Abstract: The present invention provides a cutoff valve control apparatus capable of predicting a failure of devices therein with a failure diagnosis based on an operation test when the cutoff valve control apparatus is set. The cutoff valve control apparatus includes a judging device to judge a normal state or an abnormal state of the apparatus based on a pressure characteristic of an internal pressure of a cylinder measured with a pressure sensor when an air is supplied to the cylinder of an air cylinder from an air supply source, and a memory device storing beforehand the pressure characteristic of the internal pressure of the cylinder of an initial normal operation of the apparatus and the pressure characteristic of a failure prediction boundary.

Abstract: A system for supplying hot and cold water to an apartment/house. Recycling water from the hot into the cold water pipe comprises a faucet having adjustable first and second valves installed in the paths to hot and cold water inlets and third valve in the path to outlet. The valves are electrically controlled; circulating pump installed in the cold water pipe. When the first and second valves of at least one faucet are open and the third valve closed, activating the circulating pump will cause water from the hot water pipe to flow through the faucet to the cold water pipe; c. controller means for activating the three valves and the circulating pump in one of two modes of operation: in a first (circulation) mode, water circulation is accomplished by opening the first and second valves and closing the third valve.

Abstract: A safety valve control system may include a remotely operable control assembly; a first transducer, a valve assembly, and a pump assembly in communication with the control assembly; and a fluid reservoir in communication with the valve and pump assemblies and a safety valve. The control assembly is operable to actuate the pump and valve assemblies to supply and return fluid from the fluid reservoir to actuate the safety valve into open and closed positions, in response to one or more signals received from the first transducer. A method of operation may include maintaining the safety valve in an open position while sensing a physical property with the control system; communicating a signal corresponding to the sensed physical property to the control system; and automatically closing the safety valve in response to a comparison of the sensed physical property to a pre-set condition.

Abstract: A method includes associating a plurality of valve balancing units with a plurality of valves in a hydronic network. The method also includes adjusting a setting of at least one of the valves using at least one of the valve balancing units to balance the hydronic network. Adjusting the setting could include identifying a differential pressure across a valve and a flow rate of material through that valve. Adjusting the setting could also include comparing the identified differential pressure to a target differential pressure and/or the identified flow rate to a target flow rate. Adjusting the setting could further include instructing an actuator to adjust the setting until the identified differential pressure is within a first threshold of the target differential pressure and/or the identified flow rate is within a second threshold of the target flow rate.

Abstract: Method and device for detecting the flow of liquid, in particular water, in a consuming installation, comprising at least one opening/closing means (3) for supplying liquid, this installation being supplied via an inlet pipe (2) fitted with a solenoid valve (5), a pressure sensor (6) upstream of the solenoid valve and a pressure sensor (7) downstream of the solenoid valve.

Abstract: A multi-functional or versatile emergency shutdown valve controller may be used in various different emergency shutdown configurations to enable the testing of different types and configurations of emergency shutdown devices and the supporting equipment associated therewith. In one example, a digital valve controller for use with an emergency shutdown valve includes two pressure sensors and is adapted to be connected to a pneumatic valve actuator and to a solenoid valve device to assist in the on-line testing of the valve actuator as well as in the on-line testing of the solenoid valve. To perform testing of the solenoid valve, the valve controller may measure the pressure at different ports of the solenoid valve as the solenoid valve is actuated for a very short period of time. The valve controller may determine whether the solenoid device is fully functional or operational based on the derivative of the difference between the measured pressure signals, i.e.

Abstract: A latching valve includes a housing, a supply port, defined in the housing, which receives supply pressure, a delivery port defined in the housing, an exhaust port, defined in the housing, and an apply port defined in the housing. A housing bore fluidly communicates with the supply port, the delivery port, the exhaust port, and the apply port fluidly. A shuttle is sealingly and movably secured in the housing bore. The shuttle is alternately set to one of an apply position and a release position as a function of sequential pilot pressures at the apply port acting on the shuttle, and as a function of the supply pressure acting on one of an apply pair of sealed seats with different diameters in the housing bore and a release pair of sealed seats with different diameters in the housing bore. The delivery port fluidly communicates with the supply port while the shuttle is in the apply position. The delivery port fluidly communicates with the exhaust port while the shuttle is in the release position.

Abstract: According to one embodiment, a flow rate adjusting unit is disposed on a gas passageway and includes a valve that adjusts the flow rate of a gas and an actuator that controls the displacement amount of the valve. A displacement amount storage unit stores displacement amount information in which a displacement amount of the valve, used when a gas flows into the gas passageway at a flow rate defined according to a process procedure before performing the process procedure, is obtained in advance for each process procedure. A setting circuit acquires the displacement amount corresponding to the process procedure from the displacement amount storage unit, and controls the actuator on the basis of the acquired displacement amount.

Abstract: A device has been disclosed that may include a spool valve including a body having a first connector and a second connector and a spool movable relative to the body for controlling flow between the first connector and the second connector. The reversible flow control assembly further may include a pilot valve device developing a single pressure command in the form of a fluid at a command pressure. The spool valve may be responsive to the single pressure command developed in said pilot valve device to control flow between the first connector and the second connector without regard to the direction of flow. The majority of axial forces acting on the spool to position the spool relative to the body when fluid is flowing through the valve may be fluid forces.

Abstract: The present invention provides a gas shutoff device that prevents tampering procurement of gas or tamper due to stealing of the gas shutoff device.

Abstract: Fluid control apparatus including a proportional flow valve having a fluid inlet and a fluid outlet; a pneumatic proportional control valve in communication with the proportional flow valve for modulating the proportional flow valve; a frictional flow element having a frictional flow element fluid inlet in fluid communication with the fluid outlet of the proportional flow valve and having a frictional flow element fluid outlet spaced from the frictional flow element fluid inlet, an upstream pressure sensor; a downstream pressure sensor; and a controller in communication with the upstream pressure sensor, the downstream pressure sensor and the pneumatic proportional control valve.

Abstract: Embodiments of the invention provide a vacuum valve apparatus and method to provide a vacuum to equipment. The vacuum valve can include an air port tube, a vacuum port tube, a motor, and a control arm coupled to the vacuum port tube and the motor. The motor can cause the control arm to move in an arc in order to flex the vacuum port tube and selectively create the vacuum and vent the vacuum provided to the equipment.

Abstract: The invention provides a servo valve with a main piston and a servo piston. The servo piston controls a pressure in a servo chamber and thereby controls movement of the main piston based on a pressure difference between two chambers of the valve. To facilitate opening of the valve by relatively small pressures even in high pressure systems, the servo chamber according to the invention is provided inside the armature.

Abstract: The invention relates to a hydraulic valve device (1) having a fluid connection arrangement (10) comprising a multiplicity of fluid connection points which can at least partially be actuated by means of a control device (18). As a result of the fact that, by way of a means (2) for measuring the load pressure, the control device (18) can be moved into a rapid traverse position when a maximum load pressure is exceeded in a power stroke position and vice versa, and that at least one fluid-conducting working chamber of a consumer (4) is connected to one of the use connections (A) during a switch of the control device (18) for a change from power stroke to rapid traverse, a jerk-free transition from a working stroke to a rapid traverse is attained and a homogeneous, jerk-free return to the working stroke is enabled when an overload situation is encountered in the rapid traverse.

Abstract: A mass flow controller having a feedback controller gain, comprises: a sensor configured so as to sense the flow of fluid through controller; a valve arranged so as to adjust the flow of fluid through the controller; and a processor configured so as to control the valve as a function of the flow of fluid sensed by the sensor. The sensor and valve are arranged within a feedback system, and the processor updates the feedback controller gain in real time based on the ratio of at least one calibration gas parameter to at least one operating gas parameter, such that the closed loop transfer function of the feedback system remains substantially constant regardless of operating conditions so as to have a consistent control performance at different operation conditions from the calibration condition.

Abstract: A method and apparatus for delivering gases to a semiconductor processing system are provided. In one embodiment, an apparatus for delivering gases to a semiconductor processing system includes a plurality of gas input and output lines having inlet and outlet ports. Connecting lines couple respective pairs of the gas input and gas output lines. Connecting valves are arranged to control flow through the respective connecting lines. Mass gas flow controllers are arranged to control flow into respective inlet ports. In another embodiment, a method includes providing a manifold having at least a plurality of inlet that may be selectively coupled to at least one of a plurality of outlets, flowing one or more gases through the manifold to a vacuum environment by-passing the processing chamber prior to processing or to a calibration circuit, and flowing the one or more gases into the processing chamber during substrate processing.

Abstract: A local logic solver that operates with a local smart valve controller to control, test and monitor performance characteristics of a local field-mounted emergency isolation valve device, outputting a local indication of trouble on the device, which is mounted in the field away from the facility's central control panel for the process. The local logic solver includes a recording function and memory for retrieval of detected faults that are time-stamped and recorded locally to generate documentation and to track the elapsed time, starting when the degraded state of the device was detected and first signaled as a problem; other performance data is also recorded. Accordingly, the operation of the overall system is simplified by eliminating the need for an external computer to diagnose any problems.

Abstract: A measuring fluid dispenser for dispensing fluids in measured quantities has a user input device for generating at least one user input signal. A flow regulator provides a known fluid output flow rate by regulating fluid flow between an input port and an output port of the regulator. A first electronic valve is responsive to electronic signals, wherein a first electronic signal positions the first electronic valve in a flow permissive state, and a second electronic signal positions the first electronic valve in a flow restrictive (i.e. interrupting) state. The first electronic valve has a first valve input in fluid communication with the regulator output and also has a first valve output in fluid communication with a fluid output port. A processing unit is communicable with the user input device and is responsive to the user input signal, and is also in electronic communication with the first electronic valve for transmitting the electronic signals to the first electronic valve.

Abstract: A mass flow controller has: a flow rate sensor section that measures the flow rate of a fluid and outputs a flow rate measurement signal indicating the measurement value; a flow rate control valve disposed upstream or downstream of the flow rate sensor section; a calculation section that calculates a feedback control value to be supplied to the flow rate control valve by performing at least a proportional calculation on the deviation of the flow rate measurement value indicated by the flow rate measurement signal from a flow rate setting value; and an opening control signal output section that generates an opening control signal based on the feedback control value and outputs the opening control signal to the flow rate control valve. The function used for calculating the gain value in the proportional calculation differs between a changing period and a stable period.

Abstract: A system, method and apparatus for regulating vacuum applied to surgical suction devices allowing the use of a single vacuum regulator and associated canister to provide vacuum to two suction devices, such as a suction stabilizer and a suction retractor. Vacuum controllers may be placed in the vacuum lines provided to each of two or more suction devices, or may be placed only in the vacuum line of the suction device believed most likely to detach during the procedure. Each vacuum controller is provided with a primary vacuum line, coupling its associated suction device to the output of the vacuum regulator and a pilot passage, also coupling the suction device to the vacuum regulator. The controller closes a valve in the main vacuum line in response to loss of vacuum attachment, which valve remains closed until attachment is reestablished. Closure of the valve results in substantial or complete blockage of the main vacuum line.

Abstract: The water hammerless opening device comprises an actuator operating type valve installed on the fluid passage, an electro-pneumatic conversion device to supply the 2-step actuator operating pressure Pa to the afore-mentioned actuator operating type valve, a vibration sensor removably fixed to the pipe passage on the upstream side of the actuator operating type valve, and a tuning box to which the vibration detecting signal Pr detected by the vibration sensor is inputted, through which the control signal Sc to control the step operating pressure Ps? of the afore-mentioned 2-step actuator operating pressure Pa is outputted to the electro-pneumatic conversion device, and with which the 2-step actuator operating pressure Pa, of the step operating pressure Ps? which makes the vibration detecting signal Pr nearly zero, is outputted from the electro-pneumatic conversion by adjusting the control signal Sc.

Abstract: An object of the present invention is to perform a suitable registration of a flow rate of appliances to promote the optimization of a usage time limitation function.

Abstract: A safety shut-off device is provided for a liquid gas system for vehicles and/or vehicle trailers, in order to avoid an inadvertent release of gas. The device includes an electromagnetic gas valve for supplying/shutting off the gas, an electronic unit for activating the electromagnetic gas valve, and a flow sensor for determining a current gas flow being discharged from a storage tank. Furthermore, the device includes an evaluation unit for comparing the current gas flow to a previous gas flow or to a gas flow which is indicated by the gas consumers and is to be expected. If, during use, the evaluation unit determines a current gas flow which differs by more than a maximum permissible rate of change from the previous gas flow or from a gas flow which is indicated by the gas consumers and is to be expected, the electromagnetic gas valve is activated via the electric unit in order to shut off the supply of gas.

Abstract: A pressure control system remotely controls pressure within one or more remote zones, each respectively connected to an enclosure through a conduit, by controlling flow of a fluid into and out of each enclosure. The pressure of the fluid is measured within each enclosure. An estimated pressure within each zone is computed, as a function of the measured pressure in the enclosure and known characteristics of the conduit and the zone. For each zone, an inlet proportional valve and an outlet proportional valve of each enclosure is operated so as to control the input flow rate of the fluid into the respective enclosure and the output flow rate of the fluid out of the enclosure as a function of a pressure set point and the estimated pressure, thereby regulating pressure within the zone in accordance with the pressure set point.

Abstract: An isolation valve includes a flow restrictor disposed in a passage and having a piston with a first orifice and a depressurization valve with a second orifice. The valve also includes a solenoid valve assembly having a coil that is selectively energized by a signal from a controller and an armature that is moveable between first and second positions to open and close the first orifice and/or the second orifice. When the coil is energized, the armature moves to the second position to allow vapor to flow through the first orifice, the depressurization valve selectively opens to allow vapor to flow through the first orifice, the second orifice, or both. The two orifices work together to provide controlled vapor flow.

Abstract: A regulator that performs control such that a tilt angle of a variable volume pump increases as a pilot pressure in a pilot flow passage decreases is provided, and when a controller determines that all of a plurality of operation valves for controlling a flow of a discharged oil that is led from the variable volume pump to respective actuators are in a neutral position, the controller supplies the discharged oil from the variable volume pump to a regenerative hydraulic motor by setting a solenoid valve in an open position and sets a pilot flow passage change-over solenoid valve in a blocking position such that the pilot pressure led to the regulator through the pilot flow passage is reduced by a pressure reducing valve.

Abstract: An apparatus for controlling the flow of a hydraulic pump of a construction machine according to the present disclosure includes: a pressure sensor detecting pressure signals corresponding to various control signal input values of the construction machine; a shuttle block including a plurality of shuttle valves dividing hydraulic lines connected with the pressure sensor into groups and extracting pressure oil of a hydraulic line under the highest pressure among hydraulic lines included in the corresponding group; auxiliary pressure sensors detecting the pressure of the pressure oil discharged from the shuttle block; electro proportional control valves in which opening rates are adjusted according to an applied signal and flows applied to signal lines are controlled to adjust discharge flows of main pumps; and a controller controlling the electro proportional control valves so that the opening rates of the electro proportional control valves are adjusted according to the magnitude of the pressure signal at the

Abstract: Provided is a pressure damper, capable of reliably suppressing change in discharge amount of ink due to pressure fluctuation. The pressure damper includes: a recess portion (2a) for storing liquid; a flexible film (7) provided to cover an opening of the recess portion (2a); a pressure damping portion (8) including a liquid inflow port (1) and a liquid outflow port (3) which are communicated to the recess portion (2a); a pressure detecting portion (4) for detecting a pressure value of the liquid flowing out from the liquid outflow port (3); a control circuit portion (5) for outputting a drive signal based on the pressure value of the pressure detecting portion (4); and a pressure adjusting portion (6) for adjusting the flexible film (7) and pressure in the recess portion (2a) by deforming the flexible film (7) based on the drive signal output from the control circuit portion (5).

Abstract: An apparatus and method for generating vapor from a liquid precursor for a thin film deposition on a substrate includes an inlet section in fluid communication with a downstream vaporization chamber section. The inlet section comprises a gas inlet for receiving gas from a gas source through a gas flow sensor and a gas flow control valve and a liquid inlet for receiving liquid from a liquid source through a liquid flow sensor and a liquid flow control valve. An electronic controller controls the gas and liquid flow control valves thereby controlling the rates of gas and liquid flow into the inlet section to generate vapor in the downstream vaporization chamber section for thin film deposition on the substrate.

Abstract: A device for controlling a combustible gas supply to a burner is provided, which includes first and second servovalves, having respective valve seats associated with a corresponding shut-off mechanism, which include respective first and second control solenoid valves with an electromagnetic operating device that controls the opening/closing of the corresponding servovalve. The solenoid valves act to indirectly control the corresponding servovalve's respective shut-off mechanism. The pipes of the control are in communication with the main pipe through an auxiliary bleed pipe. A pilot pipe is branched from the auxiliary pipe to supply a pilot burner, and a thermoelectric magnetic unit with a knob is provided on the auxiliary pipe, which allows gas to flow towards the pilot burner when the unit is activated, while simultaneously shutting off the flow of gas towards the servovalve control circuit. The device includes a control mechanism, controlled by the knob, which controls gas flow.

Abstract: A fluid passage is emergently-closed in a short time without causing a water hammer by an extremely simple device and operation. A water hammerless closing device includes an actuator operated valve provided in a fluid passage, an electro-pneumatic conversion device for supplying a 2-step actuator operating pressure Pa to an actuator operated-type valve, a vibration sensor removably secured to the pipe passage on the upstream side of the actuator operated-type valve, and a tuning box receiving a vibration detection signal Pr from the vibration sensor and delivering a control signal Sc to the electro-pneumatic conversion device for controlling the step operating pressure Ps? of the 2-step actuator operating pressure Pa so that, with the control signal Sc being regulated, the electro-pneumatic conversion device outputs the 2-step actuator operating pressure Pa with the step operating pressure Ps? capable of bringing the vibration detection signal Pr substantially to zero.

Abstract: A flow ratio controller having: a main channel; branch channels branching from the end of the main channel; control valves respectively provided in the branch channels; a plurality of flow rate meters for measuring the flow rate of the main channel and the flow rate of each of the branch channels; a valve control section for controlling the control valve provided in one branch channel so that the pressure on the upstream side of the control valve is a given target pressure and, only when the upstream-side pressure is near or not less than the target pressure, starting control of the other control valve so that the flow rate ratios of the branch channels are predetermined ratios; and a target pressure setting section for setting the target pressure such that the smaller the flow volume is in the main channel, the lower is the target pressure.

Abstract: One embodiment of the present invention can include a flow control device that comprises an inlet, an outlet in fluid communication with the inlet, a pressure sensor, which may or may not be the only pressure sensor of the fluid control device, and a controller coupled to the pressure sensor. The controller can be configured to generate a valve control signal based on a measured pressure at a single pressure sensor.

Abstract: A valve control system includes general-purpose valves arranged in a pipe that allows the flow of fluid, first and second sensors, and a safety controller. The general-purpose valves are valves that can be opened and closed according to electric signals, and may be, e.g., solenoid valves, respectively. The first and second sensors are sensors that detect a state of fluid flowing from the corresponding valves, and are formed of, e.g., pressure switches, respectively. The safety controller may satisfy safety standards, and outputs signals for controlling the valves based on signals provided from the first and second sensors, respectively.

Abstract: A fluid control system, device and method are disclosed. The fluid control device is preferably configured to connect to an outlet of a fluid source. The fluid control device includes a valve, a sensor, a battery and a micro-generator. The sensor is used to measure or detect a condition and provide output signals that open and close the valve in response to a measured or detected condition. The micro-generator is positioned in a flow path of fluid and generates power from a flow of the fluid. The power generated from the micro-generator is stored in the battery and used to power later operations of the device. The device can be used for automating faucets, sprinklers and fire extinguishing equipment.

Abstract: A fluid accumulator arrangement suitable for use with a compression ignition internal-combustion engine comprising a first storage volume, a second storage volume, and valve means fluidly connected between the first storage volume and the second storage volume. In one embodiment, the valve means is a three-way control valve wherein, in a first position, the first storage volume communicates with the second storage volume, in a second position the first storage volume is isolated from the second storage volume and, in a third position, one of the first or second storage volumes communicates with a low pressure drain. The arrangement may also include control means to operate the valve means in accordance with predetermined control strategies.

Abstract: A differential-pressure flow meter is capable of easily eliminating adhesion to an orifice of an extraneous material. The differential-pressure flow meter includes: a pair of pressure sensors provided on a straight pipe part of a main fluid channel; an orifice unit interposed between the pair of pressure sensors; a columnar orifice body provided on the main fluid channel to be detachable in a direction orthogonal to a flow direction of a fluid in the main fluid channel; and an orifice hole penetrating the orifice body in the flow direction of the fluid, wherein the orifice body is rotatable at a prescribed installation position to reverse an upstream side and a downstream side with respect to the orifice hole, and flow rate measurement is performed by converting into a flow rate a difference in pressure that is obtained from two pressure values sensed respectively by the pair of pressure sensors.

Abstract: A dual valve assembly for limiting flow into a toilet tank comprises a fill valve, such as a float valve or ball cock valve, and a piston valve positioned between a water supply line and the fill valve. The piston valve operates independently of the fill valve, and is designed to shut off water flow after an approximate flow volume or time. The dual valve assembly may be provided in a single housing replacement part. The dual valve assembly may be provided as an adapter kit comprising a housing and piston valve which is installed in a toilet tank to accept a fill valve.

Abstract: A failure detecting apparatus for a hydraulic circuit of a gearbox includes an operating-state detector. The operating-state detector is configured to detect an operating state of a subject to be controlled with a control-signal pressure output from a solenoid valve. A current setting device is configured to set an electrical current supplied to a solenoid so as to close an output oil passage when a modulator valve is normal and to open the output oil passage when an open failure occurs in the modulator valve, while the solenoid valve is conductive. A failure determining device is configured to detect a failure of the modulator valve when the operating state of the subject to be detected by the operating-state detector is abnormal after a value of the electrical current to be supplied to the solenoid is set at the current setting device.

Abstract: A distributed control system for a vacuum sewer system comprising a suction pipe which is communicated with a vacuum source via a transport conduit (520) by opening a vacuum valve (530) using a solenoid valve is disclosed. The transport conduit is connected between the vacuum valve and a collection tank, with the collection tank having a vacuum source relative to atmospheric pressure applied thereto. The suction pipe is connected between the vacuum valve and a sewage sump, with the sewage sump have a source of sewage maintained at atmospheric pressure. Sewage (551) in the sump is sucked through the suction pipe and sent to the collection tank via the transport conduit by opening the vacuum valve. A transport conduit section is laid out in a sawtooth fashion, having in series transport conduit portions comprising a low-point conduit portion (522), a riser conduit portion (521), and a down-slope conduit portion (523).

Abstract: A water valve device includes: a valve unit having an input port for receiving solar heated water from a solar water heating system, a first output port connected to a cold water inlet of a water heating device using non-solar energy, and a second output port; a temperature sensor for sensing temperature of water flowing through the input port of the valve unit to generate a temperature sensing signal corresponding to the temperature; and a controller controlling, based on the temperature sensing signal from the temperature sensor, the valve unit to operate in a first state, where the input port is in fluid communication with the first output port, when the temperature is lower than a predetermined temperature, or in a second state, where the input port is in fluid communication with the second output port, when the temperature is not lower than the predetermined temperature.

Abstract: A valve assembly includes a valve housing defining a service passage, a first bore in fluid communication with the service passage, a first passage, a second bore in communication with the service passage and a second passage. The first bore has an inlet portion, a first service portion in communication with the service passage, and a first load holding portion. The first passage is in communication with the first load holding portion and the service passage. The second bore has a return portion, a second service portion in fluid communication with the first service passage, and a second load holding portion. The second passage is in selective communication with the second load holding portion of the second bore and the return passage. A valve is disposed in the second passage. The valve allows fluid to flow only in a direction from the second load holding portion to the return passage.

Abstract: A flow rate controller is arranged such that a control circuit controls a proportional electromagnetic valve so that a flow rate detected by a flow rate sensor reaches a target flow rate. The proportional electromagnetic valve includes a coil supported in a holder, a bobbin and a fixed core, a valve element and a plate spring placed on a movable core, the valve seat, lead-in path, lead-out path, and orifice being formed in a body. The movable core is displaced by balance between an attractive force of the fixed core generated by excitation of the coil and an urging force of the plate spring, thereby adjusting the position of the valve element with respect to the valve seat to adjust the flow rate of a fluid. The orifice has an inside diameter set to a value of “?1 mm or more” and an axial length set to a value to have a ratio of “from 0.1 to 0.6 inclusive” to the inside diameter. The lead-out path has an inside diameter set to be larger than the inside diameter of the orifice.

Abstract: The present invention generally provides methods and apparatus for monitoring performance of an injection valve. In one embodiment, a control signal relates to an actuator movement is monitored and correlated to performance of the injection valve.

Abstract: A method and apparatus for measuring gas flow are provided. In one embodiment, a calibration circuit for gas control may be utilized to verify and/or calibrate gas flows utilized for backside cooling, process gas delivery, purge gas delivery, cleaning agent delivery, carrier gases delivery and remediation gas delivery, among others.

Abstract: An electronic leak detection system for home humidifier using the duct air conditioning system. The leak detection system uses a simple sensor in a water collection tray under the humidifier to detect if leakage has occurred. An auxiliary solenoid valve is connected in line with the water supply to the humidifier. When leakage is detected, power to the humidifier system is shut down and an auxiliary solenoid valve is powered.

Abstract: A valve assembly is disclosed for controlling fluid flow between two reservoirs. The valve assembly includes a relief valve arranged inside the housing and configured to open a first fluid flow path when the first reservoir is above a first predetermined pressure value.

Abstract: An apparatus for testing an aircraft tank system includes a fuel supply device including a fuel reservoir, a fuel supply line for supplying fuel from the fuel reservoir to a fuel outlet of the fuel supply device, and a first isolation valve disposed in the fuel supply line. A fuel transfer line transfers fuel from the fuel outlet of the fuel supply device to the aircraft tank system and a second isolation valve is disposed in the fuel transfer line. An electronic control unit (ECU) of the apparatus is adapted to control the first isolation valve and the second isolation valve so as to interrupt the supply of fuel through the fuel supply line and the transfer of fuel through the fuel transfer line, respectively, in response to a test parameter signal provided to the electronic control unit (ECU).

Abstract: A system and method for delivering a specified-quantity of a fluid using a flow controller based on a fluid delivery profile is described. One embodiment includes a fluid delivery profile that includes a delivery time window with a plurality of set points that each correspond with a specified instant in time within the delivery time window. The method also includes delivering the fluid according to the fluid delivery profile through a variable valve using the flow controller and a feedback signal from a flow sensor.

Abstract: The invention prevents overshoot from occurring in flow rate on the output side of a flow rate regulator when output flow rate is changed or the gas type distributed is changed. Thus, an automatic pressure regulator is provided to supply gas pressure to a flow rate regulator that includes a piezoelectric element driving type pressure regulating valve, a control pressure detector provided on the output side of the pressure regulating valve, and a controller to which a detected value P2 of the control pressure detector and a set value Pst for control pressure are input, wherein the controller supplies a control signal to a piezoelectric element driving unit of the pressure regulating valve using a proportional control system to perform valve opening regulation, in which the proportional control system of the controller is set to control to bring about a residual deviation in control pressure by disabling an integral action.