Abstract: Systems and methods of generating power in a wellbore extending through a subterranean formation are described. A swirling flow of pressurized fluid is passed through a vortex tube to generate a temperature differential between first and second outlets of the vortex tube. The temperature differential is applied to a thermoelectric generator configured to convert the temperature differential into a voltage. The thermoelectric generator produces electrical power that is transmittable to down-hole tools within the wellbore such as an inflow control valve.

Abstract: A thermoelectric device is provided. The thermoelectric device includes first and second electrodes, a first leg, a second leg, and a common electrode. The first leg is disposed on the first electrode and includes one or more first semiconductor pattern and one or more first barrier patterns. The second leg is disposed on the second electrode and includes one or more second semiconductor pattern and one or more second barrier patterns. The common electrode is disposed on the first leg and the second leg. Herein, the first barrier pattern has a lower thermal conductivity than the first semiconductor pattern, and the second barrier pattern has a lower thermal conductivity than the second semiconductor pattern. The first/second barrier pattern has a higher electric conductivity than the first/second semiconductor pattern. The first/second barrier pattern forms an ohmic contact with the first/second semiconductor pattern.

Abstract: A thermoelectric converter is formed by a plenum divided into high and low pressure chambers by a partition and includes a stack of series-coupled alkali-metal thermoelectric cells that projects orthogonally from the partition into one of the chambers.

Abstract: The invention provides systems, apparatuses, and methods for applying periodic thermal management for converting heat into electricity using thermoelectric devices. One method comprises the use of a fluid that performs periodic heating and cooling cycles of thermoelectric devices during fluid evaporation and condensation. The systems, devices, and methods take advantage of the Seebeck effect as a material response between heat and electricity. One apparatus uses alternating pressures to drive fluid evaporation and condensation, thereby producing periodic heating and cooling of the thermoelectric modules. Ultimately, the thermoelectric generator apparatus and method provide improvements in conversion efficiency and reductions in parasitic loss over current solid-state systems.

Abstract: Disclosed is an internal current collection structure of a tubular thermal to electric converting cell including an internal electrode, a solid electrolyte and an external electrode. The internal current collection structure includes: a first current collector which closely contacts with the internal electrode of the tubular thermal to electric converting cell; a second current collector which fixes the first porous current collector to the inside of the tubular thermal to electric converting cell and causes the first current collector to be in close contact with the internal electrode; and a lead wire which is a conductive medium and is located between the first current collector and the second current collector.

Abstract: This patent incorporates several new hybrid thermoelectric element and thermoelectric device designs that utilize additional electronic materials to enhance the flow of charges in the thermoelectric elements without changing thermoelectric nature of the thermoelectric material used. The thermoelectric device efficiency is thereby increased and cost and size are lowered. Thermoelectric conversion devices using the new design criteria have demonstrated comparative higher performance than current commercially available standard design thermoelectric conversion devices.

Abstract: The present invention relates to a thermoelement for use in thermoelectric energy converters for power generation as well as cooling applications. The thermoelement includes a thermoelectric layer with a first side and a second side. Further, the thermoelement includes a first high power factor electrode and a second high power factor electrode. The first high power factor electrode is thermally and electrically attached to the first side of the thermoelectric layer and the second high power factor electrode is thermally and electrically attached to the second side of the thermoelectric layer. Furthermore, the thermoelement includes a plurality of metal layers. The plurality of metal layers are attached to the first high power factor electrode and the second high power factor electrode. In an embodiment of the present invention, a thermoelement comprises a plurality of micro thermoelements that are configured to reduce thermal density at the electrodes.

Abstract: Thermoelectric modules and methods of making thermoelectric modules that include a plurality of row couples each comprising interconnected pairs of n-type and p-type thermoelectric material legs between a first bonding area and a second bonding area, a first connector bonded to each of the first bonding areas of the plurality of row couples, and a second connector bonded to each of the second bonding areas of the plurality of row couples, wherein the first and second connectors provide mechanical support for and electrical connection between the plurality of row couples. The first and second connectors may be connector members having a patterned conductive surface to define a circuit configuration for the module.

Abstract: Silicon-based thermoelectric materials including isoelectronic impurities, thermoelectric devices based on such materials, and methods of making and using same are provided. According to one embodiment, a thermoelectric material includes silicon and one or more isoelectronic impurity atoms selected from the group consisting of carbon, tin, and lead disposed within the silicon in an amount sufficient to scatter thermal phonons propagating through the silicon and below a saturation limit of the one or more isoelectronic impurity atoms in the silicon. In one example, the thermoelectric material also includes germanium atoms disposed within the silicon in an amount sufficient to scatter thermal phonons propagating through the silicon and below a saturation limit of germanium in the silicon. Each of the one or more isoelectronic impurity atoms and the germanium atoms can independently substitute for a silicon atom or can be disposed within an interstice of the silicon.

Abstract: This disclosure examines using lead telluride nanocrystals as well as other materials suitable for thermoelectric conversion, particularly materials with high Figure of Merit values, as coatings on flexible substrates.

Abstract: Electrical power is produced by a first process component, a first heat pipe formed in part by a first cavity within the first process component, and a thermoelectric generator assembly. The thermoelectric generator assembly is thermally coupled on one side to a heat sink and on the other side to the first heat pipe. The first process component is in direct contact with a first process fluid and the first cavity is proximate the first process fluid. The thermoelectric generator assembly produces electrical power.

Abstract: A forward-looking method and system is provided for determining an economically optimal energy dispatching schema to meet the combined demands of heating, cooling and electrical by an energy plant and a facilities plant. The optimal energy dispatching schema is determined for each of a plurality of incremental time segments defined in a forward-looking time period by optimizing these loads. The schema can be used for real time energy dispatching by the energy plant, in an existing energy plant optimization, and/or a new energy plant planning and design over the forward looking time period or any other forward-looking time period.

Abstract: A thermoelectric composite includes a plurality of particles comprising a crosslinked polymer having a heat deflection temperature greater than or equal to 200° F. and a segregated network comprising a first filler material which is disposed between the particles to produce a thermoelectric response in response to application of a voltage difference or temperature difference across the thermoelectric composite. The first filler material includes a carbon material, a metal, a metal disposed on a carbon material, or a combination thereof. A process for preparing a thermoelectric article includes combining a first filler material and a plurality of particles comprising a polymer to form a composition and molding the composition to form a thermoelectric article, wherein the thermoelectric article is configured to produce a thermoelectric response in response to application of a voltage difference or temperature difference across the article.

Abstract: Nanoscale thermocouples are made of a single material and are shape-engineered to contain one or more variations in their width along their length. The mono-metallic nanowire junctions resulting from the width variation(s) exploit a difference in the Seebeck coefficient that is present at these size scales. Such devices have a wide variety of uses and can be coupled with an antenna in order to serve as an infrared detector.

Abstract: Methods of manufacturing a thermoelectric generator via fiber drawing and corresponding or associated thermoelectric generator devices are provided.

Abstract: Compositions related to skutterudite-based thermoelectric materials are disclosed. Such compositions can result in materials that have enhanced ZT values relative to one or more bulk materials from which the compositions are derived. Thermoelectric materials such as n-type and p-type skutterudites with high thermoelectric figures-of-merit can include materials with filler atoms and/or materials formed by compacting particles (e.g., nanoparticles) into a material with a plurality of grains each having a portion having a skutterudite-based structure. Methods of forming thermoelectric skutterudites, which can include the use of hot press processes to consolidate particles, are also disclosed. The particles to be consolidated can be derived from (e.g., grinded from), skutterudite-based bulk materials, elemental materials, other non-Skutterudite-based materials, or combinations of such materials.

Abstract: A metal mixture is prepared, in which an excess amount of Te is added to a (Bi—Sb)2Te3 based composition. After melting the metal mixture, the molten metal is solidified on a surface of a cooling roll of which the circumferential velocity is no higher than 5 m/sec, so as to have a thickness of no less than 30 ?m. Thus, a plate shaped raw thermoelectric semiconductor materials 10 are manufactured, in which Te rich phases are microscopically dispersed in complex compound semiconductor phases, and extending directions of C face of most of crystal grains are uniformly oriented. The raw thermoelectric semiconductor materials 10 are layered in the direction of the plate thickness. And the layered body is solidified and formed to form a compact 12. After that, the compact 12 is plastically deformed in such a manner that a shear force is applied in a uniaxial direction that is approximately parallel to the main layering direction of the raw thermoelectric semiconductor materials 10.

Abstract: A semiconductor element for a thermoelectric module has opposite ends and is made of an n-doped or p-doped semiconductor material and at least one foreign material. The foreign material is mixed with the semiconductor material and forms a fraction of 25 to 75 vol % of the semiconductor element. A method for producing a tubular thermoelectric module includes providing an inner tube having an axis, an inner circumferential surface and a first outer circumferential surface, alternately placing n-doped and p-doped semiconductor elements in direction of the axis, placing second electrical conducting elements radially outwardly of the semiconductor elements so that pairs of adjacent semiconductor elements are electrically conductively connected to each other at the outside to then form a second outer circumferential surface, and compressing the thermoelectric module. A motor vehicle having a thermoelectric module is also provided.

Abstract: An apparatus is described including a hybrid power train having an internal combustion engine and an electric motor. The apparatus includes a hybrid power system battery pack that is electrically coupled to the electric motor. The apparatus includes an energy securing device that is thermally coupled to the hybrid power system battery pack. The energy securing device selectively removes thermal energy from the hybrid power system battery pack, and secure removed thermal energy. The energy securing device secures the removed thermal energy by storing the energy in a non-thermal for, or by using the energy to accommodate a present energy requirement.

Abstract: The present invention relates to a thermoelectric conversion element and a method for manufacturing the same and relates to suppression of breakage and deterioration of the thermoelectric conversion element due to partial pressurization from the vertical direction. This thermoelectric conversion element has: at least one n-type semiconductor body; at least one p-type semiconductor body; a first connecting electrode; a first out-put electrode for n-side output; and a second output electrode for p-side output, wherein areas of respective joint sections of the n-type semiconductor body with the first connecting electrode, the first output electrode, and the second output electrode and of the p-type semiconductor body with the first connecting electrode, the first output electrode, and the second output electrode are greater than respective cross-sectional areas in other positions, in an axial direction, of the n-type semiconductor body and the p-type semiconductor body.

Abstract: A thermoelectric conversion material in a wire structure or quasi-one-dimensional structure is fabricated simply and with good reproducibility. In one mode of the present invention, a thermoelectric conversion structure 100 is provided, having a SrTiO3 substrate 10 having a (210) plane substrate surface and having a concave-convex structure including (100) plane terrace portions 12, 14 and step portions 16 extending along the in-plane [001] axis of the substrate surface, and a thermoelectric conversion material 22 formed on the surface of at least a portion of the concave-convex structure.

Abstract: Thermoelectric materials with high figures of merit, ZT values, are disclosed. In many instances, such materials include nano-sized domains (e.g., nanocrystalline), which are hypothesized to help increase the ZT value of the material (e.g., by increasing phonon scattering due to interfaces at grain boundaries or grain/inclusion boundaries). The ZT value of such materials can be greater than about 1, 1.2, 1.4, 1.5, 1.8, 2 and even higher. Such materials can be manufactured from a thermoelectric starting material by generating nanoparticles therefrom, or mechanically alloyed nanoparticles from elements which can be subsequently consolidated (e.g., via direct current induced hot press) into a new bulk material. Non-limiting examples of starting materials include bismuth, lead, and/or silicon-based materials, which can be alloyed, elemental, and/or doped. Various compositions and methods relating to aspects of nanostructured thermoelectric materials (e.g., modulation doping) are further disclosed.

Abstract: A tubular thermoelectric device wherein conductive substrates and completion elements serve a multiple role of structural support, thermal conductance and electrical conductance. Improved system thermoelectric performance accrues from the minimization of the number of interfaces between dissimilar materials, leading to a reduction in system thermal parasitics and system electrical parasitics. By engineering the shape and orientation of substrates and completion elements, improvements in heat transfer to heat reservoirs is accomplished and improved electrical conductivity is accomplished.

Abstract: A multi-layer thermoelectric module and a fabricating method thereof are provided. The module includes two thermoelectric element sets and a metal electrode set, in which the thermoelectric element sets are corresponding to different operating temperature ranges. Each thermoelectric element set includes a thermoelectric unit, an interfacial adhesion layer, a diffusion barrier layer and a high melting-point metal layer. In the method, the thermoelectric unit, the interfacial adhesion layer, and the diffusion barrier layer are sequentially formed on the thermoelectric unit. Then, two high melting-point metal layers are formed respectively on the electrode layers of the metal electrode set.

Abstract: The invention relates to a thermoelectric device comprising: a plurality of elements (4), called thermoelectric elements, allowing an electrical current to be produced from a temperature gradient between two of their faces (3a, 3b), called contact faces; electrically conductive tracks (20); and a solder joint between said contact faces (3a, 3b) and the electrically conductive tracks. According to the invention, said solder comprises an alloy based on aluminum and silicon. The invention also relates to a process for manufacturing such a device, using solid-state soldering.

Abstract: A power management system for an energy harvesting device configured to provide a source voltage. The power management system may include a conditioning and control circuit configured to perform an initialization process by accumulating energy from the source voltage until an output voltage becomes regulated for a load. The power management system may include a priming circuit configured to supplement the source voltage during a load period upon actuation of a power management switch which may cause the transferring of a priming charge from a low-leakage energy storage element to the conditioning and control circuit. The conditioning and control circuit may combine the priming charge with the energy accumulating from the source voltage. The initialization process may cause the output voltage for the load to become regulated during the load period following actuation of the power management switch.

Abstract: In order to achieve a thermoelectric transducer exhibiting a higher conversion efficiency and an electronic apparatus including such a thermoelectric transducer, a thermoelectric conversion device is provided, including a semiconductor stacked structure including semiconductor layers stacked with each other, the semiconductor layers being made from different semiconductor materials, in which a material and a composition of each semiconductor layer in the semiconductor stacked structure are selected so as to avoid conduction-band or valence-band discontinuity.

Abstract: Solar thermoelectric generators (STEGs) are solid state heat engines that generate electricity from concentrated sunlight. A novel detailed balance model for STEGs is provided and applied to both state-of-the-art and idealized materials. STEGs can produce electricity by using sunlight to heat one side of a thermoelectric generator. While concentrated sunlight can be used to achieve extremely high temperatures (and thus improved generator efficiency), the solar absorber also emits a significant amount of black body radiation. This emitted light is the dominant loss mechanism in these generators. In this invention, we propose a solution to this problem that eliminates virtually all of the emitted black body radiation. This enables solar thermoelectric generators to operate at higher efficiency and achieve said efficient with lower levels of optical concentration. The solution is suitable for both single and dual axis solar thermoelectric generators.

Abstract: In accordance with one embodiment of the present disclosure, a thermoelectric device includes a plurality of thermoelectric elements that each include a diffusion barrier. The diffusion barrier includes a refractory metal. The thermoelectric device also includes a plurality of conductors coupled to the plurality of thermoelectric elements. The plurality of conductors include aluminum. In addition, the thermoelectric device includes at least one plate coupled to the plurality of thermoelectric elements using a braze. The braze includes aluminum.

Abstract: A thermoelectric power generating module incorporates compliance into the module using a three-dimensional flexible connector. The flexible connector may relieve thermal stress and improve reliability for thermoelectric modules. In addition, the connector may provide a buffer layer (e.g., cushion) to damp mechanical vibrations. In further embodiments, a thermal interface structure for a thermoelectric device includes a thermally conductive body comprising a first compliant surface for directly interfacing with a first component of the thermoelectric device and a second compliant surface, opposite the first surface, for directly interfacing with a second component of the thermoelectric device.

Abstract: Disclosed are apparatus and methodology for constructing thermoelectric devices (TEDs). N-type elements are paired with P-type elements in an array of pairs between substrates. The paired elements are electrically connected in series by various techniques including brazing for hot side and/or also cold side connections, and soldering for cold side connections while being thermally connected in parallel. In selected embodiments, electrical and mechanical connections of the elements may be made solely by mechanical pressure.

Abstract: A thermoelectric power generating module incorporates compliance into the module using a three-dimensional flexible connector. The flexible connector may relieve thermal stress and improve reliability for thermoelectric modules. In addition, the connector may provide a buffer layer (e.g., cushion) to damp mechanical vibrations. In further embodiments, a thermal interface structure for a thermoelectric device includes a thermally conductive body comprising a first compliant surface for directly interfacing with a first component of the thermoelectric device and a second compliant surface, opposite the first surface, for directly interfacing with a second component of the thermoelectric device.

Abstract: Disclosed are apparatus and methodology for constructing thermoelectric devices (TEDs). N-type elements are paired with P-type elements in an array of pairs between substrates. The paired elements are electrically connected in series by various techniques including brazing for hot side and/or also cold side connections, and soldering for cold side connections while being thermally connected in parallel. In selected embodiments, electrical and mechanical connections of the elements may be made solely by mechanical pressure.

Abstract: The disclosure provides a thermoelectric composite sandwich structure with an integrated honeycomb core and method for making. The thermoelectric composite sandwich structure comprises two prepreg composite face sheets and an integrated honeycomb core assembled between the face sheets. The honeycomb core comprises a plurality of core elements bonded together with a core adhesive. Each core element has a first side substantially coated with a negative Seebeck coefficient conductive material having a plurality of first spaced gaps, and each core element further has a second side substantially coated with a positive Seebeck coefficient conductive material having a plurality of second spaced gaps. The honeycomb core further comprises a plurality of electrical connections for connecting in series the first side to the second side. A temperature gradient across the honeycomb core generates power.

Abstract: The present disclosure provides a thermoelement with improved figure of merit for use in thermoelectric devices and a method of manufacturing the thermoelement. The thermoelement comprises metal layers, high power factor electrodes, a thermoelectric layer and a phonon blocking layer. The thickness of the thermoelectric layer is less than a thermalization length to achieve decoupling of phonons and electrons in the thermoelement. The phonon blocking layer reduces phonon conduction without significantly influencing electronic conduction. In an embodiment, the high power factor electrodes are made of materials with high Seebeck coefficient and high thermoelectric power factor that reduce thermal losses at interfaces of the thermoelement. The metal layers form outermost layers of the thermoelement and geometrically shaped to reduce heat flux in the thermoelement.

Abstract: The invention relates to a thermoelectric-based power generation system designed to be clamped onto the outer wall of a steam pipe or other heating pipe. The system can include a number of assemblies mounted on the sides of a pipe. Each assembly can include a hot block, an array of thermoelectric modules, and a cold block system. The hot block can create a thermal channel to the hot plates of the modules. The cold block can include a heat pipe onto which fins are attached.

Abstract: A method of producing a nanocomposite thermoelectric conversion material includes preparing a solution that contains salts of a plurality of first elements constituting a thermoelectric conversion material, and a salt of a second element that has a redox potential lower than redox potentials of the first elements; precipitating the first elements, thereby producing a matrix-precursor that is a precursor of a matrix made of the thermoelectric conversion material, by adding a reducing agent to the solution; precipitating the second element in the matrix-precursor, thereby producing slurry containing the first elements and the second element, by further adding the reducing agent to the solution; and alloying the plurality of the first elements, thereby producing the matrix (70) made of the thermoelectric conversion material, and producing nano-sized phonon-scattering particles (80) including the second element, which are dispersed in the matrix (70), by filtering and washing the slurry, and then, heat-treating t

Abstract: A transverse thermoelectric device includes a superlattice body, electrically conductive first and second contacts, and first and second thermal contacts. The superlattice body extends between opposite first and second ends along a first direction and between opposite first and second sides along a different, second direction. The superlattice body includes alternating first and second layers of crystalline materials oriented at an oblique angle relative to the first direction. The electrically conductive first contact is coupled with the first end of the superlattice and the electrically conductive second contact is coupled with the second end of the superlattice. The first thermal contact is thermally coupled to the first side of the superlattice and the second thermal contact is thermally coupled to the second side of the superlattice. A Seebeck tensor of the superlattice body is ambipolar.

Abstract: Provided is nano thermoelectric powder with a core-shell structure. Specifically, the nano thermoelectric powder of the core-shell structure of the present invention forms coating layer on the surface of nano powder prior to sintering of the nano powder. An advantage of some aspects of the present invention is that it provides thermoelectric elements having reduced thermal conductivity and enhanced thermoelectric efficiency without affecting electrical conductivity using the nano thermoelectric powder with the core-shell structure.

Abstract: A method is provided for producing a thermoelectric component having at least one pair of thermoelectric legs, including an n-leg and a p-leg, wherein both legs are welded to an electrically conductive contact material, and wherein the n-leg and the p-leg of the pair of legs are welded in separate welding steps to the contact material. A thermoelectric component produced by the method is also provided.

Abstract: A method is disclosed for tailoring the thermoelectric response of a thermocouple to that desired by a user. The method comprises the steps of; (a) selecting a first thermoelectric material, (b) selecting a second thermoelectric material having dissimilar thermoelectric properties to the first thermoelectric material, a thermocouple formed from the first thermoelectric material and the second thermoelectric material having a known thermoelectric response, and (c) modifying the chemical composition of at least one of the first thermoelectric material and the second thermoelectric material to produce a thermocouple having a tailored thermoelectric response. In specific embodiments, the chemical composition may be modified by selectively depleting one or more chemical elements from the thermoelectric material or by selectively adding, or increasing the proportion of, one or more elements to the thermoelectric material.

Abstract: Technologies are generally described for recovery of energy from engines. The described technology may be applied to systems, methods, and/or apparatuses. An example exhaust energy recovery apparatus (50) may include at least one thermal to electrical energy conversion element (60) having at least one side for thermal coupling along a substantial length (34, 35, 36) of an exhaust duct (30) for a combustion engine. The example apparatus (50) may also include a cover (52) located over at least a portion of the exhaust duct (30) adjacent to the at least one energy conversion element (60). A channel (53) may be formed between the cover (52) and an exterior portion of the exhaust duct (30), the channel having at least one inlet (54, 56) for admission of cooling fluid.

Abstract: In a thermoelectric module consisting of p- and n-conducting thermoelectric material pieces which are alternately connected to one another via electrically conductive contacts, the thermoelectric module (19) is thermally conductively connected to a micro heat exchanger (13) which comprises a plurality of continuous channels having a diameter of at most 1 mm, through which a fluid heat exchanger medium can flow.

Abstract: It is provided a thermoelectric conversion element used at a high operation temperature of 500° C. or higher and including a laminate structure and electrodes. The laminate structure includes a plurality of p-type silicide substrates, and a plurality of n-type silicide substrates alternately laminated with each other, and adhesive layers each adhering the p-type and n-type silicide substrate adjacent to each other. The adhesive layer is made of a cured matter of an inorganic adhesive of a mixture of an inorganic binder and a filler. The electrodes are formed on the laminate structure and electrically connecting the p-type and n-type silicide substrates. The p-type and n-type silicide substrates have thicknesses of 0.5 mm or larger and 3.0 mm or smaller, the adhesive layer has a thickness of 0.5 mm or larger and 2.0 mm or smaller and has a thermal expansion coefficient of 7×10?6/° C. or larger and 16×10?6/° C. or smaller.

Abstract: A thermoelectric module may include a fluid-tight housing having at least one thermoelectrically active element arranged therein. The at least one thermoelectrically active element may have a coating. The housing may form an outer encapsulation and the coating may form an inner encapsulation for the at least one thermoelectrically active element.

Abstract: A self-powered boiler comprising a burner that burns a fuel to produce a hot combustion product that is used to heat a fluid and a thermoelectric generator (TEG) system comprising a first side in thermal communication with the hot combustion product and a second side in thermal communication with a lower temperature region of the boiler, and a plurality of thermoelectric converters disposed therebetween for generating electric power, wherein the electric power generated by the TEG system is equal to or greater than a total electric power consumed by the boiler under normal operating conditions.

Abstract: A thermoelectric conversion element of the present invention includes: a magnetic layer; and an electrode layer formed on the magnetic layer. The electrode layer includes: a first region, and a second region having lower spin current—electric current conversion efficiency and resistivity than those of the first region.

Abstract: Some embodiments provide a waste heat recovery apparatus including an exhaust tube having a cylindrical outer shell configured to contain a flow of exhaust fluid; a first heat exchanger extending through a first region of the exhaust tube, the first heat exchanger in thermal communication with the cylindrical outer shell; a second region of the exhaust tube extending through the exhaust tube, the second region having a low exhaust fluid pressure drop; an exhaust valve operatively disposed within the second region and configured to allow exhaust fluid to flow through the second region only when a flow rate of the exhaust fluid becomes great enough to result in back pressure beyond an allowable limit; and a plurality of thermoelectric elements in thermal communication with an outer surface of the outer shell.

Abstract: A thermoelectric conversion element formed by laminating, on a substrate having a porous anodic oxidation film of aluminum, a thermoelectric conversion layer which contains an inorganic oxide semiconductor or an element having a melting point of 300° C. or higher, as a main component, and which has a void structure; and a method of producing the same.

Abstract: A method of manufacturing a substrate for a photovoltaic cell, in which the high optical characteristic in a long-wavelength range available for the photovoltaic cell can be maintained, and at the same time, the amount of hazing can be increased. The method includes the step of forming a zinc oxide (ZnO) thin film layer doped with a dopant on a transparent substrate, and the step of controlling the surface structure of the zinc oxide thin film layer by etching the zinc oxide thin film layer using hydrogen plasma.