with: a substrate holder that can be moved in a plane including an X-axis and a Y-axis; a head unit that can be moved synchronously with the substrate holder along the Y-axis; an encoder system for measuring substrate position, the system including a scale disposed on the substrate holder, and heads disposed on the head unit, and acquiring the X-axis direction and the Y-axis direction position information of the substrate holder on the basis of the output of the heads; an encoder system for measuring head-unit position, the system acquiring the Y-axis direction position information of the head unit; and a position control system that controls the position of the substrate holder within the XY plane on the basis of the output of the encoder system for measuring substrate position and the encoder system for measuring head-unit position.Type: GrantFiled: March 30, 2015Date of Patent: August 14, 2018Assignee: NIKON CORPORATIONInventor: Akinori Shirato
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Patent number: 10048601Abstract: An apparatus for measuring a mask error and a method for measuring a mask error are provided. The apparatus for measuring a mask error includes a stage configured to accommodate a reference mask having a reference pattern, and a target mask adjacent to the reference mask such that a mask pattern of the target mask faces the reference pattern, a light source configured to irradiate the first beam onto the reference mask and the target mask, a light receiving unit including an image sensor, and the image sensor configured to receive a composite image including a first image generated from the reference pattern and a second image generated from the mask pattern, and generate a third image from the first image and the second image, and a measuring unit configured to measure an error of the mask pattern from the third image.Type: GrantFiled: May 20, 2016Date of Patent: August 14, 2018Assignee: Samsung Electronics Co., Ltd.Inventors: Hak-Seung Han, Dong-Gun Lee, Dong-Hoon Chung