Electrically Actuated Valve Patents (Class 137/487.5)
  • Patent number: 7849870
    Abstract: A pressure control valve having a common plenum formed by two flow control valves that each utilize electrically controlled piezoelectric actuators to generate a number of possible operating states and thus control an output pressure from the common plenum formed by the two flow control valves. The flow control valves each have at least one pressure fitting and nozzle, and a nozzle orifice sealing mechanism coupled to the piezoelectric actuator. The piezoelectric actuator may be a piezo-ceramic actuator fixed along one side to a chamber of the flow control valve and having a free side opposite the fixed side. Upon receiving a voltage of a desired magnitude and polarity, the free side of the piezo-ceramic actuator and the nozzle orifice sealing mechanism moves to control a fluid flow into the common plenum. By controllably dithering the piezoelectric actuators, the output pressure from the common plenum may be accurately regulated.
    Type: Grant
    Filed: April 18, 2008
    Date of Patent: December 14, 2010
    Assignee: Honeywell International Inc.
    Inventors: Paul DuPuis, Lee Vetsch
  • Patent number: 7849869
    Abstract: The water hammerless opening device comprises an actuator operating type valve installed on the fluid passage, an electro-pneumatic conversion device to supply the 2-step actuator operating pressure Pa to the afore-mentioned actuator operating type valve, a vibration sensor removably fixed to the pipe passage on the upstream side of the actuator operating type valve, and a tuning box to which the vibration detecting signal Pr detected by the vibration sensor is inputted, through which the control signal Sc to control the step operating pressure Ps? of the afore-mentioned 2-step actuator operating pressure Pa is outputted to the electro-pneumatic conversion device, and with which the 2-step actuator operating pressure Pa, of the step operating pressure Ps? which makes the vibration detecting signal Pr nearly zero, is outputted from the electro-pneumatic conversion by adjusting the control signal Sc.
    Type: Grant
    Filed: January 13, 2005
    Date of Patent: December 14, 2010
    Assignees: Fujikin Incorporated
    Inventors: Tadahiro Ohmi, Kouji Nishino, Masaaki Nagase, Ryousuke Dohi, Nobukazu Ikeda, Ryutaro Nishimura
  • Patent number: 7848868
    Abstract: It is a objective of the present invention to provide a control apparatus which is capable of compensating a delay time for opening a pressure reducing valve since an electronic control unit sends a command signal for driving the pressure reducing valve so as to discharge high pressure fuel in a fuel accumulating device of a fuel injection system for the internal combustion engine. The delay time control apparatus for opening a pressure reducing valve has a potential for avoiding an overshoot phenomenon in which an actual pressure of fuel accumulated in the fuel accumulating device overshoots a target value of fuel pressure during the increase the fuel pressure of the fuel accumulating device.
    Type: Grant
    Filed: September 5, 2007
    Date of Patent: December 7, 2010
    Assignee: Denso Corporation
    Inventors: Hironari Nakagawa, Shigeki Hidaka, Kensuke Tanaka, Hatsuo Okada
  • Publication number: 20100300553
    Abstract: Multifunctional safety valve device with proportional pressure regulator, for line feeding aeriform fluid to a user, including a body defining a fluid or gas conduit connected to a gas feed line and a gas delivering line. The conduit has first and second passages intercepted by respective first and second valving elements. The second element downstream of the first for gas pressure regulating and modulating. The valving elements operated by electromagnetic actuators and urged closed at least by a spring. The second element cooperating with a membrane subjected to gas pressure to urge the second element closed. The membrane has, subjected to gas pressure, a surface larger than that of the second element subjected to the same pressure, to maintain the second element closed. The second element presenting, downstream of the second passage, a portion with a flexible rim arranged to seal the second passage when intercepted by the second element.
    Type: Application
    Filed: October 22, 2007
    Publication date: December 2, 2010
    Applicant: BERTELLI & PARTNERS S.R.L.
    Inventor: Pierluigi Bertelli
  • Publication number: 20100294380
    Abstract: A working fluid flow rate flowing from a second port (13) to a first port (12) is controlled using a solenoid (S). A pilot pin (60) of a pilot valve (V3) driven by the solenoid (S) regulates an auxiliary pilot pressure. An opening of an auxiliary valve (V2) is varied according to the auxiliary pilot pressure, whereby the auxiliary valve (V2) causes working oil to flow out to the first port (12) from the second port (13) and varies a main pilot pressure according to the working oil flow rate. An opening of a main valve (V1) is varied according to the main pilot pressure, whereby the main valve (V1) causes the working oil to flow out to the first port (12) from the second port (13). Precise flow control at a low flow rate and responsive flow control at a high flow rate are thereby realized.
    Type: Application
    Filed: December 4, 2009
    Publication date: November 25, 2010
    Applicant: KAYABA INDUSTRY CO., LTD World Trade Center Bldg 4-1
    Inventors: Kiyokazu Nagata, Keigo Yasuda, Masatoshi Fujise
  • Patent number: 7828008
    Abstract: A system and a method for partial stroke testing of a critical valve using a bypass valve includes flowing two streams of gas simultaneously through a bypass valve, opening the critical valve with the gas from the bypass valve, and determining a calibration time interval for closing the opened critical valve to a preset partial stroke testing position. The method includes determining a measured time interval for closing the opened critical valve, creating a tolerance band, and comparing the measured time interval to determine if the critical valve passes the partial stroke testing. The system includes a two stage bypass valve, having four solenoid valves. The system includes a processor with a memory having partial stroke testing logic. Each solenoid valve and the bypass valve include a pressure sensor.
    Type: Grant
    Filed: February 8, 2006
    Date of Patent: November 9, 2010
    Assignee: SafePlex Systems, Inc.
    Inventors: Lawrence V. Beckman, Larry G. Lengyel
  • Publication number: 20100276012
    Abstract: An electromagnetic pilot opening/closing valve includes: a valve main body member that includes a sliding hole; a main valve body that is slidably provided in the sliding hole; a movable iron core; and a fixed iron core. The main valve body includes a second sliding hole. A pilot valve body is provided in the second sliding hole. The movable iron core and the pilot valve body are designed to slidably engage with each other, and the movable iron core and the main valve body are designed to slidably engage with each other with a play therebetween. When the movable iron core is attracted by the fixed iron core by energization of the coil, the movable iron core causes the pilot valve body to slide inside the second sliding hole and sliding of the pilot valve body causes the main valve body to slide inside the sliding hole.
    Type: Application
    Filed: December 19, 2008
    Publication date: November 4, 2010
    Applicants: TOYOOKI KOGYO CO., LTD., JTEKT CORPORATION
    Inventors: Noritaka Watanabe, Hiroaki Suzuki
  • Patent number: 7823604
    Abstract: A pressure control system is disclosed. The control system in one embodiment includes a main body comprising a pilot chamber wherein an intake port and a discharge port are formed, and a spool comprising an upper slide and a lower slide. The spool in this embodiment is attached by a spring to the upper part of the main body. The exhaust apparatus pressure control system includes an absolute pressure sensor for detecting the pressure in the intake port and a differential pressure sensor for detecting the difference between the pressure in the intake port and atmospheric pressure; a control valve for supplying a pressure regulating gas to the pilot chamber; and a control circuit for sending switching signals to the absolute pressure sensor and the differential pressure sensor, and driving the control valve based on the output from the absolute pressure sensor or differential pressure sensor.
    Type: Grant
    Filed: June 27, 2006
    Date of Patent: November 2, 2010
    Assignee: Advanced Energy Industries, Inc.
    Inventor: Masahiro Nambu
  • Publication number: 20100269921
    Abstract: A valve assembly is disclosed for controlling fluid flow between two reservoirs. The valve assembly includes a relief valve arranged inside the housing and configured to open a first fluid flow path when the first reservoir is above a first predetermined pressure value.
    Type: Application
    Filed: March 30, 2010
    Publication date: October 28, 2010
    Applicant: Eaton Corporation
    Inventors: Daniel Lee Pifer, Vaughn Mills, Ronald Sexton
  • Publication number: 20100269920
    Abstract: The RABBAT ELECTRIC HYBRID VEHICLES have no mechanical transmission of power, only ductile wires connecting various sections of the car. The multiplicity of capacitor/battery units makes it easier for the vehicle designer to position them around for cosmetic or actual mechanical need, for better handling and safety. A diode between the motor and battery ensures that there is never any backflow of current. The ultra-capacitor/battery units which are charged thru a plug-in or a pantograph from an external supply and by an internal engine/generator which could be H2/O2, liquid/gas, internal combustion/jet/rocket/explosive) running at a uniform most efficient rate without being affected by stops or starts, slowing or acceleration, from start to finish. In this vehicle there is no juggling between application of internal combustion energy and electrical energy. It is sequential: fuel to electricity to motor drive, all the time.
    Type: Application
    Filed: January 22, 2010
    Publication date: October 28, 2010
    Inventor: Albert K. Henning
  • Publication number: 20100269632
    Abstract: Provided is a fluid pressure control device that includes an actuator and a body configured to house the actuator. The body has an opening arranged to receive pressurized fluid. The fluid pressure control device additionally includes a pressure sensor incorporated into the body relative to the opening to sense fluid pressure and to generate an electrical signal indicative of the sensed pressure. Furthermore, the fluid pressure control device includes an integrated circuit incorporated into the body, and operatively connected to the pressure sensor. The integrated circuit includes a transceiver configured to communicate with an external device by transmitting the electrical signal indicative of the sensed fluid pressure to the external device and receiving a control signal from the external device. The integrated circuit additionally includes a driver configured to power the actuator in response to the control signal.
    Type: Application
    Filed: April 27, 2009
    Publication date: October 28, 2010
    Applicant: GM GLOBAL TECHNOLOBY OPERATIONS, INC.
    Inventor: Randall B. Dlugoss
  • Publication number: 20100269922
    Abstract: A flow rate control device includes: a fuel gas supply channel having a flow rate adjusting valve; a thermal type mass flow rate sensor arranged in the supply channel; a calculation unit which calculates a thermal quantity flow rate of the fuel gas defined by a product of a volume flow rate of the fuel gas and a heat generation quantity per unit volume of the fuel gas according to an output from the thermal type sensor; and a flow rate control unit which controls the open degree of the flow rate adjusting valve according to a difference between a control target value for controlling the thermal quantity flow rate and the thermal quantity flow rate calculated by the calculation unit.
    Type: Application
    Filed: January 7, 2009
    Publication date: October 28, 2010
    Applicant: Yamatake Corporation
    Inventor: Junichi Isetani
  • Patent number: 7814936
    Abstract: Methods and systems are provided for predicting internal sound pressure within a flow passage, by measuring a vibration velocity response of a wall of the flow passage, for example, using accelerometers. A radiation model may then be used for predicting externally radiated sound pressure to provide feedback to control a process control system. Methods and systems are also provided for predicting externally radiated sound pressure based on internally-mounted pressure transducer sensor data.
    Type: Grant
    Filed: May 24, 2006
    Date of Patent: October 19, 2010
    Assignee: Fisher Controls International LLC
    Inventor: Frederick Wayne Catron
  • Publication number: 20100258204
    Abstract: A device for detecting leaks of fluids includes means for metering flow of a fluid towards a premises, shut-off means for the fluid, operable between a delivery configuration of the fluid and a closed configuration to allow/prevent its transit towards the premises, and a management and control unit, able to act in conjunction with the metering means of the flow and to send a signal to the shut-off means to switch from the delivery to the closed configuration. The management and control unit comprises enabling means, able to allow or prevent the signal to be sent to the shut-off means. The device comprises, in addition, means for detecting the presence of a user in the premises, operatively connected to the enabling means in such a way that these allow the signal to be sent to the switch if the presence detector means detect the absence of the user in the premises.
    Type: Application
    Filed: April 14, 2010
    Publication date: October 14, 2010
    Applicant: Enolgas Bonomi S.p.A.
    Inventor: Giovanni Cipolla
  • Publication number: 20100243069
    Abstract: The present invention regards a subsea valve system comprising a valve, a fluid supply line connectable to a remote fluid supply and in connection with an inlet of the valve, an outlet of the valve connectable to an outlet fluid line and a fluid tight housing at least partly enclosing the valve. According to the invention the fluid supply line comprises an outlet within the housing, establishing a pressure within the housing mainly equal to the pressure of the supply fluid at the inlet of the valve. The invention also regards a method for protecting a subsea valve system.
    Type: Application
    Filed: August 29, 2008
    Publication date: September 30, 2010
    Applicant: Framo Engineering AS
    Inventors: Jørgen Eide, Henrik Steine Madsen
  • Publication number: 20100236644
    Abstract: A valve assembly may include a main housing and first and second electro-statically actuated valves. The main housing may define at least three chambers, with a first chamber configured to be coupled to a high pressure supply port, a second chamber configured to be coupled to an output port, and a third chamber configured to be coupled to a low pressure exhaust port. The first electro-statically actuated valve may be provided between the first and second chambers, and the first electro-statically actuated valve may allow or substantially block fluid communication between the first chamber and the second chamber responsive to a first electrical signal. The second electro-statically actuated valve may be provided between the second and third chambers, and the second electro-statically actuated valve may allow or substantially block fluid communication between the second chamber and the third chamber responsive to a second electrical signal. Related methods are also discussed.
    Type: Application
    Filed: June 4, 2010
    Publication date: September 23, 2010
    Inventors: Kevin R. Douglas, William O. Teach, Paul W. Gibson, Donald C. Harris, Scott H. Goodwin, David E. Dausch, Wayne D. Dettloff
  • Publication number: 20100236643
    Abstract: One embodiment of the present invention can include a flow control device that comprises an inlet, an outlet in fluid communication with the inlet, a pressure sensor, which may or may not be the only pressure sensor of the fluid control device, and a controller coupled to the pressure sensor. The controller can be configured to generate a valve control signal based on a measured pressure at a single pressure sensor.
    Type: Application
    Filed: May 10, 2010
    Publication date: September 23, 2010
    Inventors: Craig L. Brodeur, Marc Laverdiere, Robert F. McLoughlin, J. Karl Niermeyer, Jieh-Hwa Shyu
  • Patent number: 7798167
    Abstract: A gas supply facility includes a plurality of pressure type flow controllers connected in parallel, and a first controller to control operation of the plurality of pressure type flow controllers so as to supply a desired gas exhausted by a vacuum pump to a chamber while controlling its flow rate, one of the pressure type flow controllers operates as a second controller to control the gas flow rate range up to 10% of the maximum flow rate supplied to the chamber, while the remaining pressure type flow controllers are made to be ones that control the rest of the gas flow rate range. Furthermore, pressure inside the chamber is controlled by installing a pressure detector in the chamber, inputting the value detected by the detector to the controller, and by adjusting a control signal to the pressure type flow controllers.
    Type: Grant
    Filed: April 6, 2006
    Date of Patent: September 21, 2010
    Assignees: Fujikin Incorporated
    Inventors: Tadahiro Ohmi, Akniobu Teramoto, Tomio Uno, Ryousuke Dohi, Kouji Nishino, Osamu Nakamura, Atsushi Matsumoto, Masaaki Nagase, Nobukazu Ikeda
  • Patent number: 7798168
    Abstract: Apparatus and method for dispensing a gas using a gas source coupled in selective flow relationship with a gas manifold. The gas manifold includes flow circuitry for discharging gas to a gas-using zone, and the gas source includes a pressure-regulated gas source vessel containing the gas at superatmospheric pressure. The pressure-regulated gas source vessel can be arranged with a pressure regulator at or within the vessel and a flow control valve coupled in flow relationship to the vessel, so that gas dispensed from the vessel flows through the regulator prior to flow through the flow control valve, and into the gas manifold. The apparatus and method permit an enhancement of the safety of storage and dispensing of toxic or otherwise hazardous gases used in semiconductor processes.
    Type: Grant
    Filed: November 10, 2009
    Date of Patent: September 21, 2010
    Assignee: Advanced Technology Materials, Inc.
    Inventors: W. Karl Olander, Matthew B. Donatucci, Luping Wang, Michael J. Wodjenski
  • Publication number: 20100212748
    Abstract: Systems and methods are provided for detecting and preventing fluid leaks. A rate of flow of a portion of fluid flowing through a fluid distribution network over a period of time is monitored. A determination is made whether the rate of flow of the fluid over the period of time is greater than zero but so low that it indicates a leak in the water pipe. If the rate of flow over the period of time indicates a leak, then the flow of the liquid through the system is stopped and an indication is provided that a leak has been detected.
    Type: Application
    Filed: February 20, 2009
    Publication date: August 26, 2010
    Inventor: John Andrew Davidoff
  • Patent number: 7775236
    Abstract: A method and apparatus for delivering gases to a semiconductor processing system are provided. In one embodiment, an apparatus for delivering gases to a semiconductor processing system includes a plurality of gas input and output lines having inlet and outlet ports. Connecting lines couple respective pairs of the gas input and gas output lines. Connecting valves are arranged to control flow through the respective connecting lines. Mass gas flow controllers are arranged to control flow into respective inlet ports. In another embodiment, a method includes providing a manifold having at least a plurality of inlet that may be selectively coupled to at least one of a plurality of outlets, flowing one or more gases through the manifold to a vacuum environment by-passing the processing chamber prior to processing or to a calibration circuit, and flowing the one or more gases into the processing chamber during substrate processing.
    Type: Grant
    Filed: February 26, 2007
    Date of Patent: August 17, 2010
    Assignee: Applied Materials, Inc.
    Inventors: Ezra Robert Gold, Richard Charles Fovell, James Patrick Cruse, Jared Ahmad Lee, Bruno Geoffrion, Douglas Arthur Buchberger, Martin J. Salinas
  • Patent number: 7766030
    Abstract: A high pressure transducer is disclosed. The transducer includes a supply inlet configured to provide a gas supply to the high pressure transducer at a supply pressure and a pressure divider section coupled to the supply inlet. The pressure divider section is configured to reduce the supply pressure to a reduced pressure as a function of a first predetermined ratio. The transducer also includes a low pressure control section coupled to the pressure divider section and configured to receiving the gas supply at the reduced pressure and an amplifying section coupled to the low pressure control section. The low pressure control section varies the reduced pressure to produce a variable control pressure to actuate the amplifying section in response thereto. The amplifying section is also configured to multiply the variable control pressure as a function of a second ratio to obtain an output pressure.
    Type: Grant
    Filed: July 19, 2007
    Date of Patent: August 3, 2010
    Assignee: Fairchild Industrial Products Company
    Inventor: Andy R. Askew
  • Patent number: 7753066
    Abstract: “SINGLE SYSTEM FOR CONTROL OF HIGH OR LOW PRESSURE GASES FLOW RATE AND VALVE FOR CONTROL OF HIGH OR LOW PRESSURE GASES”, consists essentially in a system (S), which has active control of the movement of the valve (1) ram (P) solely by the concept of measurement of the flow rate and by the difference of pressure between the input and output of said valve (1), which, based on certain preconceived parameters, opens or closes the ram (P) so as to compensate the error between the actual and programmed flow rates.
    Type: Grant
    Filed: May 2, 2006
    Date of Patent: July 13, 2010
    Assignee: Thermojet do Brasil Ltda.
    Inventors: Ricardo Leite Passos, Alfredo José Alvim De Castro, Caio Moldehnhauer Peret, Eduardo Sala Polati, Heldai Lemos Ferreira, Sérgio Lopes Donke, Rodrigo Muzzutti, Renato Giacomini, Renato Gallina
  • Publication number: 20100170582
    Abstract: An object is to prevent a mistaken shutoff caused by the mistaken registration of an appliance of which an amount of gas used changes. An individual flow registration maintenance unit maintains a registered flow rate deleted due to an increase/decrease in flow rate, again, performs determination on the flow rate maintained when a new flow rate is registered or a flow rate added with the maintained flow rate, and in the case where it is regarded to be the same, re-register the maintained flow rate.
    Type: Application
    Filed: March 7, 2008
    Publication date: July 8, 2010
    Applicant: Panasonic Corporation
    Inventors: Yasuo Koba, Kouichi Ueki, Kazutaka Asano, Takuhisa Ootani
  • Publication number: 20100163119
    Abstract: In order to improve a measurement accuracy of a mass flow meter, the mass flow meter comprises a flow rate calculating section that obtains an output signal from a sensor section having a thermosensitive resistive element arranged in a flow channel where a sample gas flows and that calculates a flow rate of the sample gas, a pressure measuring section that measures a primary side pressure in the flow channel, and a flow rate correcting section that corrects the measured flow rate obtained by the flow rate calculating section by the use of the primary side pressure obtained by the pressure measuring section and a gas coefficient determined by an isobaric specific heat of the sample gas.
    Type: Application
    Filed: November 24, 2009
    Publication date: July 1, 2010
    Applicant: HORIBA STEC, CO., Ltd.
    Inventors: Yasuhiro Isobe, Osamu Horinouchi, Yuki Tanaka, Masao Yamaguchi, Yukimasa Furukawa
  • Publication number: 20100154899
    Abstract: In a pressure controller, a drive piston and pressure control valve are freely movably supported in a housing, the drive piston is supported by being energized and the pressure control valve is supported by being energized to make a pressure chamber and a decompression chamber communicatively connectible, the drive piston and the pressure control valve are moved by an electromagnetic force of a solenoid via a ring piston to make a hyperbaric chamber and the pressure chamber communicatively connectible and also an external piston is freely movably provided facing the drive piston and by making a control pressure acting on the external piston from a rear pressure chamber on a drive piston side equal to or greater than an external pressure acting from outside from an input unit, pressure control can properly be performed by readily moving a drive valve by pressure from outside when a power supply is defective.
    Type: Application
    Filed: July 20, 2007
    Publication date: June 24, 2010
    Applicant: Toyota Jidosha Kabushiki Kaisha
    Inventor: Hiroshi Isono
  • Patent number: 7740024
    Abstract: One embodiment of the present invention can include a flow control device a flow control device that comprises an inlet, an outlet in fluid communication with the inlet, a pressure sensor, which may or may not be the only pressure sensor of the fluid control device, and a controller coupled to the pressure sensor. The controller can be configured to generate a valve control signal based on a measured pressure at a single pressure sensor.
    Type: Grant
    Filed: February 9, 2005
    Date of Patent: June 22, 2010
    Assignee: Entegris, Inc.
    Inventors: Craig L. Brodeur, Marc Laverdiere, Robert F. McLoughlin, J. Karl Niermeyer, Jieh-Hwa Shyu
  • Publication number: 20100126600
    Abstract: A metering body for a chemical injection system comprises a free piston having a pair of mechanically-actuated poppet valves which may individually open to permit fluid to pass from one side of the free piston to the other. The free piston slides within a cylinder having cylinder heads at opposing ends. Input/output ports are provided in the cylinder heads. In a preferred embodiment, the poppet valves have actuators that extend beyond the opposing faces of the free piston. If one face of the piston moves to within a predetermined distance of a cylinder head, the actuator contacts the cylinder head and further movement of the piston causes the corresponding poppet valve to open, permitting fluid to flow through the piston. In this way, a fault-tolerant system may be implemented. If a power interruption or other failure of the controller occurs, the system will continue to supply fluid at the most recently selected flow rate.
    Type: Application
    Filed: November 26, 2008
    Publication date: May 27, 2010
    Applicant: NATIONAL COUPLING COMPANY
    Inventor: RICHARD R. WATSON
  • Patent number: 7723700
    Abstract: A vapor delivery system for delivering a steady flow of sublimated vapor to a vacuum chamber comprises a vaporizer of solid material, a mechanical throttling valve, and a pressure gauge, followed by a vapor conduit to the vacuum chamber. The vapor flow rate is determined by both the temperature of the vaporizer and the setting of the conductance of the mechanical throttle valve located between the vaporizer and the vacuum chamber. The temperature of the vaporizer is determined by closed-loop control to a set-point temperature. The mechanical throttle valve is electrically controlled, e.g. the valve position is under closed-loop control to the output of the pressure gauge. In this way the vapor flow rate can be generally proportional to the pressure gauge output. All surfaces exposed to the vapor from the vaporizer to the vacuum chamber are heated to prevent condensation.
    Type: Grant
    Filed: December 9, 2004
    Date of Patent: May 25, 2010
    Assignee: Semequip, Inc.
    Inventors: Thomas N. Horsky, Robert W. Milgate, III
  • Publication number: 20100116347
    Abstract: Systems and processes may provide improved performance for a pneumatic positioner during a safety override. In certain implementations, a system and process may include may include the ability to receive an input control signal, power control circuitry of the pneumatic positioner using the input control signal, and generate a control signal for a signal-to-pressure converter with the control circuitry based at least partially on the input control signal. The system and process may also include the ability to detect an unsafe operating condition for the pneumatic positioner based on an input signal and modify the control signal in response to detecting the unsafe operating condition, to cause the converter to transition to a safe state. The system and process may additionally include the ability to allow the control circuitry to continue being powered by the input control signal while the converter is in the safe state.
    Type: Application
    Filed: January 21, 2010
    Publication date: May 13, 2010
    Applicant: Dresser, Inc.
    Inventors: Mark V. Chester, Peter S. Levesque, Alex J. Legere
  • Publication number: 20100108149
    Abstract: An I/P converter is disclosed. The I/P converter comprises a nozzle (7) coupled to a magnetic circuit. A temperature compensation ring (3) is coupled to the top side of the magnetic circuit. A flexure (1) is coupled to the temperature compensation ring. The temperature compensation ring is configured to position the flexure relative to a first end of the nozzle and the temperature compensation ring is configured to maintain the relative position between the nozzle and the flexure over a range of temperatures.
    Type: Application
    Filed: March 16, 2007
    Publication date: May 6, 2010
    Applicant: Norgren Limited
    Inventors: Chris Wheater, Paul Hartley, Rajendra Parmar
  • Patent number: 7673645
    Abstract: The multiple antisymmetric optimal (MAO) control algorithm is disclosed for a gas delivery system including a flow ratio controller for dividing a single mass flow into multiple flow lines. In the MAO control algorithm, each flow line is provided with a flow sensor and a valve actively controlled by a SISO feedback controller combined with a linear saturator to achieve the targeted flow ratio set point. For optimal control performance, these SISO controller and linear saturators are substantial identical. It is proved that each valve control command is multiple antisymmetric to the summation of all other valve control commands. Therefore, the MAO control algorithm guarantees that there exists at least one valve at the allowable maximum open position at any moment, which achieves the optimal solution in terms of the maximum total valve conductance for a given set of flow ratio set points.
    Type: Grant
    Filed: February 20, 2007
    Date of Patent: March 9, 2010
    Assignee: MKS Instruments, Inc.
    Inventors: Junhua Ding, Kaveh H. Zarkar
  • Publication number: 20100051408
    Abstract: A control device for and a method of controlling a gearbox having a pressure-limiting device connected to a pressure medium source. A first controllable valve device is connected downstream of the pressure-limiting device and an actuating device is connected further downstream and adjusts the gearbox. A second controllable valve device is connected directly to the pressure medium source, via a supply line, and another actuating device is connected downstream of the second controllable valve device. An electric control device is provided for actuating the controllable valve devices and a sensor is connected to the electric control device for measuring pressure of the pressure medium in the supply line. The electric control device is connected to the second controllable valve device such that the second controllable valve device and the further actuating device are controlled by the pressure of the pressure medium in the supply line.
    Type: Application
    Filed: November 5, 2007
    Publication date: March 4, 2010
    Applicant: ZF FRIEDRICHSHAFEN AG
    Inventors: Markus Ulbricht, Mario Steinborn
  • Publication number: 20100057262
    Abstract: A fluid regulator characterization system can characterize the flow of a fluid regulator that results in response to a received control signal. The fluid regulator characterization system can use the characterization to achieve a linear fluid regulator flow gain over a full operating range (e.g., zero percent travel to one hundred percent travel) for the fluid regulator relative to the received control signal. A linear fluid regulator flow gain can improve process control and reduce process variability.
    Type: Application
    Filed: September 4, 2008
    Publication date: March 4, 2010
    Applicant: Dresser, Inc.
    Inventor: Henry W. Boger
  • Publication number: 20100037838
    Abstract: The invention relates to a valve for controlling volumetric flows in a heating and/or cooling system of a motor vehicle, comprising a valve housing (10), from which at least one inlet channel (18) and at least one outlet channel (20, 22) branch, in addition to at least one disc-type valve body (28) for controlling the flow, said body being located in the valve housing (10) so that it can rotate about the axis (31) of a driven shaft (30). According to the invention, the valve comprises means for compensating an imbalance, said means ensuring a uniform distribution of mass about the rotational axis (31) of the valve body (28). The invention also relates to a heating and/or cooling circuit (110) of motor vehicle, comprising at least one coolant control valve (131) of this type.
    Type: Application
    Filed: October 1, 2007
    Publication date: February 18, 2010
    Inventors: Jochen Moench, Alois Hils, Georg Reeb, Roland Schmidt, Sven Urlaub
  • Patent number: 7661439
    Abstract: Systems and processes may provide improved performance for a pneumatic positioner during a safety override. In certain implementations, a system and process may include the ability to receive an input control signal, power control circuitry of the pneumatic positioner using the input control signal, and generate a control signal for a signal-to-pressure converter with the control circuitry based at least partially on the input control signal. The system and process may also include the ability to detect an unsafe operating condition for the pneumatic positioner based on an input signal and modify the control signal in response to detecting the unsafe operating condition, to cause the converter to transition to a safe state. The system and process may additionally include the ability to allow the control circuitry to continue being powered by the input control signal while the converter is in the safe state.
    Type: Grant
    Filed: February 7, 2006
    Date of Patent: February 16, 2010
    Assignee: Dresser, Inc.
    Inventors: Mark V. Chester, Peter S. Levesque, Alex J. Legere
  • Publication number: 20100036534
    Abstract: A valve system for a mass flow controller that controls a flow rate of a fluid is disclosed. The valve system includes a valve movable between an open position and a closed position to adjust the flow rate of the fluid to a desired set point, and a valve controller. The valve controller sends a valve current through the valve, so as to adjust the flow rate of the fluid until an actual measured flow rate of the fluid substantially equals the desired set point. The valve controller monitors the valve current and the flow rate when the valve is moving to the closed position, determines a value of the valve current when the fluid has near-zero flow rate, and updates the valve cracking current for a next run, by setting the updated valve cracking current to the value of the valve current at the near-zero flow rate.
    Type: Application
    Filed: June 16, 2008
    Publication date: February 11, 2010
    Inventor: Junhua Ding
  • Publication number: 20100032022
    Abstract: A thermal energy machining (“TEM”) machine gas handling system in which the improvement is a fluid-controlled pressure regulation subsystem for controlling the dispensing of a TEM process gas via the regulation of the pressure of the TEM process gas. Such subsystems include a pressure regulator, a pressure transducer, and a digital controller working in combination to control the process gas outlet pressure of the pressure regulator. The pressure regulator's diaphragm that controls the valve that regulates the process gas outlet pressure is mechanically acted upon by the piston of a pneumatic or hydraulic cylinder. Controlling the pneumatic or hydraulic cylinder regulates the output pressure of the process gas. The pressure transducer and the digital controller work in combination to adjust the feed pressure of the pneumatic or hydraulic cylinder, which in turn regulates the pressure of the process gas at the outlet of the pressure regulator.
    Type: Application
    Filed: August 5, 2008
    Publication date: February 11, 2010
    Inventors: Kieran McMahon, Eamonn O'Halloran
  • Patent number: 7658200
    Abstract: The present invention provides a semiconductor manufacturing apparatus having a slit valve control system including first and second process chambers disposed adjacent to each other, a slit aperture disposed between the first and second chambers, a slit valve to open and close the slit aperture between first and second chambers, an air source to operate the slit valve, a pressure supply flow path connecting the slit valve with the air source, and a pressure regulator installed on the supply flow path to regulate pressure supplied from the air source to the slit valve.
    Type: Grant
    Filed: August 8, 2005
    Date of Patent: February 9, 2010
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jae-Sun Choi, Chi-Ho Han, Ki-Joong Jang, Jin-Su Jung
  • Patent number: 7658203
    Abstract: Fluid sensing shut-off devices with timer and methods of operation to shut off fluid flow if a primary shutoff valve sticks in the on condition. An embodiment is disclosed using a microphone to sense fluid flow, with a microprocessor periodically awakening from a sleep mode to power the sensor and determine if there is flow. If there is flow, the microprocessor times flow, and if flow is not shut off within a predetermined length of time, the microprocessor shuts off the valve. The valve itself normally held in a magnetically latched, valve open state, but may be unlatched by a current pulse to close the valve. Various embodiments and applications are disclosed.
    Type: Grant
    Filed: March 11, 2009
    Date of Patent: February 9, 2010
    Assignee: Enginuity, Inc.
    Inventors: Thurman F. Hodge, Benjamin Grill, Oded Eddie Sturman
  • Patent number: 7658204
    Abstract: An opening/closing of a plurality of valves are controlled so that a plurality of gases flow into a chamber in an operation of a semiconductor manufacturing apparatus, and the opening/closing of the plurality of valves are controlled so that a gas A flows into mass flowmeters in an inspection of a mass flow controller MFC 2?. Therefore, the inspection can be achieved while maintaining the connection of mass flow controller MFC 2? to the semiconductor manufacturing apparatus.
    Type: Grant
    Filed: August 29, 2006
    Date of Patent: February 9, 2010
    Assignee: Renesas Technology Corp.
    Inventor: Shoji Ishida
  • Patent number: 7654137
    Abstract: The present invention provides a corrosion-resistant metal made sensor for fluid and a fluid supply device for which the sensor is employed. More specifically, the corrosion-resistant metal made sensor for fluid is equipped with a corrosion-resistant metal substrate, a mass flow rate sensor part comprising a corrosion resistant metal substrate, a thin film forming a temperature sensor and a heater mounted on the back face side of the fluid contacting surface of the corrosion-resistant metal substrate, and a pressure sensor part comprising a thin film forming a strain sensor element mounted on the back face side of the fluid contacting surface of the corrosion-resistant metal substrate, and the sensor is so constituted that the mass flow rate and pressure of the fluid are measured.
    Type: Grant
    Filed: January 13, 2005
    Date of Patent: February 2, 2010
    Assignee: Fujikin Incorporated
    Inventors: Kaoru Hirata, Nobukazu Ikeda, Kouji Nishino, Ryousuke Dohi
  • Publication number: 20100018592
    Abstract: A fluid flow control system for precisely controlling fluid flow from a source of fluid under pressure. A flow path for coupling said source of fluid to a point of utilization includes a valve and a flow restrictor. A pressure transducer is connected across the flow restrictor for measuring the pressure differential thereacross and producing a signal proportional to the pressure differential, and a controller is connected to receive said signal and pulse said valve at a frequency to obtain a preset target value of pressure across said flow restrictor. A system of mixing two or more fluid streams comprising in combination one or more flow control systems are defined above and a mixer coupled to each of said fluids is coupled to the point of utilization.
    Type: Application
    Filed: April 20, 2009
    Publication date: January 28, 2010
    Inventor: Frederick A. Parker
  • Patent number: 7650903
    Abstract: A fluid controller that allows facilitated installment, piping and wiring connection to semiconductor manufacturing equipment and does not corrode even when a corrosive fluid is used, includes a flowmeter sensor section having a first ultrasonic transducer which transmits ultrasonic waves in a fluid and a second ultrasonic transducer which receives the ultrasonic waves transmitted from the first ultrasonic transducer and outputs the signal thereof to a flowmeter amp section. An adjustment valve that adjusts the flow rate of the fluid using operation pressure is provided, and at least the flowmeter sensor section and the adjustment valve are connected to and disposed in a casing having a fluid inlet and a fluid outlet.
    Type: Grant
    Filed: August 31, 2005
    Date of Patent: January 26, 2010
    Assignee: Asahi Organic Chemicals Industry Co., Ltd.
    Inventor: Takashi Yamamoto
  • Patent number: 7647940
    Abstract: An apparatus for controlling a valve including an enclosure that defines first and second chambers, an indicator proximate the first and second chambers, an operating media distribution system that is disposed in the first chamber, and an electronic control unit disposed in the second chamber. The operating media distribution system includes a manifold block that has an exterior surface, and a plurality of operating media distribution cartridges exchangeably disposed with respect to the manifold block. The manifold block defines a plurality of holes, an operating media supply passage and an operating media exhaust passage. Each of the plurality of operating media distribution cartridges is disposed in a respective one of the plurality of holes and includes a cylinder and a spool assembly that is disposed in and displaced relative to the cylinder. The electronic control unit operates at least one electromagnetic valve to control operating media flow via the operating media distribution system.
    Type: Grant
    Filed: May 17, 2006
    Date of Patent: January 19, 2010
    Assignee: Westlock Control Corporation
    Inventors: Leo Minervini, Eric Jordan
  • Publication number: 20100000615
    Abstract: An automatic leak detection and shutoff system for plumbing systems that detects a flow of water that endures longer than a user sets as normal, and shuts off the flow of water when it detects that water has flowed too long. Water flow can be restored by pressing a reset button.
    Type: Application
    Filed: July 3, 2008
    Publication date: January 7, 2010
    Inventor: Charles Finlayson
  • Publication number: 20090317316
    Abstract: A method operable to remove contaminants from a contaminated fluid stream is provided. The process includes receiving the fluid stream containing contaminants. A first portion of the contaminants are removed from the fluid stream with a first scrubbing vessel. A first base solution reacts with the contaminants such that the contaminants enter a contaminant solution. A remaining portion of the contaminants from the fluid stream is then removed with a at least one additional scrubbing vessel, wherein a second base solution reacts with the contaminants such that part of the remaining portion of the contaminants enter a second solution. Water content is then removed from the fluid stream with a desiccating module, wherein the desiccating module outputs a clean fluid stream.
    Type: Application
    Filed: September 11, 2008
    Publication date: December 24, 2009
    Inventors: Robert A. McLauchlan, Frederick J. Siegele
  • Publication number: 20090301578
    Abstract: The invention relates to a valve, in particular, a proportional pressure relief valve, comprising an electrically controlled solenoid system (10) for the control of an operating part (12,12a) which cooperates with a valve element (26), running longitudinally inside a valve housing (24) which releases a fluid transport connection path, between a fluid inlet (32) and a fluid outlet (34), in the open position thereof, and which blocks the through path in the closed position thereof, whereby an energy store, preferably in the form of a compression spring (58) is arranged between the operating piece (12,12a) and valve element (26) in a free gap between the two, which tends to hold the valve element (26) in the direction of the closed position thereof and the operating piece (12a) is embodied as a type of guide piston (70) which has a longitudinal guide for the valve element (26).
    Type: Application
    Filed: April 1, 2006
    Publication date: December 10, 2009
    Inventors: Peter Bruck, Markus Bill
  • Patent number: 7621290
    Abstract: The antisymmetric optimal control algorithm is disclosed for a gas delivery system including a flow ratio controller for dividing a single mass flow into at least two flow lines. Each flow line includes a flow meter and a valve. Both valves of the flow ratio controller are controlled through a ratio feedback loop by the antisymmetric optimal controller which includes a single input single output SISO controller, an inverter and two linear saturators. The output of the SISO controller is split and modified before being applied to the two valves. The two valve control commands are virtually antisymmetric to the maximum allowable valve conductance position.
    Type: Grant
    Filed: April 21, 2005
    Date of Patent: November 24, 2009
    Assignee: MKS Instruments, Inc.
    Inventors: Junhua Ding, John A. Smith, Kaveh H. Zarkar
  • Patent number: 7621293
    Abstract: A multi-functional or versatile emergency shutdown valve controller may be used in various different emergency shutdown configurations to enable the testing of different types and configurations of emergency shutdown devices and the supporting equipment associated therewith. In one example, a digital valve controller for use with an emergency shutdown valve includes two pressure sensors and is adapted to be connected to a pneumatic valve actuator and to a solenoid valve device to assist in the on-line testing of the valve actuator as well as in the on-line testing of the solenoid valve. To perform testing of the solenoid valve, the valve controller may measure the pressure at different ports of the solenoid valve as the solenoid valve is actuated for a very short period of time. The valve controller may determine whether the solenoid device is fully functional or operational based on the derivative of the difference between the measured pressure signals, i.e.
    Type: Grant
    Filed: June 23, 2006
    Date of Patent: November 24, 2009
    Assignee: Fisher Controls International LLC
    Inventor: Jimmie L. Snowbarger