Abstract: An optical imaging arrangement includes an optical element unit, and an actuator device connected to the optical element unit and is configured to be connected to a support structure for supporting the optical unit. The actuator device is configured to: actively adjust, in an adjustment state, a position and/or an orientation of the optical unit with respect to the support structure in N degrees of freedom; and support the optical element unit in a statically overdetermined manner in at least one of the N degrees of freedom via a plurality of active first and second actuator components such that, in a holding state following the adjustment state, the first and second actuator components cause a parasitic residual load introduced into the optical element unit in the at least one of the N degrees of freedom.

Abstract: The present disclosure, in some embodiments, relates to a photolithography tool. The photolithography tool includes an illumination source configured to generate electromagnetic radiation and projection optics configured to focus the electromagnetic radiation onto a photosensitive material overlying a substrate according to a pattern on a photomask. A dynamic focal element is configured to dynamically change positions at which the electromagnetic radiation is focused over the substrate during exposure of the photosensitive material. The positions at which the electromagnetic radiation is focused define a plurality of depths of focus.

Abstract: An apparatus and method for cleaning a contaminated surface of a lithographic apparatus are provided. A liquid confinement structure comprises at least two openings used to supply and extract liquid to a gap below the structure. The direction of flow between the openings can be switched. Liquid may be supplied to the gap radially outward of an opening adapted for dual flow. Supply and extraction lines to respectively supply liquid to and extract liquid from the liquid confinement structure have an inner surface that is resistant to corrosion by an organic liquid. A corrosive cleaning fluid can be used to clean photo resist contamination.

Abstract: An exposure apparatus includes a projection optical system, a substrate stage which is movable and has a holder to hold a substrate, and a detection apparatus that detects whether liquid is present on a surface of an object, which is disposed lower than a front end of the projection optical system. The surface of the object includes a recessed portion formed on the object. The substrate is exposed by emitting exposure light onto the substrate through the projection optical system and a liquid in a liquid immersion area locally formed on a portion of an upper surface of the substrate.

Abstract: A method performed by at least one processor includes: accessing a layout of an integrated circuit (IC), where the layout includes a plurality of patterns in one or more layers of the layout; performing a coloring operation; forming a list comprising at least one uncolorable cell group (UCG) of the layout based on a result of the coloring operation, where each of the at least one UCG comprises at least one uncolorable cell; and performing a first refinement for each UCG on the list. The first refinement is performed through: performing a movement on at least one uncolorable cell of the UCG; determining whether the UCG is colorable; and refining the layout by accepting the movement and removing the UCG from the list in response to the UCG being determined to be colorable.

Abstract: Examples of optical proximity correction (OPC) based computational lithography techniques are disclosed herein. An exemplary method includes receiving an IC design layout that includes an IC feature, the IC feature specifying a mask feature for selectively exposing to radiation a portion of a photoresist disposed on a substrate; determining topographical information of an underlying layer disposed on the substrate between the photoresist and the substrate; performing an OPC process on the IC feature to generate a modified IC feature; and providing a modified IC design layout including the modified IC feature for fabricating a mask based on the modified IC design layout. The OPC process may use the topographical information of the underlying layer to compensate for an amount of radiation directed towards the portion of the photoresist so as to expose the portion of the photoresist to a target dosage of radiation.

Abstract: Methods and systems for performing spectroscopic measurements of asymmetric features of semiconductor structures are presented herein. In one aspect, measurements are performed at two or more azimuth angles to ensure sensitivity to an arbitrarily oriented asymmetric feature. Spectra associated with one or more off-diagonal Mueller matrix elements sensitive to asymmetry are integrated over wavelength to determine one or more spectral response metrics. In some embodiments, the integration is performed over one or more wavelength sub-regions selected to increase signal to noise ratio. Values of parameters characterizing an asymmetric feature are determined based on the spectral response metrics and critical dimension parameters measured by traditional spectral matching based techniques.

Abstract: In a dark-field metrology method using a small target, a characteristic of an image of the target, obtained using a single diffraction order, is determined by fitting a combination fit function to the measured image. The combination fit function includes terms selected to represent aspects of the physical sensor and the target. Some coefficients of the combination fit function are determined based on parameters of the measurement process and/or target. In an embodiment the combination fit function includes jinc functions representing the point spread function of a pupil stop in the imaging system.

Abstract: A lithographic apparatus is a machine that applies a desired pattern onto a substrate, usually onto a target portion of the substrate. A functional relationship between local height deviations across a substrate and focus information, such as a determined focus amount, is determined for a substrate, e.g., a reference substrate. Height deviations are subsequently measured for another substrate, e.g. a production substrate. The height deviations for the subsequent substrate and the functional relationship are used to determine predicted focus information for the subsequent substrate. The predicted focus information is then used to control the lithographic apparatus to apply a product pattern to the product substrate.

Abstract: The present invention also discloses a multi-DOF (Degree of Freedom) large-stroke high-precision motion platform system using the guide mechanism. A large load-bearing guide mechanism comprises: a rigid frame for generating a large-stroke displacement to realize high-speed motion; a core motion platform connected with a motion portion of a non-contact actuator, connected with the rigid frame by a primary flexible hinge group and a secondary flexible hinge group, and used for generating a small-stroke precise displacement by elastic deformation of the flexible hinge groups under driving of the actuator.

Abstract: A vacuum system for extracting a stream of a multi-phase fluid from a photo-lithography tool comprises a pumping arrangement for drawing the fluid from the tool, and an extraction tank located upstream from the pumping arrangement for separating the fluid drawn from the tool into gas and liquid phases. The pumping arrangement comprises a first pump for extracting gas from the tank, and a second pump for extracting liquid from the tank. In order to minimize any pressure fluctuations transmitted from the vacuum system back to the fluid within the tool, a pressure control system maintains a substantially constant pressure in the tank by regulating the amounts of liquid and gas within the tank.

Abstract: A photo-sensitive layer is applied over a wafer. The photo-sensitive layer is exposed. In some embodiments, the photo-sensitive layer is exposed to EUV light. The photo-sensitive layer is baked. The photo-sensitive layer is developed. Humidity is introduced in at least one of: the applying, the baking, or the developing.

Abstract: A light source for extreme ultraviolet (EUV) radiation is provided. The light source includes a target droplet generator, a laser generator, a measuring device, and a controller. The target droplet generator is configured to provide a plurality of target droplets to a source vessel. The laser generator is configured to provide a plurality of first laser pulses according to a control signal to irradiate the target droplets in the source vessel, so as to generate plasma as the EUV radiation. The measuring device is configured to measure process parameters including temperature of the source vessel, droplet positions of the target droplets, and beam sizes and focal points of the first laser pulses. The controller is configured to provide the control signal according to at least two of the process parameters.

Abstract: A radiation source apparatus is provided. The radiation source apparatus includes a chamber, a target droplet generator, an exhaust module, a measuring device, and a controller. The target droplet generator is configured to provide a plurality of target droplets to the chamber. The exhaust module is configured to extract debris corresponding to the target droplets out of the chamber according to a first gas flow rate. The measuring device is configured to measure concentration of the debris in the chamber. The controller is configured to adjust the first gas flow rate according to the measured concentration of the debris.

Abstract: An apparatus for generating a laminar flow includes an injection nozzle and a suction nozzle. The injection nozzle and the suction nozzle are operable to form the laminar flow for blocking particles from contacting a proximate surface of an object. The injection nozzle includes a main outlet to blow out the laminar flow. The injection nozzle is configured to generate a Coanda flow along an external surface of the injection nozzle. The suction nozzle is configured to provide a gas pressure gradient for the laminar flow.

Abstract: The present invention relates to a unit and a method for treating the water-based washing liquid used in or by a washing station of flexographic plates. The unit comprises at least a first tank in which the liquid is collected and in which the monomer or polymer contained in the liquid itself surfaces. The unit further comprises at least a second tank into which part of the liquid contained in the second tank overflows following the opening of barrier means. Such means in closing condition isolate the two tanks. By means of such overflow, a volume of liquid is collected in the second tank, which contains the polymer or monomer previously surfaced in the first tank.

Abstract: A method for determining one or more optimized values of an operational parameter of a sensor system configured to measure a property of a substrate is disclosed. The method includes: determining a quality parameter for a plurality of substrates; determining measurement parameter values for the plurality of substrates using the sensor system for a plurality of values of the operational parameter; comparing a substrate to substrate variation of the quality parameter and a substrate to substrate variation of a mapping of the measurement parameter values; and determining the one or more optimized values of the operational parameter based on the comparing.

Abstract: An image forming apparatus includes a photoreceptor that includes a conductive substrate, a photosensitive layer, and an inorganic surface layer arranged in that order, the inorganic surface layer containing a group 13 element and oxygen; a charging unit; an electrostatic image-forming unit; a developing unit; a transfer unit; a cleaning unit that performs cleaning by causing the cleaning blade to contact the surface of the photoreceptor; and a supply unit that supplies a fatty acid metal salt to a position where the cleaning blade in the cleaning unit contacts the photoreceptor. When the fatty acid metal salt is supplied, a portion of the surface of the photoreceptor downstream of the supply unit and upstream of the cleaning unit in a rotating direction of the photoreceptor is covered with a metal derived from the fatty acid metal salt at a coverage of about 40% or more.

Abstract: An image forming method forms an image by performing charging, exposing, developing, and transferring in a rotation direction of a rotationally driven photoreceptor, wherein the charging is performed by a roller charging method, exposing a surface of the photoreceptor to light and eliminating charges on the surface of the photoreceptor are included between the developing and the transferring, the photoreceptor includes at least a charge transporting layer and a protective layer laminated on the charge transporting layer on a conductive support, and energy of light for irradiation in the exposing the surface of the photoreceptor to light is in a range of 0.0001 to 500 ?W/mm2 on the surface of the photoreceptor.

Abstract: An electrophotographic photoreceptor includes a conductive substrate, a charge-generating layer disposed on the conductive substrate, and a charge-transporting layer as an outermost layer disposed on the charge-generating layer and containing a binder resin and a charge-transporting material, wherein the average particle size of the crystal of the charge-transporting material is approximately from 0.1 ?m to 5.0 ?m.

Abstract: Provided is an electrophotographic photoreceptor containing a conductive support having thereon a photosensitive layer and a protective layer located on the photosensitive layer, wherein the protective layer contains a polymerized and cured product of a composition incorporating: a polymerizable monomer, a polymerizable perfluoropolyether compound, and metal oxide particles surface-modified with a surface modifying agent containing a fluorine atom.

Abstract: A surface layer of an electrophotographic photosensitive member contains a cured product of a composition containing a hole transport compound having an acryloyloxy group or a methacryloyloxy group, and a compound having a specific structure.

Abstract: There is disclosed a method of manufacturing a multi-layered article including a finished outer surface optionally having particular surface properties. The article can be a self-supported strip having a smooth outer surface. The method is, for example, suitable for the preparation of multi-layered articles such as a flexible intermediate transfer member (ITM) for use in an indirect printing system. Uses of such articles are also disclosed.

Abstract: Provided is a toner including toner particles. The toner particles has a volume particle diameter distribution index on a side of the largest diameter (GSDv (90/50)) of 1.26 or less; a number particle diameter distribution index on a side of the smallest diameter (GSDp (50/10)) of 1.28 or less; GSDv (90/50)/GSDp (50/10) of from 0.96 to 1.01; and an average circularity of 0.95 or more and 1.00 or less.

Abstract: An electrostatic charge developing toner includes a toner particle that includes a pigment particle having a surface aluminum proportion by an X-ray photoelectron spectroscopy of 6.0 atom % or more and 12.0 atom % or less and a binder resin having a carboxy group.

Abstract: An image forming apparatus includes an image carrier that includes a conductive substrate, and a photosensitive layer and a surface protection layer; a developing device that includes an electrostatic image developer containing a toner, and develops the electrostatic image to form a toner image. The toner contains an amorphous polyester resin and has a weight average molecular weight Mw in a range of from 25,000 to 60,000, and a ratio of the weight average molecular weight Mw to a number average molecular weight Mn (Mw/Mn) is in a range of from 5 to 10. In the toner, a ratio of an absorbance for a wavelength of 1500 cm?1 to an absorbance for a wavelength of 720 cm?1 is 0.6 or less, and a ratio of an absorbance for a wavelength of 820 cm?1 to the absorbance for a wavelength of 720 cm?1 is 0.4 or less.

Abstract: An image forming apparatus includes an image holding member, a charging device, an electrostatic charge image forming device, a developing device having a toner, a transfer device, and a fixing device, wherein the fixing device includes a fixing belt, a rotational member, and a heater; the toner contains an amorphous polyester resin as a binder resin; and the toner has a weight average molecular weight Mw and a number average molecular weight Mn, Mw is from 25000 to 60000, and Mw/Mn is from 5 to 10, and has an infrared absorption spectrometry, the ratio of absorbance for a wavelength of 1500 cm?1 to absorbance for a wavelength of 720 cm?1 is 0.6 or less, and the ratio of absorbance for a wavelength of 820 cm?1 to absorbance for a wavelength of 720 cm?1 is 0.4 or less.

Abstract: In an image forming method, a black toner and a color toner other than the black toner are used. The black toner and the color toner each include a binder resin including a polyester resin as a main component and a vinyl resin, a releasing agent, and an external additive. A content Vk % by mass of the vinyl resin relative to total mass of the binder resin included in the black toner, a content Vc % by mass of the vinyl resin relative to total mass of the binder resin included in the color toner, a content Wk % by mass of the releasing agent relative to the total mass of the binder resin included in the black toner, and a content Wc % by mass of the releasing agent relative to the total mass of the binder resin included in the color toner satisfy a specific relationship.

Abstract: Provided is polyester resin for toner including: a constitutional unit derived from at least one compound selected from the group consisting of specific Compounds (A) and (B); and a constitutional unit derived from tri- or higher valent carboxylic acid (excluding Compounds (A) and (B)), in which a content of the constitutional unit derived from tri- or higher valent carboxylic acid with respect to all constitutional units derived from carboxylic acid is greater than or equal to 0.5 mol %, and an acid value after melting and kneading is less than or equal to 55 mgKOH/g.

Abstract: A liquid developer comprising a carrier liquid, a toner particle insoluble in the carrier liquid, and a polymer having a primary amino group and soluble in the carrier liquid, wherein the toner particle comprises a polyester resin having an acidic group, an acid value of the polyester resin is at least 5 mg KOH/g, a pKa of the acidic group is not more than 3.4, and the polymer having a primary amino group has a primary amino group at a position other than the end of a main chain of the polymer, and method of producing thereof.

Abstract: There is provided an electrophotographic photosensitive member, a process cartridge and an electrophotographic apparatus in which residual potential is suppressed and a ghost image is prevented from being generated in a low-humidity environment in an undercoat layer of the electrophotographic photosensitive member. An electrophotographic photosensitive member including: an undercoat layer containing a strontium titanate particle having a maximum peak at a position of 2?=32.20±0.20 (? represents a Bragg angle) in a CuK? characteristic X-ray diffraction pattern and a half-value width of the maximum peak of 0.10 deg or more and 0.50 deg or less, and a titanium oxide particle; and a photosensitive layer containing a polyvinyl butyral resin, and a process cartridge and an electrophotographic apparatus each provided with the electrophotographic photosensitive member.

Abstract: An image forming apparatus includes: a first image forming unit that forms an image by using first toner; a second image forming unit that forms an image by using another kind of toner different from the first toner; a transfer unit that transfers the images formed by the first image forming unit and the second image forming unit onto an intermediate transfer body and then onto a recording medium; and a setting unit that sets an order of the images that are transferred onto the intermediate transfer body so that the image formed from the other kind of toner is transferred onto an independent image formed from the first toner transferred onto the intermediate transfer body in a case where the independent image formed from the first toner is to be formed on the recording medium.

Abstract: In accordance with an embodiment, an image forming apparatus comprises a main body, an attaching/detaching section, an uneven part, and a cleaning member. A conveyance path is formed inside the main body. The attaching/detaching section housed in the main body is detachably drawn out with respect to the main body along the conveyance path. The uneven part has a convex part and a concave part and is arranged in the attaching/detaching section. The cleaning member arranged in the main body is slidable with the convex part in a direction in which the attaching/detaching section moves along the conveyance path.

Abstract: A photo drum may be to receive a color separation. A controller may be to change a location of the color separation on the photo drum from a first location to a second location when a separation location history for the color separation is outside of a threshold range.

Abstract: An image forming apparatus includes: a first image forming unit that includes a first image holding member and a first developing unit, the first developing unit accommodating a first developer that includes a first toner and a first carrier; a first transfer unit; a second image forming unit that is disposed downstream of the first image forming unit in a traveling direction of a transfer medium and includes a second image holding member and a second developing unit, the second developing unit accommodating a second developer that includes a second toner and a second carrier; and a second transfer unit, in which a volume resistivity of the first carrier is higher than a volume resistivity of the second carrier, and a volume average particle diameter of the first carrier is more than a volume average particle diameter of the second carrier.

Abstract: An image forming apparatus includes: first and second image bearing members; first and second charging members; first and second developing members; a transfer member configured to sequentially transfer toner images from the first and second image bearing members to a transfer-receiving member; and a control portion configured to, at a timing determined based on information relating to the toner image formed on the first image bearing member, perform a cleaning operation of decreasing toner that adheres to the second charging member at a time of non-image formation.

Abstract: Provided is an electrophotographic member in which the increase in tackiness is small even in an environment of high temperature and high humidity. The electrophotographic member includes an electroconductive substrate and a surface layer, the surface layer contains resin including at least one of a urethane bond and an amide bond, the resin includes a cationic structure and an anionic structure in a molecule, and also includes a particular main-chain structure with hydrophobicity.

Abstract: A cleaning member includes a first cleaning part formed of a porous material and a second cleaning part formed of a porous material. The first cleaning part includes first projections each having a size that enables the first projections to pass between projecting portions of an object to be cleaned having surface irregularities and to reach the bottom of recessed portions of the object to be cleaned. The second cleaning part includes second projections larger than the first projections. The cleaning member cleans the object to be cleaned by coming into contact with the object to be cleaned.

Abstract: A charging apparatus including: a first charging roller configured to charge a surface of a photosensitive drum by rotating in contact with the surface of the photosensitive drum; a second charging roller configured to charge the surface of the photosensitive drum by rotating in contact with the surface of the photosensitive drum at a position downstream of the first charging roller in a rotation direction of the photosensitive drum; and a cleaning roller configured to clean a surface of the first charging roller and a surface of the second charging roller by rotating along with rotation of the first and second charging rollers in contact with the surfaces of the first and second charging rollers, an inroad amount of the first charging roller into the cleaning roller being larger than an inroad amount of the second charging roller into the cleaning roller.

Abstract: An image forming apparatus includes a controller substrate, a first mounting portion for a first hard disk drive, a second mounting portion for a second hard disk drive, a first connector electrically connecting the controller substrate and the first hard disk drive, a second connector electrically connecting the controller substrate and the second hard disk drive. The second connector is shifted toward a side downstream of the first connector in a hard disk drive inserting direction so as to be prevented from overlapping with the first connector as seen in a vertical direction. In the second mounting portion, a through hole extending in the vertical direction is formed at a position where the through hole overlaps with the first connector as seen in the vertical direction.

Abstract: In an information processing apparatus connected to an image forming apparatus including an image forming unit, the image forming unit includes a first receptor, a light source, a photosensitive member, a rotary polygon mirror, a light receptor, and a first output unit configured to stops outputting a predetermined signal after the image data for one surface of a recording medium is output, and resumes outputting the predetermined signal in response to the timing when image formation for one surface of a subsequent recording medium is started. The information processing apparatus includes a second receptor, a memory, a determiner configured to, determine a reflection surface based on information stored in the memory, a corrector configured to correct the image data, and a second output unit configured to, in response to start of receiving the predetermined signal, start outputting the image data.

Abstract: An image forming apparatus includes a groove, an exposure device and an adjustment member. In the groove, a rotation shaft of a photosensitive drum is inserted. The exposure device is configured to emit a laser light on the photosensitive drum to form an electrostatic latent image. The adjustment member is configured to shift the rotation shaft vertically in the groove to adjust a skew of the laser light.

Abstract: Provided are a lens array, a lens unit, an exposure device, an LED head, and an image forming apparatus. The lens array includes a plurality of lenses arranged so as to form an array. Each of the plurality of lenses is configured so that a contour focal length which is a focal length of a ray incident on a first position separate from an optical axis is longer than a paraxial focal length which is a focal length of a ray incident on a second position in the vicinity of the optical axis.

Abstract: An image forming apparatus includes a laser device, a sensor, and a control unit. The laser device emits laser light which is reference for image forming. The sensor detects the laser light emitted from the laser device. The control unit changes an output direction of the laser light emitted from the laser device if the laser light is not detected by the sensor .

Abstract: An image forming apparatus includes a first counting unit counting an entire image ratio, a second counting unit counting a partial image ratio, a display unit displaying information about maintenance of a photoconductor, and an execution unit that performs the display in the display unit so that X when the entire image ratio and the partial image ratio have first and second values, respectively, is greater than X when the entire image ratio and the partial image ratio have values smaller than the first and second values, respectively, and X when the partial image ratio and the entire image ratio have third and fourth values, respectively, is smaller than X when the partial image ratio and the entire image ratio have values smaller than the third and fourth values, respectively. X denotes the number of repeated image formations with the fixed entire and partial image ratios.

Abstract: Identification information of a toner bottle recorded in an IC chip is included in a toner bottle. When information on remaining amount of toner is successful, a printing apparatus notifies a management server with identification information of the toner bottle and information on remaining amount of toner, obtains toner usage amount used in printing processing according to an execution of printing processing based on print job, and updates information on remaining amount recorded in the IC chip according to usage amount. When reading of information of the IC chip fails, updating of information on remaining amount recorded in the IC chip, according to usage amount of toner used in printing processing according to execution of printing processing based on print job, which is received when the reading fails, is suppressed. Notification including information indicating the reading has failed as the information on remaining amount is transmitted.

Abstract: An image forming apparatus includes an image forming station configured to form a toner image on a recording material, a fixing portion configured to fix the toner image formed by the image forming station on the recording material, a selector configured to select a correction level for correcting a crease of an envelope by an operator, and a controller configured to control a fixing condition in response to the correction level selected on the selector.

Abstract: A network system including a customer replaceable unit (CRU) having an excellent security function for operation information which system can realize improvement of the use efficiency of operation information for making the CRU operate, and reduction in costs, is provided. An apparatus main body of a multifunction printer, a server, a personal computer, etc. are connected to a network of a network system, and a CRU is attached to the apparatus main body so as to be detachable. Operation information necessary for making the CRU operate is stored in the server. The apparatus main body obtains operation information of the CRU from the server via the network and stores the obtained operation information into a buffer memory, and causes the CRU to operate based on the operation information. The operation information stored in the buffer memory is erased when communication between the apparatus main body and the CRU ends.

Abstract: The present disclosure features an image forming apparatus having a first developing unit having a first developing roller; and a first toner supply unit configured to supply toner to the first developing unit, the first toner supply unit having: a first container configured to accommodate the toner therein, the first container having a first inlet opening through which the toner is received in the first container and a first outlet opening through which the toner in the first container is discharged; a first lid configured to close the first inlet opening; and a first shutter configured to open the first outlet opening when the first lid closes the first inlet opening, and to close the first outlet opening when the first lid opens the first inlet opening.

Abstract: A developing device includes developer, a developer bearing member, and a supply member that is in contact with the developer bearing member and supplies the developer. The developing device further includes a developing chamber in which the developer bearing member and the supply member are disposed, a developer containing chamber that contains the developer, a partition wall that partitions the developing chamber and the developer containing chamber from each other and is provided with an opening that communicates the developing chamber and the developer containing chamber with each other, and a conveyance member that conveys the developer from the developer containing chamber to the developing chamber. The conveyance member is provided with a hole through which the developer can pass or has a protrusion that generates a gap between the conveyance member and the partition wall.