Patents Issued in September 20, 2018
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Publication number: 20180267368Abstract: An object of the present invention is to provide an optical film having an optically-anisotropic layer having excellent durability, a polarizing plate and an image display device in which the optical film is used, a polymerizable compound used in the optical film, and a method for manufacturing a 1,4-cyclohexanedicarboxylic acid monoaryl ester. The optical film of the present invention is an optical film having at least an optically-anisotropic layer, in which the optically-anisotropic layer is a layer obtained by polymerizing a polymerizable liquid crystal composition containing a polymerizable compound which has a specific structure, a liquid crystal compound which has a specific structure, and a polymerization initiator.Type: ApplicationFiled: May 21, 2018Publication date: September 20, 2018Applicant: FUJIFILM CorporationInventors: Keita TAKAHASHI, Hiroshi MATSUYAMA, Naozumi SHIRAIWA, Taiji KATSUMATA, Yuuta FUJINO, Hiroshi SATO, Kiyoshi TAKEUCHI, Hiroyuki HAGIO, Aiko YOSHIDA, Hiroaki NAKATSUGAWA
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Publication number: 20180267369Abstract: The disclosure provides an array substrate, including a glass substrate. The glass substrate is deposited with a source electrode and a drain electrode on an identical layer. The source electrode and the drain electrode are disposed with a plane. The plane is disposed with a first common electrode. The first common electrode is covered by a dielectric layer. The dielectric layer is respectively disposed with pixel electrodes and second common electrodes. The pixel electrodes and the drain electrode are connected through a via hole in the dielectric layer. The disclosure further discloses a liquid crystal display panel, including a color filter substrate. The color filter substrate includes a black matrix, and the array substrate. The second common electrodes are disposed correspondingly to the black matrix. Compared with the prior art, the second common electrodes are disposed around the pixel electrodes to increase the transmittance around the pixel electrodes.Type: ApplicationFiled: March 7, 2017Publication date: September 20, 2018Applicant: Shenzhen China Star Optoelectronics Technology Co., Ltd.Inventor: Wanliang ZHOU
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Publication number: 20180267370Abstract: A pixel structure includes first and second gate lines, at least one data line, and a pixel unit. The pixel unit has first and second display areas and includes first and second active devices, a first pixel electrode layer, a common electrode layer, and a second pixel electrode layer. The first and second active devices are electrically connected to the first and second gate lines, respectively. The first pixel electrode layer is electrically connected to the first active device. The common electrode layer is disposed above the first pixel electrode layer and includes first and second portions which are located at the first and second display areas, respectively. The second pixel electrode layer is electrically connected to the second active device, and is located above the first portion of the common electrode layer but not above the second portion, where the second pixel electrode layer has a first slit pattern and the second portion of the common electrode layer has a second slit pattern.Type: ApplicationFiled: March 12, 2018Publication date: September 20, 2018Inventors: Kung-Ching Chu, Yu-min Chi, Chen-Feng Fan, Sung-Yu Su
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Publication number: 20180267371Abstract: A liquid crystal display includes a first substrate, a gate line disposed on the first substrate and extending parallel to a major horizontal reference line of the display, and a plurality of pixel unit cells disposed on and tessellating a display area of the first substrate where each unit cell includes a first field generating electrode and a second field generating electrode with an insulating layer interposed therebetween, wherein a first one of the first and second field generating electrodes has a plurality of cutouts defined therein for producing corresponding liquid crystal domains, the plurality of cutouts each including a first inclined edge portion forming a first angle with the vertical reference line and a second inclined edge portion forming a second angle with the vertical reference line that is different from the first angle, wherein a ratio of a length of the first inclined edge portion to a length of the cutout is about 80% or more, and the density of the plurality of pixels is about 200 PPIType: ApplicationFiled: May 16, 2018Publication date: September 20, 2018Inventors: Soo Jeong HUH, Yang Hee KIM, Sung In RO
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Publication number: 20180267372Abstract: A blue phase liquid crystal display panel and a liquid crystal display device are disclosed, including a first and a second substrates disposed at an interval and parallel. Blue phase liquid crystal is disposed between the first and second substrates. The first substrate includes a first base. The second substrate includes a second base. The blue phase liquid crystal display panel includes a transmissive display region having multiple first base platforms, multiple first electrodes, each of which is disposed on each of the first base platform, and second electrodes disposed on the first base and the second base. A reflective display region has fourth electrodes only disposed on the second base. The first substrate is provided with a reflective layer corresponding to the reflective display region. When light passes through the transmissive display region and the reflective display region, phase delays of the light in the two regions are identical.Type: ApplicationFiled: May 16, 2018Publication date: September 20, 2018Applicant: Wuhan China Star Optoelectronics Technology Co., Ltd.Inventor: Yuejun TANG
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Publication number: 20180267373Abstract: In a display device including a backlight and a display panel, the area of the backlight is divided into a plurality of unit regions; the display panel includes pixels which are larger in number than the unit regions; a frame rate of image data input to the device is converted to perform display while part of the unit regions in which black is displayed is in a non-light emission state; and the driving frequency of the backlight is converted in accordance with the display.Type: ApplicationFiled: March 29, 2018Publication date: September 20, 2018Applicant: Semiconductor Energy Laboratory Co., Ltd.Inventor: Yasunori Yoshida
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Publication number: 20180267374Abstract: An array substrate and a display device are provided, which relate to the field of display and are for alleviating or mitigating the problem of bad contact between the pixel electrode and the drain pad caused by deep via holes. The array substrate includes a plurality of pixel units, each including a drain pad, a pixel electrode and an insulating layer above the drain pad. The drain pad has a first via hole, and the insulating layer has a second via hole that exposes at least a portion of the first via hole and a portion of the drain pad around the first via hole. The pixel electrode extends along an inner wall of the second via hole and contacts the exposed portion of the drain pad.Type: ApplicationFiled: November 8, 2017Publication date: September 20, 2018Inventors: Chunping LONG, Yongda MA, Pan LI
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Publication number: 20180267375Abstract: The present application discloses a display panel including an array substrate and an opposing substrate facing the array substrate; a data line layer having a plurality of data lines on the array substrate; a passivation layer on a side of the data line layer proximal to the opposing substrate; a sealant layer on a side of the passivation layer distal to the data line layer, sealing the array substrate and the opposing substrate together; the display panel having a first area enclosed by the sealant layer and a second area outside of the first area and the sealant layer; the plurality of data lines extending from the first area into the second area; and a common electrode layer on a side of the sealant layer distal to the passivation layer.Type: ApplicationFiled: August 9, 2016Publication date: September 20, 2018Applicants: BOE Technology Group Co., Ltd., Hefei Xinsheng Optoelectronics Technology Co., Ltd.Inventors: Xuebing JIANG, Jilei GAO
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Publication number: 20180267376Abstract: A conductive pattern structure and its manufacturing method, an array substrate and a display device are provided. The conductive pattern structure includes a first metal layer and a second metal layer stacked in turn, wherein the second metal layer covers an upper surface and all side surfaces of the first metal layer, and the metal of the first metal layer has a stronger activity than the metal of the second metal layer. A common replacement reaction is adopted according to the order of the metal reducibility in the metal activity series table to cover an upper surface and all side surfaces of the first metal layer with the second metal layer.Type: ApplicationFiled: November 3, 2017Publication date: September 20, 2018Inventor: Jianguo WANG
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Publication number: 20180267377Abstract: Provided are a pixel driving structure, in which the nth column of TFTs (T) are arranged at positions where the nth column of sub pixels (P) is close to the nth data line (D(n)); in the nth column of sub pixels (P), four sub pixels (P) or two sub pixels (P), which are adjacent vertically in the upper and the lower are set to be a pixel group (PG), and the nth data line (D(n)) sets a signal period to define polarities of respective sub pixels (P) in the pixel group (PG) to make polarity inversion occur at a edge of the two adjacent pixel groups (PG) in the upper and the lower, and polarities of two adjacent columns of sub pixels (P) are opposite to achieve display effect similar to a dot inversion. The pixel aperture regions can be neatly aligned to prevent the color washout.Type: ApplicationFiled: March 15, 2017Publication date: September 20, 2018Inventors: Jianjian Ying, Peng Du
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Publication number: 20180267378Abstract: A liquid crystal display panel having a display zone and a non-display zone surrounding the display zone is provided. The non-display zone defines multiples areas for arrange a driving chip, a plurality of fan-out wires, a plurality of multiplex lines, a shielding circuit, and detection circuit. The detection circuit includes a detection line conducting at a forward-bias state and cutting-off at a reverse-bias state.Type: ApplicationFiled: April 18, 2017Publication date: September 20, 2018Inventors: Man LI, Qingcheng ZUO, Xiaoling YUAN
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Publication number: 20180267379Abstract: A curved display screen and a manufacturing method thereof are provided. The curved display screen includes a first substrate and a second substrate. The first substrate includes an active switch array, and the active switch array includes several wires. The second substrate includes a transparent electrode layer. Any two regions respectively are defined as a first region and a second region, if a spacing between the first substrate and the second substrate in the first region is greater than a spacing between the first substrate and the second substrate in the second region, and an area of the wire on the first substrate in the first region is larger than an area of the wire in the second region.Type: ApplicationFiled: December 19, 2017Publication date: September 20, 2018Inventor: YU-JEN CHEN
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Publication number: 20180267380Abstract: Onboard EC window controllers are described. The controllers are configured in close proximity to the EC window, for example, within the IGU. The controller may be part of a window assembly, which includes an IGU having one or more EC panes, and thus does not have to be matched with the EC window, and installed, in the field. The window controllers described herein have a number of advantages because they are matched to the IGU containing one or more EC devices and their proximity to the EC panes of the window overcomes a number of problems associated with conventional controller configurations.Type: ApplicationFiled: May 11, 2018Publication date: September 20, 2018Inventors: Dhairya Shrivastava, Anshu A. Pradhan, Stephen C. Brown, David Walter Groechel, Robert T. Rozbicki
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Publication number: 20180267381Abstract: One example of a display device includes a first layer and a second layer including a conductive material. The second layer is attached to the first layer such that a surface of the second layer facing the first layer is exposed along an edge of the second layer. The second layer supports an electronic paper display imageable by receiving charges on an imaging surface of the electronic paper display. The second layer is electrically coupled to a counter-electrode of the electronic paper display.Type: ApplicationFiled: October 28, 2015Publication date: September 20, 2018Inventors: Napoleon J Leoni, Omer Gila, Chuangyu Zhou, Daniel Espinose
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Publication number: 20180267382Abstract: Disclosed is a reflective display device for visible light and infrared camouflage and an active camouflage device using the same, the reflective display device including: an upper substrate formed of a transparent material; an upper electrode layer formed of a transparent material provided under the upper substrate; at least one unit cell provided under the upper electrode layer, the unit cell containing a fluid and multiple particles being charged with opposite polarities and having different quantities of electric charge or different sizes; a lower electrode layer provided under the unit cell, the lower electrode layer for generating an electric field in conjunction with the upper electrode layer and defining a pixel area; a metal layer provided under the lower electrode layer, the metal layer blocking thermal-infrared rays; and a lower substrate provided under the metal layer.Type: ApplicationFiled: March 1, 2018Publication date: September 20, 2018Inventors: Soon Hyung KWON, Won Keun KIM
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Publication number: 20180267383Abstract: A composite particle is provided that includes a base particle and a plurality of hydrophilic oligomeric groups extending from an exterior portion of the base particle, the base particle including a cross-linked polyurea and at least one of a pigment and a dye. The cross-linked polyurea may form a network throughout the base particle. A method of making the composite particle includes providing either a solution containing a dye or a dispersion containing a pigment in a water-dispersible polyfunctional isocyanate dissolved in a water-miscible solvent, forming an emulsion of the solution/dispersion in water, agitating the emulsion while the polyfunctional isocyanate is converted into a cross-linked polyurea, and separating the composite particle containing the cross-linked polyurea and the dye/pigment from the emulsion.Type: ApplicationFiled: April 6, 2018Publication date: September 20, 2018Inventors: Stephen J. TELFER, Craig A. HERB, Lee YEZEK
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Publication number: 20180267384Abstract: An optical waveguide modulator with automatic bias control is disclosed. A dither signal is applied to the modulator bias and its signature detected in light tapped from an output of the modulator using a phase sensitive dither detector such as a lock-in amplifier. The detected signal is processed using pre-recorded information defining the direction of the detected signal change relative to a change in the modulator bias, and the bias is adjusted in the direction determined using the information. An IQ bias of a quadrature modulator is controlled by dithering bias settings of two inner modulators at different dither frequencies, and detecting an oscillation at a sum frequency.Type: ApplicationFiled: March 15, 2017Publication date: September 20, 2018Inventors: Kishore Padmaraju, Thomas Wetteland Baehr-Jones, Bernd-Harald Horst Jurgen Rohde, Robert Palmer, Matthew Akio Streshinsky, Marc Bohn, Torsten Wuth
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Publication number: 20180267385Abstract: According to one embodiment, a photodetector includes a sensor unit including at least one photosensor, a liquid crystal element including a first substrate includes a plurality of first control electrodes, a second substrate including a second control electrode, and a liquid crystal layer held between the first substrate and the second substrate, a liquid crystal controller which controls a voltage to be applied to the liquid crystal layer for forming a first lens that is opposed to the photosensor in the liquid crystal layer, and a sensor controller which controls the sensor unit.Type: ApplicationFiled: March 12, 2018Publication date: September 20, 2018Applicant: Japan Display Inc.Inventors: Takayuki NAKANISHI, Tatsuya Yata, Takeo Koito
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Publication number: 20180267386Abstract: A photonic device (100) comprising: an optical waveguide (101), and a modulating element (102) that is evanescently coupled to the waveguide (101); wherein the modulating element (102) modifies a transmission, reflection or absorption characteristic of the waveguide (101) dependant on its state, and the state of the modulating element (102) is switchable by an optical switching signal (125) carried by the waveguide (101), or by an electrical signal that heats the modulating element (102).Type: ApplicationFiled: September 15, 2016Publication date: September 20, 2018Inventors: Carlos RIOS, Harish BHASKARAN, Wolfram PERNICE, Matthias STEGMAIER
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Publication number: 20180267387Abstract: System and methods for the sampling of an optical signal by generating a plurality of copies of the spectrum of the said optical signal including at least one sampling block for the convolution between the optical input spectrum and an optical comb; wherein the said sampling block includes a modulator, and a bias voltage generator, the said sampling block is driven by an electrical comb generator and a phase shifter, the said electrical comb generator being configured to generate a number of N lines, with N from one to infinity, in the radio frequency domain, equally spaced in frequency and locked in phase, the said modulator being configured to generate a plurality of 2N+1 copies of the input spectrum from (i) the signal spectrum and (ii) a number of N lines provided by the said electrical comb generator.Type: ApplicationFiled: March 16, 2017Publication date: September 20, 2018Inventor: Thomas Schneider
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Publication number: 20180267388Abstract: A shutter apparatus includes a motor, a cam gear, a driving member, and a blade group. A cam part includes a blade maintaining section configured to maintain one of an open state and a closed state of the blade group when a cam follower slides, and a blade driving section configured to move the blade group from the one of the open state and the closed state to the other of the open state and the closed state when the cam follower slides. Where the cam follower slides in the blade maintaining section and the blade driving section in this order, the motor is driven in the micro step driving mode when the cam follower slides in the blade maintaining section, and the motor is driven in the full step driving mode when the cam follower slides in the blade driving section.Type: ApplicationFiled: March 15, 2018Publication date: September 20, 2018Inventors: Kazuya Karibe, Chikara Aoshima, Masahiro Takayama
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Publication number: 20180267389Abstract: An imaging device includes a plurality of operation modes. The imaging device includes a temperature sensor and an environmental temperature estimation unit. The temperature sensor is provided inside of the imaging device. The environmental temperature estimation unit estimates an outside environmental temperature of the imaging device based on an output of the temperature sensor and the operation modes.Type: ApplicationFiled: March 9, 2018Publication date: September 20, 2018Inventor: Takeru Kayano
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Publication number: 20180267390Abstract: An electronic device according to various embodiments of the present disclosure can include at least one heat component, a camera module comprising a camera disposed near the at least one heat component, and a support comprising a first opening in which the camera module is inserted and disposed with a gap along at least a portion of a periphery of the camera module.Type: ApplicationFiled: March 15, 2018Publication date: September 20, 2018Inventors: Seongeun KIM, Jung-Sik PARK, Seung-Ki CHOI, Soo-Jung KIM
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Publication number: 20180267391Abstract: The invention comprises a small, easily transportable, specially programmed, wirelessly controlled camera mounting device. The camera mounting device is equipped with a ¼-20 stud, the standard type of stud used by tripods, so the user can easily mount a Go-Pro camera or any other kind of presently available small camera on the camera mounting device. Embodiments of the device can rotate the camera up to 360 degrees, left or right, at any of multiple speeds, and can pause, and rotate the camera up or down. Embodiments of the device can attach themselves to other surfaces, by several methods, and can be charged wirelessly. The invention also includes a method that eliminates the need to use multiple cameras, while making a video, and splice the video together after the fact. This invention also comprises security systems using the camera mount.Type: ApplicationFiled: May 21, 2018Publication date: September 20, 2018Inventor: William Conn Lefever
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Publication number: 20180267392Abstract: [Object] To provide a projector-type display apparatus with ease of maintenance. [Solving Means] According to the present technology, a projector-type display apparatus includes an optical-system-for-projecting, a housing, a fan, an air-filter, and a filter-cover. The housing includes an air-inlet-port, and houses the optical-system-for-projecting. The fan is housed in the housing, air from the air-inlet-port flowing into the fan. The air-filter is attachable to and detachable from the housing, and covers the air-inlet-port. The filter-cover is attachable to and detachable from the air-filter.Type: ApplicationFiled: November 1, 2016Publication date: September 20, 2018Applicant: SONY CORPORATIONInventors: Kazuhiro KITA, Taku INOUE
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Publication number: 20180267393Abstract: An image projection apparatus is configured to project light modulated by a plurality of light modulation elements and to display an image. The image projection apparatus includes a heat receiver provided to each of the plurality of light modulation elements, and to provide a heat exchange with the light modulation elements and a heat exchange with liquid, a temperature changer configured to change a temperature of the liquid that flows in the heat receiver, a pump configured to pump in and out the liquid, and a flow path configured to circulate the liquid among the pump, the temperature changer, and the heat receiver. Each temperature changer is provided for each heat changer and is provided between a corresponding heat receiver and another heat changer different from the corresponding heat receiver on the flow path.Type: ApplicationFiled: March 14, 2018Publication date: September 20, 2018Inventor: Makoto Nomoto
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Publication number: 20180267394Abstract: An illumination device of the disclosure includes a plurality of light sources and a correction unit. The plurality of light sources generate light having respectively different wavelengths. The correction unit corrects, on the basis of a change in relative luminosity, a light quantity of the light to be generated by at least one light source out of the plurality of light sources, to restrain a change in white balance. The change in the relative luminosity is caused by a change in wavelength associated with a change in temperature.Type: ApplicationFiled: May 24, 2018Publication date: September 20, 2018Inventor: Kenta MIYAKAWA
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Publication number: 20180267395Abstract: A semiconductor device of the invention is a semiconductor device that controls a transistor that controls an electric current that flows through a light emitting element, the transistor including a gate that is connected to one end of a capacitor. The semiconductor device includes: a first terminal that is connected to the gate of the transistor and the one end of the capacitor; a second terminal that is connected to the other end of the capacitor; a first driving circuit that outputs a first control signal to the first terminal; and a second driving circuit that, in order to control the transistor in an on-state or an off-state, activates or deactivates a second control signal, and outputs the second control signal to the second terminal, the second control signal having a potential lower than a potential of the first control signal.Type: ApplicationFiled: February 27, 2018Publication date: September 20, 2018Applicant: SEIKO EPSON CORPORATIONInventor: Atsushi YAMADA
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Publication number: 20180267396Abstract: A kit for creating a flat folding projection device is provided and includes a lens and a sheet defining at least a first, second, third and fourth panels, each panel separated from the other panels by at least one fold. A hole is positioned in the first panel, the hole defining an edge. A cut is positioned in the first panel adjacent to the hole such that the first panel on either side of the cut can be separated to create a space configured to receive and hold the lens therein. Further includes is one of: a light source, a translucent sheet or a light source and a translucent sheet. An envelope contains the foregoing such that a thickness of the envelope is less than ½ inches.Type: ApplicationFiled: March 20, 2018Publication date: September 20, 2018Inventor: Sally D. Hill
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Publication number: 20180267397Abstract: The present invention provides a mask structure and a COA type array substrate. The mask structure comprises a central light shielding portion (1), a peripheral light shielding portion (3) surrounding the central light shielding portion (1) and conforming to an outer contour shape of the central light shielding portion (1) and a circumambient hollow slit (5) sandwiched between the peripheral light shielding portion (3) and the central light shielding portion (1). The exposure light will diffract through the hollow slit (5) to result in the propagation of the reverse bending and the energy intensity gradient. In conjunction with the negative photoresist, the taper of the finally manufactured color filter layer through hole can be made to be gentle to improve the electrical connection quality between the pixel electrodes and the metal material signal lines for avoiding the display failure.Type: ApplicationFiled: April 17, 2017Publication date: September 20, 2018Inventor: Tao Sun
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Publication number: 20180267398Abstract: A photomask blank (1) having: a transparent substrate (10); a first film (11) etched by chlorine/oxygen-based dry etching and made of a material having resistance against fluorine-based dry etching; and a second film (12) formed adjacent to the first film and made of a material which comprises silicon and oxygen or silicon, oxygen, and nitrogen and has an Si—Si bond and which is substantially not etched by chlorine/oxygen-based dry etching, wherein: the photoresist adhesive performance is improved; the resist pattern is stably maintained without degrading, collapsing, or peeling even when a fine resist pattern is formed from a photoresist film; and an excellent shape and dimensional accuracy is obtained in regard to etching of a lower layer film in which the resist pattern is used.Type: ApplicationFiled: February 15, 2016Publication date: September 20, 2018Applicant: SHIN-ETSU CHEMICAL CO., LTD.Inventors: Shigeo IRIE, Takashi YOSHII, Keiichi MASUNAGA, Yukio INAZUKI, Hideo KANEKO, Toyohisa SAKURADA
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Publication number: 20180267399Abstract: A method of geometry corrections to properly transfer semiconductor designs on a wafer or a mask in nanometer scale processes is provided. In contrast with some prior art techniques, geometry corrections and possibly dose corrections are applied before fracturing. Unlike edge based corrections, where the edges are displaced in parallel, the displacements applied to generated geometry corrections do not preserve parallelism of the edges, which is specifically well suited for free form designs. A seed design is generated from the target design. Vertices connecting segments are placed along the seed design contour. Correction sites are placed on the segments. Displacement vectors are applied to the vertices. A simulated contour is generated and compared to the contour of the target design. The process is iterated until a match criteria between simulated and target design (or another stop criteria) is reached.Type: ApplicationFiled: December 22, 2015Publication date: September 20, 2018Inventors: Thomas QUAGLIO, Mathieu MILLEQUANT, Charles TIPHINE
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Publication number: 20180267400Abstract: According to an embodiment, a template is provided which includes a template substrate, and a device formation pattern and an alignment mark provided on a common surface of the template substrate. The alignment mark includes a refraction layer provided at a bottom of a first concave pattern provided on the template substrate, and an insulating layer filling the first concave pattern provided with the refraction layer.Type: ApplicationFiled: September 7, 2017Publication date: September 20, 2018Applicant: Toshiba Memory CorporationInventor: Toshiaki KOMUKAI
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Publication number: 20180267401Abstract: A template manufacturing method includes preparing a structure including a first substrate and a stacked body that is provided on the first substrate, the stacked body including a first lower layer including a first material, a first upper layer provided on the first lower layer including a second material different from the first material, and a first cover layer provided on a first cover region of the first upper layer and including a third material different from the second material. The method further includes forming a first resist layer on a portion of the first cover layer and on a first portion of the first upper layer, and exposing a second portion of the upper layer. The method yet further includes removing the second portion of the first upper layer using the first cover layer and the first resist layer as a mask.Type: ApplicationFiled: September 5, 2017Publication date: September 20, 2018Applicant: TOSHIBA MEMORY CORPORATIONInventor: Shingo KANAMITSU
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Publication number: 20180267402Abstract: A resist composition comprising a base polymer and a sulfonium or iodonium salt capable of generating sulfonic acid bonded to iodized benzene ring offers a high sensitivity and minimal LWR independent of whether it is of positive or negative tone.Type: ApplicationFiled: March 14, 2018Publication date: September 20, 2018Applicant: SHIN-ETSU CHEMICAL CO., LTD.Inventors: Jun Hatakeyama, Takayuki Fujiwara
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Publication number: 20180267403Abstract: A resist composition comprising a base polymer and a quencher in the form of an iodonium salt capable of generating fluorobenzoic acid bonded to iodized benzene offers a high sensitivity and minimal LWR independent of whether it is of positive or negative tone.Type: ApplicationFiled: March 14, 2018Publication date: September 20, 2018Applicant: SHIN-ETSU CHEMICAL CO., LTD.Inventors: Jun Hatakeyama, Masaki Ohashi
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Publication number: 20180267404Abstract: Provided are a pattern forming method for obtaining a pattern which is excellent in etching resistance and in which occurrence of pattern collapse can be suppressed, and a method for manufacturing an electronic device including the pattern forming method. The pattern forming method includes a step of forming a film using an actinic ray-sensitive or radiation-sensitive resin composition that contains a resin A having a repeating unit represented by General Formula (I) and a repeating unit represented by General Formula (BII), a step of exposing the film, and a step of developing the exposed film using a developer containing an organic solvent, to form a pattern.Type: ApplicationFiled: May 23, 2018Publication date: September 20, 2018Applicant: FUJIFILM CorporationInventors: Akihiro KANEKO, Tomotaka TSUCHIMURA, Shuji HIRANO, Hideaki TSUBAKI, Wataru NIHASHI
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Publication number: 20180267405Abstract: The present invention provides a negative type colored photosensitive resin composition that serves to produce a cured film having a forward tapered shape. This negative type colored photosensitive resin composition includes an alkali-soluble resin (A), a photo initiator (B), a photo polymerizable compound (C), and a coloring agent (D), the alkali-soluble resin (A) containing a polyimide precursor, polybenzoxazole precursor, and/or a copolymer thereof (A-1), each resin (A-1) having a trifluoromethyl group in the backbone chain.Type: ApplicationFiled: September 21, 2016Publication date: September 20, 2018Applicant: TORAY INDUSTRIES, INC.Inventors: Satoshi KAMEMOTO, Yugo TANIGAKI, Kazuto MIYOSHI
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Publication number: 20180267406Abstract: A radiation-sensitive composition includes: a first polymer having a first structural unit that includes an acid-labile group; and a first compound including a metal cation and a first anion that is a conjugate base of an acid. The acid has a pKa of no greater than 0. The acid is preferably sulfonic acid, nitric acid, organic azinic acid, disulfonylimidic acid or a combination thereof. The first compound is preferably represented by formula (1). In the formula (1), M represents a metal cation; A represents the first anion; x is an integer of 1 to 6; R1 represents a ? ligand; and y is an integer of 0 to 5, and a sum: x+y is no greater than 6. The van der Waals volume of the acid is preferably no less than 2.5×10?28 m3.Type: ApplicationFiled: May 24, 2018Publication date: September 20, 2018Applicant: JSR CORPORATIONInventors: Tomoki NAGAI, Takehiko Naruoka, Ken Maruyama, Motohiro Shiratani, Hisashi Nakagawa
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Publication number: 20180267407Abstract: An apparatus for electrochemical experimentation with an isolated microstructural region on a surface comprising a metal sample coated with a photoresist, a region of interest, a light source, comprising optoelectronic devices such as spatial light modulators or digital micromirror devices for direct modulation of the light distribution itself and avoiding the use of a mask, wherein the exposed region is created by light from the light source and wherein the metal sample is immersed. A method for isolating microstructural regions or features on a surface for electrochemical experimentation comprising the steps of providing a metal sample, coating the metal sample, selecting a region of interest, creating exposed photoresist with direct modulation of the light distribution itself by optoelectronic devices such as spatial light modulators or digital micromirror devices and without a mask.Type: ApplicationFiled: May 14, 2018Publication date: September 20, 2018Applicant: The Government of the United States of America, as represented by the Secretary of the NavyInventors: Steven A. Policastro, Raymond C Y Auyeung, Alberto Piqué, Farrel Martin
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Publication number: 20180267408Abstract: An exposure method includes projecting a reticle pattern into a first exposure field of a photoresist layer, wherein the reticle pattern includes first and second line patterns on opposite edges of the reticle pattern and wherein at least the first line pattern includes an end section through which light flux decreases outwards. The reticle pattern is further projected into a second exposure field of the photoresist layer, wherein a first tapering projection zone of the end section of the first line pattern in the second exposure field overlaps a projection area of the second line pattern in the first exposure field.Type: ApplicationFiled: March 13, 2018Publication date: September 20, 2018Inventors: Joerg Ortner, Iris Moder, Ingo Muri
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Publication number: 20180267409Abstract: A composition for removing photoresist, including an alkyl ammonium fluoride salt in an amount ranging from about 0.5 weight percent to about 10 weight percent, based on a total weight of the composition; an organic sulfonic acid in an amount ranging from about 1 weight percent to about 20 weight percent, based on the total weight of the composition; and a lactone-based solvent in an amount ranging from about 70 weight percent to about 98.5 weight percent, based on the total weight of the composition.Type: ApplicationFiled: May 23, 2018Publication date: September 20, 2018Applicant: DONGWOO FINE-CHEMInventors: Jung-Min OH, Mi-Hyun PARK, Hyo-San LEE, Ji-Hoon JEONG, Yong-Sun KO, In-Gi KIM, Na-Rim KIM, Sang-Tae KIM, Seong-Min KIM, Kyong-Ho LEE
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Publication number: 20180267410Abstract: Disclosed is a stage system and metrology apparatus comprising at least one such stage system. The stage system comprises a stage carrier for holding an object and a stage carrier positioning actuator for displacing the stage carrier. The stage system also comprises a balance mass to counteract a displacement of the stage carrier, and a balance mass positioning actuator for displacing the balance mass. A cable arrangement is connected to the stage carrier for the supply of at least power to said stage carrier. The stage system is operable to apply a compensatory feed-forward force to the balance mass which compensates for a cable arrangement force exerted by the cable arrangement.Type: ApplicationFiled: March 14, 2018Publication date: September 20, 2018Applicant: ASML Netherlands B.V.Inventors: Peter Paul HEMPENIUS, Marcel Koenraad Marie BAGGEN, Thomas Jan DE HOOG, Sinar JULIANA, Henricus Martinus Johannes VAN DE GROES
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Publication number: 20180267411Abstract: Disclosed is gas delivery system which is suitable for a high harmonic generation (HHG) radiation source which may be used to generate measurement radiation for an inspection apparatus. In such a radiation source, a gas delivery element delivers gas in a first direction. The gas delivery element has an optical input and an optical input, defining an optical path running in a second direction. The first direction is arranged relative to the second direction at an angle that is not perpendicular or parallel. Also disclosed is a gas delivery element having a gas jet shaping device, or a pair of gas delivery elements, one of which delivers a second gas, such that the gas jet shaping device or second gas is operable to modify a flow profile of the gas such that the number density of the gas falls sharply.Type: ApplicationFiled: February 23, 2018Publication date: September 20, 2018Applicant: ASML Netherlands B.V.Inventors: Sudhir SRIVASTAVA, Sander Bas ROOBOL, Simon Gijsbert Josephus MATHIJSSEN, Nan LIN, Sjoerd Nicolaas Lambertus DONDERS, Krijn Frederik BUSTRAAN, Petrus Wilhelmus SMORENBURG, Gerrit Jacobus Hendrik BRUSSAARD
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Publication number: 20180267412Abstract: An object table to support an object, the object table having a support body, an object holder to hold an object, an opening adjacent an edge of the object holder, and a channel in fluid communication with the opening via a passageway, wherein the channel is defined by a first material which is different to a second material defining the passageway.Type: ApplicationFiled: March 12, 2018Publication date: September 20, 2018Applicant: ASML Netherlands B.V.Inventors: Thibault Simon Mathieu LAURENT, Johannes Henricus Wilhelmus JACOBS, Wilhelmus Franciscus Johannes SIMONS, Martijn HOUBEN, Raymond Wilhelmus Louis LAFARRE, Koen STEFFENS, Han Henricus Aldegonda LEMPENS, Rogier Hendrikus Magdalena CORTIE, Ruud Hendrikus Martinus Johannes BLOKS, Gerben PIETERSE, Siegfried Alexander TROMP, Theodorus Wilhelmus POLET, Jim Vincent OVERKAMP, Van Vuong VY
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Publication number: 20180267413Abstract: A substrate processing apparatus includes: a rotary cylindrical member (DR) that includes a cylindrical supporting surface curved with a constant radius from a predetermined center line (AX2) and that feeds a substrate (P) in a length direction of the substrate; a processing mechanism that performs a predetermined process on the substrate at a specific position (PA, EL2) of a part of the substrate; a scale member (SD) that rotates about the center line along with the rotary cylindrical member so as to measure a displacement in a circumferential direction of the supporting surface of the rotary cylindrical member or a displacement in a direction of the center line of the rotary cylindrical member and that includes a scale portion (GP) carved in a ring shape; and a reading mechanism (EN1, EN2) that faces the scale portion, that is disposed in substantially a same direction as the specific position when viewed from the center line, and that reads the scale portion.Type: ApplicationFiled: May 21, 2018Publication date: September 20, 2018Inventors: Masaki KATO, Tohru KIUCHI
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Publication number: 20180267414Abstract: A lithographic apparatus is provided. The lithographic apparatus includes a reticle and an electrostatic clamp configured to releasably hold the reticle. The electrostatic clamp includes a first substrate having opposing first and second surfaces, a plurality of burls located on the first surface and configured to contact the reticle, a second substrate having opposing first and second surfaces. The first surface of the second substrate is coupled to the second surface of the first substrate. A plurality of cooling elements are located between the first surface of the second substrate and the second surface of the first substrate. The cooling elements are configured to cause electrons to travel from the second surface of the first substrate to the first surface of the second substrate. Each cooling element is substantially aligned with a respective burl.Type: ApplicationFiled: May 18, 2018Publication date: September 20, 2018Applicants: ASML Holding N.V., ASML Netherlands B.V.Inventors: Santiago E. DELPUERTO, Antonius Franciscus Johannes De Groot, Kenneth C. HENDERSON, Raymond Wilhelmus Louis LAFARRE, Matthew Lipson, Louis John Markoya, Tammo Uitterdijk, Ronald Van Der Wilk, Johannes Petrus Martinus Bernardus Vermeulen
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Publication number: 20180267415Abstract: A topography measurement system comprising a radiation source configured to generate a radiation beam, a spatially coded grating configured to pattern the radiation beam and thereby provide a spatially coded radiation beam, optics configured to form an image of the spatially coded grating at a target location on a substrate, detection optics configured to receive radiation re-fleeted from the target location of the substrate and form an image of the grating image at a second grating, and a detector configured to receive radiation transmitted through the second grating and produce an output signal.Type: ApplicationFiled: September 6, 2016Publication date: September 20, 2018Applicant: ASML Netherlands B.V.Inventors: Nitesh PANDEY, Arie Jeffrey DEN BOEF, Heine Melle MULDER, Willem Richard PONGERS, Paulus Antonius Andreas TEUNISSEN
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Publication number: 20180267416Abstract: A toner for developing electrostatic images, including toner particles containing an external additive on surfaces of toner matrix particles. The external additive contains at least a lanthanum-containing titanate compound.Type: ApplicationFiled: March 9, 2018Publication date: September 20, 2018Inventors: Satoshi UCHINO, Shinya OBARA, Futoshi KADONOME
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Publication number: 20180267417Abstract: Provided is a toner including at least: a non-crystalline polyester resin; and a crystalline polyester resin, wherein when a cross-section of the toner is observed, the crystalline polyester resin has a maximum length of 100 nm or greater but less than 500 nm, and a ratio Dv/Dn of a volume average diameter Dv of the crystalline polyester resin to a number average diameter Dn of the crystalline polyester resin is less than 1.20.Type: ApplicationFiled: February 26, 2018Publication date: September 20, 2018Inventors: Yuka MIZOGUCHI, Hiroshi YAMASHITA, Ryota INOUE, Taichi NEMOTO, Shizuka HASHIDA