Patents Issued in November 29, 2018
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Publication number: 20180342505Abstract: A method is provided. The method includes forming a first to third gate lines on a substrate, the second gate line formed between the first and third gate lines; forming a gate isolation region to cut the first to third gate lines into two first sub gate lines, two second sub gate lines and two third sub gate lines, respectively; forming a first gate contact on one of the two first sub gate lines; forming a second gate contact on the two second sub gate lines; forming a third gate contact on one of the two third sub gate lines; forming a first metal line to connect the first and third gate contacts; and forming a second metal line. The first to third gate lines extend in a first direction, and the gate isolation region extends in a second direction different from the first direction.Type: ApplicationFiled: July 17, 2018Publication date: November 29, 2018Applicant: SAMSUNG ELECTRONICS CO., LTD.Inventors: Sang-Hoon BAEK, Sun-Young PARK, Sang-Kyu OH, Ha-young KIM, Jung-Ho DO, Moo-Gyu BAE, Seung-Young LEE
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Publication number: 20180342506Abstract: A switch circuit includes a first MOS transistor and a second MOS transistor of a same conductivity type connected in parallel between a first terminal and a second terminal of the switch circuit, the first and second MOS transistors having respective gate terminals coupled to the control terminal to receive a control signal to turn the first and second MOS transistors on or off. The first MOS transistor is characterized by a first reverse gate-to-drain capacitance (Crss) and the second MOS transistor is characterized by a second Crss that is greater than the first Crss.Type: ApplicationFiled: August 2, 2018Publication date: November 29, 2018Inventors: Ji Pan, Sik Lui
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Publication number: 20180342507Abstract: Methods and structures that include a vertical-transport field-effect transistor. A first section of a dielectric layer is deposited on a first device region of a substrate and a second section of the dielectric layer is deposited on a second device region of the substrate. A gate stack is deposited on the first device region and the second device region. The gate stack is patterned to define a first gate electrode of the vertical-transport field-effect transistor on the first section of the dielectric layer and a second gate electrode of a high-voltage field-effect transistor on the second section of the dielectric layer. The first section of the dielectric layer is a spacer layer arranged between the first gate electrode and the first device region. The second section of the dielectric layer is a portion of a gate dielectric arranged between the second gate electrode and the second device region.Type: ApplicationFiled: May 25, 2017Publication date: November 29, 2018Inventors: Ruilong Xie, Chun-Chen Yeh, Kangguo Cheng, Tenko Yamashita
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Publication number: 20180342508Abstract: A semiconductor device is provided. The semiconductor device includes a substrate, a plurality of fins comprising a first fin, a second fin, a third fin, a fourth fin and a fifth fin, each of the plurality of protruding from the substrate in a first direction, and spaced apart from one another in a second direction that intersects the first direction and a plurality of trenches comprising a first trench, a second trench, a third trench and a fourth trench, each of the plurality of trenches being formed between adjacent fins of the plurality of fins, wherein variation of a first width of the first trench and a third width of the third trench is smaller than a first variation, wherein variation of a second width of the second trench and a fourth width of the fourth trench is smaller than a second variation, and wherein the second variation is greater than the first variation.Type: ApplicationFiled: September 19, 2017Publication date: November 29, 2018Applicant: SAMSUNG ELECTRONICS CO., LTD.Inventors: Sung Min KIM, Dong Won KIM, Geum Jong BAE
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Publication number: 20180342509Abstract: In a method of manufacturing a semiconductor device, a separation wall made of a dielectric material is formed between two fin structures. A dummy gate structure is formed over the separation wall and the two fin structures. An interlayer dielectric (ILD) layer is formed over the dummy gate structure. An upper portion of the ILD layer is removed, thereby exposing the dummy gate structure. The dummy gate structure is replaced with a metal gate structure. A planarization operation is performed to expose the separation wall, thereby dividing the metal gate structure into a first gate structure and a second gate structure. The first gate structure and the second gate structure are separated by the separation wall.Type: ApplicationFiled: July 16, 2018Publication date: November 29, 2018Inventors: Kuo-Cheng CHING, Chih-Hao WANG, Chih-Liang CHEN, Shi Ning JU
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Publication number: 20180342510Abstract: A semiconductor structure includes fins that have a 2D material, such as Graphene, upon at least the fin sidewalls. The thickness of the 2D material sidewall may be tuned to achieve desired finFET band gap control. Neighboring fins of the semiconductor structure form fin wells. The semiconductor structure may include a fin cap upon each fin and the 2D material is formed upon the sidewalls of the fin and the bottom surface of the fin wells. The semiconductor structure may include a well-plug at the bottom of the fin wells and the 2D material is formed upon the sidewalls and upper surface of the fins. The semiconductor structure may include both fin caps and well-plugs such that the 2D material is formed upon the sidewalls of the fins.Type: ApplicationFiled: August 1, 2018Publication date: November 29, 2018Inventors: Sami Rosenblatt, Rasit O. Topaloglu
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Publication number: 20180342511Abstract: A semiconductor structure includes fins that have a 2D material, such as Graphene, upon at least the fin sidewalls. The thickness of the 2D material sidewall may be tuned to achieve desired finFET band gap control. Neighboring fins of the semiconductor structure form fin wells. The semiconductor structure may include a fin cap upon each fin and the 2D material is formed upon the sidewalls of the fin and the bottom surface of the fin wells. The semiconductor structure may include a well-plug at the bottom of the fin wells and the 2D material is formed upon the sidewalls and upper surface of the fins. The semiconductor structure may include both fin caps and well-plugs such that the 2D material is formed only upon the sidewalls of the fins.Type: ApplicationFiled: August 1, 2018Publication date: November 29, 2018Inventors: Sami Rosenblatt, Rasit O. Topaloglu
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Publication number: 20180342512Abstract: A method of forming a power rail to semiconductor devices comprising removing a portion of the gate structure forming a gate cut trench separating a first active region of fin structures from a second active region of fin structures. A conformal etch stop layer is formed in the gate cut trench. A fill material is formed on the conformal etch stop layer filling at least a portion of the gate cut trench. The fill material has a composition that is etched selectively to the conformal etch stop layer. A power rail is formed in the gate cut trench. The conformal etch stop layer obstructs lateral etching during forming the power rail to substantially eliminate power rail to gate structure shorting.Type: ApplicationFiled: August 3, 2018Publication date: November 29, 2018Inventors: Marc A. Bergendahl, Andrew M. Greene, Rajasekhar Venigalla
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Publication number: 20180342513Abstract: A complementary metal-oxide-semiconductor (CMOS) transistor may include a first semiconductor structure and a gate stack on the first semiconductor structure. The gate stack may include a gate dielectric layer on the first semiconductor structure, a work function material on the gate dielectric layer, and a gate metal fill material on the work function material of the gate stack. The gate metal fill material may include a low resistivity carbon alloy. A dielectric fill material may be included on the gate stack.Type: ApplicationFiled: July 28, 2017Publication date: November 29, 2018Inventors: Ye LU, Junjing BAO, Bin YANG, Lixin GE, Yun YUE
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Publication number: 20180342514Abstract: Methods for forming a semiconductor structure are provided. The method includes forming a first dummy gate structure and forming first spacers over a sidewall of the first dummy gate structure. The method includes removing the first dummy gate structure to form a first trench between the first spacers and forming a first capping layer in the first trench. A first portion of the first capping layer covers a sidewall of the first trench and a second portion of the first capping layer covers a bottom surface of the first trench. The method further includes oxidizing a sidewall of the first portion of the first capping layer and a top surface of the second portion of the first capping layer to form a first capping oxide layer and forming a first work function metal layer and forming a first gate electrode layer over the first work function metal layer.Type: ApplicationFiled: August 6, 2018Publication date: November 29, 2018Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chih-Wei LIN, Chih-Lin WANG, Kang-Min KUO, Cheng-Wei LIAN
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Publication number: 20180342515Abstract: A first interconnect on an interconnect level connects a first subset of PMOS drains together of a CMOS device. A second interconnect on the interconnect level connects a second subset of the PMOS drains together. The second subset of the PMOS drains is different than the first subset of the PMOS drains. The first interconnect and the second interconnect are disconnected on the interconnect level. A third interconnect on the interconnect level connects a first subset of NMOS drains together of the CMOS device. A fourth interconnect on the interconnect level connects a second subset of the NMOS drains together. The second subset of the NMOS drains is different than the first subset of the NMOS drains. The third interconnect and the fourth interconnect are disconnected on the interconnect level. The first, second, third, and fourth interconnects are coupled together through at least one other interconnect level.Type: ApplicationFiled: August 7, 2018Publication date: November 29, 2018Inventors: Seid Hadi RASOULI, Animesh DATTA, Ohsang KWON
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Publication number: 20180342516Abstract: A semiconductor device includes a substrate, a well on the substrate and an FFT on the well. The FET includes a first source/drain, a vertical channel layer, a gate structure, a second source/drain and a body structure. The first source/drain is on the well. The vertical channel layer extends form the first source/drain. The first gate structure surrounds a first portion of sidewalls of the vertical channel layer. The second source/drain is on the vertical channel layer. The body structure is in physical contact with the vertical channel layer. The body structure and the vertical channel layer constitute a bipolar device.Type: ApplicationFiled: May 26, 2017Publication date: November 29, 2018Inventors: Hung-Li CHIANG, Szu-Wei HUANG, Chih-Chieh YEH, Yee-Chia YEO
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Publication number: 20180342517Abstract: A dynamic random access memory (DRAM) includes a substrate, a bit line, a capacitor contact, a dielectric structure, a capacitor, and a landing pad. The bit line is located on the substrate. The capacitor contact is aside the bit line. The capacitor contact protrudes from a space between adjacent bit lines, such that upper sidewalls of the capacitor contact are exposed by the bit line. The dielectric structure is located on the upper surface of the bit line and extending to one portion of the upper sidewalls of the capacitor contacts. The capacitor is located above the capacitor contact. The landing pad is located between the capacitor contact and the capacitor. The landing pad at least covers one portion of the upper surface of the capacitor contact. A contact area between landing pad and the capacitor contact is greater than a contact area between the landing pad and the capacitor.Type: ApplicationFiled: May 25, 2017Publication date: November 29, 2018Applicant: Winbond Electronics Corp.Inventor: Kazuaki Takesako
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Publication number: 20180342518Abstract: A semiconductor device includes a gate trench formed into a semiconductor substrate; a gate dielectric layer formed in the gate trench to cover an inside surface of the gate trench; and a gate electrode disposed over the gate dielectric layer to fill the gate trench, wherein the gate electrode includes: second crystal grains formed in the gate trench; and first crystal grains disposed between the second crystal grains and the gate dielectric layer and having a smaller crystal grain size than the second crystal grains.Type: ApplicationFiled: December 28, 2017Publication date: November 29, 2018Inventor: Dong-Soo KIM
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Publication number: 20180342519Abstract: A semiconductor device includes a substrate including a cell region and peripheral region and bottom electrodes on the substrate. The bottom electrodes are arranged in a first row and a second row each extending in a first direction. The first row and the second row are adjacent to each other in a second direction perpendicular to the first direction. The bottom electrodes in the first row include an outermost bottom electrode and a next outermost bottom electrode that are separated by a first distance in the first direction. The bottom electrodes in the second row include an outermost bottom electrode and a next outermost bottom electrode that are separated by a second distance in the first direction. The outermost bottom electrode in the first row is on the peripheral region of the substrate. The outermost bottom electrode in the second row is on the cell region of the substrate.Type: ApplicationFiled: November 16, 2017Publication date: November 29, 2018Applicant: Samsung Electronics Co., Ltd.Inventors: Jihoon Kim, Wonchul Lee
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Publication number: 20180342520Abstract: A method for fabricating a semiconductor device includes: forming a first conductive layer; forming a second conductive layer over the first conductive layer; forming a conductive line by etching the second conductive layer; etching a portion of the first conductive layer to form a plug head having the same critical dimension as the conductive line; forming a first spacer that covers the conductive line and the plug head; etching the remaining first conductive layer to form a plug body that is aligned with the first spacer, wherein the plug body have a greater critical dimension than the plug head; and forming a second spacer by performing a selective oxidation onto a side wall of the plug body.Type: ApplicationFiled: January 10, 2018Publication date: November 29, 2018Inventor: Jae-Houb CHUN
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Publication number: 20180342521Abstract: Semiconductor devices and methods of forming the same are provided. The methods may include forming first and second line patterns. The first line pattern has a first side facing the second line pattern, and the second line pattern has a second side facing the first line pattern. The methods may also include forming a first spacer structure on the first side of the first line pattern and a second spacer structure on the second side of the second line pattern. The first and the second spacer structures may define an opening. The methods may further include forming a first conductor in a lower part of the opening, forming an expanded opening by etching upper portions of the first and second spacer structures, and forming a second conductor in the expanded opening. The expanded opening may have a width greater than a width of the lower part of the opening.Type: ApplicationFiled: January 4, 2018Publication date: November 29, 2018Inventors: Yoon Ho Son, Jae Uk Shin, Yong Sun Ko, Im Soo Park, Sung Yoon Chung
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Publication number: 20180342522Abstract: In a region just below an access gate electrode in an SRAM memory cell, a second halo region is formed adjacent to a source-drain region and a first halo region is formed adjacent to a first source-drain region. In a region just below a drive gate electrode, a third halo region is formed adjacent to the third source-drain region and a fourth halo region is formed adjacent to a fourth source-drain region. The second halo region is set to have an impurity concentration higher than the impurity concentration of the first halo region. The third halo region is set to have an impurity concentration higher than the impurity concentration of the fourth halo region. The impurity concentration of the first halo region and the impurity concentration of the fourth halo region are different from each other.Type: ApplicationFiled: June 21, 2018Publication date: November 29, 2018Inventors: Koji NII, Makoto YABUUCHI, Yasumasa TSUKAMOTO, Kengo MASUDA
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Publication number: 20180342523Abstract: A semiconductor device includes: active regions arranged in a first grid oriented parallel to a first direction; and gate electrodes arranged spaced apart in a second grid and overlying corresponding ones of the active regions, the second grid being oriented parallel to a second direction, the second direction being orthogonal to the first direction. The first gaps are interspersed between neighboring ones of the active regions. For a flyover intersection at which a corresponding gate electrode crosses over a corresponding active region and for which the gate electrode is not functionally connected to the corresponding active region, the gate electrode does not extend substantially beyond the corresponding active region and so does not extend substantially into the corresponding gap.Type: ApplicationFiled: October 10, 2017Publication date: November 29, 2018Inventors: Yu-Jen CHEN, Wen-Hsi LEE, Ling-Sung WANG, I-Shan HUANG, Chan-yu HUNG
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Publication number: 20180342524Abstract: The disclosed technology generally relates semiconductor devices and more particularly to a vertical transistor device, and a method of fabricating the same. In one aspect, the method includes providing, on a substrate, a fin formed of a stack of a first layer, a second layer and a third layer, wherein the second layer is positioned above the first layer and the third layer is positioned above the second layer. The method additionally includes forming a dielectric on the sidewalls of the first and third layers of the fin selectively against a sidewall of the second layer, and the method additionally includes forming a gate contacting layer for contacting a sidewall of the second layer. The first and third layers define a source region and a drain region, respectively, of the vertical transistor device. The second layer defines a channel region of the vertical transistor device.Type: ApplicationFiled: May 15, 2018Publication date: November 29, 2018Inventors: Julien Ryckaert, Naoto Horiguchi, Dan Mocuta, Trong Huynh Bao
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Publication number: 20180342525Abstract: A structure comprises a first channel region forming an n-channel device; a second channel region forming a p-channel device, the p-channel device being stacked with the n-channel device in a vertical orientation; a gate positioned around the stacked n-channel device and p-channel device; and at least one source region and at least one drain region extending from each of the n-channel device and the p-channel device. Each of the at least one source region and the at least one drain region within the stacked n-channel device and p-channel device are independently contacted.Type: ApplicationFiled: June 18, 2018Publication date: November 29, 2018Inventors: Michael A. Guillorn, Robert R. Robison, Reinaldo Vega, Rajasekhar Venigalla
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Publication number: 20180342526Abstract: A semiconductor device of the present invention includes: an element isolation part which is disposed between fins and whose height is lower than the height of each fin; a memory gate electrode placed over the fins and the element isolation part with a memory gate insulating film having a charge storage part in between; and a control gate electrode disposed in line with the memory gate electrode. The height of the element isolation part below the memory gate electrode is higher than the height of the element isolation part below the control gate electrode. A mismatch between electron injection and hole injection is improved, rewriting operation speed is accelerated, and reliability is enhanced by making the height of the element isolation part below the memory gate electrode higher than the height of the element isolation part below the control gate electrode as mentioned above.Type: ApplicationFiled: March 8, 2018Publication date: November 29, 2018Inventor: Shibun Tsuda
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Publication number: 20180342527Abstract: A method for manufacturing a semiconductor memory device including following steps is provided. A substrate having a first region, a second region, and a third region is provided. A first stack structure is formed on the first region. A second stack structure is formed on the second region. A third stack structure is formed on the third region. A first mask layer is formed on the substrate to cover the third stack structure. A first ion implantation process is performed, so that a second floating gate and a second control gate in the second stack structure are changed to a first conductive type. A second mask layer formed on the substrate to cover the first and second stack structures. A second ion implantation process is performed, so that a third floating gate and a third control gate in the third stack structure are changed as a second conductive type.Type: ApplicationFiled: January 15, 2018Publication date: November 29, 2018Applicant: Winbond Electronics Corp.Inventors: Cheng-Ta Yang, Lu-Ping Chiang
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Publication number: 20180342528Abstract: The semiconductor device includes a stack, a plurality of channel structures passing through the stack, a coupling structure which is disposed below the stack for coupling the channel structures with each other and has an uneven lower surface, and a source pick-up line electrically coupled with the coupling structure.Type: ApplicationFiled: December 12, 2017Publication date: November 29, 2018Inventor: Nam Jae LEE
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Publication number: 20180342529Abstract: A method for manufacturing a semiconductor device is provided. The method includes forming a split gate stack having a main gate and a select gate and forming a logic gate stack having a logic gate over a semiconductor substrate. The main gate and the logic gate is respectively replaced with a metal memory gate and a metal logic gate, in which the main gate and the logic gate are replaced simultaneously.Type: ApplicationFiled: August 6, 2018Publication date: November 29, 2018Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Harry-Hak-Lay CHUANG, Wei-Cheng WU, Ya-Chen KAO
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Publication number: 20180342530Abstract: A method of forming a semiconductor device structure comprises forming a stack structure comprising stacked tiers. Each of the stacked tiers comprises a first structure comprising a first material and a second structure comprising a second, different material longitudinally adjacent the first structure. A patterned hard mask structure is formed over the stack structure. Dielectric structures are formed within openings in the patterned hard mask structure. A photoresist structure is formed over the dielectric structures and the patterned hard mask structure. The photoresist structure, the dielectric structures, and the stack structure are subjected to a series of material removal processes to form apertures extending to different depths within the stack structure. Dielectric structures are formed over side surfaces of the stack structure within the apertures. Conductive contact structures are formed to longitudinally extend to bottoms of the apertures.Type: ApplicationFiled: May 26, 2017Publication date: November 29, 2018Inventors: Roger W. Lindsay, Michael A. Smith, Brett D. Lowe
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Publication number: 20180342531Abstract: A three-dimensional memory device includes an alternating stack of insulating layers and electrically conductive layers located over a substrate, the alternating stack containing a memory array region and a terrace region. Memory stack structures containing a memory film and a vertical semiconductor channel extend through the memory array region of the alternating stack. Support pillar structures extending through the terrace region of the alternating stack. The support pillar structures have different heights from each other.Type: ApplicationFiled: May 29, 2017Publication date: November 29, 2018Inventors: Hiromasa Susuki, Masanori Tsutsumi, Shigehisa Inoue, Junji Oh, Kensuke Yamaguchi, Seiji Shimabukuro, Yuji Fukano, Ryoichi Ehara, Youko Furihata
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Publication number: 20180342532Abstract: Embodiments of the present disclosure describe an integrated circuit that may include a first transistor on a first side of a semiconductor substrate and a second transistor on a second side of the semiconductor substrate, wherein the second side is opposite and parallel to the first side. In embodiments, the integrated circuit may further include a first capacitor positioned on the first side of the semiconductor substrate and coupled to the first transistor to form a first memory cell, and a second capacitor positioned on the second side of the semiconductor substrate and coupled to the second transistor to form a second memory cell.Type: ApplicationFiled: December 24, 2015Publication date: November 29, 2018Inventors: Rishabh MEHANDRU, Aaron D. LILAK
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Publication number: 20180342533Abstract: A semiconductor device includes a cell structure; n first pad structures formed on one side of the cell structure and each configured to have a step form in which 2n layers form one stage; and n second pad structures formed on the other side of the cell structure each configured to have a step form in which 2n layers form one stage, wherein n is a natural number of 1 or higher, and the first pad structures and the second pad structures have asymmetrical step forms having different heights.Type: ApplicationFiled: July 17, 2018Publication date: November 29, 2018Applicant: SK hynix Inc.Inventors: Ki Hong LEE, Seung Ho PYI, Sung Ik MOON
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Publication number: 20180342534Abstract: Some embodiments include methods of forming semiconductor constructions. Alternating layers of n-type doped material and p-type doped material may be formed. The alternating layers may be patterned into a plurality of vertical columns that are spaced from one another by openings. The openings may be lined with tunnel dielectric, charge-storage material and blocking dielectric. Alternating layers of insulative material and conductive control gate material may be formed within the lined openings. Some embodiments include methods of forming NAND unit cells. Columns of alternating n-type material and p-type material may be formed. The columns may be lined with a layer of tunnel dielectric, a layer of charge-storage material, and a layer of blocking dielectric. Alternating layers of insulative material and conductive control gate material may be formed between the lined columns. Some embodiments include semiconductor constructions, and some embodiments include NAND unit cells.Type: ApplicationFiled: July 18, 2018Publication date: November 29, 2018Inventors: D.V. Nirmal Ramaswamy, Gurtej S. Sandhu
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Publication number: 20180342535Abstract: Some embodiments include methods of forming semiconductor constructions. Alternating layers of n-type doped material and p-type doped material may be formed. The alternating layers may be patterned into a plurality of vertical columns that are spaced from one another by openings. The openings may be lined with tunnel dielectric, charge-storage material and blocking dielectric. Alternating layers of insulative material and conductive control gate material may be formed within the lined openings. Some embodiments include methods of forming NAND unit cells. Columns of alternating n-type material and p-type material may be formed. The columns may be lined with a layer of tunnel dielectric, a layer of charge-storage material, and a layer of blocking dielectric. Alternating layers of insulative material and conductive control gate material may be formed between the lined columns. Some embodiments include semiconductor constructions, and some embodiments include NAND unit cells.Type: ApplicationFiled: July 18, 2018Publication date: November 29, 2018Inventors: D.V. Nirmal Ramaswamy, Gurtej S. Sandhu
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Publication number: 20180342536Abstract: The purpose of the invention is to form a flexible display device where the substrate is made of resin, wherein the TFT can be annealed in high temperature; consequently, a reliability of the TFT is improved. The concrete measure is as follows. A display device having a pixel electrode and a TFT including a semiconductor layer on a substrate comprising: a source region of the semiconductor layer connects with a source electrode, a drain region of the semiconductor layer connects with a drain electrode; the pixel electrode connects with the source electrode; the drain electrode connects with a video signal line; a distance between the drain electrode and the substrate is smaller than a distance between the semiconductor and the substrate, the semiconductor layer is formed between the pixel electrode and the substrate.Type: ApplicationFiled: May 14, 2018Publication date: November 29, 2018Applicant: Japan Display Inc.Inventors: Isao Suzumura, Hajime Watakabe, Akihiro Hanada, Hirokazu Watanabe, Yohei Yamaguchi, Marina Shiokawa, Ryotaro Kimura
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Publication number: 20180342537Abstract: An SOI substrate having a semiconductor substrate, an insulating layer formed on the semiconductor substrate, and a semiconductor layer formed on the insulating layer is provided. A first region is one for forming a low breakdown voltage MISFET in the semiconductor layer, and a second region, in which the insulating layer and the semiconductor layer have been removed, is one for forming a high breakdown voltage MISFET. After an n-type semiconductor region is formed in the second region and an n-type extension region is formed in the first region, a first heat treatment is performed on the semiconductor substrate. Thereafter, a diffusion layer is formed in each of the first and second regions, and then a second heat treatment is performed on the semiconductor substrate. Herein, the time for which the first heat treatment is performed is longer than the time for which the second heat treatment is performed.Type: ApplicationFiled: March 10, 2018Publication date: November 29, 2018Inventor: Yoshiki YAMAMOTO
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Publication number: 20180342538Abstract: It is an object to manufacture a highly reliable display device using a thin film transistor having favorable electric characteristics and high reliability as a switching element. In a bottom gate thin film transistor including an amorphous oxide semiconductor, an oxide conductive layer having a crystal region is formed between an oxide semiconductor layer which has been dehydrated or dehydrogenated by heat treatment and each of a source electrode layer and a drain electrode layer which are formed using a metal material. Accordingly, contact resistance between the oxide semiconductor layer and each of the source electrode layer and the drain electrode layer can be reduced; thus, a thin film transistor having favorable electric characteristics and a highly reliable display device using the thin film transistor can be provided.Type: ApplicationFiled: April 19, 2018Publication date: November 29, 2018Inventors: Shunpei YAMAZAKI, Toshinari SASAKI, Junichiro SAKATA, Masashi TSUBUKU
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Publication number: 20180342539Abstract: An array substrate and a method for manufacturing the same are provided. The array substrate comprises a display area and a non-display area, wherein the non-display area includes a gate driver on array (GOA) region; wherein the GOA region comprises a first metal layer, an insulating layer, a second metal layer, and a protective layer sequentially formed from bottom to top; and wherein the second metal layer is connected to the first metal layer via a through-hole, and the protective layer covers the second metal layer for protecting a plurality of circuits in the GOA region from deterioration.Type: ApplicationFiled: June 22, 2017Publication date: November 29, 2018Inventors: Weina YONG, Xiangyang XU
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Publication number: 20180342540Abstract: Disclosed are a pixel unit structure and a display device. The pixel unit structure includes a thin film transistor formed on a substrate, and a first insulating layer, a first transparent electrode layer, a second insulating layer, and a second transparent electrode layer formed in sequence from bottom to top above the thin film transistor. A storage capacitor is formed between the first transparent electrode layer and the second transparent electrode layer.Type: ApplicationFiled: January 16, 2017Publication date: November 29, 2018Applicant: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.Inventors: Jianjian Ying, Peng Du
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Publication number: 20180342541Abstract: The present invention provides a TFT substrate manufacturing method. The method uses a photoresist material that contains crystallizable and precipitatable pigment to form a photoresist layer, so that a plurality of crystallization burrs can be formed on a surface of the photoresist layer, making it possible for a pixel electrode film not completely covering the surface of the photoresist layer and thus, allowing a peeling agent to pass through the crystallization burrs and penetrate into the photoresist layer to cause corrosion of the photoresist layer thereby peeling off the photoresist layer and a portion of the pixel electrode film located on the photoresist layer at the same time to form a pixel electrode, whereby, compared to the prior art, peeling can be conducted without adopting a special mask and involving special mask parameters and also requiring no plasma treatment so that the process of fabricating a TFT substrate can be simplified to enhance fabrication efficiency of the TFT substrate.Type: ApplicationFiled: June 20, 2017Publication date: November 29, 2018Inventor: Ji Li
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Publication number: 20180342542Abstract: A coplanar electrode photodiode array and a manufacturing method thereof are disclosed. On a top side of a low resistance rate substrate, a high resistance epitaxial silicon wafer, a first conductive type heavily doped region and a second conductive type doped region are formed, which are a cathode and an anode of a photodiode respectively. The structure includes a trench structure formed between the anode and the cathode, the trench structure may be form by a gap, an insulating material, a conductive structure, a reflective material, and ion implantation, and also includes a first conductive type heavily doped region, an insulating isolation layer or a conductive structure with an insulating layer, and the like formed under the anode and the cathode.Type: ApplicationFiled: August 31, 2016Publication date: November 29, 2018Inventors: Lan ZHANG, Yuanjing LI, Yinong LIU, Haifan HU, Jun LI
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Publication number: 20180342543Abstract: A backside illuminated CMOS image sensor and a method of fabricating the sensor are disclosed. The backside illuminated CMOS image sensor includes a first substrate and a second substrate. A plurality of pixel cells are formed in the front side of the first substrate, and a plurality of grooves are formed in the back side. Each of the grooves has at least one sidewall inclined with respect to the back surface of the first substrate. The second substrate is bonded to the first substrate on a side closer to the front side. A method for fabricating such a backside illuminated CMOS image sensor is also disclosed. The grooves formed in the back side of the first substrate can reduce reflection loss of light incident on the back surface and hence enhance quantum efficiency of the backside illuminated CMOS image sensor.Type: ApplicationFiled: April 25, 2018Publication date: November 29, 2018Inventors: Yanyun LIU, Jinwen DONG, Yang FU, Jifeng ZHU
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Publication number: 20180342544Abstract: One or more cross-wafer capacitors are formed in an electronic component, circuit, or device that includes stacked wafers. One example of such a device is a stacked image sensor. The image sensor can include two or more wafers, with two wafers that are bonded to each other each including a conductive segment adjacent to, proximate, or abutting a bonding surface of the respective wafer. The conductive segments are positioned relative to each other such that each conductive element forms a plate of a capacitor. A cross-wafer capacitor is formed when the two wafers are attached to each other.Type: ApplicationFiled: May 31, 2018Publication date: November 29, 2018Inventors: Chiajen Lee, Xiaofeng Fan
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Publication number: 20180342545Abstract: A light receiving element includes: a semiconductor layer including a first layer, a light absorbing layer, a second layer, and a third layer, the semiconductor layer having a plurality of mesas, a terrace, and a groove; a first electrode provided on the mesas and electrically connected to the third layer; a first bump provided on the first electrode and electrically connected to the first electrode; a second electrode provided on a portion extending from the terrace to an inner side of the groove and electrically connected to the first layer; and a second bump larger than the first bump, is provided on the terrace, and is electrically connected to the second electrode, wherein the mesas and the terrace include the semiconductor layer, the groove extends to the first layer, and the second electrode is in contact with the first layer on an inner side of the groove.Type: ApplicationFiled: April 24, 2018Publication date: November 29, 2018Applicant: Sumitomo Electric Industries, Ltd.Inventors: Daisuke Kimura, Hiroshi Inada
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Publication number: 20180342546Abstract: The present application provides a pixel sensing unit applied in an image capturing device, wherein the pixel sensing unit is corresponding to a light-sensing area and outputs a pixel value corresponding to the pixel sensing unit. The pixel sensing unit comprise a plurality of sub-pixel sensing units, configured to a plurality of sub-pixel values, wherein the plurality of sub-pixel sensing units corresponding to a plurality of sub-light-sensing areas, a summation of the plurality of sub-light-sensing areas corresponds to the light-sensing area; and an integrating unit, configured to output the pixel value corresponding to the pixel sensing unit according to the plurality of sub-pixel values.Type: ApplicationFiled: July 23, 2018Publication date: November 29, 2018Inventors: Wei-Min Chao, Chien-Jian Tseng
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Publication number: 20180342547Abstract: An elevated photosensor for image sensors and methods of forming the photosensor. The photosensor may have light sensors having indentation features including, but not limited to, v-shaped, u-shaped, or other shaped features. Light sensors having such an indentation feature can redirect incident light that is not absorbed by one portion of the photosensor to another portion of the photosensor for additional absorption. In addition, the elevated photosensors reduce the size of the pixel cells while reducing leakage, image lag, and barrier problems.Type: ApplicationFiled: August 3, 2018Publication date: November 29, 2018Inventor: Salman Akram
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Publication number: 20180342548Abstract: An image sensor and a method of manufacturing the same are disclosed. The image sensor includes a photodiode disposed in a substrate, and transistors disposed on the substrate and electrically connected with the photodiode. A gate insulating layer of a source follower transistor among the transistors includes fluorine so as to remove defects such as dangling bonds.Type: ApplicationFiled: May 25, 2018Publication date: November 29, 2018Inventor: Man Lyun HA
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Publication number: 20180342549Abstract: Implementations of semiconductor packages may include: a die coupled to a glass lid; one or more inner walls having a first material coupled to the die; an outer wall having a second material coupled to the die; and a glass lid coupled to the die at the one or more inner walls and at the outer wall; wherein the outer wall may be located at the edge of the die and the glass lid and the one or more inner walls may be located within the perimeter of the outer wall at a predetermined distance from the perimeter of the outer wall; and wherein a modulus of the first material may be lower than a modulus of the second material.Type: ApplicationFiled: August 3, 2018Publication date: November 29, 2018Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLCInventors: Bingzhi SU, Derek GOCHNOUR, Larry KINSMAN
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Publication number: 20180342550Abstract: An imaging apparatus includes a plurality of pixels each including a photoelectric conversion unit and a charge holding unit configured to hold an electric charge generated in the photoelectric conversion unit, a waveguide disposed above the photoelectric conversion unit, and a light blocking unit configured to cover the charge holding unit, wherein a width of a bottom surface of the waveguide is smaller than 1.1 ?m.Type: ApplicationFiled: May 17, 2018Publication date: November 29, 2018Inventors: Hiroshi Sekine, Yusuke Onuki
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Publication number: 20180342551Abstract: A pad structure with a contact via array for high bond structure is provided. In some embodiments, a semiconductor substrate comprises a pad opening. An interconnect structure is under the semiconductor substrate, and comprises an interlayer dielectric (ILD) layer, a wiring layer, and the contact via array. The wiring layer and the contact via array are in the ILD layer. Further, the contact via array borders the wiring layer and is between the wiring layer and the semiconductor substrate. A pad covers the contact via array in the pad opening, and protrudes into the ILD layer to contact the wiring layer on opposite sides of the contact via array. A method for manufacturing the pad structure, as well as an image sensor with the pad structure, are also provided.Type: ApplicationFiled: August 6, 2018Publication date: November 29, 2018Inventors: Ching-Hung Cheng, Kai-Fung Chang
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Publication number: 20180342552Abstract: In some embodiments, the present disclosure relates to a method of forming an integrated chip (IC) structure. The method may be performed by forming a first integrated chip die having one or more semiconductor devices within a first substrate, and forming a passivation layer over the first integrated chip die. The passivation layer is selectively etched to form interior sidewalls defining a first opening, and a conductive material is deposited over the passivation layer and within the first opening. The conductive material is patterned to define a conductive blocking structure that laterally extends past the one or more semiconductor devices in opposing directions. The first integrated chip die is bonded to a second integrated chip die having an array of image sensing elements within a second substrate.Type: ApplicationFiled: August 6, 2018Publication date: November 29, 2018Inventors: Cheng-Ying Ho, Ching-Chun Wang, Dun-Nian Yaung, Feng-Chi Hung, Yan-Chih Lu
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Publication number: 20180342553Abstract: An imaging device includes a wiring connected to an output node of an amplification transistor, and the wiring is provided at a position between an output line electrically connected to the output node of the amplification transistor and a gate of the amplification transistor.Type: ApplicationFiled: May 17, 2018Publication date: November 29, 2018Inventors: Ginjiro Toyoguchi, Fumihiro Inui, Hideyuki Ito
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Publication number: 20180342554Abstract: Disclosed herein is an apparatus comprising: an X-ray absorption layer; a first electrical contact and a second electrical contact on opposing surfaces of the X-ray absorption layer; wherein the first electrical contact and the second electrical contact respectively comprise structures extending into the X-ray absorption layer.Type: ApplicationFiled: July 18, 2018Publication date: November 29, 2018Inventors: Peiyan CAO, Yurun LIU