Abstract: A method for automated microbial detection includes collecting air particles into a solid-state sampler, the air particles including microbes, charging the air particles using a plasma field generated by propulsion electrodes, focusing the charged air particles toward a sample well of a microfluidic testing cartridge, tagging the charged air particles with a fluorescence marker, and detecting a quantity of the microbes using a fluorescence detector.

Abstract: The embodiments disclosed herein utilized RNA targeting effectors to provide a robust CRISPR-based diagnostic with attomolar sensitivity. Embodiments disclosed herein can detect broth DNA and RNA with comparable levels of sensitivity and can differentiate targets from non-targets based on single base pair differences. Moreover, the embodiments disclosed herein can be prepared in freeze-dried format for convenient distribution and point-of-care (POC) applications. Such embodiments are useful in multiple scenarios in human health including, for example, viral detection, bacterial strain typing, sensitive genotyping, and detection of disease-associated cell free DNA.

Abstract: The present disclosure is in the field of plant breeding and disease resistance. The disclosure provides methods for breeding canola plants having clubroot resistance using marker-assisted selection. The disclosure further provides germplasm resistant to various Plasmodiophora brassicae pathotypes including pathogtype 5x. The disclosure also provides markers associated with clubroot resistance loci for introgressing these loci into elite germplasm in a breeding program, thus producing novel clubroot resistant germplasm, e.g., spring canola varieties resistant to pathogtype 5x.

Abstract: Methods for predicting palm oil yield of a test oil palm plant are disclosed. The methods comprise determining, from a sample of a test oil palm plant of a population, at least a first SNP genotype, corresponding to a first SNP marker, located in a first QTL for a high-oil-production trait and associated, after stratification and kinship correction, with the high-oil-production trait with a genome-wide ?log10(p-value) of at least 3.0 in the population or having a linkage disequilibrium r2 value of at least 0.2 with respect to a first other SNP marker linked thereto and associated, after stratification and kinship correction, with the high-oil-production trait with a genome-wide ?log10(p-value) of at least 3.0 in the population. The methods also comprise comparing the first SNP genotype to a corresponding first reference SNP genotype and predicting palm oil yield of the test plant based on extent of matching of the SNP genotypes.

Abstract: Provided are MYC-reporters and MYC-reporter expression vectors having MYC-reporter activity. Also provided are cells containing MYC-reporters and/or MYC-reporter expression vectors as well as animals containing such cells and/or genetically modified to contain one or more MYC-reporters and/or expression vectors. Also provided are methods of screening, including methods of screening a candidate agent for MYC repression. The subject methods may, in some instances, employ one or more of the provided MYC-reporters, expression vectors, cells and/or transgenic animals.

Abstract: Bacteriophage Insensitive Mutants (BIMs) of three Streptococcus thermophilus parent strains were generated and characterized for phage sensitivity, sedimentation rate, cell chain length, phage adsorption and CRISPR loci alterations. Several BIMs showed an altered sedimentation phenotype as well as an increase cell chain length, reduced phage sensitivity, reduced phage adsorption and 100% identity in three CRISPR loci. The results show that the derived BIMs have become phage-resistant through a mechanism other than CRISPR.

Abstract: The invention relates to the field of metallurgy, and specifically to a method for producing steel in an electric arc furnace. A known method for making steel in an electric arc furnace includes, at least, loading, into the working space of a furnace, a solid metal charge and, at least, solid carbon-containing materials, melting the charge using electric arcs, carburizing the metal using the solid carbon-containing materials during melting, and outputting metal and slag from the furnace. It is proposed to conduct the melting process with the addition, to the working space of the furnace, of a high-carbon carburizer in the form of a liquid phase of iron recovered from the arc combustion zone for the additional carburization of the metal, wherein the high-carbon carburizer is obtained from iron oxides and carbonaceous material.

Abstract: A heat treatment apparatus that thermally treats an annular workpiece formed of a steel material by inductively heating the workpiece includes a treatment tank in which the workpiece is set and thermally treated, a holding portion that holds the workpiece at a predetermined position, an induction heating coil that surrounds the workpiece to inductively heat the workpiece, and a cooling medium that cools surfaces of the workpiece during the induction heating of the workpiece.

Abstract: An electric resistance welded steel pipe manufactured by performing electric resistance welding on the steel pipe. The steel pipe having a chemical composition including by mass %, C: 0.20% to 0.40%, Si: 0.1% to 1.0%, Mn: 0.1% to 2.0%, Al: 0.01% to 0.10%, Cr: 0.01% to 0.5%, Ti: 0.01% to 0.05%, B: 0.0005% to 0.005%, Ca: 0.0001% to 0.0050%, N: 0.0050% or less, and Fe and inevitable impurities. Additionally, the steel pipe having a microstructure in which each of amounts of TiS particles, having a particle size of 10 ?m or more, and MnS particles, having a particle size of 10 ?m or more, are decreased to 0.1% or less in terms of cleanliness. The steel pipe having excellent fatigue resistance, exhibiting a high strength, and having an average grain size of prior austenite grains of 50 ?m or less when subjected to cold forming followed by quenching and tempering treatments.

Abstract: Systems and methods for manufacturing high-strength cladded components such as pressure containing components that may be used in, e.g., oilfield systems to carry corrosive fluids at high pressures. Embodiments of the invention include products and processes in which low carbon HSLA Steel that has a yield strength greater than 70,000 psi is used as a base material from which a component is formed. A corrosion resistant alloy is welded to selected surfaces of the base metal. Because the base material has a low carbon content, welding the corrosion resistant alloy onto the base material does not create significant stresses in the base material and consequently eliminates the need for PWHT to relieve such stresses and eliminates strength degradation that normally results from PWHT. Eliminating PWHT also allows the component to be refurbished and re-cladded multiple times without significantly degrading the yield strength of the component.

Abstract: The invention relates to a method for continuously roller-forming and hardening sheet steel in which a sheet steel strip is continuously roller-formed into a profile in a roller-profiling unit, characterized in that the roller-formed profile strand is preheated to a temperature below the austenite starting temperature (Ac1) and the roller-formed profile strand is then heated across subregions of its cross-section and/or subregions of its length to a temperature above AC3, with the roller-formed profile strand being acted on with an axial tensile stress at least during the heating of subregions to a temperature >AC3.

Abstract: The present invention relates to a high strength steel sheet having a tensile strength of 700 to 1,300 Mpa and an elongation of 12% or more, and having a tempered martensite single phase structure. The steel sheet of the present invention is manufactured through the steps of: rapidly heating a material steel sheet for 3 to 60 seconds to an Ac3 transformation point or higher and maintaining the material steel sheet, the material steel sheet containing 0.08 to 0.30 wt % of C, 0.01 to 2.0 wt % of Si, 0.30 to 3.0 wt % of Mn, 0.05 wt % or less of P and 0.05 wt % or less of S and the remainder being Fe and other unavoidable impurities; rapidly cooling the heated steel sheet to 100° C./s or higher with water or oil; and rapidly tempering to 500° C. to A1 transformation point for 3 to 60 seconds including heating and maintaining time.

Abstract: A grain-oriented electrical steel sheet includes: a chemical composition represented by, in mass %, Si: 1.8% to 7.0%, Cu: 0.03% to 0.60%, and the balance: Fe and impurities; and a primary coating film containing forsterite on a surface of the steel sheet, in which a Cu/Fe light-emitting intensity ratio at an interface region between the primary coating film and the surface of the steel sheet is 0.30 or less.

Abstract: A hot pressed member comprises: a predetermined chemical composition (in particular, low C of 0.090% or more and less than 0.30% and high Mn of 3.5% or more and less than 11.0%); a first region having: a microstructure including a martensite phase of 80.0% or more in volume fraction and a retained austenite phase of 3.0% or more and 20.0% or less in volume fraction; and a dislocation density of 1.0×1016/m2 or more; and a second region having a microstructure including a ferrite phase of 30.0% or more and 60.0% or less in volume fraction, a retained austenite phase of 10.0% or more and 70.0% or less in volume fraction, and a martensite phase of 30.0% or less in volume fraction.

Abstract: A high-strength hot-dip coated hot-rolled steel sheet excellent in terms of surface appearance quality and coating adhesiveness and a method for manufacturing. The method includes performing hot rolling followed by pickling on steel to form a pickled steel sheet, the steel having a chemical composition containing, by mass %, C: 0.02% or more and 0.30% or less, Si: 0.01% or more and 1.0% or less, Mn: 0.3% or more and 2.5% or less, P: 0.08% or less, S: 0.02% or less, Al: 0.001% or more and 0.20% or less, and Fe and inevitable impurities. The method further includes performing rolling with a rolling reduction ratio of 1% or more and 10% or less, and a hot-dip coating treatment. The obtained steel sheet has an arithmetic average roughness Ra of 2.0 ?m or less on the surface of the steel sheet, and a tensile strength of 590 MPa or more.

Abstract: Disclosed is a non-heat treated wire rod, comprising, as percentage by weight: C: 0.3-0.4%; Si: 0.05-0.3%; Mn: 0.8-1.8%; Cr: 0.5% or less; P: 0.02% or less; S: 0.02% or less; sol.Al: 0.01-0.05%; N: 0.01% or less; O: 0.0001-0.003%; at least one of Nb: 0.005-0.03% and V: 0.05-0.3%; and the balance being Fe and unavoidable impurities, wherein the non-heat treated wire rod includes ferrite and pearlite microstructures, and wherein the phase fraction of the pearlite satisfies the following relational expressions 1 and 2, and the average lamellar spacing of the pearlite satisfies the following relational expressions 3 and 4. VP2/VP1?1.4 ??[Relational expression 1] 50?(15VP1+VP2)/16?70 ??[Relational expression 2] DL1/DL2?1.4 ??[Relational expression 3] 0.1?(15DL1+DL2)/16?0.

Abstract: The present disclosure relates to a metal recovery process comprising a solvent extraction process. In an exemplary embodiment, the solution extraction system comprises a plant with a first and second circuit. A high-grade pregnant leach solution (“HGPLS”) is provided to the first and second circuit, and a low-grade pregnant leach solution (“LGPLS”) is provided to the second circuit. The first circuit produces a rich electrolyte, which can be forwarded to a primary metal recovery, and a low-grade raffinate, which can be forwarded to a secondary metal recovery process. The second circuit produces a rich electrolyte, which can also be forwarded to the primary metal recovery process. The first and second circuits are in fluid communication with each other.

Abstract: A method and recovering method of recovering zinc oxides and other metal oxides having an injection chamber where a mixture of natural gas and oxygen is formed and then ignited to form high temperature combustion gases of greater than 2000° C. with a high concentration of carbon monoxide. Then, the mixture is transported through a quiescent chamber to a feed chamber where the ignited high temperature combustion gases are mixed with finely divided material, including EAF dust. The mixture is transported to a reaction chamber, wherein zinc vapor and other metal vapors and molten slag particles are formed. The zinc vapor and other metal vapors are separated from the molten slag particles and transported to an insulated plenum. Zinc vapor and other metal vapors are mixed with air and become airborne zinc oxide and other metal oxides. The airborne zinc oxide and other metal oxides are collected.

Abstract: Disclosed is an alloy drill. Components of the alloy drill are: 14-30 wt % of a binder phase being one or more of Co, Ni, Fe, and Cu; 0.32-9.7 wt % of an additive being one or more of TaC, MoC, Cr3C2, and MnC; and the remainder as a hard phase being WC. In the alloy drill, WC is used as the hard phase to improve its hardness and wear resistance, Cu, Ni, Fe, or Co as the binder phase can improve its anti-corrosion performance and anti-fatigue performance, and TaC, MoC, Cr3C2, or MnC as the additive can further improve its thermal stability and wear resistance. Thus, the alloy drill has superior wear resistance and impact toughness, and also possesses excellent anti-corrosion performance and anti-fatigue performance.

Abstract: The present invention relates to a porous material, the pores of the porous material are uniformly distributed. The uniform distribution of the pores means that the pores are evenly distributed at any unit-level volume of the porous material. The elastic modulus of the porous material is reduced by 10-99% compared to that of the raw material used to make the porous material. This kind of porous material ensures the uniformity of its various properties. It is a porous material with excellent performance and quality. Its uniformity also ensures that its elastic modulus can be effectively reduced to meet multiple purposes.

Abstract: A precipitation hardenable, cobalt-nickel base superalloy is disclosed. The is characterized by the following weight percent composition. C about 0.01 to about 0.15 Cr about 6.00 to about 15.00 Ni about 30.00 to about 45.00 W about 3.00 to about 15.00 Ti about 0.50 to about 4.00 Al about 3.00 to about 7.00 Nb up to about 2.50 Ta up to about 6.00 Hf up to about 1.50 Zr up to about 1.50 B up to about 0.20 Mo up to about 2.50 Si up to about 1.50 The balance of the alloy is cobalt and usual impurities. The alloy provides a novel combination of strength and ductility after long-term exposure to elevated operating temperatures as found in gas turbines and jet engines. A fine-grain steel article made from the alloy is also disclosed. The steel article is also characterized by a continuous surface layer of Al2O3 and Cr2O3 that protects the alloy from oxidation at the elevated operating temperatures.

Abstract: A method includes producing a light metal cast component from a melt of an aluminium casting alloy. The alloy contains, by weight, silicon with 3.5 to 5.0%, magnesium with 0.2 to 0.7%, titanium with 0.07 to 0.12%, boron with a maximum of 0.012%, and optionally further alloy elements together with less than 1.5%, the rest, aluminium as well as unavoidable impurities, wherein the melt is produced from a base melt, a first grain refiner of an aluminium-silicon alloy and a second grain refiner of an aluminium-titanium-alloy, wherein the melt, in relation to the total weight, contains in total an amount of 0.1 to 5.0% of the first and the second grain refiner; wherein the casting is carried out by a low-pressure method and the melt is acted upon by compacting after the casting.

Abstract: A 7000-series aluminum alloy sheet that is useful for automobile parts and that is provided with both strength and stress corrosion cracking resistance and having an average grain size of 15 ?m or lower, an average percentage of low-angle grain boundaries with tilt angles from 5 to 15° of 15% or higher, and an average percentage of high-angle grain boundaries with tilt angles higher than 15° of 15 to 50%.

Abstract: A tube for use in conjunction with a deep drilled hole comprises a light metal tube made of an aluminium alloy, having sections of different wall thicknesses arranged in the longitudinal direction of the tube and a respective coupling at each end for connecting the tube to a further tube, wherein the light metal tube is produced from an aluminum alloy containing the following elements: 2.5-5.0 wt. % Cu, 0.2-1.0 wt. % Mg, 0.8-2.0 wt. % Li, max. 0.15 wt. % Si, max. 0.15 wt. % Fe, max. 0.5 wt. % Mn, max. 1.0 wt. % Zn, max. 0.1 wt. % Ti, max. 0.5 wt. % Ag, the remainder being Al and unavoidable impurities. Also described is a method for producing a light metal tube for a tube of this type configured for example as a bore tube.

Abstract: A ferrosilicon inoculant for gray cast iron containing between 0.1 to 10% by weight strontium, less than 0.35% by weight calcium, 1.5 to 10% by weight aluminum and 0.1 to 15% zirconium, The inoculant, method for producing the inoculant, method for inoculating the melt and a gray cast iron inoculated with the inoculant are covered.

Abstract: Provided is a ferritic stainless steel excellent in oxidation resistance and thermal fatigue resistance. The ferritic stainless steel contains, in mass %, C: 0.020% or less, Si: more than 0.1% and 3.0% or less, Mn: 0.05 to 2.0%, P: 0.050% or less, S: 0.010% or less, Al: 0.3 to 6.0%, N: 0.020% or less, Cr: 12 to 30%, Nb: more than 0.3% and 1.0% or less, Ti: 0.01 to 0.5%, Mo: 0.3 to 6.0%, Co: 0.01 to 3.0%, and Ni: 0.02 to 1.0%, the balance being Fe and unavoidable impurities. Moreover, Si+Al>1.0%, Al—Mn>0%, and Nb—Ti>0% hold.

Abstract: This steel component includes, by mass %, C: 0.50% to 0.65%, Si: 0.60% to 1.20%, Mn: 0.60% to 1.00%, P: 0.040% to 0.060%, S: 0.060% to 0.100%, Cr: 0.05% to 0.20%, V: 0.25% to 0.40%, Bi: 0.0001% to 0.0050%, N: 0.0020% to 0.0080%, and a remainder including Fe and impurities, in which a steel structure is a ferrite-pearlite, and an area ratio of a ferrite therein is 20% or more.

Abstract: Provided is a prehardened steel material containing: 0.05?C?0.25 mass %, 0.01?Si?1.00 mass %, 0.40?Mn?1.80 mass %, 0.0002?S?0.3000 mass %, 0.30?Cu?1.80 mass %, 2.00?Ni?3.90 mass %, 0.05?Cr?3.20 mass %, 0.05?Mo?0.80 mass %, and 0.30?Al?1.50 mass %, with a balance being Fe and unavoidable impurities, in which the prehardened steel material has: a cross-sectional size of 350 mm or more in width and 350 mm or more in height, a hardness of 34 to 43 HRC, an average value of prior austenite grain size being 85 ?m or less, and an average value of impact value being 18 J/cm2 or higher.

Abstract: The present invention provides a method of forming a component (40) from an alloy sheet of material (30) having at least a Solvus temperature and a Solidus temperature of a precipitation hardening phase, the method comprising the steps of: heating the sheet (30) to above its Solvus temperature; initiating forming the heated sheet (30) between matched tools (32, 34) of a die press and forming by means of plastic deformation towards a final shape whilst allowing the average temperature of the sheet (30) to reduce at a first predetermined rate A; interrupting the forming of the sheet for a predetermined first interruption period P1 prior to achieving said final shape; and, during the interrupt holding the sheet of material with reduced or no deformation and allowing the average temperature of the sheet to reduce at a second predetermined rate B lower than or equal to the first predetermined rate in order to allow for a reduction in dislocations and completing the forming of the heated sheet into the final shape

Abstract: A castable, moldable, and/or extrudable structure using a metallic primary alloy. One or more additives are added to the metallic primary alloy so that in situ galvanically-active reinforcement particles are formed in the melt or on cooling from the melt. The composite contain an optimal composition and morphology to achieve a specific galvanic corrosion rate in the entire composite. The in situ formed galvanically-active particles can be used to enhance mechanical properties of the composite, such as ductility and/or tensile strength. The final casting can also be enhanced by heat treatment, as well as deformation processing such as extrusion, forging, or rolling, to further improve the strength of the final composite over the as-cast material.

Abstract: A surface-treated steel material includes a coating film formed on a surface of a steel material through a plating layer. The plating layer is obtained by immersing the steel material in a galvalume bath containing Mg. In the surface-treated steel material, the coating film is formed using a coating composition containing a coating film-forming resin, a cross-linking agent, a predetermined vanadium compound, and trimagnesium phosphate. The vanadium compound is a compound satisfying a predetermined electrical conductivity. The content of the vanadium compound is limited to a specified amount with respect to 100 mass % of the total of the coating film-forming resin solids and the cross-linking agent solids. The vanadium compound has a specified pH, and the content of the trimagnesium phosphate is a specified amount with respect to 100 mass % of the total of the coating film-forming resin solids and the cross-linking agent solids.

Abstract: Endodontic instruments for use in performing root canal therapy on a tooth are disclosed. In one form, the instruments include an elongate shank having a cutting edge extending from a distal end of the shank along an axial length of the shank. The shank comprises a titanium alloy, and the shank is prepared by heat-treating the shank at a temperature above 25° C. in an atmosphere consisting essentially of a gas unreactive with the shank. In another form, the endodontic instruments have an elongate shank having a cutting edge extending from a distal end of the shank along an axial length of the shank. The shank consists essentially of a titanium alloy selected from alpha-titanium alloys, beta-titanium alloys, and alpha-beta-titanium alloys. The instruments solve the problems encountered when cleaning and enlarging a curved root canal.

Abstract: The present disclosure provides a baffle device for an evaporation apparatus and the evaporation apparatus. The baffle device includes a baffle assembly, configured to separate an evaporation ejection source from a substrate when the substrate is being switched in the evaporation apparatus; and at least one collection device, provided below the baffle assembly, and configured to collect evaporation material falling down from the baffle assembly.

Abstract: A Ti—Ta alloy sputtering target containing 0.1 to 30 at % of Ta, and remainder being Ti and unavoidable impurities, wherein the Ti—Ta alloy sputtering target has an oxygen content of 400 wtppm or less. The present invention has a favorable surface texture with a low oxygen content and is readily processable due to its low hardness, and therefore the present invention yields a superior effect of being able to suppress the generation of particles during sputtering.

Abstract: In various embodiments, eroded sputtering targets are partially refurbished by spray- depositing particles of target material to at least partially fill certain regions (e.g., regions of deepest erosion) without spray-deposition within other eroded regions (e.g., regions of less erosion). The partially refurbished sputtering targets may be sputtered after the partial refurbishment without substantive changes in sputtering properties (e.g., sputtering rate) and/or properties of the sputtered films.

Abstract: In a method of forming a carbon film of this invention, a target made of carbon is used, and in a state in which leakage magnetic field Mf is being functioned on a front surface side of the target, electric power is applied to the target to sputter, thereby forming a carbon film on a surface of a to-be-processed object. At this time, a region for the leakage magnetic field to function on the target surface is made local, and the region for the leakage magnetic field to function is periodically changed by relatively moving the region relative to the target from an origin on the target surface back to the origin. Also, a product of an average magnetic field strength of the leakage magnetic field at a predetermined position on the target surface and applied electric power is kept below 125 G·kW.

Abstract: The invention relates to a device and a method for coating extra-long sheet-type substrates, in particular glass panes, in a vacuum coating system, said system having the following features: a) a series connection of chambers, through which each substrate sheet (9) passes and which are arranged on the entry side, namely a load lock chamber (1), a buffer chamber (2) and a transfer chamber (3), the entry side of each of said chambers being vacuum-sealable by a check valve (8, 11, 15), wherein an area of process chambers (4) follows the transfer chamber (3) and an exit-side series connection of a transfer chamber (5), buffer chamber (7) and load lock chamber (8) follows the process chambers (4); b) a conveyor device (10) constructed on rollers; c) a single high-power vacuum pump (13) with an adapter flange (14) in the region of the buffer chamber (2); d) at least two flow baffles (12) in the region of the buffer chamber (2); e) a system (16) for the longitudinal displacement of the flow baffles (12) and a system

Abstract: A deposition apparatus configured to perform a deposition process on a substrate, the deposition apparatus including a chamber having an exhaust opening in a surface, a deposition source in the chamber configured to eject one or more deposition materials toward the substrate, a cooling plate corresponding to an inner surface of the chamber, at which the exhaust opening is formed, a refrigerator contacting the cooling plate, and a pump coupled to the exhaust opening.

Abstract: Systems and methods discussed herein are related to a coating for a diamond table for a cutting element that may be used in downhole tooling. The coating is employed to fill a plurality of voids left by the manufacturing process that compromise the integrity of the cutting element and the associated downhole tooling. The coating may comprise diamond nanoparticles in a metal matrix and may be used with or without a binder layer applied directly to the diamond table, the coating may alternatively be a pure diamond film coating, and may be employed to fill voids left by the manufacturing process.

Abstract: A titanium aluminum nitride coating having a columnar crystal structure, which is formed on a substrate, comprises high-Al TiAlN having an fcc structure, which has a composition represented by (Tix1, Aly1)N, wherein x1 and y1 are numbers meeting x1=0.005-0.1, and y1=0.995-0.9 by atomic ratio, and network-like, high-Ti TiAlN having an fcc structure, which has a composition represented by (Tix2, Aly2)N, wherein x2 and y2 are numbers meeting x2=0.5-0.9, and y2=0.5-0.1 by atomic ratio; the high-Al TiAlN being surrounded by the network-like, high-Ti TiAlN.

Abstract: A method for reducing post-annealing shrinkage of silicon dioxide film includes arranging a substrate on a substrate support in a processing chamber; setting a pressure in the processing chamber to a predetermined pressure range; setting a temperature of the substrate support to a predetermined temperature range; supplying a process gas mixture to a gas distribution device. The process gas mixture includes TEOS gas, a gas including an oxygen species, and argon gas. The argon gas comprises greater than 20% of the process gas mixture by volume. The method further includes striking plasma and depositing the film on the substrate.

Abstract: The invention relates to methods and apparatus in which precursor vapor is guided along at least one in-feed line into a reaction chamber of a deposition reactor, and material is deposited on surfaces of a batch of vertically placed substrates by establishing a vertical flow of precursor vapor in the reaction chamber and having it enter in a vertical direction in between said vertically placed substrates.

Abstract: A method for cleaning a processing chamber of a substrate processing system includes supplying nitrogen trifluoride (NF3) gas to a remote plasma source (RPS); generating RPS plasma using the RPS; supplying the RPS plasma to the processing chamber; supplying NF3 gas as bypass gas to the processing chamber; striking in-situ plasma in the processing chamber while the RPS plasma is supplied; and cleaning the processing chamber during a cleaning period using both the RPS plasma and the in-situ plasma.

Abstract: Disclosed is a substrate processing apparatus and the method of processing an exhaust gas. The substrate processing apparatus and the method of processing an exhaust gas according to the present invention, an exhaust gas decomposition module may decompose a source gas exhausted from a process chamber to decompose a ligand of the source gas. Also, the ligand and the source gas of which the ligand has been decomposed may be put in a stabilized state by reacting with separately supplied O2, N2O, or O3, and then, may be changed to a mixed gas including a reactant gas mixed therewith. Subsequently, the mixed gas may flow into the exhaust pump and may be emitted. Alternatively, the ligand and the source gas may be mixed with the reactant gas and may be emitted.

Abstract: The present invention provides a technique capable of suppressing the formation of particles. The substrate processing apparatus may include: a processing container where a substrate is processed; a process gas supply unit configured to supply a process gas into the processing container; a substrate support installed in the processing container; a first exhaust unit connected to the processing container; a shaft supporting the substrate support; a shaft support configured to support the shaft; an opening disposed at a bottom portion of the processing container and penetrated by the shaft; a flexible bellows disposed between the opening and the shaft support, wherein an inner space of the bellows is in communication with that of the processing container; and a gas supply/exhaust unit configured to supply an inert gas into the inner space of the bellows while exhausting an inner atmosphere of the bellows.

Abstract: There is provided a technique that includes: forming a film on a substrate in a process chamber by performing: supplying a precursor gas to the substrate through a first nozzle; and supplying at least one selected from a group consisting of an oxygen-containing gas and a nitrogen-and-hydrogen-containing gas to the substrate through a second nozzle that is configured such that gas stagnation on a surface of the second nozzle caused by the second nozzle is less than gas stagnation on a surface of the first nozzle caused by the first nozzle, or such that contact of the second nozzle with gas staying on the surface of the second nozzle is less than contact of the first nozzle with gas staying on the surface of the first nozzle.

Abstract: A method including activating an area of a polymer layer on a substrate with electromagnetic radiation; modifying the activated area; forming a self-assembled monolayer on the modified active area; reacting the self-assembled monolayer with the self-assembled monolayer; and reacting the self-assembled monolayer with a conductive material. A method including activating an area of a polymer dielectric layer on a substrate with electro-magnetic radiation, the area selected for an electrically conductive line; modifying the activated area; forming a self-assembled monolayer on the modified active area; reacting the self-assembled monolayer with a catalyst; and electroless plating a conductive material on the self-assembled monolayer.

Abstract: Provided is an electroless platinum plating solution that can exhibit solution stability without the use of heavy metal ions or thiol compounds and can prevent the generation of ammonia gas. The electroless platinum plating solution is characterized by comprising a water-soluble platinum compound, and one or more reducing agents selected from the group consisting of formalin, glucose, formic acid and formates. The water-soluble platinum compound is preferably one or more water-soluble platinum compounds selected from the group consisting of platinous chloride (II), hydrogen tetrachloroplatinate (II), tetrachloroplatinate (II), platinic chloride (IV), hydrogen hexachloroplatinate (IV), hexachloroplatinate (IV), hydrogen hexahydroxoplatinate (IV), hexahydroxoplatinate (IV) and dichlorotetraammineplatinum (II). The electroless platinum plating solution preferably comprises an organic acid.

Abstract: A method for producing a heat exchanger having at least one cooling line with a lightweight metal base through which a water-based coolant can flow may include passivating a surface of the at least one cooling line, which is in contact with the coolant, before the at least one cooling line is filled with the coolant.

Abstract: Methods for preparing an environmental barrier coating and the resulting coating are provided. The methods and products include the incorporation of a continuous ceramic inner layer and a segmented ceramic outer layer on a CMC component. The segmented ceramic outer layer may be formed by thermal spray techniques. The coating is more stable at higher temperatures and provides for a longer lifetime of the coated component.