Patents Issued in March 28, 2019
  • Publication number: 20190094655
    Abstract: A camera body includes a mount, a solid-state imaging element, a body control unit, a diopter value detection unit, a number-of-configurations storage unit, a rear display unit, and a finder unit. An interchangeable lens is attached to the mount. The body control unit counts the number of configurations by the diopter adjustment dial for each diopter value of the finder unit configured by the diopter adjustment dial and stores the number of configurations in the number-of-configurations storage unit. In a case where the diopter value of the finder unit has been configured by the diopter adjustment dial, the body control unit changes a configuration screen to be displayed on the rear display unit according to the number of configurations stored in the number-of-configurations storage unit.
    Type: Application
    Filed: November 23, 2018
    Publication date: March 28, 2019
    Applicant: FUJIFILM Corporation
    Inventors: Shunta EGO, Satoru WAKABAYASHI, Yuji HASEGAWA, Takeshi MISAWA, Atsushi MISAWA
  • Publication number: 20190094656
    Abstract: An imaging apparatus includes a storage unit configured to store beforehand a focus position serving as a reference for a predetermined subject, and a unit configured to drive a focus lens at a position away by a predetermined depth from the focus position serving as a reference that is stored, and calculate a defocus amount.
    Type: Application
    Filed: September 19, 2018
    Publication date: March 28, 2019
    Inventors: Nobuhiro Shibata, Hiroaki Kurisu, Teruhiko Ueyama
  • Publication number: 20190094657
    Abstract: An imaging apparatus includes a ranging light source, an aperture that includes a through hole through which light emitted from the ranging light source passes, and a ranging lens disposed on an optical path of the light emitted from the ranging light source, wherein the aperture includes a plurality of press-fit convex parts projecting in a direction opposite to the ranging light source, and the ranging lens is press-fitted into a region surrounded by the plurality of press-fit convex parts.
    Type: Application
    Filed: November 27, 2018
    Publication date: March 28, 2019
    Inventor: Akinori TSUJIKAWA
  • Publication number: 20190094658
    Abstract: A system and method for controlling characteristics of collected image data are disclosed. The system and method include performing pre-processing of an image using GPUs, configuring an optic based on the pre-processing, the configuring being designed to account for features of the pre-processed image, acquiring an image using the configured optic, processing the acquired image using GPUs, and determining if the processed acquired image accounts for feature of the pre-processed image, and the determination is affirmative, outputting the image, wherein if the determination is negative repeating the configuring of the optic and re-acquiring the image.
    Type: Application
    Filed: October 23, 2017
    Publication date: March 28, 2019
    Applicant: Advanced Micro Devices, Inc.
    Inventors: Allen H. Rush, Hui Zhou
  • Publication number: 20190094659
    Abstract: Provided are a setting device, a setting method, a setting program, and a camera that are capable of preventing erroneous operations with compact configurations. A display unit is provided on an upper surface of a shutter speed dial. The display unit displays a dial plate image. The dial plate image includes an image picture of a lock release button. A rotation detection unit detects that the shutter speed dial is rotationally operated. A touch sensor detects that the lock release button is pressed. In a case where the shutter speed dial is rotationally operated while the lock release button is pressed, a shutter speed is switched.
    Type: Application
    Filed: November 26, 2018
    Publication date: March 28, 2019
    Applicant: FUJIFILM Corporation
    Inventors: Atsushi MISAWA, Kentaro TOKIWA, Hirofumi HORII, Yuichi FUJIMURA, Takeshi MISAWA
  • Publication number: 20190094660
    Abstract: A camera module, which is mounted on an inside of a front windshield of a vehicle and to image an external environment of the vehicle, includes a lens unit and an imager to image the external environment by forming an optical image, which is from the external environment through the lens unit.
    Type: Application
    Filed: November 29, 2018
    Publication date: March 28, 2019
    Inventors: Yasuki FURUTAKE, Takeshi KAZAMA
  • Publication number: 20190094661
    Abstract: A method of color coding for instant identification of camera filters. The outside of frames of filters are covered in a distinct color, simplifying identification between camera filters. Color coding replaces or augments the method of written specifications on camera filter frames. Higher quality photography and videography is facilitated by providing the operator with more time to evaluate scenery and adjust camera settings.
    Type: Application
    Filed: September 27, 2017
    Publication date: March 28, 2019
    Inventor: Jeffrey Paul Overall
  • Publication number: 20190094662
    Abstract: An imaging device having an imaging lens system includes: an outermost cover member of the imaging lens system; a light source arranged inside the cover member; and a heat dissipation member is configured to dissipate heat of the light source to the cover member, thereby defogging the cover member by heat of the heat dissipation member.
    Type: Application
    Filed: August 31, 2018
    Publication date: March 28, 2019
    Applicant: CASIO COMPUTER CO., LTD.
    Inventors: Yoshiharu HOUJOU, Jumpei ISHIBASHI
  • Publication number: 20190094663
    Abstract: An interlocking camera mount uses multiple interlocking links to form an articulated chain of camera mounts. To accomplish this, each interlocking link has a camera mount, and two pivotable bases. The camera mount is an attachment point to which a camera can be affixed. The pivotable bases are connection mechanisms that enable the interlocking links to be chained together and form an articulated chain. Additionally, the pivotable bases are positioned on opposite sides of the camera mount. Thus, facilitating the creation of a serially linked chain. Specifically, the pivotable bases of an arbitrary link are used to connect the arbitrary link to one or more adjacent links.
    Type: Application
    Filed: September 22, 2017
    Publication date: March 28, 2019
    Inventor: John Jager
  • Publication number: 20190094664
    Abstract: A multi-configuration mounting system has been disclosed. The multi-configuration mounting system comprises an adapter configured to couple to a first device, and a receptacle defining an opening within a surface of the adapter. The receptacle receives a tab of a clip housing that secures a second device, thereby forming an interference fit between the tab and the receptacle to couple the second device to the first device via the adapter.
    Type: Application
    Filed: September 21, 2018
    Publication date: March 28, 2019
    Inventors: Derek Yap, Joshua T. Druker
  • Publication number: 20190094665
    Abstract: A projector includes a light source, light modulation device, first driver, and second driver. The first driver is configured to drive the light modulation device to alternately provide a first polarity period and a second polarity period. The second driver is configured to drive the light source so that timings of switching related to a drive current coincide between the first polarity period and the second polarity period. The timings of switching are different from each other between a first period and a second period. The first period contains one first polarity period and one second polarity period adjacent to the one first polarity period. The second period is adjacent to the first period and contains another first polarity period than the one first polarity period and another second polarity period than the one second polarity period. The another second polarity period is adjacent to the another first polarity period.
    Type: Application
    Filed: September 25, 2018
    Publication date: March 28, 2019
    Applicant: SEIKO EPSON CORPORATION
    Inventors: Takeshi SOWA, Osamu NAKAJIMA
  • Publication number: 20190094666
    Abstract: A liquid crystal driving apparatus configured to drive a liquid crystal display element includes a processor configured to generate a display image signal from an input image signal, and a driver configured to display, according to the display image signal, a tone to a pixel in the liquid crystal display element by controlling a voltage applied to the pixel in each of a plurality of subframe periods contained in one frame period between a first voltage and a second voltage lower than the first voltage. The processor performs a smoothing process for smoothing a tonal difference equal to or smaller than 3% of a full scale value of the tone in a target image area in the input image signal.
    Type: Application
    Filed: September 19, 2018
    Publication date: March 28, 2019
    Inventor: Teppei Kurosawa
  • Publication number: 20190094667
    Abstract: A scanning mirror resonates on a first axis and moves on a second axis at a frequency dictated by a sync signal. The period of movement on the second axis is not necessarily an integer multiple of the period of movement on the first axis. A drive circuit excites movement of the mirror. The drive circuit adds a position offset to the signal that excites movement on the second axis. The position offset is capable of causing the resonant movement on the first axis to scan a substantially identical trajectory for at least a portion of each period on the second axis.
    Type: Application
    Filed: September 26, 2017
    Publication date: March 28, 2019
    Inventors: Jonathan A. Morarity, Damon M. Domjan
  • Publication number: 20190094668
    Abstract: A projection apparatus for producing a pixel-based illumination pattern has a laser light source for producing coherent laser light and a micromirror array with a multiplicity of mirrors. The mirrors are implemented so as to be controllable in terms of their position, for setting a brightness and/or color of a respective pixel of the pixel-based illumination pattern. The laser light source emits the laser light towards the micromirror array. A beam-shaping element splits the laser light from the laser light source into a multiplicity of partial beams and each of the partial beams is oriented toward one of the mirrors of the micromirror array.
    Type: Application
    Filed: September 27, 2018
    Publication date: March 28, 2019
    Inventor: STEFAN HOLZINGER
  • Publication number: 20190094669
    Abstract: A projector includes a light source device, a plurality of light modulation devices each adapted to modulate a light beam emitted from the light source device, a light combining device adapted to combine the light beams respectively modulated by the light modulation devices, a projection optical device adapted to project the light beam combined by the light combining device, a housing in which the light modulation devices and the light combining device are disposed, the housing having a first cooling liquid encapsulated inside, a stirring device adapted to stir the first cooling liquid inside the housing, and a control device disposed outside the housing and connected to the housing, the control device adapted to control the light modulation devices. The housing has a connection section connecting the control device and a plurality of light modulation device side signal lines respectively extending from the light modulation devices to each other.
    Type: Application
    Filed: September 26, 2018
    Publication date: March 28, 2019
    Applicant: SEIKO EPSON CORPORATION
    Inventors: Yoshiyuki YANAGISAWA, Ryuta KOIZUMI
  • Publication number: 20190094670
    Abstract: An optical system includes, in order from a reduction conjugate side to an enlargement conjugate side, a refractive optical unit having a positive refractive power, and a mirror optical unit that includes a mirror element having a positive refractive power and a mirror element having a negative refractive power and reforms an intermediate image formed by the refractive optical unit. A predetermined condition is satisfied.
    Type: Application
    Filed: September 19, 2018
    Publication date: March 28, 2019
    Inventor: Makoto Takahashi
  • Publication number: 20190094671
    Abstract: A phosphor wheel includes a first face that has a phosphor layer, a second face located on an opposite side to the first face, a first blade provided to project from one of the first face and the second face, and a passage that sends air to the second face from the first face. The first blade is provided to send air on a side of the first face to a side of the second face through the passage during rotation of the phosphor wheel.
    Type: Application
    Filed: September 13, 2018
    Publication date: March 28, 2019
    Inventor: KENJI IKEO
  • Publication number: 20190094672
    Abstract: An illumination device according to the invention includes a light source section including a plurality of light emitting devices adapted to emit light, and a holding member adapted to hold the plurality of light emitting devices, a polarization separation element adapted to separate the light emitted from the light source section into a first light beam and a second light beam, a wavelength conversion device adapted to convert the first light beam into a third light beam, a conversion optical system adapted to convert the second light beam into a fourth light beam, a color combining element, a detection device adapted to detect an intensity of the third light beam and an intensity of the fourth light beam, and a control device adapted to change a polarization state of the light emitted from the light source section in accordance with a detection result by the detection device.
    Type: Application
    Filed: September 26, 2018
    Publication date: March 28, 2019
    Applicant: SEIKO EPSON CORPORATION
    Inventor: Koichi AKIYAMA
  • Publication number: 20190094673
    Abstract: A laser array including at least one line of lasers. The at least one line of lasers includes a first laser and a second laser which are adjacent to each other. A first laser beam emitted by the first laser and a second laser beam emitted by the second laser are both in a first color, and the first laser beam has a wavelength less than that of the second laser beam.
    Type: Application
    Filed: March 30, 2018
    Publication date: March 28, 2019
    Applicants: Qingdao Hisense Laser Display Co., Ltd., Hisense USA Corp., Hisense International Co., Ltd.
    Inventors: Youliang Tian, Changming Jia
  • Publication number: 20190094674
    Abstract: An adjusting device for a light-pipe includes an outer tube, a rotatable ball, an inner tube and an adjustment member. The inner tube is configured to accommodate the light-pipe. The outer tube comprises a first end and a second end disposed oppositely, and a receiving cavity constructed to receive the rotatable ball is formed in the first end of the outer tube. The rotatable ball is hinged in the receiving cavity, and a through-hole is opened in the rotatable ball. One end of the inner tube is fixedly connected to the through-hole, and the other end is disposed inside the second end of the outer tube through the adjustment member. The adjustment member is configured to drive the inner tube to swing along the center of the rotatable ball within the outer tube.
    Type: Application
    Filed: April 12, 2018
    Publication date: March 28, 2019
    Applicants: Qingdao Hisense Electronics Co., Ltd., Hisense International Co., Ltd., Hisense USA Corp.
    Inventor: Wensheng Lu
  • Publication number: 20190094675
    Abstract: An optical unit includes a digital micromirror device that drives each micromirror to be ON/OFF controlled, a first prism that guides illumination light to the digital micromirror device, a second prism having an OFF light reflection surface that reflects OFF light reflected on a micromirror in an OFF state and allows transmission of ON light reflected on a micromirror in an ON state, and a third prism that receives the ON light emitted from the second prism to output the ON light to a projection side. The micromirror reflects the OFF light in such a direction that the optical axis of the OFF light is apart from a projection optical axis plane including the optical axis of the ON light and the optical axis of the illumination light. The second prism emits the OFF light through an emission surface intersecting the projection optical axis plane.
    Type: Application
    Filed: April 7, 2015
    Publication date: March 28, 2019
    Applicant: Konica Minolta, Inc.
    Inventor: Masahiro Terada
  • Publication number: 20190094676
    Abstract: A dust-proof case includes a case main body having a lid member resting surface that is formed on an outer circumferential portion and a wall portion that is formed on an outer circumferential side of the lid member resting surface, and a lid member having a lid member main body having a plurality of corner portions and an elastic portion that is in abutment with an inner surface of the wall portion that is formed on an outer circumference of the lid member main body and rested on the lid member resting surface, and the elastic portion includes the plurality of corner portions and a straight-line portion in a circumferential shape thereof, and a circumferential cross-sectional area of the elastic portion is narrower at the corner portion than at the straight-line portion.
    Type: Application
    Filed: August 8, 2018
    Publication date: March 28, 2019
    Inventor: Osamu Jobi
  • Publication number: 20190094677
    Abstract: An image reading apparatus comprises a housing having a document table glass, a scanner section, a cover member, an adsorption board, a driving section and a controller. The cover member is connected to the housing to be rotatable around a first rotation center line with respect to the housing between a closed position where the document table glass is covered and an open position. The adsorption board, arranged in a part at a housing side at the time the cover member is positioned at the closed position, has an adsorption surface adsorbing the original document, and is connected to the cover member to be rotatable around a second rotation center line parallel to the first rotation center line. The driving section adsorbs the original document on the adsorption surface of the adsorption board.
    Type: Application
    Filed: September 22, 2017
    Publication date: March 28, 2019
    Inventor: Sho Koike
  • Publication number: 20190094678
    Abstract: A pseudo-volumetric display apparatus includes a first inwardly facing image display surface having a continuous geometry, with an open upper end, for presenting an interior panoramic image, and a second upwardly facing image display surface, located at a lower end of the first image display surface, for presenting a second image. The images may be generated optically or electronically. The second image is correlated and synchronized to the first image, and the first image display surface is sized and positioned to facilitate simultaneous viewing of both images from outside of the first surface via the open upper end. The same or coupled information may be simultaneously presented as a continuous Cartesian representation on the first image display surface and as a polar representation on the second image display surface, and content of one representation may be synchronized in accordance with a selected position in the other representation.
    Type: Application
    Filed: November 6, 2015
    Publication date: March 28, 2019
    Applicant: RENSSELAER POLYTECHNIC INSTITUTE
    Inventors: Eric Louis AMERES, Gordon Patrick CLEMENT
  • Publication number: 20190094679
    Abstract: A method is used to prepare silver nanoparticles in the form of a silver nanoparticle cellulosic polymeric composite. A cellulosic polymer, organic solvent having a boiling point at atmospheric pressure of 100° C. to 500° C. and a Hansen parameter (?TPolymer) equal to or greater than that of the cellulosic polymer, and a nitrogenous base are mixed to form a premix solution. Upon heating the premix solution to a temperature of at least 75° C., a solution of reducible silver ions is added that is equimolar or less in relation to the nitrogenous base. The weight ratio of reducible silver ions to the cellulosic polymer is 5:1 to 50:1. The resulting silver nanoparticle composite is cooled, isolated, and re-dispersed in an organic solvent, providing a non-aqueous silver-containing dispersion comprising the silver nanoparticle cellulosic polymeric composite.
    Type: Application
    Filed: September 25, 2017
    Publication date: March 28, 2019
    Inventors: Deepak Shukla, Kevin M. Donovan, Kevin P. Klubek
  • Publication number: 20190094680
    Abstract: The present disclosure provides an integrated circuit (IC) method in accordance with some embodiments. The method includes building a mask model to simulate a mask image and a compound lithography computational model to simulate a wafer pattern; calibrating the mask model using a measured mask image; calibrating the compound lithography computational model using a measured wafer data and the calibrated mask model; and performing an optical proximity correction (OPC) process to an IC pattern using the calibrated compound computational model, thereby generating a mask pattern for mask fabrication.
    Type: Application
    Filed: November 15, 2017
    Publication date: March 28, 2019
    Inventors: Hsu-Ting Huang, Chih-Shiang Chou, Ru-Gun Liu
  • Publication number: 20190094681
    Abstract: The present disclosure provides a photoetching mask plate, a method for manufacturing the photoetching mask plate, and a photoetching method using the photoetching mask plate. The photoetching mask plate includes a base substrate, a mask pattern arranged on a surface of the base substrate, and a conductive connection pattern arranged on the surface of the base substrate. The conductive connection pattern is configured to electrically connect separate portions of the mask pattern to each other.
    Type: Application
    Filed: January 11, 2017
    Publication date: March 28, 2019
    Applicants: BOE TECHNOLOGY GROUP CO., LTD., BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
    Inventors: Zhenhua LV, Xi CHEN, Shijun WANG, Zhiying BAO, Yong ZHANG, Yue LI, Wenjun XIAO, Yanna XUE, Wenbo JIANG
  • Publication number: 20190094682
    Abstract: A method for forming a pellicle apparatus involves forming a device substrate by depositing one or more pellicle layers defined over a base device layer, where a release layer is formed thereover. An adhesive layer is formed over a transparent carrier substrate. The adhesive layer is bonded to the release layer, defining a composite substrate comprised of the device and carrier substrates. The base device layer is removed from the composite structure and a pellicle frame is attached to an outermost one of the pellicle layers. A pellicle region is isolated from a remainder of the composite structure, and an ablation of the release layer is performed through the transparent carrier substrate, defining the pellicle apparatus comprising a pellicle film attached to the pellicle frame. The pellicle apparatus is then from a remaining portion of the composite substrate.
    Type: Application
    Filed: June 20, 2018
    Publication date: March 28, 2019
    Inventors: Ping-Yin Liu, Chang-Ming Wu, Chia-Shiung Tsai, Xin-Hua Huang
  • Publication number: 20190094683
    Abstract: A method of removing a pellicle from a photomask includes removing a portion of a membrane from a pellicle frame, wherein the pellicle frame remains attached to the photomask following the removing of the portion of the membrane. The method further includes removing the pellicle frame from the photomask. The method further includes cleaning the photomask.
    Type: Application
    Filed: October 31, 2017
    Publication date: March 28, 2019
    Inventors: Chue San YOO, Chih-Chiang TU, Chien-Cheng CHEN, Jong-Yuh CHANG, Kun-Lung HSIEH, Pei-Cheng HSU, Hsin-Chang LEE, Yun-Yue LIN
  • Publication number: 20190094684
    Abstract: A critical dimension measurement system includes a voltage measurement circuit, a control circuit, and a critical dimension measurement circuit. The voltage measurement circuit may measure potentials of mask patterns of a photomask. The control circuit may include an information storage circuit for storing distribution information on the potentials of the mask patterns, measured by the voltage measurement circuit, and information on layout patterns corresponding to the mask patterns of the photomask. The critical dimension measurement circuit may be operated, by the control circuit, in a first measurement mode and a second measurement mode running for a shorter time than the first measurement mode, and measure critical dimensions of the mask patterns.
    Type: Application
    Filed: May 8, 2018
    Publication date: March 28, 2019
    Inventors: Won Joo Park, Hyung Joo Lee, Seuk Hwan Choi, Song Seok Nam, Yoon Taek Han
  • Publication number: 20190094685
    Abstract: Vacuum-integrated photoresist-less methods and apparatuses for forming metal hardmasks can provide sub-30 nm patterning resolution. A metal-containing (e.g., metal salt or organometallic compound) film that is sensitive to a patterning agent is deposited on a semiconductor substrate. The metal-containing film is then patterned directly (i.e., without the use of a photoresist) by exposure to the patterning agent in a vacuum ambient to form the metal mask. For example, the metal-containing film is photosensitive and the patterning is conducted using sub-30 nm wavelength optical lithography, such as EUV lithography.
    Type: Application
    Filed: November 30, 2018
    Publication date: March 28, 2019
    Inventors: Jeffrey Marks, George Andrew Antonelli, Richard A. Gottscho, Dennis M. Hausmann, Adrien LaVoie, Thomas Joseph Knisley, Sirish K. Reddy, Bhadri N. Varadarajan, Artur Kolics
  • Publication number: 20190094686
    Abstract: A pulsed light generation device includes: an optical coupler having four input/output ports including a first port, a second port, a third port and a fourth port; a connection optical path that connects the third port with the fourth port; and a phase modulation element disposed in the connection optical path. The optical coupler branches pulsed light input to the first port and outputs the branched input pulsed light as first-direction pulsed light and second-direction pulsed light to the third port and to the fourth port. The modulation element applies phase modulation to either one of the first-direction pulsed light and the second-direction pulsed light, thereby outputs output pulsed lights through the first port and the second port, wherein a waveform of one of the pulsed lights output through the first port is different from a waveform of the other of the output pulsed lights output through the second port.
    Type: Application
    Filed: November 26, 2018
    Publication date: March 28, 2019
    Applicant: NIKON CORPORATION
    Inventor: Akira TOKUHISA
  • Publication number: 20190094687
    Abstract: A shaping apparatus that shapes a composition on a substrate by using a mold, includes a substrate positioning mechanism for positioning the substrate, a mold positioning mechanism for positioning the mold, a dispenser for arranging the composition on a shot region of the substrate, and a gas supply for supplying a gas onto the substrate from a gas supply port in a state in which the substrate is driven by the substrate positioning mechanism. A flow rate of the gas supplied onto the substrate by the gas supply starts to decrease in a period during which the substrate is driven by the substrate positioning mechanism so that the shot region where the composition is arranged by the dispenser is moved under the mold.
    Type: Application
    Filed: September 25, 2018
    Publication date: March 28, 2019
    Inventor: Shintaro Narioka
  • Publication number: 20190094688
    Abstract: A colored composition of the present invention includes a dye compound having an anionic moiety including at least one of a structure represented by the following General Formula (A1), a structure represented by the following General Formula (A2), and a structure containing a boron atom, and a dye structure having a cationic moiety, in which the anionic moiety and the cationic moiety are bonded to each other via a covalent bond and present in the same molecule; a curable compound; and a solvent.
    Type: Application
    Filed: November 29, 2018
    Publication date: March 28, 2019
    Applicant: FUJIFILM Corporation
    Inventors: Junichi ITOU, Akihiro HARA, Kazuya OOTA, Yushi KANEKO, Daisuke SASAKI
  • Publication number: 20190094689
    Abstract: A radiation-sensitive composition includes: particles including a metal oxide as a principal component; an aggregation inhibiting agent for inhibiting aggregation of the particles; and an organic solvent. The aggregation inhibiting agent is preferably a compound having dehydration ability. The compound having dehydration ability is preferably a carboxylic anhydride, an orthocarboxylic acid ester, a carboxylic acid halide or a combination thereof. As the aggregation inhibiting agent, a compound that is capable of coordinating to a metal atom is also preferred. The compound is preferably represented by formula (1). In the formula (1), R1 represents an organic group having a valency of n; X represents —OH, —COOH, —NCO, —NHRa, —COORA or —CO—C(RL)2—CO—RA; and n is an integer of 1 to 4. The content of the aggregation inhibiting agent with respect to 100 parts by mass of the particles is preferably no less than 0.001 parts by mass.
    Type: Application
    Filed: November 21, 2018
    Publication date: March 28, 2019
    Applicant: JSR CORPORATION
    Inventor: Motohiro SHIRATANI
  • Publication number: 20190094690
    Abstract: A resist composition is provided comprising a base polymer containing an iodized polymer, and an acid generator containing a sulfonium salt and/or iodonium salt of iodized benzene ring-containing fluorosulfonic acid. When processed by lithography, the resist composition exhibits a high sensitivity, low LWR and improved CDU independent of whether it is of positive tone or negative tone.
    Type: Application
    Filed: September 13, 2018
    Publication date: March 28, 2019
    Applicant: Shin-Etsu Chemical Co., Ltd.
    Inventors: Jun Hatakeyama, Masaki Ohashi, Masahiro Fukushima, Takayuki Fujiwara
  • Publication number: 20190094691
    Abstract: A radiation-sensitive composition includes: particles including a metal oxide as a principal component; a radiation-sensitive acid generator; and an acid trapper, wherein a percentage content of silicon atoms with respect to an entirety of metal atoms in the composition is less than 50 atom %. The mean particle diameter of the particles is preferably no greater than 20 nm. A pattern-forming method includes: applying the aforementioned radiation-sensitive composition on a substrate to form a film; exposing the film; and developing the film exposed. A developer solution used in the developing is preferably an alkaline aqueous solution. A developer solution used in the developing may be an organic solvent-containing liquid. A radioactive ray used in the exposing is preferably an extreme ultraviolet ray or an electron beam.
    Type: Application
    Filed: September 25, 2018
    Publication date: March 28, 2019
    Applicant: JSR CORPORATION
    Inventor: Kazuki KASAHARA
  • Publication number: 20190094692
    Abstract: A photosensitive resin composition which gives a cured film having high light shielding properties and enables stable curing by baking at low temperature, a cured film obtained by curing the composition, a display device provided with the cured film, and a pattern forming method using the composition. A light shielding film-forming process which does not impart thermal damage to a light-emitting element with respect to a substrate provided with a light-emitting element. In a photosensitive resin composition including a binder resin, a photopolymerizable compound, a photopolymerization initiator, a coloring agent, and a thermosetting compound, a carbon black and/or an inorganic black pigment, and an organic pigment are used in combination as the coloring agent, and a photosensitive resin composition in which T2/T1 is 0.80 or more is used.
    Type: Application
    Filed: September 20, 2018
    Publication date: March 28, 2019
    Inventors: Tatsuro ISHIKAWA, Naozumi MATSUMOTO, Dai SHIOTA
  • Publication number: 20190094693
    Abstract: Provided are a photosensitive resin composition including a binder having a weight-average molecular weight of 4,000 to 25,000, a polymerization initiator having a content greater than 0% by mass and smaller than 9% by mass with respect to a total amount of solid contents of the composition, a polymerizable monomer, and a pigment, a transfer film, a decorative pattern, a touch panel, and a manufacturing method of a pattern.
    Type: Application
    Filed: November 26, 2018
    Publication date: March 28, 2019
    Applicant: FUJIFILM Corporation
    Inventors: Takashi ARIDOMI, Kazumasa MOROZUMI, Soji ISHIZAKA, Shinichi KANNA, Katsumi SASATA
  • Publication number: 20190094694
    Abstract: Provided is a positive type photosensitive resin composition including: a polymer compound which contains, in a main chain thereof, a sulfonamide group and a structure represented by Formula A-1; and an infrared absorbent. In Formula A-1, X represents —NR1—, —S—, or —O—, R1 represents a hydrogen atom or an alkyl group, and each symbol “*” independently represents a bonding position with respect to another structure.
    Type: Application
    Filed: November 26, 2018
    Publication date: March 28, 2019
    Inventors: Yuichi YASUHARA, Atsuyasu NOZAKI
  • Publication number: 20190094695
    Abstract: The composition for film formation includes a compound including a group of the formula (1) and a solvent. In the formula (1), R1 to R4 each independently represent a hydrogen atom, a monovalent organic group having 1 to 20 carbon atoms, or R1 to R4 taken together represent a cyclic structure having 3 to 20 ring atoms together with the carbon atom or a carbon chain to which R1 to R4 bond. Ar1 represents a group obtained by removing (n+3) hydrogen atoms from an aromatic ring of an arene having 6 to 20 carbon atoms. n is an integer of 0 to 9. R5 represents a hydroxy group, a halogen atom, a nitro group, or a monovalent organic group having 1 to 20 carbon atoms.
    Type: Application
    Filed: November 30, 2018
    Publication date: March 28, 2019
    Applicant: JSR CORPORATION
    Inventors: Naoya NOSAKA, Gouji WAKAMATSU, Tsubasa ABE, Yuushi MATSUMURA, Masayuki MIYAKE, Yoshio TAKIMOTO
  • Publication number: 20190094696
    Abstract: An exposure apparatus includes a carrying device and a UV light generation device that irradiate a transparent substrate positioned on the carrying device. The carrying device includes a base, a linear electric machine, an exposure table, and a pneumatic lift device that is arranged between the exposure table and the base and supports the exposure table on the base. A stator of the linear electric machine is fixed to the base, and a rotor of the linear electric machine is fixedly coupled to the exposure table. The linear electric machine drives the exposure table to move relative to the base. A method for exposure of a transparent substrate is also provided. The linear electric machine only needs to drive the movement of the exposure table thereby helping increase exposure speed and exposure accuracy. The pneumatic lift device provides an additional function of cushioning.
    Type: Application
    Filed: October 18, 2017
    Publication date: March 28, 2019
    Applicant: Wuhan China Star Optoelectronics Technology Co., Ltd.
    Inventor: Lei DING
  • Publication number: 20190094697
    Abstract: Various embodiments of the present application are directed towards an edge-exposure tool with a light emitting diode (LED), as well as a method for edge exposure using a LED. In some embodiments, the edge-exposure tool comprises a process chamber, a workpiece table, a LED, and a controller. The workpiece table is in the process chamber and is configured to support a workpiece covered by a photosensitive layer. The LED is in the process chamber and is configured to emit radiation towards the workpiece. A controller is configured to control the LED to expose an edge portion of the photosensitive layer, but not a center portion of the photosensitive layer, to the radiation emitted by the LED. The edge portion of the photosensitive layer extends along an edge of the workpiece in a closed path to enclose the center portion of the photosensitive layer.
    Type: Application
    Filed: February 23, 2018
    Publication date: March 28, 2019
    Inventors: Ying-Hao Wang, Chia-Chi Chung, Han-Chih Chung, Yu-Xiang Lin, Yu-Shine Lin, Yu-Hen Wu, Han Wen Hsu
  • Publication number: 20190094698
    Abstract: A patterning method is provided in which a light-sensitive layer is formed, and a target resolution is defined for a pattern to be formed in a target layer. Based on a reference dose and reference LWR that results from a single patterning exposure at an EUV wavelength, the target resolution and reference dose, the light-sensitive layer is subjected to at least two radiation exposures including an EUV patterning exposure at a dose selected to be less than the reference dose and within 15 mJ/cm2-200 mJ/cm2, and a flood exposure at a wavelength of 200 nm-420 nm and a dose of 0.5 J/cm2-20 J/cm2. The light-sensitive layer is then developed to form a mask pattern, which is used to etch the pattern into the target layer with the target resolution and a LWR less than or approximately equal to the reference LWR and ?5 nm.
    Type: Application
    Filed: September 20, 2018
    Publication date: March 28, 2019
    Inventors: Michael A. Carcasi, Mark H. Somervell, Seiji Nagahara
  • Publication number: 20190094699
    Abstract: An EUV collector for use in an EUV projection exposure apparatus includes at least one mirror surface having surface structures for scattering a used EUV wavelength (?) of used EUV light. The mirror surface has a surface height with a spatial wavelength distribution between a lower limit spatial wavelength and an upper limit spatial wavelength. An effective roughness (rmsG) below the lower limit spatial wavelength (PG) satisfies the following relation: (4 ? rmsG cos(?)/?)2<0.1. ? denotes an angle of incidence of the used EUV light at the mirror surface. The following applies to an effective roughness (rmsGG?) between the lower limit spatial wavelength (PG) and the upper limit spatial wavelength (PG?): 1.5 rmsG<rmsGG?<6 rmsG.
    Type: Application
    Filed: November 26, 2018
    Publication date: March 28, 2019
    Inventors: Ingrid Schuster, Wolfgang Merkel, Georgo Metalidis, Holger Kierey
  • Publication number: 20190094700
    Abstract: A chuck according to an embodiment of the present invention includes first and second support portions 10 each of which has a repetition structure of a convex portion 11 and a concave portion 13 on a base. A substrate is held by bringing each convex portion 11 into contact with the substrate and exhausting gas in each concave portion 13 such that the concave portion 13 has a negative pressure with respect to a space between the first support portion 10 and the second support portion 10. At least one support portion of the first support portion 10 and the second support portion 10 includes at least four convex portions 11 and three concave portions 13.
    Type: Application
    Filed: November 29, 2018
    Publication date: March 28, 2019
    Inventor: Toru Matsumoto
  • Publication number: 20190094701
    Abstract: An exposure method for projecting a pattern on an exposure mask onto a work by an exposure control of an exposure light including calculating an exposure position on the work from a relative positional relationship of the exposure mask and the work, setting a range acceptable for projecting the pattern even when the exposure position is off a target exposure position on the work as an exposure position range, and (3) executing an exposure control that irradiates the exposure light to the exposure mask when the exposure position is in the exposure position range, and that stops the exposure light when the exposure position is out of the exposure position range.
    Type: Application
    Filed: September 21, 2018
    Publication date: March 28, 2019
    Applicant: Mitutoyo Corporation
    Inventor: Motonori Ogihara
  • Publication number: 20190094702
    Abstract: An inspection apparatus, including: an objective configured to receive diffracted radiation from a metrology target having positive and negative diffraction order radiation; an optical element configured to separate the diffracted radiation into portions separately corresponding to each of a plurality of different values or types of one or more radiation characteristics and separately corresponding to the positive and negative diffraction orders; and a detector system configured to separately and simultaneously measure the portions.
    Type: Application
    Filed: September 19, 2018
    Publication date: March 28, 2019
    Applicants: ASML NETHERLANDS B.V.
    Inventors: Yevgeniy Konstantinovich Shmarev, Nitesh Pandey, Armand Eugene Albert Koolen
  • Publication number: 20190094703
    Abstract: A method to determine a patterning process parameter, the method comprising: for a target, calculating a first value for an intermediate parameter from data obtained by illuminating the target with radiation comprising a central wavelength; for the target, calculating a second value for the intermediate parameter from data obtained by illuminating the target with radiation comprising two different central wavelengths; and calculating a combined measurement for the patterning process parameter based on the first and second values for the intermediate parameter.
    Type: Application
    Filed: September 19, 2018
    Publication date: March 28, 2019
    Applicant: ASML Netherlands B.V.
    Inventors: Martin Jacobus Johan JAK, Simon Gijsbert Josephus MATHIJSSEN, Kaustuve BHATTACHARYYA, Won-Jae JANG, Jinmoo BYUN
  • Publication number: 20190094704
    Abstract: A microlithography optical system includes a projection objective and an illumination system that includes a temperature compensated polarization-modulating optical element. The temperature compensated polarization-modulating optical element includes a first polarization-modulating optical element of optically active material, the first polarization-modulating optical element having a first specific rotation with a sign. The temperature compensated polarization-modulating optical element includes also includes a second polarization-modulating optical element of optically active material, the second polarization-modulating optical element having a second specific rotation with a sign opposite to the sign of the first specific rotation.
    Type: Application
    Filed: June 4, 2018
    Publication date: March 28, 2019
    Inventors: Damian Fiolka, Markus Deguenther