Abstract: An inductor includes a body including a plurality of insulating layers and a plurality of coil patterns are disposed on each of the plurality of insulating layers, and first and second external electrodes disposed on an external surface of the body. The plurality of coil patterns are connected to each other by coil connecting portions and both end portions thereof are electrically connected to the first and second external electrodes through coil lead portions, respectively, to form a coil. The plurality of coil patterns include coil patterns disposed on an outer portion of the body and coil patterns disposed on an inner portion of the body, the coil patterns disposed on the inner portion of the body include first coil patterns electrically connected in parallel, and at least one of the first coil patterns includes an internal side portion having a shape different from shapes of remaining coil patterns.

Abstract: A coil-embedded ceramic substrate includes a plurality of ceramic layers including multi-turn coil patterns provided thereon. At least one ceramic layer of the plurality of ceramic layers includes thereon a multi-turn coil pattern and dummy patterns not electrically connected to the multi-turn coil pattern. The multi-turn coil pattern winds around and extends parallel or substantially parallel to sides of the ceramic layer. The dummy patterns are each parallel or substantially parallel to corresponding ones of the sides of the ceramic layer as an extension of portion of the coil pattern in an extending direction.

Abstract: An electronic component comprises: a magnetic core having a flat base and a core, the flat base having a top, a bottom, and first and second opposite sides, the core is on the top; a winding having an edgewise coil including a wound flat wire and the core, the winding having two non-wound flat wires extending therefrom; and a magnetic exterior body covering the core and the edgewise coil. The two non-wound flat wires extend along the top, the first side, the bottom and then the second side, and the two non-wound flat wires are non-adhesively positioned around the flat base. The two non-wound flat wires on the bottom are externally exposed electrodes. The second side inclines towards the core. The two ends of the two non-wound flat wires are embedded into the magnetic exterior body to fix the two non-wound flat wires to the magnetic exterior body.

Abstract: A coil component includes a body having one surface and another surface opposing each other and a plurality of wall surfaces each connecting the one surface to the other surface of the body. A pair of recesses are disposed in a respective end surface of a pair of opposing end surfaces of the body and each extend to the one surface. A coil portion includes first and second lead-out portions disposed on a surface of an internal insulating layer embedded in the body, and the coil portion is exposed to an internal wall and a bottom surface of each of the pair of recesses. First and second external electrodes are each disposed along the internal wall of a respective recess and along the one surface of the body to be connected to the coil portion, and are spaced apart from each other on the one surface of the body.

Abstract: Disclosed herein is a pulse transformer that includes first to fourth terminal electrodes provided on the first flange part, fifth to eighth terminal electrodes provided on the second flange part, first and second wires wound around the winding core part having one end connected to the first and second terminal electrodes and other end connected to the seventh and eighth terminal electrodes, and third and fourth wire wound around the winding core part having one end connected to third and fourth terminal electrodes and other end connected to the fifth and sixth terminal electrodes. A winding direction of the first and third wires is opposite to a winding direction of the second and fourth wires.

Abstract: Provided is a coil molded article including: a coil having a winding portion; and an integration resin portion that coats at least an inner peripheral face of the winding portion, wherein the coil molded article further includes a gap portion that is integrated into the inner peripheral face and divides an internal space of the winding portion into two portions in an axial direction of the winding portion. Further provided is a reactor including: the above-described coil molded article; and a magnetic core including an inner core portion that is arranged inside the winding portion included in the coil molded article, and an outer core portion that is arranged outside the winding portion.

Abstract: A high voltage winding for a single electrical phase of a high voltage electromagnetic induction device, wherein the high voltage winding comprises: a first winding part, and a second winding part, wherein the first winding part comprises: a first conductor, a first solid electrical insulator circumferentially enclosing the first conductor, and a first semi-conductive sheath circumferentially enclosing the first solid electrical insulator, wherein the first semi-conductive sheath is earthed or connected to an electric potential that is lower than a rated voltage of the high voltage winding, and wherein the second winding part comprises: a second conductor, and a second solid electrical insulator circumferentially enclosing the second conductor and forming an outermost layer of the second winding part.

Abstract: An inductor component including a spiral wiring wound into a planar shape. A first magnetic layer and a second magnetic layer are located at positions sandwiching the spiral wiring from both sides in a normal direction relative to the plane of the wound spiral wiring. A vertical wiring extending from the spiral wiring in the normal direction penetrates the inside of the first magnetic layer or the second magnetic layer.

Abstract: An object of the present invention is to provide a coil component in which leakage of magnetic flux from a magnetic gap is reduced. A coil component includes: a drum-shaped core 20 having a winding core part 30 with a gap G formed therein and first and second flange parts 31 and 32; a plate-like core 40 fixed to the first and second flange parts 31 and 32; and wires W1 to W3 wound around the winding core part 30 and each having one end connected to a terminal electrode provided on the first flange part 31 and the other end connected to a terminal electrode provided on the second flange part 32. According to the present invention, the gap G formed in the winding core part 30 functions as a magnetic gap, and magnetic flux leaking from the magnetic gap is shielded by the plate-like core 40.

Abstract: Embodiments of the present disclosure can include a hybrid transformer system comprising an electrical voltage transformer comprising: a high-voltage winding, the high-voltage winding comprising a first end and a second end, the first end having a lower voltage than the second end; a plurality of taps disposed proximate the first end of the high-voltage winding; a multi-level converter coupleable to the plurality of taps of the electrical voltage transformer, the multi-level converter configured to simultaneously control voltage injection and VAR injection to the high-voltage winding of the electrical voltage transformer; and a controller electrically coupleable to the multi-level converter, such that when the multi-level converter is coupled to the plurality of taps of the electrical voltage transformer, the controller is configured to selectively inject at least one of VARs or voltage to the high-voltage winding of the electrical voltage transformer.

Abstract: Obtain an ignition coil in which a magnet is provided at a magnet holding portion which is formed between a first side iron core and a second side iron core, and intervening components which are configured by using a non-magnetic material, are included at facing portions which are provided at end portions of separated surfaces of the first side iron core and separated surfaces of the second side iron core, in a state where the magnet holding portion is formed by using the first side iron core and the second side iron core, and are faced at a surface which is vertical with respect to an axis direction of the side iron cores, and the intervening components have a thickness which is less than a distance between the separated surfaces of the first side iron core and the separated surfaces of the second side iron core.

Abstract: A tablet stand is disclosed which incorporates a near field antenna configuration which couples to a near field antenna in the back of a tablet and provides a near field antenna coupling region for near field communication at the front of the tablet. The stand may be completely passive and use conductive antenna elements and passive resonance matching circuit elements to provide efficient coupling. In another aspect a thin profile passive keyboard adapted for use with a near field enabled tablet is provided. In another aspect a mounting bracket or holder, embedded antenna, and passive keyboard combination is provided adapted for converting a tablet into a notebook type configuration.

Abstract: The invention relates to a device for a wireless power transfer system. The device comprises a housing and a coil arranged inside the housing. The coil comprises a first conductor wire forming a first sub coil having a plurality of windings and a second conductor wire forming a second sub coil having a plurality of windings. The housing comprises a first holder for accommodating and holding the first sub coil and a second holder for accommodating and holding the second sub coil. The first holder and the second holder are attached to each other such that the first sub coil and the second sub coil together form the coil being arranged between the first holder and the second holder.

Abstract: A method for manufacturing a separable electromagnetic inductive apparatus is provided. The method for manufacturing a separable electromagnetic inductive apparatus comprises a winding step for winding a steel plate composed of a rolled amorphous magnetic alloy to a circular shape to form a magnetic core; a heat treating and an impregnating step for heat treating and impregnating the wound magnetic core without adding cobalt; a cutting step for cutting the heat treated and impregnated magnetic core to an orthogonal direction to the wound direction of the magnetic core; and a polishing step for polishing the cut surface having a three-dimensional plane of the cut surface of the magnetic core evenly arranged in a fixed state.

Abstract: A first layer on a substrate includes an insulator material portion adjacent an energy-reactive material portion. The energy-reactive material portion evaporates upon application of energy during manufacturing. Processing patterns the first layer to include recesses extending to the substrate in at least the energy-reactive material portion. The recesses are filled with a conductor material, and a porous material layer is formed on the first layer and on the conductor material. Energy is applied to the porous material layer to: cause the energy to pass through the porous material layer and reach the energy-reactive material portion; cause the energy-reactive material portion to evaporate; and fully remove the energy-reactive material portion from an area between the substrate and the porous material layer, and this leaves a void between the substrate and the porous material layer and adjacent to the conductor material.

Abstract: A capacitor including a conductive metal base material having a porous part, a dielectric layer on the porous part, an upper electrode on the dielectric layer, and an oxide film on a surface of the conductive metal base material.

Abstract: Provided are a multilayer ceramic electronic component and a method for manufacturing the same, the multilayer ceramic electronic component including a ceramic body including a dielectric layer and an internal electrode, and an external electrode formed on an outer side of the ceramic body and electrically connected to the internal electrode, wherein the internal electrode includes a conductive metal and an additive, and the number of particles of the additive disposed per ?m2 of the internal electrode is in the range of 7 to 21, both inclusive.

Abstract: In a thin-film capacitor, an electrode terminal layer and an electrode layer of a capacitor portion are connected to electrode terminals by via conductors that is formed to penetrate an insulating layer in a thickness direction thereof, and a short circuit wiring in the thickness direction is realized by the via conductors. In the thin-film capacitor, an increase in the number of terminals in the plurality of electrode terminals is achieved, a decrease in length of a circuit wiring is achieved, and thus a thin-film capacitor with low-ESL has been achieved.

Abstract: An electrode holder and a method for producing an electrode for an aluminum electrolytic capacitor are provided that enable prevention of exfoliation of a porous layer during chemical formation even when the porous layer is formed on an aluminum electrode so as to have a thickness of 200 micrometers or greater. When an aluminum electrode 10 having at least one surface 11 on which a porous layer 17 having a thickness of 200 micrometers or greater is formed is subjected to chemical formation in a chemical formation solution, the aluminum electrode 10 is held by an electrode holder 50. The electrode holder 50 includes: an insulating first support plate 51 configured to overlap the one surface 11 of the aluminum electrode 10; an insulating second support plate 52 configured to overlap the other surface 12 of the aluminum electrode 10; and a connecting part 53 configured to connect the first support plate 51 and the second support plate 52 to each other.

Abstract: A method for producing an electrode for an aluminum electrolytic capacitor is provided that can reduce defects in a chemical formation film formed at a chemical formation voltage of 500 V or higher. For producing the electrode for an aluminum electrolytic capacitor, an aluminum electrode is brought into contact with pure water having a temperature of 70° C. or higher to form a hydrated film having a suitable film thickness on the aluminum electrode at a hydration step, and then chemical formation is performed thereon at a chemical formation voltage of 500 V or higher in a chemical formation solution having a temperature of 40° C. or higher at a chemical formation step. At the chemical formation step, when the relative velocity of the chemical formation solution to the aluminum electrode is represented by a three-dimensional velocity vector B?A and the absolute value of the velocity vector B?A is represented by |B?A|, the absolute value |B?A| of the velocity vector satisfies the following conditional formula.

Abstract: An electrolytic capacitor includes a capacitor element, a case housing the capacitor element, and a first heat radiation layer having an insulating property. The first heat radiation layer covers at least part of the capacitor element. A thermal conductivity ?C of the case in a thickness direction is greater than or equal to 1 W/m·K. A thermal emissivity ?1 of the first heat radiation layer is greater than or equal to 0.7.

Abstract: The present invention relates to a light absorption layer that makes it possible to perform photoelectric conversion in both the visible light region and the near-infrared light region and that is for forming a photoelectric conversion element and a solar cell having high conversion efficiency. The present invention also relates to a photoelectric conversion element and a solar cell comprising the light absorption layer. This light absorption layer comprises a perovskite compound and quantum dots containing Cl element.

Abstract: The present invention relates to a process for the production of a layered body (1), at least comprising the process steps: I) provision of a photoactive layer comprising a material having a perovskite type crystal structure; II) superimposing the photoactive layer at least partially with a coating composition A) comprising an electrically conductive polymer a) and an organic solvent b); III) at least partial removal of the organic solvent b) from the coating composition A) superimposed in process step II), thereby obtaining an electrically conductive layer superimposed on the photoactive layer. The present invention also relates to a layered body obtainable by this process, to dispersions, to an electronic device, to a process for the preparation of a photovoltaic device and to the photovoltaic device that is obtainable by this process.

Abstract: An on-chip supercapacitor constituted by a silicon substrate and a porous carbon layer positioned thereon, the carbon layer including pseudocapacitive materials. The invention also relates to the method for producing the supercapacitor and the porous material.

Abstract: Mixture of particles comprising a non-conducting or semi-conducting nucleus covered with a hybrid conductor coating and hybrid conductor chains located between the particles of the mixture to constitute a conductivity network, that is prepared by mechanical crushing. Due to a very good conductivity of the network, a low resistivity, a very good capacity under elevated current and/or a good density of energy, these mixtures of particles are advantageously incorporated in anodes and cathodes of electrochemical generators, resulting in highly performing electrochemical systems.

Abstract: The present invention relates to an electric double layer capacitor basic cell having a separator-including electrode, the cell having improved conductivity of an electric double layer capacitor basic cell by using a separator-including electrode without a separation membrane so as to have excellent electric energy storage and output performance. In addition, the present invention relates to an electric double layer capacitor cell having a separator-including electrode, the cell allowing a plurality of electrode pairs to be stacked such that current collector plates of the same polarity are connected and allowing the current collector plates of the plurality of stacked electrode pairs connected while having the same polarity to be mutually connected, thereby having improved electric energy storage density and output performance of an electric double layer capacitor cell.

Abstract: A method for producing an electrode for an energy storage device includes: forming a current collector from a conductive material; forming a primer layer on the current collector; injecting dry powder electrode materials into the primer layer, wherein the dry powder electrode materials injected into the primer layer form an electrode film in electrical contact with the current collector.

Abstract: A method for using a bismuth based alloy as switch or socket power-off element which is applied to a switch or a socket, and the switch or the socket includes two conductive elements for conducting currents and one power-off element. A bismuth based alloy is used as the power-off element and a melting point of the bismuth based alloy is between 100° C. to 380° C. When the power-off element is in an environment below the melting point, the two conductive elements are mutually contacted and capable of conducting currents, whereas the power-off element is only receptive of the currents but does not serve as a medium for conducting the currents; when a working temperature of the switch or the socket is close to or exceeds the melting point, the power-off element loses rigidity and enables the two conductive elements to be separated from each other, thereby forming an electrically disconnected state.

Abstract: A push switch, having a conductive member which includes three integrally formed components: a conductive element, a U-shaped clip, and a conductive cantilever element. An overheating destructive element is provided on the conductive cantilever element, and the overheating destructive element can be destroyed at a destructive temperature, in which the destructive temperature is between 100° C. to 250° C. The push switch has a contact element in contact with the overheating destructive element so as to control the conductive cantilever element to be electrically connected or disconnected. When the conductive cantilever element is electrically connected, and if the overheating destructive element is overheated and destroyed, the conductive cantilever element is driven to become electrically disconnected, thereby achieving protection against overheating. The integral formation and manufacturing of the conductive member has the advantages of being structurally simple and easy to assemble.

Abstract: A keyboard device includes a base plate, a key structure and a membrane switch circuit member. The membrane switch circuit member includes a first board and a second board. The first board includes a first circuit pattern, a conductive paste mark and a first insulation layer. The conductive paste mark is dispensed or sprayed on the first board or the first circuit pattern to define an equivalent resistance. Consequently, a ghosting problem is avoided. The second board includes a second circuit pattern and a second insulation layer. Since the first contact and the second contact are separated from each other through the first insulation layer and the second insulation layer, it is not necessary to install the separation layer in the membrane switch circuit member.

Abstract: A keyboard is disclosed, which includes a base plate, a plurality of key structures, and a light emitting assembly. The base plate includes a body and a plurality of optically transmissive members. The body has a plurality of hollow portions. The optically transmissive members are contained in the hollow portions, respectively. Each of the optically transmissive members has a light guiding portion and a plurality of connecting structures. The key structures correspond to the optically transmissive members, respectively. One of the key structures connects to the connecting structures of one of the optically transmissive members. The light emitting assembly includes a driver circuit board and a plurality of light emitting units. The light emitting units are located on the driver circuit board. The driver circuit board is located on one of the surfaces of the base plate. The light emitting units are contained in the light guiding portion, respectively.

Abstract: A fob key for a vehicle. The fob key for a vehicle includes a housing accommodating a printed circuit board mounted with touch switches and electrical parts, buttons arranged on the housing and able to move toward touch switches, and a button-supporting structure elastically supporting buttons in a direction far away from touch switches.

Abstract: A rocker switch having a sliding and pressing element, comprising a thermal conductive shell and an overheating destructive element. The sliding and pressing element is applied to the rocker switch. The overheating destructive element can be destroyed at a destructive temperature, and the destructive temperature is between 100° C. to 250° C. The thermal conductive shell is pressed against a rocker conductive element of the rocker switch so as to control the rocker conductive element to be electrically connected or electrically disconnected. When the rocker conductive element is electrically connected, and if the overheating destructive element is overheated and destroyed, the rocker conductive element would be electrically disconnected, thereby realizing protection from overheating. The overheating destructive element is tightly adhered to the thermal conductive shell and is capable of completely absorbing a heat energy generated by a circuit, thus giving the element the advantage of high sensitivity.

Abstract: A switching apparatus comprises a plurality of parallel-connected current-conductive branches, each current-conductive branch including at least one respective gas tube switch, wherein the switching apparatus further includes an electrical circuit, the electrical circuit including at least one switching element configured to be operable to selectively synthesise a or a respective voltage difference in series with one or more of the gas tube switches so as to control the distribution of current between the current-conductive branches.

Abstract: A switching apparatus comprises a plurality of current-conductive branches connected in parallel between first and second terminals, each current-conductive branch including at least one respective electrical connection member in series connection with at least one respective gas tube switch between the first and second terminals, wherein the inductance value of each electrical connection member is configured to balance the inductance values of the current-conductive branches.

Abstract: The invention relates to a thermally triggered, mechanical switching device, consisting of a heat-sensitive means and a mechanical force-storage means, wherein the heat-sensitive means blocks or unblocks the movement path of a switching piece; furthermore, the switching piece is preloaded and held by the mechanical force-storage means, and comprising a housing that accommodates the aforementioned means. According to the invention, the housing is designed as a cartridge-shaped shell which receives a plunger in the interior thereof, which plunger is mounted in a movable manner through a first end-side opening in the housing and is supported against a fusible shaping part under pretension, wherein the fusible shaping part is arranged so as to cover a second opening, which is located opposite the first end-side opening, in such a way that, when the melting temperature of the fusible shaping part is reached, said fusible shaping part is displaced by the plunger and the plunger takes on a changed position.

Abstract: A power relay assembly is provided. A power relay assembly according to an exemplary embodiment of the present invention comprises: an upper case having at least one electric element mounted on one surface thereof; a lower case coupled to the upper case; and at least one bus bar electrically connected to the electric element, disposed between the upper case and the lower case, and including a bottom portion that is in surface contact with at least one of the upper case and the lower case, wherein at least one side of the bottom portion contacts a portion made of a plastic material having heat dissipation and insulation properties in the upper case and the lower case.

Abstract: The application relates to a power switch for breaking an electrical circuit when current and/or current time span threshold values are exceeded, including an energy converter, which on the primary side is connected to the electrical circuit, and on the secondary side provides an energy supply for at least one control unit of the power switch. A choke is connected between the secondary-side output of the energy converter and the control unit of the power switch.

Abstract: Power fuses having filler material including hydrated zeolite material facilitates increasing power density of electrical fuses in reduced package sizes. The hydrated zeolite material releases water to cool and suppress electrical arcing conditions experienced in higher power circuitry.

Abstract: A method of generating X-rays includes providing a field-emission diode including two electrodes separated by a gap, a first conductor, a first insulator on a surface of the first conductor, a second insulator on a surface of the first insulator that is not in contact with the first conductor, and a second conductor. The first insulator and the second insulator have trapped electrons at an interface therebetween, and are provided between the first conductor and the second conductor. The method further includes moving the second conductor with respect to the first conductor to induce electrons on the second conductor via electrostatic induction; accelerating the induced electrons across the gap of the field-emission diode; and striking a target with accelerated electrons to produce an X-ray. The first insulator and the second insulator are not the same.

Abstract: A liquid metal or spiral groove bearing structure for an x-ray tube and associated process for manufacturing the bearing structure is provided in which journal bearing sleeve is formed with a number of structures thereon that function to dissipate heat transmitted to the sleeve during operation of the bearing assembly within the x-ray tube to minimize thermal deformation of the sleeve, thereby minimizing gap size alteration within the bearing assembly. The structures formed within the sleeve are slots disposed within the section of the sleeve in which the highest temperature gradients develop. The slots enable an increase in thermal conductance away from the sleeve while minimizing the stresses created from the deformation of the portion(s) of the sleeve between the slots.

Abstract: An x-ray window can include an adhesive layer sandwiched between and providing a hermetic seal between a thin film and a housing. The adhesive layer can include liquid crystal polymer. The liquid crystal polymer can be opaque, gas-tight, made of low atomic number elements, able to withstand high temperature, low outgassing, low leakage, able to relieve stress in the x-ray window thin film, capable of bonding to many different materials, or combinations thereof.

Abstract: A magnetically microfocused electron emission source apparatus is disclosed. The apparatus may include a magnetic emitter unit, wherein the magnetic emitter unit comprises an emitter. Further, the magnetic emitter unit may include one or more magnetic portions formed from one or more magnetic materials, wherein the one or more magnetic portions of the magnetic emitter unit are configured to generate a magnetic field proximate to a tip of the emitter of the magnetic emitter unit for enhancing focusing of the emitted electrons from the electron emitter.

Abstract: Disclosed herein are electron microscopes with improved imaging. An example electron microscope at least includes an illumination system, for directing a beam of electrons to irradiate a specimen, an elongate beam conduit, through which the beam of electrons is directed; a multipole lens assembly configured as an aberration corrector, and a detector for detecting radiation emanating from the specimen in response to said irradiation, wherein at least a portion of said elongate beam conduit extends at least through said aberration corrector and has a composite structure comprising an outer tube of electrically insulating material, and an inner skin of electrically conductive material with an electrical conductivity ? and a thickness t, with ?t<0.1 ??1.

Abstract: The invention relates to a method 3D defect characterization of crystalline samples in a scanning type electron microscope. The method comprises Irradiating a sample provided on a stage, selecting one set of crystal lattice planes of the sample and orienting said set to a first Bragg condition with respect to a primary electron beam impinging on said sample, and obtaining Electron Channeling Contrast Image for an area of interest on the sample. The method is characterized by performing, at least once, the steps of orienting said selected set of crystal lattice planes to a further Bragg condition by at least tilting the sample stage with the sample by a user-selected angle about a first tilt axis, and obtaining by Electron Channeling Contrast Image for a further area of interest.

Abstract: An electron microscope comprises: an electron microscope main body including a phase plate that imparts a phase change to an electron wave, a moving mechanism that moves the phase plate, and a detector that acquires an image formed by an electron beam transmitted through a sample; and a control unit that controls the electron microscope main body. The control unit performs a phase plate image acquisition process of acquiring a phase plate image which is an image of the phase plate; an unevenness determination process of determining whether or not the phase plate has unevenness based on the phase plate image; and a moving mechanism control process of moving the phase plate by controlling the moving mechanism when the control unit has determined that the unevenness is present.

Abstract: A charged particle beam apparatus includes: an optical system that irradiates a sample mounted on a sample stage with a charged particle beam; at least one detector that detects a signal generated from the sample; an imaging device that acquires an observation image; a mechanism for changing observation positions in the sample which has at least one of a stage that moves the sample stage and a deflector that changes the charged particle beam's irradiation position; a display unit that displays an operation screen provided with an observation image displaying portion that displays the observation image and an observation position displaying portion that displays an observation position of the observation image; and a controller that controls display processing of the operation screen. The controller superimposes and displays on the observation position displaying portion a plurality of observation position images at different magnifications, based on the observation images' magnifications and coordinates.

Abstract: In one embodiment, a method of obtaining a dose correction amount, the method includes writing evaluation patterns by irradiating a substrate with a charged particle beam by multiple writing with different numbers of paths using a charged particle beam writing apparatus, measuring a size of each of the evaluation patterns, calculating a size variation rate per path from a size measurement result of the evaluation pattern corresponding to each of the numbers of paths, and calculating a dose variation rate per path based on the size variation rate per path and a dose latitude indicating a ratio of a pattern size variation amount to a dose variation of the charged particle beam.

Abstract: A multiple-electron-beam irradiation apparatus includes a first electrostatic lens, configured using the substrate used as a bias electrode by being applied with a negative potential, a control electrode to which a control potential is applied and a ground electrode to which a ground potential is applied, configured to provide dynamic focusing of the multiple electron beams onto the substrate, in accordance with change of the height position of the surface of the substrate, by generating an electrostatic field, wherein the control electrode is disposed on an upstream side of a maximum magnetic field of the lens magnetic field of the first electromagnetic lens with respect to a direction of a trajectory central axis of the multiple electron beams, and a ground electrode is disposed on an upstream side of the control electrode with respect to the direction of the trajectory central axis.

Abstract: In some embodiments, the semiconductor process apparatus comprises a conductive support comprising mesh, a conductive shaft comprising a conductive rod, and a plurality of connection elements. The plurality of connection elements are coupled to the mesh in parallel and are connected to the rod at a single junction. The plurality of connection elements help spread RF current, reducing localized heating in the substrate, resulting in a more uniform film deposition. Additionally, using connection elements that are merged and coupled to a single RF rod allow for the rod to be made of materials that can conduct RF current at lower temperatures.