Abstract: Exemplary substrate supporting apparatus and method for attaching and/or detaching substrate are provided. In one aspect, substrate supporting apparatus has a plurality of supporting members 10 that contacts a circumferential part of a substrate W and rotate the substrate W; a pair of driven members 30 on which the plurality of supporting members 10 are provided; a connecting member 20 connecting one driven member 31 and another driven member 32; and a driving device 40 that brings the pair of driven members 30 close to each other or separates the pair of driven members 30 from each other, linearly along a first direction, by moving at least a part of the connecting member 20. Numerous other aspects are provided.

Abstract: The present disclosure provides a substrate processing apparatus and a substrate processing method. The substrate processing apparatus includes a substrate support unit configured to support a substrate, a liquid supply unit configured to supply a liquid containing any one of a chemical liquid and a cleaning liquid to the substrate supported by the substrate support unit, a processing container configured to accommodate the substrate support unit and recover the liquid supplied to the substrate from the liquid supply unit, and a capture module provided in the processing container to capture the liquid so as to suppress the liquid scattered from the substrate from being bounced back from the processing container and re-scattering.

Abstract: An apparatus for treating a substrate, the apparatus comprising: a treating container having an inner space; a support unit supporting and rotating the substrate in the inner space; and an exhaust unit exhausting an air flow in the inner space, wherein the treating container includes an outer cup providing the inner space; and an inner cup disposed at the inner space and spaced apart from the outer cup, and wherein the outer cup has a protrusion at a side wall thereof.

Abstract: A dishwasher includes a tub with an access opening to a treating chamber, a sump, at least one sprayer emitting liquid into the treating chamber, a pump, a conduit fluidly coupling the sump to the pump and the pump to the at least one sprayer, thereby defining a recirculation circuit through which the liquid sprayed into the treating chamber collects in the sump and is pumped back to the at least one sprayer. The dishwasher also includes a filter assembly in the sump for filtering the liquid in the recirculation circuit including a cleaning element and a dome shaped displacement body positioned adjacent the filter wall for raising a liquid level within the filter and configured to fill more than 50% of a percentage of a volume of the filter.

Abstract: Provided herein are methods and compositions for water disinfection. The methods and compositions, which can include a peracid and a source of copper ions, are useful for treatment of water contaminated with recalcitrant microbes.

Abstract: A dishwasher includes: a cabinet defining an external appearance of the dishwasher; a tub disposed in the cabinet to form a space where to wash dishes; a heat exchanger disposed between the tub and the cabinet to form a space in which external air flows; and a condensing module disposed between the heat exchanger and the cabinet and configured to exchange heat of air discharged from the tub with the external air flowing in the heat exchanger such that the heat-exchanged air flows into the tub.

Abstract: A dishwasher appliance includes a filter assembly positioned between a pump and a spray body along a flow path between the pump and the spray body. The filter assembly includes a cylindrical filter medium positioned within a housing proximate an inlet of the housing. A plurality of vanes is distributed around the cylindrical filter medium. The plurality of vanes is rotatable about the cylindrical filter medium.

Abstract: A dishwashing appliance includes a first water storage tank, a second water storage tank, and a heat pipe heat exchanger comprising a condenser section and an evaporator section. The evaporator section is in operative communication with the first water storage tank and the condenser section is in operative communication with the second water storage tank.

Abstract: An apparatus and method for cleaning the interior of an above ground storage tank includes a nozzle assembly mounted to a cover on the storage tank sidewall having a horizontally extending wash pipe fixedly and a suction pipe for recirculation of spent fluids. The wash pipe has an interior segment which can be extended to a tank floor and is configured with a bend to extend along the tank sides all to which is attached a submersible swivel joint fitted with a choked nozzle. A control assembly is provided to direct from the nozzle from the exterior of the storage tank. The nozzle vibrates in response to flow of wash fluid from the wash pipe.

Abstract: Illustrative processes remove ice buildup in containers or other locations by melting the ice using a de-ice component. Waste fluid may be removed using a vacuum component. The de-ice component causes discharge of pressurized fluid to melt ice. The de-ice component may include a base with guide features configured to engage an opening of the container. The de-ice component may direct a spray of the pressurized fluid into the container to melt the ice. The de-ice component may include a pressure regulator valve to selectively regulate a resulting force of the fluid sprayed into the container, which may enable a user to avoid damaging internal components located within the container. The vacuum component may cause the pressurized fluid to flow through a high pressure nozzle to create a vacuum effect at a suction inlet, which can extract waste fluid and/or other debris from the container.

Abstract: A decontamination process may use significantly less water when utilizing a targeted decontamination approach. Analysis of a given decontamination situation may direct responders to set up a given Contamination Reduction Zone and follow protocols for targeted mitigation of contamination found on individual responders working the scene. By targeting and controlling the contamination, significantly fewer resources are used in response to a situation.

Abstract: Disclosed is an apparatus for conveniently and rapidly removing chips from the interior of a pipe by discharging chips with a portion of fluid out of the pipe using the difference between the pressure in the pipe and atmospheric pressure. The apparatus includes a fitting mounted to a region adjacent to a hole bored in a pipe, a sandwich valve coupled to the fitting, a chip-removing adapter mounted above the sandwich valve, a suction tube extending to an inner surface of the pipe through the chip-removing adapter in order to remove chips from the pipe, a vertical moving unit for vertically moving the suction tube, a delivery tube connected to an upper end of the suction tube and configured to deliver the chips to a predetermined place, and a strainer mounted to a distal end of the delivery tube in order to separate the delivered chips from the fluid.

Abstract: A solar panel cooling system and apparatus. The cooling system includes a shroud that is coupleable to a back side of a solar panel. The shroud encloses a space on the back side of the solar panel and includes a nozzle for spraying cooling fluid onto the back side of the solar panel. The cooling fluid spray is contained within the space and is recirculated through a closed loop system to cool the cooling fluid before again being sprayed by the nozzle. Thermal energy absorbed by the solar panel is transferred to the cooling fluid to cool the solar panel. A backing element can be applied to the solar panel that aids transfer of thermal energy to the cooling fluid, directs the drainage flow of the cooling fluid, or comprises a thermo-electric generator to generate additional electrical energy from the system.

Abstract: A device for controlling the duration of time water is retained in a bath tub or other liquid retaining receptacle; the device comprising a timer element and a plug assembly operable between a closed state and an opened state; the plug assembly changing from the closed state to the opened state at the expiry of a time duration pre-selected on the timer element.

Abstract: The present disclosure relates to an apparatus and a method for treating a substrate with a liquid. A substrate treating apparatus includes a substrate supporting unit having a supporting plate for supporting a substrate and a bottom liquid supply unit for supplying a liquid to a bottom of the substrate supported by the supporting plate, wherein the bottom liquid supply unit includes a body and a liquid discharge nozzle for discharging a treatment liquid to the bottom of the substrate and coupled to the body and wherein an upper surface of the body includes a drainage hole for draining a liquid remaining in the body. Accordingly a liquid remained in the body may be discharged through the drainage hole.

Abstract: An apparatus is described for cleaning the exterior of a furnace heat exchanger that includes a bundle of finned convection or bare radiant tubes heated when in use by the flue gases of a heater furnace. The apparatus comprises a motorized carriage 10 guided for movement along the outer surface of the bundle in a direction parallel to the tubes and a holder 24 on the carriage for holding a lance 20 in a position relative to the carriage 10 that permits the lance 20 to penetrate between the tubes of the bundle and to be advanced along the core by the carriage while remaining in the latter position.

Abstract: A washing system includes a cylindrical body portion which is prepared for each kind of insertion portion and a supply hole portion which is provided in the body portion to communicate with the inside of the body portion and which supplies a fluid to an opening portion of an insertion portion housed in the body portion. The washing system includes a supply mechanism which is shared by the body portion corresponding to each insertion portion that is prepared which supplies the fluid to the supply hole portion and which is attachable to and detachable from the supply hole portion.

Abstract: A device for processing wafer-shaped articles comprises a closed process chamber providing a gas-tight enclosure, and a rotary chuck located within the closed process chamber. The closed process chamber comprises an annular duct surrounding the rotary chuck and extending along a first direction radially outwardly of the rotary chuck and obliquely to a rotary axis of the rotary chuck, from an inlet end that communicates with the rotary chuck to an outlet end that communicates with an exhaust duct. The annular duct comprises a duct section extending between the inlet and outlet ends that is defined by an inner chamber wall spaced apart from an outer chamber wall. The extent of the duct section along the first direction is at least twice a spacing of the inner and outer chamber walls throughout the duct section, as measured in a direction perpendicular to the first direction.

Abstract: A spin base is caused to rotate at a number of revolutions of from 250 rpm to 350 rpm (first number of revolutions), and at the same time, a cleaning solution is supplied through a discharge head to a holding surface of a spin base while the upper end of a processing cup surrounding the spin base is placed below the holding surface. Thus, an outer upper surface of the processing cup is cleaned with the cleaning solution scattered from the holding surface. Then, the spin base is caused to rotate at a number of revolutions of from 350 rpm to 450 rpm (second number of revolutions) higher than the first number of revolutions, and at the same time, a cleaning solution is supplied through the discharge head onto the holding surface. Thus, a partition plate outside the processing cup is cleaned with the cleaning solution scattered from the rotating holding surface.

Abstract: An intake-air cooling device is disposed on a rear-stage side of a pre-filter disposed on an intake-air inlet side of an intake-air duct for guiding intake air taken in from an intake-air inlet to a compressor, for cooling the intake air by spraying water to the intake air. The intake-air cooling device includes a plurality of nozzles configured to spray the water to the intake air, a plurality of water conduit pipes including the plurality of nozzles arranged in an axial direction of the plurality of water conduit pipes, and a plurality of supply pumps configured to supply the water to a corresponding one of the plurality of water conduit pipes. Each of the plurality of water conduit pipes is an endless member which has a different perimeter.

Abstract: Disclosed is a device for use in a test to measure the corrosivity of a high temperature hydrocarbon based fluid by determining areal mass density change from a metal layer deposited on a surface of a gallium orthophosphate (GaPO4) crystal. The device includes a blind flange according to ASME B 16.5 having a peripheral bolt portion and a central portion. Bolt holes are present in the peripheral bolt portion of the blind flange for attaching the blind flange to a vessel. A hole through the central portion of the blind flange is provided to which a tube is securely attached at a first end. A second end of the tube is capable of holding the GaPO4 crystal.

Abstract: Various embodiments provide methods and systems for making and/or cleaning semiconductor devices. In one embodiment, a semiconductor device can be formed including a metal layer and a photoresist polymer. During formation, the semiconductor device can be cleaned in a cleaning chamber by a first cleaning solution provided from a solution supply device. After this cleaning process, a second cleaning solution containing metal ions and/or polymer residues can be produced and processed in a solution processing device to at least partially remove the metal ions and/or polymer residues to produce a third cleaning solution for re-use. In an exemplary fabrication or cleaning system, the solution processing device may be configured connecting to either an inlet or an outlet of the cleaning chamber. After cleaning, the semiconductor device can be processed to include a metal plug or an interconnect wiring.

Abstract: The present invention discloses a slit nozzle cleaning device for coaters. The slit nozzle cleaning device for coaters comprises a heating source, a crucible and a mixing means, the heating source is used to heat the materials in the crucible; the mixing means is used to mix the materials in the crucible. The mixing means is used to mix the materials in the crucible, thus a uniform heating environment in the crucible can be formed.

Abstract: A rotating shaft is provided to extend downward from the inside of a spin motor. A plate supporting member is attached to the lower end of the rotating shaft. A spin plate is supported in a horizontal attitude by the plate supporting member. A substrate holding mechanism is provided at the periphery on the spin plate. The lower end of an annular member is formed to be opposite to an annular region extending along the periphery on the upper surface of the substrate held by a spin chuck. A distance between the upper surface of the substrate and the lower surface of the spin plate is larger than a distance between the upper surface of the substrate and the lower end of the annular member.

Abstract: Self-raising drive-over entranceways for containment berms are disclosed. The entranceway includes a horizontal bottom panel and a collapsible sidewall that is held in a partially collapsed position forming a void between the bottom panel and sidewall. During a spill or the filling of the containment berm with a fluid, the void area between the partially collapsed sidewall and the horizontal bottom panel fills with the fluid and exerts hydrostatic pressure against the partially collapsed sidewall, forcing it to rotate upward. The higher the fluid level, the more hydrostatic pressure is applied against the sidewall, forcing it up higher until the sidewall obtains a vertical orientation. The sidewall may be restrained either by straps, braces or the like to prevent the fluid from escaping the containment area.

Abstract: A process for aircraft retrieval and aircraft crash site remediation may include establishing a perimeter at an aircraft crash site. The process may include containing wreckage in a containment unit that is adapted to prevent release of hazardous materials into the environment. The wreckage may include wreckage of an aircraft from the aircraft crash site. The process may include washing at least some of the wreckage in a decontamination unit. The process may include packaging the washed wreckage in a container.

Abstract: An air conditioner cleaning assembly cleans a housing of an air conditioning unit. The assembly includes a drain tray having a pair of side walls and a base wall coupled to and extending between the side walls. The base wall and the side walls defining a trough configured for receiving a fluid. An aperture extends through the base wall of the drain tray wherein the aperture drains the fluid from the trough. An attachment strap is coupled to and extends from the drain tray for securing the drain tray to an air conditioner such that the drain tray is positioned under the air conditioner. A sprayer assembly includes a sprayer for delivering fluid into a housing of the air conditioner.

Abstract: Rapidly deployable and reconfigurable fluid pumping systems may include a central controller communicatively coupled with one or more local pumping stations connected with a fluid pipeline. The local pumping stations may include at least one pump, and a local controller in communication with the central controller configured to monitor each device of the local pumping station. The local controllers may also provide individual control of each device within the local pumping station.

Abstract: Nozzle arms for holding discharge heads are caused by a pivotal driving part to move between a processing position above a substrate and a standby position outside a processing cup surrounding a substrate. When the nozzle arms having cleaned a substrate is placed at the standby position, a cleaning solution is ejected from a shower nozzle toward the nozzle arms arranged obliquely downward of the shower nozzle. The three nozzle arms are caused to move up and down such that the nozzle arms cut across a jet of a cleaning solution discharged obliquely downward, thereby cleaning the three nozzle arms in order. Then, a nitrogen gas is ejected from a drying gas nozzle and sprayed on the nozzle arms to remove the cleaning solution attached to the nozzle arms, thereby drying the nozzle arms.

Abstract: A dishwasher with a tub at least partially defining a treating chamber, a liquid spraying system, a liquid recirculation system defining a recirculation flow path, and a liquid filtering system. The liquid filtering system includes a filter disposed in the recirculation flow path to filter the liquid.

Abstract: A wash fluid and debris containment system includes a wash pad, a collecting trough, and a conveyor. The wash pad includes a support base and a top surface that rests on the support base. The top surface is configured to direct flow of wash fluid and debris to an edge of the top surface. The collecting trough extends along the edge to receive the wash fluid and debris from the top surface. The conveyor is positioned in at least a portion of the collecting trough and operable to remove the debris from an opposite end of the collecting trough from where the wash fluid is removed.

Abstract: An apparatus for the cleaning of a turbine engine comprises a towable wash cart having a reservoir for cleaning fluid. The reservoir is connected through a pump system to a wash ring operatively mounted to the cart. The wash ring has a plurality of spray nozzles about its periphery arid positionably adjustable for directing an atomized spray of the cleaning fluid into an inlet of the engine. The cart and wash ring is aligned with the engine such that there is no physical contact between the wash ring and engine during the entirety of the cleaning process. While a preferred cleaning fluid is pure water, the reservoir may be segmented to carry a number of different cleaning solutions, which can be mixed in a manifold of the pump system as may be desired for a particular cleaning process. The reservoirs may be heated and insulated to maintain the cleaning solutions at an elevated temperature.

Abstract: A system and method for cleaning and cooling solar panels are described. A solar tracker includes a main beam for supporting the solar panels, and nozzles coupled to the main beam. The main beam includes a water channel along its interior which supplies water to the nozzles. The nozzles are positioned to spray water on the collecting surfaces of the solar panels to clean and cool them. The solar tracker may also include gutters to reclaim used water. The solar tracker may include air ducts which direct air across the undersides of the solar panels to cool them.

Abstract: The present invention discloses a system and method for removing soot and residue deposits from inside a diesel engine. The system provides a portable way of storing and heating a cleaning solution and passing the heated cleaning solution through an adaptor to an air intake of an operating diesel engine. The heated cleaning solution is withdrawn from the cleaning system by the vacuum pressure of the operating diesel engine and by air pressure applied to a storage tank containing the cleaning solution.

Abstract: An apparatus and method for removing waste from a soiled container that houses laboratory animals and has an opening is disclosed. The apparatus includes a conveyor having a receiving end for receiving containers from a stack of containers. The stack is disposed such that the openings are upwardly oriented. The apparatus also includes a manipulator that aligns with and engages an uppermost container of the stack and causes the uppermost container to be separated from the stack and to be flipped over onto the receiving end of the conveyor such that the opening is downwardly disposed. Waste discarded from the container falls through openings in the conveyor, and a waste receptacle disposed below the conveyor collects the discarded waste. The conveyor advances to transport the container away from the receiving end toward a discharge end of the conveyor.

Abstract: An automatic wax removing device includes a base, a heating plate, a cooling plate, a first actuator, a second actuator, and an operation plate. The base includes a base plate and a framework. The heating plate is arranged on the base plate. The cooling plate is arranged on the base plate and separated from the heating plate. The first actuator includes a sliding rail and a elongated sliding member on the sliding rail. The sliding rail is fixed on the frame and parallel with the heating plate. The second actuator includes a main body and a rotation shaft arranged on the main body. The main body is slideable along the length of the sliding member. One end of the rotation shaft is connected to the main body. The operation plate is fixed to the other end of the rotation shaft.

Abstract: Cleaning apparatus for kitchen equipment, in particular combination streaming, baking and cooking equipment has a cooking space that is to be cleaned which is delimited by at least one wall and includes at least one outlet opening for a liquid. The apparatus comprises a ventilation fan associated with the cooking space having a drive motor; a collecting tank which at least temporarily collects the liquid that exits the cooking space via the outlet opening; a supply line that can be used to supply fresh water and/or a cleaning fluid that can be controlled through a valve in the line; a circulating pump provided at the collecting tank for the liquid sitting in the collecting tank; a circulation line by which the liquid sitting in the collecting tank and conveyed by the circulating pump can be supplied to the cooking space and a drain line for discharging the liquid that exits the cooking space.

Abstract: A device for cleaning channels including a rod-shaped carrier element, at least one cleaning element that is connected with the carrier element, and at least one additional cleaning element that can be detached from the carrier element. A method for cleaning instrument channels wherein the cleaning device is moved in the axial direction in the instrument channel as far as an end point; after reaching the end point the cleaning device is moved back in the opposite axial direction in the instrument channel. Owing to the reverse motion of the cleaning device, the detachable cleaning element is released from the carrier element and thereafter is no longer part of the cleaning process of the previously cleaned instrument channel and can no longer soil the channel. The device and method removes from the instrument channel the substances that are to be removed and produces an efficient and good cleaning result.

Abstract: A cleaning station that includes a container designed to hold a solvent and having a floor and two pairs of side walls connected to form an enclosure, with a first shelf disposed at a location elevated in relation to the container floor and a second shelf disposed above the first shelf, the second shelf being slidable and being removably provided, there being brushes located in an opening in the first shelf that may be used for cleaning tools and a plurality of additional openings in the first shelf to allow the passage of solvent.

Abstract: A wash system includes a wash unit associated with a mobile unit for providing wash fluid, one or more nozzles for streamline injecting wash fluid provided by the wash unit directly into an engine inlet, and an articulating arm for use in positioning the one or more nozzles. The wash unit is physically spaced from a surface of the engine inlet cowling during a washing process. The articulating arm is operable via one of a hydraulic, pneumatic, electrical, or mechanically hand-driven operating means.

Abstract: A vehicle for cleaning collector mirrors in solar thermal energy installations, includes an operating cab (2), a body (3) for housing and holding the different items, a rolling system for moving the vehicle, a clean water tank, an assembly for discharging the clean water, at least one structure for spraying clean water (100)) onto the surfaces of the mirrors (22) and a tray (46) for collecting the water used in cleaning the mirrors; a set of lifting columns (5, 6); and supports (53, 63) for the cleaning and/or drying assemblies able to slide along the lifting columns, and in which the cleaning assembly includes a structure fitted with a rigid bar (91), which assumes the profile of the mirror to be cleaned, the bar being provided with an external rotation assembly for a brush.

Abstract: A cleaning apparatus including a holding table for holding a plate-shaped workpiece, a cleaning nozzle for spraying a cleaning fluid to the plate-shaped workpiece, and a table cover for covering a circumference of the holding table. The table cover includes a top plate for covering an upper side of the holding table and a side plate for covering the circumference of the holding table. The table cover is provided with a netlike mesh sheet spaced from a lower surface of the top plate and another netlike mesh sheet spaced from an inner surface of the side plate.

Abstract: Systems and methods for recovering particulate matter washed from piece of construction equipment with water. Waste materials washed from the construction equipment are collected in a bin. The liquid in the bin is allowed to drain into a receptacle having a sloped bottom for conveying the liquid to a sump. The liquid in the sump is pumped to a first baffle box extending into a first settlement tank to remove a portion of the particulate matter in the liquid. The liquid cascades from the first settlement tank to a second baffle box extending into a second settlement tank to remove another portion of the particulate matter. The liquid is stored after removal of the portions of the particulate matter for recycling in a tank.

Abstract: A wafer scrubber is disclosed, including a chamber, and a holder connecting to a spindle disposed in the chamber, wherein the holder supports a wafer, and the wafer spins to remove water on the wafer, and a meshed inner cup comprising a plurality of through holes disposed between the holder and a wall of the chamber, wherein the meshed inner cup receives water from a surface of the wafer and rotates around the spindle to release the water through the through holes.

Abstract: A substrate processing apparatus has a cup part for receiving processing liquid such as pure water which is splashed from a substrate. The cup part is formed of electrical insulation material or semiconductor material. Hydrophilic treatment may be performed on an outer annular surface of the cup part and water may be held on the outer annular surface of the cup part while processing the substrate. With the disclosed apparatus, charged potential of the cup part generated by splashing of pure water can be suppressed, without greatly increasing the manufacturing cost of the substrate processing apparatus. As a result, it is possible to prevent electric discharge from occurring on the substrate due to induction charging of the substrate, in application of the processing liquid onto the substrate.

Abstract: A liquid processing apparatus includes a substrate retaining part that retains a substrate in a horizontal position and rotates the substrate, first and second processing liquid supply nozzles disposed to supply first and second processing liquids, respectively, to the substrate, liquid receiving cups disposed to appropriately position an upper end thereof above the substrate and to receive the first or second processing liquid that has been supplied to the substrate, a first tubular outer cup including an upper opening and disposed around the liquid receiving cup, vertically movable between a lifted position to which the first tubular outer cup is lifted so that its upper end is positioned above the liquid receiving cup, and a lowered position lower than the lifted position, and a second tubular outer cup disposed externally to the first tubular outer cup. The tubular outer cup is selected according to the kind of processing liquid.

Abstract: A device for processing wafer-shaped articles, comprises a chuck adapted to receive a wafer shaped article, and a collector surrounding the chuck. The collector comprises a base and a plurality of divider walls, as well as a plurality of nested partitions surrounding the chuck. Each of the plurality of nested partitions is positioned on a corresponding one of the plurality of divider walls, and each of the plurality of nested partitions is vertically movable so as to define a plurality of separate process regions within the collector depending on the vertical position of each of the plurality of nested partitions. At least one of the divider walls comprises an internal exhaust conduit communicating with an exhaust duct underlying the divider wall.

Abstract: A cleaning apparatus for a power driven buffing pad includes a wash plate mounted in a cleaning solution reservoir that provides agitating and cleaning contact with the pad mounted on an operating driver. The wash plate can be reciprocated vertically by the operator against a biasing arrangement to operate a pump to deliver cleaning solution from the reservoir to the face of the pad in contact with the wash plate.

Abstract: A jewelry cleaning device may include the following components: a basin having a base portion and for holding a cleaning solution, a support post extending upwards from the base portion inside the basin and shaped to securely hold a piece of jewelry in place, and a sleeve sized to fit within the basin and having a plurality of bristles disposed therein with a handle portion on the top end thereof. A plastic dome may likewise be provided on a top end of the sleeve. All components may be modular and may be readily fitted together to form a unitary jewelry cleaning device. By rotating the sleeve using the handle portion while a piece of jewelry is supported within the cleaning solution of the basin on the support post, a user may cause the bristles to clean a piece of jewelry.

Abstract: A substrate processing apparatus comprising a substrate holding rotating mechanism, a process liquid supply mechanism having a nozzle for dispensing a process liquid toward a principal face of the substrate, a processing liquid reservoir for holding sufficient process liquid to form a liquid film covering the whole principal face of the substrate, a liquid film forming unit for forming the liquid film by supplying the process liquid onto the principal face of the substrate in a single burst, and a control unit for controlling the liquid film forming unit and the process liquid supply mechanism such that the process liquid is dispensed from the process liquid nozzle toward the principal face of the substrate after formation of the liquid film covering the whole area of the principal face of the substrate by the liquid film forming unit.