Exteriorly Supported Cop Patents (Class 139/198)
  • Device for treating substrates in a fluid container
    Patent number: 5921257
    Abstract: A device for treating substrates includes a fluid container in which the substrates are contained during treatment. A nozzle system is connected to the sidewalls and/or bottom of the fluid container and includes a plurality of nozzles for introducing a fluid into the fluid container.
    Type: Grant
    Filed: December 6, 1996
    Date of Patent: July 13, 1999
    Assignee: Steag MicroTech GmbH
    Inventors: Martin Weber, John Oshinowo