Including Regeneration, Purification, Recovery Or Separation Of Agent Used Patents (Class 134/10)
-
Patent number: 12170209Abstract: A substrate processing apparatus includes: at least one processing part for etching a polysilicon film or an amorphous silicon film formed on a substrate using an alkaline chemical liquid; a reservoir configured to recover and store the chemical liquid used in the at least one processing part; processing lines configured to supply the chemical liquid stored in the reservoir to the at least one processing part; a circulation line configured to take out the chemical liquid from the reservoir and to return the same to the reservoir; and a first gas supply line connected to the circulation line and configured to supply an inert gas to the circulation line. The circulation line includes an ejection port configured to eject a mixed fluid of the inert gas supplied by the first gas supply line and the chemical liquid taken out from the reservoir into the chemical liquid stored in the reservoir.Type: GrantFiled: July 26, 2021Date of Patent: December 17, 2024Assignee: Tokyo Electron LimitedInventors: Takashi Yabuta, Hidetoshi Nakao, Masatoshi Kasahara, Daisuke Saiki
-
Patent number: 12152164Abstract: Methods of employing corrosion inhibitors with oxidizing and/or non-oxidizing biocides, such as peroxycarboxylic acids, to provide corrosion protected compositions are disclosed. Various corrosion inhibitors further provide biocidal efficacy in addition to the corrosion protection providing further benefits for application of use. Methods of employing corrosion protected biocide compositions, such as peroxycarboxylic acid compositions, for corrosion protection are particularly well suited for treating fluids intended to flow through pipes, namely in the energy industry, water and paper industries, etc. Methods providing suitable corrosion protection in comparison to untreated systems and corrosion protected systems using conventional corrosion inhibitors, such as quaternary amines and imidazolines commonly used in the industry, are disclosed.Type: GrantFiled: June 29, 2023Date of Patent: November 26, 2024Assignee: ECOLAB USA INC.Inventors: Ramakrishnan Balasubramanian, Brian Epps, Jeremy Moloney, Ethan Moloney
-
Patent number: 12131910Abstract: In one embodiment, a semiconductor manufacturing apparatus includes a substrate processor configured to process a substrate with a gas of a first substance and a gas of a second substance, and discharge a first gas including the first substance and/or the second substance. The apparatus further includes a disposer configured to discard the first gas discharged from the substrate processor. The apparatus further includes a recoverer configured to generate a second gas including the second substance by using the first substance in the first gas discharged from the substrate processor, and supply the second gas to the substrate processor.Type: GrantFiled: September 14, 2021Date of Patent: October 29, 2024Assignee: Kioxia CorporationInventors: Motoki Fujii, Hiroshi Kubota, Fumiki Aiso
-
Patent number: 11939690Abstract: A portable electroplating system with components integrated into a complete system, rather than separated and disjointed. A single electroplating system can be self-contained to include all necessary rectifiers, tanks, cleaning functionalities, and other helpful or necessary items. By using smaller components than conventional electroplating systems, the system can allow for more economical use of chemicals, solutions, and energy and can be utilized more efficiently towards a unique shape or size of object to be plated. The system can also include wheels to make the system portable. A rack management system can be employed to move objects from one location to another within the system.Type: GrantFiled: January 4, 2019Date of Patent: March 26, 2024Assignee: Snap-on IncorporatedInventors: Kraig A. Tabor, Thomas L. Kassouf, Ricardo M. Guedes, Greg P. Formella, Alan J. Birschbach, Peter W. Eisch, Garry L. Dillon, Chad J. Kaschak, Michael G. Gentile
-
Patent number: 11906410Abstract: A cell inspection method includes a concentrate production step, a staining step, a cell precipitation step, and an observation step. In the concentrate production step, the cell concentrate is produced by causing an inner cylinder which has a filter provided on a bottom surface to enter from the bottom surface side into the through hole of the outer cylinder and bringing the inner cylinder closer to the slide, the inner cylinder having an internal space, and in the observation step, observation is performed in a state where the inner cylinder is entered into the outer cylinder.Type: GrantFiled: December 28, 2020Date of Patent: February 20, 2024Assignee: OLYMPUS CORPORATIONInventors: Kazutaka Nishikawa, Jun Funazaki
-
Patent number: 11732143Abstract: Methods of employing corrosion inhibitors with oxidizing and/or non-oxidizing biocides, such as peroxycarboxylic acids, to provide corrosion protected compositions are disclosed. Various corrosion inhibitors further provide biocidal efficacy in addition to the corrosion protection providing further benefits for application of use. Methods of employing corrosion protected biocide compositions, such as peroxycarboxylic acid compositions, for corrosion protection are particularly well suited for treating fluids intended to flow through pipes, namely in the energy industry, water and paper industries, etc. Methods providing suitable corrosion protection in comparison to untreated systems and corrosion protected systems using conventional corrosion inhibitors, such as quaternary amines and imidazolines commonly used in the industry, are disclosed.Type: GrantFiled: May 5, 2022Date of Patent: August 22, 2023Assignee: ECOLAB USA INC.Inventors: Ramakrishnan Balasubramanian, Brian Epps, Jeremy Moloney, Ethan Moloney
-
Patent number: 11696667Abstract: A household dishwasher includes a washing container receiving a dishwasher load, a pump pot, and a spray arm for applying washing liquor and/or fresh water to the dishwasher load in the washing container. The spray arm is actively driven by a drive system and mounted on the pump pot for rotation about an axis of rotation. The spray arm has a rib geometry that revolves around the axis of rotation and includes an encoding groove running along the axis of rotation. The pump pot includes an encoding rib running along the axis of rotation and corresponding to the encoding groove. The encoding rib is configured for passage through the encoding groove along the axis of rotation during assembly and disassembly of the spray arm so as to enable the spray arm to be assembled on and disassembled from the pump pot in precisely one angular position.Type: GrantFiled: July 16, 2020Date of Patent: July 11, 2023Assignee: BSH Hausgeräte GmbHInventors: Bernd Eisenbart, Michael Lugert, Werner Oblinger, Igor Hoffmann
-
Patent number: 11618046Abstract: A containment tank assembly is described that includes a tank including an inner surface and a cleaning apparatus mounted to the tank. The cleaning apparatus includes an elongate arm and a rotary spray head assembly rotationally coupled to an end of the elongate arm. A rotating nozzle assembly is rotationally coupled to the rotary spray head. A magnetic field source is coupled to the rotary spray head so as to generate a spatially changing magnetic field in accordance with a rotation of the rotary spray head assembly in relation to the end of the elongate arm. A magnet field sensor is carried in a fixed relation to the elongate arm. The magnetic field sensor, in operation, generates a sensor signal that varies in accordance with the spatially changing magnetic field in accordance with the rotation of the rotary spray head assembly.Type: GrantFiled: May 5, 2020Date of Patent: April 4, 2023Assignee: Spraying Systems Co.Inventors: Geoffrey A. Tanner, Collin A. Wicks, Samuel W. Scully, John E. Ekpenyong
-
Patent number: 11560696Abstract: A high pressure jetting system for use with a water supply system includes a recirculating unit to connect to an isolated section of the water supply system. The isolated section remains under water supply system pressure. The recirculating unit includes a filter unit and a pump unit capable of generating a circulating flow of water. A first pig launch and recovery apparatus couples a first hydrant to the recirculating unit and a second pig launch and recovery apparatus couples a second hydrant to the recirculating unit. A jetting unit including a jetting head is coupled to a jetting hose. The jetting unit enters the closed circuit through the second pig launch and recovery apparatus and travels within the isolated section. The jetting head emits a plurality of water jets to assist removal of material from an inner surface of the water mains and pipes.Type: GrantFiled: January 17, 2020Date of Patent: January 24, 2023Assignee: NO-DES, Inc.Inventor: Chris Eric Wilkinson
-
Patent number: 11555296Abstract: A high pressure jetting system includes a recirculating unit connected to an isolated section of a water supply system which remains under system pressure. The recirculating unit includes a filter unit and a pump unit generating a circulating flow of water. A first pig launch and recovery apparatus couples a first hydrant to the recirculating unit and a second pig launch and recovery apparatus couples a second hydrant to the recirculating unit. A camera unit including a camera and drogue chute enters through the first apparatus and travels in a flushing flow direction to the second apparatus. The drogue chute is then removed from the camera. The camera then couples to a jetting unit having a jetting head and hose and re-enters through the second apparatus. The jetting unit emits a plurality of water jets to move in a counter-current flow direction and remove material from the water mains.Type: GrantFiled: March 13, 2020Date of Patent: January 17, 2023Assignee: NO-DES, Inc.Inventor: Chris Eric Wilkinson
-
Patent number: 11541358Abstract: A method for process a chemical liquid is provided. The method includes at least providing a system having at least one filtration medium, treatment the system with a treatment liquid having a content of iron (Fe) and calcium (Ca) of about 10 ppb or less, and processing a chemical liquid using an apparatus having the system configured therein after the treatment process.Type: GrantFiled: August 21, 2019Date of Patent: January 3, 2023Assignee: FUJIFILM Electronic Materials U.S.A., Inc.Inventors: Marcia Cole-Yocom, Bryan Hinzie, Michael Barker, Jack Helzer, Shen-Ping Huang, Pejman Ahmadiannamini, Yuan Chen
-
Patent number: 11419475Abstract: Dishwashing appliances and methods, as provided herein, may include features or steps such as measuring an initial pressure in a sump with a pressure sensor, activating a drain pump when the measured initial pressure in the sump is greater than or equal to a first pressure threshold, and starting a timer when the drain pump is activated. Dishwashing appliances and methods may further include features or steps for monitoring pressure within the sump with the pressure sensor after activating the drain pump, recording a value of the timer as a first time when the monitored pressure reaches a second pressure threshold, calculating a time limit based on the recorded first time value, and determining that the filter is clogged when the monitored pressure does not reach a third pressure threshold before the time limit expires.Type: GrantFiled: November 21, 2019Date of Patent: August 23, 2022Assignee: Haier US Appliance Solutions, Inc.Inventor: Kyle Edward Durham
-
Patent number: 11387119Abstract: A fluid heating device includes: a tank to store a fluid; a pump to deliver the fluid stored in the tank; a heater to heat the delivered fluid to a predetermined temperature; a return pipe to return the heated fluid to the tank; a fluid supply valve to supply an unheated fluid into the tank; a fluid discharge valve to discharge the heated fluid from the tank; a temperature sensor to detect a temperature of the heated fluid; and a temperature controller to control an opening degree of each of the fluid supply valve and the fluid discharge valve to control the temperature of the fluid stored in the tank. The temperature controller includes: a discharge opening-degree controller-to control the opening degree of the fluid discharge valve; and a supply opening-degree controller to control the opening degree of the fluid supply valve.Type: GrantFiled: November 14, 2017Date of Patent: July 12, 2022Assignee: KELK Ltd.Inventor: Kazuhiro Mimura
-
Patent number: 11352507Abstract: Methods of employing corrosion inhibitors with oxidizing and/or non-oxidizing biocides, such as peroxycarboxylic acids, to provide corrosion protected compositions are disclosed. Various corrosion inhibitors further provide biocidal efficacy in addition to the corrosion protection providing further benefits for application of use. Methods of employing corrosion protected biocide compositions, such as peroxycarboxylic acid compositions, for corrosion protection are particularly well suited for treating fluids intended to flow through pipes, namely in the energy industry, water and paper industries, etc. Methods providing suitable corrosion protection in comparison to untreated systems and corrosion protected systems using conventional corrosion inhibitors, such as quaternary amines and imidazolines commonly used in the industry, are disclosed.Type: GrantFiled: January 31, 2020Date of Patent: June 7, 2022Assignee: Ecolab USA Inc.Inventors: Ramakrishnan Balasubramanian, Brian Epps, Jeremy Moloney, Ethan Moloney
-
Patent number: 11352539Abstract: A process for producing a base oil composition particularly adapted for use in oil-base drilling mud compositions. The process includes contacting drilling waste containing an oil-base mud phase with a solvent to produce a mixture of liquids and solids, separating the two phases, partially evaporating the liquids phase to produce an oil base composition substantially lacking low molecular weight carbon chain compounds and also lacking significant concentrations of benzene, toluene, xylene, and/or ethyl benzene, and having increased closed-cup flashpoint when compared to the oil-base mud phase in the drilling waste. The resulting base oil has enhanced health and safety characteristics for workers interacting with and otherwise exposed to the oil base composition during transporting, conditioning or using such compositions. The base oil produced and drilling methods using the recovered and recycled mud are also described.Type: GrantFiled: May 16, 2018Date of Patent: June 7, 2022Assignee: RECOVER ENERGY SERVICES INC.Inventor: Matthew Scalley
-
Patent number: 11342215Abstract: A housing of a wafer processing system includes at least one chamber exhaust outlet and at least one chemical exhaust outlet. The chamber exhaust outlet is formed in the housing for venting gas from the interior of the housing and the chemical exhaust outlet is formed in the housing for venting gas that flows along at least one of: (a) a first flow path defined between the splash shield in a raised position and the collection trays in the lowered position; and (b) a second flow path in which the gas flows through the collection chamber to the chemical exhaust outlet.Type: GrantFiled: April 23, 2018Date of Patent: May 24, 2022Assignee: VEECO INSTRUMENTS INC.Inventors: William Gilbert Breingan, Chris Hofmeister, Lev Rapoport, John Taddei
-
Patent number: 11326328Abstract: A tubeless sprayer assembly includes a base that is coupled to a support surface. The base has a fluid port is integrated therein. The fluid port is fluidly coupled to a fluid source wherein the fluid port is configured to receive a fluid from the fluid source. A canister is positionable in the base. The canister is in fluid communication with the fluid port when the canister is positioned in the base to fill the canister with the fluid. A pumping unit is coupled to the canister. The pumping unit pumps the fluid outwardly from the canister when the pumping unit is turned on to facilitate the fluid to be sprayed without a connection to the fluid source.Type: GrantFiled: November 6, 2019Date of Patent: May 10, 2022Inventor: Thomas Boldt
-
Patent number: 11284774Abstract: The present disclosure relates to a dishwasher having a heat pump, including a dishwasher body provided with a tub configured with a washing space therein and a sump provided at a bottom of the tub to temporarily accommodate washing water; a heat pump having a compressor, an evaporator, an expansion apparatus, and a condenser provided on an inner bottom surface of the tub to exchange heat with washing water inside the tub; and a controller that controls the heat pump to be driven to increase the temperature of the washing water inside the tub. As a result, the heating time of washing water may be shortened.Type: GrantFiled: November 27, 2019Date of Patent: March 29, 2022Assignee: LG Electronics Inc.Inventors: Changyoon Jung, Sangheon Yoon
-
Patent number: 11274270Abstract: The present invention provides acidic or basic cleaning compositions for use in cleaning food and beverage industry processing equipment and pharmaceutical and cosmetic industry processing equipment wherein the compositions of the invention comprise a food-equipment-safe acidic or basic cleaning compound and a food-equipment-safe colorimetric indicator of pH to show the desired acid or basic conditions during storage prior to the start of a cleaning cycle and after storage and during a cleaning cycle. The cleaning compositions of the invention are particularly useful in, for example, CIP cleaning processes.Type: GrantFiled: September 7, 2017Date of Patent: March 15, 2022Assignee: Alpha Chemical Services, Inc.Inventor: Noah Hershey
-
Patent number: 11260719Abstract: A battery cooling system includes a cooling water circulation circuit for circulating cooling water for cooling the battery, a first heat exchanger for exchanging heat between air and cooling water, a second heat exchanger for exchanging heat between the low-pressure refrigerant of the refrigeration cycle circuit and cooling water, and an ion exchanger for removing impurity ions contained in the cooling water. The first heat exchanger and the second heat exchanger are arranged in series in the cooling water circulation circuit. The ion exchanger is disposed on the downstream side of the second heat exchanger in the cooling water circulation circuit.Type: GrantFiled: December 18, 2019Date of Patent: March 1, 2022Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHAInventors: Mitsuaki Tomita, Tsuyoshi Koga, Yusuke Suzuki, Masaya Kaji
-
Patent number: 11259683Abstract: A dishwasher appliance includes a pump assembly for circulating wash fluid within a wash chamber and discharging wash fluid from a drain basin. The pump assembly includes a wash pump impeller coupled to a drive shaft and a drain pump impeller coupled to the drive shaft using a clutch, such as a centrifugal clutch. At speeds below a predetermined speed threshold, the clutch remains disengaged such that only the wash pump impeller rotates. When the speed of the drive shaft exceeds the predetermined speed threshold, the clutch engages causing the drain pump impeller to rotate and discharge wash fluid from the drain basin.Type: GrantFiled: January 23, 2020Date of Patent: March 1, 2022Assignee: Haier US Appliance Solutions, Inc.Inventor: Timothy Kopera
-
Patent number: 11259681Abstract: A dishwasher and method utilize an imaging system to perform various diagnostic operations within the dishwasher, including one or more of level sensing, filter cleaning, wash tub rinse down, foam detection, imaging system cleaning, and remote viewing. A controller may clean a filter by controllably-redirecting a controllably-movable sprayer to spray fluid onto the filter.Type: GrantFiled: September 30, 2019Date of Patent: March 1, 2022Assignee: MIDEA GROUP CO., LTDInventors: Joel Boyer, Robert M. Digman, Russell Dietrich, Bassam Fawaz
-
Patent number: 11241139Abstract: A dishwasher having a tub, a sump fluidly coupled to the tub, a discharge outlet, a drain assembly, and a check valve drain assembly including a seat assembly having a body with a first distal end and a second distal end, a fluid passage extending through the body, the body defining a valve seat having a sealing surface about the fluid passage and a flapper assembly operably coupled to the seat assembly and having a moveable portion configured to selectively move between a closed position where the moveable portion seals against the sealing surface and an opened position where the moveable portion raises to allow liquid through the fluid passage.Type: GrantFiled: February 6, 2019Date of Patent: February 8, 2022Assignee: Whirlpool CorporationInventors: Matthew Jerel Jaske, Antony M. Rappette, John Alan Miller, Todd Michael Jozwiak
-
Patent number: 11214892Abstract: A method for manufacturing polycrystalline silicon fragments includes producing a polycrystalline silicon rod by the Siemens method; crushing the polycrystalline silicon rod to obtain polycrystalline silicon fragments; and cleaning by etching the polycrystalline silicon fragments in a cleaning tank. In the cleaning, small pieces of the polycrystalline silicon having controlled shapes and sizes are present in the cleaning tank and the weight change of the small pieces of the polycrystalline silicon before and after the etching is measured to thereby manage the cleaning.Type: GrantFiled: April 19, 2018Date of Patent: January 4, 2022Assignee: Tokuyama CorporationInventor: Shigeki Nishimura
-
Patent number: 11179753Abstract: A liquid cleaning system for living plants rests on a surface covered by a non-porous material. A plate layer covering the non-porous layer has two or more layers, each layer having runners arranged in a grid. The grid of each successive layer is offset at an angle with respect to the grid of a previous layer. An upper layer covers the plate layer and has a plurality of holes for the passage of liquids into the liquid cleaning system. As the living plants are watered or cleaned, excess liquids containing water and oils that were excreted by the living plants enter the liquid cleaning system through the holes, the liquid traverses the grid layers, flowing towards a drain. Contaminants within the liquid collect within the grid of the layers of the plate layer for later disposal.Type: GrantFiled: March 27, 2020Date of Patent: November 23, 2021Inventor: Albert DeChard
-
Patent number: 11156210Abstract: Methods for performing maintenance on a rotor blade of a wind turbine rotor comprising at least a first rotor blade with an airfoil body formed from a blade shell element, the airfoil body having a suction-side surface and a pressure-side surface, a leading edge and a trailing edge, and a root end for mounting to a wind turbine hub and a distal tip end are disclosed, as well as a related system for same. The method comprising the steps of bringing the wind turbine rotor to a standstill, introducing a mobile maintenance device into said first rotor blade at the blade root, moving said mobile maintenance device inside said first rotor blade to a location, performing a maintenance operation at the location with said mobile maintenance device, and removing said mobile maintenance device from said first rotor blade.Type: GrantFiled: October 19, 2017Date of Patent: October 26, 2021Assignee: LM WIND POWER US TECHNOLOGY APSInventors: Finn Kjaer Nielsen, Morten Philipsen
-
Patent number: 11104969Abstract: This invention relates to new formulation aids, as well as to the production thereof, to the uses thereof and to the formulations comprising them.Type: GrantFiled: October 16, 2018Date of Patent: August 31, 2021Assignee: COĂ–PERATIE KONINKLI JKE COSUN U.A.Inventors: Adrianus Marinus Maria de Laat, Bartholomeus Mattheus de Roode, Tom Willem Louis Brooijmans
-
Patent number: 11084987Abstract: The present invention relates to novel crude oil demulsifier comprises a copolymer of styrene with pyridine or a carboxylic acid or its salt selected from methacrylic, acrylic, maleic or fumaric acid with molecular weight in the range of 10000 to 600000 Daltons, dose in the range of 20-1000 ppm. The invention further relates to a process for demulsification of crude oil by treating crude oil with the copolymer in the range of 20-1000 ppm in the temperature range of 25-40° C. by shaking to obtain demulsified crude oil having crude oil with <1% water, and Water <100 ppm oil.Type: GrantFiled: November 26, 2015Date of Patent: August 10, 2021Assignees: Council of Scientific and Industrial Research, Oil and Natural Gas Corporation Ltd.Inventor: Sanjay Pandurang Kamble
-
Patent number: 11084068Abstract: A device for cleaning a plant part that is to be cleaned in a beverage filling plant, including a medium inflow for supplying a cleaning medium to the plant part that is to be cleaned, and having a medium return flow for removing the used cleaning medium from the plant part that is to be cleaned is described. A heating unit is provided for heating the cleaning medium in the medium inflow, and a recuperator is provided for transferring heat energy from the cleaning medium that is removed via the medium return flow to the cleaning medium that is to be supplied to the heating unit.Type: GrantFiled: November 10, 2016Date of Patent: August 10, 2021Assignee: KRONES AGInventors: Juergen Soellner, Holger Mueller
-
Patent number: 11078099Abstract: A system for using water pumped from a waterway to clean a barge, then filtering the wastewater through several successive filtration/sedimentation compartments on a barge floating beside the barge being cleaned, then discharging the multiple-filtered water directly back into the waterway. The sediment collected in the filtration/sedimentation compartments can then be disposed of.Type: GrantFiled: August 1, 2019Date of Patent: August 3, 2021Inventor: Rickie L. Ellis
-
Patent number: 11052432Abstract: A first SPM, prepared by mixing sulfuric acid and hydrogen peroxide water at a first mixing ratio, is supplied to a substrate. A second SPM, prepared by mixing the sulfuric acid and the hydrogen peroxide water at a second mixing ratio greater than the first mixing ratio, is supplied to the substrate after the supply of the first SPM is stopped. The first SPM expelled from the substrate flows into a drain piping. The second SPM expelled from the substrate flows into a recovery piping. SPM is prepared by mixing the hydrogen peroxide water with sulfuric acid contained in the second SPM guided by the recovery piping.Type: GrantFiled: March 22, 2019Date of Patent: July 6, 2021Inventors: Masayuki Hayashi, Nobuyuki Shibayama, Toru Endo
-
Patent number: 11040428Abstract: A method for the surface treatment of workpieces by means of abrasive media, and a surface treatment composition. The method comprises the steps of providing a treatment tool, providing an abrasive medium, supplying a workpiece having a surface to be treated, surface treating the workpiece, involving removal of material and producing waste products, and processing the waste products, wherein at least one of said steps comprises adding an additive to lower a self-ignition tendency on the part of the waste products, the additive comprising a salt, composed of a carbonate and/or of a halogen anion.Type: GrantFiled: May 23, 2019Date of Patent: June 22, 2021Assignee: Menzerna Polishing Compounds GmbH & Co. KGInventor: Rudi Messmer
-
Patent number: 11001522Abstract: Methods for thinning glass are provided, including methods for reducing a thickness of a glass sheet by subjecting the glass sheet to an etching process. The methods can include passing the glass sheet through an etching zone along a conveyance path a plurality of times until an initial thickness of the glass sheet is reduced to a final predetermined thickness of the glass sheet, and washing the glass sheet after each pass through the etching zone.Type: GrantFiled: January 26, 2017Date of Patent: May 11, 2021Assignee: Corning IncorporatedInventor: Craig Steven Weber
-
Patent number: 10998106Abstract: The invention relates to a method for decontaminating a radioactively contaminated metal surface, wherein the metal surface is brought in contact with a decontamination solution, which comprises a complexing agent and a transition metal. The invention further relates to such a decontamination solution and to the use thereof to decontaminate a metal surface.Type: GrantFiled: March 5, 2018Date of Patent: May 4, 2021Assignee: RWE POWER AKTIENGESELLESCHAFTInventors: Dietmar Nieder, David Jordan
-
Patent number: 10998186Abstract: Disclosed is a substrate processing apparatus including a dry processing unit and a controller. The dry processing unit includes: a chamber that accommodates the substrate; a supercritical processing liquid supply unit that supplies a supercritical processing liquid to the substrate; a heating unit that heats an inside of the chamber; and a discharge unit that discharges a fluid in the chamber from the chamber. The controller controls the supercritical processing liquid supply unit, the heating unit, and the discharge unit such that the supercritical processing liquid is supplied to the substrate before or after the substrate is accommodated in the chamber, the inside of the chamber is heated to change the supercritical processing liquid into a supercritical fluid or a subcritical fluid, and the supercritical fluid or the subcritical fluid is discharged from the chamber.Type: GrantFiled: December 27, 2019Date of Patent: May 4, 2021Assignee: TOKYO ELECTRON LIMITEDInventors: Gentaro Goshi, Keisuke Egashira
-
Patent number: 10985036Abstract: A substrate processing apparatus includes a vessel providing a processing space for processing a substrate, a substrate support supporting the substrate loaded in the processing space, and a barrier between a side wall of the vessel and the substrate support and surrounding an edge of the substrate supported by the substrate support.Type: GrantFiled: November 30, 2017Date of Patent: April 20, 2021Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Young-Hoo Kim, Sang-Jine Park, Yong-Jhin Cho, Yeon-Jin Gil, Ji-Hoon Jeong, Byung-Kwon Cho, Yong-Sun Ko, Kun-Tack Lee
-
Patent number: 10980387Abstract: An autonomously traveling floor washer autonomously performs an appropriate cleaning operation so that a washing liquid does not remain on a floor surface. In accordance with a cleaning schedule, the autonomously traveling floor washer autonomously travels and performs cleaning of the floor surface using a squeegee and the washing liquid. If a washing liquid discharge position at a taught data obtaining time is not included in a squeegee movement track calculated based on a position and a width of the squeegee at the taught data obtaining time, the cleaning schedule is modified so that the washing liquid discharge position is included in the squeegee movement track.Type: GrantFiled: August 4, 2017Date of Patent: April 20, 2021Assignee: MURATA MACHINERY, LTD.Inventors: Hideo Shitamoto, Tsuyoshi Nakano
-
Patent number: 10953359Abstract: The present invention relates to an appliance comprising, a regenerative filter for filtering a fluid flow, having at least one filter, a filter regenerator for regenerating the regenerative filter, a turbine for driving the filter regenerator, the turbine being driven by the fluid flow passing through the appliance during its use.Type: GrantFiled: June 28, 2016Date of Patent: March 23, 2021Assignee: Dyson Technology LimitedInventors: Richard David Nicolaou, Edward Sebert Maurice Shelton
-
Patent number: 10957529Abstract: A method for drying a wafer is provided. The method includes providing or receiving the wafer and applying a rinsing liquid in a liquid state to the wafer. The rinsing liquid has a boiling point. The method also includes drying the wafer by applying a drying fluid in a gaseous state to the wafer. The drying fluid has a higher temperature than the boiling point of the rinsing liquid, and the rinsing liquid is evaporated and removed by the drying fluid. After the removal of the rinsing liquid, the drying fluid remains in a gaseous state.Type: GrantFiled: January 19, 2017Date of Patent: March 23, 2021Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventor: Chung-Chieh Lee
-
Patent number: 10888907Abstract: A mixed jet descaling device axially and eccentrically arranged for the inner wall of a metal pipe comprises a support rod (1) arranged inside the metal pipe (100), the support rod being parallel to the central axis of the metal pipe, eccentrically arranged and not concentric with the central axis of the metal pipe; and at least two spray nozzle units (2, 2?, 2?) for spraying the mixed jet, the spray nozzle units being arranged from front to back along the length direction of the support rod. At least two mixed jet spray nozzles (21, 21?, 21?) are provided in each spray nozzle unit and uniformly arranged along the circumference of the support rod in such a manner that the mixed jet spray nozzles diverge towards periphery of the support rod with the axis of the support rod as the center.Type: GrantFiled: January 30, 2015Date of Patent: January 12, 2021Assignee: Baoshan Iron & Steel Co., Ltd.Inventor: Mingnan Duan
-
Patent number: 10857578Abstract: A soil washing process includes mixing water and contaminated soil in a log washer, separating the soil and water mixture into a first stream of wet soil and a second stream of water and floating organic materials, dewatering the first stream of wet soil to form a cleaned soil stream, dewatering the second stream to separate out the organic materials and form a water stream, separating the water stream into a stream of non-colloidal particulates and a stream of colloid-containing water, dewatering the stream of non-colloidal particulates, and adding the stream of colloid-containing water to the soil and water mixture. The method may further include returning a first portion of the colloid-containing water to the log washer, and drawing off a second portion of the colloid-containing water to filter out the colloids before returning a clean water stream to the log washer.Type: GrantFiled: September 11, 2018Date of Patent: December 8, 2020Inventor: Allen Shane Estep
-
Patent number: 10832924Abstract: A substrate treating device immerses substrates in a mixed-acid aqueous solution, and performs an etching treatment on the substrates. The substrate treating device includes: a treating tank that stores the mixed-acid aqueous solution; a treating-liquid exchange unit that performs a total liquid exchange of the mixed-acid aqueous solution based on a life time of the mixed-acid aqueous solution in the treating tank; a detecting unit that detects a pure-water concentration of the mixed-acid aqueous solution; a concentration control unit that controls, based on the pure-water concentration detected by the detecting unit, the pure-water concentration such that the pure-water concentration becomes a predetermined target concentration by supplying pure water to the mixed-acid aqueous solution in the treating tank; and a target-value change unit that changes a lower-side standard value (a target concentration).Type: GrantFiled: September 20, 2017Date of Patent: November 10, 2020Assignee: SCREEN Holdings Co., Ltd.Inventor: Shinji Sugioka
-
Patent number: 10821472Abstract: In a coating pretreatment facility using microbubbles, an arrangement is made to make it possible to form the facility compact and to reduce the initial cost and the running cost of the facility. A preliminary cleansing water supplying passage 33 is provided for supplying cleansing waters W1, W2 used in cleansing of a coating subject article B in flushing sections 3, 4 following a degreasing section 2 as preliminary cleansing water W3 for use in preliminary cleansing of the coating subject article B in a preliminary cleansing section 1. A microbubble generator device 34 is provided for causing the preliminary cleansing water W3 used in the preliminary cleansing of the coating subject article B in the preliminary cleansing section 1 to contain microbubbles.Type: GrantFiled: April 28, 2017Date of Patent: November 3, 2020Assignee: Taikisha Ltd.Inventors: Toshihiko Koike, Yasuhiko Sakota, Yoshikazu Hayashi
-
Patent number: 10809618Abstract: The objective is to favorably form a clear resist pattern using a resist composition containing a polymer that can inhibit resist pattern collapse when used as a main chain scission-type positive resist. A method of forming a resist pattern includes: a step of forming a resist film using a positive resist composition containing a polymer including a monomer unit (A) represented by general formula (I), shown below, and a monomer unit (B) represented by general formula (II), shown below, with a proviso that at least one of the monomer unit (A) and the monomer unit (B) includes at least one fluorine atom; an exposure step; and a development step. The development is carried out using a developer having a surface tension of 17 mN/m or less.Type: GrantFiled: January 20, 2017Date of Patent: October 20, 2020Assignee: ZEON CORPORATIONInventor: Manabu Hoshino
-
Patent number: 10800357Abstract: A method for disinfecting a vehicle drinking water tank is designed for dynamic disinfection. By providing a vehicle drinking water tank with a spray diffuser, which is arranged inside the vehicle drinking water tank, the disinfecting liquid can be sprayed over substantially the entire inner surface of the tank. Partial filling of the drinking water tank with a disinfecting liquid starts the disinfection method. The dynamics of the disinfection method are achieved by spraying the disinfecting liquid in such a way that a moved film of disinfecting liquid is formed and wets an inner surface of the drinking water tank. Material transport at the inner wall of the tank is improved and mechanical shear forces act on the biofilm, which is to be removed and/or disinfected, in combination with the biochemical disinfection forces.Type: GrantFiled: May 8, 2018Date of Patent: October 13, 2020Assignee: Airbus Operations GmbHInventors: Axel Schreiner, Paolo Cavarero
-
Patent number: 10789860Abstract: A label comprising a body having a first side for attaching to a container and a second side for displaying information, the first side includes a releasable adhesive for attaching the label to a container, wherein the releasable adhesive is treatable to cause the label to be separated from the container, and at least a part of the body is heat sensitive such that the label curls towards the first side to conceal part of the releasable adhesive when the label is heated to hinder the label separated from the container from re-attaching to the container.Type: GrantFiled: February 3, 2017Date of Patent: September 29, 2020Assignee: Labelmakers Group Pty LtdInventors: Graeme Lang, Michael Profenna
-
Patent number: 10773279Abstract: A mop cleaning system has a mop basin having a floor and a drain, a chamber affixed to the mop basin in a location away from the drain, a water inlet opening within the interior volume of the chamber, and a water source connected to the water inlet. The water inlet is adapted to pass water in an area adjacent to a bottom of the chamber. The water source is adapted to pass water under pressure into the water inlet. The chamber is fixedly mounted to the floor of the mop basin. The chamber has an outlet located at above the water inlet.Type: GrantFiled: April 11, 2019Date of Patent: September 15, 2020Inventor: Tim McDonald
-
Patent number: 10767257Abstract: The invention relates to a method for removing a metal deposit (2) arranged on a surface (5) in a chamber (1), said method including repeatedly performing a sequence including: a) a first phase of injecting chemical species suitable for oxidizing said metal deposit (2); and b) a second phase of injecting chemical species suitable for volatilizing the oxidized metal deposit, said second phase b) being performed after the first phase a).Type: GrantFiled: January 16, 2017Date of Patent: September 8, 2020Assignee: Plasma-Therm LLCInventors: Julien Vitiello, Fabien Piallat
-
Patent number: 10766795Abstract: Various aspects described herein relate to electrochemical devices, e.g., for separation of one or more target organic or inorganic molecules (e.g., charged or neutral molecules) from solution, and methods of using the same. In particular embodiments, the electrochemical devices and methods described herein involve at least one redox-functionalized electrode, wherein the electrode comprises an immobilized redox-species that is selective toward a target molecule (e.g., charged molecule such as ion or neutral molecule). The selectivity is based on a Faradaic/redox-activated chemical interaction (e.g., directional hydrogen binding) between the oxidized state of the redox species and a moiety of the target molecule (e.g., charged molecule such as ion or neutral molecule).Type: GrantFiled: October 27, 2016Date of Patent: September 8, 2020Assignee: Massachusetts Institute of TechnologyInventors: Xiao Su, Demetra S. Achilleos, Trevor Alan Hatton
-
Patent number: 10724940Abstract: A corrosion maintenance scheduling and implementation system and method measure one or more characteristics of corrosion in equipment before and after implementation of a corrosion remediation action, determine one or more of a change in the one or more characteristics of the corrosion between before and after implementation of the corrosion remediation action, one or more historical operational characteristics of the equipment, or one or more forthcoming operational characteristics of the equipment, and modify a schedule of the corrosion remediation action for the equipment based on one or more of the one or more characteristics of corrosion that are measured, the change in the one or more characteristics of the corrosion, the one or more historical operational characteristics of the equipment, and/or the one or more forthcoming operational characteristics of the equipment.Type: GrantFiled: June 28, 2017Date of Patent: July 28, 2020Assignee: GENERAL ELECTRIC COMPANYInventors: Andrew Joseph Detor, Bernard Patrick Bewlay, Monica Soare, Kevin Harding