Abstract: A substrate processing system includes a front-end module, a first processing line including a first polishing line and a first cleaning line, a second processing line including a second polishing line and a second cleaning line and disposed in parallel to the first processing line, a first stage disposed between the first cleaning line and the second cleaning line, a first retransfer robot configured to transfer a substrate from the front-end module to the first stage, a second stage disposed between the first polishing line and the second polishing line, and a second retransfer robot configured to transfer the substrate between at least two locations of the first cleaning line, the second cleaning line, the first stage, and the second stage.

Abstract: The disclosure relates to methods for compensating for crystal structures differential material removal rates in sub-aperture figuring. A computing machine receives an input related to a substrate crystal structure. The computing machine generates, based on the input, a surface map data capturing the substrate crystal structure. The computing machine generates, based on the surface map data structure, a figuring route data structure for a figuring tool to figure an optical surface on the crystal substrate. The computing machine controls, using the processing circuitry and based on the figuring route data structure, the figuring tool to figure the substrate crystal optical surface.

Abstract: The present invention relates to a polishing pad conditioner and a manufacturing method thereof. The polishing pad conditioner includes a substrate, an abrasive layer and a protective layer. The abrasive layer covers the surface of the substrate. The abrasive layer includes a bonding layer and a plurality of abrasive particles embedded in the bonding layer. Each of the abrasive particles has a protrusion exposed out of the bonding layer, and the protrusion is insulated. The protective layer covers the surface of the bonding layer, and the protrusion is exposed out of the protective layer. The polishing pad conditioner of the present invention can protect the bonding layer from being damaged by abrasion and hold the abrasive particles, avoid the abrasive particles from falling off or out of position, and maintain the polishing effect and service life of the polishing pad conditioner.

Abstract: A polishing agent regenerating method in which a component of a polished material is removed from polishing agent slurry and a polishing agent is collected and regenerated is shown. The method includes at least, polishing, polishing agent slurry supplying, polishing agent slurry collecting, and sedimenting/separating/concentrating, performed in the above order. In the polishing agent slurry collecting or the sedimenting/separating/concentrating, a K2O density in the polishing agent slurry after dilution by water is performed is to be within a range of 0.002-0.2 mass %.

Abstract: A bonded abrasive wheel is disclosed comprising a plurality of abrasive particles disposed in a binder, a first grinding surface, a second surface opposing the first grinding surface, and an outer circumference. The wheel comprises a rotational axis extending through a central hub and a circuit configured as a Radio Frequency Identification (RFID) unit coupled to the abrasive wheel. The circuit comprises an antenna configured to communicate with one or more external devices and comprising a first end and a second end, wherein antenna has a radius of curvature about an axis along at least a portion thereof such that the first end is disposed adjacent to but is spaced from the second end, and an integrated circuit (IC) operably coupled to the antenna and configured to store at least a first data.

Abstract: The process allows a person to manipulate and work with a piece of elastic without the aid of a second person to hold said elastic. The process temporarily attaches a piece of elastic to a holder constructed from common crafting materials in a way that allows said elastic to be manipulated including firm pulls and tugs and, when work is completed, allows said elastic to be detached from said temporary holder easily and cleanly.

Abstract: A grasping tool has a pair of elongate arms attached via a hinge element. The elongate arms provide gripping surfaces for grasping an item therebetween. A finger engagement element extends from each of the elongate arms, spaced a distance from the proximal end. Each elongate arm is generally disposed on a first axis, and each finger engagement element is disposed around a second axis, such that the second axis is approximately parallel to and located below the first axis, such that the first and second axes are spaced a distance such that the pair of elongate arms are positioned above the fingers of the user when the user's fingers are positioned through the finger engagement elements.

Abstract: A support system for hanging of a cabinet door is provided having support arm and a main body with a top member and a front member. The upper end of the front member is operably connected to the forward end of the top member. The front member has lock features located at a plurality of positions between the upper end and the lower end on a front surface. The support arm has an elongated shape extending between a connection end and a support end. The support arm has lock features configured to engage and lock with lock features of the front member. The support end of the support arm having a platform configured to support the cabinet door during installation onto a cabinet. The support arm is movable between the plurality of positions to facilitate adjustment of a height at which the cabinet door is supported.

Abstract: Illustrated views of an exemplary combination swivel wrench for easy access to tight spaces is presented. The combination swivel wrench is useful for accessing hex fasteners in hard to get to areas such as tight areas. Further, the combination swivel wrench is useful for providing both a swivel and a ratchet on a common combination wrench.

Abstract: A pipe wrench includes a head having a first aperture defining a central axis. The pipe wrench includes a first jaw coupled to the head having a plurality of teeth defining a first contact region, and a second jaw partially extending through the aperture of the head having a threaded portion and a plurality of teeth defining a second contact region. The second contact region extends beyond the first contact region in a direction parallel to side surfaces of the head. The pipe wrench includes a biasing mechanism located within the first aperture to align the threaded portion of the second jaw with the central axis of the first aperture, and an actuator having threads engaged with the threaded portion of the second jaw such that rotation of the actuator moves the second contact region of the second jaw relative to the first contact region of the first jaw.

Abstract: An apparatus and method for detecting structural and material defects in a fastener driven during a manufacturing process includes a driving tool capable of recording an angle-torque trace during the driving of the fastener and a machine learning engine operably connected to the driving tool for analyzing the recorded angle-torque trace. The machine learning engine can be provided with a number of sample angle-torque traces from sample fasteners and can self-determine a stored trace including tolerances for acceptable angle-torque trace data from the samples in an unsupervised learning process or protocol without the need for defined anomalous and non-anomalous samples being provided to the machine learning engine.

Abstract: An impact wrench (1) includes: a brushless motor (11); a hammer (17) disposed frontward of, and driven by, the brushless motor; and a hammer case (16), which houses the hammer. An anvil (4) of the impact wrench includes: an arm portion (25) disposed frontward of the hammer and configured to be impacted (struck) in a rotational direction by the hammer; a cylindrical portion (30) connected to the arm portion and supported by the hammer case; a square-column portion (31) disposed frontward of the cylindrical portion; and an enlarged portion (35) disposed between the cylindrical portion and the square-column portion and enlarging in a direction extending rearward from the square-column portion. A recessed portion (37) is continuous in a circumferential direction of the cylindrical portion and is disposed between the cylindrical portion and the enlarged portion of the anvil.

Abstract: An electric power tool includes: a driving shaft that is rotated by a motor; an output shaft on which a front-end tool is attachable; and a torque transmission mechanism that transmits a torque produced by the rotation of the driving shaft to the output shaft. The torque transmission mechanism includes a magnet coupling including a driving magnet member coupled to a side of the driving shaft and a driven magnet member coupled to a side of the output shaft, and the driving magnet member and the driven magnet member are provided such that respective magnetic surfaces face each other, S-poles and N-poles being alternately arranged on each of the magnetic surfaces.

Abstract: A socket extender with a bit locking mechanism is described herein. The socket extender includes a proximal end, a shaft, and a distal end; the shaft extends from the proximal end to the distal end. The proximal end includes a proximal side wall that defines a female square shaped drive socket. The distal end includes a distal sidewall that defines a female hexagon shaped head. The distal end further includes a set screw, where the set screw passes through an opening in the distal sidewall. A point of the set screw is engageable with a bit inserted into the female hexagon shaped head such that the bit is retained in the female hexagon shaped head. Further, at least a portion of the socket extender can be magnetized for bit retention. Moreover, a drive square (of a driving tool) is receivable in the female square shaped drive socket.

Abstract: Fastener installation systems, devices and methods for driving fasteners, including fasteners, into a surface are disclosed. The fastener installation systems include an adapter operable to engage a chuck on a power tool on a first end and a fastener delivery attachment on an opposing end.

Abstract: A power tool may include an end effector configured to enable a fastener to be applied by the power tool via a fastening cycle, a power unit, a drive assembly configured to apply drive power to the end effector responsive to application of input power thereto, and a motor configured to supply the input power to the drive assembly selectively based on operation of a power control assembly that controls coupling of the motor to the power unit. The drive assembly includes a clutch configured to interrupt application of the drive power at a target torque. The power control assembly may be configured to adaptively change speed of the motor in response to the power tool reaching a predefined torque value that is less than the target torque during the fastening cycle.

Abstract: A rotary impact tool including a motor having a motor shaft that produces a rotational output to drive a gear assembly and a drive assembly driven by the gear assembly. The drive assembly including a hammer coupled to the motor shaft and an anvil configured to receive an impact from the hammer. The rotary impact tool includes a torque stick coupled to the anvil and configured to limit the amount of deliverable torque to a workpiece in accordance with a torsional stiffness of the torque stick, a position sensor to detect angular displacement of the anvil, and a controller in electrical communication with the position sensor. The controller calculates torque delivered to the workpiece from the impact by multiplying the torsional stiffness of the torque stick and the signal from the position sensor, and control the motor based on the torque delivered to the workpiece.

Abstract: A stapler includes a handle unit connected to a driver unit by a transmission shaft portion provided between a fulcrum shaft portion and a driver, and configured to move the driver unit; a camshaft provided to a clincher unit; a cam groove portion provided to the handle unit, configured to permit the camshaft to enter, and having one open end portion to enable to the camshaft to be inserted/pulled out; a guide convex portion provided to the clincher unit, and a guide concave portion provided to the handle unit and configured to restrict a movement path of the handle unit with respect to the clincher unit.

Abstract: A linear electric machine includes a mover and a stator. The mover includes permanent magnets, and the stator includes a ferromagnetic core-structure and windings for conducting electric currents. The linear electric machine includes support structures on both sides of the ferromagnetic core-structure and supporting the mover to be linearly movable with respect to the stator in the longitudinal direction of the linear electric machine. At least one of the support structures includes a support element arranged to keep the mover a distance away from solid metal constituting a frame-portion of the support structure. The support element includes material whose electrical conductivity is less than that of the solid metal. As the mover is kept the distance away from the solid metal, eddy currents induced by the moving permanent magnets to the solid metal are reduced.

Abstract: A working head for a hydraulic power tool including a head frame and a first moveable die head configured to move along the working head frame. The first moveable die head configured to receive a first moveable die comprising a first body length. A second die head is adapted to receive a second die comprising a second body length. The first body length of the moveable die is different from the second body length of the stationary die.

Abstract: A hand-held power tool includes a drive unit actuatable via at least one manual switch, a control unit at least for controlling the drive unit, the control unit having a control-unit housing. The power tool further includes at least one user interface having at least one operating element, and a housing that at least partially accommodates the control unit and the user interface. The hand-held power tool also includes a positioning device, the user interface being supported on the control-unit housing by use of the positioning device.

Abstract: A tool handle coupling assembly is provided with a coupler with an opposed pair of receptacles. A pair of bushings are each sized to receive a portion of a handle therein and are each sized to be installed into one of the pair of receptacles.

Abstract: A robot may include a robot frame having a bottom plate, and a rear caster and a wheel module disposed on the bottom plate, wherein the wheel module may include a link base mounted in the bottom plate to be spaced apart from the rear caster, a rotation damper mounted in the link base and having an elastic member accommodated therein, a front link connected to the rotation damper through a connecting shaft, a front caster mounted in a front portion of the front link, a drive motor mounted in a rear portion of the front link, and a drive wheel configured to be rotated by the drive motor.

Abstract: A method of operating a robot includes providing position information about a destination; receiving a request for an escort service to the destination in response to the position information; determining whether the escort service is available based on information related to the destination, the information related to the destination including at least one of state information of the destination or time information related to the destination; causing the robot to move and provide guiding to the destination in response to the request when the escort service is available; and notifying that the escort service is not available when the escort service is not available.

Abstract: A hermetically sealed multi-axis articulated arm apparatus for use within a sealable isolator chamber comprises a rotational shaft that passes through an opening in the chamber, a sealing member disposed within the chamber for sealing the shaft to an inner surface of the chamber, a plurality of interconnected hermetically sealed arm segments, operably attached to the linear motion shaft; an end effector operably attached to a terminal arm segment among the plurality of arm segments, and at least one fully enclosed drive system for driving and controlling the shaft and the plurality of arm segments. The linear motion shaft may have a sealing member in the form of a bellows. The materials for the parts of the apparatus exposed to the atmosphere of the chamber are compatible with an aseptic and cleanable environment and the surfaces of the arm segments are shaped to avoid pooling of contaminants.

Abstract: An embodiment joint structure for a robot includes an upper plate provided in an upper region, a link part coupled to a lower surface of the upper plate, wherein the link part includes a first link and a second link, and wherein the first link and the second link are provided close to one side of the upper plate with respect to a center of the lower surface of the upper plate, a support part coupled to the lower surface of the upper plate and configured to support the upper plate, wherein the support part is provided to be closer to the center of the lower surface of the upper plate than is the link part, and a motor part configured to provide power to the support part and the link part.

Abstract: Autonomous mobile robots may communicate with each other to avoid hazards, mitigate collisions, and facilitate the operation that they are intended for. To enhance such cooperation, it would be highly advantageous if each robot were able to determine which robot, among a plurality of other proximate robots, corresponds to each communication message. The specific identity of each robot is generally unknown to the other robots if a plurality of robots are in range. Systems and methods provided herein can enable robots and other equipped devices to determine the spatial location of each other robot in proximity, by detecting a pulsed localization signal emitted by each of the other robots. In addition, each robot can transmit a self-identifying code, synchronous with the emitted localization signal, so that other robots can associate the proper code with each robot. After such localization and identification, the robots can then cooperate more effectively in mitigating potential collisions.

Abstract: Disclosed herein are a vacuum robot, vacuum robot linkages that may enclose driving assemblies in a sealed environment configured to isolate at least a portion of the driving assemblies from the outside environment, and methods of operation thereof. Drive assemblies that may be enclosed in the sealed environment of the vacuum robot linkage may be infinite rotation driving assemblies that enable a robot link member to have a rotation of at least 360 degrees about an axis. The vacuum robot linkage environment may be sealed through a magnetic liquid rotary seal and/or through a fixed vacuum seal.

Abstract: A substrate transport apparatus including a frame, at least one arm link rotatably connected to the frame and a shaftless drive section. The shaftless drive section including stacked drive motors for rotating the at least one arm link relative to the frame through a shaftless interface, each of the stacked drive motors including a stator having stator coils disposed on a fixed post fixed relative to the frame and a rotor substantially peripherally surrounding the stator such that the rotor is connected to a respective one of the at least one arm link for rotating the one of the at least one arm link relative to the frame causing an extension or retraction of the one of the at least one arm link, where the stacked drive motors are disposed in the at least one arm link so that part of each stator is within a common arm link.

Abstract: Methods for controlling a robot system. In the method, a robot program for controlling a motion path of the robot system is imported, the motion path is used for processing a first workpiece into a second workpiece, and the robot program includes a variable for representing a parameter for controlling a feature of the motion path. A user of the robot system is provided with an interface for controlling the robot system. The robot program is updated based on an input from the user for adjusting the parameter. Further, embodiments of present disclosure provide corresponding apparatuses, systems and media for controlling a robot system, and methods, apparatuses, systems, and media for generating a robot program. With these embodiments, the robot program may be adjusted at an online side without a need to return to an offline programming tool for updating the robot program.

Abstract: Systems and techniques for reliable real-time deployment of robot safety updates are described herein. Condition data may be collected for an environment in which a robot is operating. The robot may be classified with a condition type. Condition type data selected from the condition data may be analyzed based on the condition type to calculate a safety risk level for the robot. A microservice may be identified to provide a robot safety rule for the robot based on the safety risk level. The microservice may be identified using a safety prediction model generated from the condition type data.

Abstract: Implementations are provided for operably coupling multiple robot controllers to a single virtual environment, e.g., to generate training examples for training machine learning model(s). In various implementations, a virtual environment may be simulated that includes an interactive object and a plurality of robot avatars that are controlled independently and contemporaneously by a corresponding plurality of robot controllers that are external from the virtual environment. Sensor data generated from a perspective of each robot avatar of the plurality of robot avatars may be provided to a corresponding robot controller. Joint commands that cause actuation of one or more joints of each robot avatar may be received from the corresponding robot controller. Joint(s) of each robot avatar may be actuated pursuant to corresponding joint commands. The actuating may cause two or more of the robot avatars to act upon the interactive object in the virtual environment.

Abstract: Techniques are disclosed for controlling robots based on generated robot simulations. A robot simulation application is configured to receive a robot definition specifying the geometry of a robot, a list of points defining a toolpath that a head of the robot follows during an operation, and a number of simulations of the robot performing the operation. The simulation application then performs the number of simulations, displays results of those simulations, and generates code for controlling a physical robot based on a user selection of one of those simulations. During each simulation, if a robotic problem, such as an axis limit or a singularity problem, is encountered, then the simulation application attempts to resolve the problem by rotating the robot head in both directions about a tool axis and determining a smallest angle of rotation in either direction that resolves the robotic problem, if any.

Abstract: A material picker assembly is disclosed, including: a connector configured to be attached to an actuator device; and a plurality of picker mechanisms, wherein each picker mechanism includes a suspension element that is configured to absorb impact on the picker mechanism by one or more objects.

Abstract: A method for carrying out a predetermined task using a robot, which is redundant with regard to the task. When the task is carried out, an admittance motion that is dependent on a force exerted externally on the robot and on a predetermined virtual mass, stiffness and/or damping is carried out in the zero space.

Abstract: A vibration reduction system includes a base, a carrier element, and a plurality of actuator systems extending between the base and the carrier element, the plurality of actuator systems arranged to apply forces to the carrier element in multiple axes to reduce vibration of the carrier element, each actuator system of the plurality of actuator systems including a pneumatic actuator and an electric actuator.

Abstract: Disclosed are a mobile robot, a control method therefor, and a terminal. The mobile robot according to the present disclosure comprises: a driving unit for moving a main body; a communication unit for communicating with a plurality of location information transmitters installed within an area and transmitting signals; and a control unit for calculating positioning-related information from at least one of a first signal transmitted between the location information transmitters and a second signal transmitted between the main body and the location information transmitters, detecting an entry of a moving body into the area in response to the amount of a change in the calculated positioning-related information being outside of a reference range, and performing an operation corresponding to the detection.

Abstract: Systems and techniques for controlling a mobile robot. In an example, the system may include a processor and memory, including instructions, which when executed by the processor, cause the processor to determine a state of the mobile robot. The state of the mobile robot may be determined using at least one of: data provided by the mobile robot or data captured by one or more sensors proximate to or attached to the mobile robot. The system may determine a state of an object proximate to the mobile robot using the data captured by the one or more sensors, and identify information relating to one or more available stopping points. The system may identify a condition of the mobile robot that requires the mobile robot to stop and issue a command to the mobile robot to navigate to a particular one of the one or more available stopping points.

Abstract: A robot safety system and method for an auto mode are used to set a stop state process which the robot operating the auto mode enters into a waiting state. A remind mechanism reminds an activation mechanism to start setting the robot to a safe state. The safety state is aborted by a hand-guiding enable device, and the robot may be hand guided to ensure the collaborative safety at the auto mode.

Abstract: A handling appliance, in particular a robot, includes at least one handling device that is movable in at least one direction of movement, a collision protection device configured for limiting contact forces due to collisions of the handling device with objects, and an acquisition device. The collision protection device includes a kinematic system that mechanically enables a relative movement of the handling device relative to the carrier of the handling device and that can be inhibited by at least one actuator device. The acquisition device determines forces acting on the actuator device and/or the handling device and on components of the collision protection device decoupled by the actuator device, and the collision protection device accounts for the forces and, via the actuator device, in the absence of a collision prevents, and in the case of a collision triggers and/or enables, relative movement of the handling device relative to the carrier.

Abstract: A localization system includes a first sensor, configured to detect a vibration and generate a first electrical signal in response to the detection of the vibration; a second sensor, configured to detect a vibration and generate a second electrical signal in response to the detection of the vibration; a third sensor, configured to detect a vibration and generate a third electrical signal in response to the detection of the vibration; and a processor, configured to determine a position of a source of the vibration based on the first electrical signal, the second electrical signal, and the third electrical signal.

Abstract: Disclosed herein are systems, devices, and methods of a system that may adapt sensing capabilities based on the risk of the situation. The system may determine a risk estimation of an object in a work environment of a robot based on sensor data and a measurement uncertainty of a sensing system configured to collect the sensor data, wherein the sensor data is indicative of the object in the work environment. The system may also, based on the risk estimation, select a next operation mode from a plurality of operation modes for the sensing system.

Abstract: A computing device, including: a memory configured to store computer-readable instructions; and unintended human motion detection processing circuitry configured to execute the computer-readable instructions to cause the computing device to: interpret a human action; receive autonomous mobile robot (AMR) sensor data from an AMR sensor; and detect whether the human action is intended or unintended, wherein the detection is based on a predicted human action, a current human emotional or physical state, the interpreted human action, and the AMR sensor data.

Abstract: A method for finding a center of a process kit and/or a process kit ring is provided. An object placed on an end effector is moved past a sensor of a manufacturing system. A first signal indicating a current shape of object is received from the sensor of the manufacturing system. A determination is made whether the first signal corresponds to a second signal indicating a predefined shape for a process kit and/or a process kit carrier. In response to a determination that the first signal corresponds to the second signal, a coordinate correspondence is determined between coordinates of a center of the object and coordinates of a center of the end effector. The determined coordinate correspondence indicates whether a current placement of the object on the end effector satisfies a target placement criterion.

Abstract: A work coordinate generation device includes a shape register section configured to register shape information about a shape of a work region optically defined on a target which is a work target of a work robot; a first recognition section configured to acquire first image data; a first coordinate generation section configured to generate a first work coordinate which represents the work region of the first target based on a result of recognition of the first recognition section; a second recognition section configured to acquire second image data; and a second coordinate generation section configured to generate a second work coordinate which represents the work region of the second target based on the first work coordinate and a result of recognition of the second recognition section.

Abstract: Provided is a globally optimal robot visual positioning method and device based on point-line features. The method comprises the following steps: acquiring a priori three-dimensional map of a current scene constructed in advance; acquiring a current image of the robot and the inertial measurement data; calculating a pitch angle and a roll angle of the current robot pose according to the current inertial sensor data and the inertial sensor data in the priori map; matching the two-dimensional point-line features detected in the current image with three-dimensional point-line features in a priori map; separating the rotation and translation of the pose to be solved according to the matched feature pairs, solving the rotation and then solving the translation so as to complete the dimensionality reduction of the search space.

Abstract: A device may include a processor. The processor may receive sensor data representative of an environment comprising a robot. The processor may extract features from the sensor data to generate an extracted feature set indicating an observation of the robot within the environment. The processor may generate a feature set indicating an expected observation of the robot within the environment based on pre-defined parameters of the robot. The processor may determine a difference between the observation and the expected observation of the robot. The processor may determine a systemic failure based on the difference between the observation and the expected observation of the robot exceeding a threshold value. The processor may instruct the robot to transition to a non-operative state responsive to the systemic failure being determined.

Abstract: An end effector control system that controls a plurality of end effectors connectable to a robot arm, the end effector control system including: an image acquisition unit that acquires an image of an end effector connected to the robot arm among the plurality of end effectors; an identification information acquisition unit that acquires identification information that identifies the end effector; a control unit that controls the end effector; and a memory having control information including a target position of each of the plurality of end effectors. The control unit acquires the identification information from the identification information acquisition unit, determines a target position of the end effector in accordance with the identification information and the control information, and controls the end effector to be located at the target position based on the image acquired by the image acquisition unit.

Abstract: A wafer jig according to an embodiment may be used for a robot having a hand including a light emitting part and a light receiving part. The light receiving part detects detection light emitted from the light emitting part. The wafer jig includes a light source for emitting the notification light toward the light receiving part. The wafer jig outputs information to a hand side by emitting the notification light from the light source to the light receiving part.

Abstract: A robot system with a hand-guiding function is disclosed. The robot system selects the hand-guiding function or non-hand-guiding function of an enable device by a mode option mechanism during the operation of a teach mode or an automatic mode. When selecting the hand-guiding function, the enable device has both the enabling and the hand-guiding function to easily hand-guiding the robot to operate.