Patents Issued in March 1, 2022
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Patent number: 11262619Abstract: A light-emitting unit includes a plurality of lenses; and two or more light-emitting devices covered by each of the lenses, and the two or more light-emitting devices covered by one lens of the lenses are electrically separated from each other.Type: GrantFiled: May 11, 2018Date of Patent: March 1, 2022Assignee: Saturn Licensing LLCInventor: Takaharu Shimizu
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Patent number: 11262620Abstract: Disclosed is a display apparatus and light source device which includes an optical dome having a specifically defined shape to be able to maintain an optical profile of a light source. A display apparatus includes a printed circuit board (PCB), a light emitting diode (LED) chip mounted on the PCB and emitting light, an optical dome formed to enclose the LED chip by being dispensed on the LED chip, a liquid crystal panel blocking or passing light output from the LED chip, and an optical film arranged between the LED chip and the liquid crystal panel, wherein a ratio of height of the optical dome to a diameter of a bottom surface of the optical dome may be 0.25 to 0.31.Type: GrantFiled: June 7, 2021Date of Patent: March 1, 2022Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Sungyeol Kim, Kyungsoo Park, Chunsoon Park, Kyehoon Lee
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Patent number: 11262621Abstract: The present application relates to an optical film layer and a display device. The optical film layer comprises: an isotropic optical layer, a plurality of grooves being formed on one side of the isotropic optical layer; a single optical axis anisotropic optical layer, comprising a plate-shaped part and a plurality of convex structures which match the shape and size of the grooves and which are attached to one side of the plate-shaped part, the ordinary light refractive index of the single optical axis anisotropic optical layer is greater than that of the isotropic optical layer; a first grating layer, stacked on the side of the single optical axis anisotropic optical layer away from the isotropic optical layer or embedded in the side of the single optical axis anisotropic optical layer away from the isotropic optical layer.Type: GrantFiled: February 19, 2019Date of Patent: March 1, 2022Assignee: HKC Corporation LimitedInventor: Jianfeng Shan
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Patent number: 11262622Abstract: A display panel includes: a first substrate; a second substrate; a first alignment film layer provided on the first substrate, wherein the first alignment film is sandwiched between the first substrate and the second substrate; a plurality of protruding regions formed about a perimeter edge portion of the first substrate, wherein the plurality of protruding regions include an associated trench region provided in a plurality thereof, wherein each trench region includes at least one trench, each trench being configured to retain a portion of the first alignment film layer or the second alignment film layer when sandwiched between the first substrate and the second substrate so as to limit shrinkage of the first alignment film layer or the second alignment film layer during operation of the display panel.Type: GrantFiled: December 23, 2019Date of Patent: March 1, 2022Assignee: BOE TECHNOLOGY GROUP CO., LTD.Inventor: Hui Li
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Patent number: 11262623Abstract: A sealant, a manufacturing method therefor, a liquid crystal display (LCD) panel and a display device are provided. The sealant includes a sealant matrix and luminescent particulates distributed in the sealant matrix. The luminescent particulates at least emit ultraviolet (UV) light under UV irradiation.Type: GrantFiled: January 17, 2018Date of Patent: March 1, 2022Assignees: BOE Technology Group Co., Ltd., Hefei BOE Optoelectronics Technology Co., Ltd.Inventor: Dongling Sun
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Patent number: 11262624Abstract: The displacement between a TFT substrate and a counter substrate and the cut of an alignment film caused by a columnar spacer are prevented. A liquid crystal display device includes: a TFT substrate including a scanning line extending in a first direction, a picture signal line extending in a second direction, a pixel electrode formed in a region surrounded by the scanning line and the picture signal line, and a common electrode formed as opposed to the pixel electrode through an insulating film; a counter substrate disposed as opposed to the TFT substrate and having a spacer; and a liquid crystal sandwiched between the substrates. A common metal interconnection is formed to cover the picture signal line or the scanning line, and stacked on the common electrode. A through hole is formed on the common metal interconnection. The tip end of the spacer is disposed inside the through hole.Type: GrantFiled: June 23, 2020Date of Patent: March 1, 2022Assignee: Japan Display Inc.Inventors: Masateru Morimoto, Saori Sugiyama, Motoharu Miyamoto
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Patent number: 11262625Abstract: A display device including: a first substrate including a first base substrate and a lower pad disposed on one end of the first base substrate on a side; a second substrate disposed above the first substrate and including a second base substrate and an upper pad disposed on an end of the second base substrate on the side; a side pad electrically connected to the lower pad and the upper pad; and a sealing member disposed between the first substrate and the second substrate. The sealing member includes an insulating resin and conductive balls dispersed in the insulating resin, and the upper pad and the lower pad are electrically connected to each other through the conductive balls.Type: GrantFiled: March 17, 2020Date of Patent: March 1, 2022Assignee: Samsung Display Co., Ltd.Inventor: Jae Hyun Park
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Patent number: 11262626Abstract: This disclosure provides connectors for smart windows. A smart window may incorporate an optically switchable pane. In one aspect, a window unit includes an insulated glass unit including an optically switchable pane. A wire assembly may be attached to the edge of the insulated glass unit and may include wires in electrical communication with electrodes of the optically switchable pane. A floating connector may be attached to a distal end of the wire assembly. The floating connector may include a flange and a nose, with two holes in the flange for affixing the floating connector to a first frame. The nose may include a terminal face that present two exposed contacts of opposite polarity. Pre-wired spacers improve fabrication efficiency and seal integrity of insulated glass units. Electrical connection systems include those embedded in the secondary seal of the insulated glass unit.Type: GrantFiled: May 26, 2020Date of Patent: March 1, 2022Assignee: View, Inc.Inventors: Dennis Mullins, Trevor Frank, Jason Satern, Travis D. Wilbur, Mark Sawyer
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Patent number: 11262627Abstract: The present disclosure provides a liquid crystal display panel and a display device. The liquid crystal display panel comprises a display region and a non-display region disposed around the display region, and the display region comprises a center region and edge regions located at four corners of the center region. Pixels in the liquid crystal display panel comprise a main-pixel region and a sub-pixel region, wherein the pixels comprise first pixels intersecting a boundary line between the edge regions and the non-display region, and at least two first pixels are symmetrical about a horizontal centerline. Brightness of an upper portion and a lower portion of the horizontal center line are same in the present disclosure.Type: GrantFiled: January 14, 2020Date of Patent: March 1, 2022Assignee: Shenzhen China Star Optoelectronics Semiconductor Display Technology Co., Ltd.Inventor: Yunglun Lin
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Patent number: 11262628Abstract: A liquid crystal display panel defines a display area and a non-display surrounding the display area. The panel includes a color filter substrate and a thin film transistor array substrate opposite to the color filter substrate. The color filter substrate includes a first substrate and a black matrix on the first substrate. The black matrix is in the display area and extending to the non-display area. A gap is defined in the black matrix and in the non-display area. The gap extends to be a circle around the display area and divides the black matrix into two independent parts. The color filter substrate includes a second substrate and a metal ring on a side of the second substrate facing the thin film transistor array substrate. The metal ring surrounds the display area and aligns with the gap.Type: GrantFiled: August 24, 2020Date of Patent: March 1, 2022Assignee: Century Technology (Shenzhen) Corporation LimitedInventors: Guo-Dong Xu, Hui Wang, Ning Fang, Chen-Fu Mai, Chih-Chung Liu, Meng-Chieh Tai
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Patent number: 11262629Abstract: An active matrix substrate includes a gate metal layer, a source metal layer, an interlayer insulating layer, a first transparent conductive layer and second transparent conductive layer formed on or above the interlayer insulating layer, and a lower metal layer formed below the gate metal layer. The lower metal layer includes a plurality of CS bus lines each extending in a column direction and not overlapping a plurality of source bus lines. Each of the plurality of pixels has a drain extension section extending from a drain electrode, a first transparent electrode, a second transparent electrode connected to the drain extension section, and an auxiliary capacitor electrode that includes the lower metal layer and/or the gate metal layer, is electrically connected to at least any one of the plurality of CS bus lines, and overlaps the drain extension section when viewed in a normal direction of the substrate.Type: GrantFiled: January 26, 2018Date of Patent: March 1, 2022Assignee: SHARP KABUSHIKI KAISHAInventor: Masahiro Yoshida
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Patent number: 11262630Abstract: A display panel includes an array substrate, an opposite substrate facing the array substrate, and a liquid crystal layer disposed between the array substrate and the opposite substrate. The array substrate includes a display area and a non-display area surrounding the display area, and the non-display area includes a first non-display area disposed adjacent to a side portion of the display area and a second non-display area other than the first non-display area. The first non-display area overlaps the opposite substrate. The array substrate and the opposite substrate have the same or substantially the same area and a wire member is disposed under the array substrate to be connected to an external circuit module. Accordingly, the display panel does not need an extra space for the wire member, and thus the non-display area is reduced.Type: GrantFiled: February 13, 2020Date of Patent: March 1, 2022Assignee: SAMSUNG DISPLAY CO., LTD.Inventors: Jin-Soo Jung, Young Gu Kim, Byoung-Hun Sung, Baekkyun Jeon
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Patent number: 11262631Abstract: The preset disclosure provides an array substrate and a method for manufacturing the same, a display panel and a display device. The array substrate includes: a base substrate; data lines and pixel electrodes located on the base substrate, and a light shielding structure located on a side of the data lines close to the base substrate, orthographic projections of the gaps on the base substrate are located within an orthographic projection of the light shielding structure on the base substrate, and the light shielding structure includes a metal layer and a first transparent layer located on a side of the metal layer away from the base substrate.Type: GrantFiled: March 20, 2020Date of Patent: March 1, 2022Assignees: BEIJING BOE DISPLAY TECHNOLOGY CO., LTD., BOE TECHNOLOGY GROUP CO., LTD.Inventors: Yihe Jia, Xiangqian Ding, Xiaoxiang Zhang, Hao Han, Lianjie Yang, Yongzhi Song, Yan Pang
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Patent number: 11262632Abstract: An active switch array substrate comprises: a first substrate; a first insulation layer disposed on the first substrate; a plurality of active switches disposed on the first insulation layer; a first planarization layer disposed on the first insulation layer and covering the active switches; a color filter layer disposed on the first planarization layer, the color filter layer including a plurality of first photoresist layers, second photoresist layers and third photoresist layers parallel to each other; a plurality of dummy bumps, wherein a material of the dummy bumps is the same as a material of the third photoresist layers, and the dummy bumps are disposed above the first photoresist layers and the third photoresist layers; and a pixel electrode layer disposed on the color filter layer and covering the dummy bumps.Type: GrantFiled: January 24, 2018Date of Patent: March 1, 2022Assignee: HKC CORPORATION LIMITEDInventor: Beizhou Huang
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Patent number: 11262633Abstract: Provided is a liquid-crystal display device. The liquid-crystal display device includes gate lines and data lines disposed on a substrate and overlapping with one another to define sub-pixels, two thin-film transistors disposed together in a circuit area of one of two sub-pixels next to each other in a horizontal direction among the sub-pixels; and common electrodes and pixel electrodes disposed alternately in each of the sub-pixels. The two thin-film transistors are connected to the two sub-pixels, respectively.Type: GrantFiled: December 12, 2018Date of Patent: March 1, 2022Assignee: LG Display Co., Ltd.Inventors: SeoungUk Heo, WooYeal Jun, JiSeon Yu, JiAe Yoon
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Patent number: 11262634Abstract: An object of the present invention is to provide a structure having a reflective layer that has satisfactory transparency and diffuse reflectivity and is also capable of reducing the occurrence of glare, and a method for forming the reflective layer. The object of the present invention is achieved by a structure including a substrate and a reflective layer formed by immobilizing a cholesteric liquid crystalline phase, in which, upon observing a cross section of the reflective layer by a scanning electron microscope, lines formed by bright portions and lines formed by dark portions derived from the cholesteric liquid crystalline phase have a wave-like structure or are inclined with respect to the surface of the substrate, and at least a part of the lines formed by the bright portions and the lines formed by the dark portions are discontinuous.Type: GrantFiled: February 11, 2020Date of Patent: March 1, 2022Assignee: FUJIFILM CorporationInventor: Shunya Katoh
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Patent number: 11262635Abstract: A magnet erased writing device or eWriter includes cholesteric liquid crystal material, in which a written image is erased using magnetically activated electronic circuitry. By eliminating the mechanical erase button of Prior Art eWriters, the eWriter can be designed with a display footprint that can cover nearly the entire face of the eWriter. An erasing magnet can be used with the device, which can be handheld as, for example, by being part of a stylus. With the erasing magnet separated from the device and the mechanical erase button being omitted, the eWriter avoids unintentional erasures, a drawback of Prior Art eWriters.Type: GrantFiled: February 5, 2021Date of Patent: March 1, 2022Assignee: Kent Displays, Inc.Inventors: Anthony Daniels, Todd Ernst, Nathan Hirt
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Patent number: 11262636Abstract: A transmittance-variable film having a double-cell structure or a single-cell structure capable of suppressing formation of bubbles inside a liquid crystal layer or at the interface between a base film and a pressure-sensitive adhesive layer under high-temperature and high-humidity reliability conditions is provided. An exemplary transmittance-variable film can be applied to various applications, including various construction or automotive materials that require control of transmittance, or eyewear, such as augmented reality experience or sports goggles, sunglasses or helmets.Type: GrantFiled: December 19, 2018Date of Patent: March 1, 2022Inventors: Jung Doo Kim, Hyun Jun Lee, Yeon Keun Lee, Joo Hyun Lee, Dong Hyun Oh
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Patent number: 11262637Abstract: A frequency diverse distributed Mach-Zehnder Interferometer may include an optical modulator on a chip, with the modulator comprising a plurality of diodes arranged along a waveguide and with each diode driven by two or more drivers. An optical signal may be received in the waveguide, and a first modulating electrical signal may be applied to a first of the plurality of diodes using a first driver and a second modulating electrical signal may be applied to the first of the plurality of diodes using a second driver. The first electrical signal may be different from the second modulating electrical signal. The second electrical signal may have a larger voltage swing than the first electrical signal. The first electrical signal voltage swing may be 0.85 volts and the second electrical signal voltage swing may be 1.5 volts, for example. The first and second electrical signals may have different frequencies.Type: GrantFiled: January 14, 2020Date of Patent: March 1, 2022Assignee: Luxtera LLCInventor: Brian Welch
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Patent number: 11262638Abstract: A liquid crystal (LC) mixture for a pitch variable optical element is provided. The LC mixture includes a host LC and one or more LC dimers dissolved as a guest in the host LC. The host LC and the one or more LC dimers have respective dielectric anisotropies of opposite signs in nematic phase. A net dielectric anisotropy of the LC mixture is substantially neutral.Type: GrantFiled: October 18, 2019Date of Patent: March 1, 2022Assignee: FACEBOOK TECHNOLOGIES, LLCInventors: Yingfei Jiang, Afsoon Jamali, Changwon Jang, Adrian Travis, Andrew Maimone, Lu Lu
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Patent number: 11262639Abstract: A linearly polarized upconverting optical signal at optical frequency ?OPT and a propagating input signal at frequency ?GHz are combined by an input beam combiner to copropagate through a nonlinear optical medium and generate upconverted optical signals at one or both sum or difference frequencies ?SUM=?OPT+?GHz or ?DIFF=?OPT??GHz. The orthogonally polarized upconverting and upconverted optical signals are separated by a polarizer, and the upconverted optical signal is preferentially transmitted to a detection system by an optical filter. The input signal is modulated to encode transmitted information, and that modulation is imparted onto the upconverted optical signal. The detection system includes one or more photodetectors, receives the upconverted optical signal, and generates therefrom electrical signals that are modulated to encode the transmitted information.Type: GrantFiled: April 2, 2021Date of Patent: March 1, 2022Assignee: Microtech Instruments, Inc.Inventor: Vladimir G. Kozlov
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Patent number: 11262640Abstract: A device comprising a nonlinear optical (NLO) material according to the formula XLi2Al4B6O20F. A device comprising a nonlinear optical material (NLO) according to the formula KSrCO3F, wherein the NLO comprises at least one single crystal. A nonlinear optical material selected from the group consisting of KSrCO3F Rb3Ba3Li2Al4B6O20F and K3Sr3Li2Al4B6O20F.Type: GrantFiled: March 9, 2018Date of Patent: March 1, 2022Assignee: UNIVERSITY OF HOUSTON SYSTEMInventors: P. Shiv Halasyamani, Hongwei Yu, Hongping Wu, Weiguo Zhang
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Patent number: 11262641Abstract: Described herein are apparatuses and methods for selectively controlling the application of a fluid to a sensor enclosure such as a camera housing to protect the housing from overheating. An apparatus that includes a protective shield and a conduit such as tubing for supplying a fluid is described. The protective shield is provided so as to protect an exterior surface of the camera housing from heat caused by sun exposure. The tubing includes an inlet for supplying a fluid such as water or air, can extend through or around an exterior of the camera housing, and includes an outlet with one or more nozzles for ejecting the fluid into a space between the protective shield and the camera housing. Sensor data is received from various vehicle sensors to assess the temperature of the housing, the velocity of the vehicle, and so forth to determine when the fluid should be supplied.Type: GrantFiled: December 13, 2019Date of Patent: March 1, 2022Assignee: Pony AI Inc.Inventor: Anatolii Vitanov
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Patent number: 11262642Abstract: A system includes a mounting plate to which a plurality of camera devices are mountable, and a stanchion coupled to the mounting plate to support the mounting plate. The mounting plate includes a first recess defined in a top surface of the mounting plate to mount a first camera having a first focal length, and a second recess defined in the top surface of the mounting plate to mount a second camera having a second focal length. The first recess and the second recess are defined in the top surface of the mounting plate such that the first camera and the second camera are simultaneously mountable.Type: GrantFiled: August 5, 2020Date of Patent: March 1, 2022Inventor: Harjanto Sumali
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Patent number: 11262643Abstract: A mount adapter couples a camera body and an interchangeable lens without rattling. The mount adapter includes a fixed cylinder and a movable cylinder that engages with the fixed cylinder and is movable in an optical axis direction with respect to the fixed cylinder. The fixed cylinder has a first mount surface that comes into contact with the camera body and a second mount surface that comes into contact with the interchangeable lens. The movable cylinder has first mount claw portions that engage with mount claw portions of the camera body and second mount claw portions that engage with mount claw portions of the interchangeable lens.Type: GrantFiled: April 21, 2020Date of Patent: March 1, 2022Assignee: CANON KABUSHIKI KAISHAInventors: Hiroshi Yano, Takahiko Kano, Futoshi Iinuma
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Patent number: 11262644Abstract: The disclosed structured light projector may include (1) a light source having a light-emitting side that emits light, (2) a solid optical spacer element having a first side securely coupled to the light-emitting side of the light source, and (3) a diffractive optical element (DOE) stack including one or more DOEs, where the DOE stack includes (a) a light-receiving side securely coupled to a second side of the solid optical spacer element opposite the first side, and (b) a light-emitting side opposite the light-receiving side that emits structured light in response to the light received from the light-emitting side of the light source via the solid optical spacer element. Various other devices and methods are also disclosed.Type: GrantFiled: May 10, 2019Date of Patent: March 1, 2022Assignee: Facebook Technologies, LLCInventors: Mark Sullivan, Jonatan Ginzburg
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Patent number: 11262645Abstract: A lens shift mechanism of one embodiment of the present disclosure includes: a projection lens; a cylindrical housing that holds the projection lens; and an operating unit that moves the cylindrical housing in one axial direction perpendicular to an optical axis of the projection lens. The operating unit includes a pair of a main shaft and a countershaft extending in the one axial direction and disposed to be opposed to each other across the cylindrical housing, and a pair of elastic bodies provided respectively for the main shaft and the countershaft. The pair of elastic bodies are parallel to the one axial direction, and have biasing directions opposite to each other.Type: GrantFiled: August 2, 2019Date of Patent: March 1, 2022Assignee: Sony CorporationInventors: Takeaki Hirasawa, Takahiro Nagai
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Patent number: 11262646Abstract: A system is provided. The system includes a translucent display positioned such that a first face is a display face and that a second face is a projection face and at least one projector configured to project an image on the second face of the translucent display. The image is displayed on the first face. The system also includes at least one sensor configured to transmit a signal when triggered and a projector controller in communication with the at least one projector and the at least one sensor. The projector controller is programmed to receive a signal from the at least one sensor and instruct the at least one projector to project at least one image on the translucent display in response to the signal from the at least one sensor.Type: GrantFiled: June 5, 2020Date of Patent: March 1, 2022Assignee: THE BOEING COMPANYInventor: Darren Carl McIntosh
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Patent number: 11262647Abstract: A substrate with a multilayer reflective film, a reflective mask blank, a reflective mask and a method of manufacturing a semiconductor device that can prevent contamination of the surface of the multilayer reflective film even in the case of having formed reference marks on the multilayer reflective film. A substrate with a multilayer reflective film contains a substrate and a multilayer reflective film that reflects EUV light formed on the substrate. Reference marks are formed to a concave shape on the surface of the substrate with the multilayer reflective film. The reference marks have grooves or protrusions roughly in the center. The shape of the grooves or protrusions when viewed from overhead is similar or roughly similar to the shape of the reference marks.Type: GrantFiled: October 16, 2018Date of Patent: March 1, 2022Assignee: HOYA CORPORATIONInventors: Kazuhiro Hamamoto, Tsutomu Shoki
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Patent number: 11262648Abstract: A pellicle for a photomask comprises a pellicle membrane. The pellicle membrane incudes a base layer having a first surface and a second surface facing the first surface, and a first recovery layer covering the first surface of the base layer. A content of SP2 covalent bonds between carbon atoms contained in the first recovery layer is less than or equal to a content of SP2 covalent bonds between carbon atoms contained in the base layer.Type: GrantFiled: July 28, 2020Date of Patent: March 1, 2022Assignee: Samsung Electronics Co., Ltd.Inventors: Mun Ja Kim, Changyoung Jeong
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Patent number: 11262649Abstract: An apparatus for storing a mask includes a main body comprising a first region and a second region, the first region having a plurality of mask containers, a gas supply pipe having an outer portion outside of the main body, a fan in the first region to propel the gas from the second region to the first region, a filter disposed at a front end and/or a rear end of the fan, a heat exchanger in the second region and configured to exchange heat with the flowing gas, a Peltier element at the outer portion of the gas supply pipe, a first sensor installed in the gas supply pipe upstream of the Peltier element, a second sensor installed in the second region in a lower position to the heat exchanger, and a controller connected to the first and second sensors and the Peltier element.Type: GrantFiled: June 15, 2020Date of Patent: March 1, 2022Assignee: Samsung Electronics Co., Ltd.Inventors: Ginam Park, Sangmin Kim, Jongsam Kim, Hongjin Kim, Chuljun Park, Yongjun Ahn, Sangkyung Lee, Junyong Lee, Taijo Jeon, Kyubum Cho
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Patent number: 11262650Abstract: Embodiments relate to a method of fabricating a nano-sized structure in a resin element by nanoimprint lithography (NIL). The method reduces adhesive failure during NIL demolding by inhibiting polymerization at the interface between the resin element and the template. The method includes depositing a layer of polymerization inhibiting compound onto a surface of the template. The layer of polymerization inhibiting compound has a thickness no more than 10 nanometers. A surface of the template has a nano-sized pattern that mirrors that nano-sized structure. The method further includes pressing the template onto the resin element (or the resin element onto the template) to form the nano-sized structure in the resin element. The process also includes curing the resin element after forming the nano-sized structure and removing the template from the resin element after curing the resin element. The polymerization inhibiting compound prevents adhesive failure during the removing.Type: GrantFiled: December 11, 2018Date of Patent: March 1, 2022Assignee: Facebook Technologies, LLCInventors: Austin Lane, Tingling Rao
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Patent number: 11262651Abstract: A method of inspecting a dispenser including a faceplate comprises translating a sensor across the faceplate while measuring a distance between the sensor and the faceplate. The sensor is oriented such that a longitudinal axis of the sensor extends at an acute angle relative to a longitudinal axis of the faceplate. The method may include translating another sensor across the faceplate while measuring the same distance. Or the method may include another translating of the sensor across the faceplate while measuring the same distance. In either case, the sensor is oriented such that the longitudinal axis of the sensor extends at an obtuse angle relative to the longitudinal axis of the faceplate. The method includes determining, based on the measured distances, whether an amount of accumulated formable material on the surface of the faceplate is greater than a predetermined value.Type: GrantFiled: May 28, 2020Date of Patent: March 1, 2022Assignee: Canon Kabushiki KaishaInventors: Craig William Cone, Steven C. Shackleton, Brent Andrew Snyder, James W. Irving, Brandyn L. Kinsey
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Patent number: 11262652Abstract: A nanofabrication method comprises receiving information regarding a distortion within an imprint system, generating a first drop pattern that is not based on the received information, generating a second drop pattern and a third drop pattern, each based on the received information, modifying the first drop pattern to generate a fourth drop pattern. The modifying includes adding a first plurality of drop positions to the first drop pattern or removing a second plurality of drop positions from the first drop pattern, thereby forming an intermediate drop pattern, and either removing the second plurality of drop positions from the intermediate drop pattern or adding the first plurality of drops to the intermediate pattern. The first plurality of drop positions corresponds to drop positions defined by the second drop pattern and the second plurality of drop positions corresponds to drop positions defined by the third drop pattern.Type: GrantFiled: June 25, 2020Date of Patent: March 1, 2022Assignee: Canon Kabushiki KaishaInventors: Anshuman Cherala, Ahmed M. Hussein
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Patent number: 11262653Abstract: A polymer comprising recurring units derived from a sulfonium salt of specific structure having a polymerizable group is coated to form a resist film which is amenable to precise micropatterning because of improved LWR, CDU and resolution.Type: GrantFiled: July 23, 2018Date of Patent: March 1, 2022Assignee: SHIN-ETSU CHEMICAL CO., LTD.Inventors: Masaki Ohashi, Jun Hatakeyama, Teppei Adachi
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Patent number: 11262654Abstract: Chain scission resist compositions suitable for EUV lithography applications may include monomer functional groups that improve the kinetics and/or thermodynamics of the scission mechanism. Chain scission resists may include monomer functional groups that reduce the risk that leaving groups generated through the scission mechanism may chemically corrode processing equipment.Type: GrantFiled: December 27, 2019Date of Patent: March 1, 2022Assignee: Intel CorporationInventors: Lauren Doyle, Marie Krysak, Patrick Theofanis, James Blackwell, Eungnak Han
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Patent number: 11262655Abstract: A photosensitive resin composition comprising (A) a silphenylene and polyether structure—containing polymer and (B) a photoacid generator is coated onto a substrate to form a photosensitive resin coating which has improved substrate adhesion, a pattern forming ability, crack resistance, and reliability as protective film.Type: GrantFiled: May 14, 2019Date of Patent: March 1, 2022Assignee: SHIN-ETSU CHEMICAL CO., LTD.Inventors: Hitoshi Maruyama, Hideto Kato, Michihiro Sugo
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Patent number: 11262656Abstract: Organic coating compositions, particularly antireflective coating compositions for use with an overcoated photoresist, are provided that comprise that a blend of two or more resins, where one resin has epoxy groups either pendant or fused to the polymer backbone. Preferred coating compositions include: 1) a first resin that comprises one or more epoxy reactive groups; and 2) a crosslinker resin that is distinct from the first resin and comprises epoxy groups.Type: GrantFiled: March 31, 2016Date of Patent: March 1, 2022Assignee: Rohm and Haas Electronic Materials Korea Ltd.Inventors: Jae Hwan Sim, Hye-Won Lee, Eunhye Cho, Jung Kyu Jo, Jin Hong Park, Eui Hyun Ryu, Jae-Bong Lim
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Patent number: 11262657Abstract: Described herein are technologies to facilitate device fabrication, especially those that involve spin coatings of a substrate. More particularly, technologies described herein facilitate the planarization (i.e., flatness) of spin coatings during the device fabrication to form a uniformly planar film or layer on the substrate. This abstract itself is not intended to limit the scope of this patent. The scope of the present invention is pointed out in the appending claims.Type: GrantFiled: July 15, 2019Date of Patent: March 1, 2022Assignee: Tokyo Electron LimitedInventors: Michael Carcasi, Ryan Burns, Mark Somervell
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Patent number: 11262658Abstract: A photomask includes a transparent substrate and a shielding pattern disposed on the transparent substrate. The shielding pattern includes shielding island structures. The shielding island structures are separated from and spaced apart from one another by dividing lanes. The dividing lanes expose the underlying transparent substrate. The photomask is configured for a light of a wavelength, and the dividing lanes reduce or hinder a transmission of the light of the wavelength.Type: GrantFiled: April 28, 2020Date of Patent: March 1, 2022Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Che-Yuan Chang, Chih-Chiang Tu, Ming-Ho Tsai, Ching-Hung Lai
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Patent number: 11262659Abstract: A method of cleaning an extreme ultraviolet lithography collector includes applying a cleaning composition to a surface of the extreme ultraviolet lithography collector having debris on the surface of the collector in an extreme ultraviolet radiation source chamber. The cleaning composition includes: a major solvent having Hansen solubility parameters of 25>?d>15, 25>?p>10, and 30>?h>6; and an acid having an acid dissociation constant, pKa, of ?15<pKa<4. The debris is removed from the surface of the collector and the cleaning composition is removed from the extreme ultraviolet radiation source chamber.Type: GrantFiled: August 21, 2019Date of Patent: March 1, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: An-Ren Zi, Chin-Hsiang Lin, Ching-Yu Chang
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Patent number: 11262660Abstract: An image sensor for a position sensor apparatus for ascertaining a position of at least one mirror of a lithography apparatus includes: a plurality of integrated optical waveguides; a plurality of incoupling areas; a multiplexer apparatus; and an image reconstruction apparatus.Type: GrantFiled: August 7, 2020Date of Patent: March 1, 2022Assignee: Carl Zeiss SMT GmbHInventors: Jan Horn, Ulrich Bihr, Andy Zott, Markus Deguenther
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Patent number: 11262661Abstract: A metrology tool for determining a parameter of interest of a structure fabricated on a substrate, the metrology tool comprising: an illumination optical system for illuminating the structure with illumination radiation under a non-zero angle of incidence; a detection optical system comprising a detection optical sensor and at least one lens for capturing a portion of illumination radiation scattered by the structure and transmitting the captured radiation towards the detection optical sensor, wherein the illumination optical system and the detection optical system do not share an optical element.Type: GrantFiled: June 5, 2019Date of Patent: March 1, 2022Assignee: ASML Netherlands B.V.Inventors: Nitesh Pandey, Arie Jeffrey Den Boef, Duygu Akbulut, Marinus Johannes Maria Van Dam, Hans Butler, Hugo Augustinus Joseph Cramer, Engelbertus Antonius Fransiscus Van Der Pasch, Ferry Zijp, Jeroen Arnoldus Leonardus Johannes Raaymakers, Marinus Petrus Reijnders
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Patent number: 11262662Abstract: Implementations described herein relate to a platform apparatus for post exposure processing. In one implementation, a platform apparatus includes a plumbing module and a process module. The process module further includes a central region having a robot disposed therein, and a plurality of process stations disposed about the central region and sharing the plumbing module. Each process station includes a process chamber and a post process chamber in a stacked arrangement. The process chamber includes a chamber body defining a process volume, a door coupled to the chamber body, a first electrode coupled to the door, and a power source communicatively coupled to the first electrode.Type: GrantFiled: October 2, 2020Date of Patent: March 1, 2022Assignee: Applied Materials, Inc.Inventors: Viachslav Babayan, Ludovic Godet, Kyle M. Hanson, Robert B. Moore
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Patent number: 11262663Abstract: The present invention provides a tubular linear actuator, comprising: a tubular coil assembly comprising multiple tubular coils arranged next to each other in longitudinal direction of the tubular linear actuator and concentric with respect to a longitudinal axis of the tubular linear actuator, and a magnet assembly comprising a series of permanent magnets with alternating polarization direction extending in the longitudinal direction, wherein the magnet assembly is at least partially arranged in the coil assembly and movably with respect to the coil assembly, wherein the tubular coils comprise edge windings.Type: GrantFiled: March 21, 2019Date of Patent: March 1, 2022Assignee: ASML Netherlands B.V.Inventors: Peter Michel Silvester Maria Heijmans, Olof Martinus Josephus Fischer, Maarten Hartger Kimman, Edwin Van Horne, Antonie Hendrik Verweij
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Patent number: 11262664Abstract: A system for mitigating damage to optical elements caused by vacuum ultraviolet (VUV) light exposure is disclosed. The system includes a light source configured to generate VUV and a chamber containing one or more gaseous fluorine-based compounds of a selected partial pressure. The system includes one or more optical elements. The one or more optical elements are located within the chamber and are exposed to the one or more gaseous fluorine-based compounds. The VUV light generated by the light source is of sufficient energy to dissociate the fluorine-based compound within the chamber into a primary product.Type: GrantFiled: November 16, 2020Date of Patent: March 1, 2022Assignee: KLA CorporationInventors: Matthew Derstine, John Savee, Evgeniia Butaeva, Serguei Likhanski, Gildardo Delgado
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Patent number: 11262665Abstract: An apparatus (100) for receiving input radiation (108) and broadening a frequency range of the input radiation so as to provide broadband output radiation (110). The apparatus comprises a fiber (102), wherein the fiber (102) may comprise a hollow core (104) for guiding radiation propagating through the fiber (102). The apparatus (100) further comprises an apparatus for providing a gas mixture (106) within the hollow core (104). The gas mixture (106) comprises a hydrogen component, and a working component, wherein the working component is for broadening a frequency range of a received input radiation (108) so as to provide the broadband output radiation (110). The apparatus may be included in a radiation source.Type: GrantFiled: March 24, 2020Date of Patent: March 1, 2022Assignee: ASML Netherlands B.V.Inventors: Patrick Sebastian Uebel, Sebastian Thomas Bauerschmidt, Paul William Scholtes-Van Eijk
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Patent number: 11262666Abstract: Provided is a positive-charging toner having a toner particle that contains a binder resin, the binder resin contains a polymer A having a first monomer unit derived from a first polymerizable monomer, and a second monomer unit derived from a second polymerizable monomer, the first polymerizable monomer is at least one selected from the group consisting of (meth)acrylic acid esters having a C18 to C36 alkyl group, the content of the first monomer unit in the polymer A is 5.0 to 60.0 mol % and the content of the second monomer unit is 20.0 to 95.0 mol %, SP11 of the first monomer unit and SP21 of the second monomer unit satisfy 3.00?(SP21?SP11)?25.00, and the work function of the toner is 5.0 to 5.4 V.Type: GrantFiled: June 24, 2020Date of Patent: March 1, 2022Assignee: CANON KABUSHIKI KAISHAInventors: Daisuke Yoshiba, Tomoya Nagaoka, Takashi Matsui
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Patent number: 11262667Abstract: A magnetic toner includes toner particles. The toner particles each include a toner mother particle and an external additive attached to a surface of the toner mother particle. The toner mother particles contain a binder resin and a magnetic powder. The external additive includes resin particles as external additive particles. The resin particles have a blocking rate of no greater than 40% by mass. The resin particles have a number average primary particle diameter of at least 40 nm and no greater than 120 nm. A resin constituting the resin particles is a vinyl resin including repeating units represented by general formulas (1) and (2), and a repeating unit derived from a sulfo group-containing vinyl compound. The content of the repeating unit derived from the sulfo group-containing vinyl compound in the vinyl resin is at least 0.1 mol % and no greater than 3.Type: GrantFiled: August 4, 2020Date of Patent: March 1, 2022Assignee: KYOCERA Document Solutions Inc.Inventors: Toru Takatsuna, Sho Sumioka
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Patent number: 11262668Abstract: An image forming apparatus includes a controller. The controller is configured to switch between (i) first speed printing in which a rotation speed of the polygon mirror is a first speed and the power of a laser beam from a first and second laser light sources is a first laser power, and (ii) second speed printing in which the speed of the mirror is slower than the first speed and the power of laser beam from the light sources is a second power weaker than the first power. The controller is configured to control an output timing of the laser beam from the light sources in the second speed printing based on the timings at which the laser beam is detected by first photodetector and second photodetectors when the laser powers of the first laser light source and the second laser light source are changed, respectively.Type: GrantFiled: March 23, 2021Date of Patent: March 1, 2022Assignee: TOSHIBA TEC KABUSHIKI KAISHAInventor: Yoshihisa Masuda