Abstract: The invention relates to a method for lowering the pressure in a device charge-discharge lock from atmospheric pressure to a sub-atmospheric transfer pressure, said lock comprising a chamber in which at least one substrate is arranged at atmospheric pressure, said method comprising: a first step (101), in which first primary pumping is carried out from atmospheric pressure to a first characteristic threshold, using a primary pump with limited pumping rate, while isolating a turbomolecular pumping of said chamber; a second step (102) following said first step (101), in which a second primary pumping is carried out, faster than in said first step, to a second characteristic threshold, maintaining the isolation of the turbomolecular pumping; a third step (103) following said second step (102), in which secondary pumping is performed using said turbomolecular pumping upstream from the first pumping, and the primary pump chamber is isolated. The invention also relates to a device for implementing the method.

Abstract: Method and device for detecting the flow of liquid, in particular water, in a consuming installation, comprising at least one opening/closing means (3) for supplying liquid, this installation being supplied via an inlet pipe (2) fitted with a solenoid valve (5), a pressure sensor (6) upstream of the solenoid valve and a pressure sensor (7) downstream of the solenoid valve.

Abstract: The gas flow restrictor includes a cylindrical body having threads for mounting the body in a gas flow line. One end of the body is closed and includes a plurality of angularly spaced plugs having a predefined diameter that may be the same or different from each other. Each plug is selectively removable from a correspondingly sized orifice, singly or in combination, to set the desired gas flow and thereby reduce incoming gas flow pressure through the lines.

Abstract: A latching valve includes a housing, a supply port, defined in the housing, which receives supply pressure, a delivery port defined in the housing, an exhaust port, defined in the housing, and an apply port defined in the housing. A housing bore fluidly communicates with the supply port, the delivery port, the exhaust port, and the apply port fluidly. A shuttle is sealingly and movably secured in the housing bore. The shuttle is alternately set to one of an apply position and a release position as a function of sequential pilot pressures at the apply port acting on the shuttle, and as a function of the supply pressure acting on one of an apply pair of sealed seats with different diameters in the housing bore and a release pair of sealed seats with different diameters in the housing bore. The delivery port fluidly communicates with the supply port while the shuttle is in the apply position. The delivery port fluidly communicates with the exhaust port while the shuttle is in the release position.

Abstract: Methods and apparatus are provided to control flow separation of an ambient flow along a surface and about a turret, such as by reducing flow separation aft of the turret. By reducing flow separation, the resulting turbulence may be similarly reduced such that the performance of a system, such as a laser system, housed by the turret may be improved. To reduce flow separation, a motive flow may be provided by ejector nozzles that open through the surface and are positioned proximate to and aft of the turret relative to the ambient flow. The motive flow has a greater velocity than the ambient flow to thereby create a region aft of the turret of reduced pressure relative to an ambient pressure. Within this region of reduced pressure aft of the turret, a portion of the ambient flow mixes with the motive flow, thereby reducing or eliminating flow separation.

Abstract: A gas supply system comprises a person-support surface, a garment, and a gas supply. The person-support surface includes a chamber configured to contain a gas therein. The garment includes a chamber configured to contain a gas therein. The gas supply is configured to supply a gas to both the garment and the person-support surface.

Abstract: A microfluidic dispensing system may include diaphragm pumps that may be used for aspirating in corresponding ingredients via a nozzle or a tip from supply sources. Tips may be placed in contact with ingredient supply sources, and through repeated actuation of the diaphragm pumps, desired volumes of ingredients are aspirated into the tips. In some cases, an air plug is aspirated into the tips before an ingredient. Once the desired volume of each ingredient is reached within each tip, the ingredients are dispensed from the tips through repeated actuation of corresponding diaphragm pumps.

Abstract: The method of charging a tank with a gas product up to a desired pressure and temperature without increasing the gas in the tank to a pressure and temperature higher than a desired pressure and temperature, comprising pressurizing the incoming gas to be put into the tank to a pressure equal to or higher than the pressure of the resident gas already in the tank, cooling the incoming gas to a temperature lower than the resident gas, mixing the incoming gas with the resident gas up to the desired pressure such that the pressure and temperature of the combined gas will be increased without increasing the temperature and pressure of the resident gas to a pressure and temperature higher than the desired pressure or temperature.

Abstract: A microfluidic device for nucleic acid analysis includes a monolithic semiconductor body (13), a microfluidic circuit (10), at least partially accommodated in the monolithic semiconductor body (13), and a micropump (11). The microfluidic circuit (10) includes a sample preparation channel (18) formed on the monolithic semiconductor body (13) and at least one microfluidic channel (20, 22) buried in the monolithic semiconductor body (13). The micropump (11), includes a plurality of sealed chambers (40) provided with respective openable sealing elements (41) and having a first pressure therein that is different from a second pressure in the microfluidic circuit (10). In addition, the micropump (11) and the microfluidic circuit (10) are configured so that opening the openable sealing elements (41) provides fluidic coupling between the respective chambers (40) and the microfluidic circuit (10). The openable sealing elements (41) are integrated in the monolithic semiconductor body (13).

Abstract: Apparatus including a rigid fluid-permeable body, having a first non-planar fluid-permeable body surface, and having a second fluid-permeable body surface; a plurality of fluid-permeable cells in the fluid-permeable body; and a plurality of raised micro-scale features on the first fluid-permeable body surface. Apparatus including a fluid-permeable body having first and second fluid-permeable body surfaces; a plurality of fluid-permeable cells in the fluid-permeable body; a plurality of raised micro-scale features on the first fluid-permeable body surface; and a fluid containment body forming, together with the second fluid-permeable body surface, a second fluid containment structure. Methods, utilizing an apparatus, of treating a liquid with a fluid, and of maintaining a superhydrophobic surface.

Abstract: A digital tire pressure gauge has a housing having a first and a second end. A port at the first end of the housing is adapted to engage with and open a needle valve of a tire valve stem. The gauge also includes a pressure sensor and a processor in electronic communication with the pressure sensor. A bleed valve is disposed in the housing and a bleed lever is in contact engagement with the bleed valve. When the port is coupled to the tire valve stem, in a first operational mode, the bleed valve is closed and an air pressure measurement is obtained. In a second operational mode, pressing the bleed lever causes the bleed valve to open and to allow air to be bled out from the tire via the pressure gauge.

Abstract: The present invention provides novel motor-compressor systems and methods useful for handling acid gas, by-produced produced in large quantities from natural gas refining. In one embodiment, a novel motor-compressor system comprises first compressor; a pressure vessel configured to receive a compressed gas from the first compressor; a heat exchanger coupled to the pressure vessel configured to cool the compressed gas and provide a cooled compressed gas; and an electric motor housed within the pressure vessel, wherein the electric motor is mechanically coupled to the first compressor, and wherein the pressure vessel is configured to receive at least a portion of the cooled compressed gas from the heat exchanger and contact the electric motor. The methods and systems described herein are particularly useful in acid gas re-injection operations where large quantities of acid gas are subjected to compression at high pressure and leakage prevention is critical.

Abstract: A flow control device comprises an inlet side; an outlet side; and a sealing member between the inlet and the outlet side. A diaphragm selectively opens or closes or control a degree of closure of an opening between the inlet and the outlet sides depending on the proximity of the diaphragm to the sealing member. The diaphragm comprises a first portion of one side of the diaphragm exposed to the inlet side fluid pressure and a second portion of the same side of the diaphragm exposed to the outlet side fluid pressure and the opposite side of the diaphragm exposed to a control fluid pressure. The movement of the diaphragm between the open and closed states is governed by the inlet, outlet and control pressures which cause deformation of the diaphragm.

Abstract: A system, method, and apparatus for containing oil and gas leaking from an underwater wellhead or other man-made structure. The apparatus includes a conduit having an upper end and a lower end with an opening. The conduit is sized for the lower end to be positioned over a plume leaking from the man-made structure and the upper end to be substantially near or at the water surface. In addition, a containment tank is located in the upper portion of the interior of the conduit. The apparatus also includes a first tube for pumping liquid located within the containment tank out of the interior of the conduit, thereby creating a pressure differential between a pressure within the interior of the conduit and a pressure outside the conduit to induce an upward flow of fluids within the conduit. The interior pressure of the conduit is lower than the pressure outside the conduit. The apparatus also includes a second tube for releasing gas from the interior of the conduit.

Abstract: An automated system (10) and methods (11) for priming a fluid chamber (12) of a fluid dispensing valve (14) with fluid (16) from fluid material source that includes a vacuum source (46), a valve priming station (32), a vacuum switch (54), and a controller (62). The valve priming station (32) has a boot (40), a vacuum chamber (36), and a vacuum channel (42) in the boot (40). The vacuum channel (42) connects with the vacuum source (46) via the vacuum chamber (36). The boot (40) sealingly engages a valve nozzle (28) of the fluid dispensing valve (14) so that the vacuum chamber (36) connects the vacuum source (46) with the fluid chamber (12). The vacuum switch (54) couples with the vacuum channel (42) via the vacuum chamber (36) and has an opened and closed position based upon a vacuum level in the vacuum chamber (36).

Abstract: Embodiments of the invention provide a vacuum valve apparatus and method to provide a vacuum to equipment. The vacuum valve can include an air port tube, a vacuum port tube, a motor, and a control arm coupled to the vacuum port tube and the motor. The motor can cause the control arm to move in an arc in order to flex the vacuum port tube and selectively create the vacuum and vent the vacuum provided to the equipment.

Abstract: A Helmholtz damper, including an enclosure, a neck extending from the enclosure, and a pipe for inserting into the neck. The portions of the pipe inserted into the neck is adjusted to regulate a resonance frequency of the Helmholtz damper.

Abstract: A constant flow regulator device for maintaining a constant flow of fluid when a variable fluid pressure is applied, comprising an inlet duct (506) for incoming fluid, a housing (500), and a movable partition (502) facing the inlet duct and being subjected to an elastic force. A fluid passage (510) of variable cross section area is formed between the inlet duct and the movable partition. The housing and movable partition form an inner compartment (504) in fluid communication with the inlet duct for establishing a fluid pressure inside the inner compartment approximately equal to the fluid pressure in the inlet duct. The size of the movable partition is significantly greater than the size of the inlet duct such that, in use, the partition is moved towards the inlet duct against the elastic force when the fluid pressure in the inlet duct increases to reduce said fluid passage cross section area, and vice versa, thereby maintaining constant fluid flow.

Abstract: The closing and sealing device for use in air admittance valves includes a valve housing (10) designed to be connected to the waste water pipe system, an upper cap (14) and a valve closing and sealing device which includes a fixed valve seat (22) and a movable closing member (24). The housing (10) includes at least one passageway (16) in communication with the surrounding atmospheric air, and at least one passageway (18) in connection with the inner space (19) of the sewage system, each of the passageways being in contact with the movable closing member (24).

Abstract: A method is provided for operating a motor vehicle with a fuel tank and a filler opening that can be closed by a cap. The filer opening and the cap can be covered by a tank flap that can be moved between a covering position and an exposure position. To simplify refueling of the motor vehicle, a pressure equalization between the fuel tank and the environment is carried out if opening or imminent opening of the tank flap is detected.

Abstract: Disclosed are a method and device for modulating the downstream pressure output of a pressure reducing hydraulic control valve in response to the flow demand fluctuation the method comprising. Included is an adjustable pressure pilot valve mechanism having a drive element extending from the control valve. The drive element is displaceable in response to a flow capacity through the hydraulic control valve. Also included is an adjustable pressure pilot valve deployed along a control tube connecting an upstream pressure port to a downstream pressure port, the adjustable pressure pilot valve associated with the drive element such that adjustable settings of the adjustable pressure pilot valve are responsive to displacement of the drive element.

Abstract: An appliance system including a module removably mounted to an appliance, one or more removable gas canisters operably connected to the module, and a food retaining enclosed space operably connected to the module. The one or more gas canisters supply a modified atmosphere in the food retaining enclosed space to produce a modified atmosphere that enhances preservation of the food contained in the food retaining enclosed space.

Abstract: A device for facilitating controlled transfer of a flowable material to a site within an interior cavity such as a vessel which employs a housing having at least one opening dimensioned and positioned to direct the flowable material rearwardly of the device. Through appropriate application of positive pressure, the device can be used to deliver the flowable material to the cavity or vessel. Apparatus employing the device and methods of using the same are also disclosed.

Abstract: Water is supplied from a mains water supply station to a main supply conduit which feeds a plurality of regional supply networks, via respective pressure reducing valves, at respective regional pressures. Each regional supply network has a boundary value for a parameter related to a property of the water, which may be water pressure or concentration of a water treatment agent. Each network has a critical point at which the value of the parameter is deemed least acceptable. Water supply characteristics in respect of each regional supply network are monitored and the water supplied into the main supply conduit is processed to ensure acceptable values of the parameter are maintained at each critical point.

Abstract: A method for removing fluid in a microfluidic device, the microfluidic device having a fluid channel, a first well, and a second well, the first well and the second well being coupled to a first end of the fluid channel, the method including applying a pressure difference between the second well and the first well, and applying a pressure difference between the first end and a second end of the fluid channel being below a certain threshold, for at least partly removing a first fluid from a first supply line coupled between the first well and the first end of the fluid channel.

Abstract: A system and a method for recovering and increasing the pressure of seal leak gas for recycle or passage to further processing.

Abstract: A pressure relief valve includes a base including a fluid inlet and outlet, a nozzle, and a disc. The nozzle includes a substantially annular seat, a substantially cylindrical seat inlet, and a substantially cylindrical bore in fluid communication with the seat inlet. A ratio between a bore diameter and a seat diameter is a constraint ratio. The disc contacts the seat to seal the fluid inlet to substantially prevent fluid communication between the fluid inlet and outlet when the valve is closed. The disc and the disc holder are adapted to be urged by fluidic pressure such that contact between the disc and the seat is removed at the fluidic pressure to allow fluid communication between the fluid inlet and the cavity. Dimensions of the disc, the disc holder, and the nozzle may be functions of the seat diameter and limited by the constraint ratio.

Abstract: A method for controlling the liquid stroke of a pneumatically driven jigging machine for the separation of mineral mixtures uses a jigging machine that consists of an air chamber and a jigging chamber with a jigging bed located above it. The stroke of the liquid in the jigging machine depends on the period of time the air is allowed into the chamber. The differential pressure between the air chamber and the jigging chamber as parameter for controlling the jigging machine is measured, and as a result, a much better opportunity for controlling will be achieved, and disruptions in the jigging bed are detected and can be counteracted.

Abstract: NuChain supply chain and disposal chain apparatus are created by NuPurposing containers and conditioning and transforming such containers from fluent material delivery containers into waste collection containers realizes operational efficiency. Novel structural features of waste collection systems allows bottle docking for the ingress of collection material into fluent material distribution containers as well as operation as a non-bottle docking waste collection system. The application moving canister and lid pillars closer together respectively operates to contain a force being drawn away from the collection system by sealing the system. The application moving other canister and lid pillars closer together operates to unseal the system.

Abstract: A full flow pressure relief valve includes a housing having an inlet opening on its bottom and an outlet opening on one of its side. A piston is positioned inside the housing adapted to move from a set position where the piston seals the inlet opening to a sprung position where the piston is removed from the inlet opening. A lock is biased by a spring in a perpendicular direction toward the side of the piston. The lock is adapted to hold the piston in the set position until a relief pressure is supplied in the inlet opening, where the lock is adapted to release the piston to the sprung position.

Abstract: Methods and systems for storing kinetic energy in a fluid-base power circuit. A regenerative control valve manifold diverts fluid flow from a hydraulic device performing a first operation into an accumulator. The accumulator stores a fluid volume sufficient to perform a second operation. The regenerative control valve manifold connects the accumulator to the power circuit providing a fluid flow and charge pressure sufficient to perform the second operation.

Abstract: A method of servicing a subterranean formation with a servicing fluid, the method comprising providing a first component of the servicing fluid to a first high-pressure pump at a first pressure, providing a second component of the servicing fluid to a second high-pressure pump at a second pressure, increasing the pressure of the first component of the servicing fluid at the first high-pressure pump to a third pressure, wherein the third pressure is greater than the first pressure, increasing the pressure of the second component of the servicing fluid at the second high-pressure pump to a fourth pressure, wherein the fourth pressure is greater than the second pressure, communicating the first component of the servicing fluid to a high-pressure manifold, communicating the second component of the servicing fluid to the high-pressure manifold, communicating the first component of the servicing fluid from a first high-pressure manifold outlet to a wellhead located at a wellbore, communicating the second component

Abstract: A method is provided for pumping fluid through a channel of a microfluidic device. The channel has an input port and an output port. The channel is filled with fluid and a pressure gradient is generated between the fluid at the input port and the fluid at the output port. As a result, fluid flows through the channel towards the output port.

Abstract: Methods and apparatus for twin chamber processing systems are disclosed, and, in some embodiments, may include a first process chamber having a first vacuum pump to maintain a first operating pressure in a first processing volume selectively isolatable by a first gate valve disposed between the first processing volume and the first vacuum pump; a second process chamber having a second vacuum pump for maintaining a second operating pressure in a second processing volume selectively isolatable by a second gate valve disposed between the second processing volume and the second vacuum pump; and a shared vacuum pump coupled to the first and second processing volumes to reduce a pressure in each processing volume below a critical pressure level, wherein the shared vacuum pump can be selectively isolated from any of the first or second process chambers or the first or second vacuum pumps.

Abstract: Disclosed are systems and methods for a fluid transportation system having a first flexible tube with an inner wall. The fluid transportation system also has a second flexible tube with an outer wall. The second tube is located inside the first tube and a standoff is located between the inner wall of the first tube and the outer wall of the second tube. The first flexible tube is configured to transport a first fluid and the second flexible tube is configured to transport a second fluid. The first and second flexible tubes are configured such that the first fluid isolates the second fluid from an ambient environment, and the first fluid can be monitored for leakage.

Abstract: Systems and methods provide pneumatic control of a slam shut valve system.

Abstract: An electric motor actuated stop/check valve for industrial use such as liquid pumping systems which has a controlled opening and closing rate when liquid flow is in a forward direction but closes quickly upon reverse flow of liquid with no action from the electric motor actuator. A valve disc having an elongated disc stem contacts a valve seat when in a closed position to stop liquid flow. Actuation of the valve is by an electric motor which provides movement to an actuator rod which contacts the disc stem. The disc stem and the actuator rod are not connected which allows the valve disc and disc stem free movement, by action of the momentarily back-flowing liquid, to a back-flow preventing closed position when liquid forward flow is reversed. No action by the electric motor is required. A spring biasing the valve disc toward the closed position and a hydraulically operated valve closing-speed regulator reduces or eliminates slamming of the valve disc against the valve seat.

Abstract: A vehicle transmission includes at least one rotatable component and is disposed in an environment at a first pressure. A transmission housing includes a sump portion disposed near a bottom portion of the transmission housing, where the transmission housing substantially encloses the at least one rotatable component. A hydraulic fluid is disposed at least partially in the sump portion of the transmission housing and a vacuum source is in pneumatic communication with the transmission housing. The vacuum source at least partially evacuates a gas from the transmission housing so that an interior of the transmission housing is at a second pressure. The at least one rotatable component is partially exposed to a gas at the second pressure and partially submerged in the hydraulic fluid when the transmission is under a predetermined dynamic load.

Abstract: A fast opening pressure relief valve (200) for providing pressure relief for a vessel. The valve (200) has an ejector (216) and a sleeve structure (210) in which the ejector (216) moves longitudinally. The ejector (216) is constructed of material that will expand outward slightly upon pressurization, increasing friction between staging glands (202) provided on the sleeve structure (210) and buckling glands (206) provided on the ejector (216). Also, as pressure on the ejector (216) increases, the buckling rings (206) deform slightly to release their grip on the staging glands (202) and move past them. Once the buckling rings (206) move past the staging glands (202), the pressurized ejector (216) quickly moves to its open position, i.e. opening within 2 and 3 milliseconds, thereby releasing the pressure on the vessel. The valve (200) can be reset by returning the ejector to its closed position.

Abstract: A pressure and prevacuum testing system for an AC system in a vehicle includes an air pressure source for pressurizing a cooling circuit of the AC system to a predetermined high pressure threshold and a vacuum source for prevacuuming the cooling circuit either to a predetermined prevacuum low pressure level or for a predetermined time period. The system also includes a pressure gauge for operatively measuring a pressure level in the cooling circuit. A controller is operatively connected to the air pressure source, the vacuum source and the pressure gauge. The controller compares the pressure level as measured by the pressure gauge to the predetermined high pressure threshold during a pressurized test of the cooling circuit and to the predetermined prevacuum low pressure level during a prevacuum test of the cooling circuit to determine if leaks are present in the cooling circuit.

Abstract: A method of actuating a valve in a well can include storing energy as a result of a differential pressure across a closed closure device of the valve, and releasing at least a portion of the stored energy while opening the closure device. A valve for use in a well can include a closure device, a biasing device, and an actuator which stores energy in the biasing device in response to a pressure differential across the closure device. A well system can include a tubular string, and a valve which controls fluid flow through the tubular string. The valve may include a closure device and an actuator which actuates the valve at least partially in response to a pressure differential across the closure device.

Abstract: In various exemplary embodiments described herein, a system and related method to provide airflow management system in a substrate production tool includes a housing to couple the substrate production tool to a fan filter unit to provide filtered air to the housing, a facility connection to couple the substrate production tool to a reduced pressure exhaust mechanism, a substrate transfer section coupled below the housing and in airflow communication with the facility connection, and a substrate process area coupled to the substrate transfer section by one or more substrate transfer slots. A chamber substantially containing the substrate transfer section and the substrate process area is coupled to the housing to receive the filtered air and to the facility connection to provide an exhaust for excess gas flow. The chamber maintains a low pressure in the substrate process area relative to the substrate transfer section.

Abstract: An eductor for mixing two liquids wherein the eductor includes a closed or non-air gap back flow prevention member. The vacuum profile of the eductor is altered by changing an opening in a passage portion to controllably divert water flow around the venturi tube or diverting the water without the opening. This affords the changing of the vacuum profile without redesigning the entire eductor.

Abstract: There are obtained a processing method that allows adherence of foreign particles to an object to be processed in a load lock chamber to be suppressed, and a fabrication method of a semiconductor device using the processing method. The processing method includes the step of receiving a substrate that is the object to be processed at a load lock chamber (substrate load lock chamber) to load the substrate into a processing chamber where processing is to be applied to the substrate, and reducing internal pressure from a substrate load lock chamber 3. In the step of reducing internal pressure, pressure is released at a relatively low decompression rate, and then at a relatively high decompression rate.

Abstract: A device for combining water from a first source with a stream of water from a second source which is at a higher pressure than said one source is disclosed. The device includes a hollow body having a primary inlet for operative coupling to said second source of water and an outlet towards an opposed end thereof. The body also has an intermediate inlet positioned intermediate said primary inlet and outlet for coupling to said first source of water. The device further includes a venturi positioned intermediate said intermediate inlet and said outlet, and a flow restriction means that is a jet positioned upstream of said venturi for restricting the flow of water issuing therefrom. The jet is substantially longitudinally aligned with said intermediate inlet. In use water from said second source enters said body through said primary inlet and passes through said jet. This draws water from said first source of water through said intermediate inlet and into the body.

Abstract: [Problem] The present invention provides a gas supply method by which a gas in a gas container can be effectively utilized. [Means for Solving the Problem] On the basis of: the maximum flow rate (a first preset flow rate (Q1)) and the minimum flow rate (a second preset flow rate (Q2)) at the place where the gas is used; a first preset pressure (P1) at which the gas can be supplied at a first preset flow rate (Q1); a second preset pressure (P2) at which the gas can be supplied at a second preset flow rate (Q2); a third preset pressure (P3) which is higher than the first preset pressure (P1); residual pressures (PA, PB) in gas containers (SA, SB); a supplied gas flow rate (Q); and the relationship between the residual pressures (PA, PB) and suppliable gas flow rates (QPA and QPB, respectively), the residual pressures (PA, PB) and the supplied gas flow rate (Q) are monitored and the gas supply is switched between the first gas container (SA) and the second gas container (SB).

Abstract: Apparatus and a method are disclosed for venting gas from an annulus region of a flexible pipe. The method includes the steps of depressurising a bore region of a flexible pipe and via at least one vent flow fluid communication path, venting gas from an annulus region of the flexible pipe into the bore region.

Abstract: A fluid passage is emergently-closed in a short time without causing a water hammer by an extremely simple device and operation. A water hammerless closing device includes an actuator operated valve provided in a fluid passage, an electro-pneumatic conversion device for supplying a 2-step actuator operating pressure Pa to an actuator operated-type valve, a vibration sensor removably secured to the pipe passage on the upstream side of the actuator operated-type valve, and a tuning box receiving a vibration detection signal Pr from the vibration sensor and delivering a control signal Sc to the electro-pneumatic conversion device for controlling the step operating pressure Ps? of the 2-step actuator operating pressure Pa so that, with the control signal Sc being regulated, the electro-pneumatic conversion device outputs the 2-step actuator operating pressure Pa with the step operating pressure Ps? capable of bringing the vibration detection signal Pr substantially to zero.

Abstract: A method and apparatus are provided for a cost effective pressure dampening device used in a fluid delivery system for substrate processing. In one embodiment, the pressure dampening device is disposed between a mounting substrate and a control valve within a fluid control assembly in fluid communication with a substrate processing chamber. The pressure dampening device is capable of dampening small pressure perturbations in a process fluid which is used for substrate processing.

Abstract: A valve includes a valve housing. A bore is in the valve housing. An inlet supply port fluidly communicates a pressurized supply fluid to the bore. A piston is movably positioned in the bore based on the pressure of the supply fluid. A portion of the piston extends into a frusto-conically shaped portion of the bore. A sealing member is associated with the portion of the piston sealingly engaging a surface of the frusto-conically shaped portion of the bore based on the pressure of the supply fluid. An inlet valve, movably positioned in the bore, is biased to sealingly engage a wall of the bore based on the pressure of the supply fluid. A control pressure supply port fluidly communicates a pressurized control fluid to the bore through the valve housing. A control pressure delivery port fluidly communicates with the control pressure supply port, via the bore, based on the pressure of the supply fluid.