Abstract: According to the embodiment of the present invention, it is possible to minimize the loss of the substrate that may be caused by the difference in etching height by taking advantage of the difference in the etch selectivity between a nitride material, an oxide material, and a conductive material, and minimizing the exposure of the substrate while each contact hole is formed. According to the embodiment of the present invention, a loss of the substrate may be minimized when contact holes having different etching depths are formed.

Abstract: A transistor device and method of fabrication are provided, where the transistor device may include a first dielectric layer disposed on a surface of the semiconductor substrate, a second dielectric layer disposed directly on the first dielectric layer, a third dielectric layer disposed on the second dielectric layer, a gate structure disposed directly on the surface of the semiconductor substrate in the gate channel, and a field plate disposed overlapping the gate structure. The gate may be defined via an opening that extends through the first, second, and third dielectric layers. Portions of the first and second dielectric layers may be interposed directly between the gate structure and the surface of the semiconductor substrate. A portion of the field plate may be disposed in a field plate channel at least partially defined via a second opening that extends through the second dielectric layer and the third dielectric layer.

Abstract: A method includes forming a first transistor over a substrate, in which the first transistor includes first source/drain epitaxy structures; forming a second transistor over the first transistor, in which the second transistor includes second source/drain epitaxy structures; forming an opening extending through one of the second source/drain epitaxy structures and exposing a top surface of one of the first source/drain epitaxy structures; performing a first deposition process to form a first metal in the opening, in which a first void is formed in the first metal during the first deposition process; performing a first etching back process to the first metal until the first void is absent; and performing a second deposition process to form a second metal in the opening and over the first metal.

Abstract: A semiconductor device including a contact plug formed in a contact hole using a multi-stage contact etch process. The semiconductor device comprises a source/drain region over a semiconductor substrate, an oxide layer extension extending from the source/drain region toward a gate dielectric layer, and a contact plug extending through a dielectric layer over the source/drain region, the contact plug extending through a first etch stop layer and a second etch stop layer to a horizontal remaining portion of the oxide layer extension.

Abstract: Provided is a thin film transistor unit. The thin film transistor unit includes a first gate, a first gate insulating layer, a first semiconductor layer and a first source/drain electrode layer that are sequentially arranged on a substrate, wherein the first source/drain electrode layer includes a first source and a first drain that are spaced apart from each other along a first direction; and a floating electrode disposed on a side of the first semiconductor layer away from the first gate insulating layer, wherein in the first direction, an orthographic projection of the floating electrode on the substrate falls between an orthographic projection of the first source on the substrate and an orthographic projection of the first drain on the substrate.

Abstract: In some implementations, an apparatus may include a substrate having silicon. In addition, the apparatus may include a first layer of a source or drain region of a p-type transistor, the first layer positioned above the substrate, the first layer having boron, silicon and germanium. The apparatus may include a second layer coupled to the source or drain region, the second layer having a metal contact for the source or drain region. Moreover, the apparatus may include a third layer positioned between the first layer and the second layer, the third layer having at least one monolayer having gallium, where the third layer is adjacent to the first layer.

Abstract: A semiconductor structure includes an epitaxial region having a front side and a backside. The semiconductor structure includes an amorphous layer formed over the backside of the epitaxial region, wherein the amorphous layer includes silicon. The semiconductor structure includes a first silicide layer formed over the amorphous layer. The semiconductor structure includes a first metal contact formed over the first silicide layer.

Abstract: Integrated circuit structures having internal spacer liners, and methods of fabricating integrated circuit structures having internal spacer liners, are described. For example, an integrated circuit structure includes a stack of horizontal nanowires. A gate structure is vertically around the stack of horizontal nanowires, the stack of horizontal nanowires extending laterally beyond the gate structure. An internal gate spacer is between vertically adjacent ones of the stack of horizontal nanowires and laterally adjacent to the gate structure. An internal spacer liner is intervening between the internal gate spacer and the vertically adjacent ones of the stack of horizontal nanowires, and the internal spacer liner is intervening between the internal gate spacer and the gate structure.

Abstract: A semiconductor device includes a substrate, a first transistor unit having a first drain electrode, a first gate electrode, and a first source electrode, a second transistor unit having a second source electrode, a second gate electrode electrically, and a second drain electrode, a gate wiring provided on the substrate between the first source electrode and the second source electrode and electrically connected to the first gate electrode and the second gate electrode, a first cover metal layer provided above the substrate between the first source electrode and the gate wiring and adjacent to the first source electrode and the gate wiring, and electrically connected to the first source electrode, and a second cover metal layer provided above the substrate between the second source electrode and the gate wiring and adjacent to the second source electrode and the gate wiring, and electrically connected to the second source electrode.

Abstract: Transistor structures with gate material self-aligned to underlying channel material. A channel mask material employed for patterning channel material is retained during selective formation of a second mask material upon exposed surfaces of gate material. The channel mask material is then thinned to expose a sidewall of adjacent gate material. The exposed gate material sidewall is laterally recessed to expand an opening beyond an edge of underlying channel material. A third mask material may be formed in the expanded opening to protect an underlying portion of gate material during a gate etch that forms a trench bifurcating the underlying portion of gate material from an adjacent portion of gate material. The underlying portion of gate material extends laterally beyond the channel material by an amount that is substantially symmetrical about a centerline of the channel material and this amount has a height well controlled relative to the channel material.

Abstract: A semiconductor device and a manufacturing method thereof are provided. The semiconductor device includes a semiconductor substrate, semiconductor nanosheets vertically stacked upon one another and disposed above the semiconductor substrate, a gate structure surrounding each of the semiconductor nanosheets, inner spacers laterally covering the gate structure and interposed between the semiconductor nanosheets, and source/drain (S/D) regions disposed over the semiconductor substrate and laterally abutting the semiconductor nanosheets. The semiconductor nanosheets serve as channel regions. A bottommost inner spacer of the inner spacers underlying a bottommost semiconductor nanosheet of the semiconductor nanosheets is thinner than a topmost inner spacer of the inner spacers underlying a topmost semiconductor nanosheet of the semiconductor nanosheets. The S/D regions are separated from the gate structure through the inner spacers.

Abstract: N-type gate-all-around (nanosheet, nanoribbon, nanowire) field-effect transistors (GAAFETs) vertically stacked on top of p-type GAAFETs in complementary FET (CFET) devices comprise non-crystalline silicon layers that form the n-type transistor source, drain, and channel regions. The non-crystalline silicon layers can be formed via deposition, which can provide for a simplified processing flow to form the middle dielectric layer between the n-type and p-type GAAFETs relative to processing flows where the silicon layers forming the n-type transistor source, drain, and channel regions are grown epitaxially.

Abstract: A transistor and a manufacturing method. The transistor includes a semiconductor base substrate, an active structure, a dielectric structure, and a gate stack structure. The active structure is formed on the semiconductor base substrate. The active structure includes a source region, a drain region, and a channel region located between the source region and the drain region. The channel region includes at least two nanostructures stacked in a thickness direction of the semiconductor base substrate. In the channel region, a bottom nanostructure has a greater width than other nanostructures. The dielectric structure is formed between the semiconductor base substrate and the active structure. The dielectric structure is in contact with the bottom nanostructure. The gate stack structure is formed on a surface of the bottom nanostructure not in contact with the dielectric structure, and the gate stack surrounds a periphery of the other nanostructures.

Abstract: A method for forming an interface layer on a silicon carbide body comprises removing an oxide layer from a surface of a silicon carbide body to obtain a silicon carbide surface. The silicon carbide body comprises a source region of a first conductivity type and a body region of a second conductivity type. The method further comprises after removing the oxide layer, depositing an interface layer directly on the silicon carbide surface. The interface layer has a thickness of less or equal to 15 nm. The method further comprises forming an electrical insulator over the interface layer, and forming a gate electrode over the electrical insulator.

Abstract: A method includes forming a first bottom-tier transistor; forming a second bottom-tier transistor, the first and second bottom-tier transistors sharing a same source/drain region; forming a first top-tier transistor over the first bottom-tier transistor, the first top-tier transistor comprising a first channel layer and a first gate structure around the first channel layer; forming a second top-tier transistor over the second bottom-tier transistor, the second top-tier transistor comprising a second channel layer and a second gate structure around the second channel layer, the first and second top-tier transistors sharing a same source/drain region, wherein from a top view, a first dimension of the first channel layer in a lengthwise direction of the first gate structure is different than a second dimension of the second channel layer in the lengthwise direction of the first gate structure.

Abstract: A method includes forming a fin structure including first and second sacrificial layers and first and second channel layers over a substrate; forming a dummy gate structure across the fin structure; forming gate spacers on opposite sides of the dummy gate structure; forming first source/drain epitaxial layers on opposite sides of the first channel layer; forming second source/drain epitaxial layers on opposite sides of the second channel layer; removing the dummy gate structure and the first and second sacrificial layers to form a gate trench defined by the gate spacers; forming an oxynitride layer in the gate trench to surround the first channel layer; forming a dipole layer to surround the oxynitride layer; performing an anneal process to drive dipole dopants into the oxynitride layer; and depositing a high-k gate dielectric layer and a work function metal layer in the gate trench to form a gate structure.

Abstract: A semiconductor device comprising: a substrate including an active pattern; a channel pattern on the active pattern, wherein the channel pattern includes a plurality of semiconductor patterns; a source/drain pattern connected to the plurality of semiconductor patterns; a gate electrode extending in a first direction on the channel pattern, wherein the gate electrode includes an inner gate electrode between first and second semiconductor patterns among the plurality of semiconductor patterns; and an inner gate spacer between the inner gate electrode and the source/drain pattern, wherein the inner gate spacer includes a center portion and an edge portion, the center portion has a first thickness in a second direction, the edge portion has a second thickness in the second direction, the first thickness is greater than the second thickness, the first and second semiconductor patterns are adjacent to each other in a third direction.

Abstract: A transistor device and method of fabrication are provided, where the transistor device may include a semiconductor substrate, a first dielectric layer disposed on a surface of the semiconductor substrate, a second dielectric layer disposed directly on the first dielectric layer, a gate structure disposed directly on the surface of the semiconductor substrate, and a spacer structure. A first opening through the first dielectric layer and the second dielectric layer may correspond to a gate channel. Portions of the first dielectric layer and the second dielectric layer may be interposed directly between portions of the gate structure and the surface of the semiconductor substrate. The spacer structure may be disposed in the gate channel and interposed between the gate structure and the semiconductor substrate. The spacer structure may contact respective side surfaces of the first dielectric layer and the second dielectric layer that at least partially define the gate channel.

Abstract: A method of fabricating a superconducting device includes determining a target transition temperature and utilizing a predefined quantitative relationship between superconducting transition temperature and an order parameter for at least one superconducting material composition is utilized to select a superconductor material composition that is capable of providing a target transition temperature. Process parameters may be controlled to form a superconductor device comprising at least one superconductor material having a material composition providing the target transition temperature.

Abstract: A Tunnel Field-Effect Transistor (TFET) device, an isolating layer over a substrate layer, a gate stack above the isolating layer, a source and a drain region over the isolating layer, a channel region underneath the gate stack, and a plurality of nanosheets in the channel region protruding from the source region. Each nanosheet of the plurality of nanosheets includes source region material encapsulated by a narrow band gap material.

Abstract: Disclosed herein is A structure comprising: a top gate electrode and a bottom gate electrode, a channel layer formed from a channel material with a band gap modulable by electric field, the channel layer being electrically insulated from the top gate electrode and the bottom gate electrode and being located adjacent to at least one layer of a negative capacitance material.

Abstract: A method for manufacturing a gate-all-around TFET device. The method comprises: forming, on a substrate, a channel stack comprising channel layer(s) and sacrificial layer(s) that alternate with each other; forming, on the substrate, a dummy gate astride the channel stack; forming a first spacer at a surface of the dummy gate; etching the sacrificial layer(s) to form recesses on side surfaces of the channel stack; forming second spacers in the recesses, respectively; fabricating a source and a drain separately, where a region for fabricating the source is shielded by a dielectric material when fabricating the drain, and a region for fabricating the drain is shielded by another dielectric material when fabricating the source; etching the dummy gate and the sacrificial layer(s) to form a space for a surrounding gate; and fabricating a surrounding dielectric-metal gate in the space.

Abstract: A semiconductor device includes a semiconductor body having opposing first and second surfaces along a vertical direction, and a bipolar junction transistor that includes an emitter region electrically connected to an emitter contact at the first surface, a base region electrically connected to a base contact at the first surface, and a collector region electrically connected to a collector contact. A dielectric isolation structure extends into the semiconductor body from the first surface and includes a first sub-structure arranged, along a first lateral direction, between the emitter contact and the base contact. A field plate structure including a field plate dielectric and a field plate electrode is arranged on the field plate dielectric. A first part of the field plate structure is arranged on the first surface of the semiconductor body. A second part of the field plate structure is arranged on the first sub-structure of the dielectric isolation structure.

Abstract: The present disclosure relates to semiconductor structures and, more particularly, to transistor with wrap-around extrinsic base and methods of manufacture. The structure includes: a substrate; a collector region within the substrate; an emitter region over the substrate and which comprises silicon based material; an intrinsic base; and an extrinsic base overlapping the emitter region and the intrinsic base; an extrinsic base overlapping the emitter region and the intrinsic base; and an inverted “T” shaped spacer which separates the emitter region from the extrinsic base and the collector region from the emitter region.

Abstract: An RC IGBT includes, in a single chip, an active region configured to conduct both a forward load current and a reverse load current between a first load terminal at a front side of a semiconductor body of the RC IGBT and a second load terminal at a back side of the semiconductor body. The active region is separated into at least an IGBT-only region and an RC IGBT region. At least 90% of the IGBT-only region is configured to conduct, based on a first control signal, only the forward load current. At least 90% of the RC IGBT region is configured to conduct the reverse load current and, based on a second control signal, the forward load current.

Abstract: A semiconductor device includes a substrate, a gate electrode in the substrate, a channel region above the gate electrode, a gate dielectric layer between the gate electrode and the channel region, and at least two source/drain regions in contact with the channel region. The channel region includes at least one boron-carbon-nitrogen single-walled nanotube (BCN-SWNT).

Abstract: Semiconductor structures and methods for manufacturing the same are provided. The semiconductor structure includes an isolation structure formed over a substrate, and first nanostructures formed over an isolation structure along a first direction. The semiconductor includes second nanostructures adjacent to the first nanostructure along the first direction. The semiconductor also includes a dielectric wall between the first nanostructures and the second nanostructures, and the dielectric wall includes a low-k dielectric material. The dielectric wall is in direct contact with the first nanostructures and the second nanostructures, and a top surface of the dielectric wall is higher than a top surface of the isolation structure. The semiconductor includes a gate structure formed over the first nanostructures along a second direction, and a cutting structure formed over the dielectric wall. The gate structure is divided into two portions by the cutting structure.

Abstract: A device structure includes a substrate, a fin structure disposed on the substrate and elongated in an X direction, a gate structure formed on the fin structure and elongated in a Y direction transverse to the X direction to terminate at two opposite ends, at least one dielectric portion connected to at least one of the two opposite ends of the gate structure, and having two sides that are opposite to each other in the X direction, and a pair of gate spacers which are spaced apart from each other in the X direction and are respectively disposed on two lateral sides of the gate structure, and which are elongated in the Y direction to cover the two sides of the dielectric portion, respectively. A method for manufacturing the device structure is also disclosed.

Abstract: A method includes alternately stacking first semiconductor layers and second semiconductor layers over a substrate, patterning the first and second semiconductor layers into a fin structure, forming a dummy gate structure across the fin structure, depositing gate spacers over sidewalls of the dummy gate structure, removing the dummy gate structure to form a recess, removing the first semiconductor layers, depositing an interfacial layer wrapping the second semiconductor layers, depositing a high-k dielectric layer over the interfacial layer and over the sidewalls of the gate spacers, depositing a first gate electrode over the high-k dielectric layer, recessing the first gate electrode and the high-k dielectric layer to expose a top portion of the sidewalls of the gate spacers, depositing a low-k dielectric layer over the recessed high-k dielectric layer, and depositing a second gate electrode over the first gate electrode.

Abstract: A semiconductor device includes an insulating substrate, a silicon layer on the insulating substrate, a dopant layer on the silicon layer, a buried spacer on a side surface of the dopant layer, a channel pattern on the dopant layer, the channel pattern comprising a plurality of semiconductor patterns vertically stacked and spaced apart from each other, a source/drain pattern on the buried spacer, the source/drain pattern connected to the channel pattern, a gate electrode on the channel pattern, the gate electrode comprising a plurality of inner electrodes between the semiconductor patterns, respectively, a lower power interconnection line in a lower portion of the insulating substrate, and a backside contact extending into the insulating substrate and the silicon layer to electrically connect the lower power interconnection line to the source/drain pattern. A side surface of the backside contact is in contact with the silicon layer and the buried spacer.

Abstract: A semiconductor device and a method for forming the same are provided. The semiconductor device includes a substrate, a buffer layer on the substrate, a channel layer on the buffer layer, a barrier layer on the channel layer and a gate structure on the barrier layer. The gate structure includes a gate layer, a gate electrode layer, a first protection pattern layer and second protection spacers. The gate electrode layer covers the gate layer. The first protection pattern layer covers a first top surface of the gate electrode layer. The second protection spacers cover first side surfaces of the gate electrode layer, second side surfaces of the first protection pattern layer and a portion of the gate layer. First interfaces between the second protection spacers and the gate layer are coplanar with a second interface, which is between the gate electrode layer and the gate layer.

Abstract: The semiconductor device includes a multi-finger high electron mobility transistor (HEMT). The multi-finger HEMT includes a two-dimensional electron gas (2-DEG); a plurality of source fingers, wherein a first source finger of the plurality of source fingers extends continuously across the 2-DEG, and a second source finger of the plurality of source fingers is discontinuous across the 2-DEG; and a plurality of drain fingers, wherein the plurality of drain fingers is interdigitated with the plurality of source fingers. The second source finger is part of a current sensing element.

Abstract: A semiconductor device includes a drain, a substrate, an epitaxial layer, and a semiconductor layer. The semiconductor layer includes a source region located on a side the semiconductor layer away from the epitaxial layer. A trench extending to the epitaxial layer is disposed on a side of the source region is away from the epitaxial layer. A gate, an electrode plate, a first shield gate, and a second shield gate are disposed in the trench. The electrode plate is located between the first shield gate and the second shield gate. The trench is further filled with an oxidized layer structure. The first shield gate and the second shield gate are separately spaced from the electrode plate to form electrode plate capacitance. One of the source region, the drain, and the gate is electrically connected to the electrode plate a first electrode, and a second one of the source region, the drain, and the gate is electrically connected to the shield gate structure.

Abstract: A semiconductor device includes a substrate having a first conductivity type and including a cell region and a termination region. A trench is disposed in the substrate and located in the cell region, and a gate electrode disposed in the trench. A shielding doped region having a second conductivity type is disposed in the substrate and directly below the trench. A buried guard ring having the second conductivity type is disposed in the substrate and located in the termination region. The buried guard ring and the shielding doped region are disposed at the same depth in the substrate. In addition, a junction termination extension structure having the second conductivity type is disposed in the substrate, located directly above and separated from the buried guard ring.

Abstract: The semiconductor device includes a semiconductor layer which has a main surface, a switching device which is formed in the semiconductor layer, a first electrode which is arranged on the main surface and electrically connected to the switching device, a second electrode which is arranged on the main surface at an interval from the first electrode and electrically connected to the switching device, a first terminal electrode which has a portion that overlaps the first electrode in plan view and a portion that overlaps the second electrode and is electrically connected to the first electrode, and a second terminal electrode which has a portion that overlaps the second electrode in plan view and is electrically connected to the second electrode.

Abstract: Semiconductor devices including a nitrogen doped field relief dielectric layer are described. The microelectronic device comprises a substrate including a body region having a first conductivity type and a drain drift region having a second conductivity type opposite the first conductivity type; a gate dielectric layer on the substrate, the gate dielectric layer extending over the body region and the drift region and a doped field relief dielectric layer on the drift region. Doping of the field relief dielectric layer with nitrogen raises the dielectric constant of the field relief dielectric above that of pure silicon dioxide. Increasing the dielectric constant of the field relief dielectric layer may improve channel hot carrier performance, improve breakdown voltage, and reduce the specific on resistance of the microelectronic device compared to a microelectronic device of similar size with a field relief dielectric which is not doped with nitrogen.

Abstract: Structures having vertical-transport field effect transistors (FETs) with bottom source connection are described. In an example, an integrated circuit structure includes a channel structure above a substrate. A gate structure is laterally surrounding the channel structure. A drain structure is above the gate structure and on the channel structure. A metal source structure is below the substrate and vertically beneath the channel structure. A conductive via is through the substrate, the conductive via coupling the metal source structure to the channel structure.

Abstract: Lateral gallium oxide transistor includes a gallium oxide substrate, an n-type gallium oxide epitaxial layer epitaxially grown on the gallium oxide substrate, an insulating layer defining a gate region, a source region, and a drain region on the n-type gallium oxide epitaxial layer, a diffusion barrier layer deposited on the n-type gallium oxide epitaxial layer exposed in the gate region, a p-type nickel oxide layer deposited on the diffusion barrier layer, a dielectric layer deposited on the p-type nickel oxide layer, a gate electrode layer deposited on the dielectric layer, and a source electrode and a drain electrode formed on the n-type gallium oxide epitaxial layer exposed in the source region and the drain region.

Abstract: A transistor device may include a first perovskite gate material, a first perovskite ferroelectric material on the first gate material, a first p-type perovskite semiconductor material on the first ferroelectric material, a second perovskite ferroelectric material on the first semiconductor material, a second perovskite gate material on the second ferroelectric material, a third perovskite ferroelectric material on the second gate material, a second p-type perovskite semiconductor material on the third ferroelectric material, a fourth perovskite ferroelectric material on the second semiconductor material, a third perovskite gate material on the fourth ferroelectric material, a first source/drain metal adjacent a first side of each of the first semiconductor material and the second semiconductor material, a second source/drain metal adjacent a second side opposite the first side of each of the first semiconductor material and the second semiconductor material, and dielectric materials between the source/drain

Abstract: In one embodiment, a negative capacitance transistor device includes a perovskite semiconductor material layer with first and second perovskite conductors on opposite ends of the perovskite semiconductor material layer. The device further includes a dielectric material layer on the perovskite semiconductor material layer between the first and second perovskite conductors, a perovskite ferroelectric material layer on the dielectric material layer, and a third perovskite conductor on the perovskite ferroelectric material layer.

Abstract: Technologies for a field effect transistor (FET) with a ferroelectric gate dielectric are disclosed. In an illustrative embodiment, a transistor includes a gate of strontium ruthenate and a ferroelectric gate dielectric layer of barium titanate. In order to prevent migration of ruthenium from the strontium ruthenate to the barium titanate, a barrier layer is placed between the gate and the ferroelectric gate dielectric layer. The barrier layer may be a metal oxide, such as strontium oxide, barium oxide, zirconium oxide, etc.

Abstract: A structure includes a substrate, a first transistor on the substrate and a second transistor on the substrate. The second transistor is spaced apart from the first transistor by an isolation region. At least one stress-inducing liner is over the first transistor and the second transistor. An opening extends through at least one stress-inducing liner over at least the isolation region, and a dielectric layer is in at least a portion of the opening. The structure allows for local enhanced high-pressure deuterium (HPD) passivation, which increases threshold voltage of the transistors and improves hot carrier injection with no additional masking. A method of forming the structure is also provided.

Abstract: A semiconductor device includes a substrate, a buffer layer on the substrate, an n? type epitaxial layer extending upward from the buffer layer in one direction, and having a fin channel, a p type layer disposed on the buffer layer and surrounding the side and upper surfaces of the n? type epitaxial layer, a gate insulating layer on the p type layer, and a gate electrode on the gate insulating layer.

Abstract: A semiconductor device includes an oxide semiconductor layer, a first electrode and a second electrode, which are arranged apart from each other on the oxide semiconductor layer, a metal oxide layer arranged between the oxide semiconductor layer and at least one of the first electrode and the second electrode, and a metal nitride layer arranged between the metal oxide layer and the oxide semiconductor layer.

Abstract: Disclosed are a thin film transistor, a method of manufacturing the same, and an array substrate. The thin film transistor includes a substrate, a gate, a gate insulating layer, an active layer, an ohmic contact layer, and a source-drain electrode layer, the gate insulating layer includes at least a first gate insulating layer deposited at a low rate, a second gate insulating layer deposited at a high rate, and a third gate insulating layer deposited at a low rate, the first gate insulating layer is in contact with the gate, the third gate insulating layer is in contact with the active layer, and the first gate insulating layer and the third gate insulating layer have a density greater than a density of the second gate insulating layer.

Abstract: To improve field-effect mobility and reliability in a transistor including an oxide semiconductor film. A semiconductor device includes a transistor including an oxide semiconductor film. The transistor includes a region where the maximum value of field-effect mobility of the transistor at a gate voltage of higher than 0 V and lower than or equal to 10 V is larger than or equal to 40 and smaller than 150; a region where the threshold voltage is higher than or equal to minus 1 V and lower than or equal to 1 V; and a region where the S value is smaller than 0.3 V/decade.

Abstract: An object is to provide a semiconductor device having electrical characteristics such as high withstand voltage, low reverse saturation current, and high on-state current. In particular, an object is to provide a power diode and a rectifier which include non-linear elements. An embodiment of the present invention is a semiconductor device including a first electrode, a gate insulating layer covering the first electrode, an oxide semiconductor layer in contact with the gate insulating layer and overlapping with the first electrode, a pair of second electrodes covering end portions of the oxide semiconductor layer, an insulating layer covering the pair of second electrodes and the oxide semiconductor layer, and a third electrode in contact with the insulating layer and between the pair of second electrodes. The pair of second electrodes are in contact with end surfaces of the oxide semiconductor layer.

Abstract: Related to the field of display panels, an array substrate, a manufacturing method thereof, and a display panel. The array substrate includes: the base substrate, the buffer layer, the active layer, the gate insulation layer, the gate, the interlayer insulation layer, the source, and the drain, which are stacked together. By using the gate insulation layer as a conductive mask of the active layer, and by adjusting the width of the gate and the width of the gate insulation layer, a width difference between the channel region and the gate is within the preset range, which reduces the problem of excessive width difference caused by the diffusion phenomenon of the channel region, and can at the same time meet the switching characteristics requirements of the thin film transistor and the definition requirements of the display panel.

Abstract: This semiconductor device comprises a semiconductor substrate of a first conductivity type, a semiconductor layer of the first conductivity type, a first electrode, a second electrode, a first trench, a second trench, an insulating layer, a third electrode, and a well region of a second conductivity type. The well region includes a first region that is adjacent to the first trench, a second region that is adjacent to the second trench, and a third region that is located between the first region and the second region in a second direction. The impurity concentration of the first region and the impurity concentration of the second region are both lower than the impurity concentration of the third region.

Abstract: An ultrathin silicon oxynitride interface material, a tunnel oxide passivated structure and preparation methods and applications thereof are provided. The ultrathin silicon oxynitride interface material is an SiON film with a thickness of 1 nm to 4 nm, and the percentage content of N atoms is 1% to 40%. Compared with silicon oxide, the diffusion rate of boron in the SiON film of the present disclosure is low, which effectively reduces the damaging effect of boron, improves the integrity of the SiON film and maintains the chemical passivation effect. The SiON film with high nitrogen concentration can noticeably lower the concentration of boron on the silicon surface so as to lessen the boron-induced defects. Furthermore, the SiON film has an energy band structure approximate to silicon nitride, which increases the hole transport efficiency and hole selectivity, and further improves the passivation quality and reduces the contact resistivity.