With Responsive Control Patents (Class 117/15)
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Patent number: 12084787Abstract: Methods for forming a unitized crucible assembly for holding a melt of silicon for forming a silicon ingot are disclosed. In some embodiments, the methods involve a porous crucible mold having a channel network with a bottom channel, an outer sidewall channel that extends from the bottom channel, and a central weir channel that extends from the bottom channel. A slip slurry may be added to the channel network and the liquid carrier of the slip slurry may be drawn into the mold. The resulting green body may be sintered to form the crucible assembly.Type: GrantFiled: March 7, 2023Date of Patent: September 10, 2024Assignee: GlobalWafers Co., Ltd.Inventors: Richard Joseph Phillips, Salvador Zepeda, Patrick Fredrick Boegemann, III, William Luter
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Patent number: 11987899Abstract: Methods for preparing an ingot in an ingot puller apparatus are disclosed. Thermal simulations are performed with the length of the ingot puller apparatus side heater being varied in the thermal simulations. A side heater is selected based on the thermal simulations. An ingot puller apparatus having the selected side heater length is provided. A seed crystal is lowered into a melt within a crucible of the ingot puller apparatus and an ingot is withdrawn from the melt.Type: GrantFiled: November 12, 2020Date of Patent: May 21, 2024Assignee: GlobalWafers Co., Ltd.Inventors: Maria Porrini, Sergio Morelli, Mauro Diodá
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Patent number: 11905617Abstract: A method produces semiconductor wafers of monocrystalline silicon. The method includes: pulling a cylindrical section of a single silicon crystal from a melt contained in a crucible, wherein the oxygen concentration in the cylindrical section is not more than 5×1017 atoms/cm3; subjecting the melt to a horizontal magnetic field; rotating the crucible at a rotational velocity and in a rotational direction during the pulling of the cylindrical section of the single crystal; and removing the semiconductor wafers of monocrystalline silicon from the cylindrical section of the single crystal. An amount of rotational velocity, averaged over time, is less than 1 rpm and the rotational direction is changed continually and the amplitude of the rotational velocity before and after the change in the rotational direction is not less than 0.5 rpm and not more than 3.0 rpm.Type: GrantFiled: August 5, 2020Date of Patent: February 20, 2024Assignee: SILTRONIC AGInventors: Walter Heuwieser, Karl Mangelberger, Juergen Vetterhoeffer
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Patent number: 11508570Abstract: A SiC film structure for obtaining a three-dimensional SiC film by forming the SiC film in an outer circumference of a substrate using a vapor deposition type film formation method and removing the substrate, the SiC film structure including: a main body having a three-dimensional shape formed of a SiC film and having an opening for removing the substrate; a lid configured to cover the opening; and a SiC coat layer configured to cover at least a contact portion between the main body and an outer edge portion of the lid and join the main body and the lid.Type: GrantFiled: August 28, 2019Date of Patent: November 22, 2022Assignee: ADMAP INC.Inventor: Satoshi Kawamoto
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Patent number: 11430106Abstract: An object of the invention is to quantitatively evaluate crystal growth amount in a wide range from an undergrowth state to an overgrowth state with nondestructive inspection. By using a plenty of image feature values such as pattern brightness, a pattern area and a pattern shape which are extracted from an SEM image, and depending on whether brightness inside a pattern is lower than brightness outside the pattern (401), undergrowth and overgrowth is determined (402, 405). Based on a brightness difference or the pattern area, a growth amount index or a normality index of crystal growth in a concave pattern such as a hole pattern or a trench pattern is calculated (404, 407).Type: GrantFiled: August 23, 2017Date of Patent: August 30, 2022Assignee: HITACHI HIGH-TECH CORPORATIONInventors: Takeyoshi Ohashi, Atsuko Shintani, Masami Ikota, Kazuhisa Hasumi
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Patent number: 11390962Abstract: Single crystal silicon with <100> orientation is doped with n-type dopant and comprises a starting cone, a cylindrical portion and an end cone, a crystal angle being not less than 20° and not greater than 30° in a middle portion of the starting cone, the length of which is not less than 50% of a length of the starting cone, and edge facets extending from a periphery of the single crystal into the single crystal, the edge facets in the starting cone and in the cylindrical portion of the single crystal in each case having a length which is not more than 700 ?m.Type: GrantFiled: August 28, 2018Date of Patent: July 19, 2022Assignee: SILTRONIC AGInventors: Georg Raming, Ludwig Stockmeier, Jochen Friedrich, Matthias Daniel, Alfred Miller
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Patent number: 11313050Abstract: An indium phosphide single-crystal body has an oxygen concentration of less than 1×1016 atoms·cm?3, and includes a straight body portion having a cylindrical shape, wherein a diameter of the straight body portion is more than or equal to 100 mm and less than or equal to 150 mm or is more than 100 mm and less than or equal to 150 mm. An indium phosphide single-crystal substrate has an oxygen concentration of less than 1×1016 atoms·cm?13, wherein a diameter of the indium phosphide single-crystal substrate is more than or equal to 100 mm and less than or equal to 150 mm or is more than 100 mm and less than or equal to 150 mm.Type: GrantFiled: July 3, 2018Date of Patent: April 26, 2022Assignee: Sumitomo Electric Industries, Ltd.Inventors: Takuya Yanagisawa, Kazuaki Konoike, Katsushi Hashio
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Patent number: 11242617Abstract: A silicon single crystal production method includes pulling up and growing a silicon single crystal from silicon melt containing red phosphorus as a dopant by Czochralski process. The silicon single crystal is intended for a 200-mm-diameter wafer. The silicon single crystal includes a straight body with a diameter in a range from 201 mm to 230 mm. The straight body includes a straight-body start portion with an electrical resistivity in a range from 0.8 m?cm to 1.2 m?cm. A crystal rotation speed of the silicon single crystal is controlled to fall within a range from 17 rpm to 40 rpm for at least part of a shoulder-formation step for the silicon single crystal.Type: GrantFiled: October 30, 2017Date of Patent: February 8, 2022Assignee: SUMCO CORPORATIONInventors: Koichi Maegawa, Yasuhito Narushima, Yasufumi Kawakami, Fukuo Ogawa
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Patent number: 11211505Abstract: In this photoelectric conversion element wherein group III-IV compound semiconductor single crystals containing zinc as an impurity are used as a substrate, the substrate is increased in size without lowering conversion efficiency. A heat-resistant crucible is filled with raw material and a sealant, and the raw material and sealant are heated, thereby melting the raw material into a melt, softening the encapsulant, and covering the melt from the top with the encapsulant. The temperature inside the crucible is controlled such that the temperature of the top of the encapsulant relative to the bottom of the encapsulant becomes higher in a range that not equal or exceed the temperature of bottom of the encapsulant, and seed crystal is dipped in the melt and pulled upward with respect to the melt, thereby growing single crystals from the seed crystal.Type: GrantFiled: December 11, 2017Date of Patent: December 28, 2021Assignee: JX NIPPON MINING & METALS CORPORATIONInventors: Akira Noda, Masaru Ota, Ryuichi Hirano
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Patent number: 11143829Abstract: A light guide body for optical path and optical axis adjustment, the light guide body includes a silicon single crystal having an extinction ratio of 30 dB or more. The light guide body is a light guide body having one side surface alone joined and fixed to a base. An optical module including the light guide body installed at an installation angle adjusted for optical path and optical axis adjustment between components. An optical path and optical axis adjustment method including adjusting an installation angle of the light guide body to perform the optical path and optical axis adjustment between components. It is possible to provide the light guide body which does not adversely affect polarization characteristics and can easily perform the optical path and optical axis adjustment. It is possible to provide optical module and the optical path and optical axis adjustment method using such a light guide body.Type: GrantFiled: August 15, 2017Date of Patent: October 12, 2021Assignee: SHIN-ETSU CHEMICAL CO., LTD.Inventor: Toshiaki Watanabe
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Patent number: 10975494Abstract: The present invention relates to an ingot growth control device capable of quickly and accurately controlling a diameter of an ingot during an ingot growing process and improving quality of the ingot, and a control method thereof. In the ingot growth control device and a control method thereof according to the present invention, when an input unit provides diameter data obtained by filtering a diameter measurement value of an ingot, a diameter controller reflects the diameter data to control a pulling speed of the ingot, while a temperature controller reflects the diameter data to control power of a heater.Type: GrantFiled: May 30, 2017Date of Patent: April 13, 2021Inventors: Hyun Woo Park, Se Hun Kim
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Patent number: 10920339Abstract: A pulling condition calculation program enables a computer to perform the steps of: setting a plurality of sets of pulling conditions based on solid-liquid interface height and distance between a surface of a silicon melt and a heat shield plate; performing, for each set of the pulling conditions, the steps of: calculating a heat flux (q) (W/m2) and a crystal surface temperature (T); defining a reference temperature (Tref) given by an equation (1) below and a geometry of the solid-liquid interface as boundary conditions, recalculating an in-crystal temperature distribution; calculating a mean stress in the monocrystalline silicon; calculating a defect distribution in a pulling direction based on the mean stress and the in-crystal temperature distribution; determining a defect-free region in the pulling direction; and drawing a contour line showing a dimension of the defect-free region on a two-dimensional map defined by the distance and the solid-liquid interface height.Type: GrantFiled: December 7, 2017Date of Patent: February 16, 2021Assignee: SUMCO CORPORATIONInventor: Ryota Suewaka
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Patent number: 10472732Abstract: A target value of a pull-up speed of the single crystal is set in advance before starting pulling-up of the single crystal for every predetermined pull-up length, the pull-up speed moving average value is calculated from actual values of the pull-up speeds measured from a time point that pulling-up of a predetermined length of the single crystal has been started until the current time point, a corrected value of the pull-up speed target value at a current time point is calculated and the single crystal is pulled up on the basis of this corrected value. When ? is a past pull-up length and ? is a future pull-up length, a pull-up length (?+?) used for calculating the corrected value of the pull-up speed target value is changed with an actual value of the single crystal diameter.Type: GrantFiled: September 30, 2015Date of Patent: November 12, 2019Assignee: SUMCO CORPORATIONInventor: Masahiko Mizuta
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Patent number: 10281329Abstract: Apparatus and associated methods relate to determining the wavelength of a narrow-band light beam. Two portions of the narrow-band light beam are projected onto two dissimilar photodetectors, respectively. The two dissimilar photodetectors have dissimilar spectral responses over a domain of wavelengths that includes the wavelength of the narrow-band light beam. Each of the two dissimilar photodetectors generates an output signal indicative of a photocurrent induced by the projection of the portion of the narrow-band light beam thereon. A ratio of the differences between the photocurrents to the sum of the photocurrents of the two dissimilar photodetectors is determined. The determined ratio is a monotonic function of wavelength over the domain wavelengths including the wavelength of the narrow-band light beam. The determined ratio is thereby indicative of the wavelength of the narrow-band light beam.Type: GrantFiled: June 14, 2017Date of Patent: May 7, 2019Assignee: Simmonds Precision Products, Inc.Inventor: David H. Crowne
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Patent number: 10225447Abstract: The invention relates to a photography system and to a method of generating a multi-view picture of a wristwatch.Type: GrantFiled: November 6, 2017Date of Patent: March 5, 2019Assignee: CHRONEXT Service Germany GmbHInventors: Sebastian Floss, Malte Maximillian Maesgen, Marcel Kamps, Ludwig Wurlitzer
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Patent number: 10218887Abstract: The invention relates to a photography system and to a method of generating a multi-view picture of a wristwatch.Type: GrantFiled: August 15, 2016Date of Patent: February 26, 2019Assignee: Chronext Service Germany GmbHInventors: Sebastian Floss, Malte Maximilian Maesgen, Marcel Kamps, Ludwig Wurlitzer
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Patent number: 9754052Abstract: An apparatus for supporting setting of a manufacturing condition of a vitreous silica crucible includes: an improved property parameter setting unit configured to, if the degree of matching between three-dimensional shapes of simulation data obtained based on an initial property parameter and measurement data falls below a predetermined level, set an improved property parameter such that the degree of matching becomes higher than or equal to the predetermined level, and an improved manufacturing condition data setting unit configured to set a manufacturing condition such that simulation data matching the design data to a degree higher than or equal to a predetermined level is obtained. By using the apparatus, it is possible to manufacture a vitreous silica crucible by rotational molding in such a manner that the three-dimensional shape thereof matches the design data to a high degree.Type: GrantFiled: October 31, 2012Date of Patent: September 5, 2017Assignee: SUMCO CORPORATIONInventors: Toshiaki Sudo, Tadahiro Sato, Eriko Kitahara, Shuji Tobita, Koichi Suzuki
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Patent number: 9748112Abstract: After determining the size of oxygen precipitates and the residual oxygen concentration in a silicon wafer after heat treatment performed in a device fabrication process; the critical shear stress ?cri at which slip dislocations are formed in the silicon wafer in the device fabrication process is determined based on the obtained size of the oxygen precipitates and residual oxygen concentration; and the obtained critical shear stress ?cri and the thermal stress ? applied to the silicon wafer in the heat treatment of the device fabrication process are compared, thereby determining that slip dislocations are formed in the silicon wafer in the device fabrication process when the thermal stress ? is equal to or more than the critical shear stress ?cri, or determining that slip dislocations are not formed in the silicon wafer in the device fabrication process when the thermal stress ? is less than the critical shear stress ?cri.Type: GrantFiled: February 24, 2016Date of Patent: August 29, 2017Assignee: SUMCO CORPORATIONInventors: Jun Fujise, Toshiaki Ono
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Patent number: 9708730Abstract: A quality-evaluated vitreous silica crucible for pulling silicon single crystal is provided, wherein an inner surface of the vitreous silica crucible has regions where surface defects including brown rings are to be generated when pulling silicon single crystal. The regions are distinguished using an infrared absorption spectrum or a Raman shift of the regions, wherein a position of each region and/or a density of the regions are/is specified.Type: GrantFiled: April 14, 2017Date of Patent: July 18, 2017Assignee: SUMCO CORPORATIONInventors: Toshiaki Sudo, Tadahiro Sato, Ken Kitahara, Masami Ohara
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Patent number: 9580832Abstract: A pulling head for a crystal growth furnace. The pulling head includes a servomotor and a rotatable housing attached to the servomotor, wherein the housing includes first, second, third and fourth housing magnets. The pulling head also includes a shaft attached to a scale and a connection device having first and second connection magnets. The first connection magnet is arranged between the first and second housing magnets to generate first and second magnetic repulsion forces and the second connection magnet is arranged between the third and fourth housing magnets to generate third and fourth magnetic repulsion forces. A rotation coupling is attached between the shaft and the connection device wherein the scale weighs the shaft, rotation coupling and the connection device. The servomotor rotates the housing and rotation of the housing is transmitted by the magnetic repulsion forces to the connection device to rotate the connection device.Type: GrantFiled: October 21, 2014Date of Patent: February 28, 2017Assignee: Siemens Medical Solutions USA, Inc.Inventors: Mark S. Andreaco, Troy Marlar, Brant Quinton
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Patent number: 9243343Abstract: The present invention provides a vitreous silica crucible which can restrain deterioration of crystallinity of a silicon ingot in multi-pulling. Provided is a vitreous silica crucible for pulling a silicon single crystal, the crucible has a wall having, from an inner surface toward an outer surface of the crucible, a synthetic vitreous silica layer, a natural vitreous silica layer, an impurity-containing vitreous silica layer and a natural vitreous silica layer.Type: GrantFiled: June 22, 2011Date of Patent: January 26, 2016Assignee: SUMCO CORPORATIONInventors: Toshiaki Sudo, Hiroshi Kishi
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Patent number: 9023152Abstract: A solution-stirring top-seeded solution-growth method for forming CLBO of the type where water is added to a precursor mixture, where heavy water is substituted for the water.Type: GrantFiled: September 3, 2010Date of Patent: May 5, 2015Assignee: KLA-Tencor CorporationInventor: Vladimir L. Dribinski
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Patent number: 8986446Abstract: This invention provides an Si doped GaAs single crystal ingot, which has a low crystallinity value as measured in terms of etch pit density (EPD) per unit area and has good crystallinity, and a process for producing the same. An Si-doped GaAs single crystal wafer produced in a latter half part in the growth of the Si doped GaAs single crystal ingot is also provided. A GaAs compound material is synthesized in a separate synthesizing oven (a crucible). An Si dopant is inserted into the compound material to prepare a GaAs compound material with the Si dopant included therein. The position of insertion of the Si dopant is one where, when the GaAs compound material is melted, the temperature is below the average temperature. After a seed crystal is inserted into a crucible for an apparatus for single crystal growth, the GaAs compound material with the Si dopant included therein and a liquid sealing compound are introduced into the crucible.Type: GrantFiled: October 25, 2010Date of Patent: March 24, 2015Assignee: Dowa Electronics Materials Co., Ltd.Inventor: Yoshikazu Oshika
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Patent number: 8968468Abstract: When pulling and growing a single crystal from a raw material melt by the Czochralski method, a boundary between the single crystal and the raw material melt is imaged by an optical sensor, and also the weight of the single crystal is measured by a weight sensor, a diameter value of the single crystal is calculated on the basis of first measured values of the diameter of the single crystal derived from image data captured by the optical sensor and second measured values of the diameter of the single crystal derived from weight data captured by the weight sensor, and a pulling rate of the single crystal and the temperature of the raw material melt are adjusted on the basis of the calculated diameter value to thereby control the diameter of the single crystal, and thus it is possible to accurately measure the diameter of a growing single crystal.Type: GrantFiled: March 26, 2010Date of Patent: March 3, 2015Assignee: Sumco CorporationInventor: Ken Hamada
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Publication number: 20150020728Abstract: The present invention provides a method for manufacturing a silicon single crystal wafer, wherein, under a growth condition that V/G?1.05×(V/G)crt is achieved where V is a growth rate in growth of the silicon single crystal ingot, G is a temperature gradient near a crystal growth interface, and (V/G)crt is a value of V/G when a dominant point defect changes from a vacancy to interstitial Si, a silicon single crystal ingot having oxygen concentration of 7×1017 atoms/cm3 (ASTM'79) or less is grown, and a silicon single crystal wafer which includes a region where the vacancy is dominant and in which FPDs are not detected by preferential etching is manufactured from the grown silicon single crystal ingot. As a result, there is provided the method that enables manufacturing a low-oxygen concentration silicon single crystal wafer that can be preferably used for a power device with good productivity at a low cost.Type: ApplicationFiled: February 15, 2013Publication date: January 22, 2015Applicant: SHIN-ETSU HANDOTAI CO., LTD.Inventors: Ryoji Hoshi, Hiroyuki Kamada, Kosei Sugawara
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Patent number: 8936679Abstract: According to one exemplary embodiment, a single crystal pulling-up apparatus of pulling-up silicon single crystals by a Czochralski method, is provided with: a neck diameter measuring portion which measures a diameter of a grown neck portion; a first compensation portion which outputs a first compensated pulling-up speed for the seed crystals based on a difference between a measured value of the diameter of the neck portion and a target value of the neck portion diameter previously stored; a second compensation portion which outputs a second pulling-up speed while limiting an upper limit of the first pulling-up speed to a first limit value; and a crucible rotation number compensation portion which lowers the number of a rotation of a crucible at least in a period where the upper limit of the first pulling-up speed is limited to the first limit value.Type: GrantFiled: September 14, 2011Date of Patent: January 20, 2015Assignee: Globalwafers Japan Co., LtdInventors: Hironori Banba, Hiromichi Isogai, Yoshiaki Abe, Takashi Ishikawa, Shingo Narimatsu, Jun Nakao, Hiroyuki Abiko, Michihiro Ohwa
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Publication number: 20150017086Abstract: A silicon single crystal manufacturing method includes: applying a transverse magnetic field to a melt of polysilicon with a carbon concentration of at most 1.0×1015 atoms/cm3 as a raw material; rotating the crucible at 5.0 rpm or less; allowing inert gas to flow at rate A (m/sec) of formula (1) at a position 20-50% of Y above the melt surface; controlling the rate A within the range of 0.2 to 5,000/d (m/sec) (d: crystal diameter (mm)); and reducing the total power of side and bottom heaters by 3 to 30% and the side heater power by 5 to 45% until the solidified fraction reaches 30%.Type: ApplicationFiled: July 10, 2014Publication date: January 15, 2015Applicant: GLOBALWAFERS JAPAN CO., LTD.Inventors: Yuta NAGAI, Satoko Nakagawa, Kazuhiko Kashima
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Publication number: 20150007764Abstract: A method for measuring a three-dimensional shape of an inner surface of a vitreous silica crucible which enables the measurement of the three-dimensional shape of the inner surface of the crucible without contaminating the inner surface of the crucible, is provided. According to the present invention, a method for measuring a three-dimensional shape of a vitreous silica crucible, including a fogging step to form a fog onto an inner surface of the vitreous silica crucible, a three-dimensional shape measuring step to measure a three-dimensional shape of the inner surface, by measuring a reflected light from the inner surface irradiated with light, is provided.Type: ApplicationFiled: October 31, 2012Publication date: January 8, 2015Applicant: SUMCO CORPORATIONInventors: Toshiaki Sudo, Tadahiro Sato, Ken Kitahara
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Flowable chips and methods for the preparation and use of same, and apparatus for use in the methods
Patent number: 8926749Abstract: A method for recharging a crucible with polycrystalline silicon comprises adding flowable chips to a crucible used in a Czochralski-type process. Flowable chips are polycrystalline silicon particles made from polycrystalline silicon prepared by a chemical vapor deposition process, and flowable chips have a controlled particle size distribution, generally nonspherical morphology, low levels of bulk impurities, and low levels of surface impurities. Flowable chips can be added to the crucible using conventional feeder equipment, such as vibration feeder systems and canister feeder systems.Type: GrantFiled: August 3, 2011Date of Patent: January 6, 2015Assignee: Hemlock Semi ConductorInventors: Arvid Neil Arvidson, Terence Lee Horstman, Michael John Molnar, Chris Tim Schmidt, Roger Dale Spencer, Jr. -
Publication number: 20140373774Abstract: A method for calculating a height position of a silicon melt surface at the time of pulling a CZ silicon single crystal is disclosed, including: obtaining a first crystal diameter measured from a fusion ring on a boundary of the silicon melt and the silicon single crystal by using a CCD camera installed at an arbitrary angle relative to the silicon single crystal, and a second crystal diameter measured by using two CCD cameras installed parallel to both ends of a crystal diameter of the silicon single crystal; and calculating the height position of the silicon melt surface in the crucible during pulling of the silicon single crystal from a difference between the first crystal diameter and the second crystal diameter. As a result, a method for enabling further accurately calculating a height position of a silicon melt surface at the time of pulling a silicon single crystal is provided.Type: ApplicationFiled: January 22, 2013Publication date: December 25, 2014Applicant: SHIN-ETSU HANDOTAI CO., LTD.Inventors: Naoki Masuda, Takahiro Yanagimachi
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Publication number: 20140360425Abstract: The diameter of a single crystal is controlled to a set point diameter during pulling of the single crystal from a melt contained in a crucible and which forms a meniscus at a phase boundary on the edge of the single crystal, the meniscus having a height which corresponds to the distance between the phase boundary and a level of the surface of the melt outside the meniscus, comprising repeatedly: determining the diameter of a bright ring on the meniscus; calculating a diameter of the single crystal while taking into account the diameter of the bright ring and the dependency of the diameter of the bright ring on the height of the meniscus and on the diameter of the single crystal itself; and calculating at least one manipulated variable for controlling the diameter of the single crystal on the basis of the difference between the calculated diameter of the single crystal and the set point diameter of the single crystal.Type: ApplicationFiled: May 23, 2014Publication date: December 11, 2014Applicant: SILTRONIC AGInventor: Thomas SCHROECK
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Patent number: 8906157Abstract: Single crystal composed of silicon with a section having a diameter that remains constant, are pulled by a method wherein the single crystal is pulled with a predefined pulling rate vp having the units [mm/min]; and the diameter of the single crystal in the section having a diameter that remains constant is regulated to the predefined diameter by regulating the heating power of a first heating source which supplies heat to the single crystal and to a region of the melt that adjoins the single crystal and is arranged above the melt, such that diameter fluctuations are corrected with a period duration T that is not longer than (2·18 mm)/vp.Type: GrantFiled: October 28, 2010Date of Patent: December 9, 2014Assignee: Siltronic AGInventors: Thomas Schroeck, Wilfried von Ammon, Claus Kropshofer
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Patent number: 8888911Abstract: The present invention provides a technique which enables production of single crystal silicon having relatively low resistivity by preventing cell growth during crystal growth from occurring, especially in a case where a relatively large amount of dopant is added to a molten silicon raw material. Specifically, the present invention provides a method of producing single crystal silicon by the Czochralski process, comprising producing single crystal silicon having relatively low resistivity by controlling a height of a solid-liquid interface when the single crystal silicon is pulled up.Type: GrantFiled: September 3, 2010Date of Patent: November 18, 2014Assignee: Sumco Techxiv CorporationInventors: Masayuki Uto, Tuneaki Tomonaga, Toshimichi Kubota, Fukuo Ogawa, Yasuhito Narushima
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Publication number: 20140326172Abstract: The present invention provides a method for evaluating a vitreous silica crucible which can measure a three-dimensional shape of the inner surface of the crucible in a non-destructive manner.Type: ApplicationFiled: October 31, 2012Publication date: November 6, 2014Applicant: SUMCO CORPORATIONInventors: Toshiaki Sudo, Tadahiro Sato, Ken Kitahara, Eriko Kitahara, Makiko Kodama
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Patent number: 8871023Abstract: A silicon single crystal pull-up apparatus is provided with a chamber into which an inert gas is introduced; a crucible that supports a silicon melt within the chamber; a heater that heats the silicon melt in the crucible; a lifting device for lifting and lowering the crucible; a thermal radiation shield disposed above the crucible; a cylindrical purging tube that is provided inside the thermal radiation shield so as to straighten the inert gas; a CCD camera that photographs the mirror image of the thermal radiation shield reflected on the liquid surface of the silicon melt through the purging tube; a liquid surface level calculator that calculates the liquid surface level of the silicon melt from the position of the mirror image photographed by the camera; and a conversion table creator that creates a conversion table representing a relationship between the liquid surface level of the silicon melt and the mirror image position obtained.Type: GrantFiled: April 11, 2011Date of Patent: October 28, 2014Assignee: Sumco CorporationInventors: Keiichi Takanashi, Kengo Hayashi, Yasuhito Narushima
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Publication number: 20140290563Abstract: Provided is a method of evaluating quality of a wafer or a single crystal ingot and a method of controlling quality of a single crystal ingot by using the same. The method of evaluating quality of a wafer or a single crystal ingot according to an embodiment may include performing Cu (copper) haze evaluation on a wafer or a slice of a single crystal ingot and Cu haze scoring with respect to the result of the Cu haze evaluation.Type: ApplicationFiled: July 3, 2012Publication date: October 2, 2014Inventors: Yun-Seon Jang, Young-Ho Hong, Yo-Han Jung, Se-Hun Kim
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Patent number: 8835284Abstract: Annealed wafers having reduced residual voids after annealing and reduced deterioration of TDDB characteristics of an oxide film formed on the annealed wafer, while extending the range of nitrogen concentration contained in a silicon single crystal, are prepared by a method wherein crystal pulling conditions are controlled such that a ratio V/G between a crystal pulling rate V and an average axial temperature gradient G is ?0.9×(V/G)crit and ?2.5×(V/G)crit, and hydrogen partial pressure is ?3 Pa and ?40 Pa. The silicon single crystal has a nitrogen concentration of >5×1014 atoms/cm3 and ?6×1015atoms/cm3, a carbon concentration of ?1×1015 atoms/cm3 and ?9×1015 atoms/cm3, and heat treatment is performed in a noble gas atmosphere having an impurity concentration of ?5 ppma, or in a non-oxidizing atmosphere.Type: GrantFiled: December 5, 2011Date of Patent: September 16, 2014Assignee: Siltronic AGInventors: Katsuhiko Nakai, Masamichi Ohkubo
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Patent number: 8821636Abstract: The present invention is a single-crystal manufacturing apparatus based on the Czochralski method having a main chamber configured to accommodate hot zone components including a crucible, and a pull chamber configured to accommodate and take out a single crystal pulled from a raw material melt, the apparatus further comprising a multipurpose chamber interchangeable with the pull chamber, wherein a heating means for heating a raw material charged into the crucible and a cooling means for cooling the hot zone components after pulling the single crystal are placeable in the multipurpose chamber respectively. As a result, there is provided a single-crystal manufacturing apparatus that enables, in manufacture of a single crystal of a large diameter, e.g., approximately 200 mm or more, an operating rate of the single-crystal manufacturing apparatus and productivity of the single crystal to be improved.Type: GrantFiled: April 24, 2009Date of Patent: September 2, 2014Assignee: Shin-Etsu Handotai Co., Ltd.Inventors: Takao Abe, Kouzou Yokota, Kouji Mizuishi
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Patent number: 8801853Abstract: This mechanism for controlling a melt level includes: an optical recording device by which a real image of a furnace internal structural object and a reflected image reflected on the melt surface; and a processing device which, taking a value based on the real image as a reference value, controls the position of the melt surface based on a relationship of a position or a size of the reflected image, a distance between the reflected image and the real image, or amounts of changes thereof to the position of the melt surface. This mechanism for adjusting a melt level includes: the above mechanism for controlling a melt level; and a lifting mechanism which is controlled by the mechanism for controlling a melt level and adjusts the melt surface to the set position.Type: GrantFiled: July 17, 2006Date of Patent: August 12, 2014Assignee: Sumco CorporationInventor: Keiichi Takanashi
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Patent number: 8784559Abstract: A Czochralski (“CZ”) single-crystal growth process system continuously grows crystal boules in a chamber furnace during a single thermal cycle. Finished boules are transferred from the furnace chamber, without need to cool the furnace, to an adjoining cooling chamber for controlled cooling. Controlled cooling is preferably accomplished by transporting boules along a path having an incrementally decreasing temperature. In order to maximize crystal boule yield in a single furnace thermal cycle, the crucible assembly may be recharged with crystal growth aggregate and/or slag may be discharged during the crystal boule growth process without opening the furnace.Type: GrantFiled: September 9, 2010Date of Patent: July 22, 2014Assignee: Siemens Medical Solutions USA, Inc.Inventors: James L. Corbeil, Troy Marlar, Piotr Szupryczynski
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Patent number: 8764900Abstract: The present invention provides an apparatus for producing single crystals according to the Czochralski method, the apparatus including a chamber that can be divided into a plurality of chambers; at least one of the plurality of divided chambers having a circulating coolant passage in which a circulating coolant for cooling the chamber circulates; and measuring means that respectively measure an inlet temperature, an outlet temperature, and a circulating coolant flow rate of the circulating coolant in the circulating coolant passage; the apparatus further including a calculating means that calculates a quantity of heat removed from the chamber and/or a proportion of the quantity of removed heat, from the measured values of the inlet temperature, outlet temperature, and circulating coolant flow rate; and a pulling rate control means that controls a pulling rate of the single crystal based on the resulting quantity of removed heat and/or the resulting proportion of the quantity of removed heat.Type: GrantFiled: August 20, 2007Date of Patent: July 1, 2014Assignee: Shin-Etsu Handotai Co., Ltd.Inventors: Kiyotaka Takano, Masahiko Urano, Ryoji Hoshi
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Patent number: 8758506Abstract: The invention relates to a method for pulling a silicon single crystal from a melt which is contained in a crucible, comprising immersion of a seed crystal into the melt; crystallization of the single crystal on the seed crystal by raising the seed crystal from the melt with a crystal pull speed; widening the diameter of the single crystal to a setpoint diameter in a conical section, comprising control of the crystal pull speed in such a way as to induce a curvature inversion of a growth front of the single crystal in the conical section.Type: GrantFiled: March 16, 2010Date of Patent: June 24, 2014Assignee: Siltronic AGInventor: Markus Baer
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Patent number: 8758507Abstract: Techniques for the formation of silicon ingots and crystals using silicon feedstock of various grades are described. A common feature is adding a predetermined amount of germanium to the melt and performing a crystallization to incorporate germanium into the silicon lattice of respective crystalline silicon materials. Such incorporated germanium results in improvements of respective silicon material characteristics, including increased material strength and improved electrical properties. This leads to positive effects at applying such materials in solar cell manufacturing and at making modules from those solar cells.Type: GrantFiled: November 24, 2010Date of Patent: June 24, 2014Assignee: Silicor Materials Inc.Inventors: Fritz G. Kirscht, Matthias Heuer, Martin Kaes, Kamel Ounadjela
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Patent number: 8753445Abstract: The invention relates to an apparatus and method for growing a high quality Si single crystal ingot and a Si single crystal ingot and wafer produced thereby. The growth apparatus controls the oxygen concentration of the Si single crystal ingot to various values thereby producing the Si single crystal ingot with high productivity and extremely controlled growth defects.Type: GrantFiled: July 5, 2007Date of Patent: June 17, 2014Assignee: Siltron, Inc.Inventor: Hyon-Jong Cho
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Patent number: 8721786Abstract: A Czochralski process (“CZ”) crystal growth method and furnace having a heater capable of generating a heating zone, a crucible within the heating zone and capable of retaining a volume of molten crystal growth material forming a melt line oriented in a designated position within the heating zone, a seed growth rod retractable from the crucible with a rod retraction mechanism, for forming a crystal boule thereon proximal the melt line from the molten crystal growth material. The furnace causes relative movement between the crucible and heating zone as the crystal boule is retracted, so that the melt line is maintained in the designated position within the heating zone. In some embodiments relative movement is based at least in part on sensed weight of the growing crystal boule. In other embodiments the crucible growth rod retraction mechanism are fixed relative to each other by a gantry.Type: GrantFiled: September 8, 2010Date of Patent: May 13, 2014Assignee: Siemens Medical Solutions USA, Inc.Inventors: Mark S. Andreaco, Troy Marlar, Brant Quinton, Piotr Szupryczynski
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Patent number: 8715415Abstract: Provided is a vitreous silica crucible for pulling silicon single crystals, which can melt a silicon raw material in a short time and improve production yield of silicon single crystals by temporal change of an opaque vitreous silica layer. The vitreous silica crucible includes an opaque vitreous silica layer(11) provided on an outer surface thereof and containing plural bubbles, and a transparent vitreous silica layer(12) provided on an inner surface and not containing bubbles substantially. The opaque vitreous silica layer(11) has a bubble diameter distribution in which the content of bubbles having a diameter of less than 40 ?m is 10% or more and less than 30%, the content of bubbles having a diameter of 40 ?m or more and less than 90 ?m is 40% or more and less than 80%, and the content of bubbles having a diameter equal to or more than 90 ?m is 10% or more and less than 30%.Type: GrantFiled: April 1, 2010Date of Patent: May 6, 2014Assignee: Japan Super Quartz CorporationInventors: Makiko Kodama, Hiroshi Kishi, Minoru Kanda
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Publication number: 20140102357Abstract: A method for growing a single crystal in a chamber. The method includes heating raw material to form a melt for forming the single crystal. A crystal seed is then inserted into the melt and pulled from the melt to form a partial ingot, wherein the partial ingot radiates heat. An amount of gas is then introduced into the chamber which corresponds to a size of the partial ingot so as to provide a constant crystallization rate.Type: ApplicationFiled: October 12, 2012Publication date: April 17, 2014Applicant: SIEMENS MEDICAL SOLUTIONS USA, INC.Inventor: Keith Ritter
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Patent number: 8696810Abstract: A pressure differential is applied across a mold sheet and a semiconductor (e.g. silicon) wafer (e.g. for solar cell) is formed thereon. Relaxation of the pressure differential allows release of the wafer. The mold sheet may be cooler than the melt. Heat is extracted almost exclusively through the thickness of the forming wafer. The liquid and solid interface is substantially parallel to the mold sheet. The temperature of the solidifying body is substantially uniform across its width, resulting in low stresses and dislocation density and higher crystallographic quality. The mold sheet must allow flow of gas through it. The melt can be introduced to the sheet by: full area contact with the top of a melt; traversing a partial area contact of melt with the mold sheet, whether horizontal or vertical, or in between; and by dipping the mold into a melt. The grain size can be controlled by many means.Type: GrantFiled: October 18, 2012Date of Patent: April 15, 2014Assignee: 1366 Technologies, Inc.Inventors: Eerik T. Hantsoo, G. D. Stephen Hudelson, Ralf Jonczyk, Adam M. Lorenz, Emanuel M. Sachs, Richard L. Wallace
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Patent number: 8691009Abstract: A pulling apparatus and a method with which especially heavy crystals (5) can be pulled using the Czochralski method utilizing the pulling apparatus. For this purpose the neck (4) of the crystal (5) has an enlargement (10) beneath which extends the support device. This device includes latches (7), which are moved from a resting position into an operating position in which the latches (7) extend beneath the enlargement (10). Each latch (7) is supported on the base body such that it is swivellable about a pivot axis (8) and can assume two stable positions, namely the resting position and the operating position. Each of these positions is defined by a stop on the base body. When the latch rests on the one stop, its center of gravity, viewed from the neck (4), is located on the other side of the pivot axis (8). When the latch rests on the other stop, the center of gravity is located on this side of the pivot axis (8).Type: GrantFiled: April 9, 2009Date of Patent: April 8, 2014Assignee: Siltronic AGInventors: Burkhard Altekrüger, Stefan Henkel, Axel Vonhoff, Erich Tomzig, Dieter Knerer
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Patent number: 8691008Abstract: Pulling systems are disclosed for measuring the weight of an object coupled to a first end of a cable. The cable is routed over a pulley suspended from a load cell. The force exerted by the cable on the pulley is used to calculate the weight of the object. The second end of the cable is coupled to a drum which when rotated pulls the object by wrapping the cable around the drum. An arm is coupled to the pulley at one end and to a frame at another end. A path travelled by the cable between the pulley and the drum is substantially parallel to a longitudinal axis of the arm. Horizontal force components are transmitted by the arm to the frame and do not affect a force component measured by the load cell, thus increasing the accuracy of the calculated weight of the object.Type: GrantFiled: March 18, 2010Date of Patent: April 8, 2014Assignee: MEMC Electronic Materials, Inc.Inventors: Harold Korb, Richard J. Phillips