Abstract: Apparatus for cleaning a photo mask includes a rotor in a head, with the rotor having a seal plate having a central opening, a resilient mask seal in the central opening, and retractors attached to the resilient mask seal and adapted to move the resilient mask seal into open and closed positions. A motor in the head rotates the rotor. A push plate in the head moves to operate the retractors. In the closed position the resilient mask seal seals against the sides of the photo mask. The back side of the photo mask can then be cleaned without affecting the patterned front side of the photo mask.

Abstract: A dishwasher includes a treatment chamber configured to clean dishes; a rack in the treatment chamber configured to hold dishes, the rack including an upper horizontal bar, a lower horizontal bar and a vertical bar; and a stop removably attached to the rack. The stop includes a first latch that is latched to the upper horizontal bar, a second latch that is latched to the lower horizontal bar, a third latch that is latched to the vertical bar, and a stopper portion that extends below a lowest wire in the rack and is configured to abut a portion of the dishwasher to limit travel of the rack out of the dishwasher.

Abstract: An automatic rinsing machine includes a rinsing container with a lifting door and a rinsing chamber with a rinsing chamber opening closed in a fluid-tight manner by the lifting door. A drive device displaces the lifting door. The drive device includes a load-bearing tension unit. A lever arrangement is disposed between the load-bearing tension unit and the lifting door. The lever arrangement includes a clamping device that is guided in parallel with a direction of movement of the lifting door. The lifting door and the clamping device are supported under spring preload with respect to a common abutment.

Abstract: A dishwasher includes a washing compartment, at least one dishware container, and a guide assembly to allow the dishware container to be moved out of the washing compartment and into the washing compartment. The movement of the dishware container in relation to the washing compartment is cushioned by at least one damping device which is arranged inside the washing compartment.

Abstract: A system for cleaning a substrate includes a carrier and a cleaning station. The carrier is capable of holding the substrate and is movably coupled to a pair of guide tracks extending a length of the system. The cleaning station includes a force applicator, a gate and a dispenser. The force applicator has an applicator length and is coupled to the cleaning station, is rotatable and is adjustable to a first height off the surface of the carrier during cleaning. The gate is a hollow structure disposed at a trailing edge of the force applicator. The gate is set to a height off the carrier surface that is less than or equal to the first height. The gate includes a gate length that at least spans the applicator length. The dispenser is disposed at a leading edge of the force applicator and is configured to supply cleaning solution during cleaning.

Abstract: A system for cleaning a substrate includes a carrier and a cleaning station. The carrier is capable of holding the substrate and is movably coupled to a pair of guide tracks extending a length of the system. The cleaning station includes a force applicator and a gate. The force applicator has an applicator length and is operatively coupled to the cleaning station. The force applicator is rotatable and is adjusted to a first height off the surface of the carrier as the substrate is being cleaned. The force applicator has a hollow structure with internal channels and openings dispersed throughout the applicator length to dispense cleaning solution to substrate surface. The gate is affixed to a trailing edge of the force applicator and is set to a second height off the surface of the carrier. The gate includes a gate length that at least spans the applicator length.

Abstract: A system for cleaning a substrate includes a carrier and a cleaning station. The carrier is capable of holding the substrate and is movably coupled to a pair of guide tracks extending a length of the system. The cleaning station includes a force applicator and a gate. The force applicator has an applicator length and is operatively coupled to the cleaning station. The force applicator is rotatable and is adjusted to a first height off the surface of the carrier as the substrate is being cleaned. The force applicator has a hollow structure with internal channels and openings dispersed throughout the applicator length to dispense cleaning solution to substrate surface. The gate is affixed to a trailing edge of the force applicator and is set to a second height off the surface of the carrier. The gate includes a gate length that at least spans the applicator length.

Abstract: A vehicle wash system having a plurality of vehicle treatment components with one of the plurality of vehicle treatment components including at least one support member. The at least one support member has an exterior surface. A shrinkable sleeve is sized to fit over the exterior surface of the at least one support member. The shrinkable sleeve is slid onto the at least one support member and located in a predetermined position around the exterior surface. Upon application of heat to the shrinkable sleeve, it shrinks and conforms to the shape of the exterior surface of the at least one support member such that it is fixedly attached to the exterior surface of the at least one support member in the predetermined position. The result is a protective covering for the support member that is durable and readily cleanable such that fluid and debris can be easily wiped off of the covering and corrosion of the support member is minimized.

Abstract: An apparatus is disclosed for handling an artificial turf arranged on a base. In at least one embodiment, the apparatus includes a removing station for lifting from the base a strip of the artificial turf extending in a longitudinal direction, a separating station for separating filling material from the strip and a winding station for winding the strip onto a shaft. A method is disclosed for handling an artificial turf arranged on a base. In at least one embodiment, the method includes lifting a strip of the artificial turf extending in a longitudinal direction from the base, separating infill material from the strip and winding the strip onto a shaft.

Abstract: A washer, comprising a washing chamber defined by a pair of side walls, a top wall and a bottom wall, the washing chamber having an opened front face and an opened back face. A first shelf assembly is mounted within the washing chamber having at least one shelf section for receiving and supporting articles to be cleaned during a washing operation. A second shelf assembly is mounted within the washing chamber vertically above the first shelf. The second shelf assembly is mounted to the side walls having at least two shelf sections, at least one of the at least two shelf sections being selectively removable from the washing chamber so that additional space may be provided for larger articles on one side of the first shelf, and so that articles may be inserted into or removed from the washing chamber through the front face or back face of the washing chamber.

Abstract: Provided are a single substrate cleaning apparatus, and a method for cleaning the backside of a substrate, where a substrate reversing device for cleaning the backside of a substrate is installed inside a processing chamber.

Abstract: A device for clearing obstructions from a medical tube, such as a chest tube, is disclosed in various embodiments. The device features a shuttle member that is magnetically coupled to a guide wire within a guide tube, through the guide-tube wall, so that translation of the shuttle member induces a corresponding translation of the guide wire within the guide tube, without penetrating or compromising the guide-tube wall. In this manner, when the guide tube is coupled to a medical tube where obstructions have formed, the guide wire and clearance member may be inserted into and withdrawn from the medical tube, via actuation of the shuttle member, to engage and help clear such obstructions from the medical tube without compromising the sterile field. Methods of clearing a medical tube of obstructions are also disclosed.

Abstract: A dishwasher having opposed horizontal slider assemblies employs latches pivotally mounted relative to slide members of the slider assemblies with a handle and a catch. Guides displaced to either side of the latches are affixed to the slide members and include vertical channels for receiving vertical elements included on an elevated wash basket. The vertical elements have upper and lower stops which extend across the slide members, upper and lower glides approaching the opposed walls of the wash cavity at the outer end of the stops and anchors extending inwardly from the glide members and affixed to the wash basket. Latch bolts are also fixed to the sides of the wash basket for engagement by the catches. The wash basket is thereby positionable at more than one vertical location elevated within the wash cavity.

Abstract: The present invention relates to a rack guiding device and a dish washer having the same. According to the present invention, a drawing length of a rack is increased substantially by a moving rail which is drawn out of a washing chamber as it slides along a guide rail, and a frictional force between the guide rail and the moving rail is reduced by a bearing member while the moving rail slides along the guide rail.

Abstract: A photomask cleaner includes a clamp assembly using clamping plates with an elastic buffer device for clamping a photomask to be cleaned positively, a displacement mechanism for moving the clamp assembly among workstations subject to a predetermined track, a cleaning unit installed in one workstation for cleaning the photomask carried by the clamp assembly, and an air dryer installed in one workstation for drying the well-cleaned photomask carried.

Abstract: A system for treating, in liquids, a mass-production parts contained in transport baskets, comprising at least one tank which contains liquid for submerging the transport baskets, at least one transport vehicle for the transport baskets by which the transport baskets can be moved over the at least one tank, at least one basket carrier which is arranged at the transport vehicle in such a way that its height is adjustable, which is able to grip a transport basket, submerge same in the tank, rotatingly drive same around an axis and lift same out of the tank, as well as a clamp for securing the basket carrier relative to the at least one tank.

Abstract: Broadly speaking, a wafer processing chamber for performing a high pressure wafer process is provided. More specifically, the wafer processing chamber incorporates a wafer processing volume and an outer chamber volume. The wafer processing volume is configured to contain a high pressure. The outer chamber volume is configured to serve as a buffer between the high pressure of the wafer processing volume and a lower pressure of an environment outside the wafer processing chamber. Thus, the outer chamber volume can control a pressure differential between the high pressure wafer processing volume and the lower pressure outside environment. In this manner, the wafer processing chamber, incorporating the high pressure wafer processing volume, can interface with a conventional wafer transfer module operating under either atmospheric or sub-atmospheric pressure conditions.

Abstract: A warewash machine includes a multi-position splash guard enabling multiple machine configurations in which undesired overspray is reduced or eliminated. A drip flange may also be provided to increase the amount of water that impinges upon wares.

Abstract: The present invention relates to a loading system in a washing installation comprising a plurality of dishwashers arranged essentially in parallel. The loading system comprises a dish holder to be loaded with goods to be washed, and a traveller which is adapted to convey the dish holder to a selected dishwasher, into which loading is to take place, the traveller being displaceably arranged along the dishwashers arranged in parallel. The invention also relates to a washing installation and a method therefor. The installation comprises a plurality of essentially parallel dishwashers of a straight-way type, which are essentially built into a separating wall portion to form an inlet side and an outlet side. The installation has two mutually independent loading systems for loading of goods to be washed on the inlet side and unloading of washed goods on the outlet side.

Abstract: A motor drive with devices for translating the rotary movement of an output shaft (44) into a reciprocating linear movement, preferably for driving a reciprocating transporting device (4; 5, 6). The latter comprises catches (9; 9.1, 9.2), which engage in one direction and not in the other direction, in order to transport a receptacle (16) for items for washing. The transporting device comprises an articulated transporting frame (4), of which the transporting rails (5, 6) can be moved in opposite directions to one another.

Abstract: A microelectronic substrate handling device comprising first and second support structures spaced from each other, the first support structure having a series of upper teeth defining a series of upper notches extending along a length of the first support structure and a series of lower teeth defining a series of lower notches extending along a length of the first support structure, each of the upper and lower notches opening toward the second support structure, wherein the upper and lower notches are offset from each other by a predetermined offset distance so that an edge of a microelectronic device will fit differently within the upper and lower notches of the first support structure when supported between the first and second support structures.

Abstract: A collar cleaning system for dress shirts comprising a slide plate, a guiding plate, a pressured soap-water spraying subsystem and a rotating brush is presented. The shirt collar is loaded onto the sliding plate and moved under the rotating brush while being sprayed with soap water to remove the dirt ring around the collar.

Abstract: A household dishwashing machine of the type having a wash chamber in the form of a drawer, with the drawing being moveable between a lowered to a raised position for facile loading and unloading of the dishes.

Abstract: A dishwasher which move a rack up and down by a simple structure. The rack is rotatably mounted to a frame by a plurality of rotary members and upper and lower hinge shafts. The frame is provided in a cavity to be moved forward and backward. A plurality of extension pieces upwardly extend from both sides of the frame. A stopper is provided on each of the extension pieces. Each of the rotary members is stopped by the stopper so that the rotary member is not forwardly rotated beyond a predetermined distance. A damper is mounted to an outer surface of each lower hinge shaft so that the rack is slowly moved toward the frame during a downward movement of the rack. A handle is provided at an upper portion of the rack so that both ends of the handle are rotatably mounted to both sides of the rack, thus allowing the rack to be easily moved upward.

Abstract: A vehicle washing apparatus and method utilizes an arch shaped support structure spanning the width of a washing area in which the vehicle is positioned. The arch shaped support structure comprises a rigid frame assembly with a pair of vertical support columns that move on a track along the sides of the vehicle. Attached to the support structure is a spray bar assembly and drive system. The spray bar assembly of preferred embodiments of the present invention has a first end and second end and is attached to the arch support structure at said ends by way of a first connecting member and a second connecting member respectively which are preferably configured as roller assemblies which engage guide. Also attached to the ends of the spray bar assembly are cables, lines, chains or the like connecting to a pair of counterweights that counter the weight of the spray bar assembly and facilitate easy movement of same within the support structure.

Abstract: A single piece tub support and frame for a dishwasher has a unitary support member that includes a pair of laterally spaced U-shaped upright end portions and an intermediate inverted U-shaped upright portion. The intermediate portion fits over the top and sides of the dishwasher tub rearwardly adjacent the front flange portion thereof. When the U-shaped end portions clear the bottom wall of the tub, they resiliently spring inward into supporting positions under the bottom wall. The unitary support member greatly reduces the number of components required, reduces manufacturing time and cost, and maintains the tub in its designed shape.

Abstract: A dishwashing machine comprises a stationary housing with an open front face and at least two structures for supporting wash load items. The support structures are able to slide horizontally with respect to the housing through the open front face of the housing. At least one of the support structures is capable of sliding horizontally jointly with a door, which closes the open front face of the housing, and is adapted to move in a substantially vertical direction along an inner surface of the door. The inner surface of the door is able to accommodate the front bulk of at least another one of the remaining support structures.

Abstract: A system for treating, in liquids, a mass-production parts contained in transport baskets, comprising at least one tank which contains liquid for submerging the transport baskets, at least one transport vehicle for the transport baskets, by means of which transport vehicle the transport baskets can be moved over the at least one tank, at least one basket carrier which is arranged at the transport vehicle in such a way that its height is adjustable, which is able to grip a transport basket, submerge same in the tank, rotatingly drive same around an axis and lift same out of the tank, as well as a clamp for securing the basket carrier relative to the at least one tank.

Abstract: An automotive vehicle washing system includes a frame comprising a bridge member end opposed and support sections mounted for linear reciprocating movement on spaced apart support rails. Pivoting washing nozzle support arms are mounted on the bridge section and are interconnected by a drive motor and drive pulleys to move in opposite directions to wash the sides and opposite ends of a vehicle. Each arm includes movable arm sections supporting spaced apart nozzle assemblies which may move toward each other or away from each other to size a vehicle according to its width. Each arm includes opposed elongated beam members which also provide fluid conducting passages for conducting washing fluids to the nozzle assemblies. Certain ones of the nozzle assemblies are drivenly connected to an oscillating servomotor. The servomotor is also used to position the pivoting arm sections through a lost motion coupling and a gear drive unit.

Abstract: A microelectronic substrate handling device comprising first and second support structures spaced from each other, the first support structure having a series of upper teeth defining a series of upper notches extending along a length of the first support structure and a series of lower teeth defining a series of lower notches extending along a length of the first support structure, each of the upper and lower notches opening toward the second support structure, wherein the upper and lower notches are offset from each other by a predetermined offset distance so that an edge of a microelectronic device will fit differently within the upper and lower notches of the first support structure when supported between the first and second support structures.

Abstract: A washing device (10) includes a chamber (12) with a front door (24). The door is pivotable between a vertical closed position and a horizontal open position. An article carrying assembly (34) is moveable from inside the washing device to an upper surface (26) of the open door. A lifting system (72) moves the front door between lower and upper positions (74, 76). The lifting system includes a follower (154) to which the front door is pivotally mounted. A motor (80) transmits power to a pair of chains (110, 116), which drive the follower along a guide (156) to move the door up and down. Alternatively, the lifting system includes a cable (182) coupled to a fluid cylinder (180). When the door is in the upper position, an operator can move the rack to a transfer cart or load and unload the article carrying assembly, all while in a substantially erect position.

Abstract: In a method and apparatus for cleaning filters, the cleaning is efficiently performed by selecting cleaning steps according to the degree of contamination of the filter media. The degree of contamination of the filter media is analyzed before the filter is carried into the cleaning apparatus. Filters with heavily contaminated filter media are subjected to pretreatment before the cleaning process is performed, and the filters with less contaminated filter media are directly subjected to the cleaning process. The cleaned filter is subjected to a restoration process before reuse.

Abstract: A monorail conveyor system used to transport dishes to and from a dishwashing unit including a monorail mountable to a ceiling or a support frame, the monorail being of substantial length such as to form a loop traversing the entire dishwashing system. The monorail is hollow and mounted therein is a continuous chain supported by a plurality of wheels. A number of dish rack holders are each suspended from the chain by vertically extending bars which are pivotably attached to the chain conveyor so that the holder can tilt at a loading or unloading station. Guide wheels and an elongate horizontal track are provided to either support the holders in a horizontal position or permit them to tilt at the aforementioned stations. The guide wheels are preferably mounted at the bottom of the bars below the holders. The track is fixedly mounted and provides a horizontal force to each guide wheel.

Abstract: Disclosed is a warewashing assembly comprising a batch-loading warewashing machine and a movable tray or cart capable of holding a rack in a position that departs form the horizontal outside of the warewashing machine for convenient operations; said tray or cart comprising a flat tray of a size complementary to said rack, wherein the flat tray comprises side and rear fences capable of holding the ware rack against horizontal motion and wherein the tray is attached to a support structure in such a way that it is supported at the desired angle .alpha. and can be inserted into the machine when quiescent; wherein the support structure is of a height approximately equal to that of the warewashing machine and comprises means to move horizontally in relation to the warewashing machine.

Abstract: A method of cleaning a reusable container includes the steps of (1) pre-rinsing the container with a pre-rinse fluid; (2) chemically cleaning the container; (3) post-rinsing the container with a post-rinse fluid; (4) introducing a contaminate indicator into the container prior to the step of post-rinsing; and (5) testing the post-rinse fluid for the presence of the contaminate indicator during at least a portion of the post-rinsing step. A number of alternative embodiments employ various contaminate indicators which may be introduced into the container at various points during the cleaning process.

Abstract: A program controlled dishwasher in which magnetic sensors provided adjacent to the dishwasher door respond to magnetic fields of predetermined polarization provided by permanent magnets in a catenulate magnetic key mounted on a dishwasher caddy in a position adjacent the magnetic sensors when the caddy is in the tub of the dishwasher, for generating a verifiable code pattern readable against dishwasher stored programs for the selection and actuation of a program specific to the articles which are stored in the caddy for washing. The polarization patterns on the caddies are specific to the kind of articles stored therein and may be readily altered to accommodate different articles.

Abstract: Method by an oscillator screen cleaning apparatus includes an enclosed housing which forms a cleaning chamber having a plurality of spray nozzles positioned therein to spray a printing screen with cleaning solvent. An oscillating mechanism is mounted within the cleaning chamber to move the screen in an oscillating motion in front of the spray nozzles to provide an efficient and effective cleaning of the printing screen. The spray nozzles are arranged in two opposing grid patterns and the screen is oscillated between the grid patterns to provide complete coverage of the screen with spray cleaning solvent. The sprayed solvent is collected, filtered and resprayed onto the screen, and the high spray rate of the apparatus ensures effective cleaning with the re-used solvent. The entire spray system is enclosed within a housing which is coupled to a vapor recovery system so that solvent and solvent vapors do not escape into the environment.

Abstract: A space-saving dishwasher has a washing basin having side and bottom walls and an open top, and a vertically shiftable rack assembly for carrying dishes. A shifting mechanism is coupled with the rack assembly for selectively shifting the latter between a lower cleaning position, wherein the rack assembly is disposed within the basin below the open top, and an upper loading position, wherein the rack assembly is disposed above the open top of the basin. The dishwasher further includes a lid member for covering the open top of the basin when the rack assembly is in the cleaning position. Structure is also provided for cleaning the dishes carried in the rack assembly, when the assembly is in the cleaning position. The dishwasher is particularly designed for installment within an opening of a substantially horizontally extending table-top or kitchen counter top.

Abstract: An oscillator screen cleaning apparatus includes an enclosed housing which forms a cleaning chamber having a plurality of spray nozzles to spray a printing screen. An oscillating mechanism moves the screen in an oscillating motion in front of the spray nozzles for efficient and effective cleaning. Fixed guide brackets extend into the cleaning chamber from the spray nozzles to guide a screen and maintain the screen perpendicular to the spray patterns from the nozzles. The guide brackets will readily guide screens of different widths and heights without requiring constant adaptation. A reservoir is integrated with the enclosed cleaning chamber and a sloped wall captures spray from the cleaning chamber and directs it to the reservoir for recycling. A vertically oriented pump in the reservoir directs cleaning liquid to the spray nozzles and any failure of the pump is contained in the reservoir to prevent leakage.

Abstract: An ultrasonic immersion cleaning tank is constructed to serve as a pass-through between a processing environment and a clean room. The tank is sited as the entryway into a bounded clean room. Particle barriers and positive pressure are utilized to reduce entry of contaminants into the clean room. The components after cleaning are withdrawn from the tank directly into the clean room environment thereby greatly reducing surface contamination thereof.

Abstract: An apparatus and method for storing and sterilizing objects is provided. The apparatus includes a housing, and a tray supported within the housing for storing the objects to be sterilized. A sterilizing solution is located within the housing and below the tray. An elevator assembly lowers the tray downwardly to immerse the objects in the sterilizing solution, and lifts the tray upwardly to remove the objects from the sterilizing solution for further storage until use.

Abstract: An oscillator screen cleaning apparatus includes an enclosed housing which forms a cleaning chamber having a plurality of spray nozzles positioned therein to spray a printing screen with cleaning solvent. An oscillating mechanism is mounted within the cleaning chamber to move the screen in an oscillating motion in front of the spray nozzles to provide an efficient and effective cleaning of the printing screen. The spray nozzles are arranged in two opposing grid patterns and the screen is oscillated between the grid patterns to provide complete coverage of the screen with spray cleaning solvent. The sprayed solvent is collected, filtered and resprayed onto the screen, and the high spray rate of the apparatus ensures effective cleaning with the re-used solvent. The entire spray system is enclosed within a housing which is coupled to a vapor recovery system so that solvent and solvent vapors do not escape into the environment.

Abstract: A pallet cleaner especially suitable for use in cleaning plastic pallets. The cleaner includes a vertically oriented horizontally extending chamber having a vertically oriented entry opening at one end of the chamber and a vertically oriented exit opening at the other end of the chamber. The pallets are loaded on edge into the chamber through the vertically oriented entry opening, moved through the chamber on edge while a heated pressurized fluid is directed against the upper and lower sides of the pallet, and thereafter are moved on edge out of the chamber through the exit opening. The cleaner further includes wheels so that the cleaner is portable and may be rolled to the site of pallets to be cleaned rather than requiring the pallets to be cleaned to be brought to the site of the cleaner.

Abstract: The present invention is an apparatus and method for immersing at least one contaminated part in a fluid, wherein the contaminated parts are moved through the fluid with both a rotational and reciprocal movement. The compound movement of the contaminated parts cause the parts to be repeatedly lifted from, and immersed within, the fluid, thereby improving the interaction of the fluid on all surfaces of the contaminated parts regardless to the shape or orientation of the contaminated parts.

Abstract: In a dishwashing system, a dishwashing machine (10) is provided to wash a rack holding thereon tableware in a washing chamber, a wagon (W) is provided to have therein plural stages of horizontal storage shelves in an up-and-down direction, and an elevator (E) is disposed between the wagon and the dishwashing machine. On the elevator (E), a drive control device is provided to move a ramp (56) of the elevator by a driving mechanism (60) toward a position facing to one of shelves of the wagon after the rack has been placed at a reference position of the ramp (56) by way of timing belts (57i) (57l), to drive the timing belts by a timing belt mechanism (57) so as to store the rack onto the shelf, to stop the timing belt mechanism upon completing storage of the rack and to drive the driving mechanism till the ramp reaches the reference position. These operations are repeated by the drive control device.

Abstract: A parts washer for cleaning individual parts is disclosed having a compartmentalized washing enclosure housing individual washing and drying chamber which are separated by slideable partitions which open to admit parts, close to isolate parts during a particular washing operation, and open to release parts to a subsequent chamber. The partitions are operated in a predetermined sequence by pivoting arms which are acted on by positive motion cams mounted on a motor driven camshaft. The wash chambers have nozzles connected to a cleaning medium supply for directing cleaner such as hot water or steam onto the part to be cleaned in a predetermined pattern for optimized cleaning and, similarly, the drying chambers utilize nozzles connected to a source of dried, compressed air to dry the heated parts. A feed track moves the parts to be cleaned from the parts source, such as a manufacturing machine, to and through the parts washer.

Abstract: The present invention relates to a solution parts washer cleaning apparatus with increased vertical pneumatic cleaning agitation and that has a load capacity of up to two tons inclusive, a vertically reciprocating, non-tilting platform having continuous and three-way positive support and adapted to operatively engage an associated beam, an improved bearing arrangement that is mounted fixedly to a frame and designed for enhanced durability in part by remaining above the cleaning solution during operation of the apparatus. The cleaning apparatus has replaceable strips that secured to the corners of the beam. The cleaning apparatus has an automatic shutoff in the event of an emergency in the form of a fusible link.

Abstract: A method for washing and vacuum drying long necked laboratory flasks. The apparatus includes a cabinet which presents a washing and drying compartment and a pump and rotary spray arm. A special rack which can be rolled into and out of the compartment includes a central manifold and a plurality of distribution arms extending radially from the manifold. Upright spindle tubes extend from the distribution arms to receive the inverted flasks such at that the tubes extend through the narrow necks of the flasks with the open ends of the tubes located within the bodies of the flasks. A diaphragm coupling allows water to be pumped to the manifold for delivery to the spindle tubes during washing and rinsing cycles. The tubes spray the water directly inside of the flask bodies for thorough washing and rinsing. A vacuum conduit extending from the manifold carries a seat which engages a gasket to couple the manifold with a vacuum blower when the rack is moved into the cabinet.

Abstract: A process for drying semiconductor wafers or similar substrates maintains the substrates in a static position to avoid the generation of undesired particulate. The substrates are maintained within the apparatus at an angle of approximately 30.degree. from the vertical to facilitate complete drainage of the processing fluid. According to this invention, the substrates are positioned in the chamber of the apparatus at the appropriate angle, the chamber is closed in a fluid tight seal and filled with the processing fluid, until the fluid overflows through a vacuum valve. While maintaining the chamber completely filled, vacuum aspiration is continued to degas the chamber. While continuing vacuum aspiration of the chamber, a vacuum assisted drain valve is opened, and clean dry inert gas is introduced above the draining fluid. The draining step assures that any droplets remain with the draining fluid so that the substrates emerge dry as the fluid drains away.

Abstract: This invention is directed to a washing system designed primarily for washing automotive parts, and in addition to a washer having a cabinet, a working chamber within the cabinet, and a support table within the cabinet, an improved conveying system is provided to transport parts to be cleaned from a location such as an automotive work station, to the interior of the washing chamber and to transport cleaned parts back to the work station or to storage.The conveying system comprises a mobile carrier having an article supporting tray carried on the upper surface of the carrier and which can be easily pushed into the working chamber of the washer and removed therefrom back onto the mobile carrier. Parallel track or guide means are provided in the top of the mobile carrier and on top of a turntable within the washing chamber to facilitate moving the article supporting tray, which is preferably provided with wheels which are suitable to ride on the parallel tracks or guide means provided.