Abstract: A mobile manipulator robot having a pneumatic charging system. The mobile robot includes an energy source and a charging system to charge the energy source. The charging system includes a coupler having a mating end configured to mate with an external pneumatic supply system to access a pneumatic supply and a pneumatic actuator disposed downstream of the coupler. The pneumatic actuator is configured to convert energy from the pneumatic supply to charge the energy source. The pneumatic actuator may be an air motor or a piezo.

Abstract: A gas station for delivery of gas to appliances, in particular in a building, comprising a casing (12) and a gas regulation device (13) with several components comprising a gas regulator 14 and one filter (32), wherein the gas regulation device (13) is mounted or mountable within the casing (12), wherein the casing (12) comprises a ground plate (10) and a cover element (11) being securable or secured onto the ground plate (10), wherein the ground plate (10) is configured for mounting to a wall or to an external mounting post (50).

Abstract: A fluid pressure circuit includes a directional switching valve arranged between a fixed displacement pump and a fluid pressure actuator and configured to switch a flow passage for a pressurized fluid, an accumulator arranged in a branch flow passage branched from a connection flow passage that connects the fluid pressure actuator and the directional switching valve, an accumulator flow control valve arranged between the connection flow passage and the accumulator, and a pump flow control valve arranged between the fluid pressure actuator and the fixed displacement pump and configured to variably divert a flow rate of the pressurized fluid discharged from the fixed displacement pump into a first system including the tank and a second system including the fluid pressure actuator.

Abstract: A removable manifold for a medical/surgical waste collection system. The manifold is dimensioned to be mounted to a receiver integral with the system. The manifold includes at least one tube through which waste is drawn into a manifold cage. The tube extends through an inlet port into a void space internal to the manifold cage at an angle. The tube exits the manifold cage and centered along an axis that is off center to the longitudinal axis of the manifold cage where it engages a complementary valve internal to the receiver. The valve regulates flow between the receiver and the down line components of the waste collection system. The valve is normally closed. When the manifold is fitted to the receiver the tube engages the valve and rotation of the manifold moves the valve to the open position allowing fluid flow from the manifold and receiver to the downstream components of the system.

Abstract: The disclosure provides a method of securing a feedback spring relative to a spool of a servovalve, the method comprising inserting the feedback spring at least partially into an internal cavity of the spool, inserting two fixing members into the internal cavity such that they each oppose a portion of the feedback spring, bringing the fixing members into respective set positions, such that the fixing members clamp the feedback spring and prevent relative movement between the feedback spring and the spool, and securing the fixing members in their respective set positions, such that the fixing members remain in their clamping positions and prevent relative movement between the feedback spring and the spool.

Abstract: A pneumatic amplifier includes a valve body, a first comparison chamber, a third comparison chamber and a second comparison chamber. A first diaphragm and a second diaphragm are arranged in the first comparison chamber and fixed to the valve body. A mounting plate A is fixedly arranged between the first diaphragm and the second diaphragm. A seventh diaphragm, an eighth diaphragm, a ninth diaphragm and a tenth diaphragm are arranged in the second comparison chamber and fixedly arranged on the valve body. A mounting plate C is fixedly arranged among the seventh diaphragm, the eighth diaphragm, the ninth diaphragm and the tenth diaphragm. A third diaphragm, a fourth diaphragm, a fifth diaphragm and a sixth diaphragm are arranged in the third comparison chamber and fixed to the valve body. A mounting plate B is fixedly arranged among the third diaphragm, the fourth diaphragm, the fifth diaphragm and the sixth diaphragm.

Abstract: Hydraulic systems and associated methods configured to reduce leakage past a spool valve when the system is in a neutral state. Leakage reduction is achieved by shifting the spool valve within the spool bore. The shifting direction can depend on whether the system has a relatively high load or a relatively low load in the neutral state. The amount of shifting can depend on the pressure differential between the supply line and the work port, and/or the pressure differential between the work port and the tank line.

Abstract: Hydraulic systems and associated methods configured to reduce leakage past a spool valve when the system is in a neutral state. Leakage reduction is achieved by shifting the spool valve within the spool bore. The amount of shifting can be controlled by a pressure controller that sets one or pressures in the system and actively/dynamically adjusts the system to achieve a desired pressure or set of pressures by shifting the spool valve.

Abstract: A nozzle housing for a servo valve includes a circumferential wall defining a return passage extending along a longitudinal axis (A) for holding a return nozzle, the return passage having an opening for fluid communication with a spool valve and a return port for fluid communication with atmosphere, a first plate extending across the return passage, the first plate engaged with the circumferential wall and disposed between the opening and the return port, and a second plate extending across the return passage. The second plate engages with the circumferential wall and disposed between the first plate and the return port, the first plate has at least one first aperture, and the second plate has at least one second aperture that is misaligned with the at least one first aperture such that there is no linear axial flow path between the return port and the opening.

Abstract: A proportional valve is provided wherein the valve has an actuating element, a compressed-air connection, a working connection, and an air-removal connection. The valve also has three valve elements arranged one after the other and each can be moved in an axial direction. A first valve element is actuated by the actuating element, a second valve element is actuated by the first valve element, and a third valve element is actuated by the second valve element. In a base position, the valve elements are spaced apart, and, within the valve, a first sealing seat effective between the first valve element and the second valve element and a second sealing seat effective between the third valve element and the housing are arranged such that by varying the position of the first valve element, different switching states can be set.

Abstract: Various embodiments of the present disclosure provide a pneumatic inflator for automatically inflating inflatable articles, such as dunnage bags, to a desired pressure. Generally, once activated, the pneumatic inflator of the present disclosure inflates an inflatable article via a compressed air source until the air pressure inside the inflatable article reaches an operator-selected desired pressure. Thereafter, the pneumatic inflator automatically stops inflating the inflatable article. In various embodiments, the pneumatic inflator also includes a manual shut-off that, when activated while the pneumatic inflator is inflating the inflatable article, causes the pneumatic inflator to stop inflating the inflatable article. The pneumatic inflator of the present disclosure thus enables automatic inflation of inflatable articles to particular, operated-selected desired pressures with limited operator input.

Abstract: An electro-pneumatic controller includes a base having a body, a top surface, and a bore formed within the body; a cover coupled to the base, the cover having an open end with a rim, the rim contacting the top surface of the base; a plurality of fluid flow paths formed within the base; and at least one flame arrestor disposed within one of the fluid flow paths.

Abstract: An axial differential pressure control valve (DPCV) having an annular body, a tubular body, a coaxial closing member for closing an outlet aperture for exit of the fluid from the tubular body, sealing separation means arranged between first and second chambers containing the return fluid and the delivery fluid, respectively, said separation means being movable axially upon activation of a thrust due to a pressure differential ?P=P1?P2 and to the spring, wherein the closing member is fixed, and further comprising pins axially arranged between the ring nut and the abutment flange of the spring, wherein the pins pass through the pipefitting so as to come into contact with the said abutment flange and are designed to be displaced axially upon operation of the ring nut independently of the fixed closing member, so as to vary the compression of the spring.

Abstract: A manual drive for a motor with an external rotational member coupled to a main shaft of the motor features a transmission rotational member which is movable axially along a shaft about which it rotates, such that the transmission rotational member of the manual drive is movable between a driving position at one location along the shaft where the transmission rotational member is rotatable so as to drive the motor and a braking position at a different location along the shaft where the transmission rotational member is in engagement with a braking member for braking the motor. The shaft features a threaded portion which is arranged to draw the transmission rotational member rotating in the first rotational direction along the shaft towards a first portion of the braking member by threadable engagement with the transmission rotational member for braking the transmission rotational member rotating in the first rotational direction.

Abstract: In a directional control valve, working fluid to be supplied to a first pressure chamber is supplied to the first pressure chamber via a hydrostatic bearing provided on an end of a main spool on the first pressure chamber side, and working fluid to be supplied to a second pressure chamber is supplied to the second pressure chamber via a hydrostatic bearing provided on an end of the main spool on the second pressure chamber side, and a pilot valve alternately communicates the first pressure chamber and the second pressure chamber with a tank.

Abstract: A vacuum pump connecting apparatus has a first vibration absorbing portion and a second vibration absorbing portion which are connected to an evacuation connection portion so as to dispose the first and second vibration absorbing portions opposite each other via the evacuation connection portion. A first end of the first vibration absorbing portion is connected to the evacuation connection portion and a second end of the first vibration absorbing assembly opposite to the second end is connected to an intake port of a vacuum pump. The first vibration absorbing portion and the second vibration absorbing portion are elastic bellows. A first end of the second vibration absorbing portion is connected to the evacuation connection portion. The vacuum pump connecting apparatus has a rigid coupling member which is connected to a second end of the second vibration absorbing portion opposite to the first end of the second vibration absorbing portion.

Abstract: A heating, ventilation, and/or air conditioning (HVAC) system has a first variable refrigerant flow outdoor unit, a first ducted variable speed indoor unit configured to selectively exchange refrigerant with the first variable refrigerant flow outdoor unit, and a second indoor unit configured to selectively exchange refrigerant with the first variable refrigerant flow outdoor unit.

Abstract: A method of calibrating an electrohydraulic valve is disclosed. The method includes actuating an on-off valve to an open position. A speed of a fixed displacement pump is regulated to establish a desired flow rate at an outlet of the pump. The pump is in fluid communication within a closed loop circuit with the on-off valve and the electrohydraulic valve. A target pressure in the closed loop circuit is determined as a function of the desired flow rate. The method further includes increasing a current to the electrohydraulic valve and monitoring the target pressure in the closed loop circuit. A start of a fluid flow through the electrohydraulic valve is determined based on a drop in the target pressure within the closed loop circuit.

Abstract: Various embodiments related to hydraulic actuators and active suspension systems as well as their methods of use are described.

Abstract: A valve positioner that can maintain operation of the control valve despite failures in one or more components. The valve positioner may reduce downtime by allowing in-situ repair to occur on the valve positioner. The valve positioner may incorporate a by-pass component, which can utilize control input signals (e.g., a 4-20 mA signal) to energize one or more components (e.g., a current-to-pressure converter) to cause the control valve to modulate fluid flow without the digital microprocessor and/or related components.

Abstract: A valve apparatus includes valve box, valve shaft, first flexible film, and second flexible film. The valve box includes inlet and outlet, and forms a space therein for housing the fluids. The valve shaft is inserted into through-hole formed in the wall of the valve box, and moves in the longitudinal direction of the through-hole to move valve body in order to block the flow of the fluids from inlet to outlet. The first flexible film includes a through-hole into which the valve shaft is inserted. The outer peripheral end of the first flexible film is fixed to the peripheral edge of the through-hole, and the peripheral edge of the through-hole of the first flexible film is fixed to the outer periphery of the valve shaft to close the gap between the through-hole and the valve shaft. The second flexible film forms a part of the wall of valve box.

Abstract: A switching installation includes a gas tight housing with at least one wall part. An input conductor disposed in the housing is configured to carry an input voltage. An insulation is arranged around the input conductor so as to insulate the input conductor from the housing. A short-circuit device is changeable from a first condition, in which the insulation is insulating the input conductor from the housing, to a second condition, in which an electrical short circuit connection is created through the insulation between the input conductor and an auxiliary connection. An actuator is coupled to the at least one wall part of the gas tight housing and is configured to actuate the short-circuit device as a result of movement of the wall part caused by a pressure increase in the housing. A threshold device is configured to provide a preset threshold in the actuator.

Abstract: A valve apparatus for a medical injection system includes a pinching member and at least one spring-loaded anvil. A tubing line of the injection system may be positioned between the pinching member and the anvil, such that when the pinching member is moved into a pinching position adjacent to the anvil, for example, by rotation of a shaft to which the member is coupled, the pinching member compresses the tubing line against the spring-loaded anvil. The pinching member is preferably rotatable about an auxiliary axis, which is eccentric, or offset from a central axis of the shaft. A spring member of the spring-loaded anvil is preferably pre-loaded. In certain applications, the pinching member, when moved into the pinching position, applies a pinching force of greater than approximately 45 pounds, for example, to prevent flow through the tubing line at an injection pressure of up to approximately 1200 psi.

Abstract: A parameter acquiring device for acquiring parameters for a control valve has a controlling valve operating unit, a valve opening signal acquiring unit and a parameter calculator. The controlling valve operating unit operates a controlling valve in an opening direction and in a closing direction by changing, in a specific sequence, a control signal that controls an opening of a regulator valve. The valve opening signal acquiring unit acquires a signal indicating an actual opening of the regulator valve. The parameter calculator acquires data pairs of control signals and valve opening signals. The parameter calculator calculates a parameter of the control valve based on the data pairs that have been acquired.

Abstract: A switchable pressure limiting valve with an electromagnet (1) and with a device (2) for opening and closing a passage for the fluid stream. The opening of the valve is determined by the balance of forces at the tappet (3) upon which the pressure force of the fluid at the P-connection (4), the pressure force of the fluid at the T-connection (13) and the forces of two springs (5) and (6) act. The force of the spring (6) is varied by means of the position of the armature of the electromagnet. When the pressure force at the P-connection (4) outweighs the sum of the other forces, the valve opens. The above-mentioned device for opening and closing is composed of a diaphragm (7) and of a sealing seat (12), and this diaphragm is tension-mounted sealingly between the magnetic pole (10) and the housing (21).

Abstract: A directional valve for controlling an actuator by means of pressurized medium, including: a spool fitted to move axially inside the directional valve; a first position of the spool, in which the spool tends to be set; and a second position of the spool, to which the spool can be moved by a pilot control force. Additionally, the directional valve includes a metering orifice placed in the pressure port or in the first work port or in the second work port or in the tank port, and across which a pressure difference is effective. The spool further includes a second position, to which the spool can be moved by a pilot control force. When the spool is in at least the second position, the directional valve is fitted to generate a compensating force proportional to said pressure difference, to move the spool to compensate for the flow.

Abstract: A volume booster for a fluid flow control device comprises a supply path for supplying a fluid boost to facilitate actuation of an actuator in a first direction, and an exhaust path for enabling controlled exhaust to facilitate actuation of the actuator in a second direction. The supply path defines a supply resistance that is set by the geometry of a supply trim component. The exhaust path includes an exhaust resistance that is set by the geometry of an exhaust trim component. The supply and exhaust trim components are independently removable and replaceable with replacement components to customize the exhaust and supply resistances, and therefore, the exhaust and supply capacities for specific applications.

Abstract: A spool is provided with a first discharge air duct connecting the first opening to the first discharge air chamber, and a second discharge air duct connecting the second opening to the second discharge air chamber, where the first discharge air duct and the second discharge air duct are divided by a non-duct part. A first output air pressure chamber is adjacent to a first discharge air chamber with a first diaphragm interposed therebetween, the first discharge air chamber is adjacent to a bias chamber with a second diaphragm interposed therebetween, the bias chamber is adjacent to an input air pressure chamber with a third diaphragm interposed therebetween, the input air pressure chamber is adjacent to a second discharge air chamber with a fourth diaphragm interposed therebetween, and the second discharge air chamber is adjacent to a second output air pressure chamber with a fifth diaphragm interposed therebetween.

Abstract: A pressure adjustment unit for an adjustment of fluid pressures in at least one first fluid chamber and in at least one second fluid chamber, which at least in the main is separate from the first fluid chamber, within at least one pressure interval, in particular for an at least substantial avoidance of a relative overpressure in one of the fluid chambers, having at least one first pressure expansion element which is provided for modifying a spatial volume of the at least one first fluid chamber, having at least one second pressure expansion element which is provided for modifying a spatial volume of the at least one second fluid chamber, and having at least one pressure coupling unit which is provided for effecting a negative feedback of spatial volume changes of the at least one first fluid chamber and of the at least one second fluid chamber.

Abstract: A hydraulic servovalve having two stages and feedback members in which the movable power distribution member has clamp means for clamping the feedback member, while allowing a clamped portion of the feedback member at least one freedom of movement relative to the movable distribution member.

Abstract: Apparatus to control a fluid flow are disclosed. An example fluid flow control apparatus described herein includes a signal stage comprising a signal stage relay having a supply plug being operatively connected to a valve seat at a first end and an exhaust seat at a second end and a seal operatively coupled to the supply plug such that the seal provides a feedback area to apply a fluid pressure feedback force to the exhaust seat.

Abstract: An operating mode of an electro-pneumatic converting unit is stored in advance in an electro-pneumatic converting unit operating mode storing unit. A blockage location identifying function is provided in a calculating unit. The operating unit monitors the magnitude of shift and the direction of shift of the control output, relative to the nozzle back pressure, through the blockage location identifying function, and identifies whether a blockage has occurred in the fixed orifice or the nozzle/flapper mechanism based on the magnitude of shift and direction of shift of the control output, relative to the nozzle back pressure, and based on the operating mode of the electro-pneumatic converting unit, stored in the electro-pneumatic converting unit operating mode storing unit.

Abstract: A digitally controlled current to pressure converter (CPC) is provided. A digital CPC utilizes a digital controller and an onboard pressure transducer to accurately control the output pressure based upon an input analog control signal. The digital controller includes an anti-silting algorithm that provides an impulse movement of the three-way rotary valve of the CPC to loosen and flush away silt contamination from the valve. A redundant seal stack including an intermediate passage to the hydraulic drain ensures a low pressure drop across the outboard seal minimizing the potential for leakage and improving reliability of the CPC. The digital controller also includes redundancy and fault management algorithms that enable the use of multiple inputs and feedback signals for control of the CPC. Master/slave operation and transitioning is also provided by the digital controller.

Abstract: A digitally controlled current to pressure converter (CPC) is provided. A digital CPC utilizes a digital controller and an onboard pressure transducer to accurately control the output pressure based upon an input analog control signal. The digital controller includes an anti-silting algorithm that provides an impulse movement of the three-way rotary valve of the CPC to loosen and flush away silt contamination from the valve. A redundant seal stack including an intermediate passage to the hydraulic drain ensures a low pressure drop across the outboard seal minimizing the potential for leakage and improving reliability of the CPC. The digital controller also includes redundancy and fault management algorithms that enable the use of multiple inputs and feedback signals for control of the CPC. Master/slave operation and transitioning is also provided by the digital controller.

Abstract: An operating mode of an electro-pneumatic converting unit is stored in advance in an electro-pneumatic converting unit operating mode storing unit. A blockage location identifying function is provided in a calculating unit. The operating unit monitors the magnitude of shift and the direction of shift of the control output, relative to the nozzle back pressure, through the blockage location identifying function, and identifies whether a blockage has occurred in the fixed orifice or the nozzle/flapper mechanism based on the magnitude of shift and direction of shift of the control output, relative to the nozzle back pressure, and based on the operating mode of the electro-pneumatic converting unit, stored in the electro-pneumatic converting unit operating mode storing unit.

Abstract: A high pressure transducer is disclosed. The transducer includes a supply inlet configured to provide a gas supply to the high pressure transducer at a supply pressure and a pressure divider section coupled to the supply inlet. The pressure divider section is configured to reduce the supply pressure to a reduced pressure as a function of a first predetermined ratio. The transducer also includes a low pressure control section coupled to the pressure divider section and configured to receiving the gas supply at the reduced pressure and an amplifying section coupled to the low pressure control section. The low pressure control section varies the reduced pressure to produce a variable control pressure to actuate the amplifying section in response thereto. The amplifying section is also configured to multiply the variable control pressure as a function of a second ratio to obtain an output pressure.

Abstract: Apparatus to control a fluid flow are disclosed. An example fluid flow control apparatus described herein includes a signal stage comprising a signal stage relay having a supply plug being operatively connected to a valve seat at a first end and an exhaust seat at a second end and a seal operatively coupled to the supply plug such that the seal provides a feedback area to apply a fluid pressure feedback force to the exhaust seat.

Abstract: A digitally controlled current to pressure converter (CPC) is provided. A digital CPC utilizes a digital controller and an onboard pressure transducer to accurately control the output pressure based upon an input analog control signal. The digital controller includes an anti-silting algorithm that provides an impulse movement of the three-way rotary valve of the CPC to loosen and flush away silt contamination from the valve. A redundant seal stack including an intermediate passage to the hydraulic drain ensures a low pressure drop across the outboard seal minimizing the potential for leakage and improving reliability of the CPC. The digital controller also includes redundancy and fault management algorithms that enable the use of multiple inputs and feedback signals for control of the CPC. Master/slave operation and transitioning is also provided by the digital controller.

Abstract: A pneumatic amplifier is provided comprising a supply air valve with a supply inlet connected to a pneumatic supply. A signal input for receiving a pneumatic input signal, a signal output for transmitting an amplified pneumatic output signal, a valve member for continuously opening or cutting off a pneumatic connection between the pneumatic supply and the signal output, and a diaphragm coupled with the valve member exposed at one side to the pneumatic input signal and having an opposite side. An exhaust air valve is provided with a bleed outlet, and a valve member for opening or cutting off a pneumatic connection between the signal output of the supply air valve and the bleed outlet, the valve members of the supply air valve and the exhaust air valve being structurally separated. The opposite side of the supply air valve diaphragm is exposed to the amplified pneumatic output signal.

Abstract: A combination pneumatic and electro-pneumatic gas valve positioning system comprising a pneumatic positioner and an electro-pneumatic positioner in parallel. The apparatus also includes at least one solenoid to control gas flow between the electro-pneumatic positioner and the pneumatic positioner.

Abstract: A pneumatic controller for controlling a process advantageously reduces fluid consumption by providing a proportional adjustment to a feedback signal. The pneumatic controller comprises a pneumatic control stage such as a relay, a process pressure detector, and a rack-and-pinion feedback assembly. The a rack-and-pinion feedback assembly provides the proportional adjustment of the feedback signal, thereby reducing the fluid consumption of the pneumatic controller.

Abstract: A pneumatic controller for controlling a process advantageously reduces fluid consumption by providing a proportional adjustment to a feedback signal. The pneumatic controller comprises a pneumatic control stage, a process pressure detector, and a feedback proportioning device. The feedback proportioning device uses a feedback cantilever component to provide the proportional adjustment of the feedback signal, thereby reducing the fluid consumption of the pneumatic controller.

Abstract: Methods and apparatus related to feedback control for electro-pneumatic control systems are disclosed. An example electro-pneumatic control system comprises an electro-pneumatic controller and a secondary pneumatic power stage coupled to the electro-pneumatic controller to provide a feedback signal to the electro-pneumatic controller.

Abstract: A fluid flow control device (26, 28) comprising a guide member (30) to guide a fluid passing through a duct (22, 24, 76), the guide member (30) being movable between first and second positions; and an urging arrangement (32) capable of providing an urging force (F1) to urge the guide member (30) towards the first position, characterised in that the urging arrangement (32) is a resilient torsion bar that is formed so as to allow the guide member (30) to be moved towards the second position by a pressure force (F2) exceeding and opposite to the urging force (F1), the pressure force (F2) being provided by a pressure difference across the guide member (30).

Abstract: An electro-pneumatic air pressure regulator includes a primary pressure introduction port, a secondary pressure output port, a pilot pressure chamber, a main valve for opening and closing a communicating conduit, a floating piston which actuates the main valve, a nozzle conduit via which the pilot pressure chamber is communicatively connected to the atmosphere, a flapper which includes a leaf spring facing an open end of the nozzle conduit, and an electromagnetic drive system which deforms the leaf spring to vary a position of the flapper relative to the open end of the nozzle conduit in accordance with the magnitude of an analogue input signal. The flapper includes a conical projection which projects toward the open end of the nozzle conduit. A conical recess corresponding to the conical projection is formed on an end face of the nozzle conduit around the open end thereof.

Abstract: A fluid pressure regulator has a program controller, a PID controller, a second PID controller, a drive controller, a solenoid-operated valve for supplying a fluid, a solenoid-operated valve for discharging a fluid, a diaphragm, a main valve, and a pressure sensor. Based on a desired preset value and/or a desired control program inputted from an external source, the fluid pressure regulator regulates the pressure or flow rate of the fluid discharged from a discharge port of the main valve. A detecting mechanism is combined with a controlled object for supplying a controlled variable in the controlled object to the second PID controller through a feedback loop.

Abstract: A control system for digitally monitoring and/or controlling pressure to a pneumatic load such as a stop/suckback valve. Pressure is sensed in the pneumatic fluid input lines to the pneumatic load, and a closed loop control is used to maintain the pressure at a predetermined level. In an alternative embodiment, the control system is used to ensure equal dispensing in multi-point dispense apparatus. Thus, pressure is sensed downstream of each valve in fluid communication with a respective nozzle. Any pressure differential detected is corrected by appropriate valve adjustment.

Abstract: A valve positioner for adjusting the position of a valve is provided. The valve positioner includes a housing having a service cartridge port and a valve connector. The valve positioner also includes a removable service cartridge having a cartridge housing received in the service cartridge port. The cartridge housing contains electronics and electro-pneumatic components associated with the valve positioner. The cartridge housing is configured such that removal does not expose the electronics and the electro-pneumatic components to an external environment.

Abstract: A control system for digitally monitoring and/or controlling pressure to a pneumatic load such as a stop/suckback valve. Pressure is sensed in the pneumatic fluid input lines to the pneumatic load, and a closed loop control is used to maintain the pressure at a predetermined level. In an alternative embodiment, the control system is used to ensure equal dispensing in multi-point dispense apparatus. Thus, pressure is sensed downstream of each valve in fluid communication with a respective nozzle. Any pressure differential detected is corrected by appropriate valve adjustment.

Abstract: A transducer includes a pneumatic actuator in combination with a stepper motor lifter mechanism to which is opposed an attractive E-I core actuator for precise vertical positioning of a load with minimal transmission of vibration. A typical application is for vertical positioning of a stage in a lithography machine. The use of a stepper motor driving a lead screw and pneumatic actuator together with an attractive E-I core actuator provides a large dynamic range force actuator. The transducer has a sensor which is located spaced away from the E-I core actuator gap and which operates inductively to measure the gap. A compliant diaphragm for the pneumatic actuation allows the load to move a small amount in all six degrees of freedom.