Plural Electrodes Selectively Energized Patents (Class 118/625)
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Patent number: 10480074Abstract: Embodiments disclosed herein generally include an apparatus for radical-based deposition of dielectric films. The apparatus includes a processing chamber, a radical source coupled to the processing chamber, a substrate support disposed in the processing chamber, and a dual-channel showerhead disposed between the radical source and the substrate support. The dual-channel showerhead includes a plurality of tubes and an internal volume surrounding the plurality of tubes. The plurality of tubes and the internal volume are surrounded by one or more annular channels embedded in the dual-channel showerhead. The dual-channel showerhead further includes a first inlet connected to the one or more channels and a second inlet connected to the internal volume. The processing chamber may be a PECVD chamber, and the apparatus is capable of performing a cyclic process (alternating radical based CVD and PECVD).Type: GrantFiled: November 27, 2017Date of Patent: November 19, 2019Assignee: APPLIED MATERIALS, INC.Inventors: Jianhua Zhou, Juan Carlos Rocha-Alvarez, Yihong Chen, Abhijit Basu Mallick, Oscar Lopez, Ningli Liu
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Patent number: 10043637Abstract: A plasma processing apparatus includes: a process chamber configured to accommodate a substrate such that a plasma process is performed in the process chamber; a pedestal on which the substrate is disposed; an opposite electrode opposite to the pedestal; a first radio-frequency power source configured to supply a first radio-frequency power for generating plasma on one of the pedestal and the opposite electrode; a second radio-frequency power source configured to supply a second radio-frequency power for generating a bias voltage on the pedestal, the second radio-frequency power being lower in frequency than the first radio-frequency power; a direct-current power source configured to supply a direct-current voltage to the opposite electrode; and a controller configured to control the first radio-frequency power source, the second radio-frequency power source, and the direct-current power source.Type: GrantFiled: May 24, 2017Date of Patent: August 7, 2018Assignee: Tokyo Electron LimitedInventors: Yoshinori Suzuki, Akitoshi Harada
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Patent number: 9840777Abstract: Embodiments disclosed herein generally include an apparatus for radical-based deposition of dielectric films. The apparatus includes a processing chamber, a radical source coupled to the processing chamber, a substrate support disposed in the processing chamber, and a dual-channel showerhead disposed between the radical source and the substrate support. The dual-channel showerhead includes a plurality of tubes and an internal volume surrounding the plurality of tubes. The plurality of tubes and the internal volume are surrounded by one or more annular channels embedded in the dual-channel showerhead. The dual-channel showerhead further includes a first inlet connected to the one or more channels and a second inlet connected to the internal volume. The processing chamber may be a PECVD chamber, and the apparatus is capable of performing a cyclic process (alternating radical based CVD and PECVD).Type: GrantFiled: August 26, 2014Date of Patent: December 12, 2017Assignee: APPLIED MATERIALS, INC.Inventors: Jianhua Zhou, Juan Carlos Rocha-Alvarez, Yihong Chen, Abhijit Basu Mallick, Oscar Lopez, Ningli Liu
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Patent number: 9368380Abstract: Provided is a substrate processing apparatus. The substrate processing apparatus includes a chamber providing a stacking space in which a substrate is stacked and a process space in which a process with respect to the substrate is performed, a boat including at least one boat frame that vertically stands up, the boat being elevated to move into the stacking space and the process space, a plurality of susceptors disposed on the boat frame and spaced apart from each other along a longitudinal direction of the boat frame, wherein, as the boat moves into the process space, the substrate is successively loaded on a top surface of each of the plurality of susceptors, and at least holder including a vertical rod disposed parallel to the boat frame and a substrate support tip protruding from an inner surface of the vertical rod to support the substrate, wherein, when the boat moves into the process space, the vertical rod relatively moves along the longitudinal direction of the boat frame.Type: GrantFiled: February 17, 2014Date of Patent: June 14, 2016Assignee: EUGENE TECHNOLOGY CO., LTD.Inventors: Il-Kwang Yang, Byoung-Gyu Song, Kyong-Hun Kim, Yong-Ki Kim, Yang-Sik Shin
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Patent number: 9032905Abstract: An apparatus and method for coating a substrate using one or more liquid raw materials, includes: at least one atomizer for atomizing the one or more liquid raw materials into droplets, charging means for electrically charging the droplets during or after the atomization and a deposition chamber in which the droplets are deposited on the substrate, the deposition chamber being provided with one or more electric fields for guiding the electrically charged droplets on the substrate. According to the invention there is a charging chamber arranged upstream of the deposition chamber and provided with charging means for electrically charging the droplets.Type: GrantFiled: June 21, 2010Date of Patent: May 19, 2015Assignee: BENEQ OYInventors: Sami Kauppinen, Markku Rajala
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Patent number: 8443754Abstract: An atomizer (2) with a rotary atomizing head (4) is mounted on the front side of a housing member (6) in which an air motor (3) is accommodated. A primary external electrode (8) is located around the outer peripheral side of the housing member (6) in such a way as to encircle the housing member (6). A secondary external electrode (10) is located on the front side of the housing member (6), in a position closer to the rotary atomizing head (4) than the primary external electrode (8). A first high voltage (V1) in the form of a direct-current voltage is supplied to the primary external electrode (8) from a first high voltage generator (11). On the other hand, a second high voltage (V2), in the form of a pulsating voltage (V2p) consisting of a series of intermittent pulses in a range lower than the first high voltage (V1), is supplied to the secondary external electrode (10) from a second high voltage generator (12).Type: GrantFiled: October 9, 2008Date of Patent: May 21, 2013Assignee: ABB K.K.Inventor: Yukio Yamada
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Patent number: 8307780Abstract: Intended is to enable an electrostatic coating apparatus including a plurality of needle electrodes formed in an annular shape and having a blot preventing function, to prevent the generation of a spark discharge reliably, in case an arbitrary needle electrode approaches an earth element, and to keep the intensity of a generated electrostatic field properly. A coating gun comprises a blot preventing device including a ring-shaped electrode unit having a plurality of needle electrodes protruding radially at a substantially equal spacing radially outward from an annular base member, and a high-voltage generator for applying a high voltage to the electrode unit. The needle electrodes are connected in parallel with the high-voltage generator through individual resistors, block-by-block resistors and built-in resistors.Type: GrantFiled: October 28, 2008Date of Patent: November 13, 2012Assignees: Toyota Jidosha Kabushiki Kaisha, Ransburg Industrial Finishing K.K.Inventors: Isamu Yamasaki, Akira Kato, Michio Mitsui, Kimiyoshi Nagai
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Patent number: 8166912Abstract: A powder spray coating discharge assembly (230, 260, 216, 228, 232) for connection to an electrostatic spray coating gun (210), the gun (210) having a gun body (212), means for connecting to a supply of coating powder and means for supplying a voltage (20) at first and second potentials respectively to first (292) and second electrical connections (294) each for connection to a respective one of a discharge electrode (232) and a counter electrode (260), the means for supplying the voltage (20) comprising: a variable voltage power supply (114) having an input connected to an electrical power source (110), an output connected to each of the first and second electrical connections (292, 294), a control circuit (128) for controlling the variable voltage power supply (20) and means (120) for sensing an output load, wherein the control circuit (128) is adapted to adjust the variable voltage power supply (20) to reduce the voltage and current in proportion to a sensed increase in load, or vice-versa.Type: GrantFiled: March 26, 2009Date of Patent: May 1, 2012Assignee: Yu Tung Investment Holdings LimitedInventor: Man Kin Mickey Ko
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Patent number: 8096264Abstract: A method and apparatus for coating articles with a coating material comprise forming a charged body of coating material, atomizing coating material from the charged body to form charged atomized coating material particles, and repelling the charged coating material particles from an apparatus which forms the charged body of coating material and atomizes the coating material from the charged body to form charged atomized coating material particles.Type: GrantFiled: November 30, 2007Date of Patent: January 17, 2012Assignee: Illinois Tool Works Inc.Inventor: David M. Seitz
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Publication number: 20110311731Abstract: A system that incorporates teachings of the present disclosure may include, for example, an apparatus having a plurality of applicators, each applicator with an ingress opening to receive a liquid, and an egress opening to release the liquid, and a conductor positioned in a conduit of each of the plurality of applicators, the conductor and the conduit having dimensions to cause a surface tension of the liquid to prevent a constant flow of the liquid from the egress opening. Each conductor of the plurality of applicators can be coupled to one of one or more power sources operable to apply a charge to the liquid to overcome the surface tension and form at the egress opening of each applicator a plurality of jet sprays of the liquid applicable on a substrate to form a thin film. Additional embodiments are disclosed.Type: ApplicationFiled: August 26, 2011Publication date: December 22, 2011Applicant: THE BOARD OF TRUSTEES OF THE UNIVIERSITY OF ILLINOISInventors: KYEKYOON KIM, Hyungsoo Choi
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Patent number: 8025025Abstract: A system that incorporates teachings of the present disclosure may include, for example, an apparatus having a plurality of applicators, each applicator with an ingress opening to receive a liquid, and an egress opening to release the liquid, and a conductor positioned in a conduit of each of the plurality of applicators, the conductor and the conduit having dimensions to cause a surface tension of the liquid to prevent a constant flow of the liquid from the egress opening. Each conductor of the plurality of applicators can be coupled to one of one or more power sources operable to apply a charge to the liquid to overcome the surface tension and form at the egress opening of each applicator a plurality of jet sprays of the liquid applicable on a substrate to form a thin film. Additional embodiments are disclosed.Type: GrantFiled: April 10, 2009Date of Patent: September 27, 2011Assignee: The Board of Trustees of the University of IllinoisInventors: Kyekyoon Kim, Hyungsoo Choi
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Patent number: 7966967Abstract: An electrostatic coating system (1) comprising a coating gun (2) for spraying a coating material toward an article (9) to be coated, and a robot arm (3) for moving the coating gun (2) with respect to the article (9) to be coated wherein a voltage is applied to the coating gun (2). A needle-like electrode (11) which is an electrostatic electrode having a pointed end applied with a voltage having the same polarity as that of the voltage applied to the coating gun (2), is attached to the coating gun (2) or the robot arm (3).Type: GrantFiled: September 16, 2005Date of Patent: June 28, 2011Assignees: Toyota Jidosha Kabushiki Kaisha, Ransburg Industrial Finishing K.K.Inventors: Masahito Sakakibara, Shinichi Washizu, Michio Mitsui, Kimiyoshi Nagai
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Patent number: 7935390Abstract: A lubricant dispensing system is provided. The dispensing system includes a lubricant supply, a lubricant dispensing nozzle and a control panel. The dispensing nozzle includes a nozzle body with a fluid passageway therein which is in fluid communication with the lubricant supply, an electrode assembly for electrostatically charging lubricant in the fluid passageway and at least one discharge orifice through which electrostatically charged lubricant can be discharged. The discharge orifice is defined by at least one spray needle having a first end in fluid communication with the fluid passageway and a second end that extends outward of the nozzle body. The control panel directs the flow of lubricant from the lubricant supply to the lubricant dispensing nozzle and controls the electric power supplied to the electrode assembly.Type: GrantFiled: February 2, 2007Date of Patent: May 3, 2011Assignee: Spraying Systems Co.Inventor: Eric Budi Muljono
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Patent number: 7859180Abstract: Disclosure of an electrode arrangement (1) as high voltage electrode for continual plasma treatment or plasma coating of web material with several knife electrodes (3) arranged at a right angle to any transport direction of the web material and essentially located parallely to each other which is characterized by the fact that the distances (a?e) of adjacent knife electrodes (3) vary. In tests it has turned out that a more uniform coating result or, respectively, treatment result can be achieved with such an electrode arrangement than with comparable arrangements in which the knife electrodes are arranged equidistant. Preferably, the distances (a) between adjacent knife electrodes (3) are larger at the edges of the electrode arrangement (1) than the distances (e) between adjacent knife electrodes (3) in its center.Type: GrantFiled: June 1, 2007Date of Patent: December 28, 2010Assignee: Softal Electronic Erik Blumenfeld GmbH & Co.Inventors: Eckhard Prinz, Peter Palm, Frank Forster
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Patent number: 7829154Abstract: To provide a (homogeneous) particle deposit without any impurity contamination, on which only particles with a desired size are deposited. A solution, with particles dispersed in a solvent, is jetted as a flow of fine liquid droplets from a tip part of a capillary, and the jetted fine liquid droplets are electrically charged. This flow of the droplets is introduced into a vacuum chamber through a jet nozzle, as a free jet flow. The free jet flow that travels in the vacuum chamber is introduced into an inside of a deposition chamber, inside of which is set at lower pressure, through a skimmer nozzle provided in the deposition chamber, as an ion beam. Subsequently, by an energy separation device, only particles having particular energy are selected from the electrically charged particles in the flow, and are deposited on a deposited body disposed in an inside of the deposition chamber.Type: GrantFiled: October 21, 2005Date of Patent: November 9, 2010Assignee: Hoya CorporationInventors: Satoshi Kobayashi, Yuki Iguchi
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Patent number: 7829463Abstract: A plasma processing method performs a desired plasma process on substrates by using a plasma generated in a processing space. A first and a second electrode are disposed in parallel in a processing vessel that is grounded, the substrate is supported on the second electrode to face the first electrode, the processing vessel is vacuum evacuated, a desired processing gas is supplied into the processing space formed between the first electrode, the second electrode and a sidewall of the processing vessel, and a first radio frequency power is supplied to the second electrode. The first electrode is connected to the processing vessel via an insulator or a space, and is electrically coupled to a ground potential via a capacitance varying unit whose electrostatic capacitance is varied based on a process condition of the plasma process performed on the substrate.Type: GrantFiled: March 30, 2007Date of Patent: November 9, 2010Assignee: Tokyo Electron LimitedInventors: Naoki Matsumoto, Chishio Koshimizu, Manabu Iwata, Satoshi Tanaka
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Patent number: 7748343Abstract: An electrohydrodynamic spray apparatus includes a liquid inlet and a spray nozzle in fluid communication with the liquid inlet, where the spray nozzle has an opening downstream of the liquid inlet. An inner electrode is situated at least partially inside the spray nozzle. An outer electrode is situated external to the spray nozzle and within about 100 mm of the opening of the nozzle. The electrohydrodynamic spray apparatus can be combined with a substrate to form an electrohydrodynamic spray system. The electrohydrodynamic spray apparatus or system can be used to form nanostructures such as nanodrops, nanoparticles and thin films.Type: GrantFiled: November 22, 2004Date of Patent: July 6, 2010Assignee: The Board of Trustees of the University of IllinoisInventors: Kyekyoon Kim, Ravindra Pratap Singh
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Patent number: 7516714Abstract: A solution containing a sample is provided vibration by a vibrating element, the solution is atomized in a status retaining its activities as minute particulate substances, and the solution and/or the atomized minute particulate substances are electrically charged by wires applied a high voltage. Then, the particles are dried out during flying, the particles are deposited onto a substrate grounded by electrostatic force, and to be immobilized in a status keeping its activities.Type: GrantFiled: November 5, 2002Date of Patent: April 14, 2009Assignees: Riken, Fuence Co., Ltd.Inventors: Yutaka Yamagata, Toshiro Higuchi, Joon Wan Kim, Kozo Inoue
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Patent number: 7497910Abstract: A method and apparatus are presented for electrostatic deposition of dry powder to a tablet, capsule, or a specific area of any of a wide range of pharmaceutical substrates. The apparatus includes: a magnetic brush having a rotatable multi-pole magnetic core and a stationary outer shell; a developer supply for supplying a magnetic developer powder, consisting of a magnetic carrier particles and pharmaceutical dry powder particles, to the magnetic brush; a print head on the outer shell; a tablet or other pharmaceutical substrate arranged in spaced relation to the print head to define a pharmaceutical powder transfer region through which the substrate can be moved.Type: GrantFiled: June 21, 2002Date of Patent: March 3, 2009Assignee: Tiger Microsystems, Inc.Inventors: William Mey, William J. Grande
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Patent number: 7332039Abstract: A nozzle head NH of a plasma processing apparatus comprises an annular inner holder 3, an annular inner electrode 11 surrounding this holder 3, an annular outer electrode 21 surrounding this electrode 11, and an annular outer holder 4 surrounding this electrode 21. The inner holder 3 is provided with a plurality of bolts 7 spacedly arranged in the peripheral direction and adapted to push the inner electrode 11 radially outwardly. The outer holder 4 is provided with a plurality of bolts 8 spacedly arranged in the peripheral direction and adapted to push the outer electrode 21 radially inwardly. Owing to this arrangement, the operation for disassembling, assembling and centering the annular electrodes 11, 21 can be carried out with ease.Type: GrantFiled: March 4, 2004Date of Patent: February 19, 2008Assignee: Sekisui Chemical Co., Ltd.Inventors: Mitsuhide Nogami, Eiji Miyamoto
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Patent number: 7220459Abstract: A method for finishing a manufactured article by powder painting, comprising the step of applying, on a surface to be decorated of the manufactured article, one decorative layer obtained by means of the transfer by controlled migration of powder particles which originate from a graphic matrix arranged in front of the surface to be decorated and designed to adhere thereto; the transfer and adhesion steps being provided by a first electostatic field which comprises lines of force incident at right angles to the surface to be decorated, the manufactured article acting fully or partly as reference electrode for the first electrostatic field, so as to produce a condition of solid contact between the electrode and the surface to be decorated.Type: GrantFiled: August 2, 2001Date of Patent: May 22, 2007Assignee: Paradigma S.R.L.Inventor: Tito Trevisan
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Patent number: 7070656Abstract: The invention provides apparatus for electrostatically coating a pharmaceutical tablet core with powdered coating material. The apparatus comprises a first rotary drum (12) on which a core is held in electrical isolation from its surroundings but at a potential differecne to earth by an electrode which contacts the core. The core is carried past a coating station B at which particles of powder having an opposite potential difference to earth are held in a tray (18). The surface of the drum is held at the same potential difference to earth as the powder particles. The powder is attracted to the core, and not to the drum, coating the exposed surface of the core. The drum carries the coated core past a fusing station C at which a heater fuses the powder to form a continuous film coating. The core is then turned and transferred onto a second drum (12?) where the other surface is coated in the same way.Type: GrantFiled: December 19, 2003Date of Patent: July 4, 2006Assignee: Phoqus Pharmaceuticals LimitedInventors: John E. Hogan, John N. Stannforth, Linda Reeves, Trevor Page
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Patent number: 6890475Abstract: The invention relates to a method for manufacturing a thin-walled article, wherein a single- or multi-component, essentially polymer-based material (1), such as plastics, elastomers, and/or the like, is sprayed in an elecrical field (E) in an electrically charged state. The thin-walled article is manufactured in the electrical field (E) by spraying (II) an electrically charged material into the contact with a mould (2) set at an electric potential, after which spraying cycle (II) the article is, at least in terms of its appearance, immediately a finished product after its demoulding/releasing from the mould (2). The invention relates also to an apparatus operating in accordance with the method.Type: GrantFiled: April 28, 1999Date of Patent: May 10, 2005Assignee: Oy OMS Optomedical Systems Ltd.Inventors: Leo Hatjasalo, Jarkko Valtanen
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Patent number: 6889721Abstract: An apparatus for fabricating a liquid crystal display panel includes a chamber for holding a substrate, wherein the substrate includes first and second metal patterns, a spray nozzle connected to the chamber for spraying spacers onto the substrate, wherein the spacers are charged with a predetermined polarity, and a first power supplier connected to the chamber for applying a first voltage with a positive polarity and a second voltage with a negative polarity to the first and second metal patterns of the substrate.Type: GrantFiled: May 8, 2003Date of Patent: May 10, 2005Assignee: LG.Philips LCD Co., Ltd.Inventors: Seong Ho Kim, Woo Sup Shin, Hak Jun Lee, Yeong Geun Hwang, Tae Man Kim
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Patent number: 6875278Abstract: A powder atomizer comprises a rotatable powder conveying brush operably associated with a powder supply. A powder receptacle has an inlet and an outlet. The powder conveying brush extends along the inlet and supplies powder to the receptacle. A rotatable powder metering brush is operatively associated with the outlet and withdraws powder from the receptacle. A rotatable powder atomizing brush is operatively associated with and receives powder from the metering brush and discharges the powder. A shoe is operatively associated with the atomizing brush, and is pivotable about a pivot axis between a first and a second position.Type: GrantFiled: September 7, 2001Date of Patent: April 5, 2005Assignee: Material Sciences CorporationInventors: Darrell A. Kerbel, Sang Rhee, Ted B. Kumzi, Don K. Sheldon, Deirk A. Feiner, Merethe Pepevnik, Bernard Y. Conyers, III
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Patent number: 6860769Abstract: A cathode contact pin for making electrically conductive contact with a conductive area for carrying out an electrodeposition process including a stem region disposed adjacent a tip region said stem region for interfacing with an electrical source of power for carrying electrical power to said tip region said tip region having a radius of curvature forming a tip region contact surface for contacting a metal contact pad region such that upon contact a contacting portion of the tip region contact surface is confined within an area defined by the metal contact pad region.Type: GrantFiled: January 12, 2002Date of Patent: March 1, 2005Assignee: Taiwan Semiconductor Manufacturing Co., LtdInventors: Chung-Shi Liu, Chen-Hua Yu
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Patent number: 6844048Abstract: Provided is, among other things, a conductive inlay film comprising: a layer of dielectric film having a pattern of holes suitable to define selected regions to which particles will be deposited by electrostatic deposition; and a conductive element comprising polymer, which element comprises (a) a conductive film laminated against the dielectric film or (b) a conductive film embedded within the holes, the portion of the conductive element appearing within the holes comprising conductive inlays, wherein the conductive element is adapted to contact one or more electrode pads and provide electrical potentials at the selected regions, and wherein the dielectric film electrically isolates the selected regions.Type: GrantFiled: July 11, 2001Date of Patent: January 18, 2005Assignee: Sarnoff CorporationInventors: Ramaswamy Murari, Jen-Chi Chen, Suggy S. Chrai
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Patent number: 6649221Abstract: Provided is a spacer microparticle spraying apparatus capable of selectively disposing spacer microparticles in electrode gaps where no pixels are present even on a substrate carrying an array of stripe electrodes in use for the STN liquid crystal display device, to a spacer particle spraying method and a method of manufacturing a liquid crystal display device which utilize said apparatus. The spacer microparticle spraying apparatus for selective disposition of a charged spacer microparticle on a substrate carrying a plurality of electrodes includes a spraying chamber adapted to accommodate the substrate, a spacer microparticle supply means for supplying the spacer microparticle into the spraying chamber and spraying it on the substrate, and a voltage application means for applying voltages to the electrodes disposed on the substrate, wherein the voltage application means is capable of applying different levels of voltages to the electrodes respectively.Type: GrantFiled: June 21, 2000Date of Patent: November 18, 2003Assignees: Sekisui Chemical Co., Ltd., Sharp Kabushiki Kaisha, Nisshin Engineering, Inc.Inventors: Akihiko Tateno, Hiroyuki Nakatani, Kazuya Yoshimura, Makoto Nakahara, Takatoshi Kira, Daisuke Ikesugi, Masaki Ban, Hiroshi Murata, Masaaki Kubo
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Patent number: 6595819Abstract: This invention provides equipment for fabricating partitioning ribs of a plasma display device. The equipment comprises a head, a driver, an X position sensor and a Y position sensor, a laser displacement sensor for detecting the distance of the head from a glass plate or substrate, a motor and a motor driver for moving the head relative to the glass plate, and a CPU for controlling various circuits. The head has nozzle members for ejecting partitioning rib grains by an electrostatic ejection method or ink jet technology to form partitioning ribs. The driver controls the volume of the partitioning rib grains ejected from the head. The X and Y position sensors detect the position of the head relative to the glass plate within a plane.Type: GrantFiled: May 16, 2000Date of Patent: July 22, 2003Assignee: Olympus Optical Co., Ltd.Inventors: Toshihiro Kitahara, Hiroshi Hashi, Akihiro Kubota, Susumu Kobayashi, Hidetoshi Yamada
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Patent number: 6592671Abstract: The disclosure relates to an apparatus for electrostatically adhering grains to a planar substrate comprising: a. an electrostatic chuck having a collection surface with at least one grain collection zone for, when the planar substrate is layered on the collection surface, electrostatically directing charged grains to a corresponding surface on the planar substrate; and b. a pattern of holes through the electrostatic chuck allowing a source of low pressure to act through the electrostatic chuck to adhere the planar substrate.Type: GrantFiled: January 25, 2001Date of Patent: July 15, 2003Assignee: Delsys Pharmaceutical CorporationInventors: Hoi Cheong Steve Sun, Bogdan Brycki
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Patent number: 6585936Abstract: An automated slide stainer with fluid flow control. The fluid flow control controls the flow rate of fluid, e.g., water, applied to at least one slide by the slide stainer. In an automated slide stainer that applies reagents to slides to stain biological specimens on the slides, the flow rate controlled fluid can be used to adequately rinse the slides without damaging the biological specimens contained on the slides.Type: GrantFiled: June 28, 2002Date of Patent: July 1, 2003Inventor: Preyas Sarabhai Shah
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Patent number: 6562138Abstract: A spray coating device for coating powder, comprising an electrode support (24) fitted with an electrically insulating tubular segment (26) running at least 1.5 cm from an electric contactor (34) into a powder duct (8).Type: GrantFiled: February 21, 2001Date of Patent: May 13, 2003Assignee: ITW Gema AGInventor: Gerald Haas
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Patent number: 6555180Abstract: A system and method for directing metal or ceramic particles toward a substrate (18) in a vacuum chamber includes a powder hopper (11), an enclosure (12) containing multiple differentially pumped vacuum chambers (19), a charging lamp (13), a tube (14), multiple charging and heating diodes 15, and an electromagnetic field generating device (EFGD) (17). The hopper (11) holds metal or ceramic particles, the chambers (19) propel the particles through the tube (14) towards substrate (18) positioned close to the tube, charging lamp (13) charges the particles, diodes (15) are used to heat the particles, and the EFGD (17) controls the direction of the particles propelled out of the tube.Type: GrantFiled: October 25, 2001Date of Patent: April 29, 2003Assignee: Vanderbilt UniversityInventors: William Hofmeister, David Gustafson, Bridget Rogers
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Patent number: 6352589Abstract: There is provided an apparatus for spin-coating a semiconductor substrate, including (a) a rotary table rotatable in opposite directions, (b) a nozzle dropping coating material onto a semiconductor substrate lying on the rotary table, (c) an electrode having a ring-shaped cross-section and disposed around the rotary table, and (d) a power source applying a voltage to the electrode, the voltage having an electric polarity opposite to an electric polarity of the coating material. Coating material dropped onto the semiconductor substrate is attracted to an electric field generated by the electrode around the semiconductor substrate. Hence, the coating material is not concentrated around a center of the semiconductor substrate, but is facilitated to uniformly spread over the semiconductor substrate, ensuring formation of a coating layer having a uniform thickness.Type: GrantFiled: December 2, 1999Date of Patent: March 5, 2002Assignee: NEC CorporationInventor: Shuichi Furuoya
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Publication number: 20020018859Abstract: Methods and associated apparatus are disclosed for use in mounting particles on and de-mounting particles from a substrate having an array of tacky and non-tacky areas. The particles can be either electrically conducting or electrically non-conducting. Selection of electrically conducting particles is preferred. The substrate having an array of tacky and non-tacky areas can either be electrically non-conducting (e.g., a dielectric substrate) or electrically-conducting. The methods involve use of first and second electrode plates with the substrate therebetween, the plates having applied thereto a direct current potential, which potential in preferred embodiments is reversed in polarity for a number N of cycles. Methods and articles are disclosed using an electrically conductive surface adjacent the tacky and non-tacky areas to minimize static buildup on the particles and tacky and non-tacky areas.Type: ApplicationFiled: June 7, 2001Publication date: February 14, 2002Inventors: Thomas Kenneth Bednarz, Allan Cairncross, John Edwin Gantzhorn, George Yeaman Thomson
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Patent number: 6321680Abstract: A plasma enhanced chemical vapor deposition (PECVD) system having an upper chamber for performing a plasma enhanced process, and a lower chamber having an access port for loading and unloading wafers to and from a wafer boat. The system includes apparatus for moving the wafer boat from the upper chamber to the lower chamber. The wafer boat includes susceptors for suspending wafers horizontally, spaced apart in a vertical stack. An RF plate is positioned in the boat above each wafer for generating an enhanced plasma. An RF connection is provided which allows RF energy to be transmitted to the RF plates while the wafer boat is rotated. Apparatus for automatic wafer loading and unloading is provided, including apparatus for lifting each wafer from its supporting susceptor and a robotic arm for unloading and loading the wafers.Type: GrantFiled: January 12, 1999Date of Patent: November 27, 2001Assignee: Torrex Equipment CorporationInventors: Robert C. Cook, Daniel L. Brors
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Patent number: 6216631Abstract: A system (100, 100′, 100″) and method for robotic manipulation of objects (130) is provided wherein particulates (110, 110′) are agitated by the transfer of energy thereto to establish patterned granular motion of the particulates (110, 110′). The patterned granular motion of the particulates (110, 110′) forms standing waves (112). The objects (130) align themselves with the standing waves (112) and thus are dynamically arranged in a configuration established by the location of the standing waves (112). The location of the standing waves (112) can be predetermined by controlling the waveform of the signals applied to the energy application system (140). The predetermined waveforms are supplied from the signal source (150, 154) to the energy application system (140).Type: GrantFiled: August 12, 1999Date of Patent: April 17, 2001Assignee: The Mitre CorporationInventor: Alexander D. Wissner-Gross
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Patent number: 6099747Abstract: A plasma processing apparatus and method in which a counter electrode is connected to a high frequency power source to generate a plasma and the substrate electrode is grounded and in which the substrate electrode is connected to a high frequency power source and the counter electrode is grounded to perform chamber etching.Type: GrantFiled: October 5, 1998Date of Patent: August 8, 2000Assignee: NEC CorporationInventor: Tatsuya Usami
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Patent number: 6086675Abstract: A web charging apparatus comprises wire electrodes, which are extended along the width of a moving web, and a grounded roller, on which the web is supported. A grounded plate is provided behind the wire electrodes relative to the grounded roller, so that the electrostatic potential at both widthwise ends of the web can be equal to the electrostatic potential at the central part of the web.Type: GrantFiled: May 8, 1998Date of Patent: July 11, 2000Assignee: Fuji Photo Film Co., Ltd.Inventors: Nobuo Hamamoto, Kenji Kojima
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Patent number: 6080363Abstract: A liquid-processing apparatus for processing vital specimens, such as an automatic staining apparatus for staining specimens of vital tissues or the like for microscopic examination, has a cabinet (7) internally provided with a lower plate (8) and an upper plate (9). Rinsing vessels (10) and chemical solution vessels (11) are placed on the lower panel (8), and chemical solution vessels (11) are placed on the upper plate (9). A hanger arm (24) supporting a staining basket (13) containing glass slides carrying specimens affixed thereto moves longitudinally in a lower space (26) extending over the lower plate (8) or an upper space (28) extending over the upper plate (9). The staining basket (13) can be moved between the spaces (26, 28) through a passage (29) formed in the upper plate (9). The liquid-processing apparatus requires a small floor space for installation and can be installed in a small place.Type: GrantFiled: October 14, 1998Date of Patent: June 27, 2000Assignees: Kabushiki Kaisha Tiyoda Seisadusho, Sakura Finetechnical Co. Ltd.Inventors: Tomio Takahashi, Mamoru Wakabayashi, Hiroe Tateya, Norihisa Ishizaka
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Patent number: 5850587Abstract: A system for delivering electrostatic toner to an image receiving member includes a traveling electrostatic wave toner conveyor with a delivery segment adjacent to the image receiving member. The delivery segment includes parallel traveling wave conveyor electrodes and nudging electrodes. The conveyor electrodes are connected to a source of DC-biased multiphase electric power to establish a traveling electrostatic wave in the delivery segment to move toner in a synchronous surfing mode. The nudging electrodes are connected to a source of repulsive DC voltage of the same polarity as the toner to slow and deflect toner toward the image receiving member. The delivery segment further includes overlaid barrier electrodes to maintain uniform delivery of toner to all apertures in an electronically addressable printhead.Type: GrantFiled: April 1, 1998Date of Patent: December 15, 1998Inventor: Fred W. Schmidlin
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Patent number: 5820941Abstract: Apparatus for powder spray coating comprises means (4) for electrostatically-charging powder entrained in air, a conduit (6) for transporting the electrostatically charged powder from the charging means (4) to an internal chamber (12) in a spray head (8), the spray head (8) having at least one passage (16) from the internal chamber (12) to at least one nozzle (17) from which the powder is discharged, and a deflector (18) mounted externally of the spray head (8) and adjacent to the or each nozzle (17) to deflect the discharged powder into a flat spray pattern, the spray head (8) and the flat spray pattern being substantially symmetrical about a common longitudinal axis. The apparatus is particularly suitable for coating a large surface area, or a plurality of small objects hung in a planar array. Preferably multiple triboelectric type charging means (4) are used and a single pump is used to supply powder to the multiple charging means through a common distributor.Type: GrantFiled: May 28, 1996Date of Patent: October 13, 1998Assignee: Nordson CorporationInventors: Harry-Graham Felton, Jan Ruud
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Patent number: 5744019Abstract: Multiple-layer thin film devices are deposited by electroplating on an otherwise substantially clean substrate wafer. The composition of the electroplated alloy layers is maintained substantially uniform using a cathode assembly on which the substrate wafer is mounted. The cathode assembly includes an inner cathode ring electrically connected to the wafer, a thief ring external to the cathode ring and an insulating ring connected between and electrically insulating the cathode and thief rings. The cathode ring and the thief ring are powered by separate power sources.Type: GrantFiled: January 31, 1997Date of Patent: April 28, 1998Assignee: AIWA Research and Development, Inc.Inventor: Jane Ang
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Patent number: 5688563Abstract: A system controls the flow of a conductive fluid after the fluid is coated onto a substrate by applying an electrostatic force to the coated fluid. The force applied to the fluid can be controlled to counteract the fluid tendency to dewet to a thicker state if significant interfacial surface tension differences exists between the fluid and substrate.Type: GrantFiled: February 29, 1996Date of Patent: November 18, 1997Assignee: Minnesota Mining and Manufacturing CompanyInventors: John W. Louks, Steven H. Gotz
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Patent number: 5669973Abstract: Apparatus having a substrate having a planar conductive plating located on a first surface of a dielectric layer and having a conductive trace (a collection trace) located on a second surface of the dielectric layer such that the conducting plating and the conductive trace have a parallel, spaced-apart relation. The conductive trace is charged by supplying a voltage to the plating and the trace to establish a voltage differential across the dielectric layer. As such, depending upon the magnitude of the voltage, polarity of the voltage and the duration for which the voltage is applied to the trace, a certain quantity and polarity of charge accumulates on the trace. The material to be deposited is charged to an opposite polarity than that of the trace and then the deposition material is applied to the trace. Consequently, the substrate electrostatically retains the deposition material on the collection trace.Type: GrantFiled: June 6, 1995Date of Patent: September 23, 1997Assignee: David Sarnoff Research Center, Inc.Inventor: Timothy Allen Pletcher
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Patent number: 5620581Abstract: Multiple-layer thin film devices are deposited by electroplating on an otherwise substantially clean substrate wafer. The composition of the electroplated alloy layers is maintained substantially uniform using a cathode assembly on which the substrate wafer is mounted. The cathode assembly includes an inner cathode ring electrically connected to the wafer, a thief ring external to the cathode ring and an insulating ring connected between and electrically insulating the cathode and thief rings. The cathode ring and the thief ring are powered by separate power sources.Type: GrantFiled: November 29, 1995Date of Patent: April 15, 1997Assignee: AIWA Research and Development, Inc.Inventor: Jane Ang
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Patent number: 5482556Abstract: Apparatus for mounting and moving coating dispensers within the interior of a spray booth, and particularly the coating dispensers located above an object moving through the booth. A first embodiment comprises a dispenser housing having an aerodynamically shaped outer surface formed with a leading edge, a trailing edge and opposed generally curved sides. A second embodiment includes a dispenser housing an outer surface with a convexly curved leading edge, flat side walls and a flat bottom wall. A pair of support assemblies isolated from the booth interior mount the dispenser housings within the booth interior such that the leading edge of each dispenser housing faces the top of the spray booth and the trailing edge faces the objects moving through the booth. One or more coating dispensers are mounted at the trailing edge of the dispenser housings in a position to discharge coating material downwardly onto the object.Type: GrantFiled: September 24, 1993Date of Patent: January 9, 1996Assignee: Nordson CorporationInventors: Jeffrey R. Shutic, Robert J. Holland, John F. Carlson
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Patent number: 5453304Abstract: In a system and method for forming a metal oxide coating on glassware, heated glassware is provided in a coating zone, preferably by a grounded conveyor. An electrostatic charging and depositing field is established to a surface of the glassware in the coating zone, and a flow of metallic vapor is generated and introduced into the electrostatic charging and depositing field. The metallic vapor is electrostatically deposited on the surface of the heated glassware, and reacts with oxygen at the surface of the heated glassware to form a metal oxide coating on the surface of the glassware. The system and method can be used in either cold end coating or hot end coating, and can provide a dual cold end coating with an initial metal oxide cold end coating and a subsequent conventional cold end coating, providing improved surface lubricity at reduced costs.Type: GrantFiled: December 22, 1993Date of Patent: September 26, 1995Inventor: Addison B. Scholes
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Patent number: 5284684Abstract: Electrostatic coating methods and apparatus are used to coat the exterior surface of glassware and preclude deposition on the interior surface and mouth of the glassware. A preferred stearic acid coating electrostatically applied over glassware with a hot end coating provides a more durable coating, improves scratch resistance and can reduce the amount of hot end coating for improved scratch resistance.Type: GrantFiled: March 3, 1992Date of Patent: February 8, 1994Assignee: Alltrista CorporationInventor: Addison B. Scholes
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Patent number: 5138971Abstract: A web charging apparatus, for use in a coating system for applying various coating liquids onto a web which has been previously charged by a static field in which conductive wires form a corona discharge electrode. The diameter of the wires is in a range of 100-200 .mu.m, and the tension of the wires is not less than 1 kg. Intermediate holding frames for holding the wires are also provided. The web charging apparatus reduces the voltage irregularities in the width direction of the web and the irregular thickness of the coating liquid in the transfer direction.Type: GrantFiled: June 26, 1991Date of Patent: August 18, 1992Assignee: Fuji Photo Film Co., Ltd.Inventors: Kenji Nakajima, Atuo Futami