Characterized By Specified Crystallography Of The Substrate Patents (Class 117/63)
-
Patent number: 11618969Abstract: A SiC single crystal composite includes: a central portion positioned at a center in plan view; and an outer circumferential portion surrounding an outer circumference of the central portion, in which crystal planes of the central portion and the outer circumferential portion are inclined to each other or different from each other, a boundary is present between the central portion and the outer circumferential portion, and a direction of a crystal constituting the central portion and a direction of a crystal constituting the outer circumferential portion are different from each other via the boundary.Type: GrantFiled: November 14, 2017Date of Patent: April 4, 2023Assignees: SHOWA DENKO K.K., DENSO CORPORATIONInventors: Yohei Fujikawa, Hideyuki Uehigashi
-
Patent number: 10689801Abstract: The present invention relates to substrates comprising a coating on the surface thereof containing colorant complexes made from specific anionic dyes complexed with cationic compounds, such as substrates having a coating thereon intended to mimic the look and feel of leather. The inventive colored coatings have superior compatibility, transparency, solvent fastness, non-migration and water fastness properties.Type: GrantFiled: April 10, 2015Date of Patent: June 23, 2020Assignee: Millikan & CompanyInventors: Xiaoyong Michael Hong, Chunping Xie, Brian Sun, Mary E. Mason, Sanjeev K. Dey
-
Patent number: 10612190Abstract: Novel coated substrates comprise a substrate and a coating thereon. The coating comprises a polymeric component and a colored oligomer. The colored oligomer is produced from a reactive dye with nucleophilic compounds, and optionally further complexed with organic cationic compounds.Type: GrantFiled: January 23, 2019Date of Patent: April 7, 2020Assignee: Milliken & CompanyInventors: Xiaoyong Michael Hong, Peter Xie, Brian Sun
-
Patent number: 10584031Abstract: There is provided a nitride crystal substrate made of a nitride crystal with a diameter of 100 mm or more, having on its main surface: a continuous high dislocation density region and a plurality of low dislocation density regions divided by the high dislocation density region, with the main surface not including a polarity inversion domain.Type: GrantFiled: March 1, 2017Date of Patent: March 10, 2020Assignees: SCIOCS COMPANY LIMITED, SUMITOMO CHEMICAL COMPANY, LIMITEDInventors: Takehiro Yoshida, Masatomo Shibata
-
Patent number: 10580974Abstract: A magnetoresistance effect element is provided in which a MR ratio is not likely to decrease even at a high bias voltage. A magnetoresistance effect element according to an aspect of the present invention includes: a first ferromagnetic metal layer; a second ferromagnetic metal layer; a tunnel barrier layer that is provided between the first ferromagnetic metal layer and the second ferromagnetic metal layer, in which the tunnel barrier layer is formed of a non-magnetic oxide having a cubic crystal structure represented by a compositional formula A1-xA?xO (A represents a divalent cation, and A? represents a trivalent cation), a space group of the crystal structure is any one selected from the group consisting of Pm3m, I-43m, and Pm-3m, and the number of A ions is more than the number of A? ions in a primitive lattice of the crystal structure.Type: GrantFiled: December 7, 2016Date of Patent: March 3, 2020Assignee: TDK CORPORATIONInventor: Tomoyuki Sasaki
-
Patent number: 9903069Abstract: Novel coated substrates comprise a substrate and a coating thereon. The coating comprises a polymeric component and a colored oligomer. The colored oligomer is produced from a reactive dye with nucleophilic compounds, and optionally further complexed with organic cationic compounds.Type: GrantFiled: April 10, 2015Date of Patent: February 27, 2018Assignee: Milliken & CompanyInventors: Xiaoyong Michael Hong, Chunping Xie, Brian Sun
-
Patent number: 8945302Abstract: Method for crystal growth from a surfactant of a metal-nonmetal (MN) compound, including the procedures of providing a seed crystal, introducing atoms of a first metal to the seed crystal thus forming a thin liquid metal wetting layer on a surface of the seed crystal, setting a temperature of the seed crystal below a minimal temperature required for dissolving MN molecules in the wetting layer and above a melting point of the first metal, each one of the MN molecules being formed from an atom of a second metal and an atom of a first nonmetal, introducing the MN molecules which form an MN surfactant monolayer, thereby facilitating a formation of the wetting layer between the MN surfactant monolayer and the surface of the seed crystal, and regulating a thickness of the wetting layer, thereby growing an epitaxial layer of the MN compound on the seed crystal.Type: GrantFiled: March 4, 2012Date of Patent: February 3, 2015Assignee: Mosaic Crystals Ltd.Inventor: Moshe Einav
-
Publication number: 20140328742Abstract: The present invention provides a method for producing a Group III nitride crystal, capable of producing a Group III nitride crystal in a large size with few defects and high quality.Type: ApplicationFiled: January 10, 2013Publication date: November 6, 2014Inventors: Yusuke Mori, Mamoru Imade, Masashi Yoshimura, Mihoko Hirao, Masayuki Imanishi
-
Patent number: 8872309Abstract: Group-III nitride crystal composites made up of especially processed crystal slices, cut from III-nitride bulk crystal, whose major surfaces are of {1-10±2}, {11-2±2}, {20-2±1} or {22-4±1} orientation, disposed adjoining each other sideways with the major-surface side of each slice facing up, and III-nitride crystal epitaxially present on the major surfaces of the adjoining slices, with the III-nitride crystal containing, as principal impurities, either silicon atoms or oxygen atoms.Type: GrantFiled: March 3, 2014Date of Patent: October 28, 2014Assignee: Sumitomo Electronic Industries, Ltd.Inventors: Naho Mizuhara, Koji Uematsu, Michimasa Miyanaga, Keisuke Tanizaki, Hideaki Nakahata, Seiji Nakahata, Takuji Okahisa
-
Patent number: 8847363Abstract: A method for producing a Group III nitride crystal includes the steps of cutting a plurality of Group III nitride crystal substrates 10p and 10q having a major surface from a Group III nitride bulk crystal 1, the major surfaces 10pm and 10qm having a plane orientation with an off-angle of five degrees or less with respect to a crystal-geometrically equivalent plane orientation selected from the group consisting of {20?21}, {20?2?1}, {22?41}, and {22?4?1}, transversely arranging the substrates 10p and 10q adjacent to each other such that the major surfaces 10pm and 10qm of the substrates 10p and 10q are parallel to each other and each [0001] direction of the substrates 10p and 10q coincides with each other, and growing a Group III nitride crystal 20 on the major surfaces 10pm and 10qm of the substrates 10p and 10q.Type: GrantFiled: July 29, 2013Date of Patent: September 30, 2014Assignee: Sumitomo Electric Industries, Ltd.Inventors: Koji Uematsu, Hideki Osada, Seiji Nakahata, Shinsuke Fujiwara
-
Patent number: 8709923Abstract: Provided is a method of manufacturing III-nitride crystal having a major surface of plane orientation other than {0001}, designated by choice, the III-nitride crystal manufacturing method including: a step of slicing III-nitride bulk crystal through a plurality of planes defining a predetermined slice thickness in the direction of the designated plane orientation, to produce a plurality of III-nitride crystal substrates having a major surface of the designated plane orientation; a step of disposing the substrates adjoining each other sideways in a manner such that the major surfaces of the substrates parallel each other and such that any difference in slice thickness between two adjoining III-nitride crystal substrates is not greater than 0.1 mm; and a step of growing III-nitride crystal onto the major surfaces of the substrates.Type: GrantFiled: February 8, 2013Date of Patent: April 29, 2014Assignee: Sumitomo Electric Industries, Ltd.Inventors: Naho Mizuhara, Koji Uematsu, Michimasa Miyanaga, Keisuke Tanizaki, Hideaki Nakahata, Seiji Nakahata, Takuji Okahisa
-
Patent number: 8702864Abstract: In a method for growing a silicon carbide single crystal on a silicon carbide single crystal substrate by contacting the substrate with a solution containing C prepared by dissolving C into the melt that contains Cr and X, which consists of at least one element of Ce and Nd, such that a proportion of Cr in a whole composition of the melt is in a range of 30 to 70 at. %, and a proportion of X in the whole composition of the melt is in a range of 0.5 at. % to 20 at. % in the case where X is Ce, or in a range of 1 at. % to 25 at. % in the case where X is Nd, and the silicon carbide single crystal is grown from the solution.Type: GrantFiled: January 14, 2009Date of Patent: April 22, 2014Assignee: Toyota Jidosha Kabushiki KaishaInventors: Yukio Terashima, Yasuyuki Fujiwara
-
Patent number: 8696812Abstract: Thin films of ferroelectric material with a high mole fraction of Pb(A2+1/3B5+2/3)O3 substantially in a perovskite phase, wherein A is zinc or a combination of zinc and magnesium, and B is a valence 5 element such as niobium or tantalum, have been prepared. Typically, the mole fraction of Pb(A2+1/3B5+2/3)O3 in the ferroelectric material is >0.7. The method for preparing the thin films of ferroelectric material comprises providing a precursor solution containing lead, A2+, and B5+; modifying the precursor solution by addition of a polymer species thereto; applying the modified precursor solution to a surface of a substrate and forming a coating thereon; and (d) subjecting the coating to a heat treatment and forming the film in the perovskite phase. Optimal results have been obtained with PEG200 as the polymer species.Type: GrantFiled: May 4, 2010Date of Patent: April 15, 2014Assignee: Agency for Science, Technology and ResearchInventors: Kui Yao, Shuhui Yu, Francis Eng Hock Tay
-
Patent number: 8653722Abstract: The present disclosure provides a manufacturing method of a quartz-crystal device, in which its lid and base is manufactured with smaller thermal expansion coefficient between AT-cut quartz-crystal wafer.Type: GrantFiled: August 1, 2011Date of Patent: February 18, 2014Assignee: Nihon Dempa Kogyo Co., Ltd.Inventor: Shuichi Mizusawa
-
Publication number: 20130269596Abstract: Provided is a feed material for epitaxial growth of a monocrystalline silicon carbide capable of increasing the rate of epitaxial growth of silicon carbide. A feed material 11 for epitaxial growth of a monocrystalline silicon carbide includes a surface layer containing a polycrystalline silicon carbide with a 3C crystal polymorph. Upon X-ray diffraction of the surface layer, a diffraction peak corresponding to a (111) crystal plane and a diffraction peak other than the diffraction peak corresponding to the (111) crystal plane are observed as diffraction peaks corresponding to the polycrystalline silicon carbide with a 3C crystal polymorph.Type: ApplicationFiled: June 29, 2011Publication date: October 17, 2013Applicant: TOYO TANSO CO., LTD.Inventors: Satoshi Torimi, Satoru Nogami, Tsuyoshi Matsumoto
-
Publication number: 20130269597Abstract: Provided is an inexpensive seed material for liquid phase epitaxial growth of silicon carbide. A seed material 12 for liquid phase epitaxial growth of a monocrystalline silicon carbide includes a surface layer containing a polycrystalline silicon carbide with a 3C crystal polymorph. Upon X-ray diffraction of the surface layer thereof, a first-order diffraction peak corresponding to a (111) crystal plane is observed as a diffraction peak corresponding to the polycrystalline silicon carbide with a 3C crystal polymorph but no other first-order diffraction peak having a diffraction intensity of 10% or more of the diffraction intensity of the first-order diffraction peak corresponding to the (111) crystal plane is observed.Type: ApplicationFiled: June 29, 2011Publication date: October 17, 2013Applicant: TOYO TANSO CO., LTD.Inventors: Satoshi Torimi, Satoru Nogami, Tsuyoshi Matsumoto
-
Publication number: 20130263774Abstract: Provided is an inexpensive seed material for liquid phase epitaxial growth of silicon carbide. A seed material 12 for liquid phase epitaxial growth of a monocrystalline silicon carbide includes a surface layer containing a polycrystalline silicon carbide with a 3C crystal polymorph. Upon Raman spectroscopic analysis of the surface layer with an excitation wavelength of 532 nm, a peak other than a TO peak and an LO peak is observed as a peak derived from the polycrystalline silicon carbide with a 3C crystal polymorph.Type: ApplicationFiled: June 29, 2011Publication date: October 10, 2013Applicant: TOYO TANSO CO., LTD.Inventors: Satoshi Torimi, Satoru Nogami, Tsuyoshi Matsumoto
-
Patent number: 8501592Abstract: Freestanding III-nitride single-crystal substrates whose average dislocation density is not greater than 5×105 cm?2 and that are fracture resistant, and a method of manufacturing semiconductor devices utilizing such freestanding III-nitride single-crystal substrates are made available. The freestanding III-nitride single-crystal substrate includes one or more high-dislocation-density regions (20h), and a plurality of low-dislocation-density regions (20k) in which the dislocation density is lower than that of the high-dislocation-density regions (20h), wherein the average dislocation density is not greater than 5×105 cm?2. Herein, the ratio of the dislocation density of the high-dislocation-density region(s) (20h) to the average dislocation density is sufficiently large to check the propagation of cracks in the substrate. And the semiconductor device manufacturing method utilizes the freestanding III-nitride single crystal substrate (20p).Type: GrantFiled: January 14, 2011Date of Patent: August 6, 2013Assignee: Sumitomo Electric Industries, Ltd.Inventors: Shinsuke Fujiwara, Seiji Nakahata
-
Patent number: 8454747Abstract: A method for producing a single-crystal thin film includes, for example, applying a chemical solution containing raw materials for a single-crystal thin film composed of (BaxSryCaz)TiO3 (wherein x+y+z=1.0) by spin coating on a thin film composed of BaZrO3 formed on a MgO(100) surface of a MgO(100) substrate and subjecting the applied chemical solution to heat treatment at a temperature at which orientation occurs, thereby epitaxially growing a single-crystal thin film composed of (BaxSryCaz)TiO3.Type: GrantFiled: October 29, 2009Date of Patent: June 4, 2013Assignee: Murata Manufacturing Co., Ltd.Inventor: Tadasu Hosokura
-
Patent number: 8404042Abstract: III-nitride crystal composites are made up of especially processed crystal slices cut from III-nitride bulk crystal having, ordinarily, a {0001} major surface and disposed adjoining each other sideways, and of III-nitride crystal epitaxially on the bulk-crystal slices. The slices are arranged in such a way that their major surfaces parallel each other, but are not necessarily flush with each other, and so that the [0001] directions in the slices are oriented in the same way.Type: GrantFiled: August 2, 2012Date of Patent: March 26, 2013Assignee: Sumitomo Electric Industries, Ltd.Inventors: Naho Mizuhara, Koji Uematsu, Michimasa Miyanaga, Keisuke Tanizaki, Hideaki Nakahata, Seiji Nakahata, Takuji Okahisa
-
Publication number: 20130061799Abstract: A method of manufacturing a group 13 nitride crystal includes a crystal growth process to form the group 13 nitride crystal by growing the group 13 nitride crystal having a hexagonal crystal structure from a seed crystal which is a gallium nitride crystal having a hexagonal crystal structure in which a length “L” in a c-axis direction is 9.7 mm or more, and a ratio L/d of the length “L” to a crystal diameter “d” in a c-plane is larger than 0.813. The crystal growth process includes a process of forming an outer periphery containing a {10-10} plane and an outer periphery containing a {10-11} plane at side surfaces of the group 13 nitride crystal, and forming an outer periphery containing a {0001} plane at a bottom surface of the group 13 nitride crystal.Type: ApplicationFiled: August 23, 2012Publication date: March 14, 2013Applicant: RICOH COMPANY, LTD.Inventors: Masahiro HAYASHI, Seiji SARAYAMA, Takashi SATOH, Hiroshi NAMBU, Chiharu KIMURA, Naoya MIYOSHI
-
Patent number: 8310030Abstract: Affords methods of manufacturing bulk III-nitride crystals whereby at least the surface dislocation density is low globally. The present III-nitride crystal manufacturing method includes: a step of preparing an undersubstrate (1) containing a III-nitride seed crystal, the III-nitride seed crystal having a matrix (1s), and inversion domains (1t) in which the polarity in the <0001> directions is inverted with respect to the matrix (1s); and a step of growing a III-nitride crystal (10) onto the matrix (1s) and inversion domains (it) of the undersubstrate (1) by a liquid-phase technique; and is characterized in that a first region (10s), being where the growth rate of III-nitride crystal (10) growing onto the matrix (1s) is greater, covers second regions (10t), being where the growth rate of III-nitride crystal (10) growing onto the inversion domains (1t) is lesser.Type: GrantFiled: July 7, 2011Date of Patent: November 13, 2012Assignee: Sumitomo Electric Industries, Ltd.Inventors: Ryu Hirota, Koji Uematsu, Tomohiro Kawase
-
Patent number: 8287644Abstract: In a method for growing a silicon carbide single crystal on a silicon carbide single crystal substrate by contacting the substrate with a solution containing C by dissolving C into the melt that contains Si, Cr and X, which consists of at least one element of Sn, In and Ga, such that the proportion of Cr in the whole composition of the melt is in a range of 30 to 70 at. %, and the proportion of X is in a range of 1 to 25 at. %, and the silicon carbide crystal is grown from the solution.Type: GrantFiled: January 14, 2009Date of Patent: October 16, 2012Assignee: Toyota Jidosha Kabushiki KaishaInventors: Yukio Terashima, Yasuyuki Fujiwara
-
Publication number: 20120251431Abstract: A method for producing a nitride crystal, comprising growing a nitride crystal on the surface of a seed crystal put in a reactor while the temperature and the pressure inside the reactor that contains, as put thereinto, a seed crystal having a hexagonal-system crystal structure, a nitrogen-containing solvent, a starting material, and a mineralizing agent containing fluorine and at least one halogen element selected from chlorine, bromine and iodine are so controlled that the solvent therein could be in a supercritical state and/or a subcritical state to thereby grow a nitride crystal on the surface of the seed crystal in the reactor.Type: ApplicationFiled: March 22, 2012Publication date: October 4, 2012Applicant: MITSUBISHI CHEMICAL CORPORATIONInventors: Hideo FUJISAWA, Yutaka Mikawa, Kazunori Kamada
-
Patent number: 8258051Abstract: The present III-nitride crystal manufacturing method, a method of manufacturing a III-nitride crystal (20) having a major surface (20m) of plane orientation other than {0001}, designated by choice, includes: a step of slicing III-nitride bulk crystal (1) into a plurality of III-nitride crystal substrates (10p), (10q) having major surfaces (10pm), (10qm) of the designated plane orientation; a step of disposing the substrates (10p), (10q) adjoining each other sideways in such a way that the major surfaces (10pm), (10qm) of the substrates (10p), (10q) parallel each other and so that the [0001] directions in the substrates (10p), (10q) are oriented in the same way; and a step of growing III-nitride crystal (20) onto the major surfaces (10pm), (10qm) of the substrates (10p), (10q).Type: GrantFiled: May 17, 2009Date of Patent: September 4, 2012Assignee: Sumitomo Electric Industries, Ltd.Inventors: Naho Mizuhara, Koji Uematsu, Michimasa Miyanaga, Keisuke Tanizaki, Hideaki Nakahata, Seiji Nakahata, Takuji Okahisa
-
Publication number: 20120070962Abstract: Freestanding III-nitride single-crystal substrates whose average dislocation density is not greater than 5×105 cm?2 and that are fracture resistant, and a method of manufacturing semiconductor devices utilizing such freestanding III-nitride single-crystal substrates are made available. The freestanding III-nitride single-crystal substrate includes one or more high-dislocation-density regions (20h), and a plurality of low-dislocation-density regions (20k) in which the dislocation density is lower than that of the high-dislocation-density regions (20h), wherein the average dislocation density is not greater than 5×105 cm?2. Herein, the ratio of the dislocation density of the high-dislocation-density region(s) (20h) to the average dislocation density is sufficiently large to check the propagation of cracks in the substrate. And the semiconductor device manufacturing method utilizes the freestanding III-nitride single crystal substrate (20p).Type: ApplicationFiled: January 14, 2011Publication date: March 22, 2012Inventors: Shinsuke Fujiwara, Seiji Nakahata
-
Publication number: 20110297223Abstract: In order to produce silicon wafers, liquid ultra-pure silicon is solidified on a silicon monocrystalline seed arranged in the bottom area of a crucible and having a seed surface comprising a {110}-crystal orientation and an edge surface having a {100}-crystal orientation starting from the bottom of the crucible, thus forming a silicon block on the seed surface of the silicon monocrystalline seed which largely takes over the {110}-crystal orientation. Subsequently, the silicon block is divided into wafers with a wafer surface having a {100}-crystal orientation.Type: ApplicationFiled: June 7, 2011Publication date: December 8, 2011Applicant: SOLARWORLD INNOVATIONS GMBHInventors: Andreas KRAUSE, Juliane WALTER, Marc DIETRICH, Josef STENZENBERGER
-
Patent number: 7999319Abstract: The present invention discloses the use of edge-angle-optimized solid phase epitaxy for forming hybrid orientation substrates comprising changed-orientation Si device regions free of the trench-edge defects typically seen when trench-isolated regions of Si are recrystallized to the orientation of an underlying single-crystal Si template after an amorphization step. For the case of amorphized Si regions recrystallizing to (100) surface orientation, the trench-edge-defect-free recrystallization of edge-angle-optimized solid phase epitaxy may be achieved in rectilinear Si device regions whose edges align with the (100) crystal's in-plane <100> directions.Type: GrantFiled: March 7, 2008Date of Patent: August 16, 2011Assignee: International Business Machines CorporationInventors: Katherine L. Saenger, Chun-yung Sung, Haizhou Yin
-
Patent number: 7988784Abstract: It is used a substrate main body 1 having a side face 1b and a pair of main faces 1a and an underlying film 2 of a single crystal of a nitride of a metal belonging to the group III formed at least on one main face of the substrate main body 1. A single crystal 3 of a nitride of a metal belonging to the group III is grown on the main face 1a of the substrate main body 1 by a liquid phase process. The underlying film 2 has a shape of a convex figure in a plan view. A surface 4 without the underlying film thereon surrounds the entire circumference of the underlying film 2. The single crystal 3 of a nitride of a metal belonging to the group III grown on the underlying film 2 is not brought into contact with a single crystal of a nitride of a metal belonging to group III formed on another underlying film.Type: GrantFiled: July 23, 2010Date of Patent: August 2, 2011Assignee: NGK Insulators, Ltd.Inventors: Takayuki Hirao, Katsuhiro Imai, Mikiya Ichimura
-
Publication number: 20110089431Abstract: A method for producing a compound single crystal includes a process (I) of growing the compound single crystal while causing an anti-phase boundary and a stacking fault to equivalently occur in a <110> direction parallel to the surface, the stacking fault being attributable to the elements A and B; a process (II) of merging and annihilating the stacking fault, attributable to the element A, and the anti-phase boundary, which occurs in the process (I); a process (III) of vanishing the stacking fault attributable to the element B, which occurs in the process (I); and a process (IV) of completely merging and annihilating the anti-phase boundary. The process (IV) is carried out simultaneously with the processes (II) and (III) or after the processes (II) and (III).Type: ApplicationFiled: October 15, 2010Publication date: April 21, 2011Applicant: HOYA CORPORATIONInventors: Kuniaki YAGI, Takahisa SUZUKI, Yasutaka YANAGISAWA, Masao HIROSE, Noriko SATO, Junya KOIZUMI, Hiroyuki NAGASAWA
-
Publication number: 20110012233Abstract: A group III nitride crystal substrate is provided in which, in connection with plane spacing of arbitrary specific parallel crystal lattice planes of the group III nitride crystal substrate obtained from X-ray diffraction measurement performed with variation of X-ray penetration depth from a main surface of the crystal substrate while X-ray diffraction conditions of the specific parallel crystal lattice planes of the crystal substrate are satisfied, a uniform distortion at a surface layer of the crystal substrate represented by a value of |d1?d2|/d2 obtained from a plane spacing d1 at the X-ray penetration depth of 0.3 ?m and a plane spacing d2 at the X-ray penetration depth of 5 ?m is equal to or lower than 1.9×10?3, and the main surface has a plane orientation inclined in the <10-10> direction at an angle equal to or greater than 10° and equal to or smaller than 80° with respect to one of (0001) and (000-1) planes of the crystal substrate.Type: ApplicationFiled: July 16, 2010Publication date: January 20, 2011Inventors: Keiji ISHIBASHI, Yusuke Yoshizumi
-
Patent number: 7799158Abstract: A method for producing a crystallographically-oriented ceramic includes the steps of forming a first sheet with a thickness of 10 ?m or less containing a first inorganic material in which grain growth occurs at a first temperature or higher and a second sheet containing a second inorganic material in which grain growth occurs at a second temperature higher than the first temperature, laminating one or more each of the first and second sheets to form a laminated body, firing the laminated body at a temperature equal to or higher than the first temperature and lower than the second temperature to cause grain growth in the first inorganic material, and then firing the laminated body at a temperature equal to or higher than the second temperature to cause grain growth in the second inorganic material in the direction of a crystal plane of the first inorganic material.Type: GrantFiled: January 14, 2008Date of Patent: September 21, 2010Assignee: NGK Insulators, Ltd.Inventors: Shohei Yokoyama, Nobuyuki Kobayashi, Tsutomu Nanataki
-
Publication number: 20100206215Abstract: A method for producing a single-crystal thin film includes, for example, applying a chemical solution containing raw materials for a single-crystal thin film composed of (BaxSryCaz)TiO3 (wherein x+y+z=1.0) by spin coating on a thin film composed of BaZrO3 formed on a MgO(100) surface of a MgO(100) substrate and subjecting the applied chemical solution to heat treatment at a temperature at which orientation occurs, thereby epitaxially growing a single-crystal thin film composed of (BaxSryCaz)TiO3.Type: ApplicationFiled: October 29, 2009Publication date: August 19, 2010Applicant: MURATA MANUFACTURING CO., LTD.Inventor: Tadasu HOSOKURA
-
Patent number: 7637998Abstract: Single crystal SiC, having no fine grain boundaries, a micropipe defect density of 1/cm2 or less and a crystal terrace of 10 micrometer or more is obtained by a high-temperature liquid phase growth method using a very thin Si melt layer. The method does not require temperature difference control between the growing crystal surface and a raw material supply polycrystal and preparation of a doped single crystal SiC is possible.Type: GrantFiled: October 14, 2008Date of Patent: December 29, 2009Assignee: Kwansei Gakuin Educational FoundationInventors: Tadaaki Kaneko, Yasushi Asaoka, Naokatsu Sano
-
Publication number: 20090315150Abstract: Affords methods of manufacturing bulk III-nitride crystals whereby at least the surface dislocation density is low globally. The present III-nitride crystal manufacturing method includes: a step of preparing an undersubstrate (1) containing a III-nitride seed crystal, the III-nitride seed crystal having a matrix (1s), and inversion domains (1t) in which the polarity in the <0001> directions is inverted with respect to the matrix (1s); and a step of growing a III-nitride crystal (10) onto the matrix (1s) and inversion domains (1t) of the undersubstrate (1) by a liquid-phase technique; and is characterized in that a first region (10s), being where the growth rate of III-nitride crystal (10) growing onto the matrix (1s) is greater, covers second regions (10t), being where the growth rate of III-nitride crystal (10) growing onto the inversion domains (1t) is lesser.Type: ApplicationFiled: November 15, 2007Publication date: December 24, 2009Applicant: SUMITOMO ELECTRIC INDUSTRIES, LTD.Inventors: Ryu Hirota, Koji Uematsu, Tomohiro Kawase
-
Patent number: 7396407Abstract: The present invention discloses the use of edge-angle-optimized solid phase epitaxy for forming hybrid orientation substrates comprising changed-orientation Si device regions free of the trench-edge defects typically seen when trench-isolated regions of Si are recrystallized to the orientation of an underlying single-crystal Si template after an amorphization step. For the case of amorphized Si regions recrystallizing to (100) surface orientation, the trench-edge-defect-free recrystallization of edge-angle-optimized solid phase epitaxy may be achieved in rectilinear Si device regions whose edges align with the (100) crystal's in-plane <100> directions.Type: GrantFiled: April 18, 2006Date of Patent: July 8, 2008Assignee: International Business Machines CorporationInventors: Katherine L. Saenger, Chun-yung Sung, Haizhou Yin
-
Publication number: 20080119364Abstract: A method for preparing film oxides deposited on a substrate with a resulting grain boundary junction that is atomistically straight. A bicrystal substrate having a straight grain boundary is prepared as a template. The Miller indices h1, k1, h2, k2 of the two grains of the substrate are chosen such that the misorientation angle of the film is equal to arctan k1/h1+arctan k2/h2. The film is grown on the substrate using a layer-by-layer growth mode.Type: ApplicationFiled: November 27, 2007Publication date: May 22, 2008Inventor: Siu-Wai Chan
-
Patent number: 7221037Abstract: The present invention provides a method of manufacturing a Group III nitride substrate that has less variations in in-plane carrier concentration and includes crystals grown at a high growth rate.Type: GrantFiled: January 15, 2004Date of Patent: May 22, 2007Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Yasuo Kitaoka, Hisashi Minemoto, Isao Kidoguchi, Akihiko Ishibashi
-
Patent number: 7077901Abstract: A process for producing a single crystal silicon wafer, comprising the steps of forming a porous layer on a single crystal silicon substrate comprising a silicon whose concentration of mass number 28 silicon isotope is less than 92.5% on an average; dissolving a starting silicon whose concentration of mass number 28 silicone isotope whose mass number is more than 98% on an average in a melt for liquid-phase epitaxy until said starting silicon becomes to be a supersaturated state in said melt under reductive atmosphere maintained at high temperature: immersing said single crystal silicon substrate in said melt to grow a single crystal silicon layer on the surface of said porous layer of said single crystal silicon substrate; and peeling said single crystal silicon layer from a portion of said porous layer.Type: GrantFiled: March 31, 2003Date of Patent: July 18, 2006Assignee: Canon Kabushiki KaishaInventors: Katsumi Nakagawa, Takao Yonehara, Kazuaki Ohmi, Shoji Nishida
-
Patent number: 7048797Abstract: A liquid-phase growth process for continuously growing a crystal film on a plurality of substrates with respect to their one side surfaces, characterized in that said plurality of substrates are kept afloat on the surface of a flowing solution for liquid-phase epitaxy which comprises a crystallizing material dissolved in a solvent in a supersaturated state and which is flowing in a solution flow passage, and while said plurality of substrates being moved by virtue of said flowing solution in said solution flow passage, a crystal film is grown on the surfaces of said plurality of substrates which are in contact with said flowing solution. A liquid-phase growth apparatus suitable for practicing said liquid-phase growth process.Type: GrantFiled: September 22, 2003Date of Patent: May 23, 2006Assignee: Canon Kabushiki KaishaInventors: Masaki Mizutani, Takehiko Yoshino, Shoji Nishida
-
Patent number: 6875270Abstract: The invention relates to a Bi-substituted rare earth-iron garnet single-crystal film and a method for producing it, and also to a Faraday rotator comprising it. Its object is to provide a magnetic garnet single-crystal film which hardly cracks while it grows or is cooled or polished and worked, and to provide a method for producing it. Its object is also to provide a Faraday rotator produced at high yield by working the magnetic garnet single-crystal film which hardly cracks while it grows or is cooled or polished and worked. In a method for producing a magnetic garnet single-crystal film by growing a Bi-substituted magnetic garnet single crystal in a mode of liquid-phase epitaxial growth, the lattice constant of the growing magnetic garnet single crystal is so controlled that it does not vary or gradually decreases with the growth of the single-crystal film, and then increases with it.Type: GrantFiled: February 9, 2001Date of Patent: April 5, 2005Assignee: TDK CorporationInventors: Atsushi Ohido, Kazuhito Yamasawa
-
Publication number: 20040194689Abstract: An improved method for controlling nucleation sites during superabrasive particle synthesis can provide high quality industrial superabrasive particles with high yield and a narrow size distribution. The synthesis method can include forming a raw material layer, forming a particulate catalyst layer adjacent the raw material layer, and placing crystalline seeds in a predetermined pattern at least partially in the catalyst layer or raw material layer to form a growth precursor. Alternatively, the raw material and catalyst material can be mixed to form a particulate crystal growth layer and then placing the crystalline seeds in a predetermined pattern in the growth layer. Preferably, seeds can be substantially surrounded by catalyst material. The growth precursor can be maintained at a temperature and pressure at which the superabrasive crystal is thermodynamically stable for a time sufficient for a desired degree of growth.Type: ApplicationFiled: March 1, 2004Publication date: October 7, 2004Inventor: Chien-Min Sung
-
Publication number: 20040118338Abstract: A method for the division of single crystals, in particular of GaAs, is provided in which a single crystal (1) to be cut into at least two parts and a cutting tool (2, 3; 8, 8a, 8b, 8c) are moved relative to one another in a direction of advancement (V) and wherein the single crystal (1) is oriented in such a way that a specified crystallographic orientation (K) lies in the cutting plane (T), characterised in that an angle (&rgr;) between the specified crystallographic direction (K) and the direction of advancement (V) is chosen in such a way that forces which act on the cutting tool during cutting in a direction at right angles to the cutting plane compensate one another.Type: ApplicationFiled: April 18, 2003Publication date: June 24, 2004Inventors: Ralf Hammer, Andre Kleinwechter, Tilo Flade, Cornelia Kumann, Ralf Gruszynsky
-
Patent number: 6440212Abstract: A process of making thermoelectric coolers by direct printing of n- and p-type semiconductor materials suitable for making thermoelectric coolers is disclosed. Micro Jet Printing of arrays on n and p-type materials belong to conductive site pads on non-conductive substrate and crystalization of these materials in the preferred direction as they cool produces thermoelectric cooler components without the need for sawing and machining operations. A non-conductive top substrate having conductive bonding pads is secured to the tops of the columns n and p-type semiconductor materials thereby forming an electrical and physical bond to make a thermoelectric cooler package.Type: GrantFiled: February 27, 2001Date of Patent: August 27, 2002Assignee: MicroFab Technologies, Inc.Inventor: Donald J. Hayes
-
Patent number: 6402836Abstract: The invention concerns a method for epitaxial growth of a material on a first solid material from a material melting on the material, characterized in that it comprises: a step of growth of the first material on the substrate, made of a second material; a step whereby crystalline tips of the first material are made to grow from the contact surface between the first material and the melting material; a step which consists in causing crystals to grow laterally from the crystalline tips in a plane parallel to that of the free surface of the melting material.Type: GrantFiled: October 25, 2000Date of Patent: June 11, 2002Assignee: CNRS (Centre National de la Recherche Scientifique)Inventor: André Leycuras
-
Patent number: 6338755Abstract: An amorphous film 2 is formed on a single crystalline substrate 1. Then, the amorphous film is selectively removed by photolithography to form windows 3. Subsequently, the windows 3 are contacted with a supersaturated solution 5 dissolving a given element in supersaturation and thereby, single crystals containing the given element as a constituting element are epitaxially grown in a perpendicular direction to a surface of the single crystalline substrate from the windows. Then, after a given time elapsed, the epitaxial growth is stopped by finishing the contact of the windows with the supersaturated solution 5 and single crystalline members 6 having given sizes and shapes are obtained.Type: GrantFiled: May 9, 2000Date of Patent: January 15, 2002Assignee: The University of TokyoInventor: Tatau Nishinaga
-
Patent number: 6231779Abstract: A single crystal perovskite material is provided having the formula, M&agr;Bi&bgr;M′&ggr;M″&dgr;O3±z, where M is one or more of Na, K, Rb and Cs; M′ is one or more of Ca, Sr, Ba, Pb, Y, La, Pr, Nd, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb and Lu; and M″ is one or more of Ti, Zr, Hf, Sn, Ge, Mg, Zn, Al, Sc, Ga, Nb, Mo, Sb, Ta and W; where z≦0.1; 0.9≦&dgr;≦1.1; &agr;, &bgr; and &ggr; are greater than zero; and (&agr;+&bgr;+&ggr;) is in the range of about 0.75 to 1.1. A perovskite material of the formula, Na&ohgr;M&agr;Bi&bgr;M′&ggr;M″&dgr;O3±z, is provided where M is one or more of K, Rb and Cs; M′ is one or more of Ca, Sr, Ba, Pb, Y, La, Pr, Nd, Sm, Eu, Gd, Th, Dy, Ho, Er, Tm, Yb and Lu; M″ is one or more of Ti, Zr, Hf, Sn, Ge, Mg, Zn, Al, Sc, Ga, Nb, Mo, Sb, Ta and W; where z≦0.1; 0.9≦&dgr;≦1.1; &agr;, &bgr; and &ggr; are greater than zero; and (&agr;+&bgr;+&ggr;) is in the range of about 0.75 to 1.1.Type: GrantFiled: October 19, 1998Date of Patent: May 15, 2001Assignee: Massachusetts Institute of TechnologyInventors: Yet-Ming Chiang, Gregory W. Farrey, Nesbitt W. Hagood, IV, Andrey Soukhojak, Haifeng Wang
-
Patent number: 6103072Abstract: A piezoelectric thin-film device includes: a substrate; and a piezoelectric thin film formed on the substrate, wherein a thickness of the piezoelectric thin film is 1 to 10 .mu.m, a crystal grain size of the piezoelectric thin film is 0.05 to 1 .mu.m, and a surface roughness (Rmax) of the piezoelectric thin film is no more than 1 .mu.m.Type: GrantFiled: February 24, 1998Date of Patent: August 15, 2000Assignee: Seiko Epson CorporationInventors: Tsutomu Nishiwaki, Kouji Sumi, Masami Murai, Masato Shimada
-
Patent number: 5993541Abstract: A process for controlling the formation of ceramics, achievable under ambient conditions, includes preparing a crystallization medium of a ceramic parent solution and spreading an organic monolayer of a hydrogen-bonded network on the air-liquid interface of the solution. For the formation of aragonite, the process uses an undoped calcium bicarbonate solution and a hydrogen-bonded network with a structural motif approximately matching a calcium ion distance in the a-c plane of aragonite. The aragonite product formed has a [010] axis approximately perpendicular to the monolayer. For perovskite materials, such as BSTO ceramics, the microstructure of the product is controlled by changing different functional groups of the organic monolayer which has been spread on the surface of a perovskite parent solution.Type: GrantFiled: July 31, 1996Date of Patent: November 30, 1999Inventors: Arkadi L. Litvin, Suresh Valiyaveettil, David L. Kaplan
-
Patent number: 5840117Abstract: A method for surface flattening a crystal substrate includes (a) processing a surface of a silicon single crystal substrate, the surface deviating by 0.1.degree. or less from the (001) plane, so as to form a processed zone thereon which is an obstacle to the movement of surface steps present on the surface of the silicon single crystal substrate and which is adjacent to a preselected region having a surface to be flattened when viewed on an atomic level; (b) holding the substrate processed in step (a) in a chamber having an adjustable degree of vacuum so that the substrate has a temperature which is controlled by direct-current passage and heating; and (c) heating the substrate to move the surface steps along the substrate from the preselected region and gather the surface steps in the processed zone, thereby forming a flat surface in the preselected region of the substrate when viewed on the atomic level.Type: GrantFiled: August 23, 1996Date of Patent: November 24, 1998Assignee: Agency of Industrial Science & TechnologyInventors: Kunihiro Sakamoto, Atsushi Ando