Abstract: A coater with automatic cleaning function and a coater automatic cleaning method. The coater (100,200,300,400,500,600,700,800) includes a coater chamber (101,201,301,401,501,601,701,801) capable of being filled up with cleaning solution, a substrate chuck (102,202,302,402,502,602,702,802) holding and positioning a substrate (103,203,303,403,503,603,703,803), and at least one shroud (108,208,308,408,508) capable of moving up for preventing photoresist from splashing out of the coater chamber (101,201,301,401,501,601,701,801), or moving down and immersing into the cleaning solution for cleaning.

Abstract: An operating method of a vacuum processing apparatus for processing multiple wafers sequentially in a vacuum processing apparatus comprising multiple vacuum transfer containers, adjacent two of which are interlinked, a lock chamber inside which a wafer is housed. The multiple processing units are each subjected to cleaning the interior thereof upon elapse of a predetermined period. In advance of processing multiple wafers, the operating method configures multiple sets of processing units to process each of the wafers from among the multiple processing units and starts processing of the wafers, delayed by a predetermined time in descending order of the number of processing units included in each of the multiple sets of processing units and in descending order of distance of the processing units included from the lock chamber.

Abstract: A liquid recirculation system having a pump for recirculating liquid and a liquid filtering system for filtering the recirculating liquid. The liquid filtering system includes a filter disposed in the recirculation flow path to filter the liquid and a flow diverter or flow diverter to aid in cleaning the filter.

Abstract: A method is provided for monitoring a supply of a cleaning agent. The method includes performing a check of whether the supply of the cleaning agent is likely to be used up. The check is based, at least in part, on quantity information which is representative of an amount of the cleaning agent in a user's supply and on consumption information which is indicative of the user's expected consumption behavior with respect to the cleaning agent. Further, a device is provided for performing the method for monitoring the supply of the cleaning agent.

Abstract: Methods and apparatus to minimize electromagnetic interference between adjacent process chambers of a cluster tool are described. The start time of the subject recipe is controlled based on the electromagnetic process window of the subject process chamber, the electromagnetic window of the first adjacent process chamber and of an optional second adjacent process chamber. The start time of the subject process chamber is controlled to prevent temporal overlap of the electromagnetic window of the subject chamber with the electromagnetic window of an adjacent chamber.

Abstract: Dishwashing appliances and methods, as provided herein, may include features or steps such as activating the drain pump for an activation period and receiving a pump-status signal during the activation period. Dishwashing appliances and methods may further include features or steps for detecting a pressure (P1) upstream from the drain pump during the activation period, determining a condition at the filter based on the pump-status signal and P1, and directing the drain pump based on the determined condition.

Abstract: A wash arm assembly may include: a wash arm having a circular opening with a center, an edge, and a mounting unit having a circular insertion portion and a supporting portion. The mounting unit may be inserted at least partly in the circular opening to mount the wash arm within the dishwasher and to allow rotation of the wash arm around a rotational axis. The insertion portion may be inserted at least partly in the circular opening to form a passage between the edge and the circular insertion portion when the mounting unit is inserted at least partly in the circular opening. The wash arm may include a protrusion, and the supporting portion and the wash arm may form a chamber delimited by the passage and the protrusion when the supporting portion supports the wash arm. A dishwasher including the wash arm assembly may also be provided.

Abstract: An EUV cleaner system and process for cleaning a EUV carrier. The euv cleaner system comprises separate dirty and cleaned environments, separate cleaning chambers for different components of the double container carrier, gripper arms for picking and placing different components using a same robot handler, gripper arms for holding different components at different locations, horizontal spin cleaning and drying for outer container, hot water and hot air (70C) cleaning process, vertical nozzles and rasterizing megasonic nozzles for cleaning inner container with hot air nozzles for drying, separate vacuum decontamination chambers for outgassing different components, for example, one for inner and one for outer container with high vacuum (e.g., <10?6 Torr) with purge gas, heaters and RGA sensors inside the vacuum chamber, purge gas assembling station, and purge gas loading and unloading station.

Abstract: An endoscope includes an insertion section configured to be inserted into a subject, an operation section configured to be consecutively provided on a proximal end side of the insertion section, a rigid partition wall provided inside the insertion section or inside the operation section and configured to maintain watertightness between a first space including an inside of the insertion section and a second space formed on a distal end side of the first space, and a first check valve provided in the partition wall and configured to block circulation of gas from the second space to the first space and circulate gas from the first space to the second space.

Abstract: A warewash machine includes a housing, which at least in part, defines a treatment chamber having an access opening, and a door mounted for movement between a lowered and closed position for washing and a raised and open position for inlet and outlet of wares through the access opening. At least one nozzle is provided for emitting liquid into the treatment chamber. A rack track is positioned within the treatment chamber, the rack track movable between a use orientation and a cleaning orientation within the treatment chamber. A track support is mounted for movement between a use orientation and a storage orientation, wherein, when the track support is in the use orientation, the track support is engageable with a portion of the rack track to maintain the rack track in the cleaning orientation.

Abstract: A cup wash disk for cleaning a photoresist process tool is provided. An upper plate is arranged over a lower plate to define a cavity between the upper and lower plates. The lower plate comprises peripheral openings in fluid communication with the cavity and arranged along a periphery of the lower plate. A plurality of shims is arranged between the upper and lower plates to space the upper and lower plates and to define slits between the upper and lower plates. The slits are in fluid communication with the cavity. A method for cleaning the photoresist process tool using the cup wash disk is also provided.

Abstract: A laundry treating apparatus includes a housing, a tub, a drum, a top cover located above the housing and configured to cover an upper portion of the tub and the drum, a detergent box, a distributor configured to receive washing water from an external water supply source and to distribute washing water, a detergent water supply pipe connected to the distributor, and a tub water supply pipe connected to the distributor. The top cover includes a distributor holder located at a rear portion of the top cover and configured to support the distributor, a detergent box holder located at a front portion of the top cover and configured to support the detergent box, and a first pass through that allows the detergent water supply pipe to pass through the top cover from an upper portion of the top cover to a lower portion of the top cover.

Abstract: Provided is a cleaning device, comprising a wiper, a first clamping plate, a second clamping plate, a first elastic clamp and a second elastic clamp. The first clamping plate comprises a first plate body, a first bent portion and a first end portion. The first bent portion extends between the first plate body and the first end portion in a bent manner. The second clamping plate comprises a second plate body, a second bent portion and a second end portion. The second bent portion extends between the second plate body and the second end portion in a bent manner. The wiper is positioned between the first clamping plate and the second clamping plate. The cleaning device is moved relative to the nozzle to wipe the nozzle for cleaning. The wiper will not generate pollution and basically causes no wear to the nozzle.

Abstract: A dishwasher for treating dishes according to a cycle of operation includes a tub at least partially defining a treating chamber, a manifold, a rotatable sprayer that is rotatable about a rotation axis and has an inlet and multiple nozzles collectively forming an outlet and a bushing creating a sealing interface between the manifold and the rotatable sprayer.

Abstract: A dishwasher includes a tub at least partially defining a treating chamber with an access opening, a sump fluidly coupled to the treating chamber, at least one sprayer emitting liquid into the treating chamber, a pump, a conduit fluidly coupling the sump to the pump and the pump to the at least one sprayer, thereby defining a recirculation circuit through which the liquid sprayed into the treating chamber collects in the sump and is pumped back to the at least one sprayer, a filter assembly provided in the sump and having a filter through which at least a portion of the liquid passes, and an insert sleeve at least partially located within the filter assembly.

Abstract: In an embodiment the present invention provides a dispensing device for introducing a pourable detergent in metered amounts into a treatment chamber of a program-controlled cleaning appliance, in particular a dishwasher, the dispensing device including: a supply container for holding the detergent, the supply container having a reservoir chamber and a metering chamber terminating in a dispensing opening, the metering chamber being provided by a metering element that is movably disposed within the supply container and is movable from a non-metering position to a metering position; and a carrier unit which is rotatable by a motor and is configured to replaceably receive the supply container.

Abstract: Embodiments of the present disclosure address problems presented by contaminants, such as dirt and debris, by providing an optical apparatus with techniques and methodologies for self-cleaning. In that regard, embodiments of the present disclosure employ techniques and methodologies for maintaining a very thin (e.g., few microns thick) layer of liquid, such as a non-stick liquid, on an optical window of an optical body that shields or protects an optical device.

Abstract: The dishwasher includes a cabinet in which a washing space is formed, a supply pipe through which the washing water moves, and a nozzle unit connected to the supply pipe for spraying washing water into the washing space. The nozzle unit includes a unit body having an injection hole for injecting wash water into the washing space, a rotation holder coupled to the unit body, and a rotation holder rotatably disposed on the supply pipe. The supply pipe includes a holder that supports the rotation holder and is coupled along the periphery of the supply pipe.

Abstract: A computer includes a processor and a memory storing processor-executable instructions. The processor is programmed to receive data indicating a contaminant on a sensor window of a vehicle; determine a combination of an air pressure setting of an air source and a liquid pressure setting of a liquid source to remove the contaminant from the sensor window; and set the air source to the air pressure setting and the liquid source to the liquid pressure setting.

Abstract: In one embodiment, after a new filter unit (3) is installed in a treatment liquid supply apparatus, there is performed, before a solvent-containing treatment liquid is passed through the filter unit, a step of soaking the filter unit with a solvent for pretreatment and then discharging therefrom the solvent. The solubility of a material, constituting a filter part (31) of the filter unit, to the solvent is greater than the solubility of the material to the treatment liquid. This step makes it possible to remove a component, which may elute from the filter part into the treatment liquid to produce foreign matters (particles), before treatment liquid is passed through the filter unit.

Abstract: The present disclosure provides a device for preventing the fouling of a liquid dispensing nozzle. The end of the dispensing nozzle is placed in a hollow interior of a band carrying the same solvent that is dispensed by the nozzle. The solvent on the band evaporates into a gap between the band and the dispensing nozzle, thus providing a vapor sheath, or environment in the gap, that helps to prevent the fouling of the dispensing nozzle.

Abstract: A dishwasher includes a tub. The dishwasher further includes a spray arm that includes a main arm and an auxiliary arm. The dishwasher further includes a fixed gear part that is connected to the tub, that is configured to rotatably support the main arm, and that includes teeth along an outer circumferential surface of the fixed gear part. The dishwasher further includes a rotating gear part that is connected to the main arm and that is configured to rotate and engage the teeth of the fixed gear part based on rotation of the main arm. The dishwasher further includes a link unit that is connected to the rotating gear part, the main arm, and the auxiliary arm, that is configured to move based on rotation of the rotating gear part, and that is configured to guide reciprocation of the auxiliary arm through the predetermined arc.

Abstract: An electric fluid pump and method of regulating flow of liquid therethrough is provided. The pump has an electric motor including a stator and a rotor, wherein the rotor is supported for rotation to drive an impeller that is fixed thereto for rotation to pump coolant from a fluid inlet to a fluid outlet. A controller is in operable, closed loop communication with the electric motor, and the impeller is operable to rotate in a first rotary pumping direction and an opposite second rotary pumping direction in response to a signal from the controller. The first rotary pumping direction produces a first positive flow rate of coolant outwardly from the fluid outlet and the second rotary pumping direction produces a second positive flow rate of coolant outwardly from the fluid outlet, with the first positive flow rate being greater than the second positive flow rate.

Abstract: A dishwasher including a cabinet assembly having a tub in which dishes are received, a sump, having a water collection unit configured to store wash water disposed therein, which is coupled to an interior of the cabinet assembly to collect wash water and to supply steam generated in the water collection unit into the cabinet assembly, and a heater module located outside the sump to transfer heat to the water collection unit and to heat the wash water in order to generate steam. The heater does not contact the wash water, preventing corrosion or oxidation of the heater.

Abstract: Provided are a dish washing machine capable of effectively removing garbage which remains at the bottom of a washing tub and a filter and a method of controlling the same. When washing water is sprayed from a nozzle while a vane is positioned at a reference position during a drainage operation, since a deflection angle of the vane is bent back and the washing water is strongly sprayed toward a rear wall of a washing tub, the washing water may form a fast and strong water current over a bottom plate of the washing tub, and the fast and strong water current may remove garbage which remains at a filter while flowing over the bottom of the washing tub. Also, even when an excessive amount of garbage is accumulated at a filter at a top end of a sump and blocks the filter during a washing operation such as preliminary washing, main washing, etc., the filter is automatically washed using a small amount of water, thereby eliminating inconvenience of a user to directly separate and wash the filter.

Abstract: A dishwasher, in which a reservoir provided with an electrolyzer is connected to a water collector via a flow path change valve, and wash water in the reservoir is electrolyzed by the electrolyzer during non-operation of the wash water, to generate sterilizing water and to circulate the sterilizing water into the dishwasher, thereby achieving an enhancement in sterilizability of the dishwasher. A method for controlling a dishwasher makes it possible to suppress propagation of microorganisms left in the dishwasher and to remove organic substances, using a sterilizing agent or high-temperature water. It is also possible to reduce generation of offensive odor caused by decomposition of bacteria, through a reduction in the amount of bacteria in the dishwasher. Since sterilization of the dishwasher is automatically carried out, enhanced user convenience is provided.

Abstract: A mask-cleaning apparatus includes a frame, a wet cleaning mechanism supported on the frame, and a dry cleaning mechanism supported on the frame and located after the wet cleaning mechanism in a direction of feeding a clean-room wiper. The wet cleaning mechanism wipes a mask before the dry cleaning mechanism wipes the mask. Each of the wet and dry cleaning mechanisms includes a wiping module that includes a vertical plate, a feeder reel, a retriever reel, direction-changing rollers and a pushing roller. The wiping module of the wet cleaning mechanism includes a sprayer mechanism adapted for spraying cleaning liquid onto a portion of the clean-room wiper on the pushing roller.

Abstract: An apparatus for cleaning an instrument with a cleaning fluid includes a vessel defining a chamber and a port for at least partially filling the chamber with the fluid. The apparatus further includes an ultrasonic transducer for delivering ultrasonic energy to the fluid, and a vacuum pump for depressurizing the chamber. The apparatus further includes a rotatable device removably disposable in the chamber and having a rack defining a cavity for supporting the instrument. The rotatable device also has a fluid delivery member extending toward the cavity and having a fluid channel between an inlet and an outlet. The apparatus further includes a fluid transmission system in fluid communication with the chamber and the fluid channel of the fluid delivery member for circulating the fluid from the chamber through the fluid channel of the fluid delivery member. A method of cleaning an instrument is also provided.

Abstract: A dishwasher with a tub at least partially defining a treating chamber, a liquid spraying system, a liquid recirculation system defining a recirculation flow path, and a liquid filtering system. The liquid filtering system includes a rotating filter disposed in the recirculation flow path to filter the liquid.

Abstract: The present subject matter provides a method for operating a dishwasher appliance. The method includes finely filtering wash fluid with a fine filtration medium via cross-flow filtration and coarsely filtering wash fluid with a coarse filtration medium via dead-end filtration. The finely filtered wash fluid is directed to a spray assembly of the dishwasher appliance. A related dishwasher appliance is also provided.

Abstract: The present invention relates to a dishwasher comprising a washing chamber, a water circulating system and a water filtering system, said water filtering system is arranged in the lower part of the washing chamber, wherein said water filtering system comprises a filter through which at least some of the circulating water is passing, said filter having bistable characteristics such that it has two stable shapes and is flippable from one stable position to the other by a force applied on the filter in a direction toward the other stable shape, wherein the filter is securable in the lower part of the washing chamber by flipping the filter from one stable shape to the other. The invention furthermore relates to a method for mounting the filter in a dishwasher.

Abstract: A washing machine comprises a drum and a heat pump system for heating water to be fed to the drum in a washing program. The heat pump system has an evaporator in heat exchange relationship with a room air flow and a condenser in heat exchange relationship with water to be heated, an air deflector being configured to divert said room air flow downstream the evaporator away from the condenser in a water heating configuration and to convey said air towards the condenser in a room air dehumidifying configuration of the washing machine.

Abstract: The present invention is directed to a process for coating a substrate in a rotating drum, wherein a pocket is created in a substrate bed into which pocket coating materials are delivered. Also provided is a controlled release product produced according to this process, and an apparatus for carrying out the process.

Abstract: Fluid circulation systems for dishwasher appliances are provided. A dishwasher appliance includes a tub that defines a wash chamber. A fluid circulation system includes a sump for receiving fluid from the wash chamber, the sump comprising a chamber having a sidewall and a base wall. The fluid circulation system further includes a pump, the pump including an impeller disposed within the chamber. The fluid circulation system further includes a filter disposed within the chamber and surrounding the impeller, the filter including a sidewall, the sidewall defining a plurality of perforations extending therethrough. In some embodiments, a volume within the filter is greater than a volume between the sidewall of the chamber and the sidewall of the filter for a given height from the base wall. In some embodiments, volumes of the plurality of perforations increase along a height from the base wall.

Abstract: A filter assembly for filtering wash fluid to be recirculated by a circulation pump in a dishwasher appliance is provided. The filter assembly includes a first filter member and a second filter member. The first filter member defines a first filter panel and the second filter member defines a second filter panel. The first filter panel is spaced from the second filter panel along an axial direction of the filter assembly and is configured in series flow with the second filter panel. More particularly, the first and second filter panels are configured such that wash fluid is filtered by the first filter panel and by the second filter panel prior to being recirculated by the circulation pump.

Abstract: When a substrate W is processed, a ring-shaped protective wall is located above the substrate held by the substrate holding unit and extends in a circumferential direction of the substrate. A radial position of an external periphery of a lower end of the protective wall is the same as a radial position of an internal periphery of a peripheral portion of an upper surface of the substrate held by a substrate holding unit, or is located at a radial outside. A first gap is formed between the protective wall and an upper surface of the substrate, a second gap is formed between the protective wall and a wall that defines the upper opening of the cup, and when the interior space of the cup is exhausted, a gas present above the substrate is introduced through the first gap and the second gap into the interior space of the cup.

Abstract: A macerator assembly for an appliance circulation pump that improves pump and appliance performance. The macerator assembly includes an inner and outer cylinder concentrically disposed along a longitudinal axis. Each cylinder has a plurality of apertures defined by cutting edges. One or both of the inner and outer cylinders are rotated such that the cutting edges of the apertures fully filter and chop large incoming particles into smaller pieces.

Abstract: In a substrate processing apparatus, chemical-solution processing is performed by supplying a chemical solution to the upper surface of a substrate in a state where a top plate is located at a first relative position. Also, cleaning processing is performed by supplying a cleaning liquid to the upper surface of the substrate in a state where the top plate is located at a second relative position closer to the substrate than the first relative position is. Moreover, dry processing is performed on the substrate by rotating the substrate in a state where the top plate is located at a third relative position closer to the substrate than the second relative position is. This allows a chemical atmosphere above the substrate to be efficiently removed during the cleaning processing. Consequently, the occurrence of particles due to the chemical atmosphere above the substrate can be suppressed during the dry processing.

Abstract: A dishwasher appliance including a tub defining a wash chamber is provided. The dishwasher appliance also includes a sump positioned at a bottom portion of the tub, the sump including a bottom wall that defines a recessed chamber. A drain pump is provided in flow communication with the recessed chamber defined by the bottom wall of the sump. Moreover, a filter assembly is positioned at least partially within the sump and movable along an axial direction of the sump between a first position and a second position. The filter assembly is positioned over the recessed chamber of the bottom wall when in the first position and is seated on the bottom wall of the sump around the recessed chamber when in the second position.

Abstract: A dishwasher includes an independent presoak system which may be activated by a user of the dishwasher. The dishwasher presoak system utilizes a storage tank, supply tubes, and set of nozzles which are independent from components used in a washing cycle such that a presoak detergent is applied to items placed within a washing compartment of the dishwasher without being diluted by a standard wash cycle. As part of the presoak system, the dishwasher features a detection system which allows the user to select an automatic presoak operating state whereby the dishwasher utilizes a sensor to determine if items placed into the washing compartment are sufficiently dirty to need a presoak cycle prior to a washing cycle. The dishwasher further relies on a control system to analyze samples taken of the dirtiness levels of items placed within the washing compartment and determine whether a presoak option is necessary or suggested.

Abstract: A foreign object protection system for a dishwasher for treating dishes according to a cycle of operation includes a tub, a sump,a recirculation pump;and a foreign object protection system comprising a grate, wherein liquid in the tub collects in the sump and is recirculated by the recirculation pump such that the liquid is drawn through the foreign object grate.

Abstract: A liquid filtration system includes a sump screen, a filter, and a cap. The sump screen mounts to a tub bottom wall and includes a plate and a filter aperture edge mounted through the plate. The plate includes a sump mesh having a sump mesh size of less than approximately 0.1 inches. The filter mounts to the filter aperture edge and includes a sidewall and a plurality of posts mounted to extend up from the sidewall. The sidewall includes a filter mesh having a filter mesh size of less than approximately 0.1 inches. At least a portion of each post extends above the filter aperture edge when the filter is mounted to the filter aperture edge. The cap mounts above the plurality of posts. The plurality of posts and the cap form a conduit sized to allow material that cannot pass through the sump mesh to flow through the conduit.

Abstract: The present invention relates to a dishwasher and a control method thereof. According to one aspect, the dishwasher which washes dishes according to washing, rinsing, and drying steps comprises: a tub which is provided with a rack for accommodating dishes, and a washing nozzle for spraying washing water; a sump in which the washing water supplied to the tub is collected; a filter device which is provided to the sump, and allowing foreign substances of the washing water to be filtered; and a cleaning unit which clears away the foreign substances accumulated in the filter device.

Abstract: An apparatus includes a wafer stage configured to secure a wafer; and a cleaning module including a tank adjacent to the wafer stage, and is positioned outside the region occupied by the wafer. The cleaning module is configured to receive de-ionized (DI) water into the tank and extract the DI water out of the tank. The tank is configured to hold DI water with a top surface of the DI water substantially level with a top surface of the wafer.

Abstract: A system for cleaning a container such as semiconductor wafer carrier includes a housing, a cleaning unit in the housing, an analyzing unit within the housing, and a vacuum unit within the housing. The cleaning unit comprises a cleaning chamber, and is configured to spray a cleaning medium into the container in the cleaning chamber and dry the container. The analyzing unit is configured to analyze air inside the container coming out of the cleaning chamber, and provide a testing result for each ingredient of possible airborne molecular contamination (AMC) and humidity. The vacuum unit comprises a vacuum chamber configured to apply vacuum onto a container when the testing result for an ingredient is higher than a respective threshold.

Abstract: The dishwasher (1) of the present invention comprises a washing tub (2) wherein items to be washed are placed, a receptacle (3) which is located at the lower portion of the washing tub (2) and wherein the water in the washing tub (2) is collected during the washing process, a hollow cylindrical microfilter (5) which is located in the middle of the receptacle (3) and which holds the residues carried by the water that passes from the receptacle (3) to the water circulation line, a pump (4) which returns the water accumulated in the receptacle (3) to the washing tub (2), an additional line (6), one end of which is connected to the pump (4) and the other end opening to the middle of the microfilter (5), and a sprayer (8) which is disposed into the microfilter (5) and which has more than one nozzle (7) that are located on the surface of the sprayer (8) and that provide the water supplied from the pump (4) by means of the additional line (6) to be sprayed towards the inner surface of the microfilter (5).

Abstract: Apparatuses, methods, apparatuses and systems for monitoring a one or more vehicles are disclosed. One system includes a plurality of road transceivers located along a vehicle roadway, wherein each road transceiver is operative to at least one of communicate with or sense the one or more vehicles as the one or more vehicles travels along the vehicle roadway. A controller interfaced with the plurality of road transceivers or a controller within at least one of the plurality of road transceivers is operative to determined one or more operative conditions of the one or more vehicles based on the communications with or the sensing of the one or more vehicles.

Abstract: A dishwasher with a tub at least partially defining a washing chamber, a liquid spraying system for spraying liquid within the washing chamber, a liquid recirculation system defining a recirculation flow path, and a liquid filtering system. The liquid filtering system includes a rotating filter disposed in the recirculation flow path to filter the liquid.

Abstract: A transportable separator for separating particulate matter from wellbore fluid having a portable separation system and a hydrodynamic jetted gas separator. The portable separation system having a particulate fluid separation chamber fluidly engaging a variable speed screw conveyor for conveying particulate matter forming particle free fluid, a skim chamber removing oil from particle free fluid, a water leg compartment with an adjustable water leg adjusting a level of fluid in the skim chamber, and an oil settling compartment receiving the oil from the skim chamber, and recycling basic sediment and water.

Abstract: A dishwasher for treating dishes according to at least one cycle of operation and methods for operating a dishwasher. The dishwasher may have a tub at least partially defining a treating chamber, a rotatable sprayer, a drive system operably coupled to the rotatable sprayer to effect movement of the rotatable sprayer, and a liquid recirculation system for recirculating sprayed liquid. The dishwasher may have a sump including a sensor enclosure, a first sensor element located within the sensor enclosure and configured to sense at least a portion of the rotatable sprayer, and a controller configured to receive output from the first sensor element and control the drive system and the liquid recirculation system to rotate the rotatable sprayer while selectively supplying liquid to the rotatable sprayer.