Elemental Metal Is Group Iib (zn, Cd, Hg) Metal Patents (Class 106/1.16)
  • Patent number: 9793339
    Abstract: The present disclosure relates to a MIM capacitor that includes a composite capacitor top metal (CTM) electrode and a composite capacitor bottom metal (CBM) electrode. The composite CBM electrode includes a first diffusion barrier layer overlying a first metal layer, and the composite CTM electrode includes a second diffusion barrier layer overlying a second metal layer. A dielectric layer is arranged over the composite CBM electrode, underlying the composite CTM electrode. The first and second diffusion barrier layers protect the first and second metal layers from metal that diffuses or moves from a metal line underlying the MIM capacitor to the composite CTM and CBM electrodes during manufacture. A method of manufacturing the MIM capacitor is also provided.
    Type: Grant
    Filed: January 8, 2015
    Date of Patent: October 17, 2017
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Ching-Sheng Chu, Chern-Yow Hsu, Shih-Chang Liu
  • Publication number: 20100285664
    Abstract: Compositions and methods for forming metal films on semiconductor substrates are disclosed. One of the disclosed methods comprises: heating the semiconductor substrate to obtain a heated semiconductor substrate; exposing the heated semiconductor substrate to a composition containing at least one metal precursor comprising at least one ligand, an excess amount of neutral labile ligands, a supercritical solvent, and optionally at least one source of B, C, N, Si, P, and mixtures thereof; exposing the composition to a reducing agent and/or thermal energy at or near the heated semiconductor substrate; disassociating the at least one ligand from the metal precursor; and forming the metal film while minimizing formation of metal oxides.
    Type: Application
    Filed: July 21, 2010
    Publication date: November 11, 2010
    Applicant: Lam Research Corporation
    Inventor: Mark Ian Wagner
  • Publication number: 20080131735
    Abstract: The various embodiments of the present invention generally relate to the deposition of a seedlayer for a magnetic recording medium used for perpendicular magnetic recording (PMR) applications, where the seedlayer provides for grain size refinement and reduced lattice mis-fit for a subsequently deposited underlayer or granular magnetic layer, and where the seedlayer is deposited using a nickel (Ni) alloy based sputter target. The nickel (Ni) alloy can be binary (Ni—X; Ni—Y) or ternary (Ni—X—Y). In addition, the binary (Ni—X; Ni—Y) or ternary (Ni—X—Y) nickel (Ni) based alloys can be further alloyed with metal oxides, thus forming seedlayer thin films with a granular microstructure containing metallic grains, surrounded by an oxygen rich grain boundary. The nickel-based alloys (with or without metal oxides) of the various exemplary embodiments can be made by powder metallurgical technique or by melt-casting techniques, with or without thermo-mechanical working.
    Type: Application
    Filed: December 5, 2006
    Publication date: June 5, 2008
    Applicant: Heraeus Incorporated
    Inventors: Anirban Das, Steven Roger Kennedy, Michael Gene Racine
  • Patent number: 6582582
    Abstract: An electroplating bath is disclosed that is particularly suited to the electrodeposition of tin, zinc and alloys of the foregoing in a smooth and bright electrodeposit. The disclosed electroplating bath comprises propanedioic acid, diethyl ester, polymer with N-(3-aminopropyl)-1,3-propanediamine, N-(2-carboxy benzoyl) as a brightener additive. In addition, the electroplating bath may also comprise carboxylic acids, ammonium salts, aldehyde compounds and a variety of co-brighteners.
    Type: Grant
    Filed: March 9, 2001
    Date of Patent: June 24, 2003
    Inventor: Donald Becking
  • Patent number: 6334964
    Abstract: A thixotropic ink for use in manufacturing a varistor comprising the following constituents: a) zinc oxide, b) ceramic structure influencing additives including bismuth oxide, boric acid, boron oxide, chromium oxide, cobalt oxide, magnesium oxide and tin oxide, c) a grain growth influencing additive selected from the group consisting of antimony oxide, silicon dioxide and titanium dioxide, d) an organic solvent carrier, e) an organic viscosity influencing additive, and f) an organic binder. The composition may serve as a ceramic ink for use in the manufacture of multilayer varistors, especially using a screen printing process.
    Type: Grant
    Filed: July 14, 1999
    Date of Patent: January 1, 2002
    Assignee: Littelfuse, Inc.
    Inventors: Stephen P. Cowman, Derek A. Nicker, John M. Shreeve