To Manipulate Work By Gas Blast Patents (Class 118/62)
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Patent number: 7987813Abstract: Apparatuses and processes for maskless deposition of electronic and biological materials. The process is capable of direct deposition of features with linewidths varying from the micron range up to a fraction of a millimeter, and may be used to deposit features on substrates with damage thresholds near 100° C. Deposition and subsequent processing may be carried out under ambient conditions, eliminating the need for a vacuum atmosphere. The process may also be performed in an inert gas environment. Deposition of and subsequent laser post processing produces linewidths as low as 1 micron, with sub-micron edge definition. The apparatus nozzle has a large working distance—the orifice to substrate distance may be several millimeters—and direct write onto non-planar surfaces is possible.Type: GrantFiled: January 6, 2009Date of Patent: August 2, 2011Assignee: Optomec, Inc.Inventors: Michael J. Renn, Bruce H. King, Marcelino Essien, Gregory J. Marquez, Manampathy G. Giridharan, Jyh-Cherng Sheu
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Publication number: 20110139066Abstract: A pneumatic nozzle for roller coating is revealed. A workpiece to be coated is fixed on a rotating power source of a machine. A high-pressure pneumatic nozzle and a material supply nozzle, both corresponding to the workpiece, are arranged at the machine. The workpiece is driven to rotate by the rotating power source while the material supply nozzle applies coating material to the workpiece and the high-pressure pneumatic nozzle releases high pressure gas. The coating material attached on the surface of the workpiece is pushed by the high pressure gas and spread uniformly on the workpiece by rotating workpiece. Thereby the material is coated smoothly in a non-contact way and the thickness of the coating material is controlled in micron scale. This helps following manufacturing of three-dimensional microstructures on rolls for producing roll dies and increases the practical value.Type: ApplicationFiled: December 10, 2009Publication date: June 16, 2011Inventors: Cheng-Hsin Chuang, Hsing-Sheng Wu, Deng-Maw Lu
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Patent number: 7954447Abstract: A method of creating an air barrier on both sides of an innerliner splice on the inside surface of a green tire when a bladder release lubricant is being applied thereto to prevent contamination of the splice. High pressure air is directed through air nozzles on both sides of the innerliner splice just prior to and during the application of the lubricant. A pressure sensor detects high or low air pressure during the creation of the air barriers to stop the spray of lubricant should either situation be detected.Type: GrantFiled: July 2, 2008Date of Patent: June 7, 2011Assignee: Bridgestone Americas Tire Operations, LLCInventors: Gregory M. Hawkins, Dan S. Shipley
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Patent number: 7950346Abstract: A liquid dispensing module and nozzle or die tip for discharging at least one liquid filament. The nozzle includes a strand guide for guiding a substrate past the nozzle and a frustoconical protrusion disposed on a surface of the nozzle adjacent the notch. A liquid discharge passage extends along an axis through the frustoconical protrusion and forms an acute angle with a machine direction corresponding to movement of the strand past the nozzle. Four air discharge passages are positioned at the base of the frustoconical protrusion. Each of the air discharge passages is angled in a compound manner generally toward the liquid discharge passage and offset from the axis of the liquid discharge passage to create the controlled pattern of liquid material on the strand.Type: GrantFiled: April 30, 2009Date of Patent: May 31, 2011Assignee: Nordson CorporationInventors: Patrick L. Crane, Michael W. Harris, Joel E. Saine
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Publication number: 20100282161Abstract: In a gas wiping apparatus for blowing a gas on the front side and the back side of a strip, which exits from a hot-dip plating bath and travels upward, from wiping nozzles to adjust the amount of a plating deposit, the wiping nozzles are supported to be linearly movable beyond the width of the nozzles in the plate width direction of the strip.Type: ApplicationFiled: May 7, 2010Publication date: November 11, 2010Applicant: MITSUBISHI-HITACHI METALS MACHINERY, INC.Inventors: Hironori FUJIOKA, Takashi Yonekura, Masashi Yoshikawa
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Patent number: 7806075Abstract: The invention concerns an installation wherein is performed a crosslinking operation for a coating such as an ink or a varnish through ultraviolet radiation or electronic beam, in the presence of a gas mixture with controlled oxygen residual content. The installation comprises a chamber including one or more UV lamps or a source of accelerated electrons, required for performing the crosslinking operation, and is characterized in that it comprises an input device adjacent the chamber comprising at least the following three components, viewed successively by the product moving to be treated: a labyrinth system, means for injecting an inert gas forming a gas knife and a channel.Type: GrantFiled: January 24, 2005Date of Patent: October 5, 2010Assignee: L'Air Liquide, Société Anonyme a Directoire et Conseil de Surveillance pour l'Etude et l'Exploitation des Procédés Georges ClaudeInventors: François Coeuret, Géraldine Rames-Langlade, Andrea Spizzica
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Patent number: 7789036Abstract: A glazing machine includes a pressure roller and a printing roller, and the glaze is supplied and fills the gap between the pressure roller and the printing roller. A support roller is located beneath the printing roller and rotates in a direction opposite to a rotation direction of the printing roller. A poster moves through a gap between the printing roller and the support roller so that the glaze is spread on the poster. A blowing unit has a nozzle which blows air flow toward the printing roller to separate the printing roller and the poster. A suction roller is located beside the support roller and sucks the poster after being glazed. A plurality of guide plates are located beside the suction roller such that a front edge of the poster is movably located on the guide plates.Type: GrantFiled: February 26, 2007Date of Patent: September 7, 2010Inventor: Yuan-Yu Lien
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Patent number: 7779778Abstract: A coating device (42) for a coating solution and a light beam radiating device (151) which cures the coating solution are arranged in a clean room (7). Spectacle lenses (2) include a set of two lenses and are stored in a coating container (50). The coating device (42) applies the coating solution to coating target surfaces of the spectacle lenses (2) in the coating container (50). When the set of two spectacle lenses (2) coated with the coating solution are extracted from the coating container (50), they are stored in a lens rack (120) and sealed by a transparent plate of the light beam radiating device (151). After air in the lens rack (120) is purged with nitrogen gas, curing treatment for the coating solution is performed by the light beam radiating device (151).Type: GrantFiled: February 25, 2005Date of Patent: August 24, 2010Assignee: Hoya CorporationInventors: Takashi Igarashi, Masahiro Jinbo, Masahiko Samukawa, Shuichi Sato, Norihisa Tanaka
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Patent number: 7735446Abstract: The installation includes elements for the temporary injection of inert gas; and at least one individual and autonomous casing (6) provided with a window (13) and including receiving elements for a support (3) carrying an ophthalmic lens (2), and sealing elements (21) adapted to form around the ophthalmic lens (2) a sealed enclosure, that enclosure including a non-return inlet member adapted to cooperate with the elements for the temporary injection of inert gas.Type: GrantFiled: December 19, 2006Date of Patent: June 15, 2010Assignee: Essilor International (Compagnie Generale d'Optique)Inventors: Daniel Darmes, Yohann Felten, Noemie Lesartre, Gilles Menges, Dominique Rychel
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Patent number: 7677195Abstract: In an apparatus for supplying a droplet on a substrate and a method of manufacturing a display apparatus, the apparatus includes a base body, a dropping unit and a vapor supplying unit. The base body corresponds to the substrate disposed on a stage. The dropping unit is disposed on the base body. The dropping unit includes a nozzle to drop the droplet on the substrate. The vapor supplying unit is disposed adjacent to the dropping unit to supply the droplet dropped onto the substrate with a volatile solvent vapor. Therefore, an evaporation rate of the droplet dropped onto pixels is adjusted to uniformize a thickness of the layer, thereby improving the image display quality.Type: GrantFiled: July 19, 2004Date of Patent: March 16, 2010Assignee: Samsung Electronics Co., Ltd.Inventors: Dong-Won Lee, Joon-Hoo Choi, Jin-Koo Chung
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Patent number: 7669546Abstract: A coating such as liquid milk chocolate is applied to articles such as confectionery bars. The bars are conveyed by conveyor under a curtain of liquid chocolate issuing through an outlet slot in a trough. A layer of air is caused to flow through the outlet slot in the trough so as to modify the flow characteristics of the curtain. The layer of air permits a curtain of even thickness to be achieved.Type: GrantFiled: November 30, 2004Date of Patent: March 2, 2010Assignee: Cadbury Schweppes LimitedInventors: Nigel Hugh Sanders, Anthony Gregory Smith, David Michael Thomas
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Patent number: 7658163Abstract: Methods and apparatus for the deposition of a source material (10) are disclosed. An atomizer (12) renders a supply of source material (10) into many discrete particles. A force applicator (14) propels the particles in continuous, parallel streams of discrete particles. A collimator (16) controls the direction of flight of the particles in the stream prior to their deposition on a substrate (18). In an alternative embodiment of the invention, the viscosity of the particles may be controlled to enable complex depositions of non-conformal or three-dimensional surfaces. The invention also includes a wide variety of substrate treatments which may occur before, during or after deposition. In yet another embodiment of the invention, a virtual or cascade impactor may be employed to remove selected particles from the deposition stream.Type: GrantFiled: July 20, 2006Date of Patent: February 9, 2010Assignee: Optomec Design CompanyInventors: Michael J. Renn, Bruce H. King, Manampathy G. Giridharan, Jyh-Cherng Sheu
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Patent number: 7637999Abstract: A fluidized bed reactor for granulating and coating particles in very small amounts having an essentially conical product container, a filter housing with filters inserted above the product container, and a lower housing below the conical product container having a process air supply. The product container has a sieve bottom in the center of which is a height-adjustable two-component nozzle. At least one guide element associated with the sieve bottom directs at least part of the process air to the two-component nozzle in a radial manner.Type: GrantFiled: November 16, 2005Date of Patent: December 29, 2009Assignee: Glatt Process Technology GmbHInventors: Manfred Struschka, Winfried Thomann, Jochen Dressler
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Patent number: 7622000Abstract: A notch or the like of a wafer is detected via a guide member by means of a CCD camera provided so that an optical axis is coaxial to an optical axis of a laser beam, and alignment of the wafer is carried out. Next, in a state in which liquid ejected from a main nozzle or sub-nozzles is guided by means of the guide member, a laser beam whose optical axis is provided to be coaxial to the optical axis of the CCD camera is irradiated via the guide member. In addition, a predetermined processing operation is carried out with respect to the surface while an irradiation position of the laser beam is moved in a horizontal direction. The wafer is then transported from a chuck to the outside, and then, a purge gas is supplied to a bottom face of the guide member, and the bottom face is dried.Type: GrantFiled: October 26, 2005Date of Patent: November 24, 2009Assignee: Tokyo Electron LimitedInventors: Norihisa Koga, Shinji Koga, Naoto Yoshitaka, Akira Nishiya
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Patent number: 7575634Abstract: The resist coating unit (COT) has a spin chuck (41) which holds the wafer to be supplied with a resist liquid, and a process cup (50) which accommodates the spin chuck (41) and exhaustes an atmosphere around the wafer W from a bottom thereof. The process cup (50) comprises a first cup (51) with an outer circumferential wall (61a), and an airflow control member (52) laid out close to the wafer W in the first cup (51) in such a manner as to surround the wafer W. The airflow control member (52) has a vertical cross section of an approximately rectangular shape defined by the upper ring portion (62a) having a cross section of an approximately triangular shape and protruding upward, and a lower ring portion (62b) having a cross section of an approximately triangular shape and protruding downward. An exhaust passage (55) for substantially exhausting the atmosphere around the wafer W is formed between the outer circumferential wall (61a) and the airflow control member (52).Type: GrantFiled: December 17, 2003Date of Patent: August 18, 2009Assignee: Tokyo Electron LimitedInventor: Hideo Shite
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Patent number: 7563325Abstract: An improved Wurster coater in which conditioned fluidizing gas, drawn through a coating chamber bowl from a plenum by a vacuum fan, is directed through a perforated gas distribution plate through one or more Wurster tubes. The perforated gas distribution plate defines three concentric gas flow zones: a central high-flow up-bed zone beneath the Wurster tube, a surrounding annular lower-flow down-bed zone, and an outer peripheral bypass zone defining a bypass cavity underlying the outer lower wall of the bowl. A controlled bypass flow of conditioned fluidizing gas is directed into the bypass zone, either around the edge of the distribution plate or through relatively larger holes in its plate's outer periphery, which causes that portion of the fluidizing gas to flow radially inward across the distribution plate, thereby sweeping particles away which would otherwise stagnate at the inner corners of the bowl due to low gas velocity in that region.Type: GrantFiled: June 30, 2006Date of Patent: July 21, 2009Inventors: Martin P. Bender, Joseph P. Szczap, Donald P. Verbarg
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Patent number: 7553375Abstract: An apparatus for fabricating a functional device mounting board comprises a holder for holding a substrate on which functional devices are to be formed, a jet head for ejecting a droplet containing a functional material onto the substrate, and a data input unit for supplying droplet ejection information to the jet head. The jet head ejects the droplets onto the substrate based on the droplet ejection information so as to form the functional device in the functional device forming area. The functional device is formed by allowing a volatile ingredient of the droplet, while allowing a solid component of the droplet to remain on the substrate.Type: GrantFiled: February 23, 2005Date of Patent: June 30, 2009Assignee: Ricoh Company, Ltd.Inventor: Takuro Sekiya
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Patent number: 7553374Abstract: In the present invention, a gas flow restraining ring facing corner portions of the front face of a substrate horizontally held on a substrate holding unit and movable up and down, is set to a predetermined height in accordance with a coating treatment. Then, a coating solution containing a coating film forming component and a solvent is applied to the front face of the substrate and spread into a thin film state by a so-called spin coating method, and thereafter the substrate is rotated at a high speed so that the coating solution is dried. In this case, it is possible to control fresh gas flow from above the substrate to decrease the difference in evaporation rate of the solvent between the coating solution on the corner portions of the substrate and the coating solution inside them, thus enabling the coating treatment uniform within a plane on the substrate.Type: GrantFiled: February 2, 2005Date of Patent: June 30, 2009Assignee: Tokyo Electron LimitedInventors: Masahito Hamada, Fumio Hirota, Shinji Kobayashi
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Patent number: 7531039Abstract: Of a substrate-facing surface 24 of an atmosphere blocking member 2, a central area 241 which is faced with an approximately central portion of a substrate S is a flat surface while a periphery edge area 242 which is faced with a periphery edge of the substrate S is an angled surface which becomes closer to the substrate S with a distance toward a periphery edge of the substrate-facing surface 24. Hence, a micro-space SP between the substrate S and the atmosphere blocking member 2 becomes gradually narrower in a direction R which is toward the periphery edge of the substrate S. As an atmosphere gas is fed into the micro-space SP, the atmosphere gas is compressed in the vicinity of a periphery edge of the micro-space SP and a pressure rises. As a result, the micro-space SP becomes positively pressurized as compared with a mist-splashed atmosphere, which effectively prevents a mist from invading other major surface S2 of the substrate S.Type: GrantFiled: September 24, 2003Date of Patent: May 12, 2009Assignee: Dainippon Screen Mfg. Co., Ltd.Inventors: Masanobu Sato, Kenya Morinishi
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Publication number: 20090114149Abstract: A gas wiping apparatus for use in coating a molten metal onto a steel strip. In the apparatus, a chamber, to which a high pressure gas is supplied, defines a multistage uniform pressure space. A lip support unit is associated with a front of the chamber to allow the high pressure gas to flow therethrough, the lip support unit supporting the apparatus against load. Upper and lower lips are associated with a front of the lip support unit to cooperatively define an outlet. The upper lip adjusts a gap of a gas outlet cooperatively with the lower lip, and can be easily installed in a lip support unit while adjusting the gap of the gas outlet stably. Also, edge over coating (EOC) of the steel strip can be prevented without an additional auxiliary nozzle.Type: ApplicationFiled: December 19, 2006Publication date: May 7, 2009Applicant: POSCOInventors: Dong-Eun Lee, Myung-Jong Cho, Pan-Woo Seon, Sang-Joon Kim
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Publication number: 20080202411Abstract: A glazing machine includes a pressure roller and a printing roller, and the glaze is supplied and fills the gap between the pressure roller and the printing roller. A support roller is located beneath the printing roller and rotates in a direction opposite to a rotation direction of the printing roller. A poster moves through a gap between the printing roller and the support roller so that the glaze is spread on the poster. A blowing unit has a nozzle which blows air flow toward the printing roller to separate the printing roller and the poster. A suction roller is located beside the support roller and sucks the poster after being glazed. A plurality of guide plates are located beside the suction roller such that a front edge of the poster is movably located on the guide plates.Type: ApplicationFiled: February 26, 2007Publication date: August 28, 2008Inventor: Yuan-Yu Lien
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Publication number: 20080152790Abstract: A method for depositing a hydrophilic coating on flow field plates or bipolar plates and manifolds in a fuel cell stack after the stack is assembled. The method includes preparing a solution that contains hydrophilic nano-particles suspended in a suitable solvent. The cathode and anode inlet and outlet manifolds and the cathode and anode flow channels are filled with the solution. The solution is then pumped out of the stack using, for example, a stream of nitrogen. The stack is allowed to dry, using heat if desirable, to provide a film of the nano-particles formed on the anode and cathode flow channels and manifolds within the stack.Type: ApplicationFiled: December 21, 2006Publication date: June 26, 2008Applicant: GM Global Technology Operations, Inc.Inventors: Jon P. Owejan, Thomas A. Trabold, Thomas W. Tighe
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Patent number: 7361227Abstract: A coating apparatus includes a container and a perforated plate separating a plenum from a coating chamber. A gas supply system delivers a gas to the plenum in a sufficient amount for passage of the gas through the plate and suspension of a powder in a fluidized condition in the chamber. The gas supply system preferably includes a primary portion for continuously delivered gas and a controllable pulsing portion for supplementing the gas from the primary portion. In a first mode of operation, the gas from the pulsing portion is cycled to provide variation in the fluidized volume. In a second mode, the pulsing portion delivers relatively long pulses of gas to mix the fluidized powder.Type: GrantFiled: August 29, 2003Date of Patent: April 22, 2008Assignee: Arkema, Inc.Inventor: Joseph L. Mitchell
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Patent number: 7326301Abstract: A device for direct or indirect application of liquid or viscous coating medium by way of an application system onto a material web, especially a paper or cardboard web, including a weakening device for weakening the boundary layer of air that is carried along by the application surface. The weakening device is located prior to the applicator device viewed in direction of travel of the application surface. The weakening device includes a blowing device and a suction device. The blowing device is located prior to the applicator device when viewed in direction of travel of the application surface and produces an air flow in opposite direction to the direction of travel. The suction device is located prior to the blowing device when viewed in direction of travel of the application surface and sucks off at least a portion of the air flow that is produced by the blowing device, as well as at least a portion of the boundary layer of air that is carried along by the application surface.Type: GrantFiled: November 17, 2005Date of Patent: February 5, 2008Assignee: Voith Paper Patent GmbHInventors: Richard Bernert, Benjamin Méndez-Gallon, Manfred Ueberschär
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Publication number: 20080022928Abstract: A coating device includes a box-shaped processing chamber. Slits are respectively provided on four side surfaces of the processing chamber. A box-shaped housing is provided so as to surround the processing chamber. A space is formed between the processing chamber and the housing. A fan filter unit for forming downflow in the space is provided on the top of the housing. Air supplied to the fan filter unit is cleaned by the fan filter unit, and is supplied to the space. The air supplied to the space is supplied to the processing chamber through each of the slits in the processing chamber. This causes a twister-shaped air current to be generated within the processing chamber.Type: ApplicationFiled: July 26, 2007Publication date: January 31, 2008Inventors: Masakazu Sanada, Osamu Tamada
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Publication number: 20080000419Abstract: An improved Wurster coater in which conditioned fluidizing gas, drawn through a coating chamber bowl from a plenum by a vacuum fan, is directed through a perforated gas distribution plate through one or more Wurster tubes. The perforated gas distribution plate defines three concentric gas flow zones: a central high-flow up-bed zone beneath the Wurster tube, a surrounding annular lower-flow down-bed zone, and an outer peripheral bypass zone defining a bypass cavity underlying the outer lower wall of the bowl. A controlled bypass flow of conditioned fluidizing gas is directed into the bypass zone, either around the edge of the distribution plate or through relatively larger holes in its plate's outer periphery, which causes that portion of the fluidizing gas to flow radially inward across the distribution plate, thereby sweeping particles away which would otherwise stagnate at the inner corners of the bowl due to low gas velocity in that region.Type: ApplicationFiled: June 30, 2006Publication date: January 3, 2008Inventors: Martin P. Bender, Joseph P. Szczap, Donald P. Verbarg
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Patent number: 7279044Abstract: An apparatus for fabricating a liquid crystal display panel includes a slit nozzle for applying a photo-resist liquid on a substrate, a nozzle driver for driving the slit nozzle, an air intake for inhaling air and/or impurities on the substrate through the slit nozzle before photo-resist is deposited on the substrate, and a gas supplier for supplying a gas through one or more channels in the slit nozzle to the substrate after the photo-resist is deposited on the substrate.Type: GrantFiled: October 4, 2004Date of Patent: October 9, 2007Assignee: LG. Philips LCD Co., Ltd.Inventors: Jeong Kweon Park, O Jun Kwon
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Patent number: 7105058Abstract: An apparatus and method for forming a microfiber coating includes directing a liquid solution toward a deposition surface. The apparatus includes a tube defining a volume through which the liquid solution travels. An electric field is applied between the origin of the liquid solution and the surface. A gas is injected into the tube to create a vortex flow within the tube. This vortex flow protects the deposition surface from entrainment of ambient air from the surrounding atmosphere.Type: GrantFiled: March 5, 2003Date of Patent: September 12, 2006Assignee: PolyRemedy, Inc.Inventor: Dmitriy Sinyagin
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Patent number: 7097711Abstract: An electrostatic flocking operation of a workpiece (5) is advantageously performed in a condition in which the moisture content of an adhesive layer formed on a surface of the workpiece (5) is kept at a favorable value by a humidifier (1). The humidifier (1) is provided between an electrostatic flocking chamber and an adhesive applicator which is disposed in the upstream side of the electrostatic flocking chamber. In the humidifier (1), a current of a moisture bearing air (2) is driven upon the adhesive layer of the workpiece (5).Type: GrantFiled: August 22, 2000Date of Patent: August 29, 2006Assignees: Mesac Corporation, Sumitomo CorporationInventors: Masaaki Abe, Teruyuki Tatsumi
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Patent number: 7045015Abstract: Apparatuses and processes for maskless deposition of electronic and biological materials. The process is capable of direct deposition of features with linewidths varying from the micron range up to a fraction of a millimeter, and may be used to deposit features on substrates with damage thresholds near 100° C. Deposition and subsequent processing may be carried out under ambient conditions, eliminating the need for a vacuum atmosphere. The process may also be performed in an inert gas environment. Deposition of and subsequent laser post processing produces linewidths as low as 1 micron, with sub-micron edge definition. The apparatus nozzle has a large working distance—the orifice to substrate distance may be several millimeters—and direct write onto non-planar surfaces is possible.Type: GrantFiled: January 17, 2003Date of Patent: May 16, 2006Assignee: Optomec Design CompanyInventors: Michael J. Renn, Bruce H. King, Marcelino Essien, Lemna J. Hunter
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Patent number: 6949141Abstract: An apparatus for treating particle-shaped material has a process chamber for accommodating and treating the material. A base is composed of guide plates which are placed one above the other in different planes and overlap one another and between which slots are arranged, via which process air can be directed into the process chamber with an essentially horizontal component motion. It is proposed to provide a vertical—adjustment device which interacts with the guide plates and by means of which the distance between the guide plates and thus the height of the slots can be varied.Type: GrantFiled: October 7, 2003Date of Patent: September 27, 2005Inventor: Herbert Hüttlin
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Patent number: 6921436Abstract: An aging unit (DAC) for processing a wafer W having a coated film formed thereon includes a disposing plate, a temperature control circulating device for controlling the temperature of the disposing plate, a chamber, a gas supply mechanism for supplying an ammonia gas containing a water vapor into the chamber, an input section for inputting the processing time of the wafer W, and a control device for controlling the temperature of the disposing plate, the supply rate of the ammonia gas, and the amount of the water vapor contained in the ammonia gas so as to permit the processing of the wafer W to be finished in the processing time inputted into the input section.Type: GrantFiled: November 8, 2002Date of Patent: July 26, 2005Assignee: Tokyo Electron LimitedInventor: Yuji Ueda
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Patent number: 6881264Abstract: A process tool, preferably a spin coater, includes a set of at least three arms and an adjustable rinse nozzle. The arms lift a substrate, e.g. a semiconductor wafer, from a chuck inside the process chamber after having performed the corresponding manufacturing step, e.g. coating. The contact area between the arms and the substrate is as small as possible. The rinse nozzle dispenses a solvent liquid onto the backside of the substrate, thereby removing contaminating particles located at the area of contact between the vacuum channels of the chuck and the substrate. The set of arms rotates for a homogeneous cleaning. A gas flowing out of vacuum ports of the chuck prevents the vacuum ports from being obstructed with particles. While the substrate is being lifted, the chuck can also be cleaned by dispensing the solvent liquid onto the chuck.Type: GrantFiled: August 19, 2003Date of Patent: April 19, 2005Assignees: Infineon Technologies AG, Infineon Technologies SC300 GmbH, Motorola Inc.Inventors: Mark Hiatt, Karl Mautz, Ralf Schuster
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Patent number: 6863225Abstract: A device and method for applying adhesive to materials, such as elastic strands, used in the production of nonwoven products. Generally, a nozzle is provided and includes a liquid discharge orifice configured to discharge a bead of liquid adhesive. First and second pattern air discharge orifices are associated with the first liquid discharge orifice to vacillate or oscillate the adhesive bead. First and second cleaning and stabilizing air discharge orifices are also associated with the first liquid discharge orifice. These latter air discharge orifices keep airborne contaminants away from the associated liquid discharge orifice and also stabilize the oscillation of the adhesive bead in a single plane. A method in accordance with the invention includes using the nozzle to dispense a vacillating bead of adhesive onto a strand of material.Type: GrantFiled: March 13, 2001Date of Patent: March 8, 2005Assignee: Nordson CorporationInventor: Yukio Nakamura
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Patent number: 6833157Abstract: The coating apparatus and method enable the coating liquid having been scraped-off to be reused without doing any one of the fluid adjusting treatment and the filtering treatment, while maintaining the features of the scraping-off type of extrusion coater, which is suitable for obtaining a uniform and extremely thin coating film. The coating head is provided with two slits: a coating slit and a recovering slit, and the excessive coating liquid having been discharged through the coating slit and applied to the web is scraped-off and recovered through the recovering slit.Type: GrantFiled: September 25, 2002Date of Patent: December 21, 2004Assignee: Fuji Photo Film Co., Ltd.Inventors: Toshihiro Mandai, Mikio Tomaru, Norio Shibata
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Patent number: 6736897Abstract: The improved Wurster of the present invention includes an air diverter which supplies a flow of air in a radial direction adjacent the spray nozzle body and spray nozzle, so as to force the product away from the nozzle during the spraying process. The air diverter includes a sleeve with air passages therein, a manifold connected to the sleeve and to a source of secondary pressurized air or gas, and a collar to mount the assembled air diverter onto the perforated plate of the Wurster apparatus. In operation, the air diverter allows the spray pattern from the nozzle to more fully develop, allows more complete atomization of the spray solution, and allows for higher spray rates with little or no agglomeration of the product.Type: GrantFiled: October 10, 2002Date of Patent: May 18, 2004Assignee: Vector CorporationInventor: Brian K. Jensen
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Patent number: 6719846Abstract: A device and method for applying adhesive to materials, such as elastic strands or flat substrates, used in the production of nonwoven products. Generally, a nozzle is provided and includes a liquid discharge orifice configured to discharge a bead of liquid adhesive. First and second pattern air discharge orifices are associated with the first liquid discharge orifice to vacillate or oscillate the adhesive bead. First and second cleaning and stabilizing air discharge orifices are also associated with the first liquid discharge orifice. These latter air discharge orifices keep airborne contaminants away from the associated liquid discharge orifice and also stabilize the oscillation of the adhesive bead in a single plane. Another embodiment includes walls to separate adjacent sets of air discharge orifices.Type: GrantFiled: September 28, 2001Date of Patent: April 13, 2004Assignee: Nordson CorporationInventors: Yukio Nakamura, Hiroshi Todo
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Patent number: 6695914Abstract: An apparatus for processing a workpiece in a micro-environment includes a workpiece housing connected to a motor for rotation. The workpiece housing forms a processing chamber where one or more processing fluids are distributed across at least one face of the workpiece by centrifugal force generated during rotation of the housing. An array of workpiece housings are contained within an enclosure. A robot moves workpieces into and out of the workpiece housings.Type: GrantFiled: August 2, 2001Date of Patent: February 24, 2004Assignee: Semitool, Inc.Inventors: Gary L Curtis, Raymon F. Thompson
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Patent number: 6673151Abstract: A spin chuck for holding a wafer to the front face of which a resist solution is supplied, a cup for housing the spin chuck and forcibly exhausting an atmosphere around the wafer by exhaust from the bottom thereof, and an air flow control plate, provided in the cup to surround the outer periphery of the wafer, for controlling an air flow in the vicinity of the wafer are provided. Accordingly, a state of special air flow at an outer edge portion of a substrate to be processed can be eliminated, thereby preventing an increase in film thickness at the outer edge portion.Type: GrantFiled: January 16, 2003Date of Patent: January 6, 2004Assignee: Tokyo Electron LimitedInventors: Kousuke Yoshihara, Akihiro Fujimoto
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Patent number: 6666165Abstract: A curtain coating apparatus for applying a coating solution to a continuously moving web, which comprises an air jet injector for injecting air in the upstream direction of a web, provided at a position upstream of a contact point of a curtain film with the web and a shielding member shutting off entrained air generated by movement of the web, provided between the contact point and the air jet injector, thereby diminishing an influence of turbulent air flow and preventing the curtain film from suction toward the air jet injector.Type: GrantFiled: March 26, 2002Date of Patent: December 23, 2003Assignee: Mitsubishi Paper Mills LimitedInventors: Masato Shiraishi, Kazutoshi Someya
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Patent number: 6656281Abstract: A blast unit for sending air from the top of a processing chamber to the bottom thereof and an exhaust pipe for exhausting gas from the bottom of the processing chamber are provided. Concomitantly with a change in pressure in the processing chamber, intervals of a slit damper and/or the degree of opening of a damper is controlled by a controller and thus a blast amount or an exhaust amount is controlled, thereby maintaining the pressure in the processing chamber almost constant.Type: GrantFiled: June 8, 2000Date of Patent: December 2, 2003Assignee: Tokyo Electron LimitedInventors: Issei Ueda, Hiroyuki Kudou
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Patent number: 6627261Abstract: The present invention relates to a method and apparatus for coating a moving paper web (2), in which method the web (2) to be coated is passed to a coater station and the coating is applied to at least one surface of the moving web (2) by means of spraying nozzles (1) disposed in the interior of an enclosing hood (9). The web (2) is supported noncontactingly by means of air jets directed toward at least one side of the web (2).Type: GrantFiled: August 2, 2001Date of Patent: September 30, 2003Assignee: Metso Paper, Inc.Inventors: Mika Vähäkuopus, Vilho Nissinen, Seppo Luomi
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Publication number: 20030104130Abstract: When a running web (3) is coated with a liquid coating mixture, at least one side of the web is provided with a coating (40, 40′) of coating mixture. Existing excess (33) of coating mixture in or adjacent to the regions of the edge portions of the web is removed by being blown off downstreams of where the coating operation is performed.Type: ApplicationFiled: July 23, 2002Publication date: June 5, 2003Inventor: Hakan Karlsson
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Patent number: 6565656Abstract: A coating processing apparatus is structured by a rotating cup having an opening portion on the top thereof for housing a substrate, a spin chuck for rotating the substrate in the rotating cup, a lid body having an opening and attached to the rotating cup, a resist solution discharge nozzle for discharging a resist solution onto the substrate through the opening of the lid body, a small lid for blocking up the opening of the lid body, and a protrusion member provided on the underneath surface of the small lid to be positioned inside the rotating cup when the small lid is attached into the opening of the lid body. Thus, adjustment of a film thickness of a coating film after a coating solution is coated can be effectively performed.Type: GrantFiled: December 15, 2000Date of Patent: May 20, 2003Assignee: Toyko Electron LimitedInventors: Tetsuya Sada, Hiroshi Hashimoto, Yuji Shimomura
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Patent number: 6537373Abstract: A method of forming a film of a coating solution on a substrate includes steps of moving a coating solution discharge member relative to a substrate while a coating solution is being discharged from the coating solution discharge member to the surface of the substrate, and changing a discharge direction of the coating solution to an outer peripheral portion of the substrate to make the amount of application to the outer peripheral portion smaller than that to other portions. This can reduce the amount of application to the outer peripheral portion of the substrate, thereby making it possible to restrain protuberance of the coating solution at the outer peripheral portion of the substrate caused by surface tension. Consequently, a coating film which is uniform also at the outer peripheral portion on the substrate is formed.Type: GrantFiled: November 15, 2000Date of Patent: March 25, 2003Assignee: Tokyo Electron LimitedInventors: Takahiro Kitano, Shinji Kobayashi, Yukihiko Esaki, Masateru Morikawa
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Patent number: 6527860Abstract: A spin chuck for holding a wafer to the front face of which a resist solution is supplied, a cup for housing the spin chuck and forcibly exhausting an atmosphere around the wafer by exhaust from the bottom thereof, and an air flow control plate, provided in the cup to surround the outer periphery of the wafer, for controlling an air flow in the vicinity of the wafer are provided. Accordingly, a state of a special air flow at an outer edge portion of a substrate to be processed can be eliminated, thereby preventing an increase in film thickness at the outer edge portion.Type: GrantFiled: October 10, 2000Date of Patent: March 4, 2003Assignee: Tokyo Electron LimitedInventors: Kousuke Yoshihara, Akihiro Fujimoto
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Patent number: 6511545Abstract: A method of producing an electron-emitting device includes the steps of forming a pair of electrodes and an electrically-conductive thin film on a substrate in such a manner that the pair of electrodes are in contact with the electrically-conductive thin film and forming an electron emission region using the electrically-conductive thin film, wherein that a solution containing a metal element is supplied in a droplet form onto the substrate thereby forming the electrically-conductive thin film.Type: GrantFiled: April 9, 1999Date of Patent: January 28, 2003Assignee: Canon Kabushiki KaishaInventors: Yoshikazu Banno, Etsuro Kishi, Mitsutoshi Hasegawa, Kazuhiro Sando, Kazuya Shigeoka, Masahiko Miyamoto
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Publication number: 20020170493Abstract: A method and an apparatus for coating metal strip, particularly cold-rolled steel strip, with a coating metal which is in the molten state. The metal strip is heated and annealed in a heating furnace and subsequently the required strip temperature and surface properties are adjusted in a cooling zone. The strip is conducted through a coating container and, following the coating container in strip pulling direction, the coating metal thickness and the solidification process are controlled by a gas-operated stripping device. The operating gas for the stripping device is preheated in a partial area of the cooling zone of the heating furnace.Type: ApplicationFiled: May 16, 2002Publication date: November 21, 2002Inventors: Werner Bechem, Holger Behrens, Rolf Brisberger
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Patent number: 6461430Abstract: A method for producing visco-elastic fluidic material flows by drawing a visco-elastic fluidic material with corresponding separate second fluid flows associated therewith to form a visco-elastic fiber vacillating in a repeating, generally omega-shaped pattern having a bowed portion with first and second side portions that first converge toward each other and then diverge outwardly in generally opposing directions. In one operation, the visco-elastic fiber vacillating in the repeating, generally omega-shaped pattern is an adhesive material deposited onto woven and non-woven fabric substrates and stretched elongated elastic strands in the manufacture of a variety of bodily fluid absorbing hygienic articles.Type: GrantFiled: March 16, 2000Date of Patent: October 8, 2002Assignee: Illinois Tool Works Inc.Inventor: Kui-Chiu Kwok
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Patent number: 6461671Abstract: Apparatus and method for coating a moving paper web, in which the web to be coated is first guided to a coating station correctly aligned and a first side of the web is coated with a coat layer. Next, the web is guided upwards from the coating station and the first coat layer is dried using non-contact dryers. From the dryers the web is guided to the next coating station correctly aligned, and the second side of the web is coated with a coat layer, the web is guided upwards from the coating station and the coat layer on the second side of the web is dried using non-contact dryers. When the web is directed from the coating station through the dryers, it is guided non-contactingly by means of air jets such that the web is first non-contactingly turned in the machine direction during drying and next, similarly during drying, towards the level of the coating stations.Type: GrantFiled: March 14, 2001Date of Patent: October 8, 2002Assignee: Valmet CorporationInventors: Jorma Kinnune, Vilho Nissinen