Patents Issued in November 29, 2018
  • Publication number: 20180342505
    Abstract: A method is provided. The method includes forming a first to third gate lines on a substrate, the second gate line formed between the first and third gate lines; forming a gate isolation region to cut the first to third gate lines into two first sub gate lines, two second sub gate lines and two third sub gate lines, respectively; forming a first gate contact on one of the two first sub gate lines; forming a second gate contact on the two second sub gate lines; forming a third gate contact on one of the two third sub gate lines; forming a first metal line to connect the first and third gate contacts; and forming a second metal line. The first to third gate lines extend in a first direction, and the gate isolation region extends in a second direction different from the first direction.
    Type: Application
    Filed: July 17, 2018
    Publication date: November 29, 2018
    Applicant: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Sang-Hoon BAEK, Sun-Young PARK, Sang-Kyu OH, Ha-young KIM, Jung-Ho DO, Moo-Gyu BAE, Seung-Young LEE
  • Publication number: 20180342506
    Abstract: A switch circuit includes a first MOS transistor and a second MOS transistor of a same conductivity type connected in parallel between a first terminal and a second terminal of the switch circuit, the first and second MOS transistors having respective gate terminals coupled to the control terminal to receive a control signal to turn the first and second MOS transistors on or off. The first MOS transistor is characterized by a first reverse gate-to-drain capacitance (Crss) and the second MOS transistor is characterized by a second Crss that is greater than the first Crss.
    Type: Application
    Filed: August 2, 2018
    Publication date: November 29, 2018
    Inventors: Ji Pan, Sik Lui
  • Publication number: 20180342507
    Abstract: Methods and structures that include a vertical-transport field-effect transistor. A first section of a dielectric layer is deposited on a first device region of a substrate and a second section of the dielectric layer is deposited on a second device region of the substrate. A gate stack is deposited on the first device region and the second device region. The gate stack is patterned to define a first gate electrode of the vertical-transport field-effect transistor on the first section of the dielectric layer and a second gate electrode of a high-voltage field-effect transistor on the second section of the dielectric layer. The first section of the dielectric layer is a spacer layer arranged between the first gate electrode and the first device region. The second section of the dielectric layer is a portion of a gate dielectric arranged between the second gate electrode and the second device region.
    Type: Application
    Filed: May 25, 2017
    Publication date: November 29, 2018
    Inventors: Ruilong Xie, Chun-Chen Yeh, Kangguo Cheng, Tenko Yamashita
  • Publication number: 20180342508
    Abstract: A semiconductor device is provided. The semiconductor device includes a substrate, a plurality of fins comprising a first fin, a second fin, a third fin, a fourth fin and a fifth fin, each of the plurality of protruding from the substrate in a first direction, and spaced apart from one another in a second direction that intersects the first direction and a plurality of trenches comprising a first trench, a second trench, a third trench and a fourth trench, each of the plurality of trenches being formed between adjacent fins of the plurality of fins, wherein variation of a first width of the first trench and a third width of the third trench is smaller than a first variation, wherein variation of a second width of the second trench and a fourth width of the fourth trench is smaller than a second variation, and wherein the second variation is greater than the first variation.
    Type: Application
    Filed: September 19, 2017
    Publication date: November 29, 2018
    Applicant: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Sung Min KIM, Dong Won KIM, Geum Jong BAE
  • Publication number: 20180342509
    Abstract: In a method of manufacturing a semiconductor device, a separation wall made of a dielectric material is formed between two fin structures. A dummy gate structure is formed over the separation wall and the two fin structures. An interlayer dielectric (ILD) layer is formed over the dummy gate structure. An upper portion of the ILD layer is removed, thereby exposing the dummy gate structure. The dummy gate structure is replaced with a metal gate structure. A planarization operation is performed to expose the separation wall, thereby dividing the metal gate structure into a first gate structure and a second gate structure. The first gate structure and the second gate structure are separated by the separation wall.
    Type: Application
    Filed: July 16, 2018
    Publication date: November 29, 2018
    Inventors: Kuo-Cheng CHING, Chih-Hao WANG, Chih-Liang CHEN, Shi Ning JU
  • Publication number: 20180342510
    Abstract: A semiconductor structure includes fins that have a 2D material, such as Graphene, upon at least the fin sidewalls. The thickness of the 2D material sidewall may be tuned to achieve desired finFET band gap control. Neighboring fins of the semiconductor structure form fin wells. The semiconductor structure may include a fin cap upon each fin and the 2D material is formed upon the sidewalls of the fin and the bottom surface of the fin wells. The semiconductor structure may include a well-plug at the bottom of the fin wells and the 2D material is formed upon the sidewalls and upper surface of the fins. The semiconductor structure may include both fin caps and well-plugs such that the 2D material is formed upon the sidewalls of the fins.
    Type: Application
    Filed: August 1, 2018
    Publication date: November 29, 2018
    Inventors: Sami Rosenblatt, Rasit O. Topaloglu
  • Publication number: 20180342511
    Abstract: A semiconductor structure includes fins that have a 2D material, such as Graphene, upon at least the fin sidewalls. The thickness of the 2D material sidewall may be tuned to achieve desired finFET band gap control. Neighboring fins of the semiconductor structure form fin wells. The semiconductor structure may include a fin cap upon each fin and the 2D material is formed upon the sidewalls of the fin and the bottom surface of the fin wells. The semiconductor structure may include a well-plug at the bottom of the fin wells and the 2D material is formed upon the sidewalls and upper surface of the fins. The semiconductor structure may include both fin caps and well-plugs such that the 2D material is formed only upon the sidewalls of the fins.
    Type: Application
    Filed: August 1, 2018
    Publication date: November 29, 2018
    Inventors: Sami Rosenblatt, Rasit O. Topaloglu
  • Publication number: 20180342512
    Abstract: A method of forming a power rail to semiconductor devices comprising removing a portion of the gate structure forming a gate cut trench separating a first active region of fin structures from a second active region of fin structures. A conformal etch stop layer is formed in the gate cut trench. A fill material is formed on the conformal etch stop layer filling at least a portion of the gate cut trench. The fill material has a composition that is etched selectively to the conformal etch stop layer. A power rail is formed in the gate cut trench. The conformal etch stop layer obstructs lateral etching during forming the power rail to substantially eliminate power rail to gate structure shorting.
    Type: Application
    Filed: August 3, 2018
    Publication date: November 29, 2018
    Inventors: Marc A. Bergendahl, Andrew M. Greene, Rajasekhar Venigalla
  • Publication number: 20180342513
    Abstract: A complementary metal-oxide-semiconductor (CMOS) transistor may include a first semiconductor structure and a gate stack on the first semiconductor structure. The gate stack may include a gate dielectric layer on the first semiconductor structure, a work function material on the gate dielectric layer, and a gate metal fill material on the work function material of the gate stack. The gate metal fill material may include a low resistivity carbon alloy. A dielectric fill material may be included on the gate stack.
    Type: Application
    Filed: July 28, 2017
    Publication date: November 29, 2018
    Inventors: Ye LU, Junjing BAO, Bin YANG, Lixin GE, Yun YUE
  • Publication number: 20180342514
    Abstract: Methods for forming a semiconductor structure are provided. The method includes forming a first dummy gate structure and forming first spacers over a sidewall of the first dummy gate structure. The method includes removing the first dummy gate structure to form a first trench between the first spacers and forming a first capping layer in the first trench. A first portion of the first capping layer covers a sidewall of the first trench and a second portion of the first capping layer covers a bottom surface of the first trench. The method further includes oxidizing a sidewall of the first portion of the first capping layer and a top surface of the second portion of the first capping layer to form a first capping oxide layer and forming a first work function metal layer and forming a first gate electrode layer over the first work function metal layer.
    Type: Application
    Filed: August 6, 2018
    Publication date: November 29, 2018
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chih-Wei LIN, Chih-Lin WANG, Kang-Min KUO, Cheng-Wei LIAN
  • Publication number: 20180342515
    Abstract: A first interconnect on an interconnect level connects a first subset of PMOS drains together of a CMOS device. A second interconnect on the interconnect level connects a second subset of the PMOS drains together. The second subset of the PMOS drains is different than the first subset of the PMOS drains. The first interconnect and the second interconnect are disconnected on the interconnect level. A third interconnect on the interconnect level connects a first subset of NMOS drains together of the CMOS device. A fourth interconnect on the interconnect level connects a second subset of the NMOS drains together. The second subset of the NMOS drains is different than the first subset of the NMOS drains. The third interconnect and the fourth interconnect are disconnected on the interconnect level. The first, second, third, and fourth interconnects are coupled together through at least one other interconnect level.
    Type: Application
    Filed: August 7, 2018
    Publication date: November 29, 2018
    Inventors: Seid Hadi RASOULI, Animesh DATTA, Ohsang KWON
  • Publication number: 20180342516
    Abstract: A semiconductor device includes a substrate, a well on the substrate and an FFT on the well. The FET includes a first source/drain, a vertical channel layer, a gate structure, a second source/drain and a body structure. The first source/drain is on the well. The vertical channel layer extends form the first source/drain. The first gate structure surrounds a first portion of sidewalls of the vertical channel layer. The second source/drain is on the vertical channel layer. The body structure is in physical contact with the vertical channel layer. The body structure and the vertical channel layer constitute a bipolar device.
    Type: Application
    Filed: May 26, 2017
    Publication date: November 29, 2018
    Inventors: Hung-Li CHIANG, Szu-Wei HUANG, Chih-Chieh YEH, Yee-Chia YEO
  • Publication number: 20180342517
    Abstract: A dynamic random access memory (DRAM) includes a substrate, a bit line, a capacitor contact, a dielectric structure, a capacitor, and a landing pad. The bit line is located on the substrate. The capacitor contact is aside the bit line. The capacitor contact protrudes from a space between adjacent bit lines, such that upper sidewalls of the capacitor contact are exposed by the bit line. The dielectric structure is located on the upper surface of the bit line and extending to one portion of the upper sidewalls of the capacitor contacts. The capacitor is located above the capacitor contact. The landing pad is located between the capacitor contact and the capacitor. The landing pad at least covers one portion of the upper surface of the capacitor contact. A contact area between landing pad and the capacitor contact is greater than a contact area between the landing pad and the capacitor.
    Type: Application
    Filed: May 25, 2017
    Publication date: November 29, 2018
    Applicant: Winbond Electronics Corp.
    Inventor: Kazuaki Takesako
  • Publication number: 20180342518
    Abstract: A semiconductor device includes a gate trench formed into a semiconductor substrate; a gate dielectric layer formed in the gate trench to cover an inside surface of the gate trench; and a gate electrode disposed over the gate dielectric layer to fill the gate trench, wherein the gate electrode includes: second crystal grains formed in the gate trench; and first crystal grains disposed between the second crystal grains and the gate dielectric layer and having a smaller crystal grain size than the second crystal grains.
    Type: Application
    Filed: December 28, 2017
    Publication date: November 29, 2018
    Inventor: Dong-Soo KIM
  • Publication number: 20180342519
    Abstract: A semiconductor device includes a substrate including a cell region and peripheral region and bottom electrodes on the substrate. The bottom electrodes are arranged in a first row and a second row each extending in a first direction. The first row and the second row are adjacent to each other in a second direction perpendicular to the first direction. The bottom electrodes in the first row include an outermost bottom electrode and a next outermost bottom electrode that are separated by a first distance in the first direction. The bottom electrodes in the second row include an outermost bottom electrode and a next outermost bottom electrode that are separated by a second distance in the first direction. The outermost bottom electrode in the first row is on the peripheral region of the substrate. The outermost bottom electrode in the second row is on the cell region of the substrate.
    Type: Application
    Filed: November 16, 2017
    Publication date: November 29, 2018
    Applicant: Samsung Electronics Co., Ltd.
    Inventors: Jihoon Kim, Wonchul Lee
  • Publication number: 20180342520
    Abstract: A method for fabricating a semiconductor device includes: forming a first conductive layer; forming a second conductive layer over the first conductive layer; forming a conductive line by etching the second conductive layer; etching a portion of the first conductive layer to form a plug head having the same critical dimension as the conductive line; forming a first spacer that covers the conductive line and the plug head; etching the remaining first conductive layer to form a plug body that is aligned with the first spacer, wherein the plug body have a greater critical dimension than the plug head; and forming a second spacer by performing a selective oxidation onto a side wall of the plug body.
    Type: Application
    Filed: January 10, 2018
    Publication date: November 29, 2018
    Inventor: Jae-Houb CHUN
  • Publication number: 20180342521
    Abstract: Semiconductor devices and methods of forming the same are provided. The methods may include forming first and second line patterns. The first line pattern has a first side facing the second line pattern, and the second line pattern has a second side facing the first line pattern. The methods may also include forming a first spacer structure on the first side of the first line pattern and a second spacer structure on the second side of the second line pattern. The first and the second spacer structures may define an opening. The methods may further include forming a first conductor in a lower part of the opening, forming an expanded opening by etching upper portions of the first and second spacer structures, and forming a second conductor in the expanded opening. The expanded opening may have a width greater than a width of the lower part of the opening.
    Type: Application
    Filed: January 4, 2018
    Publication date: November 29, 2018
    Inventors: Yoon Ho Son, Jae Uk Shin, Yong Sun Ko, Im Soo Park, Sung Yoon Chung
  • Publication number: 20180342522
    Abstract: In a region just below an access gate electrode in an SRAM memory cell, a second halo region is formed adjacent to a source-drain region and a first halo region is formed adjacent to a first source-drain region. In a region just below a drive gate electrode, a third halo region is formed adjacent to the third source-drain region and a fourth halo region is formed adjacent to a fourth source-drain region. The second halo region is set to have an impurity concentration higher than the impurity concentration of the first halo region. The third halo region is set to have an impurity concentration higher than the impurity concentration of the fourth halo region. The impurity concentration of the first halo region and the impurity concentration of the fourth halo region are different from each other.
    Type: Application
    Filed: June 21, 2018
    Publication date: November 29, 2018
    Inventors: Koji NII, Makoto YABUUCHI, Yasumasa TSUKAMOTO, Kengo MASUDA
  • Publication number: 20180342523
    Abstract: A semiconductor device includes: active regions arranged in a first grid oriented parallel to a first direction; and gate electrodes arranged spaced apart in a second grid and overlying corresponding ones of the active regions, the second grid being oriented parallel to a second direction, the second direction being orthogonal to the first direction. The first gaps are interspersed between neighboring ones of the active regions. For a flyover intersection at which a corresponding gate electrode crosses over a corresponding active region and for which the gate electrode is not functionally connected to the corresponding active region, the gate electrode does not extend substantially beyond the corresponding active region and so does not extend substantially into the corresponding gap.
    Type: Application
    Filed: October 10, 2017
    Publication date: November 29, 2018
    Inventors: Yu-Jen CHEN, Wen-Hsi LEE, Ling-Sung WANG, I-Shan HUANG, Chan-yu HUNG
  • Publication number: 20180342524
    Abstract: The disclosed technology generally relates semiconductor devices and more particularly to a vertical transistor device, and a method of fabricating the same. In one aspect, the method includes providing, on a substrate, a fin formed of a stack of a first layer, a second layer and a third layer, wherein the second layer is positioned above the first layer and the third layer is positioned above the second layer. The method additionally includes forming a dielectric on the sidewalls of the first and third layers of the fin selectively against a sidewall of the second layer, and the method additionally includes forming a gate contacting layer for contacting a sidewall of the second layer. The first and third layers define a source region and a drain region, respectively, of the vertical transistor device. The second layer defines a channel region of the vertical transistor device.
    Type: Application
    Filed: May 15, 2018
    Publication date: November 29, 2018
    Inventors: Julien Ryckaert, Naoto Horiguchi, Dan Mocuta, Trong Huynh Bao
  • Publication number: 20180342525
    Abstract: A structure comprises a first channel region forming an n-channel device; a second channel region forming a p-channel device, the p-channel device being stacked with the n-channel device in a vertical orientation; a gate positioned around the stacked n-channel device and p-channel device; and at least one source region and at least one drain region extending from each of the n-channel device and the p-channel device. Each of the at least one source region and the at least one drain region within the stacked n-channel device and p-channel device are independently contacted.
    Type: Application
    Filed: June 18, 2018
    Publication date: November 29, 2018
    Inventors: Michael A. Guillorn, Robert R. Robison, Reinaldo Vega, Rajasekhar Venigalla
  • Publication number: 20180342526
    Abstract: A semiconductor device of the present invention includes: an element isolation part which is disposed between fins and whose height is lower than the height of each fin; a memory gate electrode placed over the fins and the element isolation part with a memory gate insulating film having a charge storage part in between; and a control gate electrode disposed in line with the memory gate electrode. The height of the element isolation part below the memory gate electrode is higher than the height of the element isolation part below the control gate electrode. A mismatch between electron injection and hole injection is improved, rewriting operation speed is accelerated, and reliability is enhanced by making the height of the element isolation part below the memory gate electrode higher than the height of the element isolation part below the control gate electrode as mentioned above.
    Type: Application
    Filed: March 8, 2018
    Publication date: November 29, 2018
    Inventor: Shibun Tsuda
  • Publication number: 20180342527
    Abstract: A method for manufacturing a semiconductor memory device including following steps is provided. A substrate having a first region, a second region, and a third region is provided. A first stack structure is formed on the first region. A second stack structure is formed on the second region. A third stack structure is formed on the third region. A first mask layer is formed on the substrate to cover the third stack structure. A first ion implantation process is performed, so that a second floating gate and a second control gate in the second stack structure are changed to a first conductive type. A second mask layer formed on the substrate to cover the first and second stack structures. A second ion implantation process is performed, so that a third floating gate and a third control gate in the third stack structure are changed as a second conductive type.
    Type: Application
    Filed: January 15, 2018
    Publication date: November 29, 2018
    Applicant: Winbond Electronics Corp.
    Inventors: Cheng-Ta Yang, Lu-Ping Chiang
  • Publication number: 20180342528
    Abstract: The semiconductor device includes a stack, a plurality of channel structures passing through the stack, a coupling structure which is disposed below the stack for coupling the channel structures with each other and has an uneven lower surface, and a source pick-up line electrically coupled with the coupling structure.
    Type: Application
    Filed: December 12, 2017
    Publication date: November 29, 2018
    Inventor: Nam Jae LEE
  • Publication number: 20180342529
    Abstract: A method for manufacturing a semiconductor device is provided. The method includes forming a split gate stack having a main gate and a select gate and forming a logic gate stack having a logic gate over a semiconductor substrate. The main gate and the logic gate is respectively replaced with a metal memory gate and a metal logic gate, in which the main gate and the logic gate are replaced simultaneously.
    Type: Application
    Filed: August 6, 2018
    Publication date: November 29, 2018
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Harry-Hak-Lay CHUANG, Wei-Cheng WU, Ya-Chen KAO
  • Publication number: 20180342530
    Abstract: A method of forming a semiconductor device structure comprises forming a stack structure comprising stacked tiers. Each of the stacked tiers comprises a first structure comprising a first material and a second structure comprising a second, different material longitudinally adjacent the first structure. A patterned hard mask structure is formed over the stack structure. Dielectric structures are formed within openings in the patterned hard mask structure. A photoresist structure is formed over the dielectric structures and the patterned hard mask structure. The photoresist structure, the dielectric structures, and the stack structure are subjected to a series of material removal processes to form apertures extending to different depths within the stack structure. Dielectric structures are formed over side surfaces of the stack structure within the apertures. Conductive contact structures are formed to longitudinally extend to bottoms of the apertures.
    Type: Application
    Filed: May 26, 2017
    Publication date: November 29, 2018
    Inventors: Roger W. Lindsay, Michael A. Smith, Brett D. Lowe
  • Publication number: 20180342531
    Abstract: A three-dimensional memory device includes an alternating stack of insulating layers and electrically conductive layers located over a substrate, the alternating stack containing a memory array region and a terrace region. Memory stack structures containing a memory film and a vertical semiconductor channel extend through the memory array region of the alternating stack. Support pillar structures extending through the terrace region of the alternating stack. The support pillar structures have different heights from each other.
    Type: Application
    Filed: May 29, 2017
    Publication date: November 29, 2018
    Inventors: Hiromasa Susuki, Masanori Tsutsumi, Shigehisa Inoue, Junji Oh, Kensuke Yamaguchi, Seiji Shimabukuro, Yuji Fukano, Ryoichi Ehara, Youko Furihata
  • Publication number: 20180342532
    Abstract: Embodiments of the present disclosure describe an integrated circuit that may include a first transistor on a first side of a semiconductor substrate and a second transistor on a second side of the semiconductor substrate, wherein the second side is opposite and parallel to the first side. In embodiments, the integrated circuit may further include a first capacitor positioned on the first side of the semiconductor substrate and coupled to the first transistor to form a first memory cell, and a second capacitor positioned on the second side of the semiconductor substrate and coupled to the second transistor to form a second memory cell.
    Type: Application
    Filed: December 24, 2015
    Publication date: November 29, 2018
    Inventors: Rishabh MEHANDRU, Aaron D. LILAK
  • Publication number: 20180342533
    Abstract: A semiconductor device includes a cell structure; n first pad structures formed on one side of the cell structure and each configured to have a step form in which 2n layers form one stage; and n second pad structures formed on the other side of the cell structure each configured to have a step form in which 2n layers form one stage, wherein n is a natural number of 1 or higher, and the first pad structures and the second pad structures have asymmetrical step forms having different heights.
    Type: Application
    Filed: July 17, 2018
    Publication date: November 29, 2018
    Applicant: SK hynix Inc.
    Inventors: Ki Hong LEE, Seung Ho PYI, Sung Ik MOON
  • Publication number: 20180342534
    Abstract: Some embodiments include methods of forming semiconductor constructions. Alternating layers of n-type doped material and p-type doped material may be formed. The alternating layers may be patterned into a plurality of vertical columns that are spaced from one another by openings. The openings may be lined with tunnel dielectric, charge-storage material and blocking dielectric. Alternating layers of insulative material and conductive control gate material may be formed within the lined openings. Some embodiments include methods of forming NAND unit cells. Columns of alternating n-type material and p-type material may be formed. The columns may be lined with a layer of tunnel dielectric, a layer of charge-storage material, and a layer of blocking dielectric. Alternating layers of insulative material and conductive control gate material may be formed between the lined columns. Some embodiments include semiconductor constructions, and some embodiments include NAND unit cells.
    Type: Application
    Filed: July 18, 2018
    Publication date: November 29, 2018
    Inventors: D.V. Nirmal Ramaswamy, Gurtej S. Sandhu
  • Publication number: 20180342535
    Abstract: Some embodiments include methods of forming semiconductor constructions. Alternating layers of n-type doped material and p-type doped material may be formed. The alternating layers may be patterned into a plurality of vertical columns that are spaced from one another by openings. The openings may be lined with tunnel dielectric, charge-storage material and blocking dielectric. Alternating layers of insulative material and conductive control gate material may be formed within the lined openings. Some embodiments include methods of forming NAND unit cells. Columns of alternating n-type material and p-type material may be formed. The columns may be lined with a layer of tunnel dielectric, a layer of charge-storage material, and a layer of blocking dielectric. Alternating layers of insulative material and conductive control gate material may be formed between the lined columns. Some embodiments include semiconductor constructions, and some embodiments include NAND unit cells.
    Type: Application
    Filed: July 18, 2018
    Publication date: November 29, 2018
    Inventors: D.V. Nirmal Ramaswamy, Gurtej S. Sandhu
  • Publication number: 20180342536
    Abstract: The purpose of the invention is to form a flexible display device where the substrate is made of resin, wherein the TFT can be annealed in high temperature; consequently, a reliability of the TFT is improved. The concrete measure is as follows. A display device having a pixel electrode and a TFT including a semiconductor layer on a substrate comprising: a source region of the semiconductor layer connects with a source electrode, a drain region of the semiconductor layer connects with a drain electrode; the pixel electrode connects with the source electrode; the drain electrode connects with a video signal line; a distance between the drain electrode and the substrate is smaller than a distance between the semiconductor and the substrate, the semiconductor layer is formed between the pixel electrode and the substrate.
    Type: Application
    Filed: May 14, 2018
    Publication date: November 29, 2018
    Applicant: Japan Display Inc.
    Inventors: Isao Suzumura, Hajime Watakabe, Akihiro Hanada, Hirokazu Watanabe, Yohei Yamaguchi, Marina Shiokawa, Ryotaro Kimura
  • Publication number: 20180342537
    Abstract: An SOI substrate having a semiconductor substrate, an insulating layer formed on the semiconductor substrate, and a semiconductor layer formed on the insulating layer is provided. A first region is one for forming a low breakdown voltage MISFET in the semiconductor layer, and a second region, in which the insulating layer and the semiconductor layer have been removed, is one for forming a high breakdown voltage MISFET. After an n-type semiconductor region is formed in the second region and an n-type extension region is formed in the first region, a first heat treatment is performed on the semiconductor substrate. Thereafter, a diffusion layer is formed in each of the first and second regions, and then a second heat treatment is performed on the semiconductor substrate. Herein, the time for which the first heat treatment is performed is longer than the time for which the second heat treatment is performed.
    Type: Application
    Filed: March 10, 2018
    Publication date: November 29, 2018
    Inventor: Yoshiki YAMAMOTO
  • Publication number: 20180342538
    Abstract: It is an object to manufacture a highly reliable display device using a thin film transistor having favorable electric characteristics and high reliability as a switching element. In a bottom gate thin film transistor including an amorphous oxide semiconductor, an oxide conductive layer having a crystal region is formed between an oxide semiconductor layer which has been dehydrated or dehydrogenated by heat treatment and each of a source electrode layer and a drain electrode layer which are formed using a metal material. Accordingly, contact resistance between the oxide semiconductor layer and each of the source electrode layer and the drain electrode layer can be reduced; thus, a thin film transistor having favorable electric characteristics and a highly reliable display device using the thin film transistor can be provided.
    Type: Application
    Filed: April 19, 2018
    Publication date: November 29, 2018
    Inventors: Shunpei YAMAZAKI, Toshinari SASAKI, Junichiro SAKATA, Masashi TSUBUKU
  • Publication number: 20180342539
    Abstract: An array substrate and a method for manufacturing the same are provided. The array substrate comprises a display area and a non-display area, wherein the non-display area includes a gate driver on array (GOA) region; wherein the GOA region comprises a first metal layer, an insulating layer, a second metal layer, and a protective layer sequentially formed from bottom to top; and wherein the second metal layer is connected to the first metal layer via a through-hole, and the protective layer covers the second metal layer for protecting a plurality of circuits in the GOA region from deterioration.
    Type: Application
    Filed: June 22, 2017
    Publication date: November 29, 2018
    Inventors: Weina YONG, Xiangyang XU
  • Publication number: 20180342540
    Abstract: Disclosed are a pixel unit structure and a display device. The pixel unit structure includes a thin film transistor formed on a substrate, and a first insulating layer, a first transparent electrode layer, a second insulating layer, and a second transparent electrode layer formed in sequence from bottom to top above the thin film transistor. A storage capacitor is formed between the first transparent electrode layer and the second transparent electrode layer.
    Type: Application
    Filed: January 16, 2017
    Publication date: November 29, 2018
    Applicant: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
    Inventors: Jianjian Ying, Peng Du
  • Publication number: 20180342541
    Abstract: The present invention provides a TFT substrate manufacturing method. The method uses a photoresist material that contains crystallizable and precipitatable pigment to form a photoresist layer, so that a plurality of crystallization burrs can be formed on a surface of the photoresist layer, making it possible for a pixel electrode film not completely covering the surface of the photoresist layer and thus, allowing a peeling agent to pass through the crystallization burrs and penetrate into the photoresist layer to cause corrosion of the photoresist layer thereby peeling off the photoresist layer and a portion of the pixel electrode film located on the photoresist layer at the same time to form a pixel electrode, whereby, compared to the prior art, peeling can be conducted without adopting a special mask and involving special mask parameters and also requiring no plasma treatment so that the process of fabricating a TFT substrate can be simplified to enhance fabrication efficiency of the TFT substrate.
    Type: Application
    Filed: June 20, 2017
    Publication date: November 29, 2018
    Inventor: Ji Li
  • Publication number: 20180342542
    Abstract: A coplanar electrode photodiode array and a manufacturing method thereof are disclosed. On a top side of a low resistance rate substrate, a high resistance epitaxial silicon wafer, a first conductive type heavily doped region and a second conductive type doped region are formed, which are a cathode and an anode of a photodiode respectively. The structure includes a trench structure formed between the anode and the cathode, the trench structure may be form by a gap, an insulating material, a conductive structure, a reflective material, and ion implantation, and also includes a first conductive type heavily doped region, an insulating isolation layer or a conductive structure with an insulating layer, and the like formed under the anode and the cathode.
    Type: Application
    Filed: August 31, 2016
    Publication date: November 29, 2018
    Inventors: Lan ZHANG, Yuanjing LI, Yinong LIU, Haifan HU, Jun LI
  • Publication number: 20180342543
    Abstract: A backside illuminated CMOS image sensor and a method of fabricating the sensor are disclosed. The backside illuminated CMOS image sensor includes a first substrate and a second substrate. A plurality of pixel cells are formed in the front side of the first substrate, and a plurality of grooves are formed in the back side. Each of the grooves has at least one sidewall inclined with respect to the back surface of the first substrate. The second substrate is bonded to the first substrate on a side closer to the front side. A method for fabricating such a backside illuminated CMOS image sensor is also disclosed. The grooves formed in the back side of the first substrate can reduce reflection loss of light incident on the back surface and hence enhance quantum efficiency of the backside illuminated CMOS image sensor.
    Type: Application
    Filed: April 25, 2018
    Publication date: November 29, 2018
    Inventors: Yanyun LIU, Jinwen DONG, Yang FU, Jifeng ZHU
  • Publication number: 20180342544
    Abstract: One or more cross-wafer capacitors are formed in an electronic component, circuit, or device that includes stacked wafers. One example of such a device is a stacked image sensor. The image sensor can include two or more wafers, with two wafers that are bonded to each other each including a conductive segment adjacent to, proximate, or abutting a bonding surface of the respective wafer. The conductive segments are positioned relative to each other such that each conductive element forms a plate of a capacitor. A cross-wafer capacitor is formed when the two wafers are attached to each other.
    Type: Application
    Filed: May 31, 2018
    Publication date: November 29, 2018
    Inventors: Chiajen Lee, Xiaofeng Fan
  • Publication number: 20180342545
    Abstract: A light receiving element includes: a semiconductor layer including a first layer, a light absorbing layer, a second layer, and a third layer, the semiconductor layer having a plurality of mesas, a terrace, and a groove; a first electrode provided on the mesas and electrically connected to the third layer; a first bump provided on the first electrode and electrically connected to the first electrode; a second electrode provided on a portion extending from the terrace to an inner side of the groove and electrically connected to the first layer; and a second bump larger than the first bump, is provided on the terrace, and is electrically connected to the second electrode, wherein the mesas and the terrace include the semiconductor layer, the groove extends to the first layer, and the second electrode is in contact with the first layer on an inner side of the groove.
    Type: Application
    Filed: April 24, 2018
    Publication date: November 29, 2018
    Applicant: Sumitomo Electric Industries, Ltd.
    Inventors: Daisuke Kimura, Hiroshi Inada
  • Publication number: 20180342546
    Abstract: The present application provides a pixel sensing unit applied in an image capturing device, wherein the pixel sensing unit is corresponding to a light-sensing area and outputs a pixel value corresponding to the pixel sensing unit. The pixel sensing unit comprise a plurality of sub-pixel sensing units, configured to a plurality of sub-pixel values, wherein the plurality of sub-pixel sensing units corresponding to a plurality of sub-light-sensing areas, a summation of the plurality of sub-light-sensing areas corresponds to the light-sensing area; and an integrating unit, configured to output the pixel value corresponding to the pixel sensing unit according to the plurality of sub-pixel values.
    Type: Application
    Filed: July 23, 2018
    Publication date: November 29, 2018
    Inventors: Wei-Min Chao, Chien-Jian Tseng
  • Publication number: 20180342547
    Abstract: An elevated photosensor for image sensors and methods of forming the photosensor. The photosensor may have light sensors having indentation features including, but not limited to, v-shaped, u-shaped, or other shaped features. Light sensors having such an indentation feature can redirect incident light that is not absorbed by one portion of the photosensor to another portion of the photosensor for additional absorption. In addition, the elevated photosensors reduce the size of the pixel cells while reducing leakage, image lag, and barrier problems.
    Type: Application
    Filed: August 3, 2018
    Publication date: November 29, 2018
    Inventor: Salman Akram
  • Publication number: 20180342548
    Abstract: An image sensor and a method of manufacturing the same are disclosed. The image sensor includes a photodiode disposed in a substrate, and transistors disposed on the substrate and electrically connected with the photodiode. A gate insulating layer of a source follower transistor among the transistors includes fluorine so as to remove defects such as dangling bonds.
    Type: Application
    Filed: May 25, 2018
    Publication date: November 29, 2018
    Inventor: Man Lyun HA
  • Publication number: 20180342549
    Abstract: Implementations of semiconductor packages may include: a die coupled to a glass lid; one or more inner walls having a first material coupled to the die; an outer wall having a second material coupled to the die; and a glass lid coupled to the die at the one or more inner walls and at the outer wall; wherein the outer wall may be located at the edge of the die and the glass lid and the one or more inner walls may be located within the perimeter of the outer wall at a predetermined distance from the perimeter of the outer wall; and wherein a modulus of the first material may be lower than a modulus of the second material.
    Type: Application
    Filed: August 3, 2018
    Publication date: November 29, 2018
    Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventors: Bingzhi SU, Derek GOCHNOUR, Larry KINSMAN
  • Publication number: 20180342550
    Abstract: An imaging apparatus includes a plurality of pixels each including a photoelectric conversion unit and a charge holding unit configured to hold an electric charge generated in the photoelectric conversion unit, a waveguide disposed above the photoelectric conversion unit, and a light blocking unit configured to cover the charge holding unit, wherein a width of a bottom surface of the waveguide is smaller than 1.1 ?m.
    Type: Application
    Filed: May 17, 2018
    Publication date: November 29, 2018
    Inventors: Hiroshi Sekine, Yusuke Onuki
  • Publication number: 20180342551
    Abstract: A pad structure with a contact via array for high bond structure is provided. In some embodiments, a semiconductor substrate comprises a pad opening. An interconnect structure is under the semiconductor substrate, and comprises an interlayer dielectric (ILD) layer, a wiring layer, and the contact via array. The wiring layer and the contact via array are in the ILD layer. Further, the contact via array borders the wiring layer and is between the wiring layer and the semiconductor substrate. A pad covers the contact via array in the pad opening, and protrudes into the ILD layer to contact the wiring layer on opposite sides of the contact via array. A method for manufacturing the pad structure, as well as an image sensor with the pad structure, are also provided.
    Type: Application
    Filed: August 6, 2018
    Publication date: November 29, 2018
    Inventors: Ching-Hung Cheng, Kai-Fung Chang
  • Publication number: 20180342552
    Abstract: In some embodiments, the present disclosure relates to a method of forming an integrated chip (IC) structure. The method may be performed by forming a first integrated chip die having one or more semiconductor devices within a first substrate, and forming a passivation layer over the first integrated chip die. The passivation layer is selectively etched to form interior sidewalls defining a first opening, and a conductive material is deposited over the passivation layer and within the first opening. The conductive material is patterned to define a conductive blocking structure that laterally extends past the one or more semiconductor devices in opposing directions. The first integrated chip die is bonded to a second integrated chip die having an array of image sensing elements within a second substrate.
    Type: Application
    Filed: August 6, 2018
    Publication date: November 29, 2018
    Inventors: Cheng-Ying Ho, Ching-Chun Wang, Dun-Nian Yaung, Feng-Chi Hung, Yan-Chih Lu
  • Publication number: 20180342553
    Abstract: An imaging device includes a wiring connected to an output node of an amplification transistor, and the wiring is provided at a position between an output line electrically connected to the output node of the amplification transistor and a gate of the amplification transistor.
    Type: Application
    Filed: May 17, 2018
    Publication date: November 29, 2018
    Inventors: Ginjiro Toyoguchi, Fumihiro Inui, Hideyuki Ito
  • Publication number: 20180342554
    Abstract: Disclosed herein is an apparatus comprising: an X-ray absorption layer; a first electrical contact and a second electrical contact on opposing surfaces of the X-ray absorption layer; wherein the first electrical contact and the second electrical contact respectively comprise structures extending into the X-ray absorption layer.
    Type: Application
    Filed: July 18, 2018
    Publication date: November 29, 2018
    Inventors: Peiyan CAO, Yurun LIU