Abstract: A system for processing one or more substrates according to the present invention includes a diversion valve that can deliver two or more process fluids to a dispensing device through a common line/pipe. The present invention also includes related methods.

Abstract: A method and apparatus for recycling a process fluid from a drain of a semiconductor process tool. The process fluid may be an acidic cobalt solution or an electroless cobalt solution used in a semiconductor process step to prevent electromigration in copper interconnects. The used process fluid is collected from the tool drain and recycled back to the tool inlet if a condition of the fluid is within a predetermined range. Otherwise, the used process fluid is drained from the system. The system may also operate in a bleed and feed mode where a portion of the used process fluid is periodically drained from the system.

Abstract: A system for processing one or more substrates according to the present invention includes a diversion valve that can deliver two or more process fluids to a dispensing device through a common line/pipe. The present invention also includes related methods.

Abstract: A collection valve for use in a water reclamation system includes a drain pipe and a collection port assembly. The drain pipe includes an inlet port connectable to a drain line from which gray water is supplied, a collection inlet, and an outlet port. The collection port assembly includes a resilient cap and a collection port disposed to receive gray water flowing into the collection inlet and connectable to a gray water drain line. The resilient cap is operable to (i) close the collection inlet to permit water flow from the inlet port to the outlet port, or (ii) open the collection inlet to permit water flow from the inlet port to the collection port, whereby the resilient cap does not physically obstruct water flow within the drain pipe between he inlet port to the outlet port in either operational condition (i) or (ii).

Abstract: An adjustable high pressure, low flow metering valve provides a sleeve extending about a restrictor shaft, the sleeve having a narrow helical groove formed in the inside diameter. A restrictor shaft within the sleeve encloses the groove and forms a sealed helical flow channel. The length of the flow channel is varied by withdrawing the restrictor shaft in the sleeve, whereby only a selected axial extent of the groove is enclosed by the sleeve to form a confined flow path. The shaft is provided with a threaded engagement in the body of the metering valve, so that rotation of an adjustment knob provides extremely fine control of the length of the flow path, and thus highly accurate selection of the flow resistance.

Abstract: A land (56) on an index member (32) disposed in the interior chamber of a manifold (38) is aligned with an actuating member (34) and thereby holds open a check valve (36) through which fluid flows into the manifold's interior chamber, through a control valve (12), and out a manifold outlet (74). At the same time, another actuating pin (42) is so aligned with a recess (58) in the indexing member (32) as to permit another check valve (44) to prevent flow through itself into the manifold chamber. When the control valve is closed, flow stops, and pressure builds up in the manifold chamber. The index member (32) is accordingly driven against the force of a bias spring (48) to a lower position, in which a lower cam-follower surface (82) engages a lower cam surface (84). That engagement rotates the index member to a position in which it permits pressure to be communicated through both check valves (36 and 44) into the manifold chamber.

Abstract: A waste diversion system for diverting the effluent from a manufacturing process, such as polishing the surfaces of silicon wafers, has an electrically controlled diverter valve for receiving the effluent and diverting it either to a “dirty” output for waste treatment, or to a “clean” output for recycling or other treatment. To determine whether the effluent is “dirty” or “clean”, parameter sensors are located to sense particular parameters such as turbidity, conductivity, ORP, pH, or ion content, as desired. One sensor is located to sense the parameters of effluent flowing into the diverter valve; and the other sensor is located to sense the parameters (typically, the same parameters) of the flow from the “dirty” or waste side of the diverter valve. Only when both of the sensors indicate that the effluent is “clean” is a signal provided to the diverter valve to switch it to the clean output.

Abstract: An electromagnetically controlled pressure regulating valve includes a hollow housing bounding a user channel having one end to be connected to a hydraulic medium user and another end, and respective supply and a discharge channels communicating with the interior of the housing between the ends, and at other end of the user channel, respectively. A closing member is mounted in the housing for movement toward and away from a closing position in which it sealingly separates the user channel from the discharge channel and is acted upon at the other end of the user channel by an armature with a variable combined force applied to the armature by an electrically energizable coil and by a return spring. A throttling device including at least two throttling orifices extending in fluid flow parallelism with one another between the supply and user channels and each having a length and a transverse dimension that are in a ratio of at least 2:1 is interposed between the supply and user channels.

Abstract: A switch valve is provided in a refrigerant circuit. The switch valve includes a first valve mechanism, a second valve mechanism, and a single valve housing incorporating the first and second valve mechanisms. The first valve mechanism is an electromagnetic valve. The first valve mechanism selectively connects and disconnects an outlet of a compressor with an inlet of a condenser in accordance with an electric current supply. The second valve mechanism is a differential pressure valve. The second valve mechanism selectively connects and disconnects the outlet of the compressor with an inlet of an evaporator in accordance with a difference between the pressure at the outlet of the compressor and the pressure at the inlet of the condenser. In this manner, the single switch valve, which includes the first and second valve mechanisms incorporated in the same valve housing, switches the refrigerant circuit between a path for a cooling operation and a path for a warming operation.