Abstract: The present disclosure relates to a foldable container which includes a pair of side walls disposed side-by-side; a guide rail disposed in a direction transverse-crossing between lower ends of the one pair of side walls to guide movement of at least one of the side walls; an upper plate and a lower plate, wherein each of the upper plate and the lower plate is divided into at least two unit plates that are rotatably connected to each other so as to be folded by the movement of the side wall, and wherein each of the upper plate and the lower plate connects upper ends of the pair of side walls to each other and connects lower ends of the one pair of side walls to each other; and a door rotatably connected to each of a front end and a rear end of the side wall.

Abstract: A portable securing apparatus which is readily secured to a manway of a vessel having a portal intended to enable entry of service personnel into the vessel is described. The securing apparatus affords an improved grip to assist service personnel to enter the vessel. The securing apparatus is for temporary mounting to the manway. The securing apparatus includes a mounting plate mountable to a flange conventionally provided as part of the manway, and a handle for accommodating manual grasp of the securing apparatus.

Abstract: In some embodiments, apparatuses and methods are provided herein useful to automatically balance and buffer the return of empty containers or other totes to a plurality of areas. In some embodiments, a control circuit employs a logic system in which empty totes are directed along primary, secondary, or tertiary paths depending on information gathered from sensors regarding the availability of space for empty totes at a plurality of potential destinations. In this way, the return of empty totes to one or more points of origin may be buffered to balance the number of empty totes in one or more areas.

Abstract: A roller system has a frame, a plurality of rollers (supported by the frame) forming a roller plane, and an external rotor motor (“motor”) spaced from the roller plane. As an external rotor motor, the motor has a stator and an external rotor radially outward of the stator to substantially circumscribe the stator. To kinetically couple the motor with the rollers, the system also has a transmission coupling coupled with the external rotor and at least one of the rollers. The transmission coupling and external rotor are configured so that rotation of the external rotor causes the at least one roller to rotate in response to a torque received through the transmission coupling.

Abstract: Locking roller assemblies for locking and unlocking a roller of a roller conveyor. The disclosed locking roller assemblies include rollers that, by default, are locked from rotation in the absence of a transferred object such as a container, crate, or pallet. When an object is present over the roller, the roller is passively actuated by the object to unlock and release the roller, enabling the roller to rotate. When the package or article has passed by the roller, the locking roller assembly resumes the default configuration of locking the roller to prevent rotation. In some embodiments, actuation of the locking mechanism is parallel to the roller axis and accomplished by a lever and cam arrangement. In other embodiments, actuation of the locking mechanism is in a direction that is orthogonal to the roller axis and accomplished by a plunger arrangement.

Abstract: A mesh-like conveyor belt is capable of varying in width and shape as it travels. The conveyor belt comprises a plurality of links, joints, and control elements. The joints connect the links to each other and allow the links to change their orientation within the conveying surface of the conveyor belt. The plurality of links and joints allow the conveyor belt to vary in width, shape, trajectory, and surface speed while in motion. The conveyor belt also includes control elements, built into the structure of the belt that are capable of engaging with external guides. When the conveyor belt is in motion, the control elements engage with and follow the paths determined by external guides thereby controlling the shape of the belt.

Abstract: In one example in accordance with the present disclosure an object transportation device is described. The device includes a continuous belt having an inner surface and an outer surface. The inner surface interacts with a belt transport system. The device also includes a number of attachment devices disposed on the outer surface of the belt. An object attaches to the belt via an attachment device. An attachment device includes two angled protrusions extending from the outer surface from a common joint.

Abstract: A sorting clip for a garment conveyor attaches to a drive chain below which is a hanger support on which a group of garment hangers is suspended from a frontmost to a rearmost hanger. The clip has an upper portion fixed to the drive chain and a lower portion attached to the upper portion by a pivotable connected biased in a first direction of increasing angular separation between the two portions. An underside of the lower portion has disassociation teeth and a capture hook that contact the frontmost hanger to successively engage and separate the frontmost hanger from the other hangers, after which disengagement of the teeth from the frontmost hanger allows for sufficient pivoting of the lower portion in said first direction that the hook engages and captures the frontmost hanger.

Abstract: A device and a method for discharging objects having an axially symmetrical base surface. The axially symmetrical base surface has the shape of regular polygon with a five-fold axial symmetry. The device comprises an aligning unit, a discharge unit, and a transport unit, on which the objects are conveyed in a single row and in a mutually spaced manner from the aligning unit to the discharge unit. At least one railing is provided on one side of the transport unit at least in the region of the aligning unit.

Abstract: Described are systems, methods, and apparatus for managing the movement of inventory items within a materials handling facility using rollable containers and a gravity feed conveyance system. Inventory items are placed in the rollable containers and are routed to different locations within the materials handling facility along the gravity feed conveyance system, through use of gravitational forces that cause the rollable containers to roll. By using gravity to route inventory items within the materials handling facility, the energy and power requirements for the materials handling facility are reduced, which reduces overhead costs and which is better for the environment.

Abstract: A system for holding one or more bags. The system includes a cart, a first chute disposed on the cart, and a second chute also disposed on the cart. The first chute includes a first edging along each side of the first chute. The second chute includes a second edging along each side of the second chute. The second chute is intertwined with the first chute. The system may further include a third chute and a fourth chute disposed on the cart. The third chute may include a third edging along each side of the third chute, and the fourth chute may include a fourth edging along each side of the fourth chute. The top and bottom of the first chute and the top and bottom of the second chute are positioned on opposite ends of the cart at about 180 degrees apart, while the top and bottom of the third chute and the top and bottom of the fourth chute are positioned on opposite ends of the cart at about 180 degrees apart.

Abstract: A conveyor device for conveying an object with an identification device. The conveyor device comprises a plurality of rollers, connected drive motors for driving the rollers, a transmitter, a receiver for detecting the distance of the identification device and a control device for controlling the connected drive motors.

Abstract: A device, system, and method for detecting a covering sleeve on a container. A sleeve detection system includes a conveyor, a height profile acquisition device, and a processor in communication with the height profile acquisition device. The height profile acquisition device is configured to acquire height profiles of a tray traveling on the conveyor. The processor is configured to analyze height profiles received from the height profile acquisition device to determine a sleeve status of the tray. In some embodiments, a light gate is disposed across the conveyor and configured to detect the presence of a tray on the conveyor approaching the height profile acquisition device.

Abstract: A cleaning apparatus includes a roller, a conveyor belt and a belt cleaner. The conveyor belt transports food material in a first direction, and the belt cleaner cleans the food material from the conveyor belt as the conveyor belt travels in a second direction, distinct from the first direction. The conveyor belt passes around the roller as the conveyor belt changes from traveling in the first direction to traveling in the second direction. At least a portion of the belt cleaner is located directly below the roller such that food material falling off the conveyor belt when the conveyor belt passes around the roller is caught by the belt cleaner. The belt cleaner includes an enclosure through which the conveyor belt passes and an air nozzle located within the enclosure. The air nozzle directs air onto the underside of the conveyor belt. Preferably, the air nozzle is an air knife, which generates a sheet of air.

Abstract: A supply device includes a replenishment device configured to replenish bolts to a surface of a table, and a supply control device configured to control the replenishment device. A determination region for determining the number of bolts is predetermined in a region where the table is disposed. When the number of bolts detected in the determination region is less than a determination value, the supply control device selects a divided region having the lowest bolt number density from among a plurality of divided regions. The supply control device controls the replenishing device so as to replenish bolts to a region of the table corresponding to the selected divided region.

Abstract: A maintenance access system for a storage and retrieval system having a storage and retrieval space and automated transport vehicles disposed in the space. The system includes at least one maintenance access control unit associated with a portion of the space, at least one barrier in the space and defining a boundary of the portion of the space and configured to substantially prevent the passage of the vehicles past the at least one barrier, and a controller connected to the control unit, the controller being configured to receive a signal from the at least one control unit for isolating the portion of the space associated with the at least one control unit, where the controller in response to the signal closes the at least one barrier isolating the portion of the space and effects the removal from or shutting down of vehicles within the portion of the space.

Abstract: The present disclosure shows an apparatus for the automated removal of workpieces arranged in a bin, said apparatus having a first object recognition device for detecting the workpieces in the bin; a first picker for picking and removing the workpieces from the bin; a controller for evaluating the data of the first object recognition device, for path planning and for controlling the first picker; a buffering station on which the first picker places the workpieces after the removal from the bin and a positioning apparatus that more accurately positions and/or isolates the workpieces starting from the buffering station. Provision is made that the buffering station has at least one tiltable placement area that is tiltable into a slanted position via a tilting mechanism.

Abstract: An article transport system with few missed detections, and a controller used in the system. The system includes: a conveyor that sequentially transports plural workpieces; a conveyor sensor that obtains conveyance operation information of the conveyor; an arrival sensor that senses the arrival of each workpiece; a camera that captures an image of each workpiece; a position detection processing section that detects the workpiece from the image, and identifies a position of the workpiece on the conveyor; a movement distance designation section that designates first and second movement distances; an image capturing control section that controls the camera to capture an image of the workpiece upon the conveyor advancing by the first movement distance after the arrival of the workpiece has been sensed, and each time the conveyor advances by the second movement distance; and a number designation section that designates an upper limit number for the detection process.

Abstract: A method and apparatus for loading substrates in an inspection station is disclosed herein. In one embodiment a loading module for a substrate inspection system is provided that includes a first conveyor module, and a second conveyor module having a movable surface positioned substantially parallel to a movable surface of the first conveyor module, wherein the first conveyor module includes a first section and a second section, the first section having a vacuum unit operable to secure a substrate to a portion of the movable surface in the first section, and the second section is configured to release the substrate from the movable surface.

Abstract: An automatic unloading dolly that automatically unloads pallets therefrom that includes a frame having a loading/unloading side and a pusher side, a conveyor platform that extends between the loading/unloading side and the pusher side, one or more wheels connected to the frame, a multi-bar linkage system mounted to the frame and connected to a pusher that moves along the conveyor platform from the pusher side toward the loading/unloading side between a pusher base position and a pusher triggered position, and a contact arm link connected to the multi-bar linkage system such that movement of the contact arm link relative to the frame from a contact arm link base position to a contact arm link triggered position moves the multi-bar linkage system and the pusher from the pusher base position to the pusher triggered position.

Abstract: A method of leveling a parked freight trailer at a loading dock, the method comprising: (a) positioning a portable stabilizing device at least partially underneath a forward portion of the parked freight trailer; (b) positioning a lift associated with the portable stabilizing device to bear weight of the forward portion of the parked freight trailer; (c) reorienting the parked freight trailer so a floor of the parked freight trailer goes from a substantially non-parallel orientation to an approximately parallel orientation with respect to a floor of the loading dock by repositioning at least one of the jack and a landing gear of the parked freight trailer; and, (e) maintaining the lift in a weight bearing position while goods are at least one of unloaded from or loaded onto the parked freight trailer.

Abstract: A paper feeder for transporting paper sheets, includes: a head fan that blows air on the paper sheets; a suction fan that applies negative pressure to the paper sheets blown by the head fan; a switching member that changes the direction of the air from the head fan; a head shutter that blocks the flow of the air directed by the switching member; and a hardware processor that determines the blocking time of the airflow, wherein the switching member changes the air direction between a first direction for floating the paper sheets and a second direction toward the suction fan, and the hardware processor determines stop timing of the air blow in the second direction directed by the switching member as the start timing of clocking the blocking time of the airflow, based on the weight and the resistance to an external force of the paper sheets.

Abstract: A sheet conveying device includes a separator to separate a sheet from sheets. The separator includes a separation conveyor; a separation resistance member to press against the separation conveyor via the sheet; a resistance-member holder; a biasing member to contact and bias the resistance-member holder to press the separation resistance member toward the separation conveyor, the resistance-member holder to rotate about a resistance-member rotary shaft to separate from the biasing member in detaching from an apparatus body; and a biasing-member holder configured to rotate about a biasing-member rotary shaft to more incline the biasing member in a state, in which the biasing member is spaced apart from the resistance-member holder, in a moving direction of the resistance-member holder to detach from the apparatus body than the biasing member in a biasing state in which the biasing member biases the resistance-member holder in contact with the resistance-member holder.

Abstract: The disclosed supply roll (5) comprises a roll core (6); flat material and/or strip material (8) being carried on the roll core (6) in a multitude of windings; and at least one functional marker (2). The at least one functional marker (2) is placed in a specified relative position at an externally arranged free end section (7) of the flat material and/or strip material (8) such that information about the relative position of the free end section (7) is optically identifiable by way of the at least one functional marker (2).

Abstract: Dispensers, systems and methods dispense strips of a first adhesive tape which have adhesive on both sides and on one side is covered with a liner. A first storage unit from which the first adhesive tape is drawn off is provided, and a second storage unit from which a second adhesive tape is drawn off is provided. A connection installation by means of which the first adhesive tape and the second adhesive tape are interconnected so as to form a two-ply adhesive tape is provided, and an application installation by means of which the two-ply adhesive tape as a composite is capable of being applied to a substrate is provided.

Abstract: A sheet processing apparatus in which a sheet bundle including a plurality of sheets discharged onto an intermediate processing tray is received in a receiving portion of a stapler and bound with use of a staple, and a sheet bundle including a plurality of sheets discharged onto the intermediate processing tray is received in a receiving portion of a staple-less binding unit having a gap in the thickness direction of the sheets smaller than that of the receiving portion of the stapler and bound without using a staple, wherein when the stapler performs the binding process, the staple-less binding unit is arranged in a position shifted in a width direction orthogonal to a sheet discharge direction from a region on the intermediate processing tray, through which the sheets discharged by a sheet discharging portion pass.

Abstract: There is provided a manufacturing method of a tank. The manufacturing method comprises a cooling process of cooling down a resin-adhering fiber bundle that has a resin adhering to a fiber bundle; and a winding process of winding the resin-adhering fiber bundle that is cooled down by the cooling process, on a rotating liner. The cooling process cools down the resin-adhering fiber bundle to make a temperature of the resin-adhering fiber bundle that is being wound on the liner in the winding process, equal to or lower than a set temperature which is set in advance as a temperature to provide a viscosity of the resin that prevents the resin from being splashed from the resin-adhering fiber bundle by rotation of the liner in a course of winding the resin-adhering fiber bundle on the liner.

Abstract: A cable containing an optical fiber is used to transmit data between an underwater remotely operated vehicle (ROV) and a support vessel floating on the surface of the water. The ROV stores the cable on a spool and releases the cable into the water as the ROV dives away from the support vessel. The ROV detects the tension in the cable and the rate that the cable is released from the ROV is proportional to the detected tension in the cable. After the ROV has completed the dive and retrieved by the support vessel, the cable can be retrieved from the water and rewound onto the spool in the ROV.

Abstract: An elevator system includes a car, a main rope, a car, a detector, and a sway detection unit. The car moves vertically. The main rope moves as the car moves. The car moves vertically. The detector is provided on the car. The detector detects the position of the main rope. The sway detection unit detects, on the basis of the position detected by the detector, that abnormal swaying requiring a control operation is occurring in the main rope.

Abstract: A rope lifting tool for belt-shaped ropes comprises a first guide for guiding the rope lifting tool along a first guide rail; a second guide for guiding the rope lifting tool along a second guide rail; an upright plate, and an inclined plate at an acute angle relative to the upright plate. The upright plate and the inclined plate have a wedge shaped space between them. A plurality of wedge members are placed adjacent each other inside the wedge-shaped space. A rope gap for receiving an end of a belt-shaped rope is formed between each wedge member and the upright plate, which rope gap is narrowable by wedging of the wedge member in the wedge shaped space. A rope lifting arrangement includes the rope lifting tool.

Abstract: An elevator cover assembly having a cover pad and a trim with openings for receiving a hanging knob inside the elevator is disclosed. The trim is a separate piece attached to the elevator cover after openings are made in the trim. The trim slits formed therein are sized and positioned to receive hanging knobs. The trim is made of a flexible material that can be deformed to broaden the openings to more easily position the openings over the knobs. A hanging knob can be a stud device attached to any wall for hanging a wall cover. The stud device comprises a mount attached to a wall, and a knob extending from the mount and extending outwardly from the wall. The knob is configured to receive an opening of the wall cover to hang the wall cover. A variety of such stud devices is provided.

Abstract: An elevator system includes an elevator car for travel in a hoistway; a stator positioned along the hoistway; and a magnetic screw assembly coupled to the car, the magnetic screw assembly coacting with the stator to impart motion to the elevator car; the stator including a service section having a plurality of poles to coact with the magnetic screw assembly; the stator including a transfer station section, the transfer station section of the stator including a plurality of stator permanent magnets.

Abstract: Provided herein is an assembly for carrying or supporting a load. The assembly comprises a plurality of members connectable in an assembled arrangement for carrying or supporting the load. Each member comprises a first end and a second end, at least one of the first end and the second end has a pair of connecting members comprising two lugs that each has defined therein two holes. The lugs are configured for alignment with a corresponding pair of lugs formed on another member in the assembly. Fasteners extend through the holes formed in the lugs when the holes are aligned. Further provided are members for use in the assembly and connector elements for attaching two or more members in the assembly.

Abstract: The truck bed cargo hoist is configured for use with a load. The truck bed cargo hoist is configured for use with a pickup truck. The pickup truck is further defined with a bed. The truck bed cargo hoist is mounted in the bed of the pickup truck. The truck bed cargo hoist is configured for use in raising the load in the superior direction. The truck bed cargo hoist comprises a slewing structure, a stanchion, a jib, a plurality of gussets, and a hoist system. The slewing structure, the stanchion, the jib, and the plurality of gussets form the framework that supports the hoist system. The hoist system raises and lowers the load. The stanchion, the jib, and the plurality of gussets are interconnected. The slewing structure attaches the stanchion to the bed of the pickup truck such that the yaw angle of the jib is adjustable.

Abstract: Height adjusting device (1) for adjusting the height of an agitating device (2) in a digester (101) of a biogas plant (100), biogas plant (100) comprising a digester (101), a support unit (10), a displacement member (6), an agitating device (2), and a height adjusting device, and method for operating an agitating device (2). The height adjusting device comprises a housing unit (4), a drum device (5) rotatably accommodated on the housing unit (4), and a displacement member (6). The displacement member (6) is in functional connection with the drum device (5) and the agitating device (2) and the displacement member (6), depending on the direction of rotation of the drum device (5), can be wound onto the drum device (5) or unwound from the drum device (5) in sections, so that the agitating device (2) can be displaced upwardly or downwardly.

Abstract: A pneumatic jacking assembly for lifting a vehicle includes an air bag that is selectively inflated. A first plate is coupled to the air bag. The first plate is positioned on a support surface such that the first plate is positioned beneath a vehicle. A second plate is coupled to the air bag and the second plate abuts the vehicle when the air bag is inflated. In this way the air bag lifts the vehicle for servicing the vehicle. A pump is coupled to the first plate and the pump is in fluid communication with an interior of the air bag. The pump inflates the air bag when the pump is turned on. The second plate is urged away from the first plate when the air bag is inflated to lift the vehicle.

Abstract: A lift assembly for a storage area includes a floor supported by a scissor mechanism, an actuator for raising the floor from a neutral position to an elevated position, a plurality of members attached to the floor, guide members within which the plurality of members move, and a detent movable between an extended position wherein a portion of the detent protrudes into the guide member and contacts one of the at least two members sufficient to resist movement of the at least two members and a retracted position wherein the at least two members freely move within the guide members. The floor is movable between a non-extended position and a fully extended position when the scissor mechanism and the floor are in the neutral position, the elevated position, or any position between the neutral and elevated positions, and may be removed from the assembly.

Abstract: Systems, apparatuses, and methods are provided herein for sorting items discarded in a shopping facility. A system for sorting discarded items comprises a motorized transport unit configured to travel around discarded items placed in a sorting area in the shopping facility, the motorized transport unit comprises a sensor device and an item mover device, an item characterization database storing characteristics corresponding to a plurality of items likely to be found in the shopping facility, and a central computer system. The central computer system is configured to receive data from the sensor device on the motorized transport unit, determine an item characteristic of an item among the discarded items in the sorting area, determine a sorting category of the item from a plurality of predefined categories, and cause the motorized transport unit to move the item, with the item mover device, from the sorting area into a category area.

Abstract: An apparatus for unloading and installing palletized filter tubes which includes a rack having an attachment for a roller cage assembly. The cage includes at least one roller and is positioned horizontally and outward from the rack. The filter tube is positioned through the cage and over at least one roller and fastened at the free end to the ground or other filter tubing. The apparatus is attached to a skid steer, truck bed or other movable machinery and as the machinery moves forward the palletized filter tube is pulled through the cage assembly. Retention bars may be provided to retain the palletized filter tube in place as the vehicle moves. In one iteration, the retention bars are hydraulically operated and can be opened for loading of palletized filter tube.

Abstract: Automated setup and operation of a container capping machine is achieved by providing motors, each under computer control, to make the necessary adjustments regarding setup and operation, and a plurality of sensors and other devices adapted to send information related to container and cap configurations and machine operation to the computer.

Abstract: In a method for cleaning an on-load tap changer (19) in a regulating transformer (20), provision is made for the on-load tap changer (19) to comprise a moving contact (11) and a fixed contact (12); for a cleaning signal to be generated; for the moving contact (11) to be frictionally moved relative to the fixed contact (12) on the basis of the cleaning signal. An on-load tap changer (19) in a regulating transformer (20) comprises: —a moving contact (11) and a fixed contact (12); —a contact drive (17) which is coupled to the moving contact (11); —a control device (18) which is connected to the contact drive (17) and is designed in such a manner that the control device can generate a cleaning signal and can transmit said signal to the contact drive (17); wherein the contact drive (17) is designed in such a manner that the contact drive can frictionally move the moving contact (11) relative to the fixed contact (12) on the basis of the cleaning signal.

Abstract: The present invention provides a container assembly for use with a reusable urn or vessel. The assembly includes a (1) flexible pouch, (2) a fitment connected to the pouch and having a flexible flange and a first fluid passageway therethrough in fluid communication with the chamber, (3) a tubing adapter having a first end connected to the fitment and a second end having a member for connecting to a tubing and a second fluid passageway in fluid communication with the first fluid passageway; and (4) wherein the flexible flange is capable of bending to conform to an interior wall of the urn or vessel to place the second fluid passageway in alignment with an axis of a through hole in the urn or vessel.

Abstract: A tap (1) for delivering liquids from a container is described, comprising a supporting body (4) with fitting means (4.8) with the container, and connecting means (4.7) connected to connecting means present on a connector (7); a central pin (3) connected to a central geometry (4.10) of the supporting body (4) and comprising at an end thereof a fastening geometry (3.1) and at an opposite end an abutment geometry (3.3) for opening the connector (7) when it is connected to the tap (1); a membrane-type elastic sealing valve (6) for the automatic closure of the tap (1) and its operating sealing with the main body (4); a control member (5) to open and close the tap (1) transmitting a force to the valve (6) connected to the control member (5).

Abstract: A container insert is disclosed for use in a closed loop dispensing system. The insert is press-fitted into the throat of a liquid container. The insert includes a plastic retainer having a plastic spring over-molded thereon. The plastic spring replaces the prior art metal spring. The container insert is completely recyclable and is automatically self-venting.

Abstract: A point-of-sale fuel dispensing system, a pump assembly and a method of dispensing fuel at a point-of-sale. The system includes a market fuel storage tank, pump assembly, fuel conduit, separation unit, numerous enriched fuel product tanks and a controller. The separation unit may selectively receive at least a portion of market fuel and convert it into an octane-rich fuel component and a cetane-rich fuel component that may be subsequently dispensed to a vehicle being fueled, where a fuel grade selection and retail payment of a fuel containing the octane-rich or cetane-rich fuel components is provided to the vehicle based on user input at the customer interface.

Abstract: A cover attaching device for attaching a cover to a seat body is disclosed. This device comprises a cover holder which includes one or more clip holding means capable of holding at least one clip, the cover holder being configured to hold the cover, to which the clip has been attached, via the clip being held by the clip holding means; and a distance adjusting means capable of adjusting a distance between the cover holder and a table on which the seat body can be placed.

Abstract: A listing bead for use in securing upholstery trim covers to upholstery clips embedded in a foam substrate that includes finger-friendly formations on its surface. The formation in an illustrative embodiment defines a flat top at the upper end of a neck that extends between the bead and the top. Illustratively, the top is formed in two outwardly bent L-shapes extending at right angles in opposing directions from the neck. The bead, neck and flat top define confronting halves, joined at the bottom edge, which encase a web that is constructed and arranged to be secured to the trim cover by adhesives, and/or welding stitching. The web illustratively includes punched and/or cut holes (tactile indicia) at predetermined intervals therealong that provide visual and tactile feedback to the installer on the approximate location of clips in the substrate during assembly.

Abstract: The present disclosure provides a substrate structure for a micro electro mechanical system (MEMS) device. The substrate structure includes a cap and a micro electro mechanical system (MEMS) substrate. The cap has a cavity, and the MEMS substrate is disposed on the cap. The MEMS substrate has a plurality of through holes exposing the cavity, and an aspect ratio of the through hole is greater than 30.

Abstract: A method for manufacturing a microelectromechanical systems (MEMS) structure with sacrificial supports to prevent stiction is provided. A first etch is performed into an upper surface of a carrier substrate to form a sacrificial support in a cavity. A thermal oxidation process is performed to oxidize the sacrificial support, and to form an oxide layer lining the upper surface and including the oxidized sacrificial support. A MEMS substrate is bonded to the carrier substrate over the carrier substrate and through the oxide layer. A second etch is performed into the MEMS substrate to form a movable mass overlying the cavity and supported by the oxidized sacrificial support. A third etch is performed into the oxide layer to laterally etch the oxidized sacrificial support and to remove the oxidized sacrificial support. A MEMS structure with anti-stiction bumps is also provided.

Abstract: MEMS device for low resistance applications are disclosed. In a first aspect, the MEMS device comprises a MEMS wafer including a handle wafer with one or more cavities containing a first surface and a second surface and an insulating layer deposited on the second surface of the handle wafer. The MEMS device also includes a device layer having a third and fourth surface, the third surface bonded to the insulating layer of the second surface of handle wafer; and a metal conductive layer on the fourth surface. The MEMS device also includes CMOS wafer bonded to the MEMS wafer. The CMOS wafer includes at least one metal electrode, such that an electrical connection is formed between the at least one metal electrode and at least a portion of the metal conductive layer.