Abstract: A vapor-phase type heating method includes: collecting, in the vapor tank, the heat transfer liquid which has come into contact with a heating target object, has cooled to liquefy, and has fallen down as droplets from a front surface of the heating target object to a lower portion of a heating furnace; resupplying, to the heating furnace, heated gas to which the vapor has been supplied and which has been formed by supplying the vapor from the vapor tank to heated gas obtained from heating the heating target object discharged from the heating furnace to a circulation pathway; and heating the heating target object, at a predetermined rate of temperature rise in a state of an even distribution of the vapor of the heat transfer liquid by maintaining the vapor of the heat transfer liquid in a predetermined amount in the heating furnace by the collection and the supply.

Abstract: A thermoregulation system of rotating metal cylinders in plants for the extrusion and conversion/transformation of plastic films includes heating elements applied to each rotating cylinder, wherein the heating elements are infrared heating elements, and wherein the rotating cylinder includes a metal tube rotating around a fixed shaft, which is rigidly connected to two side plates.

Abstract: Apparatus to provide heated gas to punted media. The apparatus includes a housing including: an inlet to receive gas from a fan; and an outlet defining at least one slot shaped nozzle to provide heated gas to printed media, the housing defining a direct path between the inlet and the outlet. The apparatus also includes a heater positioned within the housing to heat gas from the inlet.

Abstract: A skin treatment device (100) comprises: —a housing (101); —a treatment action performer (110) arranged within the housing (101) for performing a treatment action on the user's skin (2) through an output window (103); —a speed sensor (120) for sensing a relative speed between the housing and the user's skin; —a control device (140) provided with an associated memory (141) containing information defining a desired displacement speed, the control device receiving an output signal from the speed sensor; —an optical speed deviation indicator system (400; 600) comprising a position reference (411; 101) and means for generating an optical spot (412; 612) of variable position with respect to the position reference. The control device controls the optical speed deviation indicator system on the basis of the output signal received from the speed sensor and the information in its memory.

Abstract: A first water spray unit that sprays water into the gaseous mixture containing the flux component, a separation unit having an introduction port for introducing the gaseous mixture into which water is sprayed from the first water spray unit, and a second water spray unit that forms a precipitation flow inside of the separation unit. The separation unit uses a swirling flow to separate the flow component from the gaseous mixture.

Abstract: A flux recovery device that recovers a flux component from a gaseous mixture. The flux recovery device includes a first water spray unit that sprays water into a gaseous mixture containing the flux component, a separation unit that includes an introduction port for introducing the gaseous mixture into which water is sprayed from the first water spray unit, and a second water spray unit that forms a precipitation flow inside of the separation unit. The separation unit uses a swirling flow to separate the flux component from the gaseous mixture. A condensation unit cools water vapor generated in the separation unit to change the water vapor to water droplets, thereby removing the water vapor. Water vapor generated in a separation unit is cooled by a condensation unit, recovered as water droplets, and reused.

Abstract: A continuous annealing furnace for annealing steel strips that is a vertical-type annealing furnace is configured so that part of gas inside the furnace is drawn and introduced to a refiner disposed outside the furnace including an oxygen removing apparatus and a dehumidifying apparatus, oxygen and moisture contained in the gas are removed to lower the dew point of the gas, and the gas having a lowered dew point is put back into the furnace. At least one gas inlet through which gas is drawn from the furnace into the refiner is disposed in the vicinity of the entry side of the furnace at a distance of 6 m or less in the vertical direction and 3 m or less in the furnace-length direction from the steel-strip-introduction section located at the lower part of the heating zone.

Abstract: A device for separating overspray from the cabin exhaust air of painting systems includes at least one separating surface, on which the exhaust air is guided and which is connected to a pole of a high voltage source. An electrode device arranged in the air stream is associated with the separating surface and connected to the other pole of the high voltage source. The separated paint overspray is transported away from the separating surface with a separating fluid, which flows over the separating surface-from top to bottom. A discharge device having a channel open at the top is present, from which the separating fluid exits along the longitudinal extension of the discharge device when the level of the separating fluid in the channel exceeds an exit level, and reaches the separating surface such that the separating fluid flows downward on the separating surface as a substantially adhering layer.

Abstract: The invention provides a vertical annealing furnace including a heating zone and a soaking zone without any partition wall therebetween. The furnace has furnace-to-refiner gas suction openings disposed in a lower portion of a joint between the soaking zone and a cooling zone and in the heating zone and/or the soaking zone except a region extending 6 m in a vertical direction and 3 m in a furnace length direction both from a steel strip inlet at a lower portion of the heating zone. The furnace has refiner-to-furnace gas ejection openings disposed in a region in the joint between the soaking zone and the cooling zone, the region being located above the pass line in the joint, and in a region in the heating zone located above 2 m below the center of upper hearth rolls in the vertical direction.

Abstract: A chemical bath deposition apparatus is presented to prepare different thin films on continuous flexible substrates in roll-to-roll processes. In particular, they are useful to deposit CdS or ZnS buffer layers in manufacture of thin film solar cells. This apparatus deposits thin films onto vertically travelling continuous flexible workpieces delivered by a roll-to-roll system. The thin films are deposited with continuously spraying the reaction solutions from their freshly mixed styles to gradually aged forms until the designed thickness is obtained. The substrates and the solutions are heated to a reaction temperature. During the deposition processes, the front surfaces of the flexible substrates are totally covered with the sprayed solutions but the substrate backsides are remained dry. The reaction ambience inside the reactor can be isolated from the outside atmosphere. The apparatus is designed to generate a minimum amount of waste solutions for chemical treatments.

Abstract: A substrate formed of an organic-inorganic hybrid material and provided with a reinforcement member in an inner periphery portion is used, as a signal transfer substrate, in a method for procuring a multilayer information recording medium having “n” information recording layers (“n” is an integer of two or more), the method including: applying an ultraviolet curable resin on a “k”th information recording layer (“k” is an integer of from 1 to (n?1)); bonding the signal transfer substrate having a signal surface including a concavo-convex shaped signal portion, to the applied resin, with the signal surface facing the resin; curing the resin by applying an ultraviolet ray to the resin from the substrate side while the substrate is bonded to the resin; and peeling the substrate from the cured resin by warping the inner periphery portion of the substrate. This method enables the signal transfer substrate to be used repeatedly.

Abstract: A device and a method for chemically or electrolytically treating work pieces (1) are proposed in an effort to avoid irregular contours of finest conductive structures, pads and lands as well as bridges (shorts) on the one side or breaks on printed circuit boards on the other side. The device comprises processing tanks (2) for the treating of work pieces and a conveyor system for the transport thereof. The conveyor system comprises at least one transport carriage (18), at least one holding element (14, 25) and at least one connection means (12, 13, 35) between the transport carriage(s) and the holding element(s). The processing tanks adjoined with a clean room zone (3). The work pieces are conveyed through the clean room zone using the conveyor system.

Abstract: A liquid processing apparatus includes a substrate holding unit arranged within a processing cup and configured to horizontally hold a substrate, a rotating mechanism configured to rotate the substrate holding unit about a vertical axis, a processing liquid supply unit configured to supply a processing liquid onto a surface of the substrate, and an exhaust mechanism configured to discharge an atmospheric gas around the substrate. The exhaust mechanism includes an exhaust flow path connected to an exhaust port formed at the processing cup, a circulation flow path branched from the exhaust flow path and configured to communicate with the processing cup, a gas liquid separator, a first regulator valve installed at one end of the exhaust flow path, and a second regulator valve installed at the other end of the exhaust flow path.

Abstract: In a method for removing solids from overspray produced when painting objects, the overspray is absorbed by an air flow and is conducted to a deposition surface, across which a deposition liquid flows and where a large part of at least the solids is transferred into the deposition liquid, is discharged by said deposition liquid, and is removed from the liquid by means of a deposition process. A deposition liquid is used and disclosed which comprises a detackifying medium and an optional suspending fluid, paint overspray particles being detackified using the detackifying medium.

Abstract: To provide a filter device for separating paint overspray from a raw gas flow containing overspray particles, including a casing, which delimits an interior of the filter device, in which at least one filter element is arranged, and at least one inlet channel, through which the raw gas flow enters the interior of the filter device, in which the raw gas flow is stabilized by the inlet channel even with high flow speeds in the constriction of the inlet channel, it is proposed that the filter device has an intake channel, which runs into the inlet channel upstream of an end of the inlet channel on the interior side and connects the inlet channel to the interior of the filter device.

Abstract: Equipment and a method for preheating a continuously moving steel strip, in particular before feeding the same into a continuous annealing or hot-dip galvanizing furnace, involves the continuous movement of the steel strip in a preheating chamber including a preheating circuit having at least one preheating tube, the inner surface of which is in contact with externally-recovered burnt gases (e.g. from the furnace). A portion of the outer surface of the preheating tube is disposed directly opposite a surface of the strip in order to provide a first preheating mode by irradiating heat onto the strip and the walls of the chamber, and a second preheating mode, mainly by convection, of a gas constituting a controlled atmosphere in the preheating chamber.

Abstract: Disclosed herein is an apparatus for manufacturing a ceramic green sheet, including: an applying unit that applies slurry to a film; a drying unit that dries the slurry applied to the film and forms the ceramic green sheet; and a pollution preventing unit having the drying unit therein to prevent pollution materials from moving between the drying unit and the outside environment.

Abstract: A system and method is shown for coating an article, including a chamber that can be at least partially open to surrounding air to allow free flow of air through the chamber and recovery of vapor produced during a coating operation within the chamber. The chamber can include a support surface that is adapted to support the article during a coating process, and a coating device within the chamber can be adapted to selectively apply a coating of a fluorocarbon in a fluorinated solvent to at least a potion of an article supported on the support surface.

Abstract: A system and method is shown for coating an article, including a chamber that can be at least partially open to surrounding air to allow free flow of air through the chamber and recovery of vapor produced during a coating operation within the chamber. The chamber can include a support surface that is adapted to support the article during a coating process, and a coating device within the chamber can be adapted to selectively apply a coating of a fluorocarbon in a fluorinated solvent to at least a potion of an article supported on the support surface.

Abstract: An object of the invention is to provide a substrate treatment device that can lengthen the maintenance cycle, and prevent any by-product from falling on substrates even if it is accumulated, and a manufacturing method of such a substrate treatment device, and an embodiment of the invention is directed, comprising: a treatment chamber that subjects a substrate to a treatment while keeping hold of it by a substrate retention member; a reaction tube that configures the treatment chamber; a heating device that is disposed around the reaction tube for heating the treatment chamber; and an exhaust tube that is linked to the reaction tube on an upper side than the substrate inside of the treatment chamber and is extended downward from the heating device, and exhausts a gas inside of the reaction tube in which an extension portion as a result of the extension is disposed away from the reaction tube.

Abstract: An exhaust gas trap for semiconductor processes includes: a trap body having an inlet port and an outlet port; an inlet shut-off valve provided at the inlet port; and an outlet shut-off valve provided at the outlet port. The trap body, inlet and outlet valves are integrated and can be removed together for replacement on refreshing of the trap.

Abstract: A deposition method which deposits a CdS buffer layer on a surface of a solar cell from a process solution including all chemical components of the CdS buffer layer material. CdS is deposited in a deposition chamber by heating the surface of the solar cell absorber to cause the transfer of heat from the solar cell absorber layer to at least a portion of the process solution that is in contact with the surface. Used solution is cooled, and replenished in a solution container and redirected into the deposition chamber.

Abstract: An object of the present invention is to provide a method for producing a resin-coated sliding member wherein the method ensures the productivity and at the same time enables the recycling of the solvent so as to be friendly to the environment. According to the present invention, included are a coating step in which a porous sintered layer prepared by sintering on a back metal is impregnated with a solvent-containing resin composition, a heating step to heat the solvent and the resin composition and a collecting step to collect the solvent wherein the vaporized solvent is sucked, liquefied and collected; and hence even when a solvent having a high boiling point and a low vapor pressure is used, the solvent can be collected efficiently by applying a low energy, and the collected solvent is recycled so as to be friendly to the environment and to enable the reduction of the consumed raw materials.

Abstract: A method for recycling an inert gas evacuated from a material deposition process chamber 10 comprises cooling the evacuated inert gas and recirculating a proportion of the cooled gas to the chamber 10 at a first temperature for use as a cooling gas in the material deposition process 12, and recirculating a proportion of the cooled gas to the chamber 10 at a second temperature for use as a shielding gas in the material deposition process 12, the second temperature being higher than the first temperature. Apparatus 22 for recycling an inert gas is also disclosed.

Abstract: A reduced pressure drying apparatus includes a chamber that closes in an airtight manner during a reduced pressure drying operation, a stage on which a substrate is mounted; and an exhaust unit having an exhaust tube that opens at exhaust openings within the chamber. The stage is disposed within the chamber during the reduced pressure drying operation. The exhaust unit discharges atmosphere from the chamber via the exhaust openings during the reduced pressure drying operation to reduce the pressure within the chamber. The exhaust openings are formed such that a position of the exhaust openings is substantially the same as or no higher than a surface position of the substrate. The reduced pressure drying apparatus allows a film having a more uniform thickness to be formed on the substrate.

Abstract: A system and method of coating articles with the method comprising directing a plurality of articles into an enclosure; applying a vehicle carrying a first agent onto the plurality of articles; converted the vehicle into a gaseous state to leave the first agent on each the plurality of articles; collecting the vehicle in the gaseous state; converting the vehicle in the gaseous state back into a reclaimed state to enable one to add a further agent to the reclaimed vehicle so that one can apply the reclaimed vehicle and a further agent onto a further set of articles.

Abstract: An apparatus and method for forming a microfiber coating includes directing a liquid solution toward a deposition surface. The apparatus includes a tube defining a volume through which the liquid solution travels. An electric field is applied between the origin of the liquid solution and the surface. A gas is injected into the tube to create a vortex flow within the tube. This vortex flow protects the deposition surface from entrainment of ambient air from the surrounding atmosphere.

Abstract: An apparatus for treating polymeric sheet material to improve surface adhesion thereof. The apparatus comprises a preheating station, a treatment station, a rinsing station, a drying station and a reeling station. In the treatment station spray nozzles are used to contact a surface of the material with an oxidizer (NaOCl) and an activator (succinic acid) at an elevated temperature to shorten the treatment time. A spent treatment disposal system is disclosed along with a scrubber for cleaning the atmosphere of the treatment and rinsing stations. Alternatively, treatment is accomplished in a heated, agitated bath.

Abstract: A coating solution is applied to a web to form a coating layer. Then the web is transported into a drying apparatus, in which a guide roller guides the web such that an angle of the web to a horizontal direction is smaller downstream from the guide roller. The angles at entrance and exit of the drying apparatus are named entrance and exit angles &thgr;1, &thgr;3, respectively, and satisfy a condition &thgr;1>&thgr;3. The coating layer has the temperature T1 at the entrance, the temperature T2 at the exit, and the temperature T3 in the drying apparatus. The differences |T2−T1| and |T3−T1| are at most 5° C. In the drying apparatus, as the organic solvent evaporates uniformly, the generation of the unevenness is reduced. Thereafter, the drying is made at the large drying speed in the blow-drying apparatus to obtain a film product.

Abstract: The present invention comprises a machine and method for applying chemicals with substrates in a continuous manner, as opposed to batch processes. The machine uses non-aqueous solvents as a carrier medium for the chemicals. The non-aqueous solvents are then evaporated away, leaving the chemicals on the substrates. Additionally, the non-aqueous solvents are then continuously condensed, purified and recycled through the machine.

Abstract: The present invention is a coating unit for applying a coating solution on a substrate, comprising: a container enclosing the substrate; a casing for accommodating the container therein; a supply device for supplying a predetermined gas into the casing; a first exhaust pipe for exhausting an atmosphere inside the container; a second exhaust pipe for exhausting an atmosphere inside the casing; a first adjusting device which is disposed in the first exhaust pipe, for adjusting a flow rate of an atmosphere passing through the first exhaust pipe; and a second adjusting device which is disposed in the second exhaust pipe, for adjusting a flow rate of an atmosphere passing through the second exhaust pipe. According to the present invention, the second exhaust pipe is usable for adjusting the exhaust flow rate to maintain a pressure inside the casing at a positive pressure.

Abstract: A drying apparatus 10 for casting machine 80, including tunnel 20 divided into first chamber 41 and second chamber 46 by barrier 35. Each chamber 41,46 includes gas inlet 50 connected to gas source 100 for introducing inert carrier gas into chamber 41,46 and gas outlet 60 connected to condenser 71 for removing carrier gas with dissolved solvent from chamber 41,46. Porous diffuser 55 and slotted cover 63 cooperate to maintain smooth plug flow of carrier gas in chamber 41,46. Carrier gas flow is parallel to movement of support strip 91 in first chamber 41 and counter to movement of strip 91 in second chamber 46. Slurry 102 is converted to gel in first chamber 41. Gel is dried to green tape in second chamber 46. Gas pump 76 and flowmeter 77 determine flow rate of carrier gas in chamber 41,46. Partial pressure of solvent vapor is near saturation in first chamber 41; cover heat means 37 prevents condensation of solvent vapor inside tunnel 20. Condenser 71 removes solvent vapor from carrier gas for reuse.

Abstract: The invention relates to atomizing apparatus for a gas/fluid mixture, in particular for introduction into a chemical reformer for generating hydrogen, which contains at least one gas supply line (10, 10′) for supplying a gas flow (11, 11′) and at least one fluid supply line for supplying a fluid flow. The gas supply line (10, 10′) has at least one first branch point (14, 14′) at which a partial flow (21, 21′) of the gas flow (11, 11′) can be split off into a side line (20, 20′), which is embodied as a bypass. The fluid flow feeds into the side line (20, 20′) at an outlet point (26) of the fluid supply line. The gas supply line (10, 10′) has at least one second branch point (16) at which the side line (20) with the partial flow (21, 21′) containing the fluid flow can be reintroduced.

Abstract: An organic solvent is separated from a waste stream comprising supercritical CO2, an organic solvent and etchant contaminants.

Abstract: In the method and system of the instant invention, volatile organic compounds (VOCs) liberated in the course of solvent-based painting of a workpiece, are recovered. The atmosphere within a closed spray-booth is maintained at a fixed humidity such that vaporized water, supplied in the form of steam or nebulized water vapor, acts as a carrier for VOCs liberated in the course of spray painting or heat curing of a workpiece. The VOCs may be recovered continuously, including during the spray-painting or heat curing of the workpiece. The VOC laden, humidified air is circulated through a condenser such that VOCs dissolved in the water vapor condense and are directed to a recovery means. The water and solvent are separated, recovered and purified for re-use or placed in an appropriate container for disposal, thereby eliminating the usual practice of expelling VOC laden air into the atmosphere.

Abstract: A powder paint reclamation collector includes an upper chamber for collecting powder paint particles from a paint booth and a lower chamber that receives the particles from the upper chamber. A vacuum line communicates with the lower chamber retrieving the particles from the collector and transferring the particles to a reclamation system. An air chamber receives pressurized air from an air supply and communicates with the lower chamber through a porous plate. Air bleeds through the porous plate into lower and upper chambers for fluidizing the paint particles. The porous plate and an air chamber floor angle downward from the lower chamber towards the vacuum line to improve the flow of fluidized paint particles into the vacuum line.

Abstract: A decoloring apparatus for an image forming material comprising means for bringing a solvent into contact with an image forming material formed on a paper sheet and containing a color former, a developer and a decolorizer, and means for removing a residual solvent from the paper sheet.

Abstract: An apparatus for the coating treatment comprises a coating section for coating a substrate with a process solution, a heating section for heating the substrate coated with the process solution, and a recovery section for recovering at least a part of the solvent vapor contained in the hot exhaust gas discharged from the heating section. The recovery section includes a cooling apparatus, and the hot exhaust gas containing a solvent vapor generated from the substrate when the substrate is subjected to a heating treatment is passed through the cooling apparatus so as to cool and condense at least a part of the solvent vapor contained in the hot exhaust gas so as to recover the solvent in the form of a liquid.

Abstract: A semiconductor wafer etching system exhausts an exhaust gas including fluorocarbon gas to an exhaust line. Two traps, that are capable of trapping the fluorocarbon gas in the exhaust gas by cooled adsorption and releasing the adsorbed fluorocarbon gas by heating, are alternately arranged on the exhaust line. The two traps are alternately separated from the exhaust gas and regenerated on a regeneration line which serves to release the adsorbed fluorocarbon gas from the traps. The trap which is in the trap mode to adsorb the fluorocarbon gas is cooled to −120° C. or less. The trap which is in the regeneration mode to release the adsorbed fluorocarbon gas is heated to −100° C. or more.

Abstract: An apparatus for hot-dip coating a steel strip, comprising: (a) an annealing furnace for continuously annealing the steel strip, the annealing furnace having an entrance side and an exit side; (b) a coating pot having a molten metal coating bath for coating the annealed steel strip; (c) a snout through which the annealed steel strip is introduced into the molten metal coating bath, one end of the snout being connected to the annealing furnace and the other end being immersed into the molten metal coating bath; (d) a seal device for sealing between the annealing furnace and the snout, the seal device being disposed at the exit side of the annealing furnace; and (e) a discharge device for discharging a gas containing a metal vapor from the snout to outside of the snout, the metal vapor being evaporated from the molten metal coating bath in the snout.

Abstract: A decoloring apparatus for an image forming material comprising means for bringing a solvent into contact with an image forming material formed on a paper sheet and containing a color former, a developer and a decolorizer, and means for removing a residual solvent from the paper sheet.

Abstract: An apparatus for coating board-shaped articles, especially printed circuit boards, is described which comprises at least one coating station having a pouring table for coating one surface of the printed circuit boards with preferably UV-hardenable plastics, lacquer or the like, and, adjoining that station, a vapor-removal and drying station having a vapor-removal drier for the removal of vapor from and drying of the coated surfaces of the printed circuit boards in the stream of hot air. The vapor-removal and drying station has an air processing module which is arranged in a housing which adjoins the entrance side of the housing of the vapor-removal drier and extends over the free space above the pouring table.

Abstract: An apparatus for coating a strip of liquid material such as a polymer adhesive onto the surface of a traveling web at adjustable cross-directional locations which includes a transfer roll secured to a drive shaft coupled hub by an asymmetric rim plate. A carrier sleeve is secured to the hub by anti-friction bearings for independent rotation about the axis of the drive shaft. A fountain housing is secured to the carrier sleeve. The fountain housing supports a fountain nozzle for pressurized discharge of a fluid onto the perimeter surface of the transfer roll within an evacuated cavity. The cavity perimeter around the fountain nozzle has a close, sealing proximity with the transfer roll surface. An adjustable doctor blade screeds excess liquid on the transfer roll surface into the evacuated cavity for removal by a vacuum system. The apparatus significantly reduces the emissions of volatile fluids to the atmosphere during the coating process.

Abstract: The present invention relates to a deodorizing system for reducing the size of a facility and realizing the thermal efficiency much higher than the prior art, wherein a deodorizing furnace 1 is connected with thermal equipment 8 which uses a heated gas current as a heat source through an out-of-furnace circulating path 4 in order to circulate combustion exhaust gas in a deodorizing furnace 2 which has been used for incineration or thermal decomposition of odor components. When the combustion exhaust gas passes through a regenerative bed 5A or 5B on an intake side of the out-of-furnace circulating path, a part of sensible heat of the combustion exhaust gas is recovered in the regenerative bed 5A or 5B and the combustion exhaust gas is turned into a heated gas current that can be used in the thermal equipment 8 to be then supplied to the thermal equipment 8.

Abstract: A processing apparatus comprises a resist coating machine for coating resist on the surface of a substrate, a resist removing machine for removing the unnecessary resist stuck to the peripheral portion of the substrate carried out of the resist coating machine, and a transport arm for transporting the substrate from the resist coating machine to the resist removing machine, wherein the resist removing machine comprises a substrate table on which the substrate brought in by the transport arm is placed, a nozzle for spraying a solvent on the peripheral portion to remove the unnecessary resist stuck to the peripheral portion of the substrate on the substrate table; a discharge machine for discharging the solvent used to dissolve and remove the unnecessary resist and the dissolved and removed resist, and an exhaust machine for exhausting the atmosphere under the substrate table downward.

Abstract: Exhaust components of a coating apparatus can be cleaned to remove coating material therein and/or can be periodically treated so as to prevent the buildup of coating material with exhaust components. Moreover, coating materials and cleaning liquids can be separated from the exhaust stream and collected to a drain. An exhaust manifold includes an integral rinsing mechanism and a fluid separator. Rinsing can be controlled automatically or manually.

Abstract: A device for chemical wet treatment of substrates has a tank containing a treatment fluid for treating the substrates. At least one substrate carrier for supporting the substrates within the tank is provided. At least one substrate lifting device for lifting the substrates off the substrate carrier is provided. A lifting apparatus for lifting and lowering the substrate carrier is positioned in the tank. The lifting apparatus has a first transport carriage connected to the substrate lifting device and a second transport carriage connected to a holder of the substrate carrier. The first and second transport carriages are connected to one another by a jointed connection.

Abstract: An exhaust system for a film forming apparatus including an exhaust pipe passage connected to an exhaust port of the film forming apparatus for forming a film on a object by using vaporized gas of an organic metal compound. The film forming apparatus includes a pressure transfer unit provided for the exhaust pipe passage and arranged to transfer, through the exhaust pipe passage, gas in the film forming apparatus as exhaust gas. A cooling mechanism is provided for the pressure transfer unit and arranged to cool the pressure transfer unit to a temperature lower than a temperature, at which the organic metal compound is decomposed, so as to prevent precipitation of the organic metal compound contained in the exhaust gas introduced into the pressure transfer unit.

Abstract: A steam drying apparatus in which a process chamber is fitted at a loading opening with a lid which is closed from above. The inner side wall surface of the process chamber has a first surface formed in the lower part thereof and is substantially in parallel with the inner wall surface of the lid, and a second surface extending from the upper end part of the first surface and bent outwards to face the inner wall surface of the lid. The second surface is provided with a steam supply port for supplying the processing solution vapor into the process chamber. To the steam supply port is connected a steam supply means for supplying the processing solution vapor into the process chamber.

Abstract: An automated air filtration and drying method for uncured waterborne paint and industrial coatings are disclosed that provides for the drying of a product using recycled filtered air. In particular, a drying system is used along with a series of multistage dry-type filters to continuously exhaust contaminated air from a spray booth, filter it, remove moisture therefrom, and deliver it back to the spray booth.