Abstract: A mixing valve assembly 42 is communicated with a dedicated tank 51D, storing therein a compatibilizer D, via an inlet valve 43 and is also communicated with dedicated tanks 51A-51C via three injection valves, the tanks storing therein auxiliaries A-C respectively. A chemical formulation is prepared by selectively injecting any one(s) of four chemical agents into the mixing valve assembly 42 by way of on-off control of the inlet valve 43 and the injection valves and blending together the injected chemical agents. Then, the chemical formulation is pumped into SCF by a high-pressure pump 45 such that the SCF and the chemical formulation are mixed together to form a process fluid. Thus, the number of components of a high-pressure portion can be reduced to achieve a cost reduction of an apparatus. Furthermore, a pipe line for pumping the chemical agents is simplified.

Abstract: An additive dispenser includes a fluid-retaining chamber. A siphoning post extends upward from a lower surface of the fluid-retaining chamber and cooperates with a cap or other structure so as to form a siphon chamber. When water is added to the chamber and a liquid level rises above an inlet to the siphoning element, a siphoning effect draws fluid from the chamber. When the siphoning effect is interrupted, any unsiphoned fluid remaining in the chamber exits by permeation through one or more porous elements located in a base of the chamber.

Abstract: Systems and methods for delivering a first additive to an appliance are disclosed. The systems include a first storage container located in a pedestal, a first pump operatively connected to the first storage container and the appliance. A controller is configured to activate the first pump upon receiving an input. The first pump configured to deliver the first additive from the first storage container to the appliance. The methods include receiving a first input. The first input specifying an amount of the first additive to be delivered to the appliance. The first additive is delivered by activating a first pump in response to receiving the first input. Activating the first pump causes the first additive to be delivered to the appliance.

Abstract: A dishwasher with a double-walled door pivotal between open and closed states and provided between its walls with a salt receiving container provided with a vent opening part of its upper wall extending between the walls of the door. The vent opening is connected with a vent channel at least part of which is narrowed by a ridge extending partly across the channel and which extends over the salt receiving container and along a lateral wall thereof to a lower section for providing access to ambient air.

Abstract: A dispenser of washing agents for a household washing machine, in particular a dish-washer, comprises a body (2), at least one compartment (6) for containing a washing agent, and a lid (7), which may be tipped over or turned about a first axis of rotation (8) between a position of closing and a respective first position of at least partial opening of the compartment (6), so as to enable delivery of the washing agent. According to the invention, there are envisaged articulation means (4), which are interconnected between the body (2) and the lid (7) and are operative for enabling the latter to turn about a second axis of rotation (5) between said closing position and a respective second position of at least partial opening of the compartment (6) so as to enable charging in the latter of the washing agent to be delivered.

Abstract: The present invention is directed to a method and system of processing and removing hydrocarbon sludge from a tank wherein the hydrocarbon sludges are the product of gravity settling in the bottom of the tank to form a sludge consisting of inorganic and organic materials not readily flowable or pumpable for removal in the found state and where a process is used to selectively separate, grind, disperse and suspend these materials with a mechanical classifier system, and where flow agents may be metered to effect a slurry stream directed thru a nozzle system towards the sludge in the tank and by reducing the surface tension and mechanical conditioning of the sludge, create a pumpable slurry that may be removed from the tank with minimal time, cost and environmental impact.

Abstract: A lithographic apparatus is disclosed having an in situ ozonizer, which is used to produce ozone gas, for example, by UV irradiation of an oxygen-containing gas. The thus produced ozone is dissolved in ultra-pure water by contacting the ozone with the ultra-pure water through a permeable membrane.

Abstract: A system for dispensing a liquid, wherein the system includes a reservoir comprising a plurality of apertures disposed therein, and at least one dispenser in flow communication with the reservoir, the dispenser comprising a first and a second tube operatively coupled to the reservoir.

Abstract: The present invention relates to an instantaneous mixing device for injection/extraction cleaning machines and in particular to an instantaneous mixing device with a pre-spray functionality of the type equipped with at least one washing accessory (13) and/or at least one pre-washing accessory (30) connected at the outlet to a hydraulic circuit (20), the device (10) comprising: at least one spray pump (12) connected to the hydraulic circuit (20); at least one tank for water (15) and at least one tank for a chemical product (16), connected to the hydraulic circuit (20); at least one mixing element (14) with a Venturi effect connected downstream of the at least one water tank (15) and at least one tank for a chemical product (16). The at least one pre-washing element (30) preferably comprises a spray hole having greater dimensions with respect to the hole of the spray nozzle of the at least one washing accessory (13).

Abstract: An apparatus for selective eductive dispensing of multiple chemical fluids from separate fluid containers includes a motive fluid inlet; an eductor in fluid communication with said motive fluid inlet; a selector switch defining at least one inlet and an outlet therein, said inlet and outlet in fluid communication with one another and said outlet in fluid communication with said eductor and wherein said selector switch inlet is in selective fluid communication with said fluid containers depending on the position of the selector switch; and a valve located between said motive fluid inlet and said eductor, said valve selectively opened and closed by movement of said selector switch.

Abstract: Systems and methods for cleaning asphalt contact surfaces are provided. One such system includes a means for determining a dilution ratio appropriate to a particular asphalt contact surface, a nozzle proximate to the asphalt contact surface, and a pump in fluid communication with the nozzle. The pump is configured to deliver to the nozzle a mixture of water and said cleaning compound with the appropriate dilution ratio. One such method includes the steps of: pumping a cleaning mixture with a dilution ratio appropriate to a particular asphalt contact surface; supplying said pumped cleaning mixture to at least one nozzle proximate to the asphalt contact surface; and spraying the asphalt contact surface through the nozzle with the pumped mixture.

Abstract: An underbody car wash sprayer for home-use, which can be hooked up solely to a garden hose or in combination with a pressure washer. The device utilizes a three nozzled “I” design, supported by four swiveling casters. In addition, it is connected to an ergonomically effective wand system to allow easy maneuverability under the vehicle. Finally, in some embodiments a trigger spray gun acts as a handle and pressure regulator. The compactness of the specific design allows for significant material reduction and hence a reduction in production costs, providing the consumer with a more economical choice. Additionally, the concentrated pressure and spray pattern of the “I” design along with its precision maneuverability allows the consumer to easily access and forcefully remove sediment adhesions to the vehicle underbody while controlling water flow at all times with a trigger spray gun.

Abstract: A device for dispensing washing agents is described, for a household washing machine, in particular a dishwasher, said dispenser having at least a tank for a liquid washing agent and an arrangement for dispensing a dose of said washing agent. The arrangement comprises: a passage for putting the inside of said tank in communication with a discharge outlet; plugging means for said passage, at least an actuator for operating said plugging means. According to the invention, said plugging means comprise an element being movable within said passage and bearing sealing means, whereby the movable element, in a first position, allows to realize the dosage of an amount of washing agent and, in a second position, allows to dispense the dosed amount of washing agent.

Abstract: A machine for cleaning containers such as flat media carriers has inside and outside arrays of nozzles arranged to spray a cleaning solution onto containers supported on a spinning rotor in a chamber. The cleaning solution, a mixture of water and a detergent or surfactant, is prepared by drawing out surfactant directly from a surfactant bulk storage vessel by means of a metering pump. The flow rate of the water is measured by a flow meter and in combination with the metering pump, a proper amount of surfactant is injected into the water line to produce a mixture with a desired surfactant concentration for removing contaminants. The mixture is injected into the water line at a mixing control valve to ensure that the water and surfactant are thoroughly mixed before being injected into the media carrier.

Abstract: A method and biological cleaning system are provided for cleaning substrate surfaces of oils and/or greases using a biological cleaning system which utilizes a pre-treatment bath and/or post-treatment bath as part of the cleaning system. The pre-treatment and/or post-treatment baths are compatible with the biological cleaning bath and during operation of the system, the used pre-treatment and/or post-treatment baths are recycled to the biological cleaning solution for biodegradation. A system is provided in which none of the pre-treatment, post-treatment or biological cleaning baths need expensive waste disposal. Replenishment pre-treatment and/or post-treatment baths as well as biological cleaning baths are added as needed to the biological cleaning system. Other treatment baths may be added directly to the biological cleaning bath with or without pre- or post-treatment for specific purposes such as a detergent phosphating bath used in the biological cleaning tank to provide a cleaned phosphated part.

Abstract: A household dishwasher with a bulk wash aid dispenser for metering individual charges of wash aid from a bulk wash aid supply.

Abstract: The present invention relates to a multi-functional surface cleaning machine having a fluid tank, a primary fluid pump, a secondary priming pump, and at least one receptacle for holding concentrated cleaning chemicals. The receptacle(s) are in fluid communication with an operator controllable selector. The selector, either alone or in combination with a metering valve, may control which chemical(s) and the amount of such chemical(s) that will be allowed to flow to an inlet of a multi-inlet mixing member. A second input to the mixing member is a fluid to be stored within the fluid tank. The fluid and chemical which may be supplied to the mixing member may be mixed within the mixing member to create a cleaning solution, which may be supplied to any number of dispensing devices. One such device may be a spray gun for dispensing pressurized cleaning solutions onto a surface to be cleaned.

Abstract: A cleaning apparatus cleaning a chuck is provided with a cleaning tank, an injection nozzle, a discharge nozzle, a liquid supply mechanism and a gas supply mechanism. The liquid supply mechanism has a supply tank, a heater and a liquid distribution mechanism so that the heater heats pure water supplied from the supply tank under the room temperature for forming warm water, reduced in electrical resistance, heated to a temperature higher than the room temperature. The liquid supply mechanism supplies the formed warm water to the cleaning tank through the liquid distribution mechanism. A vertical moving mechanism moves down a transport arm thereby dipping the chuck in the warm water and cleaning the chuck. Thus, the throughput of the cleaning apparatus cleaning the chuck is improved, the quantity of consumed gas is reduced and cleaning performance is improved.

Abstract: Apparatus for supplying a car wash installation with chemical additives which are admixed with the wash water, wherein at least one additive is poured into a cartridge in highly concentrated form. An associated holding device of the car wash receives the cartridge, wherein the additive of the cartridge can be removed continuously, according to need. Several additives are poured into several cartridges in highly concentrated form and each cartridge and each associated holding device differs from the other cartridges and associated holding devices, by a mistake-proof flange-mounting.

Abstract: A single wafer type wet-cleaning technique for wet-cleaning wafers, individually, which are not stored in a cassette, at the front and back faces thereof simultaneously, in a sealed cleaning housing, whereby a plurality of chemical fluids are vertically and sequentially supplied from a number of upper side supply nozzles 25 and lower side supply nozzles 26 to the front and back faces of each wafer W to clean the same, and purified water is always caused to flow out of the lower side supply nozzles 26, 26, . . . , which do not supply chemical fluids, of the lower side supply nozzles, thereby preventing the occurrence of cross contamination of various chemical fluids between cleaning treatments.

Abstract: A hard floor surface cleaning apparatus includes an aerator, a rotating scrub medium engaging the hard floor surface, a fluid conveyor, and a fluid recovery device. The aerator is configured to produce a foam-like aerated cleaning liquid from a cleaning liquid. The fluid conveyor is coupled to the aerator and is configured to deliver the aerated cleaning liquid onto the scrub medium. The fluid recovery device is configured to remove soiled solution from the hard floor surface.

Abstract: An apparatus and method for operating a dishwasher in a variable dry cycle mode is provided. The dishwasher includes a wash chamber, a heater element located within the wash chamber, a rinse aid product dispenser, and a fan unit for circulating air. The method comprises determining a temperature of the wash chamber, determining an amount of rinse aid product in the dispenser, and, based upon the determined temperature and the amount of rinse aid product, determining an optimized heater element cycle and an optimized fan unit cycle.

Abstract: A device for dispensing washing agents is described, for a household washing machine, in particular a diswasher, said dispenser (1) having at least a tank (S) for a liquid washing agent and an arrangement (11-22) for dispensing a dose of said washing agent. The arrangement comprises: a passage (12A, 12B, 12C) for putting the inside of said tank (S) in communication with a discharge outlet (16); plugging means (13) for said passage (12A, 12B, 12C), at least an actuator (11) for operating said plugging means (13). According to the invention, said plugging means comprise an element (13) being movable within said passage (12A, 12B, 12C) and bearing sealing means (18-21), whereby the movable element (13), in a first position, allows to realize the dosage of an amount of washing agent and, in a second position, allows to dispense the dosed amount of washing agent.

Abstract: A washing apparatus for mop heads and washing pads which has the introduction of cleaning solution into a compartment for the mop as well as an overflow and drain function. The washer provides affordability, eliminates the need for electricity as a power source or lifting the cleaning water so as to drain the unit, and eliminates the possibility of back injuries associated with lifting. The washing apparatus also affords versatility that it can be combined with a mop bucket with a wringer function. Further, it can include accessories such as a spray nozzle or a foam gun.

Abstract: An automatic dishwashing appliance containing a cell and/or device comprising same for electrolyzing tap water and/or wash and/or rinse liquor for treating tableware to improve cleaning, sanitizing and stain removal. The present invention also relates to methods of use and articles of manufacture.

Abstract: A high pressure car wash apparatus providing economy of both water and detergent by the recirculation of a portion of the water and detergent being utilized to a holding tank for reintroduction into the system.

Abstract: A portable, self-contained, device for dosing and/or dispensing at least one product into an appliance for treating laundry or dishes is disclosed. The device includes a housing with at least one compartment for containing at least one product. The compartment(s) can be closed by at least one corresponding cover. The device further includes at least one means for storing and releasing energy, so that the product to be dispensed may be released at one or more predetermined point(s) in time during a wash cycle. In one embodiment, the means may be a battery, such as a rechargeable battery. The device may also include at least one sensor and/or at least one actuator for detecting when the wash conditions are optimal and open at least one of the compartments for releasing a product.

Abstract: An apparatus dispenses detergent into a warewasher from a reservoir wherein a flow control device controls the flow of the detergent. A sensor measures the electrical conductivity of water within the warewasher and produces a conductivity measurement. A controller operates the flow control device in a first mode in which the quantity of detergent dispensed into the warewasher is determined in response to the electrical conductivity of the water. If the conductivity measurement is determined to be unreliable, the controller operates in a second mode in which a predefined quantity of detergent is dispensed into the warewasher. The reliability of the conductivity measurement is determined based on the amount that the conductivity changes upon detergent being added to the warewasher.

Abstract: In the present invention a car wash system is provided with a plurality of additive supplies, often referred to as solutions in the car wash industry, each supply feeding to a manifold including a common meter that has a value associated with each of the separate additive supplies for controlling flow from each of the supplies. A single variable speed pump under control of the computer pumps water through the meter and against the vehicle to be washed. The flow of the water through the meter aspirates additives from the supplies that mix with the water stream in the meter. Opening and closing of the valves to admit one or more of the additives to the water stream is responsive to a pre selected car wash cycle that is controllable by a controller.

Abstract: The present invention 10 discloses a device for cleaning and sanitizing objects such as food products 86, cartridge filter elements 64 and other such objects that could benefit from the advantages of being circumferentially sprayed with a fluid or a cleaning solution 119 or preferably a combination thereof. The present invention 10 comprises an inner and outer housing body 24, 44, a cover 26 for the housing body, a rotative central member such as a base, axle or shaft 42, a rotative drive means 60 for selectively rotating the rotative member 42, intake means 16 to introduce one or more fluids 119 or solutions individually or in combination into the interior of the housing body 24 including a means for further pressurizing and peripherally directing the resulting spray 130 towards a central point in a specific array, a containment means 66 for placement of such items therein, and an outlet means 18 to provide for the removal of fluid from the housing.

Abstract: A device is described, for dispensing washing agents for a household washing machine, in particular a dishwasher, said dispenser (1) having at least a space (3B) for containing an amount of washing agent necessary for performing a washing cycle, wherein the charging of said amount of washing agent in said space (3B) is performed manually and the dispensing of the washing agent is performed at least partially by gravity. According to the invention, the device comprises at least a dispensing body (3) capable of performing angular or rotary movements around a first axis and angular movements with respect to a second axis.

Abstract: A device for cleaning the interior and exterior of a colostomy pouch or the like. The device includes a middle water sprayer for cleaning the interior of the pouch and two lateral water sprayers for cleaning the exterior of the pouch. The water sprayers are attached to a conduit which is connected to a source of water such as a flexible hose connected to a faucet. A water shield is provided to prevent the operator from being sprayed during the cleaning procedure. The waste material cleaned from the pouch is discharged through the spray shield into a conventional toilet where the water and waste is removed by flushing the toilet.

Abstract: The invention is a foot washer comprising; a coupler valve capable of attachment to a shower outlet, a main hose coupled with the coupler valve to allow feeding of water from the coupler valve through the main hose, a hollow frame capable of receiving a flow of water from a main hose, one or more nozzles capable of spraying water from the hollow frame, whereby a user placing a foot near the frame can receive a foot washing.

Abstract: The present invention 10 discloses a device for cleaning and sanitizing objects such as food products 86, cartridge filter elements 64 and other such objects that could benefit from the advantages of being circumferentially sprayed with a fluid or a cleaning solution 119 or preferably a combination thereof. The present invention 10 comprises an inner and outer housing body 24, 44, a cover 26 for the housing body, a rotative central member such as a base, axle or shaft 42, a rotative drive means 60 for selectively rotating the rotative member 42, intake means 16 to introduce one or more fluids 119 or solutions individually or in combination into the interior of the housing body 24 including a means for further pressurizing and peripherally directing the resulting spray 130 towards a central point in a specific array, a containment means 66 for placement of such items therein, and an outlet means 18 to provide for the removal of fluid from the housing.

Abstract: A dispensing device of detergents and/or additives for washing machines is described, of the type having at least a space for containing a liquid, such as a rinse aid, the body of the device including at least a first part and a second part, the parts being made integral with each other by welding, wherein a portion of the body is intended to be inserted through an opening of a wall, a surface of the wall facing on a washing tank while the opposite surface of the wall faces on a space which has to be sealed from the tank. According to the invention, a seal is provided, in order to prevent leakage of the liquid from the welding into the space.

Abstract: Dispensing device of washing agents for a household washing machine, in particular a dishwasher, said dispenser having at least a tank for a liquid washing agent and an arrangement for dispensing a dose of said liquid washing agent, wherein this arrangement comprises: a passage, being adapted to put the inside of the tank in hydraulic communication with a discharge outlet for said liquid washing agent; first plugging means, act on said passage and capable of taking a first position due to which the washing agent cannot reach said discharge outlet, and a second position due to which the washing agent is able to reach said discharge outlet; actuating means producing actuation of said first plugging means. According to the invention, controllable safety means act along said passage are provided, which normally operate for preventing washing agent downflow from said tank to said passage, independently from the position or state of the first plugging means.

Abstract: A high pressure car wash apparatus providing economy of both water and detergent by the recirculation of a portion of the water and detergent being utilized to a holding tank for reintroduction into the system.

Abstract: A dispensing device for dispensing liquid detergent in dishwashers is provided in which the detergent is fed into the wash area of the dishwasher only after the second actuation of the actuating member. This is achieved by providing: a barrier on the discharge side for the detergent in the operating position, which barrier is sequenced to follow a supply chamber. A return opening is provided to return the retained detergent in the fill position.

Abstract: An automated kitchenware washing tank has a pump system with a pump and fluid conduits to couple the pump between an intake opening through one of the walls and discharge openings in the wall of the tank. At least some of the discharge openings are preferably formed in at least one angled portion of the tank wall that faces downwardly into the tank, and, more preferably, on two opposed angled portions that face downwardly into the tank. A control system may be coupled to the pump for controlling the speed with which the pump supplies cleaning fluid to the discharge openings. The control system comprises a speed selector that is adapted to allow a user to activate the speed selector to select between at least two different speeds for pumping the cleaning fluid to the discharge openings. In operation, the automated washing tank pumps cleaning fluid from within the tank through the intake outlet through the fluid conduits and out of the discharge openings into the tank to create turbulence within the tank.

Abstract: An apparatus for maintaining an effective concentration of alkaline detergent in an aqueous medium in a warewashing machine, which apparatus comprises a batch-fill warewashing machine having an aqueous rinse system, an alkaline detergent dispenser and a sump sized for a predetermined volume of an aqueous solution of the alkaline detergent in the aqueous medium; a source of the aqueous medium fluidly connected to the rinse system; means for controlling the flow of the aqueous medium through the rinse system; diverting means for obtaining a predetermined portion of the aqueous flow from the rinse system and for directing the diverted portion through a metering cap and volume control to the alkaline detergent dispenser, thereby to dissolve the alkaline detergent; and means for directing the dissolved alkaline detergent to the sump; wherein the detergent is dispensed only in a rinse cycle and an effective concentration of alkaline detergent is maintained in the warewashing machine sump.

Abstract: A method and biological cleaning system are provided for cleaning substrate surfaces of oils and/or greases using a biological cleaning system which utilizes a pre-treatment bath and/or post-treatment bath as part of the cleaning system. The pre-treatment and/or post-treatment baths are compatible with the biological cleaning bath and during operation of the system, the used pre-treatment and/or post-treatment baths are recycled to the biological cleaning solution for biodegradation. A system is provided in which none of the pre-treatment, post-treatment or biological cleaning baths need expensive waste disposal. Replenishment pre-treatment and/or post-treatment baths as well as biological cleaning baths are added as needed to the biological cleaning system. Other treatment baths may be added directly to the biological cleaning bath with or without pre- or post-treatment for specific purposes such as a detergent phosphating bath used in the biological cleaning tank to provide a cleaned phosphated part.

Abstract: The invention relates to a method for operating a household dishwasher, said dishwasher being equipped with a program selection device and a combined device for adding a detergent and a clear rinse agent to the washing area. The aim of the invention is to improve the cleaning effect. To this end, the clear rinse agent is added not only once during the last wash cycle, but on several occasions at various times during the wash program. Each of these processes is characterized by an adjustable number of equal quantities or a non-adjustable number of variable quantities of a clear rinse agent. A metering device for carrying out the inventive method comprises a reservoir, a temporary storage unit and a metering chamber. Both the temporary storage unit and the metering chamber can be configured with an adjustable volume.

Abstract: A pumping system for a vehicle wash system in which the pumping system includes a single, variable speed pumping unit. The variable speed pumping unit includes a variable speed motor that is controlled by a variable frequency motor drive such that the single pumping unit supplies water at varying pressures to the vehicle wash system. The vehicle wash system includes a plurality of distribution manifolds that can be selectively opened to apply water and/or a chemical agent to the vehicle during the wash cycle. The variable speed pumping unit of the vehicle wash system is controlled by a wash controller such that the wash controller can selectively control the pressure of water flowing through the distribution manifolds.

Abstract: A continuous flow, steady state fluid delivery and recovery system for a process chamber and processes requiring supercritical fluid and desired additives including co-solvents, for conducting repetitive batch processing operations in an automated environment, for such processes as supercritical carbon dioxide cleaning and processing of semiconductor wafers. The system provides for steady-state operation of fluid flow and byproducts recovery while the process chamber is brought rapidly and repeatedly on and off line as in batch operations and for various process steps.

Abstract: An improved dishwashing machine is proposed which has a dish-cleaning compartment, a dish-rack rotating mechanism, a re-circulating fluid spraying system, a non re-circulating fluid spraying system, a drainage mechanism, a waste filter tank and a controlling means. The dish-cleaning compartment consists of a cover and a casing, which includes a re-circulating fluid spray arm and a non re-circulating fluid spray arm. Automatic chemical dispenser, hot air dish-drying system and ultraviolet light sterilizer are included as optional features. Dish-cleaning operation starts with a flush cycle and then follows by a wash cycle and a rinse cycle. A dish-drying operation is introduced at the end of the rinse cycle, to dry as well as to sanitize dishes.

Abstract: A cleaning tank 30 stores a cleaning liquid to clean the surfaces of semiconductor wafers W immersed in the cleaning liquid. A cleaning liquid supply pipe 33 connects the cleaning tank 30 to a pure water supply source 31. A chemical liquid container 34 stores a chemical liquid, and a chemical liquid supply pipe 36 connects the cleaning liquid supply pipe 33 to the chemical liquid container 34 via an infusion open/close switching valve 35, and a chemical liquid feed means is interposed in the chemical liquid supply pipe 36. The chemical liquid feed means is a reciprocal pump, such as diaphragm pump 37. Thus, a predetermined quantity of the chemical liquid can be infused into pure water or to a drying gas generator to ensure that the chemical liquid of a predetermined concentration be available for washing or drying treatment, regardless of fluctuations in flow amount or pressure of pure water or a drying gas carrier gas.

Abstract: A high pressure pump (14) supplies cleaning fluid from a reservoir (12) to spray nozzles (20) inside a washing chamber (10). The spray nozzles (20) spray the cleaning fluid over a load to be cleaned. Used cleaning fluid is collected in a sump (30). A sump pump (32) drains the sump. The combination of the high pressure pump and sump pump provides more efficient cleaning of the load and eliminates the requirement for a deep sump beneath the washer. A vertical traveler (22), having a pair of counterbalanced spray arms (24), raises and lowers the spray nozzles counter cyclically; a detergent injection system (50) accurately meters a correct amount of detergent is added to the cleaning fluid; and a filtration device (34) filters suspended material from the used cleaning fluid and uses a portion of the cleaning fluid to clean itself.

Abstract: Method and apparatus for cleaning semiconductor devices and other workpieces using an aqueous rinse solution which is de-oxygenated by passing the aqueous rinse solution and a carrier gas through an osmotic membrane degasifier. A cleaning chamber is also disclosed for carrying out the cleaning method.