Abstract: A method is provided. The method includes detaching an upper shell of a reticle pod from a base. The method further includes while the upper shell is detached from the base, blocking an inlet flow of gas from entering an interior of the reticle pod between the upper shell and the base with a use of a fluid regulating module which is in a sealed state. In the sealed state of the fluid regulating module, an opening of the fluid regulating module is covered with a sealing film. The method also includes removing a reticle positioned on the base to a process tool. In addition, the method includes performing a lithography operation in the process tool with the use of the reticle.

Abstract: A method for air separation module management includes determining an amount of nitrogen-enriched-air to be supplied to each fuel tank of a plurality of fuel tanks of an aircraft. The method also includes evaluating a status and usage of each air separation module of a plurality of air separation modules onboard the aircraft. The method additionally includes determining an optimal distribution of workload among the plurality of air separation modules based on the amount of the nitrogen-enriched-air to be supplied to each fuel tank and the status and usage of each air separation module. The method further includes regulating a valve associated with each air separation module or a group of air separation modules based on the optimal distribution of workload to each air separation module.

Abstract: A high speed parallel manufacturing line for manufacturing insulated glass units, the manufacturing line including a gas filling topping press that mates a spacer applied lite supplied to the topping press and a topping lite supplied to the topping press to create an insulated glass unit and fills the insulated glass unit with a non-air gas. A heating station applies localized heat to adhesive of the spacer material. A sealing press applies pressure to the insulated glass unit and facilitates further sealing of the spacer material to the spacer applied lite and the topping lite. The line may include a fourth corner sealer that completes sealing of the airspace of the IGU prior to finishing of the IGU.

Abstract: This invention describes a device that is able to promote the rapid cooling/freezing of liquids and pasty and solid foods in general, where it is formed by several components that enable the action of cooling/freezing. Additionally, this invention describes that this device can incorporate the additional function of a refrigerator, through direct coupling of a thermal box to the cooling system of the device.

Abstract: A storage apparatus includes a storage shelf that stores a container, a purge device that is provided to the storage shelf and is able to perform a purge process on the container, and a purge determiner that determines at least one of a necessity of the purge process and a condition of the purge process in accordance with at least one of a transport source of the container to the storage shelf and a transport destination of the container from the storage shelf.

Abstract: Electronic device processing systems including side storage pods are described. One electronic device processing system has a side storage pod having a first chamber configured to receive a side storage container; a panel having a panel opening; the panel configured to be coupled between a side storage container and an equipment front end module; a side storage container received in the first chamber; and an exhaust conduit configured to be coupled to the side storage container received and extending to an exterior of the first chamber.

Abstract: Certain exemplary aspects of the present disclosure are directed towards a manufacturing apparatus including a first chamber having a first cavity, and a first actuator. The first actuator aligns the opening of the first chamber to an opening in a second chamber having a second cavity, sealing the first cavity to the second cavity. The manufacturing apparatus further includes gas flow componentry that in conjunction with the first actuator and first chamber evacuate the second cavity by drawing a vacuum in the first cavity. After the second cavity is evacuated, the gas flow componentry fills the second cavity filled with a gas by introducing the gas to the first cavity. A second actuator seals the gas in the second cavity by applying a seal that covers the opening in the second chamber while the first and second cavity remains sealed to one another via the first actuator.

Abstract: The invention relates to a device for storing articles in a controlled atmosphere, comprising: at least one storage module capable of receiving the articles to be stored; a storage module provided with at least one shelf for positioning the articles, the storage module having a substantially parallelepiped shape, and having two substantially vertical and opposite walls between which the shelves extend, wherein the device is characterized in that shutters are provided, each shutter being positioned opposite one of the shelves, and between one of the two walls and the shelf in question, so as to prevent the gas from flowing vertically at the location of a shutter, and to allow the gas to flow only transversely along the shelf associated with the shutter in question.

Abstract: Provided is an apparatus for sealing an arc-tube including a jig body including an electrode pin hole into which an end part of the electrode pin inserted into a bypass tube part of the arc-tube is inserted and a connection path connected with the electrode pin hole; and a pressurizing means inserted into the connection path to pressurize and fix the electrode pin positioned at the electrode pin hole. Therefore, the apparatus for sealing an arc-tube can more easily and stably fix the electrode pin during a sealing process.

Abstract: In an embodiment, the present invention discloses cleaned storage processes and systems for high level cleanliness articles, such as extreme ultraviolet (EUV) reticle carriers. A decontamination chamber can be used to clean the stored workpieces. A purge gas system can be used to prevent contamination of the articles stored within the workpieces. A robot can be used to detect the condition of the storage compartment before delivering the workpiece. A monitor device can be used to monitor the conditions of the stocker.

Abstract: The invention provides an apparatus for stocking and purging a wafer at a ceiling. The apparatus includes: a rail that is formed so as to be installed on a ceiling to guide a vehicle; a stock system that is formed so as to be installed on the ceiling and is formed so as to receive a container, which contains wafers, from the vehicle and stock the container; and a purge assembly that is installed so as to communicate with the container through the stock system and is formed so as to purge the wafers, which are contained in the container, with gas.

Abstract: A fuel tank inerting system includes a bleed air inlet, a bleed air conditioning system, an air separation module, a nitrogen-enriched air conditioning system, a nitrogen-enriched air outlet, and a controller. The bleed air conditioning system is connected to the bleed air inlet and is configured to cool bleed air. The air separation module is connected to the bleed air conditioning system and is configured to produce nitrogen-enriched air. The nitrogen-enriched air conditioning system is connected to the air separation module and is configured to cool nitrogen-enriched air. The controller controls nitrogen-enriched air temperature and nitrogen-enriched air flow rate at the nitrogen-enriched air outlet.

Abstract: A pressure-filling system (10) for filling a tank (2) and including a pressure-filling valve (11). The pressure-filling system (10) comprises a filling pipe (13) having a first end (13?) that is connected to said pressure-filling valve (11), and a second end (13?) that is connected to a check valve (14) that opens out into said tank (2), said filling pipe (13) being connected to a purge system (20) that opens out into said tank (2) so as to discharge a fluid contained in the filling pipe (13), said filling pipe (13) being connected to a branch pipe (15) that opens out to the open air (100) for dumping excess fluid from a tank in the event of excess pressure in the tank.

Abstract: A vehicle tire inflation system includes an air supply source in fluid communication with multiple tires of the vehicle. A pneumatic conduit extends between and is in fluid communication with the air supply source and the tires. Means are fluidly connected to the pneumatic conduit for enabling selective inflation and deflation of the tires. The means include a first pneumatic circuit for inflation of the tires, and a second pneumatic circuit for deflation of the tires. The second pneumatic circuit is discrete from the first pneumatic circuit and is common to more than one of the tires. The means provides controlled deflation of the tires in the second pneumatic circuit based upon a predetermined condition, preventing deflation of the tires until the vehicle is parked, or limiting the deflation of the tires, which in turn enables the tire inflation system to accommodate a desirable increased pressure in the tires.

Abstract: A load part has a nozzle unit having outlets for generating outflow and/or inflow of gas used for replacing the atmosphere of a wafer storage container, in a direction approximately parallel to spaces between adjacent wafers being stored, are a driving unit for extending the nozzle unit to a door opening portion.

Abstract: A device for filling a small portable pressure vessel from a larger pressure vessel with a compressed fluid such as carbon dioxide. The device comprises an inlet adapted to receive fluid from a pressurized source, and an outlet adapted to connect to a pressure vessel. Between the inlet and the outlet there is a fill valve and a vent valve and at least one cam shaft configured to rotate and operate the valves.

Abstract: An apparatus is disclosed for reducing the oxygen content in a product container having a closure, wherein the product container is filled with a liquid product, comprising at least one first injection nozzle arrangement configured to inert the product container by injecting the inert gas stream into the filled product container solely at an edge region of an opening of the filled product container.

Abstract: A device for simultaneously edge sealing and gas filling an insulated glass unit, the insulated glass unit including a supporting structure that supports the insulated glass unit in a working position and a gas filling module including a gas fill injection structure and a displaced air extraction structure and a gas metering unit. The device also includes an edge sealing module having a sealant metering device, an edge sealing dispensing head, and an edge sealing dispensing nozzle. The device also includes a control device programmed with an algorithm to initiate gas filling substantially simultaneously with initiating edge sealing of the insulated glass unit and to complete the gas filling of the insulated glass unit prior to completion of the edge sealing.

Abstract: A gas filling wand for quickly filling insulated glass with Argon is provided. The insulated glass may include at least a first sheet of glass and a second sheet of glass with a spacer in between, forming an internal cavity in between the sheets of glass. At least one entry port may be formed within the spacer. The gas filling wand may be inserted into the least one entry port and inject a gas, provide a vacuum within the internal cavity, and gauge the pressure within the internal cavity.

Abstract: A method and device for recovering puncture repair liquid without cutting out a tire valve. The method uses a device including a tube and either a pipe member or a drainage device. The tube reaches a tire inner surface when inserted into the tire from a tire valve mounted to a wheel, and the pipe member or drainage device connects between the tire valve and a pressurized air source. A valve core is detached from a tire valve of the wheel. The tube is inserted into the tire via the valve, the pipe member or drainage device is connected between the valve and air source, the tire is filled with air from the air source, and the puncture repair liquid in the tire is recovered through an end portion of the pipe member or drainage port due to air escaping from the tire.

Abstract: A valve core is removed from a tire valve 3 of a wheel 2 with a tire 1 where puncture repair liquid 4 has been injected. Pressurized air filled in the tire 1 is discharged via the tire valve 3. A tube 10 is inserted through the tire valve 3 to bring the tube 10 to a liquid surface of the puncture repair liquid 4 while the pressurized air in the tire 1 is being discharged. The puncture repair liquid 4 in the tire 1 is recovered via the tube 10 using a residual pressure in the tire 1. In this manner, the puncture repair liquid can efficiently be recovered without cutting off the tire valve.

Abstract: An apparatus for loading material into a stent strut can comprise a suction pump connected to an opening to a lumen within the stent strut. The stent strut is immersed in the material. As the suction pump draws gas out of the lumen, the material is drawn into side openings to the lumen.

Abstract: The present invention provides a method, system, and components for protecting reticles and specifically for minimizing haze formation on reticles during storage and use. By substantially continually maintaining a purge in a storage housing having a reduced humidity level on reticles or by temporarily storing the reticle in a container in proximity to a desiccant or getter when not being purged, haze formation can be eliminated, minimized, or sufficiently controlled. Moreover, a filter media in the container may be positioned to be “recharged” during the substantially continual purging of the reticle, a reduced desirable humidity level can be readily maintained in the reticle container when the container is not currently being purged. Additionally, the system of the invention can comprise an ionizer associated with the purge system. For example, the ionizer can be associated with at least one of the plurality of purge lines of the purge system.

Abstract: A device for recovering puncture repair liquid includes a tube to be inserted from a tire valve mounted to a wheel up to an inner surface of a tire, a container having a pair of connecting ports for receiving and containing puncture repair liquid recovered from inside the tire, and a connecting hose for connecting between the tire valve and one of the connecting ports. The other connecting port is removably attachable to a pressurized air source. A valve core is detached from a tire valve of a wheel with a tire mounted thereon into which puncture repair liquid has been injected. The tube is inserted into the tire which is filled with air from the pressurized air source that is then detached from the container. Thus, recovery of the puncture repair liquid is efficiently performed using pressure escaping from the tire without cutting out the tire valve.

Abstract: A method and apparatus for filling insulating glass units with one or more insulating gases (e.g., Argon and Krypton gas). The insulating gases are supplied to gas filling tubes that are inserted into one or more interpane spaces of the insulating glass units. Each interpane space may be filled with more than one insulating gas. A control unit controls the injection of the insulating gases in accordance with gas filling data received by the control unit.

Abstract: An inactive gas introducing facility includes an introducing device disposed in a support portion supporting a container accommodating a substrate and configured for introducing inactive gas to the inside of the container through a gas feed opening of the container with discharging gas present inside the container to the outside through a gas discharge opening of the container and a controller for controlling operation of the introducing device. The introducing device is capable of varying the feed rate of the inactive gas. The controller is configured to control the operation of the introducing device such that in the feeding of the inactive gas to the container supported to the support portion, the feed rate is increased progressively to a target feed rate.

Abstract: An environmental control systems (ECS) for an aircraft in which bleed air is cooled with ram air, the ECS may include a ram air controller configured to control a rate of ram air flow responsively to a desired temperature of bleed air at a bleed air outlet and a bleed air controller configured to control a rate of bleed air flow responsively to a temperature lower than the desired temperature of the bleed air at the bleed air outlet. Collectively the two controllers may provide a minimizing of ram air usage for cooling the bleed air.

Abstract: The invention relates to a gas filling and dispensing device that includes a body to be provided in the opening of a pressurized gas storage tank, a gas tapping circuit extending between a first upstream end to be connected to the inside of the tank and a second downstream end to be connected to a gas user, a filling duct having a first upstream end to be connected to the inside of the tank and a second downstream end to be connected to a filling member, said filling duct including at least one portion distinct from the tapping circuit, and the filling duct including a first valve, characterized in that the filling duct includes a second isolation valve arranged in series with the first valve.

Abstract: A device and a method for filling with a gas other than air an insulating glazing unit composed of at least two glass panes and at least one spacer frame, comprising a movable and a fixed bed. The fixed bed is provided with retractable suckers suitable to capture a lower flap of a glass pane and move therewith with a motion of retraction with respect to the movable bed, such as to provide straightening of the lower flap of the glass pane.

Abstract: A method and device for recovering puncture repair liquid without cutting out a tire valve. The method uses a device including a tube and either a pipe member or a drainage device. The tube reaches a tire inner surface when inserted into the tire from a tire valve mounted to a wheel, and the pipe member or drainage device connects between the tire valve and a pressurized air source. A valve core is detached from a tire valve of the wheel. The tube is inserted into the tire via the valve, the pipe member or drainage device is connected between the valve and air source, the tire is filled with air from the air source, and the puncture repair liquid in the tire is recovered through an end portion of the pipe member or drainage port due to air escaping from the tire.

Abstract: A device (1) for effecting automatic nitrogen filling, or nitrogen-for-air substitution, for the simultaneous inflation/deflation of a plurality of vehicle tires, comprising multiple controllers (17) corresponding to the number of tires to be inflated/deflated, each having an individual display (8), a pressure sensor (9), an inflation valve (4) and a deflation valve (11), whereby multiple vehicle tires may be inflated/deflated simultaneously, with user input interfaces (10) for pressure setting adjustments.

Abstract: A two-part container for preserving material samples during storage and transport is separable and can be sealed with the presence of an elastomeric O-ring and internal threads on each part of the container. In the configuration at which the threads first engage between the two halves of the container, there is a small hole in the outer top part just above the O-ring of the bottom mating part. When the two container parts are mated and the sealing O-ring is below the small hole, inert gas can be made to flow through an inlet valve, into the container, and out through the small hole. In this configuration, the inert gas flows through the container and purges the atmospheric gas, replacing it with inert gas. After a period of time, the two container parts are rotated so that the sealing O-ring moves above the small hole. This will stop the flow into and out of the container. After this, the gas inlet valve is closed to seal the inert gas in the container.

Abstract: A filler valve unit (1) for feeding a preset amount of filling liquid (3) into a container (6) having an outlet (4) for feeding out filling liquid and an outlet (11) for injecting gaseous fluid. The filler valve unit (1) comprises at least one stop element (14) forming a stroke limiter acting on the container (6). According to the invention, the stop element (14) is mobile and moves between at least two operating positions consisting of a first operating position wherein the stop element holds the mouth (5) of a container (6) at a preset distance from the outlet (4) and a second operating position wherein the stop element (14) holds the mouth (5) of the container (6) at a distance from the outlet (4) which is less than the preset distance.

Abstract: A system including a vapor recovery valve having a valve body with a fluid flow path and a vapor flow path. The fluid flow path and the vapor flow path are generally fluidly isolated from each other. The vapor recovery valve further includes a vapor control valve positioned in the vapor flow path. The vapor control valve is movable between a first position wherein the vapor control valve at least partially impedes the flow of vapor therethrough and a second position wherein the vapor control valve does not impede or less impedes the flow of vapor therethrough compared to when the vapor control valve is in the first position. The vapor recover valve includes an actuator magnetically coupled to the vapor control valve. The actuator is configured such that sufficient fluid flow through the fluid flow path in a first direction causes the actuator to move the vapor control valve from the first position to the second position in a second direction that is generally not the same as the first direction.

Abstract: This invention relates in part to a method for preparing a pressure vessel for receiving high purity acetylene at elevated pressure. The method involves providing a porous filler-containing pressure vessel, deep cleaning the porous filler-containing pressure vessel, purifying a solvent, and charging the purified solvent into the deep cleaned, porous filler-containing pressure vessel. The pressure vessel is then charged with high purity acetylene for storage, transport and/or delivery of the high purity acetylene. The high purity acetylene may be useful as a source material for depositing carbon and carbon-containing films in semiconductor applications.

Abstract: A gas filling apparatus for filling a gas into a storage apparatus for storing a semiconductor element or a reticle is provided. The gas filling apparatus is connected with an air feed source, which includes a base, a first inlet port and a set of air feed source route. The storage apparatus is loaded on the base, and the first inlet port which is disposed on the base corresponds with the second inlet port of the storage apparatus. The set of air feed source route includes an entrance part, a supply part and a branch part. The entrance part is connected with the air feed source, and the supply part is connected with the first inlet port. The branch part is a closed loop, which transmits the gas from the entrance part into the supply part.

Abstract: A valve (20) is provided for sealing an evacuation port (16) in a port area (18) of a wall structure (12) of a container. The valve (20) comprises a casing (22) having a shell portion (30) which is deformable from an open condition, whereat the shell portion (30) forms a chamber (32) over the port area (18), and a closed condition, whereat the shell portion (30) contacts the port area (18). When the shell portion (30) is in its open condition, gas exits from the chamber (32) through gas-releasing holes (24) in the casing (22). When the shell portion (30) is deformed to its closed condition, a port-sealing adhesive (26) adheres to the port area (18) to thereby seal the evacuation port (16).

Abstract: A device and method of using a liquid/air pressure testing tool to assist in testing and repairing liquid-filled agricultural tires is herein disclosed. The device provides a valving arrangement to allow alternating fluid transfer and air backfilling of a fluid-filled agricultural tire. The device utilizes quick-disconnect fittings providing quick in-line installation therebetween a fluid pump and a fluid filled tire. The device provides an inline ball valve and an isolation valve, thereby providing isolation of a pumping source and an air back-filling means, respectively. During fluid filling of a tire, the isolation valve allows monitoring of internal tire pressure using a common pressure gauge without removing the device or disconnecting any attached hoses. The device thus eliminates repeated steps when testing or repairing large fluid-filled tires as used on farm tractors and other agricultural machinery.

Abstract: A portable device for delivering nitrogen to multiple tires includes a gas source and supply line connected to a controller. The device also includes a gas delivery line comprising a manifold with a plurality of outlets in fluid communication with each other. A gas delivery line is operably connected to the controller and a plurality of extension lines with engagement chucks are operably connected to the outlets. The controller controls the supply of gas to the gas delivery line and controls a relief valve for venting the gas delivery line. The device also includes a sensor and a processor connected the controller and sensor which accepts user inputs. The controller, manifold, and processor are affixed to a stand.

Abstract: The invention provides a purge apparatus that purges the gas in the interior of a FOUP with a high purging efficiency and an apparatus for opening/closing the lid of a FOUP for use in the purge apparatus. The purge apparatus has a cabinet having an opening portion through with the lid of the FOUP can pass, a door that can close the opening portion and hold the lid, and a gas supply nozzle provide in the cabinet. In this apparatus, a seal member is provided in such a way as to surround an element that is provided on the surface of the door and adapted to actuate a latch mechanism of the lid. The seal member spatially separates the element that is adapted to actuate the latch mechanism from the external space in a state in which the door is holding the lid.

Abstract: A purging station with a substrate container receiving zone having at least one upwardly extending purging nozzle. The nozzle has a circular engaging lip. The substrate container has support means for at least one substrate and a purge port assembly that includes an externally facing sealing flange facing downward from the container. The sealing flange has a central aperture and a cantilevered flange portion that engages with the circular engaging lip of the nozzle. The weight of the substrate container on the nozzle carried by the canilevered portion of the flange causes bending of the flange for a resilient soft seal.

Abstract: A method and an apparatus for filling tires with high purity nitrogen involves evacuating and then filling tires with nitrogen. An automated apparatus has a mode of operation which can be selected from among a four tire service, a spare tire service and a top off service, with or without vacuuming during evacuation. With the four tire service, four tires connected to the apparatus are evacuated and then filled to set front and rear tire pressures. With the spare tire service a single tire connected to the apparatus is evacuated then nitrogen filled to a set tire pressure. A five tire service for evacuating and filling two front and two rear tires and a spare tire is also disclosed. The top off service of a tire connected to the apparatus involves sensing the tire pressure and then evacuating or nitrogen filling to obtain a set tire pressure. Evacuation of a tire is automatically stopped when a set minimum pressure level or a set maximum time limit for evacuation is reached.

Abstract: Devices comprising a plug positioned within a housing to regulate air within a container, for example, plastic storage containers or bags. One embodiment utilizes a plug that occludes an opening in a housing. The plug is displaced from the opening to inject or evacuate air from a container. An alternative embodiment utilizes a plug having air channels therein which can be sealed once air has been injected into or evacuated from a container. The devices are utilized with hose adaptors connected to vacuum or air hoses having specialized hose tips for coupling with the housing.

Abstract: A portable device for delivering nitrogen to multiple tires includes a gas source and supply line connected to a controller. The device also includes a gas delivery line comprising a manifold with a plurality of outlets in fluid communication with each other. A gas delivery line is operably connected to the controller and a plurality of extension lines with engagement chucks are operably connected to the outlets. The controller controls the supply of gas to the gas delivery line and controls a relief valve for venting the gas delivery line. The device also includes a sensor and a processor connected the controller and sensor which accepts user inputs. The controller, manifold, and processor are affixed to a stand.

Abstract: Heavier noble gases such as xenon and argon can reduce the run-in period for vacuum tubes and in particular flame detector tubes. The tubes can be filled with a run-in gas and then run-in. The run-in gas can then be exchanged for an end gas, such as neon, and the tube sealed. A final conditioning step of running in the tube with the end gas can further smooth the tube's anode and cathode to thereby improve performance and operating life.

Abstract: The present invention provides a method, system, and components for protecting reticles and specifically for minimizing haze formation on reticles during storage and use. By substantially continually maintaining a purge in a storage housing having a reduced humidity level on reticles or by temporarily storing the reticle in a container in proximity to a desiccant or getter when not being purged, haze formation can be eliminated, minimized, or sufficiently controlled. Moreover, a filter media in the container may be positioned to be “recharged” during the substantially continual purging of the reticle, a reduced desirable humidity level can be readily maintained in the reticle container when the container is not currently being purged. Additionally, the system of the invention can comprise an ionizer associated with the purge system. For example, the ionizer can be associated with at least one of the plurality of purge lines of the purge system.

Abstract: Fluid flow valve assembly comprising a valve body having an external port and an inlet end having at least a first port, a second port, and a third port; a first valve disposed within the valve body and adapted to control fluid flow between the first and second ports; and a second valve disposed within the valve body and adapted to control fluid flow between the third port and the external port.

Abstract: An inflation/deflation assembly, which can be mounted upon the inflation valve assembly of an inflatable bag, so as to permit both the inflation and deflation of the inflatable as may be desired. The inflation/deflation assembly comprises an outer housing, and a control rod is rotatably disposed within the housing so as to be rotatably movable between two positions angularly spaced apart from each other. When the control rod is disposed, for example, at a first one of the two positions, the inflatable bag can be inflated, whereas, when the control rod is disposed at the second one of the two positions, the inflatable bag can be deflated.

Abstract: A portable device for delivering nitrogen to multiple tires includes a gas source and supply line connected to a controller. The device also includes a gas delivery line comprising a manifold with a plurality of outlets in fluid communication with each other. A gas delivery line is operably connected to the controller and a plurality of extension lines with engagement chucks are operably connected to the outlets. The controller controls the supply of gas to the gas delivery line and controls a relief valve for venting the gas delivery line. The device also includes a sensor and a processor connected the controller and sensor which accepts user inputs. The controller, manifold and processor are affixed to a stand.

Abstract: Devices comprising a plug positioned within a housing to regulate air within a container, for example, plastic storage containers or bags. One embodiment utilizes a plug that occludes an opening in a housing. The plug is displaced from the opening to inject or evacuate air from a container. An alternative embodiment utilizes a plug having air channels therein which can be sealed once air has been injected into or evacuated from a container. The devices are utilized with hose adaptors connected to vacuum or air hoses having specialized hose tips for coupling with the housing.