With Heat Exchange, Drying, Or Non-coating Gas Or Vapor Treatment Of Work Patents (Class 118/58)
  • Patent number: 11967513
    Abstract: Described herein is a technique capable of reducing an amount of moisture in a low temperature region in a substrate processing apparatus provided with a transfer chamber. According to one aspect of the technique, there is provided a substrate processing apparatus including: a process chamber provided with a heater; a load lock chamber; a transfer chamber provided between the process chamber and the load lock chamber and including a first region provided adjacent to the process chamber and a second region provided more adjacent to the load lock chamber than the first region and whose temperature is lower than a temperature of the first region; a detector capable of detecting an amount of moisture in the transfer chamber; and an inert gas supplier capable of supplying an inert gas toward the second region in the transfer chamber.
    Type: Grant
    Filed: March 18, 2021
    Date of Patent: April 23, 2024
    Assignee: KOKUSAI ELECTRIC CORPORATION
    Inventors: Teruo Yoshino, Naofumi Ohashi, Tadashi Takasaki
  • Patent number: 11952660
    Abstract: A processing chamber may include a gas distribution member, a substrate support, and a pumping liner. The gas distribution member and the substrate support may at least in part define a processing volume. The pumping liner may define an internal volume in fluid communication with the processing volume via a plurality of apertures of the pumping liner circumferentially disposed about the processing volume. The processing chamber may further include a flow control mechanism operable to direct fluid flow from the internal volume of the pumping liner into the processing volume via a subset of the plurality of apertures of the pumping liner during fluid distribution into the processing volume from the gas distribution member.
    Type: Grant
    Filed: July 22, 2020
    Date of Patent: April 9, 2024
    Assignee: Applied Materials, Inc.
    Inventors: Nitin Pathak, Yuxing Zhang, Tuan A. Nguyen, Kalyanjit Ghosh, Amit Bansal, Juan Carlos Rocha-Alvarez
  • Patent number: 11856977
    Abstract: A mixing apparatus is configured to efficiently input noodles coated with an additive to a receiving tray, with no need to perform weighing again after the noodles are input to the receiving tray. The mixing apparatus includes at least two hoppers that each house falling noodles and that allows the noodles to fall through rotation of the hoppers. A supply device supplies a sauce to the noodles in the hoppers, and the two hoppers are spaced from one another in the falling direction.
    Type: Grant
    Filed: January 9, 2020
    Date of Patent: January 2, 2024
    Assignees: MAYEKAWA MFG. CO., LTD., AJINOMOTO. CO., INC.
    Inventors: Shigeto Koga, Hiroshi Fujita, Yoshihiro Uchida, Kazuhiro Toyota, Takahiro Kawasoe
  • Patent number: 11842906
    Abstract: A side surface unit of a heat treatment space S is formed by a shutter member 250 including an outer shutter 260 and an inner shutter 270. Supply air A is supplied as a horizontal laminar flow toward a wafer W from a lower end side of the shutter member 250, that is, from a gap d1 located on the level with the wafer W placed on a heat plate 211 of a mounting table 210. Supply air B is supplied into the heat treatment space S from an upper end side of the shutter member 250, that is, from a gap d2 positioned higher than the wafer W. A ratio between a flow rate of the supply air A and a flow rate of the supply air B is 4:1.
    Type: Grant
    Filed: February 25, 2021
    Date of Patent: December 12, 2023
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Hideaki Iwasaka, Kouichi Mizunaga, Takahiro Hayashida
  • Patent number: 11839898
    Abstract: A double-sided coating device includes: a conveying mechanism for a base material that includes a first surface and a second surface; a first die that applies a first coating material onto the first surface; and a second die that applies a second coating material onto the second surface. The conveying mechanism includes: a roll that conveys the base material, in which the position at which the base material separates from the circumferential surface is higher than a target coating height of the base material; and a drawing section that draws the base material such as to bring the base material closer to the target coating height.
    Type: Grant
    Filed: January 14, 2021
    Date of Patent: December 12, 2023
    Assignee: Panasonic Intellectual Property Management Co., Ltd.
    Inventor: Daisuke Tokieda
  • Patent number: 11676834
    Abstract: In substrate processing, by supplying a first processing liquid onto an upper surface 91 of a substrate 9 held in a horizontal state, a liquid film 81 of the first processing liquid which entirely covers the upper surface 91 is formed. Further, by heating the substrate 9, a vapor layer 82 of the first processing liquid is formed between the upper surface 91 and the liquid film 81 of the first processing liquid on the upper surface 91. Then, by supplying a second processing liquid onto the upper surface 91 of the substrate 9, the liquid film 81 of the first processing liquid is removed from the upper surface 91. It is thereby possible to appropriately remove extraneous matters 89 from the upper surface 91 of the substrate 9, which are taken in the liquid film 81 of the first processing liquid as the vapor layer 82 is formed.
    Type: Grant
    Filed: December 27, 2019
    Date of Patent: June 13, 2023
    Inventors: Manabu Okutani, Tsutomu Osuka, Katsuei Higashi, Hiroshi Abe, Naohiko Yoshihara
  • Patent number: 11613614
    Abstract: The present disclosure provides Lazarev reactor that sustains reaction of two dimensional polymerization on the interface of two immiscible solutions A and B carrying components of reaction to the interface where reaction takes place and produces film of two dimensional polymer layers that are pulled out of reactor and rolled up on roll after drying excess of solvent out.
    Type: Grant
    Filed: March 19, 2020
    Date of Patent: March 28, 2023
    Assignee: 86 SOLAR INC.
    Inventors: Pavel Ivan Lazarev, Alexander P. Lazarev
  • Patent number: 11572613
    Abstract: A steel part includes a steel sheet substrate and a coating on at least one surface of the steel sheet substrate. The coating includes between 0.2 and 0.7% by weight of Al, with a remainder of the metal coating being Zn and inevitable impurities. The steel sheet substrate and the coating have at least one deformation. An outer surface of the coating has a waviness Wa0.8 of less than or equal to 0.43 ?m.
    Type: Grant
    Filed: May 14, 2020
    Date of Patent: February 7, 2023
    Assignee: ARCELORMITTAL
    Inventors: Jean-Michel Mataigne, Didier Dauchelle, Florence Bertrand
  • Patent number: 11559952
    Abstract: A three-dimensional shaping system includes a first table provided with a first positioning mechanism, a first shaping machine configured to shape a first shaped object on the first table, a first cutting machine provided with a first mounting portion having a second positioning mechanism and configured to cut the first shaped object, a conveying machine configured to convey the first table between the first shaping machine and the first cutting machine, and a control unit configured to control the first shaping machine, the first cutting machine, and the conveying machine. The control unit controls the first shaping machine to shape the first shaped object, controls the conveying machine to convey the first table from the first shaping machine to the first cutting machine so that the first and second positioning mechanisms engage with each other, and controls the first cutting machine to cut the first shaped object.
    Type: Grant
    Filed: February 24, 2021
    Date of Patent: January 24, 2023
    Assignee: Seiko Epson Corporation
    Inventors: Kenta Anegawa, Daizo Aoyagi, Yusuke Watanabe, Kanji Okuyama
  • Patent number: 11495440
    Abstract: Embodiments of the present disclosure generally relate to apparatuses for reducing particle contamination on substrates in a plasma processing chamber. In one or more embodiments, an edge ring is provided and includes a top surface, a bottom surface opposite the top surface and extending radially outward, an outer vertical wall extending between and connected to the top surface and the bottom surface, an inner vertical wall opposite the outer vertical wall, an inner lip extending radially inward from the inner vertical wall, and an inner step disposed between and connected to the inner wall and the bottom surface. During processing, the edge ring shifts the high plasma density zone away from the edge area of the substrate to avoid depositing particles on the substrate when the plasma is de-energized.
    Type: Grant
    Filed: August 18, 2020
    Date of Patent: November 8, 2022
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Bhaskar Kumar, Prashanth Kothnur, Sidharth Bhatia, Anup Kumar Singh, Vivek Bharat Shah, Ganesh Balasubramanian, Changgong Wang
  • Patent number: 11495474
    Abstract: Disclosed is a method for processing a substrate, comprising a liquid processing step of performing liquid processing on the substrate by supplying a processing liquid onto the substrate in a liquid processing chamber, a transfer step of transferring the substrate from the liquid processing chamber to a drying chamber, and a drying step of drying the substrate in the drying chamber. In the drying step, the substrate is dried while an edge region of the substrate other than a central region of the substrate is supported by a support unit, and in the liquid processing step, the liquid processing is performed on the substrate such that a height of the processing liquid remaining on the edge region of the substrate is greater than a height of the processing liquid remaining on the central region of the substrate when the liquid processing is completed in the liquid processing chamber.
    Type: Grant
    Filed: September 21, 2020
    Date of Patent: November 8, 2022
    Assignee: SEMES CO., LTD.
    Inventors: Yong Hee Lee, Young Hun Lee, Jinwoo Jung, Eui Sang Lim
  • Patent number: 11204345
    Abstract: To provide a preparative thin layer chromatography method capable of acquiring a target spot efficiently using a simple and convenient method without the possibility of decomposition of a component in a spot. The preparative thin layer chromatography method is a preparative method for dispensing a spot from a thin layer chromatography plate and includes a process 1 that forms a groove by removing the carrier at the circumferential edge of a spot to be dispensed, a process 2 that inserts a nozzle having a packing part at the tip thereof into the groove formed in the process 1, a process 3 that discharges a solvent through the nozzle, and a process 4 that sucks the solvent in which a spot component has been dissolved.
    Type: Grant
    Filed: January 17, 2019
    Date of Patent: December 21, 2021
    Assignee: YAMAZEN CORPORATION
    Inventor: Kihachiro Okura
  • Patent number: 10828661
    Abstract: The coating device has a rotatable spindle which has fastening mechanisms for fastening a rotation axle to the spindle. Protrusions are radially protruding from the spindle for spreading the coating substance on the inner surface of a pipe. The protrusions have limiters that limit the coating substance to be spread to the desired layer thickness. The method comprises the steps of bringing, to the pipe to be treated, the coating device fastened to a rotation axle with the pipe, a feeding hose of the coating substance and a camera. The coating substance is fed along the feeding hose to a vicinity of the coating device. The coating substance is spread to an inner surface of the pipe by rotating the coating device and by moving the coating device in a longitudinal direction of the pipe.
    Type: Grant
    Filed: February 2, 2017
    Date of Patent: November 10, 2020
    Assignee: PICOTE SOLUTIONS OY LTD.
    Inventor: Mika Lokkinen
  • Patent number: 10610900
    Abstract: A paint removal apparatus for cleaning paint from masking devices includes a support base having a plurality of engagement features that are each configured to securely engage at least one paint masking device. A spray nozzle is aimed in a fixed direction toward the support base and configured for spraying a pressurized stream of water at a desired velocity that removes paint from an exterior surface of at least one of the masking devices engaged at the support base. The support base is configured to successively move the masking devices engaged at the engagement features into the pressurized stream of water, such as to provide a generally continuous cleaning operation of masking devices. During movement or rotation of the support base, an exposed portion of the support base may extend from a spray enclosure for removing cleaned plugs from and loading painted plugs onto such an exposed portion.
    Type: Grant
    Filed: December 14, 2017
    Date of Patent: April 7, 2020
    Assignee: J Squared Innovationz, LLC
    Inventor: Jerime Blackman
  • Patent number: 10578360
    Abstract: A drying apparatus includes a heating mechanism configured to heat an inside of a drying oven in which paint applied to a workpiece is dried. The inside of the drying oven is partitioned into an upper region and a lower region by a partition plate. The drying oven has an air passage that enables air to flow between the upper region and the lower region. A metal member to which paint is applied is conveyed into the upper region, and a resin member to which paint is applied is conveyed into the lower region.
    Type: Grant
    Filed: April 10, 2018
    Date of Patent: March 3, 2020
    Assignee: SUBARU CORPORATION
    Inventor: Akiko Inami
  • Patent number: 10486181
    Abstract: Apparatus for coating a pipe. The apparatus includes a first frame to be mounted on a pipe and a second frame rotatably mounted on the first frame. An induction heating coil comprised of electrical conductors is mounted on the apparatus. A coating applicator is mounted on the second frame and is arranged to apply coating onto a surface of the pipe on which the apparatus is mounted. The first frame, second frame and coating applicator are arranged such that when the apparatus is mounted on the pipe, the applicator is disposed to one side of the induction heating coil and able to apply coating to a surface of the pipe alongside the surface of the pipe underlying the induction heating coil. The first frame may be operable between an open state in which the frame may be placed over and removed from a pipe and a closed state in which the frame may capture a pipe thereby to mount the apparatus on the pipe.
    Type: Grant
    Filed: August 15, 2008
    Date of Patent: November 26, 2019
    Assignee: PIPELINE INDUCTION HEAT LIMITED
    Inventors: Damian Daykin, Christofer Ratcliffe, Michael George
  • Patent number: 10458963
    Abstract: A field testing device is provided for quantitating psychoactive components of marijuana such as THC in biological fluids such as saliva. Such a device may include an HPTLC plate for separating interferents from THC and may also include fluorometric components for quantitating THC. The device may include a microprocessor adapted to relate fluorescent intensity to analyte concentration through one or more calibration curves. Devices may optionally include microfluidics for carrying out HPTLC on biological samples including sample reservoirs, reagent reservoirs, micro-pumps, mixers, and the like.
    Type: Grant
    Filed: June 8, 2017
    Date of Patent: October 29, 2019
    Inventor: Kathleen Stitzlein
  • Patent number: 10378819
    Abstract: A paint baking oven is for a vehicle body that includes a body exterior part and a narrow portion. The paint baking oven bakes a wet coating film applied to a coated surface of the narrow portion. The paint baking oven includes a heat source, such as an infrared heater, a halogen heater, an induction heater, or a hot air generator, configured to give heat energy primarily to the coated surface of the narrow portion and a heat source mover configured to move the heat source toward and away from the narrow portion.
    Type: Grant
    Filed: January 26, 2015
    Date of Patent: August 13, 2019
    Assignee: Nissan Motor Co., Ltd.
    Inventors: Hiroyuki Mitomo, Tomoyuki Natsume
  • Patent number: 10267562
    Abstract: A paint baking oven bakes a wet coating film applied to a vehicle body while conveying the vehicle body. The vehicle body has a main shell body to which side doors are attached via hinges. The topcoat paint baking oven includes a oven body and a hot air supplier that supplies hot air into the oven body. The oven body is configured to include a first oven body and a second oven body. The first oven body has a side-to-side width corresponding to a body width of the vehicle body in a state of closing the side doors. The second oven body has a width wider than the side-to-side width of the first oven body. The width of the second oven body corresponds to a body width of the vehicle body in a state of opening the side doors.
    Type: Grant
    Filed: January 26, 2015
    Date of Patent: April 23, 2019
    Assignee: Nissan Motor Co., Ltd.
    Inventors: Tomoyuki Natsume, Hiroshi Shodo
  • Patent number: 10232401
    Abstract: A systems and method for reducing coating defects on a stent may involve a support apparatus comprising wire cage for carrying a stent. The support apparatus may have no structure that extends inside the stent. A support apparatus may include a plurality of wires that pass through the stent but do not pass through the midplane of the stent. A support apparatus may contact only the proximal ends of the stent. The method may involve keeping the stent in motion during a spray coating process to prevent the stent from having a point remain in continuous contact with a support apparatus.
    Type: Grant
    Filed: October 14, 2013
    Date of Patent: March 19, 2019
    Assignee: Abbott Cardiovascular
    Inventors: Stephen D. Pacetti, Laura Melton Kalvass
  • Patent number: 10131098
    Abstract: An automated process is provided for debundling carbon fiber tow that includes feeding a carbon fiber tow into a chopper. The carbon fiber tow is cut to form lengths of chopped tow portions. The lengths of chopped tow portions are distributed on a moving conveyor. The lengths of chopped tow portions are exposed to a first plasma discharge from a first plasma source on the moving conveyor to create debundled carbon fibers. Alternatively, the carbon fiber tow is exposed to the first plasma discharge prior to being cut into lengths. A system for applying chopped fibers to a sheet of molding compound includes a chopper for cutting a carbon fiber tow into lengths of chopped tow portions. A conveyor belt receives the lengths of chopped tow portions. At least one plasma generating source is arrayed across of the conveyor.
    Type: Grant
    Filed: December 3, 2014
    Date of Patent: November 20, 2018
    Assignee: CONTINENTAL STRUCTURAL PLASTICS, INC.
    Inventors: Frank Macher, Probir K. Guha, Michael J. Siwajek, Shane Skop, Rahul Rane, Adam Burley
  • Patent number: 10103042
    Abstract: A chamber includes a sidewall, a cooling pipe, and an external pipe. The cooling pipe includes a first segment extending along the sidewall of the chamber, and includes multiple purge nozzles. The external pipe extends to inside the chamber and is connected to the first segment of the cooling pipe. A semiconductor processing station includes a central transfer chamber, a load lock chamber, and a cooling stage. The load lock chamber and the cooling stage are disposed adjacent to the central transfer chamber. The load lock chamber is adapted to contain a wafer carrier having multiple wafers. The central transfer chamber communicates between the cooling stage and the load lock chamber to transfer a wafer between the cooling stage and the load lock chamber. A semiconductor process using the semiconductor processing station is also provided.
    Type: Grant
    Filed: January 29, 2016
    Date of Patent: October 16, 2018
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chia-Wei Lu, Hon-Lin Huang, Hung-Chih Wang
  • Patent number: 9841234
    Abstract: A drying device for drying coated, elongated work pieces in a continuous process including a transport device for transporting the work piece. For drying an edge or surface of the work piece, heat sources are arranged in a drying chamber. In a drying zone, drying vapor is generated during drying. The vapor is removed by an airflow. The airflow is supplied via a supply channel and fans. A controller is provided to control the fans.
    Type: Grant
    Filed: March 24, 2016
    Date of Patent: December 12, 2017
    Assignee: Cefla Deutschland GmbH
    Inventor: Gerhard Stahl
  • Patent number: 9108205
    Abstract: A coating device for coating an inside of a hollow body with an atomized fluid has at least one atomizing tube enclosing an atomizing channel. A pressurized propellant gas for atomizing an unatomized fluid can be introduced into the atomizing tube. The atomizing tube has at least one outlet opening and further has at least one hollow needle having a discharge opening for the unatomized fluid. The at least one hollow needle interacts with the atomizing channel and is arranged essentially coaxially thereto. The atomizing tube and the hollow needle form a Venturi arrangement.
    Type: Grant
    Filed: June 18, 2009
    Date of Patent: August 18, 2015
    Assignee: Arzneimittel GmbH Apotheker Vetter & Co. Ravensburg
    Inventors: Frank Böttger, Günther Späth
  • Patent number: 9032977
    Abstract: A method for processing a plurality of substrates after forming a photosensitive film on each substrate includes carrying each substrate into a placement buffer including a plurality of supporters by a first transport mechanism; taking out each substrate from the placement buffer to an interface by a second transport mechanism; carrying each substrate into the exposure device; carrying each substrate out of the exposure device into the placement buffer by the second transport mechanism; taking out each substrate from the placement buffer to the processing section by the first transport mechanism; performing development processing on each substrate; making each substrate stand by at the placement buffer based on timing at which the exposure device can accept each substrate; and making each substrate stand by at the placement buffer based on timing at which the developing device can accept each substrate.
    Type: Grant
    Filed: December 13, 2013
    Date of Patent: May 19, 2015
    Assignee: SCREEN Semiconductor Solutions Co., Ltd.
    Inventors: Tetsuya Hamada, Takashi Taguchi
  • Patent number: 9027504
    Abstract: A heating apparatus including: a first heating part and a second heating part between which a substrate having a coating film is disposed at a substrate position in the film thickness direction; and a distance control part which controls at least one of a first distance between the substrate position and the first heating part and a second distance between the substrate position and the second heating part.
    Type: Grant
    Filed: May 31, 2012
    Date of Patent: May 12, 2015
    Assignee: Tokyo Ohka Kogyo Co., Ltd.
    Inventors: Hidenori Miyamoto, Tsutomu Sahoda
  • Patent number: 9016201
    Abstract: Apparatus and method for applying a water-based emulsion of silicone fluid to a printed web required to be cooled, such that evaporative cooling of the web is promoted in addition to coating of said web with a silicone material. Water evaporated following the application of the silicone fluid to the web is recovered by condensation on the applicator(s) and reapplied to the web, thus economizing the amount of silicone fluid mixture necessary to provide both cooling and enhanced slip characteristics necessary for further handling and processing of the web. The condensation step is effected by containing the evaporated water from the web within a compact enclosure enveloping both the applicator(s) and the web, and optionally chilling said applicator(s) with a cooling medium, preferably water, by means of said cooling medium flowing through at least one of the applicators.
    Type: Grant
    Filed: March 10, 2008
    Date of Patent: April 28, 2015
    Assignee: MegTec Systems, Inc.
    Inventors: Steven Zagar, Paul Seidl, Mike Rocheleau, Alain Grandjean
  • Publication number: 20150101528
    Abstract: An apparatus and method for treating subject materials with compositions includes a material treatment section for treating a subject material with a composition of a silane-containing material and a hydrocarbon solvent to form a treated material, and a neutralizing section for neutralizing the treated material such that the treated material has a pH in a range of approximately 7 to approximately 8.
    Type: Application
    Filed: December 19, 2014
    Publication date: April 16, 2015
    Inventors: John Christopher Cameron, Edwin A. Neal
  • Publication number: 20150096490
    Abstract: An apparatus for a plating process includes: an outer chamber; an inner chamber covered by the outer chamber; a rotatable holding mechanism configured to hold a substrate horizontally and installed in the inner chamber; a fluid supply unit configured to supply a plating solution to a preset position on the substrate; a gas supply device configured to generate a nonreactive gas and control a temperature of the nonreactive gas; a gas supply hole configured to supply the nonreactive gas into the outer chamber and provided in a top surface of the outer chamber; a plurality of gas inlet openings provided at a sidewall of the inner chamber and spaced apart at equal distances; and a rectifying plate disposed above the substrate and below the plurality of gas inlet openings inside the inner chamber, the rectifying plate having a plurality of rectifying holes uniformly disposed in the rectifying plate.
    Type: Application
    Filed: December 12, 2014
    Publication date: April 9, 2015
    Inventors: Takashi Tanaka, Yusuke Saito, Mitsuaki Iwashita
  • Patent number: 8999432
    Abstract: A cap metal forming method capable of obtaining a uniform film thickness on the entire surface of a substrate is provided. A method for forming a cap metal on a processing surface of a substrate provided with two or more regions having different water-repellent properties, includes: holding the substrate horizontally by a rotatable holding mechanism installed in an inner chamber; supplying a gas between the inner chamber and an outer chamber covering the inner chamber via a gas supply hole provided in a top surface of the outer chamber; forming a pressure gradient between the inner chamber and the outer chamber; and supplying a plating solution to a preset position on the processing surface of the substrate after a pressure of the gas inside the inner chamber reaches a preset value so as to form the cap metal on at least one of the regions.
    Type: Grant
    Filed: March 17, 2009
    Date of Patent: April 7, 2015
    Assignee: Tokyo Electron Limited
    Inventors: Takashi Tanaka, Yusuke Saito, Mitsuaki Iwashita
  • Publication number: 20150093969
    Abstract: To obtain a circulation-type blasting device which enables stable processing for a long period of time even in a case that an elastic abrasive of which abrasive grains are attached to a surface of an elastic core are used. A circulation-type blasting device is provided with a device for recycling an elastic abrasive for recycling all or a part of elastic abrasive used in a cyclic way, and the device for recycling the elastic abrasive is provided with a mixing unit for mixing recovered abrasives recovered from an abrasive recovery unit and abrasive grains introduced from an abrasive grain supplying unit in a gas flow by introducing the abrasive grains and the recovered abrasive in the gas flow to generate a solid-gas biphase flow, and a combining unit composed of at least one bent space to which the solid-gas biphase flow is introduced.
    Type: Application
    Filed: September 22, 2014
    Publication date: April 2, 2015
    Inventors: Keiji MASE, Shozo Ishibashi, Yuya Takahashi, Masatoshi Kitagami
  • Patent number: 8978670
    Abstract: Provided is a substrate processing apparatus wherein, even if a trouble occurs, it is bound to continue a process for the substrate without stopping the substrate processing apparatus entirely. The substrate processing apparatus according to the present disclosure includes first and second substrate conveying devices configured to convey wafers, and first and second processing blocks provided on the right and left sides of the substrate conveying device and having processing unit arrays each configured to perform the same process. Processing unit arrays on one side and processing unit arrays on the other side are respectively connected to a processing liquid supply system commonly provided with them. And, when any one of substrate conveying devices, processing liquid supply systems has a problem, the process for the wafer can be performed in the processing unit array to which the substrate conveying device and the processing liquid supply system under normal operation belong.
    Type: Grant
    Filed: October 4, 2010
    Date of Patent: March 17, 2015
    Assignee: Tokyo Electron Limited
    Inventors: Junya Minamida, Issei Ueda, Yasuhiro Chouno, Osamu Kuroda, Kazuyoshi Eshima, Masahiro Yoshida, Satoshi Morita
  • Patent number: 8974859
    Abstract: Methods of pressure coating a target surface of an article comprising one or more grooves formed in an outer surface of an article include fluidly connecting a pressure masker comprising a pressurized masking fluid to one or more coolant supply holes on a first side of the article. The one or more coolant supply holes in fluidic communication with the one or more grooves. Passing the pressurized masking fluid through the one or more grooves from the first side to a second side comprising the target surface at a pressure less than the coating pressure of the coating material, and, coating the target surface with the coating material to allow the coating material to bridge over the one or more grooves and form one or more micro-channels. The pressurized masking fluid passing through the one or more grooves prevents the coating material from permanently altering a cross sectional area of the one or more grooves along its length.
    Type: Grant
    Filed: September 26, 2012
    Date of Patent: March 10, 2015
    Assignee: General Electric Company
    Inventor: Ronald Scott Bunker
  • Publication number: 20150064350
    Abstract: The invention relates to a device for manufacturing hot-mix coated materials, e.g. materials coated with bitumen, the device comprising: an oven (1) comprising an enclosure (2) provided towards its two opposite ends with a main inlet (3) designed to receive granular materials and with a main outlet; and heater means (10) defining a combustion section (5) inside the enclosure (2), said enclosure (2) starting with said combustion section (5) and continuing with a drying section (6), and then with a mixing section (7); the device being characterized in that it is provided with a bypass outlet (11) and with an external mixer (12) that is connected to said bypass outlet (11), which outlet is fitted with a blocking system (15) allowing granular materials to pass towards the inlet (13) of the external mixer (12) and a closed position allowing granular materials to pass towards the mixing section (7).
    Type: Application
    Filed: April 12, 2013
    Publication date: March 5, 2015
    Applicant: ARGUMAT
    Inventor: Antoine Carrasco
  • Patent number: 8960121
    Abstract: A relief print master is created by a printhead that moves in a slow scan direction. The nozzles of the printhead jet droplets of a polymerisable liquid on a rotating drum. The different nozzles jet droplets simultaneously on different layers that have different diameters. As a result, the droplets jetted by different nozzles travel over different distances before landing. The effect of this is that the droplets undergo different position lag as they land on the different layers. By rotating the printhead in a plane that is orthogonal to the jetting direction this effect can be compensated for.
    Type: Grant
    Filed: August 8, 2011
    Date of Patent: February 24, 2015
    Assignee: Agfa Graphics NV
    Inventor: Chris Gullentops
  • Publication number: 20150024144
    Abstract: The invention relates to a process for producing a rolling bearing cage, in particular for large rolling bearings, wherein a steel strip with openings for in each case one rolling body is provided and bent to form a ring, wherein, for thermal coating with a thermoplastic powder, the ring is then heated to a temperature above a minimum coating temperature, wherein the ring is then dipped into a fluidized bed comprising the thermoplastic powder, wherein, during the residence time of the ring in the fluidized bed, plastic powder adheres to the ring, melts and forms a continuous coating, and wherein the ring is removed from the fluidized bed after the coating. The invention also relates to an apparatus for carrying out the process.
    Type: Application
    Filed: February 27, 2013
    Publication date: January 22, 2015
    Inventors: Joerg Rollmann, Stefan Schnieder, Markus Leonhard, Reinhard Juergens
  • Publication number: 20150024137
    Abstract: An apparatus and method for the application of an aqueous treatment solution onto the surface of a steel strip that is moved, at a prespecified strip speed, in a direction of movement of the strip, with the following steps: drying of the moving steel strip with a gas flow; application of the aqueous solution on at least one surface of the steel strip with a rotary sprayer with several spray rotors that are situated next to one another, transverse to the direction of movement of the strip, to which the aqueous treatment solution is supplied and which are rotated by a drive, so as to spray the treatment solution, as a result of centrifugal force, in the form of a spray jet, onto the surface of the steel strip and, there, to form a wet film of the aqueous treatment solution; equalization of the applied wet film of the aqueous treatment solution by driven smoothing rollers; and drying of the applied wet film of the aqueous treatment solution.
    Type: Application
    Filed: July 15, 2014
    Publication date: January 22, 2015
    Inventors: Andrea Marmann, Michael Wild, Paul Michels
  • Patent number: 8931429
    Abstract: This disclosure relates to a thermal spray coating system including a table that is configured to support a component. A spray torch is configured to direct a thermal spray at a component surface. A cooling device is arranged adjacent to spray torch and configured to be in close proximity to the component surface. The cooling device includes a manifold that is connected to an air supply. The manifold has a face with multiple impingement holes less than one-eighth inch (3.1 mm) in diameter that are configured to direct cooling air on the component surface. In one example, the diameter of the impingement holes is approximately 0.059 inch (1.5 mm) and provide cooling air at a velocity of at least 400 ft per second (122 meters per second). The face is arranged within one inch (25 mm) of the component surface, in one example. Accordingly, the above cooling device uses less air and yields more consistent results in thermal coating of the component.
    Type: Grant
    Filed: May 5, 2008
    Date of Patent: January 13, 2015
    Assignee: United Technologies Corporation
    Inventors: Christopher W. Strock, Dale R. Doucette
  • Publication number: 20150001681
    Abstract: A method includes holding bonded wafers by a wafer holding module. A gap between the bonded wafers along an edge is filled with a protection material.
    Type: Application
    Filed: July 1, 2013
    Publication date: January 1, 2015
    Inventors: Chen-Fa Lu, Yeur-Luen Tu, Shu-Ju Tsai, Cheng-Ta Wu, Chia-Shiung Tsai, Xiaomeng Chen
  • Publication number: 20150000592
    Abstract: The invention relates to a device for applying preferably liquid flavorings (15), in particular menthol, to a medium (16), wherein flavoring (15) is supplyable from a (storage or processing) container (10) to an applicator unit (14) via at least one conduit (11, 13). The invention is characterized in that the applicator unit (14) has a controllable valve for the application of flavoring (15) to the medium (16).
    Type: Application
    Filed: October 30, 2012
    Publication date: January 1, 2015
    Applicant: Focke & Co. (GmbH & Co. KG)
    Inventors: Jan Schnakenberg, Stefan Harms, Reinhard Hoppe
  • Publication number: 20150004518
    Abstract: The present invention is a method for manufacturing a solid oxide fuel cell apparatus for generating electricity by supplying fuel and oxidant gas to fuel cells housed in a fuel cell module, comprising: an adhesive application step for applying ceramic adhesive to the joint portions of constituent members so that the flow path carrying fuel or oxidant gas inside the fuel cell module are formed in an airtight manner; a workable hardening step for hardening the applied ceramic adhesive to a state capable of implementing the next manufacturing process; and a solvent elimination and hardening step wherein, after multiple repetitions of the adhesive application step and the workable hardening step, ceramic adhesive hardened in the workable hardening steps is dried to a state capable of withstanding temperatures during electrical generation.
    Type: Application
    Filed: June 23, 2014
    Publication date: January 1, 2015
    Inventors: Nobuo ISAKA, Naoki WATANABE, Shuhei TANAKA, Takuya HOSHIKO, Masaki SATO, Osamu OKAMOTO, Shigeru ANDO, Seiki FURUYA, Yutaka MOMIYAMA, Kiyoshi HAYAMA
  • Publication number: 20140366805
    Abstract: A system or apparatus for forming a conductive pattern on a substrate (208) includes a thermal imaging head (220) that forms an image pattern on the substrate. A functional material (240) spraying element (224) applies a functional material on the substrate which bonds with the image pattern. The spraying element is integrated in the thermal imaging head. An electro-less deposition element is applied using the electro-less deposition element on the substrate to enhance the functionality of the final product.
    Type: Application
    Filed: June 14, 2013
    Publication date: December 18, 2014
    Inventor: Israel Schuster
  • Patent number: 8911817
    Abstract: A method and apparatus for coating catheters or balloon catheters is disclosed in which the catheter or balloon catheter is radially surrounded completely or almost completely at a constant distance by a device that applies a coating solution so that the coating solution completely fills the space between the catheter or balloon catheter and the device and thus completely surrounds the catheter or balloon catheter, relative motion is effected between the device and the catheter or balloon catheter in the axial direction across the surface of the catheter or balloon catheter multiple times, and partial drying of the applied coating solution occurs between the individual coating stages.
    Type: Grant
    Filed: June 16, 2010
    Date of Patent: December 16, 2014
    Assignee: DOT GmbH
    Inventors: Hans-Georg Neumann, Mischa Buhrmeister
  • Publication number: 20140356539
    Abstract: A plating apparatus 20 includes a substrate holding device 110 configured to hold a substrate W; a discharging device 21 configured to discharge a plating liquid 35 toward the substrate W held by the substrate holding device 110; and a plating liquid supplying device 30 connected to the discharging device 21 and configured to supply the plating liquid 35 to the discharging device 21. A gas supplying device 170 is configured to heat a heating gas G having a higher specific heat capacity than air and supply the heated heating gas G toward the substrate W held by the substrate holding device 110. Further, a controller 160 is configured to control at least the discharging device 21, the plating liquid supplying device 30, and the gas supplying device 170.
    Type: Application
    Filed: November 12, 2012
    Publication date: December 4, 2014
    Applicant: Tokyo Electron Limited
    Inventors: Yuichiro Inatomi, Takashi Tanaka, Mitsuaki Iwashita
  • Patent number: 8901012
    Abstract: According to one embodiment, a semiconductor manufacturing apparatus includes a substrate stage, a transfer unit, and a control unit. A substrate is settable on the substrate stage. The transfer unit is configured to transfer a pattern having an uneven configuration onto a major surface of the substrate by attachably and removably holding a template. The pattern is provided in the transfer surface. The control unit is configured to acquire information relating to a number of foreign objects on the major surface prior to the transferring of the pattern. The control unit adds the number for a plurality of the substrates including the pattern transferred by the transfer unit. The control unit causes the transfer unit not to implement the transferring of the pattern in the case where the sum has reached the upper limit.
    Type: Grant
    Filed: August 30, 2012
    Date of Patent: December 2, 2014
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Masayuki Hatano, Hiroshi Tokue
  • Publication number: 20140338214
    Abstract: A coating device for coating a medical device with a drug-eluting material uses an in-process drying station between coats to improve a drug release profile. The drying station includes a heat nozzle configured for applying a uniform drying gas.
    Type: Application
    Filed: June 11, 2014
    Publication date: November 20, 2014
    Inventors: Charles R. Bobson, Kurt Scheinpflug, Yung-Ming Chen, Jeff H. Smith
  • Publication number: 20140318444
    Abstract: A fluid bed granulation process of a predetermined substance comprises the steps of: forming, through a fluidification, air flow of predetermined flow rate, a fluid bed of granules of said substance to be granulated fed to it in the form of seeds,—feeding said fluid bed with a continuous flow of a growth substance (or liquid).
    Type: Application
    Filed: July 7, 2014
    Publication date: October 30, 2014
    Applicant: Casale SA
    Inventor: Gianfranco Bedetti
  • Publication number: 20140308433
    Abstract: Described herein are methods and systems for the manufacture of composite articles, wherein a composite article is manufactured using a filamentary material and a liner, comprising: providing a material in heat transfer relation with the inner surface of said liner; applying uncured filamentary material to the outer surface of said liner; and heating a portion of said material in heat transfer relation with the inner surface of said liner, wherein heating said portion of said material effects cure of said composite article. Also in the methods and systems herein, a composite article is manufactured using a filamentary material wound on a liner, comprising, a material in heat transfer relation with the inner surface of said liner; heating means operable to heat a portion of said material in heat transfer relation with the inner surface of said liner, wherein heating said portion of said material effects cure of said composite vessel.
    Type: Application
    Filed: August 13, 2012
    Publication date: October 16, 2014
    Inventor: Joseph Ouellette
  • Patent number: 8851008
    Abstract: A substrate treating apparatus includes a plurality of substrate treatment lines arranged vertically. Each substrate treatment line has a plurality of main transport mechanisms arranged horizontally, and a plurality of treating units provided for each main transport mechanism for treating substrates. A series of treatments is carried out for the substrates, with each main transport mechanism transporting the substrates to the treating units associated therewith, and transferring the substrates to the other main transport mechanism horizontally adjacent thereto. The substrate treating apparatus realizes increased processing capabilities by treating the substrates in parallel through the substrate treatment lines.
    Type: Grant
    Filed: June 27, 2008
    Date of Patent: October 7, 2014
    Assignee: Sokudo Co., Ltd.
    Inventors: Yoshiteru Fukutomi, Tsuyoshi Mitsuhashi, Hiroyuki Ogura, Kenya Morinishi, Yasuo Kawamatsu, Hiromichi Nagashima
  • Publication number: 20140290570
    Abstract: Disclosed is a method for producing a coated substrate using a compact, easy to handle and automated coating apparatus that can prepare coated composite in a single batch process, with sufficient control over each portion of the coating apparatus. The coating apparatus may include a coating unit, a drying unit and a pressing unit sequentially arranged in a single line to produce the coated substrate.
    Type: Application
    Filed: March 10, 2014
    Publication date: October 2, 2014
    Applicant: Tata Consultancy Services Limited
    Inventors: Auhin Kumar MAPARU, Beena Rai