Abstract: The present disclosure discloses a cleaning device and a clean method, the cleaning device includes a sweeping module and a washing module, the sweeping module includes a brush component and a steam generating component, the steam generating component and the brush component are arranged in sequence in the cleaning direction of the cleaning device; the washing module is configured to wash the parts to be cleaned, the washing module and the sweeping module are arranged in sequence in the cleaning direction of the cleaning device.

Abstract: An apparatus for supplying a support having a clean surface is provided. Alternatively, an apparatus for manufacturing a stack including a support and a remaining portion of a processed member whose one surface layer is separated is provided. A positioning portion, a slit formation portion, and a peeling portion are included. The positioning portion is provided with a first transfer mechanism of a stacked film including a support and a separator and a table for fixing the stacked film. The slit formation portion is provided with a cutter that can form a slit which does not pass through the separator. The peeling portion is provided with a second transfer mechanism and a peeling mechanism extending the separator and then peeling the separator. In addition, a pretreatment portion activating a support surface is included.

Abstract: Internal cleaning of inverted cans includes engaging a can's cylindrical wall with a wall-conforming vacuum or adhesive gripper, causing a spraying unit to travel axially in and out of the can's opening while the can is inverted on a circular conveyor, and using a supporting arm or bottom stop to subject the can to a counterforce against a flushing force from sprayed cleaning medium. This prevents the can from being pressed out of a receptacle in which it sits during cleaning.

Abstract: An air wiping device for cleaning an elongated product that passes through the air wiping device. The air wiping device includes a housing having an internal tubular passage through which the elongated product extends with the housing tubular passage having an inlet end and an outlet end for respectively receiving and passing the elongated product; a plurality of air outlets mounted in the housing and adapted to direct a flow of compressed air in a direction having a component in an opposite direction to the flow of the elongated product through the housing; and a ceramic insert disposed in the internal tubular passage of the housing and through which the elongated product passes. The ceramic insert includes a tapered input through which the elongated product is received and an output through which the elongated product passes from the housing.

Abstract: A value document processing apparatus comprises an input for value documents to be processed, an output and/or a storage device for processed value documents, a transport device for singled transport of value documents from the input to the output or the storage device, a housing, a checking device arranged in the housing for checking value documents transported in singled form past it, and a suction conduit system for suction air which has a port for a suction unit for sucking air with dust out of the suction conduit system, and at least one hand cleaning portion connected to the port and having a suction opening movable in the area of the checking device, and/or at least two conduit portions connected to the port and having suction openings arranged at different portions of the transport path and directed onto the transport path.

Abstract: A treatment device for transport and storage boxes according to the invention comprises a plurality of decontamination modules (24-27) supported by a common chassis (100) and arranged in a row of at least one column (23c) of modules superposed one on top of the other. Each decontamination module (24-27) comprises its own pumping means (6) having at least a primary pump (8a) housed in a primary pumping compartment (8c) that is longitudinally offset from the decontamination chamber (5). Access to the decontamination modules (24-27) is had via side access doors which are all oriented on one and the same access side and which are acted upon by actuating means that automatically close and open them. A lateral transfer zone is provided on the access side, and comprises a robot (29) capable of moving the transport and storage boxes between a frontal loading-unloading station (23a) and the decontamination chambers (5) of each of the decontamination modules (24-27).

Abstract: An industrial vacuum system which is contained in a portable container having a bottom and an open end and includes an extension unit having a first end operatively connected to the portable container and a second end that is selectively extendable away from the container, a collection unit rotatively coupled to first ends of the extension unit, a transportation unit coupling the extension unit to the container, the transportation unit having one end rotatively coupled to the end of the extension unit the transportation unit including a plurality of wheel units, and a trolley guidance unit having a rail attached to the bottom of the container and engaging the wheels of the wheel unit.

Abstract: A testing table that allows testing lights along its length. The testing table can be used to convey lights along the direction, and to test the lights at different locations along the direction along the conveying. The lights can be cleaned and tested. Empty tubs can be returned.

Abstract: A bottle cleaner that inverts the bottles to spray solutions into them. The bottles invert and receive, for example, a spray of a cleaning solution. The cleaner then returns the bottles to the upright orientation. Each pass of the bottles utilizes two sets of linked grippers arranged as a chain. One chain contacts the bottles on one side while the second chain contacts them on the other side. The two chains squeeze the bottles between them to firmly hold them. A single adjustment sets a uniform distance between the two chains of each path through the cleaner at four different locations, and the same adjustment equalizes the distances between the two chains of the two paths so that they will effectively retain the same bottles through two passes through the machine. Four motors running at the same speed keep the chains moving together.

Abstract: A robot cleaning system and a dust removing method of the same that are capable of moving a first dust collector mounted in a robot cleaner to a docking station to remove dust collected in the first dust collector. The robot cleaning system includes a robot cleaner having an opening, though which a first dust collector to collect suctioned dust is carried in and out of the robot cleaner, a docking station, to which the robot cleaner is docked to remove the dust collected in the first dust collector, and a collector moving unit to move the first dust collector to the docking station.

Abstract: A method and system for cleaning containers being transposed through a container cleaning line, including an open-ended housing, a predetermined container flow path defined by the line of moving containers traversing the enclosure defined by the housing longitudinally, a first set of ionizing air nozzles mounted within the housing for directing ionized compressed air toward the containers in the container flow path, with at least one of the nozzles directing air flow into an open side of each container as it passes the nozzle and a second set of high velocity air nozzles mounted within the housing for directing high velocity compressed air toward the container flow path, the second set of high velocity nozzles being disposed along a direction essentially parallel to the container flow path with at least one of the nozzles flows directing high velocity air flow into the open side of each container as it passes the nozzle. Nozzle guards are provided to prevent contact between the containers and the nozzles.

Abstract: A cleaning apparatus and method which includes spraying high pressure air obliquely onto a cleaning surface from an air nozzle disposed in the vicinity of the cleaning surface of a cleaning object to be cleaned. A recovery portion of the cleaning apparatus which is disposed in front of an outlet port of the air nozzle recovers at least air containing foreign matter removed from the cleaning object by making the air exhaust into an exhaust introducing passage along a wall surface of an air guide. The recovery portion of the cleaning apparatus includes an air guide section disposed in front of the outlet port of the air nozzle, and an air cover section, which forms an exhaust introducing passage for recovering the air that flows along an air guide wall surface of the air guide section.

Abstract: A machine for cleaning the inner walls (66, 75) of a receptacle (12), includes several cleaning stations of which one is fitted with an insufflation tube (36) that is connected to a source of pressurized gas and that is provided with a nozzle (38) insufflating the gas towards the inner walls (66, 75) of the receptacle (12) during a cleaning cycle including an ascending phase and a descending phase (Pd) of the insufflation tube (36), the nozzle (38) having an annular peripheral slot (64) that is capable of forming a peripheral jet (f2) of gas of generally frustoconical shape directed towards the inner side walls (66) of the receptacle (12) and towards the bottom, and the peripheral jet (f2) being triggered for at least a part of the descending phase (Pd).

Abstract: A detection/cleaning device for reticles employed in the production of electronic components, wherein the detection/cleaning device has a cleaning unit, in which a cleaning chamber is constructed. At least one gas feed for introducing a pressurized fluid cleaning medium opens into the cleaning chamber, and at least one suction means, by means of which the gas can be discharged from the cleaning chamber, leads from the cleaning chamber. The cleaning chamber has at least one first opening for introducing and removing a reticle. A detection unit for detecting contaminants on articles used in semiconductor production is provided. The detection unit has a detection means, into which a reticle can be introduced from one feed side of the detection unit. The first opening of the cleaning chamber and the feed side lie opposite each other. A feeding device is provided for exchanging a reticle between the cleaning unit and the detection unit.

Abstract: This patent discloses a cleaning system for shopping carts. The cleaning system may include a prewash station, a wash station, a rinse station, a drying station, a physical disinfecting station, a conveyor, and a recovery tank. The wash station may include brushes. The drying station may include a fan configured to blow a thin sheet of air downward and onto the shopping cart. The physical disinfecting station may include an ultraviolet light generator. The conveyor may include a track system having hooks attached to chains that are configured to be moved by a conveyor motor. A frame may surround and support the stations. The cleaning system additionally may include a water recovery/supply system and an external spray wash hose attached to a reservoir to pre-prewash the shopping carts.

Abstract: An automatic cart wash apparatus. The automatic cart wash apparatus provides improved cleaning of stock carts on a regular basis over manual cleaning by store employees. The automatic cart wash apparatus includes three main stages: a debris removal (vacuum) stage, a cleaning (wash, sanitize, rinse) stage, and a drying stage. The debris removal stage uses forced air and/or suction to remove solid and generally non-soluble waste, such as a paper or other trash and debris, from a stock cart. The cleaning stage uses a selection of detergents, sanitizing agents, and rinse agents to remove soluble or sticky waste, such as food and liquids, and to kill germs, viruses, and bacteria present on the cart. The drying stage removes excess liquids from the cart making it ready for use by the next customer.

Abstract: An automatic air-blown cleaning apparatus for cleaning a liquid crystal display (LCD) component in an LCD assembly process. The automatic air-blown cleaning apparatus has an assembly station for receiving and assembling the liquid crystal display component, a conveying device for delivering the liquid crystal display component to the next assembly station, and an air filtering blower provided on the conveying device. The air filtering blower sends an air flow toward the liquid crystal display component to remove residual matter from the liquid crystal display component.

Abstract: A dust remover which comprises a power supply and an electrode applied with voltage by said power supply. The dust attached to the object of dust removal is removed therefrom by bringing the electrode into contact with the object of dust removal or approaching toward the object of dust removal. The object of dust removal is a conductor and/or an insulator. The voltage applied to said electrode is a pulsed voltage of plus and minus or an AC voltage of plus and minus. Or the voltage is a DC voltage having the same polarity with that of electricity with which the dust is charged, or the voltage is a DC voltage having an opposite polarity to that of electricity with which the dust is charged. The object of dust removal includes at least a ball for “Pachinko”, a car body, a printed board, a metal box or a part thereof, a frame for glasses, a plastic lens, a plastic box or a part thereof, a fiber, a wood, a paper box or a part thereof.

Abstract: A tool and a process for removing particles from a reticle are described. The tool is disposed in front of a pellicle particle detector, including at least a gas spray member toward a surface of the reticle for removing particles and a supporting member supporting the gas spray member in front of the pellicle particle detector. The supporting member can further fix the tool onto the pellicle particle detector. In the particle removing process, when particles are detected on the reticle, the tool is turned on and the reticle is loaded into the pellicle particle detector through the gas spray member in order to remove the particles from the reticle before the pellicle particle detector detects the particles.

Abstract: A vacuum selector is provided. The vacuum selector includes a housing having first and second faces, the first face including first and second openings, the second face including a primary opening that communicates with the first and second openings along a flow path through the housing. The vacuum selector further includes a slider member movably provided in the housing and traversing the flow path, the slider member including a selector opening therethrough, the slider member being movable transversely to the flow path such that the selector opening changes the flow path to adjust flow communication between the primary opening and the first and second openings.

Abstract: An apparatus for cleaning toner cartridges by means of compressed air has at least one cleaning chamber (1, 2) and a conveyor line (3) leading through this at least one cleaning chamber (1, 2). The conveyor line (3) is provided with variable-position means of conveying individual parts (M, T, G) of toner cartridges. Variable-position compressed air nozzles (11) are arranged in the cleaning chambers (1, 2). This apparatus permits automatic, efficient, environmentally friendly cleaning of toner cartridges.

Abstract: When vehicle wheels are powder-coated with powder coating, those surfaces on which no coating is wanted are always also coated. To suck off the powder coating from these surface areas before it is baked in, a device which includes a conveyor system, an electronic camera and a suction station is used. The electronic camera records the axial and angular position of the vehicle wheels which pass it, and supplies corresponding data to a controller. After a certain time delay, this causes a suction head in the suction station to move, in such a way that it approaches the vehicle wheel with appropriate alignment of its axis and angular position, and using suction nozzles sucks off those surfaces of the vehicle wheel on which the powder coating is not wanted. During the suction process, the suction head moves together with the vehicle wheel, at the same speed.

Abstract: An automatic air-blown cleaning apparatus for cleaning a liquid crystal display (LCD) component in an LCD assembly process. The automatic air-blown cleaning apparatus has an assembly station for receiving and assembling the liquid crystal display component, a conveying device for delivering the liquid crystal display component to the next assembly station, and an air filtering blower provided on the conveying device. The air filtering blower sends an air flow toward the liquid crystal display component to remove residual matter from the liquid crystal display component.

Abstract: The cleaning of particles from an electrostatic chuck. In one embodiment, a method of cleaning an electrostatic chuck in a processing chamber is disclosed. The method comprises directing a flow of gas across the electrostatic chuck to dislodge particles from the electrostatic chuck and removing the flow of gas and particles through an exhaust port in the processing chamber. In this embodiment, the vacuum integrity of the chamber is not compromised during the cleaning of the electrostatic chuck.

Abstract: A method and device for removing sawdust from a deck surface (24) of a wooden pallet (10) is provided. The device comprises a rotary brush (124) having a working length (WL) defined by a plurality of bristles (130). The working length (WL) is greater than a width (WD) of the deck surface (24). A mechanism (136) is connected with the rotary brush (124) and is actuatable for rotating the rotary brush (124). A support (32) rotatably supports the rotary brush (124). The mechanism (136) is fixed relative to the support (32). Rotation of the rotary brush (124) when the bristles (130) are in contact with the deck surface (24) of the wooden pallet (10) simultaneously removes sawdust and debris across the width (WD) of the deck surface (24).

Abstract: A printing screen cleaning apparatus and a method for cleaning a printing screen by employing the cleaning apparatus which includes a cleaning head having a wiping member and a backup member for sucking the paste via a wiping member while sliding the wiping member on a lower surface of the printing screen. The backup member includes a suction port provided in a suction region of a backup surface of the backup member. The backup member also has a groove that extends parallel to the suction region and approximately perpendicular to the sliding direction of the wiping member. The groove partially releases the backup of the wiping member.

Abstract: A heat transfer decorating machine is disclosed. In particular, the disclosed heat transfer decorating machine provides mechanisms to allow the machine to be rapidly re-configured from applying labels to a particular article configuration to applying labels to a different article configuration by an operator without substantial use of tools. In addition, the disclosed heat transfer labeling machine features a distributed drive system which provides a motor for all major movable mechanical elements rather than use a centralized drive system with a distributed transmission. Further, the disclosed heat transfer decorating machine is capable of labeling filled and chilled articles by providing for removal of environmental contamination prior to application of the labels.

Abstract: An improved garment finishing machine includes an exterior housing with an entrance and an exit. An interior garment processing chamber processes garments moving downstream from the entrance to the exit. A blower draws air through the processing chamber. An air intake is located between the blower and the processing chamber. The improvement is a continuous lint filtration system. The filtration system includes a filtration medium adapted for capturing lint entrained in air drawn through the garment processing chamber and into the intake. A roller assembly is provided for mechanically advancing the filtration medium across the intake, such that a lint-covered portion of the filtration medium is automatically replaced at the intake with a clean portion of the filtration medium.

Abstract: A low pressure blower operated airknife having a housing with an elongated primary air discharge orifice for directing a narrow width curtain of air. The airknife includes an air-augmenting shroud which defines auxiliary discharge orifices on opposite longitudinal sides of the primary air discharge orifice such that air discharging from the primary discharge orifice creates a low pressure condition adjacent the auxiliary air discharge orifices for drawing additional air through the auxiliary discharge orifices which augments the velocity and volume of the discharging air current without the necessity for increasing the air inlet pressure or blower size. The shroud may take alternative forms, including pairs of wings disposed on opposite sides of the primary discharge orifice or hollow structures that surround the airknife housing. The airknife further is adapted for low pressure direction and application of air laden particles, such as preatomized liquid particles.

Abstract: A vacuum selector is provided. The vacuum selector includes a housing having first and second faces, the first face including first and second openings, the second face including a primary opening that communicates with the first and second openings along a flow path through the housing. The vacuum selector further includes a slider member movably provided in the housing and traversing the flow path, the slider member including a selector opening therethrough, the slider member being movable transversely to the flow path such that the selector opening changes the flow path to adjust flow communication between the primary opening and the first and second openings.

Abstract: A low pressure blower operated airknife having a housing with an elongated primary air discharge orifice for directing a narrow width curtain of air. The airknife includes an air-augmenting shroud which defines auxiliary discharge orifices on opposite longitudinal sides of the primary air discharge orifice such that air discharging from the primary discharge orifice creates a low pressure condition adjacent the auxiliary air discharge orifices for drawing additional air through the auxiliary discharge orifices which augments the velocity and volume of the discharging air current without the necessity for increasing the air inlet pressure or blower size. The shroud may take alternative forms, including pairs of wings disposed on opposite sides of the primary discharge orifice or hollow structures that surround the airknife housing. The airknife further is adapted for low pressure direction and application of air laden particles, such as preatomized liquid particles.

Abstract: The present invention discloses a method for cleaning contact lens molds. The method comprises the steps of placing a contact lens mold within an enclosed or substantially enclosed area, directing an inflow of gas under pressure into the enclosed area against the contact lens mold, and providing an outflow of gas from the enclosed area, thereby dislodging and removing debris.

Abstract: A low pressure blower operated airknife having a housing with an elongated primary air discharge orifice for directing a narrow width curtain of air. The airknife includes an air-augmenting shroud which defines auxiliary discharge orifices on opposite longitudinal sides of the primary air discharge orifice such that air discharging from the primary discharge orifice creates a low pressure condition adjacent the auxiliary air discharge orifices for drawing additional air through the auxiliary discharge orifices which augments the velocity and volume of the discharging air current without the necessity for increasing the air inlet pressure or blower size. The shroud may take alternative forms, including pairs of wings disposed on opposite sides of the primary discharge orifice or hollow structures that surround the airknife housing. The airknife further is adapted for low pressure direction and application of air laden particles, such as preatomized liquid particles.

Abstract: An apparatus for cleaning toner cartridges by means of compressed air has at least one cleaning chamber (1, 2) and a conveyor line (3) leading through this at least one cleaning chamber (1, 2). The conveyor line (3) is provided with variable-position means of conveying individual parts (M, T, G) of toner cartridges. Variable-position compressed air nozzles (11) are arranged in the cleaning chambers (1, 2). This apparatus permits automatic, efficient, environmentally friendly cleaning of toner cartridges.

Abstract: An apparatus and method useful for removing potential wafer-contaminating particles from semiconductor wafer pods. The apparatus includes a rotatable air sprinkler which is mounted in a housing and connected to a source of clean, dry air (CDA) . The air sprinkler rotates as the air is distributed under pressure through the sprinkler and ejected from nozzles in the sprinkler. The ejected air impinges against a semiconductor wafer pod placed on the housing, above the air sprinkler to dislodge or remove particulate contaminants from the pod and prevent or at least significantly reduce the likelihood of particle contamination during transport of the pod and/or processing of the wafers in the pod.

Abstract: A method of processing perforated gypsum boards is disclosed. When the gypsum boards have been perforated the following steps are performed while the boards are being moved individually along a path. The moving boards are sprayed with pressurized water which is directed towards the opposite surfaces of the boards so as to enter apertures or slots formed by the perforation of the boards, and then water is removed from the moving boards by blowing pressurized air against the boards and sucking water therefrom, wherein dust on the boards is entrained into the water and removed from the boards together with the water.

Abstract: A method of transporting rod-shaped tobacco smoke filters, which carry solid particles, along an elongated path from a sender to a receiving station, includes transporting the filters from the sender to the receiving station through the predetermined portion of the path. A plurality of jets of a pressurized gaseous fluid is directed across a predetermined portion of the path to expel from the portion of the path solid particles which are separated or separable from the filters. The expelled particles are collected in a chamber outwardly adjacent the predetermined portion of the path. The collected particles are evacuated from the chamber.

Abstract: Disclosed is an apparatus for cleaning bottles made of synthetic resin so as to remove dust or impurities attached to the insides of the bottles by static electricity, in which air in an ionized state is changed into air in a neutral state and the neutr(lized air is injected into the bottles. Conventionally, a mechanism for cleaning the insides of bottles using compressed air has been mainly used. However, in this conventional system, since the compressed air in an ionized state such as cation and anion is supplied into the bottles, dust or impurities attached to the insides of bottles by static elasticity generated therein is electrically charged. Therefore, it is difficult to remove the electrically charged dust or impurities from the insides of bottles.

Abstract: A low pressure blower operated airknife having a housing with an elongated primary air discharge orifice for directing a narrow width curtain of air. The airknife includes an air-augmenting shroud which defines auxiliary discharge orifices on opposite longitudinal sides of the primary air discharge orifice such that air discharging from the primary discharge orifice creates a low pressure condition adjacent the auxiliary air discharge orifices for drawing additional air through the auxiliary discharge orifices which augments the velocity and volume of the discharging air current without the necessity for increasing the air inlet pressure or blower size. The shroud may take alternative forms, including pairs of wings disposed on opposite sides of the primary discharge orifice or hollow structures that surround the airknife housing. The airknife further is adapted for low pressure direction and application of air laden particles, such as preatomized liquid particles.

Abstract: An apparatus and method for cleaning objects having generally irregular surface features, such as reloadable photographic cameras, has a partial enclosure having opposing side walls, and a top wall joining the opposing side walls. An air ionizing element composed of an ion emitter and an air knife is arranged in the enclosure for electrostatically neutralizing the object with ions entrained in a curtain-like stream of air directed onto the object.

Abstract: A vacuum cleaning wheel and vacuum applicator having a stationary vacuum chamber, a ported wheel that rotates around the stationary vacuum chamber, and a stationary shoe that acts as the vacuum applicator and is positioned between the ported wheel and an article such as a cigarette filter rod to be cleaned. An article or articles having cavities filled with granular particles is passed underneath the stationary shoe and rotating ported wheel, with the movement of the article being synchronized with the rotation of the ported wheel. The stationary shoe provided between the rotating ported wheel and the article having particle filled cavities ensures that vacuum is only applied to remove loose particles in between the particle filled cavities, with vacuum being cut off abruptly to ports that are passing over the particle filled cavities and with the particles that have been cleaned being removed completely.

Abstract: A vacuum cleaning wheel and vacuum applicator having a stationary vacuum chamber, a ported wheel that rotates around the stationary vacuum chamber, and a stationary shoe that acts as the vacuum applicator and is positioned between the ported wheel and an article such as a cigarette filter rod to be cleaned. An article or articles having cavities filled with granular particles is passed underneath the stationary shoe and rotating ported wheel, with the movement of the article being synchronized with the rotation of the ported wheel. The stationary shoe provided between the rotating ported wheel and the article having particle filled cavities ensures that vacuum is only applied to remove loose particles in between the particle filled cavities, with vacuum being cut off abruptly to ports that are passing over the particle filled cavities and with the particles that have been cleaned being removed completely.

Abstract: The present invention discloses an apparatus for cleaning ophthalmic devices. The apparatus has a conveying system for transporting lens mold carriers to a cleaning station. The cleaning station has at least one movable cleaning assembly which is situated above the lens mold carrier and has a recess. When the cleaning assembly is lowered to the lens mold carrier, a substantially enclosed or enclosed cavity containing the lens mold is created by the carrier and the recess of the cleaning assembly. Compressed gas is injected into the cavity to dislodge any debris that may be present on the lens molds, and a vacuum is employed to remove gas and debris from the cavity.

Abstract: An apparatus and method for cleaning objects having generally irregular, undulating surface features, such as reloadable photographic cameras, has a partial enclosure having opposing side walls, and a top wall joining the opposing side walls. A pair of air ionizing members are arranged on the interior of the opposing side walls and a source of a curtain-like stream of air is arranged in the top wall.

Abstract: The present invention provides a method and system for blowing dust and other foreign particles off semiconductor substrate surfaces. The system may blow ionized air, which neutralizes electrostatic charges on the substrate surface thereby facilitating the release of particles from the substrate and reducing the risk of damage to semiconductor substrates from electrostatic discharge. The system also provides a vacuum for capturing dust particles blown off the surface, thus preventing the particles from contaminating clean room environments and redepositing on the cleaned substrate or other substrates.

Abstract: Apparatus for transporting rod-shaped tobacco smoke filters, which contain and/or carry particles of charcoal and/or other particulate tobacco smoke filtering and/or flavoring material, wherein a sender directs a series of successive filters lengthwise into a pneumatic conduit extending toward or into a receiving station. A section of the conduit ahead of the receiving station is provided with openings communicating with a collecting chamber. A duct which extends along the section of the conduit is provided with orifices serving to direct jets of a pressurized gaseous fluid into the openings to thus expel loose particles and/or particles adhering to the external surfaces of filters into the collecting chamber. The latter discharges collected particles by gravity flow.

Abstract: The present invention provides a vertical drop, multi-pass product cleaner with air flow control on the outlet side of the cleaner, wherein the air flow control includes dampers movable between open and constricted positions disposed within at least one of a plurality of air outlets of the product cleaner.

Abstract: The multi functional cleaning module comprises a plurality of air curtain, an eximer ultraviolet light irradiating device, a brush, a high-speed shower device, and an air knife, where they are arranged continually on a plan and the glass substrates are inserted continually into them.

Abstract: A system for cleaning a reticle. There is provided a clean chamber and a reticle having a pair of opposing edges and a pair of opposing surfaces which is to be cleaned disposed in the clean chamber. A gas inert to the reticle is directed in a direction tangential to each of the surfaces of the reticle and along one the edge of the reticle. The gas is exhausted from a location spaced from the other of the pair of opposing edges and remote form the one edge. An optional monitor monitors the particles in the exhausted gas. The gas is preferably applied in pulses which have a pulse length of from about 0.05 second to about 1 second and a pulse repetition rate of from about 0.5/second to about 40/second. The gas is preferably ionized and preferably is applied at a pressure of from about 20 psi to about 120 psi. The stepper chamber is vibrationally isolated from the blow-off chamber.

Abstract: System for drying printed circuit boards in a liquid cleaning apparatus. The liquid cleaning apparatus includes a series of air knife dryers enclosed within two drying modules. The first drying module houses a first set of top and bottom air knife dryers which includes at least one top air knife dryer, positioned above a conveyor belt carrying printed circuit boards through the liquid cleaning apparatus, and at least one bottom air knife dryer, positioned below the conveyor belt. The air knife dryers may be symmetrically opposed and aligned above and below the conveyor belt. The liquid cleaning apparatus further includes side air knife dryers disposed along the conveyor belt between the first drying module and the second drying module.