Abstract: The present invention provides a system and methodology for dummy-dispensing resist though a dispense head while mitigating waste associated with the dummy-dispense process. The dummy dispensed resist is returned to a reservoir from which it was taken. Between substrate applications, the dispense head can be positioned to dispense resist into a return line. The flow of resist from the dispense head keeps resist from drying at the dispense head. By funneling the dummy-dispensed resist into a return line with low volume, for example, waste from the dummy-dispensing process can be mitigated.

Abstract: A simply-constructed paint-spraying platform comprises: a platform body comprising a top wall, a ventilation part, a bottom wall, two support plates, and a backing plate. When in use, the paint-spraying platform is expanded, and the article to be painted is hung on the first and second hooking holes or placed on the backing palate for spraying paint by using a spray gun. Therefore, the advantages including easy carriage, good ventilation, low cost, and enhanced steadiness can be provided.

Abstract: A substrate surface processing apparatus is provided. In the substrate surface processing apparatus, a spin chuck holds a substrate thereon by suction, spins the substrate, and moves up and down the substrate. An upper bowl and a lower bowl surround the spin chuck for receiving a processing solution by which the surface of the substrate is processed. An air outlet is positioned under the lower bowl for exhausting air from the upper and lower bowls. A flow separation protrusion is formed within the upper bowl. It separates an air flow around the substrate into an upward air flow and a downward air flow and exhausts the downward air flow through the air outlet.

Abstract: The resist coating unit (COT) has a spin chuck (41) which holds the wafer to be supplied with a resist liquid, and a process cup (50) which accommodates the spin chuck (41) and exhaustes an atmosphere around the wafer W from a bottom thereof. The process cup (50) comprises a first cup (51) with an outer circumferential wall (61a), and an airflow control member (52) laid out close to the wafer W in the first cup (51) in such a manner as to surround the wafer W. The airflow control member (52) has a vertical cross section of an approximately rectangular shape defined by the upper ring portion (62a) having a cross section of an approximately triangular shape and protruding upward, and a lower ring portion (62b) having a cross section of an approximately triangular shape and protruding downward. An exhaust passage (55) for substantially exhausting the atmosphere around the wafer W is formed between the outer circumferential wall (61a) and the airflow control member (52).

Abstract: An apparatus for fabricating a functional device mounting board comprises a holder for holding a substrate on which functional devices are to be formed, a jet head for ejecting a droplet containing a functional material onto the substrate, and a data input unit for supplying droplet ejection information to the jet head. The jet head ejects the droplets onto the substrate based on the droplet ejection information so as to form the functional device in the functional device forming area. The functional device is formed by allowing a volatile ingredient of the droplet, while allowing a solid component of the droplet to remain on the substrate.

Abstract: The present invention provides a portable system for capturing airborne pollutants and methods for using the portable system. The apparatus includes at least one flexible and maneuverable source containment means that can be connected to an atomizer, such as a spray gun or aerosol can or can be positioned near or over an open container giving off airborne pollutants. At least one suction generator allows air flow from the source containment means to at least one filter that may be attached or detached from its source of suction. After filtration, the apparatus includes at least one exhaust means to remove the treated air from the proximity of the user.

Abstract: A spindle spray coating system including a spindle conveyor system for horizontally transporting parts supported on spindles within the system. A spindle rotation station assembly is also provided for rotating individual spindles supporting parts during spraying. A spray containment closed spray booth for containment of parts supported on spindles during the spray operation by an adjustable spray system to minimize environmental and operator exposure to the coating materials being sprayed. A second spray containment closed spray booth may also be provided for containment of parts supported on spindles during a secondary spray operation by an adjustable secondary spray system. Following the spray operation(s), a vision inspection system is used to inspect the parts that have been coated.

Abstract: A spray box assembly including, in combination, a top spray box, a bottom spray box, the boxes being juxtapositioned to define a pathway therebetween, at least one spray assembly positioned within at least one of the boxes and a supply assembly for supplying a treating solution to the spray assembly to coat product with the treating solution as the product is fed through the pathway and also including a method of coating a product with a treating solution, comprising the steps of feeding the product into a pathway between top spray box and a bottom spray box and spraying the treating solution within at least one of the boxes about the pathway to coat the product with the treating solution as the product is fed through the pathway.

Abstract: Of a substrate-facing surface 24 of an atmosphere blocking member 2, a central area 241 which is faced with an approximately central portion of a substrate S is a flat surface while a periphery edge area 242 which is faced with a periphery edge of the substrate S is an angled surface which becomes closer to the substrate S with a distance toward a periphery edge of the substrate-facing surface 24. Hence, a micro-space SP between the substrate S and the atmosphere blocking member 2 becomes gradually narrower in a direction R which is toward the periphery edge of the substrate S. As an atmosphere gas is fed into the micro-space SP, the atmosphere gas is compressed in the vicinity of a periphery edge of the micro-space SP and a pressure rises. As a result, the micro-space SP becomes positively pressurized as compared with a mist-splashed atmosphere, which effectively prevents a mist from invading other major surface S2 of the substrate S.

Abstract: Water is sprayed from a water nozzle of a water-washing device to wash polluted air in a painting booth, and then, a liquid polymer substance having a character to adsorb a VOC is spayed from an adsorbent spraying nozzle to remove the VOC from the air. A baffle is provided in a discharge duct to prevent the VOC-contained mixed liquid mist from moving with the air. Namely, by causing the air to hit the baffle, the VOC-contained mist turns into drops. Through the water-washing by the water-washing device, VOC adsorption by the mixed liquid and mixed liquid mist removal by the baffle, the polluted air can be sufficiently purified.

Abstract: A system for dispensing an adhesion promoting chemical includes a support plate configured to support a substrate and a dispense nozzle in fluid communication with a source of the adhesion promoting chemical, for example, HMDS. The dispense nozzle is positioned adjacent a peripheral portion of the substrate and at a first radial distance. The system also includes an exhaust aperture in fluid communication with a system exhaust. The exhaust aperture is positioned adjacent to dispense nozzle and at a second radial distance greater than the first radial distance.

Abstract: An efficient coating machine capable of hardening coating on works in a short hardening time with a small-sized hardening oven at reduced costs. The coating machine has a painting booth, a hardening oven and a work transfer device. The work transfer device has a rotary shaft provided at a center of the coating machine, and a plurality of hangers, each holding one piece of work and being turnable about the rotary shaft. The painting booth and the hardening oven are arranged around the rotary shaft into an arc-shaped configuration, respectively. The hardening oven has an arc-shaped work passage adapted to move the works. One piece of work is coated in the painting booth and continuously transferred to the work passage of the hardening oven while being held with each of the hangers and turned about the rotary shaft. In the work passage, the work is blown with hot air fed from a hot air generating device for hardening the coating on the work.

Abstract: A drain port and an exhaust port arranged at the bottom of a cup surrounding a substrate holding unit. A drainage tray is arranged below the cup so as to cover the moving area of the drain port when the substrate holding unit and the cup move in X-directions and Y-directions. An exhaust unit is arranged at a position corresponding to the position of the exhaust port of the cup when the substrate holding unit is in its spin-drying position. The exhaust unit is connected to the exhaust port to suck the interior of the cup when the spin-drying of the substrate is executed. The use of a flexible tube which is always connected to the exhaust port is no longer necessary.

Abstract: An apparatus and method for electrostatically coating a body surface with a coating composition. An apparatus of the present invention includes an enclosure, a mount positioned on the enclosure, and an electrostatic nozzle connected to the mount, the electrostatic nozzle adapted for passing the coating composition for deposition on the body surface. The apparatus further includes a floor surface within the enclosure, the floor surface having a resistive electrical connection.

Abstract: Painting system for painting large objects comprising a paint booth with surrounding walls and a robot installation comprising a plurality of painting robots, each painting robot comprising a stationary base, a stand carried by the base rotatably arranged around a first axis, a first arm carried by the stand rotatably arranged around a second axis, a second arm carried by the first arm rotatably arranged around a third axis and a forth, a fifth and a sixth arm part carried by the second arm for orienting an attached painting tool.

Abstract: A cover for a robot which includes an electrostatic spray gun with a nozzle which sprays charged material. The cover includes an insulating layer adapted to generally surround the robot except at an aperture where the nozzle extends from the cover. The cover also includes a conductor on the insulating layer near the aperture and spaced apart from the robot. A charge source provides an electric charge to the conductor.

Abstract: The invention relates to an installation for coating objects, said installation having, in a manner known per se, a coating chamber which is arranged upstream from a drying chamber. The objects to be coated are carried by skids which are guided through the coating chamber and the drying chamber by means of a skid transport system. Each skid comprises two skid runners, extending parallel to the direction of displacement, and is embodied in such a way that adjacent skids can travel inside each other such that they partially overlap in the direction of displacement. In this way, the objects carried by successive skids can be separated from each other in the coating chamber such that all of the surfaces of the objects to be coated can be easily reached by the application devices.

Abstract: An installation for powder coating articles, in particular vehicle bodies, comprises a coating booth, in which a plurality of application devices for the powder coating may be arranged. The articles to be coated are located during the coating process on a rotating rotary stand. Application devices located in various angular positions relative to the axis of the rotary stand may be charged with powder coatings of different colours. A collecting hopper is located at the bottom of the coating booth, the outlet opening of which collecting hopper may be brought as desired into connection with various recovery devices for powder overspray. To coat articles of different colours, the application devices charged with powder coating of the appropriate colour are activated in each case and the recovery device which collects the powder of the corresponding colour is brought into connection with the outlet opening of the collecting hopper.

Abstract: A painting robot outer arm includes a non-conductive housing mounting a color changer on the outside and a paint canister on the inside connected by an isolating paint transfer line. The paint canister is releasably attached to a piston ram and drive motor by a quick disconnect coupling. The paint supply is isolated from the applied high voltage by cleaning and drying the transfer line. The rate of filling of the canister can be controlled in response to sensed torque applied by a drive motor moving a piston in the paint canister.

Abstract: Methods and systems are provided which are adapted to process a microelectronic topography, particularly in association with an electroless deposition process. In general, the methods may include loading the topography into a chamber, closing the chamber to form an enclosed area, and supplying fluids to the enclosed area. In some embodiments, the fluids may fill the enclosed area. In addition or alternatively, a second enclosed area may be formed about the topography. As such, the provided system may be adapted to form different enclosed areas about a substrate holder. In some cases, the method may include agitating a solution to minimize the accumulation of bubbles upon a wafer during an electroless deposition process. As such, the system provided herein may include a means for agitating a solution in some embodiments. Such a means for agitation may be distinct from the inlet/s used to supply the solution to the chamber.

Abstract: A system and method of coating articles with the method comprising directing a plurality of articles into an enclosure; applying a vehicle carrying a first agent onto the plurality of articles; converted the vehicle into a gaseous state to leave the first agent on each the plurality of articles; collecting the vehicle in the gaseous state; converting the vehicle in the gaseous state back into a reclaimed state to enable one to add a further agent to the reclaimed vehicle so that one can apply the reclaimed vehicle and a further agent onto a further set of articles.

Abstract: After subjected to a developing process, a rinsing process and a replacing process in this order in a developing unit 10A, 10B, a substrate W wet with an anti-drying solution is wet-transported to a supercritical drying unit 20 by a primary transport robot 30. The supercritical drying unit 20 performs a high-pressure drying process (supercritical drying process) in a dedicated manner. Accordingly, by virtue of the presence of the anti-drying solution, the substrate W is effectively prevented from becoming air-dry during the transportation of the substrate W.

Abstract: A substrate processing unit includes: a vertically-movable substrate holder for holding a substrate; a pan surrounding a periphery of the substrate holder; a cell, located below the substrate holder and within the pan, having in its interior a chemical processing section; and a cell cover, capable of closing a top opening of the cell, having a plurality of spray nozzles for separately spraying at least two types of processing liquids, wherein the pan and the cell each have an individual liquid discharge line.

Abstract: A liquid treatment apparatus treating a surface of a substrate held generally horizontally on a stage in a housing by supplying a treating liquid to said surface from a supply nozzle. The liquid treatment apparatus includes a cup body provided so as to surround the substrate held in the substrate holding part laterally, the cup body being mounted detachably to a base inside the housing from an upward direction thereof; a cup body holding part holding the cup body detachably; and an elevating mechanism moving the cup body holding part up and down between a first position at which the cup body is mounted upon the base body and a second position located above the first position.

Abstract: Powder overspray that is extracted from a spray booth is recovered back to a powder supply that is used to supply powder to the spray guns inside the spray booth. The powder overspray extracted from the booth is separated from the high flow air stream by a separator such as a cyclone separator. The powder falls into a transfer pan and a vacuum is used to convey the powder from the transfer pan to a vacuum receiver. The powder is then discharged to the feed hopper in the feed center. The use of a vacuum to convey powder from the cyclone to the feed center in effect permits substantially all of the powder overspray to be recovered from the spray booth directly to the feed hopper with minimal dwell or residence time within the cyclone or vacuum receiver subsystems during a spraying operation. The receiver can be rotated for easy cleaning, and the vacuum line cleaned by one or more cleaning elements drawn through the vacuum line.

Abstract: A method and apparatus of coating a polymer solution on a substrate such as a semiconductor wafer. The apparatus includes a coating chamber having a rotatable chuck to support a substrate to be coated with a polymer solution. A dispenser to dispense the polymer solution over the substrate extends into the coating chamber. A vapor distributor having a solvent vapor generator communicable with the coating chamber is included to cause a solvent to be transformed into a solvent vapor. A carrier gas is mixed with the solvent vapor to form a carrier-solvent vapor mixture. The carrier-solvent vapor mixture is flown into the coating chamber to saturate the coating chamber. A solvent remover communicable with the coating chamber is included to remove excess solvent that does not get transformed into the solvent vapor to prevent the excess solvent from dropping on the substrate.

Abstract: A coating device includes a box-shaped processing chamber. Slits are respectively provided on four side surfaces of the processing chamber. A box-shaped housing is provided so as to surround the processing chamber. A space is formed between the processing chamber and the housing. A fan filter unit for forming downflow in the space is provided on the top of the housing. Air supplied to the fan filter unit is cleaned by the fan filter unit, and is supplied to the space. The air supplied to the space is supplied to the processing chamber through each of the slits in the processing chamber. This causes a twister-shaped air current to be generated within the processing chamber.

Abstract: A simply-constructed paint-spraying platform comprises: a platform body comprising a top wall, a ventilation part, a bottom wall, two support plates, and a backing plate. When in use, the paint-spraying platform is expanded, and the article to be painted is hung on the first and second hooking holes or placed on the backing palate for spraying paint by using a spray gun. Therefore, the advantages including easy carriage, good ventilation, low cost, and enhanced steadiness can be provided.

Abstract: An apparatus and method for painting a plurality of articles having a paint basin for holding paint, an article conveyor assembly for suspending and delivering articles to the basin, and a paint circulation and application system.

Abstract: A panel for connection with other panels, comprising a rectilinear base member having outer edges, a first rectilinear side member extending from one edge of the base member, the first side member having a first lip extending from an outward edge of the first side member and away from the base member, the first side member further having a second lip extending from an outward edge of the first lip and toward the base member and at an angle between about zero and 90 degrees with respect to the first lip, and a second rectilinear side member extending in substantially the same direction as the first side member, from an opposite edge of the base member, the second side member having a third lip extending toward the base member. Related structural members, enclosures, posts, spray booths and methods for assembling the same which include similar features are provided.

Abstract: An apparatus for introducing a testing material into an optical disc production includes a vessel for holding a test material and a regulator for pressurizing the vessel, wherein the vessel and regulator are connectable to a disc production for using the test material in lieu of bonding material in the disc production.

Abstract: An apparatus causes a substrate to rotate and supplies a treatment liquid to a substrate surface to make a treatment, without concern that a mixed substance is eluted from a cup in the use for a long time, or a thin film comes off from an inside wall surface to be contamination-causing substances even if the cup made of a water-repellent material for collecting a treatment liquid becomes hydrophilic. A cup 16 disposed to surround the sides and underside of a substrate W rotating while being held by a spin chuck 10, and serving to collect a treatment liquid diffused from the substrate to the surroundings, is made of a plastic material. Further, an inside wall surface of an upper-side cup part 24 of the cup 16, being a portion on which the treatment liquid having been diffused from the substrate impinges, is roughened to be a hydrophilic surface.

Abstract: A liquid processing apparatus includes a substrate holding member configured to rotate along with a substrate held thereon in a horizontal state; an annular rotary cup configured to surround the substrate held on the substrate holding member and to rotate along with the substrate; a rotation mechanism configured to integrally rotate the rotary cup and the substrate holding member; and a liquid supply mechanism configured to supply a process liquid onto the substrate. The apparatus further includes an annular drain cup configured to receive the process liquid discharged from the rotary cup, and provided with a drain port; and a circular flow generation element configured to generate a circular flow within the drain cup when the rotary cup and the substrate holding member are rotated, such that the circular flow servers to lead the process liquid within the drain cup to the drain port.

Abstract: A liquid processing apparatus includes a substrate holding member configured to rotate along with a substrate held thereon in a horizontal state; a rotary cup configured to surround the substrate held on the substrate holding member, to rotate along with the substrate, and to receive the process liquid thrown off from the substrate; a rotation mechanism configured to integrally rotate the rotary cup and the substrate holding member; and a liquid supply mechanism configured to supply a process liquid onto the substrate. The apparatus further includes an annular drain cup and an annular exhaust cup with an exhaust port connected thereto to discharge a collected gas component. A gas-flow adjusting mechanism is disposed between the exhaust cup and the exhaust port and configured to adjust a gas flow of the gas component to flow toward the exhaust port from essentially all around within the exhaust cup.

Abstract: An installation for the electrostatic oiling of metal strips, with an integral system for heating the fluid circuits which allows the application of products which are solid at room temperature with melting point of 30-50° C., wherein the main heated components of the installation are constituted by: a container (3) provided with double wall an shell and bottom within which diathermic oil circulates, a heated circulation pump (5); an electrical passage heater (6); heated Duplex filters (7, 13); heated metering pumps (8); heated pipelines (4, 12, 14); a heated booth (20); heated self-priming pump (16).

Abstract: A method for producing an optical information recording medium includes the steps of: coating a solution for forming a dye recording layer onto a surface of a rotating disc-shaped resin substrate; and discharging a cleaning solution from a nozzle onto a peripheral edge to remove the dye recording layer from the peripheral edge, wherein discharge of the cleaning solution is initiated 1.0 to 300 seconds after completion of the coating, and the nozzle is disposed on a plane that extends in a normal line direction of the substrate and includes a straight line representing a discharge direction of the cleaning solution, so that an angle defined by the discharge direction and the normal line is 0 to 60°.

Abstract: A processing equipment includes a chamber, an airflow generator which generates a downward airflow in the chamber, a stage in the chamber, a nozzle which is arranged above the stage. The nozzle has a protector which is arranged around a supply port of the nozzle. The protector protects the supply port form the downward airflow.

Abstract: A liquid processing apparatus includes: a substrate holding member configured to rotate along with a substrate held thereon in a horizontal state; a rotary cup configured to surround the substrate held on the substrate holding member and to rotate along with the substrate; a rotation mechanism configured to integratedly rotate the rotary cup and the substrate holding member; a liquid supply mechanism configured to supply a process liquid onto the substrate; and an exhaust/drain section configured to perform gas-exhausting and liquid-draining of the rotary cup. The exhaust/drain section includes an annular drain cup configured to mainly collect and discharge a process liquid thrown off from the substrate, and an exhaust cup surrounding the drain cup and configured to mainly collect and discharge a gas component from inside and around the rotary cup. Liquid-draining from the drain cup and gas-exhausting from the exhaust cup are performed independently of each other.

Abstract: A multi-stage substrate processing apparatus in which each processing stage is carried out on a substrate while conveying said substrate includes a processing liquid supply device and a drying device arranged successively along a conveying direction of the substrate. The drying device comprises an air knife for drying a processing liquid on the substrate. A plurality of nozzles for supplying the processing liquid onto the substrate are provided in the processing liquid supply device. At least the nozzle in the final stage among the plurality of nozzles is pointed in an opposite direction to the conveying direction of the substrate. This apparatus shortens tact time of the processed substrate.

Abstract: An apparatus for wetting an advancing filament bundle. A fluid is applied by means of a nozzle in the form of a fluid spray jet to the filament bundle advancing in spaced relationship with the nozzle. A portion of the spray jet is shielded before impacting upon the filament bundle, so that the application of fluid to the filament bundle is determined by the degree of shielding of the spray jet. With that, the invention is adapted for finely adjusting the fluid application to the filament bundle.

Abstract: An apparatus for dispensing fluid during semiconductor substrate processing operations. The apparatus includes a first processing chamber, a second processing chamber, and a dispense arm assembly. The apparatus further includes a dispense arm access shutter positioned between the first and second processing chambers and moveable between an open and a closed position. The dispense arm assembly can travel from the first processing chamber to the second processing chamber when the dispense arm assembly is in the open position.

Abstract: A liquid coating device and method for coating a coatable composition on a workpiece to form a coating, wherein a parameter indicative of barometric pressure is measured and at least one thickness-affecting process parameter is adjusted in order to compensate for the effects of variations in barometric pressure on coating thickness uniformity.

Abstract: This is a working post to be utilized for all those functions where air circulation is suggested or required. It is comprised of three main parts: an airflow generator, which is connected to an air filtering hollow floor and to an air and light filtering hollow roof. The working area is the space between the floor and the roof. The airflow generator contains only one motor that powers simultaneously two fans. It does not need a floor pit nor wall plenums to achieve an extremely efficient, powerful and uniform downdraft air circulation in the working area, and to allow the attainment of a superior finish of the object while providing a clean environment for the operator. It is also simple to operate, cost effective, space effective and energy efficient.

Abstract: A movable spray-painting stand includes a worktable provided with four casters and having a wind-exhausting device and a filtering device assembled thereon. The wind-exhausting device has an air inlet communicating with the wind outlet of the filtering device. A separating device is provided in front of the wind inlet of the filtering device to form a spray painting space. A collapsible work frame is pivotally assembled with the work table and positioned under the separating device, able to be positioned in the spray painting space after articles to be spray painted are placed on its upper plate. The spray painting stand can be moved around freely, and the exhaust and the odor of paint produced during spray painting can be filtered by the filtering device, conforming to environmental protection and ensuring workers' health.

Abstract: An apparatus for applying powder coating material onto large objects such as automotive, truck or other vehicle bodies includes a powder spray booth defining a controlled area within which to apply powder coating material onto the vehicle bodies, a powder kitchen located at a remote position from the powder spray booth, and, a number of feed hoppers located proximate the booth which receive powder coating material from the powder kitchen and supply it to automatically or manually manipulated powder spray guns associated with the booth. Oversprayed powder coating material is removed from the booth interior by a powder collection and recovery system which transmits the oversprayed powder back to the powder kitchen for recirculation to the powder spray guns.

Abstract: A bottom tray is supported by four wheels and is spaced apart from a bottom surface of a top frame member having two side walls and a back wall enclosing a grated work surface. A pair of pressurized tanks containing ingredients for metallizing an object are mounted under the side walls on the bottom tray. In addition, waste liquid tanks are positioned in a middle area of the bottom tray. Three spray guns are each attached by hoses to an air pressure source and a pressurized tank so that an operator can metallize an object by sequentially operating the spray guns.

Abstract: The present invention provides a system and methodology for dummy-dispensing resist though a dispense head while mitigating waste associated with the dummy-dispense process. The dummy dispensed resist is returned to a reservoir from which it was taken. Between substrate applications, the dispense head can be positioned to dispense resist into a return line. The flow of resist from the dispense head keeps resist from drying at the dispense head. By funneling the dummy-dispensed resist into a return line with low volume, for example, waste from the dummy-dispensing process can be mitigated.

Abstract: When vehicle wheels are powder-coated with powder coating, those surfaces on which no coating is wanted are always also coated. To suck off the powder coating from these surface areas before it is baked in, a device which includes a conveyor system, an electronic camera and a suction station is used. The electronic camera records the axial and angular position of the vehicle wheels which pass it, and supplies corresponding data to a controller. After a certain time delay, this causes a suction head in the suction station to move, in such a way that it approaches the vehicle wheel with appropriate alignment of its axis and angular position, and using suction nozzles sucks off those surfaces of the vehicle wheel on which the powder coating is not wanted. During the suction process, the suction head moves together with the vehicle wheel, at the same speed.

Abstract: This invention relates to a device for moistening envelope flaps, comprising a reservoir of liquid, means for pumping this liquid and, disposed transversely with respect to a direction of advance of the envelopes and inclined with respect to a horizontal plane for supporting these envelopes, means for spraying on the envelope flaps a part of the liquid pumped from the reservoir of liquid. This inclination of the spray means corresponds to the angle of inclination of the flaps of envelopes with folded down flaps.

Abstract: A device is suggested which includes a carrier (1) for receiving the disk-shaped object (10), a liquid supply device (17) for applying liquid onto a disk-shaped object (10) located on the carrier (1), and a liquid catch ring (2), which is positioned essentially coaxially around the carrier (1) and is rotatable around the axis of the liquid catch ring (2).