Vacuum Pump Patents (Class 137/565.23)
  • Patent number: 11244803
    Abstract: To provide a plasma processing apparatus or an operating method of a plasma processing apparatus with improved yield.
    Type: Grant
    Filed: January 23, 2020
    Date of Patent: February 8, 2022
    Assignee: HITACHI HIGH-TECH CORPORATION
    Inventor: Keisuke Akinaga
  • Patent number: 11110936
    Abstract: In a hybrid vehicle, a hybrid type lubrication control valve which is a solenoid valve type turned on/off by electricity is used as a lubrication system component for circulating lubricating oil to a transmission and an engine clutch. A method includes measuring, by an engine clutch pressure sensor, first engine clutch engagement pressure in an off-state of the independent type lubrication control valve and second engine clutch engagement pressure in an on-state thereof; and determining, by the TCU, whether or not the independent type lubrication control valve is stuck, on the basis of a pressure difference between the first engine clutch engagement pressure and the second engine clutch engagement pressure. The method can diagnose a stuck state of the hybrid type lubrication control valve using hydraulic pressure for operating engine clutch engagement, before starting the vehicle.
    Type: Grant
    Filed: April 26, 2019
    Date of Patent: September 7, 2021
    Assignees: Hyundai Motor Company, Kia Motors Corporation
    Inventors: Young Jun Lee, Woul Sun Choi, Ho Sun Jang, Tae Hyung Koo
  • Patent number: 10697698
    Abstract: A vacuum insulated cabinet structure includes first and second cover members having pre-deformed portions and perimeter portions. The perimeter portions of the first and second cover members are disposed along first and second planar levels and the pre-deformed portions of the first and second cover members include portions thereof extending outwardly relative to the first and second planar levels. A thermal bridge interconnects the first cover member and the second cover member at the perimeter portions thereof to define an insulating cavity therebetween. The insulating cavity is a sealed cavity having a vacuum drawn therefrom. The pre-deformed portions of the first and second cover members move inwardly towards the first and second planar levels under a force of the vacuum within the insulating cavity.
    Type: Grant
    Filed: December 23, 2016
    Date of Patent: June 30, 2020
    Assignee: Whirlpool Corporation
    Inventors: Eric J. Dherde, Lorraine J. Westlake
  • Patent number: 9977005
    Abstract: The invention relates to a gas sampling device for a filling station for hydrogen tanks, said device comprising a circuit comprising a first upstream end provided with an inlet connector to a detachably connected to an outlet connector of a filling station, and two conduits respectively for sampling and filling connected in parallel to the inlet connector, the sampling conduit comprising a valve system, a first pressure reducing valve and a container for collecting a sample of gas expanded by said first pressure reducing valve, and the filling conduit comprising a downstream end provided with a first outlet connector to a detachably connected to an inlet connector of a tank to be filled.
    Type: Grant
    Filed: July 30, 2014
    Date of Patent: May 22, 2018
    Assignee: L'AIR LIQUIDE SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE
    Inventors: David Carteau, Patrick Mauvais
  • Patent number: 9885322
    Abstract: A fuel evaporative emission processing system suitable for a hybrid vehicle includes a fuel vapor passage, a shut-off valve, a purge passage, a first purge control valve, and a second purge control valve. The shut-off valve selectively opens and closes the fuel vapor passage communicating between a fuel tank and a canister. The first purge control valve opens and closes the purge passage communicating between the canister and an intake air passage of an internal combustion engine. The second purge control valve selectively opens or closes the tank opening passage communicating between the purge passage on an upstream side of the first purge control valve and the fuel tank. When purging the canister, by opening the second purge control valve, the evaporative fuel inside the fuel tank is directly processed by the internal combustion engine, so that increase in the amount of adsorption in the canister can be suppressed.
    Type: Grant
    Filed: February 12, 2015
    Date of Patent: February 6, 2018
    Assignee: Nissan Motor Co., Ltd.
    Inventors: Tomoharu Takezawa, Shinsuke Takakura
  • Patent number: 9631347
    Abstract: System and method for automatically and remotely maintaining acceptable levels of chlorine residual in the dead end branches of potable water mains so as to protect the users from high levels of coliform organisms by pumping stagnant water from the dead end branch back to a flowing water main. A solar panel serves as the source of power with batteries being used to store energy. A water circulation pump evacuates water through an insertable rigid flexible tubing from a point near the distal end of the dead end branch to the nearest flowing water main. A programmable logic controller is used to operate the pump during periods of time when there is enough available solar energy or when the batteries are sufficiently charged.
    Type: Grant
    Filed: August 29, 2016
    Date of Patent: April 25, 2017
    Inventor: Mell H. Kuhn
  • Patent number: 9086156
    Abstract: An analytical device for automated determining of a measured variable of a measured liquid, including: a measuring cell; a measuring transducer; a control unit; a system of liquid lines; a first liquid container which is connected to the measuring cell via a first liquid path; a second liquid container, which is connected to the measuring cell via a second liquid path, liquid path can be blocked by means of at least a second valve; wherein a first pump is associated with the first liquid container; and wherein a second pump (different from the first pump) for transport of liquid along the second liquid path is associated with the second liquid container; and wherein the analytical device has a central valve switching mechanism, especially controllable by the control unit, for actuating the first valve and the second valve.
    Type: Grant
    Filed: May 11, 2012
    Date of Patent: July 21, 2015
    Assignee: Endress + Hauser Conducta Gesellschaft für Mess- und Regeltechnik mbH + Co. KG
    Inventors: Tobias Zachmann, Ulrich Kathe, Thomas Schipolowski, Ralf Bernhard, Christian Hirn, Ralf Steuerwald
  • Publication number: 20150114476
    Abstract: A method for adjusting operating parameters of a vacuum pump arrangement includes determining characteristics of a gas flowing through the vacuum pump arrangement; and setting operating parameters of the vacuum pump arrangement based on the determined characteristics of the first gas. A controller can be configured to perform the method for adjusting the operating parameters of the vacuum pump arrangement in accordance with the characteristics of the gas.
    Type: Application
    Filed: April 23, 2013
    Publication date: April 30, 2015
    Inventors: Neil Turner, Jack Raymond Tattersall
  • Patent number: 9016982
    Abstract: A system for recirculating lock water includes a sealable storage area located near a lock for receiving water from the lock. The storage area is large enough to house the lock water with excess space between a maximum water level and the ceiling. The system also includes at least one compressor connected to the storage area to create a vacuum to withdraw the water from the lock into the storage area.
    Type: Grant
    Filed: May 27, 2013
    Date of Patent: April 28, 2015
    Inventor: Dan Peled
  • Publication number: 20150102512
    Abstract: A system and method for safely enabling the delivery of at least one gas line to at least one point of use in a facility by using a vacuum system and a gas delivery system wherein the gas delivery system is housed within the vacuum system is disclosed herein. An interior volume of a conduit containing therein at least one gas line is maintained at reduced pressure as one end of the gas line connects to a gas source and another end of the gas line connects to a point of use. By using a conduit to enclose the individual gas lines and using a single feed line for each gas, the embodiments disclosed herein reduce the number of individual gas lines that need to be run through a facility.
    Type: Application
    Filed: October 6, 2014
    Publication date: April 16, 2015
    Inventor: Dennis L. DeMARS
  • Publication number: 20150053286
    Abstract: A suction structure includes a connection member and at least one suction assembly coupled to the connection member. The at least one suction assembly includes a base, a suction member, at least one first buffering member, at least one second buffering member, and at least one pushing member. The at least one suction assembly is assembled on the base. The at least one first buffering member is at least partially housed in the base. The at least one second buffering member forms a sleeve around at least a portion of the base. The at least one pushing member cooperates with the base and has a first end coupled to the at least one first buffering member and a second end at least partially exposed from with the suction member.
    Type: Application
    Filed: August 21, 2014
    Publication date: February 26, 2015
    Inventors: XING-HUA CHEN, JIE GAO, JIAN-FENG ZHANG
  • Patent number: 8961708
    Abstract: A condensate management system for an air conditioning condensate drainage system is provided. The condensate management system may comprise an inlet and an outlet; a primary condensate flow path from the inlet to the outlet; a check valve disposed along the primary condensate flow path; a flush path from the inlet to the outlet; a pump coupled to the flush path; and a logic panel configured to actuate the pump to a flushing mode. The check valve may be configured to allow fluid flow from the inlet to the outlet. When the logic panel is configured to actuate the pump to the flushing mode, the pump is configured to exert a negative pressure at the inlet and a positive pressure at the outlet. Other system and methods to flush a condensate drain system are also described.
    Type: Grant
    Filed: November 13, 2013
    Date of Patent: February 24, 2015
    Assignee: Plexaire, LLC
    Inventors: Stewart Kaiser, William G. Williams
  • Patent number: 8939171
    Abstract: A system and method for controlling fluid flow within a microchannel includes a fluid circuit comprising a fluid outlet well and one or more fluid inlet wells, all in communication with a microchannel. A negative pressure differential is applied to the outlet well and fluid flow from an inlet well into the microchannel is controlled by opening or closing the inlet well to atmospheric pressure. To stop fluid flow from the inlet well, a negative pressure differential may be applied to the inlet well to equalize pressure between the inlet and outlet wells. By sequentially opening and closing different inlet wells to atmosphere, controlled amounts of different reagents can be serially introduced into the microchannel.
    Type: Grant
    Filed: February 15, 2012
    Date of Patent: January 27, 2015
    Assignee: Canon U.S. Life Sciences, Inc.
    Inventors: Shulin Zeng, Gregory A. Dale
  • Publication number: 20150020896
    Abstract: A method for continuously refilling an evaporator chamber is described. A solid material is transferred into a vacuum chamber via a vacuum lock. The vacuum chamber has a partition permeable only to liquid material. The material is heated in the vacuum chamber by a heating jacket of the vacuum chamber until liquefaction, and c. the material is transferred into a basin within an evaporator chamber via a drain and a connecting channel.
    Type: Application
    Filed: October 7, 2014
    Publication date: January 22, 2015
    Inventors: Raimund BOGER, Andreas JAHNKE, Thomas GOETZE
  • Publication number: 20140360603
    Abstract: A vacuum insulated panel is disclosed herein. According to an embodiment, the vacuum insulated panel may include a frame having a first side and a second side. The vacuum insulated panel also may include a first convex sheet positioned about the first side of the frame and a second convex sheet positioned about the second side of the frame. Moreover, the vacuum insulated panel may include a cavity formed between the first convex sheet and the second convex sheet. Further, the vacuum insulated panel may include a vacuum formed within the cavity. The vacuum may be configured to at least partially flatten the first convex sheet and the second convex sheet into a substantially parallel planar configuration.
    Type: Application
    Filed: June 9, 2014
    Publication date: December 11, 2014
    Inventor: Vinayak S. Godbole
  • Patent number: 8857465
    Abstract: The invention relates to a method for realizing a vacuum in at least one vacuum chamber. The method comprises providing an arrangement comprising a plurality of vacuum chambers, wherein each vacuum chamber is connected to a shared vacuum system. The shared vacuum system comprises a plurality of turbo molecular pumps, at least one common fore pump, and a piping system comprising one or more pipes for connecting the at least one common fore pump to each of the plurality of turbo molecular pumps. Each turbo molecular pump is separately connected to a corresponding vacuum chamber. The piping system further comprises flow regulators for controlling a flow within the piping system. The method further comprises selecting at least one vacuum chamber for pump-down, and separately pumping down the at least one selected vacuum chamber by means of the shared vacuum system.
    Type: Grant
    Filed: January 2, 2013
    Date of Patent: October 14, 2014
    Assignee: Mapper Lithography IP B.V.
    Inventor: Sander Baltussen
  • Publication number: 20140299555
    Abstract: The invention relates to a method and system for recycling domestic greywater. Greywater is drawn from a greywater waste pipe through an overflow pipe of a sanitary fixture, thereby, permitting greywater to be collected for reuse without the need for complicated and expensive retrofitting and/or reconfiguration of existing plumbing infrastructure. The system and method of the present invention can easily operate independently or be integrated with domestic utility systems to supply these utility systems with greywater.
    Type: Application
    Filed: November 14, 2012
    Publication date: October 9, 2014
    Inventor: MARRETT ALEXANDER GREEN
  • Publication number: 20140261802
    Abstract: A vacuum isolation device includes: a frame seat, at least one gas hole portion being formed thereon; a seal band set, configured on one side of the frame seat; a door plate element, mounted on the seal band set; and a vacuum generating device, connected with the gas hole portion, where a gas passageway is formed between seal bands, and the gas hole portion is in communication with the gas passageway. A vacuum state is formed in the gas passageway through the gas hole portion when the vacuum generating device is operated through the above structure, causing the door plate element to be attached onto the seal band set by means of vacuum operation while the vacuum generating device is operated. Thereupon, gas will be drawn out via the gas hole portion when it leaks from the inside or outside, thereby achieving the prevention of gas leak.
    Type: Application
    Filed: March 13, 2013
    Publication date: September 18, 2014
    Applicant: BECQUEREL & SIEVERT CO., LTD.
    Inventor: CHI-KUANG CHEN
  • Publication number: 20140269153
    Abstract: Example embodiments of the present invention provide a chemical solution mixing a dispensing system for making a customized chemical solution for industrial applications. For example, the embodiments of the present invention can include a chlorination system that mixes and then dispenses a chlorine solution into a water supply line for the treatment or sanitation of the water in the water supply line.
    Type: Application
    Filed: March 15, 2013
    Publication date: September 18, 2014
    Applicant: NKD Technologies, LLC
    Inventor: Ronald Scott Wells
  • Publication number: 20140224360
    Abstract: A submersible suction arrangement for providing paint sludge removal from one or more contaminant tanks in an automotive paint line systems. The contaminant tank is filled with a liquid mixture and includes a horizontal plane defined by the walls of the contaminant tank. The contaminant tank also has a total vertical depth between the top opening and the bottom surface of the contaminant tank. At the bottom of the contaminant tank is a paint sludge layer formed on at least a portion of the bottom surface of the contaminant tank. The submersible suction arrangement includes a submersible suction unit that removes the paint sludge layer at a location beneath the surface of the liquid mixture.
    Type: Application
    Filed: February 12, 2014
    Publication date: August 14, 2014
    Inventors: James E. Miller, Gordon T. Urquhart
  • Publication number: 20140216579
    Abstract: System, including apparatus and methods, for aspirating at least a portion of an emulsion from a well using a tip. In some embodiments, the tip may have a flat end and an inlet surrounded by the flat end. The well may have a floor with one or more surface features that prevent uninterrupted circumferential contact of the flat end of the tip with any region of the floor. In some embodiments, the tip may not have a flat end. In some embodiments, the well may have a port that guides the tip to the floor with the tip slanted with respect to the floor. Methods of making a device that includes the well are also disclosed.
    Type: Application
    Filed: February 3, 2014
    Publication date: August 7, 2014
    Applicant: Bio-Rad Laboratories, Inc.
    Inventors: Adam Bemis, Thomas H. Cauley, III, Klint Rose, James M. Hamilton
  • Publication number: 20140196805
    Abstract: A surgical suction mat for collecting and evacuating surgical fluids, the mat including a foam body having a surrounding border; a series of grooves defined on a first portion of the foam body and located interior of the border and defined substantially across the foam body, the grooves uniformly increasing in depth from adjacent a first side of the border of the foam body to a location adjacent an opposite second side of the border of the foam body, the grooves each being closed at a first end proximate the first side of the foam body and open an opposite second end; a plurality of spaced apart upper surfaces in-between the grooves and being of substantially uniform elevation to permit a relatively uniform and level upper mat surface on which a user can stand; a collection channel defined on a second portion of the foam body, the channel extending substantially perpendicular across the grooves, the collection channel being closed at each end and along one side of its length and the other side of the channel
    Type: Application
    Filed: January 17, 2013
    Publication date: July 17, 2014
    Applicant: DEROYAL INDUSTRIES, INC.
    Inventor: DeRoyal Industries, Inc.
  • Publication number: 20140174573
    Abstract: A purge solenoid valve is opened to introduce an atmospheric pressure into a fuel tank, the purge solenoid valve is closed to operate a negative pressure pump, and set an internal pressure of the tank to a reference pressure Pb. Then, a changeover valve is closed, and the purge solenoid valve is opened to cause a canister to communicate with an intake passage. Further, the changeover valve is opened, and the purge solenoid valve is closed. Then, a first tank internal pressure Po is detected and subtracted from the reference pressure Pb. If a calculated first pressure deviation ?Po is larger than a first threshold ?P1, it is determined that there is no open sticking in a sealing valve.
    Type: Application
    Filed: December 23, 2013
    Publication date: June 26, 2014
    Applicant: Mitsubishi Jidosha Kogyo Kabushiki Kaisha
    Inventors: Hideo MATSUNAGA, Katsuhiro FURUTA, Hisakazu IKEDAYA, Hitoshi KAMURA
  • Patent number: 8752580
    Abstract: A vacuum chamber for processing a substrate includes: a chamber body; and a chamber lid combined with the chamber body, wherein the chamber lid comprises: a frame having a plurality of openings; and a plurality of plates combined with the plurality of openings.
    Type: Grant
    Filed: June 23, 2009
    Date of Patent: June 17, 2014
    Assignee: Jusung Engineering Co., Ltd.
    Inventors: Hyun-Bum Choi, An-Ki Cha
  • Patent number: 8740587
    Abstract: An apparatus and method for differential pumping of a mass spectrometer or other ion-optical device provides a transverse pressure drop introduced across a face of a primary rotor of a turbomolecular pump by placement of one or more partitions in close proximity to the face of the primary rotor. Thus, two or more regions of space within the vacuum chamber having respective different pressures is achieved with a single pump.
    Type: Grant
    Filed: December 6, 2006
    Date of Patent: June 3, 2014
    Assignee: Thermo Finnigan LLC
    Inventor: Edward B. McCauley
  • Publication number: 20140137963
    Abstract: A fluid end assembly comprising a housing, valve bodies, seals, seats, springs, and other associated parts, paired with a suction manifold that facilitates bi-directional fluid flow. The suction manifold of this invention is designed to preserve fluid energy that will ensure complete filling of the cylinder in extreme pumping conditions. The suction manifold utilizes a chamber design positioned immediately below the suction valves, eliminating all connecting ducts. Alternate embodiments of this invention include a suction manifold with an integral fluid dampeners or stabilizers.
    Type: Application
    Filed: November 12, 2013
    Publication date: May 22, 2014
    Inventor: George H. Blume
  • Publication number: 20140130913
    Abstract: A small automatic polishing liquid cleaning device for rigid gas permeable contact lens includes a container; a containing chamber is provided inside the container; an exhaust pipe, and a liquid suction pipe which communicates with the containing chamber disposed on the container; an outlet end of the exhaust pipe communicates with a vacuum orifice of a vacuum generator via a connector, a gas inlet of the vacuum generator communicates with a pipeline for a compressed gas, and a liquid inlet of the liquid suction pipe is disposed at the bottom of a waste liquid trough.
    Type: Application
    Filed: July 22, 2011
    Publication date: May 15, 2014
    Applicants: WENZHOU FOCUSEE VISION CARE TECHNOLOGIES CO., LTD., WENZHOU MEDICAL UNIVERSITY, MENICON CO., LTD.
    Inventors: Jun Jiang, Hao Chen, Ying Shi, Atsuhiro Doke, Zhaolin Xia
  • Publication number: 20140124069
    Abstract: Provided is a load lock device which includes: a container with an opening formed therein and configured to be selectively maintained at an atmospheric environment and a vacuum atmosphere; a holding unit arranged within the container and configured to hold objects to be processed; an elevation mechanism configured to vertically move the holding unit; and a pressure regulating mechanism configured to vacuum-evacuate the container through the opening of the container. The elevation mechanism includes at least two vertically-extended elevation shaft members connected to the holding unit; and a drive unit configured to vertically move the elevation shaft members. The elevation shaft members are arranged opposite each other with the opening interposed therebetween.
    Type: Application
    Filed: November 1, 2013
    Publication date: May 8, 2014
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Masamichi HARA, Tetsuya MIYASHITA
  • Publication number: 20140124052
    Abstract: A system for extracting and discharging fecal sludge, including: a pneumatic pressure conveyor, the pneumatic pressure conveyor including an air inlet and an air outlet; a pipe tee; a first two-position three-way valve; a second two-position three-way valve; and a plurality of connecting pipes, the pipes including an air vent pipe. The pneumatic pressure conveyor, the air inlet thereof, the air outlet thereof, the pipe tee, the second two-position three-way valve, and the first two-position three-way valve are connected via the connecting pipes to form a loop. The pipe tee is disposed close to the air inlet of the pneumatic pressure conveyor, and one port of the pipe tee not enclosed in the loop functions as an air inlet end of the pneumatic pressure conveyor.
    Type: Application
    Filed: October 28, 2013
    Publication date: May 8, 2014
    Applicant: Changsha Dongbang Automated Toilet Co., Ltd.
    Inventor: Delin ZENG
  • Publication number: 20140120257
    Abstract: Methods and apparatus for selective gas injection and extraction for use in a substrate processing chamber are provided herein. In some embodiments, a gas injection and extraction apparatus includes a plate having a plurality of apertures through a thickness of the plate, each aperture of the plurality of apertures having an aperture wall; a plurality of tubes, each tube partially disposed within one of the plurality of apertures, wherein a disposed portion of each of the tubes is spaced apart from at least a portion of the aperture wall of the aperture in which it is disposed, thereby forming an interstice between at least a portion of the aperture wall and the disposed portion of the tube; a gas supply fluidly coupled to each of the tubes; and a vacuum source fluidly coupled to each of the interstices.
    Type: Application
    Filed: October 11, 2013
    Publication date: May 1, 2014
    Applicant: APPLIED MATERIALS, INC.
    Inventor: MARTIN J. RIPLEY
  • Publication number: 20140116516
    Abstract: Vacuum systems comprising vacuum insulating glass (VIG) units are provided. The vacuum spaces within the VIG units are connected to one another and to one or more vacuum pumps that are configured to operate during the service lives of the VIG units.
    Type: Application
    Filed: October 24, 2013
    Publication date: May 1, 2014
    Inventor: Robert S. Jones
  • Patent number: 8689820
    Abstract: The present invention relates to a Pneumatic System that can be employed within the residential environment. The system includes both a section mode and a pressure mode. Both of these modes, in turn, have both a low and a high pressure range. A variety of applications are disclosed for use in conjunction with the various modes of the system. These various applications are described in greater detail hereinafter.
    Type: Grant
    Filed: August 20, 2012
    Date of Patent: April 8, 2014
    Assignee: WFK & Associates, LLC
    Inventor: Waldemar F. Kissel, Jr.
  • Patent number: 8684031
    Abstract: Apparatus for conveying waste streams exhausted from first and second chambers is provided. The apparatus comprises first conduit means comprising an inlet for receiving a waste stream exhausted from the first chamber, and an outlet, and a second conduit means comprising an inlet for receiving a waste stream exhausted from a second chamber, and an outlet. The outlets of the first and second conduit means are connected together. The first conduit means comprises means for generating sonic choking of gas being conveyed towards the outlet of the first conduit means in order to inhibit migration of a component of the waste stream exhausted from the second chamber towards the first chamber.
    Type: Grant
    Filed: July 19, 2007
    Date of Patent: April 1, 2014
    Assignee: Edwards Limited
    Inventor: Ian David Stones
  • Publication number: 20140076411
    Abstract: Apparatus and methods for generating a partial vacuum in a cavity are disclosed. In one method, a suction unit is disposed on a surface and includes a plurality of embedded suction generation devices that suction gas therethrough. The suction generating devices are powered-on to form a cavity defined by at least the surface and the suction unit and gas is evacuated from the cavity to generate the partial vacuum.
    Type: Application
    Filed: March 1, 2012
    Publication date: March 20, 2014
    Applicant: GAME CHANGERS, LLC
    Inventors: Andrew D. Zonenberg, Jason D. Sanchez, Piotr A. Garbuz
  • Publication number: 20140053907
    Abstract: A method for replacing a volume of coolant fluid in a circulating system in diesel engine system that includes the steps of establishing pneumatic connection with at least one location in the diesel engine coolant fluid circulating system; establishing fluid connection with at least one point in the diesel engine coolant fluid circulating system, the fluid connection location being different from the pneumatic connection; and after pneumatic and fluid connection is established, drawing a vacuum pressure through said pneumatic connection and introducing the volume of coolant fluid into the through said fluid connection as well as a device for accomplishing the same.
    Type: Application
    Filed: March 15, 2013
    Publication date: February 27, 2014
    Inventors: Ram D. Bedi, George Blundy
  • Patent number: 8623141
    Abstract: A vacuum system for semiconductor fabrication. The system includes a vacuum chamber for performing a semiconductor fabrication process, a vacuum source, and a piping system fluidly connecting the vacuum chamber to the vacuum source. In one embodiment, the piping system is configured without a horizontal flow path section of piping. In some embodiments, the piping system includes a first piping branch and a second piping branch. The first and second piping branches preferably have a symmetrical configuration with respect to the vacuum source. In yet other embodiments, the first and second piping branches preferably each include a throttle valve.
    Type: Grant
    Filed: May 18, 2009
    Date of Patent: January 7, 2014
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yi-Pin Chang, Chyi Shyuan Chern
  • Publication number: 20130340868
    Abstract: The present disclosure relates to a refrigerator having an air pressure adjusting apparatus for a storage container, and more particularly, a refrigerator having an air pressure adjusting apparatus for a storage container, capable of uniformly maintaining internal air pressure of the storage container by increasing the internal air pressure by way of an introduction of external air when the internal air pressure is excessively lowered and also preventing damages of the storage container. The refrigerator includes a storage container having an inner accommodating space and installed to be drawn out of and inserted into the refrigerator, and an air pressure adjusting apparatus to allow external air to be introduced into the storage container based on internal air pressure of the storage container, so as to increase the internal air pressure.
    Type: Application
    Filed: June 21, 2013
    Publication date: December 26, 2013
    Inventors: Kyongbae Park, Dullae Min, Deuire Min
  • Publication number: 20130340842
    Abstract: To overcome the problem associated with liquid or solid process debris from a vacuum process system falling into, and contaminating or damaging, a vacuum pumping arrangement used to evacuate the system, the inlet of the vacuum pumping arrangement is located lower than the outlet of the arrangement. This provides a net flow of gas pumped by the arrangement in a generally upwards direction thereby resisting the passage of contaminants into the arrangement.
    Type: Application
    Filed: March 28, 2012
    Publication date: December 26, 2013
    Applicant: Edwards Limited
    Inventor: Austin Jonathan Daykin
  • Publication number: 20130327411
    Abstract: A refrigerator having an air pressure controllable storage container is allowed to control air pressure of the storage container to be temporarily lower than initial air pressure by turning on and off a vacuum pump. The vacuum pump sucks internal air of the storage container, and a controller turns on the vacuum pump such that internal air pressure of the storage container is lower than the initial air pressure, and turns off the vacuum pump such that the internal air pressure is restored to the initial air pressure.
    Type: Application
    Filed: June 6, 2013
    Publication date: December 12, 2013
    Inventors: Deulre Min, Ahreum Park, Kyongbae Park
  • Publication number: 20130327059
    Abstract: A draining device for draining a fluid from an aircraft engine support strut includes a suction arrangement having an inlet and extending along a longitudinal main axis to form a plenum chamber and a drain tube fluidly connected to the aircraft engine support strut and extending along the longitudinal main axis, the drain tube ending by an outlet, the outlet of the drain tube terminating within the plenum chamber of the suction arrangement. An air flow entering the inlet of the suction arrangement causes a low-pressure region to be created within the plenum chamber, substantially downstream the outlet of the drain tube.
    Type: Application
    Filed: March 1, 2011
    Publication date: December 12, 2013
    Applicant: SHORT BROTHERS PLC
    Inventor: John Richardson
  • Publication number: 20130312834
    Abstract: A portion of a fuel system of a vehicle is disclosed. The vehicle includes a brake system. The fuel system includes a fuel tank connected to an engine. The portion of the fuel system includes an evaporative emissions system and an evaporative emissions leak check system selectively fluidly-connected to the evaporative emissions system. The evaporative emissions leak check system includes a vacuum source. The vacuum source includes a vacuum pump connected to a brake boost device that provides power braking to the brake system of the vehicle. A method is also disclosed.
    Type: Application
    Filed: December 7, 2012
    Publication date: November 28, 2013
    Inventors: Kurt D. McLain, Jeff DeFrank
  • Publication number: 20130233403
    Abstract: A method for replacing a volume of coolant fluid in a circulating system in diesel engine system that includes the steps of establishing pneumatic connection with at least one location in the diesel engine coolant fluid circulating system; establishing fluid connection with at least one point in the diesel engine coolant fluid circulating system, the fluid connection location being different from the pneumatic connection; and after pneumatic and fluid connection is established, drawing a vacuum pressure through said pneumatic connection and introducing the volume of coolant fluid into the through said fluid connection as well as a device for accomplishing the same.
    Type: Application
    Filed: November 15, 2011
    Publication date: September 12, 2013
    Applicant: K. J. MANUFACTURING CO.
    Inventors: Ram D. Bedi, George Blundy
  • Publication number: 20130213505
    Abstract: A pressure calibration device can include certain features that allow it to be used with a variety of hydraulic and pneumatic systems. A pressure calibration device can be configured to provide pressure or vacuum, and can have a mode selector for selecting to provide pressure or vacuum. A pressure calibration device can have a volume adjuster configured to modify pressures for hydraulic or pneumatic systems. A pressure calibration device can have a pressure release valve and a bleed valve for adjusting pressure values.
    Type: Application
    Filed: February 19, 2013
    Publication date: August 22, 2013
    Applicant: King Nutronics Corporation
    Inventor: King Nutronics Corporation
  • Publication number: 20130180596
    Abstract: The present invention relates to a vacuum system 10 for evacuating a chamber 10 of a metallurgical processing system. The system comprises a vacuum pumping arrangement 14 for evacuating gas from the chamber, a foreline connecting the vacuum pumping arrangement to the chamber, a filter volume located in the foreline 16 for filtering gas evacuated from the chamber along the foreline, and a by-pass line 20 connecting the vacuum pumping arrangement to the chamber and arranged to by-pass the filter volume selectively dependent on monitored characteristics of the degassing chamber or the vacuum system.
    Type: Application
    Filed: January 13, 2012
    Publication date: July 18, 2013
    Applicant: EDWARDS LIMITED
    Inventors: Graham Thomas Legge, Michael Andrew Galtry
  • Patent number: 8460256
    Abstract: A fluid collection system includes a disposable collection container and a disposable collection container receiving housing, the housing having a cavity and a suction source. The fluid collection container may include a flexible liner and a shelf for diverting fluid from the suction and to assist with a collapse of the liner during evacuation of the fluid from the liner. The collection container receiving housing may include a piston assembly having a main piston body and a scraper ring. The collection container receiving housing may include a piston stop feature. The system may include a partially hydrophobic filter and a flat surface suction tool.
    Type: Grant
    Filed: July 15, 2010
    Date of Patent: June 11, 2013
    Assignee: Allegiance Corporation
    Inventors: Thomas L. Michaels, Russ A. Johnson, Eric D. Hill
  • Patent number: 8459299
    Abstract: A fluid control apparatus includes a fluid system, a pump and valve array, which selectively provides a pressure or a vacuum of various degrees, and an intermediate bin, which is connected between the pump and valve array and the fluid system, the intermediate bin including a reservoir unit, which stores a fluid discharged from the fluid system.
    Type: Grant
    Filed: September 8, 2009
    Date of Patent: June 11, 2013
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Tae-seok Sim, Chin-sung Park
  • Publication number: 20130125994
    Abstract: A swarf extraction device for use with a cutting machine, includes: a body having at least one conduit for receiving a flow of cutting fluid; a connector for connecting the conduit to a source of cutting fluid; a suction tube in fluid communication with the conduit, the suction tube having an suction inlet and a suction outlet; and a swarf outlet through which the swarf is ejected from the device, wherein the conduit is arranged to create a pressure drop at the suction tube inlet using the flow of cutting fluid when in use.
    Type: Application
    Filed: November 20, 2012
    Publication date: May 23, 2013
    Applicant: ROLLS-ROYCE PLC
    Inventor: ROLLS-ROYCE PLC
  • Publication number: 20130105012
    Abstract: The delivery device with automatic regulation of the delivery rate comprises a pump device, a suction vessel and a suction sump, wherein the suction vessel has a suction chamber which is connected to the suction sump via an overflow edge and via an inlet duct which opens tangentially into the suction vessel, and wherein the pump device comprises a suction pipe and also a rotary pump which is connected in fluid-conducting fashion to the suction pipe, and wherein the suction pipe projects into the suction vessel from above, and wherein the inlet duct opens into the suction vessel in an alignment corresponding to the direction of rotation of the rotary pump, and wherein the suction pipe is connected to the rotary pump via a connecting pipe, and wherein the connecting pipe has a portion which runs at an angle ? of between 45° and 135° with respect to the suction pipe. The portion advantageously runs through a wall. The rotary pump and the suction pipe are particularly advantageously arranged in separate chambers.
    Type: Application
    Filed: March 29, 2011
    Publication date: May 2, 2013
    Inventor: Carl Stähle
  • Publication number: 20130098483
    Abstract: There is provided a residual radioactive sludge liquid suction apparatus capable of safely and surely sucking radioactive sludge liquid remaining in a sludge storage tank with no fear of being exposed to radiation at a time when a small amount of sludge liquid remaining in the sludge storage tank is transferred to another tank.
    Type: Application
    Filed: June 29, 2011
    Publication date: April 25, 2013
    Applicant: TAIHEI DENGYO KAISHA, LTD.
    Inventors: Masahiro Aizawa, Osamu Ogata
  • Publication number: 20130084157
    Abstract: A system for providing vacuum to a moving element of a transport system, the system includes: a vacuum chamber on the moving element for storing vacuum; a vacuum source; a vacuum inlet provided on the vacuum chamber and for connection to the vacuum source; and a vacuum outlet in communication with the vacuum chamber and positioned on the moving element. The vacuum source may be provided on and travel with the moving element or on the transport system and periodically engage with the vacuum chamber. Where the vacuum source is provided on the moving element, a vacuum chamber may not be required. Further, the vacuum source may be driven by electrical energy and/or mechanical energy in various configurations.
    Type: Application
    Filed: October 1, 2012
    Publication date: April 4, 2013
    Applicant: ATS AUTOMATION TOOLING SYSTEMS INC.
    Inventor: ATS AUTOMATION TOOLING SYSTEMS INC.