Abstract: A method and apparatus for cleaning the interior of capillary tubes used to dispense 1 to 100 micron diameter liquid droplets by a piezoelectric transducer surrounding each capillary tube. Magnetic particles are aspirated into the capillary tubes and moved by an exterior magnet to cause deposits on the interior walls to be dislodged and subsequently discharged from the capillary tube. In a preferred embodiment, the magnetic particles are coated with a material capable of binding such deposits, e.g., DNA, RNA, and the like.

Abstract: A system for storing pigs and launching them into a pipeline comprises a pig storage barrel having an inlet end and an outlet end and an inside diameter sized to accommodate the pigs, the storage barrel including a pig parking chamber for controlling release of the pigs, and a pig launching chamber downstream of the storage barrel. The launching chamber is connected to the pipeline so as to be able to launch a pig into the pipeline. The apparatus also includes a hydraulic pig advancing system in fluid communication with the storage barrel and the launching chamber and a fluid flush system in fluid communication with the storage barrel chamber and the launching chamber. The method includes flushing the storage barrel and the launching chamber after each launching cycle so that between launchings the system is filled with hydraulic fluid.

Abstract: This method of prevention of particle pollution in a pre-clean chamber includes an oxygen gas supplying step for injecting oxygen gas into the pre-clean chamber; and a plasma generating step for ionizing the oxygen gas into plasma so as to interact with silicon-rich oxide to form a silicon oxide layer in the pre-clean chamber. The method according to the invention could prevent particle pollution due to peeling-off of silicon-rich oxide in a pre-clean chamber so as to prolong the life of a bell-jar therein.

Abstract: A device and method are provided for storing pipeline pigs and launching the pigs into a subsea production pipeline. The device is installed in line with a pipeline and includes a frame, a magazine containing several rotatable trays for storing and sequentially launching the pigs, and a connector for directing the pigs into a pipeline. Each magazine tray holds several pigs and rotates to align the pigs with a launching tube. The pigs travel through the launch tube and connector and into the pipeline.

Abstract: Methods for cleaning screw extruder, especially powder-coating extruders, include filling the extruder barrel with a gel purge formulation comprised of a high-boiling pyrrolidone or piperidone (lactam) solvent (most preferably N-methyl pyrrolidone (NMP)), thickened with 5-50 wt. % of a thermoplastic resin thickening agent, most preferably polystyrene (PS). Once the extruder barrel is filled with the gel purge formulation, the screws are stopped and the gel allowed to soak for between about 10 to about 30 minutes. The screws are then restarted and the gel is discharged from the extruder. Immediately after the gel purge formulation exits the machine, a small amount of a thermoplastic “rinse” polymer (e.g., polyethylene) may be added so as to remove any vestigial amount of the gel purge formulation therefrom.

Abstract: In a first embodiment the invention comprises a method for cleaning deposits from the interior of a pipe in which a pig is propelled through the pipe by pressure from a fluid mixture of at least one liquid and at least one gas applied to the pig from the rear end of the pig. A portion of the fluid mixture is conducted from the rear of the pig to at least one nozzle on the forward end of said pig and propelled through the nozzle to clean the deposits from the interior of said pipe.

Abstract: An apparatus for identifying and clearing blockages in cooling orifices of an airfoil is described. The apparatus includes a processor for controlling the various functions of the apparatus. Light is directed into a cavity of the airfoil and a detector is used for detecting light passing through the orifices. The processor determines blockages of the orifices by comparing detected light pattern with a predetermined pattern. The apparatus further includes a nozzle controlled by the processor for directing pressurized water to open the blocked orifices.

Abstract: The present invention provides a cleaning method in accordance with a degree of soiling and a type of contaminant on a surface to be cleaned of a cleaning target. In the method of cleaning a cleaning target, such as an electrical component, with dry ice, during a process of blasting the dry ice toward the surface to be cleaned from a location where the dry ice is stored, a size of the dry ice is adjusted, so cleaning is performed while a cleaning performance of the dry ice is changed in accordance with the type of soiling or contaminant on the surface to be cleaned.

Abstract: A pipe cleaning apparatus adaptor assembley (1A) consists of an adaptor (2) arranged to be connected adjacent an opening (101) of a pipe (100) to be cleaned and a flange head plate (12) to close the opening (101) of the pipe (100). The flange head plate (12) has at least one opening (19) therein. The flange head plate (12) is releasably retained with the adaptor (2) by pins (7) received in apertures (13). The opening (19) of the flange head plate (12) is able to receive a supply of compressed air which is able to travel through the opening (101) of the pipe (100) and into the pipe (100). The flange head plate (12) is removable from the adaptor (2) so that, in use, a cleaning pellet (70) is insertable into the opening (101) of the pipe (100) and then the flange head plate (12) can be returned to close the opening (101) of the pipe (100) and again be retained with the adaptor (2).

Abstract: A pipeline pig for removing scales and debris from the interior walls of a pipeline has a generally cylindrical central portion with a hollow core and a rounded end on each two ends of the cylindrical central portion, is produced of a flexible material to facilitate the movement of the pipeline pig through non-linear sections of a pipeline and buildups of scale and debris in a pipeline, has a solution which fills the hollow core, and includes a body which is formed as a peripheral fluid closed body composed of the flexible material.

Abstract: Very small fiber-optic cable-receiving openings and cable ends within such openings in terminals or connectors are cleaned using a very slender swab comprising multiple layers of a single yarn wound around a very slender form, with end support and/or tension control and yarn size selection and/or balanced simultaneous multiple yarn winding to prevent excessive bending of the slender form during winding.

Abstract: A method and apparatus for pipe pig that is employed in a piping system for the purpose of recovering product. The pipe pig, or simply “pig,” is utilized to flush or purge a piping system, which includes a pipe that is normally filled with a product stream. The pig is a substantially solid slug that is introduced into the flow within the pipe. The pipe pig includes at least a component of a product stream and the pig is at least partially frozen to achieve its substantially solid form. The pipe pig is inserted or alternatively formed within a launch chamber that junctions with a pipe. A release valve is opened to allow the pig to enter the pipe. An exterior surface of the launch chamber can be heated to prevent the pig from sticking within the launch chamber or refrigerated to form the pig. The pipe pig can be propelled into the product stream or allowed to fall by gravity or suction alone.

Abstract: A method and an apparatus for cleaning a heater bellow in a chemical vapor deposition chamber by utilizing a plug and a plug base specifically designed for such cleaning are disclosed. The apparatus consists of the plug and the plug base which can be advantageously mounted in a heater bellow for the filling of the bellow with an oxidizing fluid such as H2O2. After a suitable soaking period of the oxidizing fluid, the fluid is drained away and then deionized water is used to fill the bellow to rinse the bellow wall and to remove the oxidized compound of metal, such as WO3. During the soaking process by H2O2 or by deionized water, an inert gas such as argon may be purged through the fluid to improve its uniformity and to improve its interaction with the metal oxide deposition on the bellow wall.

Abstract: A system for supplying pigs to a subsea pig launcher using a system carried and controlled by a remotely operated vehicle. The pigs are carried in racks that hold multiple pigs. The racks are extended and the pigs are allowed to drop into the barrel of the subsea pig launcher. The system is also equipped with a system that retracts the racks if hydraulic and electrical power is lost during the reloading process so that the remotely operated vehicle can be retrieved to the surface safely. The reloading process can be carried out by a remotely operated vehicle support vessel without the need for heavy lifting equipment or a large deck area.

Abstract: This invention provides a cleaning method for removing sediment from the inner wall of the rotary drum of a horizontal drum-type centrifugal separator which comprises charging a plurality of solid cleaning medium pieces such as globules, balls, cubes, rods, springs etc., into the rotary drum, supplying a cleaning liquid to the rotary drum, rotating the drum, and discharging the sediment together with the cleaning liquid. The solid cleaning medium is charged into the rotary drum either before centrifugal separation or at the time of cleaning after centrifugal separation.

Abstract: A process for freezing a plastic molding machine involving: (a) providing a freezable compound containing: (i) from 20 to 45% by weight of at least one homopolymer or copolymer selected from the group consisting of an ester of methacrylic acid with a monohydric alcohol having from 1 to 4 carbon atoms, a graft polymer of an ester of methacrylic acid with a monohydric alcohol having from 1 to 4 carbon atoms, an ethylene/vinyl acetate copolymer, a graft copolymer of an ethylene/vinyl acetate copolymer, and mixtures thereof; (ii) from 45 to 75% by weight of chalk having a particle size of from 2 to 150 microns; and (iii) from 0.01 to 10% by weight of at least one freezing agent selected from the group consisting of a lubricant having a volatility of less than 0.2% by weight, a release agent having a volatility of less than 0.2% by weight, and mixtures thereof; and (b) charging the plastic molding machine with the freezable compound prior to turning of the plastic molding machine.

Abstract: The present invention provides a method of cleaning a chamber of a CVD machine and elements within. A gas mixture of carbon tetrafluoride (CF4) and perfluoro ethane (C2F6) is first injected into the chamber. After performing a surface treatment, comprising a sandblasting step or a polishing step, on the surfaces of the elements, the elements are then immersed in a cleaning solution, comprising at least ammonia water (NH4OH) and hydrogen peroxide (H2O2) at a temperature maintained between 40° C. to 70° C. Finally, the temperature of the cleaning solution is raised so that the residual layer on the surface of the elements can drop from the surfaces of the heater and the process kits or dissolve into the cleaning solution.

Abstract: A pull through such as might be used for an endoscope where a thermoplastics monofilament substantially free of spool or coil memory has moulded thereon a desirable thermoplastic mass profile in a material of lower melting point than at least part of the filament, such melting point differential with preferably pre-heating of the filament ensuring an appropriate keying of the profile on the filament.

Abstract: The invention relates to a method for cleaning a metallic or an enameled surface comprising flooding a metallic surface contaminated with deposits with a mixture comprising (i) water, (ii) chippings of woods selected from the group consisting of merantis, bongossis, mahoganies, sipos, khayas, lauans, and sapellis, and (iii) a member selected from the group consisting of polyaspartic acid, salts of polyaspartic acid, and polysuccinimide, and thereby cleaning the surface.

Abstract: This invention includes systems and methods for cleaning ventilation ducts using a dry ice blasting system that is adapted to blast debris from the interior surfaces of ventilation ducts. This invention employs either existing or artificial duct ventilation airflow to evacuate dislodged debris and a filter or filtration system attached to the ventilation system to capture the dislodged debris.

Abstract: A process including providing a hollow imaging drum having a first end, a second end, an outside surface, an inside surface and coating material on both the inside surface and the outside surface at at least the first end, simultaneously contacting the coating material on both the inside surface and the outside surface at the first end of the drum with resilient foam material, flowing liquid solvent for the coating material to the foam material where the foam material contacts the first end of the drum, the foam material being insoluble in the flowing solvent, producing relative movement between the foam material and the drum to simultaneously wipe both the inside surface and the outside surface of the first end of the drum with the foam material and solvent material and simultaneously remove coating material from the inside surface and the outside surface of the first end of the drum, and flowing the solvent away from the drum to carry away coating material removed from the inside surface and the outside sur

Abstract: This invention includes systems and methods for cleaning ventilation ducts using a dry ice blasting system that is adapted to blast debris from the interior surfaces of ventilation ducts. This invention employs either existing or artificial duct ventilation airflow to evacuate dislodged debris and a filter or filtration system attached to the ventilation system to capture the dislodged debris.

Abstract: A method of cleaning surfaces using a mixed phase cleaning mixture of an aqueous solution and a flow of gas sufficient to produce droplets of the liquid which are entrained by the gas for a time sufficient to clean tubing of various lengths and geometries and porous membranes to remove biofilm, debris and contaminants.

Abstract: The invention relates to an apparatus for the cleaning and/or coating of a mold surface of a mold. The apparatus has a frame which can be placed onto the mold and in which a handling device is movable along a predetermined track in such a way that at least one cleaning or coating unit provided on the handling unit, of which the relative position is adjustable relative to the mold surface, is moved past the mold surface at a predetermined spacing to carry out the cleaning or coating process. A drive means is provided for the adjustment of the relative position of the cleaning or coating unit and can be coupled to the handling device, but is decoupled from the handling device during the movement thereof.

Abstract: The invention relates to a method and an apparatus for cleaning industrial pipe systems, preferably pipe systems used in food industry, such as meat, fish and vegetable industry. The method for cleaning industrial pipe systems, includes the steps of feeding a detergent together with liquid and granules, having a diameter, in batches only into a small part of a pipe, having a cross-section, to be cleaned, whereby one wash batch has a volume in liters, which is 0.05-0.3 times the numerical value of the cross-section in square centimeters of the pipe, creating a negative pressure in the pipe, and bringing the wash batch to flow in the pipe by means of the negative pressure for cleaning and mechanically treating the walls of the pipe. The invention relates also to an apparatus for carrying out the method. As an essential part, the apparatus includes a washing center (9) that functions as a source of the batches cleaning the pipe (4).

Abstract: A cleaning device and cleaning method to automatically clean the interior of a car. The devices having a robot arm and cleaning tools.

Abstract: There is disclosed a method and a device to allow a “rigid” pig to pass into an undersea flow pipe in which a hollow flow-constricting device is in use. According to the invention the device is provided with a first pipe branch and a second pipe branch. The first pipe branch is provided with a hollow flow-constricting device in it and both first and second pipe branches are provided with shut-off valves, whereby the flow can be diverted to the second pipe branch thereby enabling a rigid pig to pass into such second pipe branch, when necessary.

Abstract: A pig injector has a magazine having a plug at one end and connected to a pig injector valve at the other end. The pig injector valve has a rotatable pig receiving chamber with a length L. Plural pigs of length L between rounded ends are positioned end to end within the elongate interior cavity of the magazine. A method of injecting pigs into a pipe at a pig injector valve comprising: (a) storing plural pigs in a magazine connected to the pig injector valve; (b) rotating the ball of the pig injector valve to be in position to receive a pig and close the pipe; (c) moving a pig from the magazine into the pig injector valve; (d) rotating the ball of the pig injector valve to open the pig injector valve and release the pig in the pipe; (e) moving the pig away from the pig injector valve with fluid pressure in the pipe; and subsequently repeating steps (b)-(e) with a second pig. Steps (b)-(e) may be repeated plural times and at regular intervals.

Abstract: Equipment used in the processing of plastic, such as molds and extrusion screws, is cleaned of plastic residue by a combination of thermal cycling and agitation without impact cleaning. A chamber can be heated by an electric radiant heater and cooled by the introduction of liquid nitrogen. A fixture in the chamber receives the equipment to be cleaned and is agitated by a drive motor. The chamber is heated and cooled in the following cycle in which the drive motor agitates the fixture: first to 250-300° F., then to −315° F., then cycled between −50° F. and −10° F., then to 150° F., then to −200° F., to 100° F., then to ambient temperature. The chamber is controlled by a computer that prompts the operator for the kind of plastic to be cleaned off of the equipment and then controls the heating and cooling automatically.

Abstract: A method of cleaning the inside surface of a kitchen extraction duct or other grease duct, includes applying solid carbon dioxide under pressure to the inside surface of the duct, so that grease thereon is hardened and dislodged therefrom.

Abstract: A grinding shoe is designed to be a passive grinder that is advanced within the bore of a pipe being rotated in a typical pipe operation. Apparatus currently used to deliver reamer rocks on the end of a rotating lance can be modified to achieve considerable cost savings. Specifically, the apparatus utilizes a lance for advancing the shoe within the pipe without rotation. The shoe is affixed near the end of the lance in a selected attitude that determines the degree of grinding to be accomplished. A pair of shoe walls extending substantially paraxially with the rotating tube form a dual reaming head which engages the pipe interior across a cord over the bottom of the pipe.

Abstract: A system for storing pigs and launching them into a pipeline comprises a pig storage barrel having an inlet end and an outlet end and an inside diameter sized to accommodate the pigs, the storage barrel including a pig parking chamber for controlling release of the pigs, and a pig launching chamber downstream of the storage barrel. The launching chamber is connected to the pipeline so as to be able to launch a pig into the pipeline. The apparatus also includes a hydraulic pig advancing system in fluid communication with the storage barrel and the launching chamber and a fluid flush system in fluid communication with the storage barrel chamber and the launching chamber. The method includes flushing the storage barrel and the launching chamber after each launching cycle so that between launchings the system is filled with hydraulic fluid.

Abstract: A method of cleaning tubing in an operating heater, in which the tubing has an inlet and an outlet. While the heater is in operation, a pig is run through the tubing from the inlet to the outlet and then returned to the inlet along return tubing, in parallel connection to the heater tubing. A combined pig launcher and receiver mounted parallel to the tubing, and controlled with three way full port valves, is used to launch pigs into the tubing and remove them from the tubing. A boost pump is used to force pigs back from outlet to inlet.

Abstract: A system for supplying pigs to a subsea pig launcher using a system carried and controlled by a remotely operated vehicle. The pigs are carried in racks that hold multiple pigs. The racks are extended and the pigs are allowed to drop into the barrel of the subsea pig launcher. The system is also equipped with a system that retracts the racks if hydraulic and electrical power is lost during the reloading process so that the remotely operated vehicle can be retrieved to the surface safely. The reloading process can be carried out by a remotely operated vehicle support vessel without the need for heavy lifting equipment or a large deck area.

Abstract: A composition and method purge resin deposits from the inner surfaces of polymer processing machinery upon the flow of a stream of resin through the polymer processing machinery. The composition includes a mixture of purging agents separate from the resin that are poured into the stream of resin as an additive. The purging agents include a blowing agent to induce foaming of the stream of resin and an abrasive to scrub the resin deposits from the inner surfaces of the polymer processing machinery. The purging agents further include a surfactant to promote the flow of the stream of resin along the inner surfaces of polymer processing machinery. A binder binds the purging agents together in the mixture. The method includes feeding a mixture comprised of a blowing agent, an abrasive, a surfactant, and a binder into the stream of resin entering the polymer processing equipment.

Abstract: A pipeline cleaning tool is constructed with an elongated support mechanism having a rigid cutting unit mounted at one end and a folding propulsion assembly mounted at the other end. The propulsion assembly includes a system of folding sector panels that are hinged to a central hub for rotation relative thereto about tangential axes of rotation. A separate expansion flap is secured to each sector panel for rotation relative thereto about a radially oriented axis of rotation by a hinged connection to one radial side edge. Each expansion flap partially overlaps the upstream face of the sector panel immediately adjacent to that upon which it is mounted. The area of overlap is controlled by the extent to which the sector panels of the propulsion unit are folded back toward the supporting shaft. The greater the extent of folding, the greater will be the area of overlap of each expansion flap upon the upstream face of an adjacent sector panel.

Abstract: A method and apparatus for cleaning a tire mold with frozen CO2 cleaning material wherein a portable frame is positioned on a bottom mold of a tire press and has a rotatable frame on which a nozzle support is mounted for swivel action to clean the upper mold half and the lower mold half as the nozzle support is moved radially and circumferentially of the tire mold.

Abstract: A method of cleaning a pipeline for transporting a fluid without interrupting the fluid flowing through the pipeline, including applying suction to remove a mixture of the fluid and debris from the pipeline, separating the debris from the fluid, and re-injecting the fluid separated from the debris into the pipeline.

Abstract: Method for cleaning or decoring a casting, wherein that, separately or in combination: the said casting may be excited by an ultrasonic source of vibration, to allow residual material in contact with the walls of the said casting to become detached, this casting resting on a number of anvils placed on vibrating means supporting the casting and in contact with a number of sonotrodes, the said casting may be beaten at a very low frequency so as to cause large-sized internal residue such as a sand-based core insert to crack up, vibrating means may be used to impart a low-frequency linear vibration to this casting so as to break up and fluidize the cracked bits, the material issuing forth from the said casting may be extracted using a stream of fluid.

Abstract: A device and method for cleaning the interior window surface of an aquarium comprises a buoyant floatable interior element and an exterior element. At least one element has at least one magnet and the other element has a material attracted to the at least one magnet so the elements attract each other under the influence of a magnetic force between the elements. Such material may be a magnet or magnetically attractive metal. Movement of the exterior element along the exterior window surface of the aquarium causes the buoyant floating interior element to move along the interior window surface of the aquarium thereby cleaning the interior window surface. Once the magnetic force between the elements has been removed, the buoyant floatable interior element floats to and on the surface of the liquid medium present in the aquarium.

Abstract: A pipeline cleaning arrangement that includes a cleaning pig with guide units at each end. A tow cable, via a cone, pulls the pig assembly in a forward direction. The tow cable then pulls the cone in a rearward direction. The pig is configured with two cleaning portions that separate in the forward direction to avoid debris collection and abut in the rearwards direction to collect pipeline debris and carry this to the entry point for removal via a suction tube.

Abstract: A cleaning device for cleaning toilets, bathroom fixtures, and other surfaces. The device encloses a reservoir contained in a hollow handle for storing a cleaning solution, with a cap connected to one end of the handle and a base connected to the other end of the handle. A brush, sponge or other scrubber or cleaning surface is preferably attached to the base. A manually operated flow control mechanism opens a valve which seals at least one exit or dispensing orifice at or near the base of the reservoir, and thereby allows volume of cleaning solution to be dispensed at a reasonably fast, controlled rate of flow. In one embodiment, manually operated vacuum pressure release orifices are located at the opposite end of the reservoir from the exit orifice and are normally closed, but may be opened to minimize or eliminate any vacuum (subatmospheric pressure) in the reservoir, thereby aiding the flow of liquid from the reservoir through the exit orifice.

Abstract: A device for cleaning and sanitizing a food reservoir. The device includes two parts. The first part contains at least one or more enzymes and the second part contains one or more antimicrobial agents. The second part is isolated from the first part by a degradable barrier that is solid and stable under storage conditions but is adapted to decompose upon exposure to the aqueous conditions used for cleaning.

Abstract: An automated power-driven pool cleaning apparatus is provided with a motion translating member that contacts the surface being cleaned, an associated signal transmitter and a sensor that is connected to the pool cleaner's programmed electronic control device, or chip, so that when the cleaner is moving, the mtm moves the signal transmitter past the sensor thereby providing an intermittent signal. When the cleaner stops moving, no intermittent signal is received and after a predetermined period of time, the control device causes the cleaner's drive means to move the cleaner in a different direction.

Abstract: In a method for cleaning a surface of a substrate an amount of a solution is applied on a surface of the substrate. After the solution is applied on the surface, crystallization of the solution is initiated to form a liquid-crystal mixture. Once the liquid-crystal mixture is formed, relative motion between the liquid-crystal mixture and the substrate is created to dislodge contaminants adhered to the substrate. In one alternative method, the solution is applied on a pad. In another alternative method, the substrate is place in a bath of the solution. A wafer cleaning module also is described.

Abstract: A pipeline-cleaning method and device thereof is built and applied by firstly forming a sealing circuit including a pipeline pending cleaning, a pressure control device, and two units of pipeline-cleaning device A, A′. A storage tank filled with rigid granules in each pipeline-cleaning device A, A′ is provided with a filter net unit at its lower portion and a filter unit at its upper portion. When cleaning, a pressurized liquid is supplied by the pressure control device to drive the granules circulating the circuit and thereby remove dirt and sediment deposited on the pipe wall by collision and rubbing of the granules to the pipeline inner wall.

Abstract: A method of cleaning tubing in an operating heater, in which the tubing has an inlet and an outlet. While the heater is in operation, a hollow, metallic and/or tubular mesh pig is run through the tubing from the inlet to the outlet. Cleaning should be done before contaminant has hardened. An improved pipe pig, preferably hollow, metallic and/or made from tubular mesh, has scraping edges made from longitudinal edges of a wire. The tubular mesh may be a knit, weave or may be knotted. The pig is preferably radially expandable up to twice its fully compressed radius, and may have an expander to force it radially outward. The pipe pig is preferably made of a resilient wire having a polygonal cross-section.

Abstract: A method for removing a stain from a surface of a structure which includes the steps of spraying an aggregating agent comprising a cationic linear organic polymer onto the surface of such structure having a stain produced thereon, dissociating the stain particles by use of Coulomb force f generated between the stain particles and the aggregating agent, displacing slightly the stain particles along the surface of the structure to cause peeling thereof from the surface to be cleaned, and simultaneously, aggregating the same for cleaning. Another embodiment includes maintaining water permeability of a road by easily eliminating a stain adhering to the surfaces of granular aggregate particles forming a drainage-type pavement layer of a road without the use of various mechanical tools.

Abstract: The invention relates to a separating member for separating the bottom part of an electrolytic tank from the rest of the tank space in connection with the removal of solids (6) settled onto the bottom of the electrolytic tank (1). According to the invention, in the electrolytic tank (1) there are installed support and control members (10), which form the trajectory of the separating member (11, 21, 31), so that the separating member (11, 21, 31) can be inserted in the electrolytic tank (1) and removed therefrom via a space left in between at least one rear wall (7, 32) of the electrolytic tank (1) and the electrode (2) located nearest to said rear wall (7, 32).

Abstract: Chlorine trifluoride (ClF3) is an excellent chemistry for in-situ cleaning of process equipment for chemical vapor deposition (CVD) of metals. ClF3 is a weakly-bound molecule that breaks down exothermically on contact with most hot conducting films such as Ti and TiN without plasma, giving it an advantage over other chemistries. The energy released from the reaction is used to volatize the reaction byproducts. Cooler reactor surfaces, however, are coated with a halogen-rich, less conductive film that may not be as reactive with ClF3. To improve the ClF3 reaction, additives such as nitrous dioxide are employed. These additives react with ClF3 and supply reactive ions energetic enough to volatize the byproduct.