Abstract: A cleaning machine for cleaning a surface in which cleaning solution is dispensed to the surface and substantially extracted along with the dirt on the surface in a continuous operation is provided. The cleaning machine includes an airflow source that produces an airflow directed out of an outlet. A duct cover covers the outlet. The duct cover includes at least one opening that is sized and oriented to distribute the air evenly across the outlet.

Abstract: An apparatus and process are described delivering alternating pulses of fluid and air within either a fully sealed or partially sealed tooling enclave in the direct presence of a constant or variable vacuum source for the purpose of removing loose as well as attached contamination from the part and it's associated internal passageways, as well as internal and external surface areas. The agitation of the debris is created by the displacement of the air or other gases, held under compression by the fluids when released to the vacuum source surrounding, affixed, or presented to the part/area to be cleaned. The fluid/air medium is generated in an alternating method by the use of a rotating pulse generator. The generator receives a constant or alternately a variable rate flow of fluid to be used in the application as well as a constant or alternately variable rate flow of compressed air.

Abstract: An electric vacuum cleaner of the present invention includes: a base plate connected to the lower face of a cleaner body so that the base plate is freely movable up and down, and having an exhaust hole formed in a surface facing the surface to be cleaned for blowing exhaust air; an extensible air duct, interposed between the base plate and the cleaner body, for guiding the exhaust air from an intake fan to the base plate; a dust suction nozzle supported on a part of the base plate and connected to the suction side of the intake fan; and wheels, mounted on the lower face of the cleaner body, for supporting the cleaner body on the surface to be cleaned when the base plate is moved up.

Abstract: An automatic air-blown cleaning apparatus for cleaning a liquid crystal display (LCD) component in an LCD assembly process. The automatic air-blown cleaning apparatus has an assembly station for receiving and assembling the liquid crystal display component, a conveying device for delivering the liquid crystal display component to the next assembly station, and an air filtering blower provided on the conveying device. The air filtering blower sends an air flow toward the liquid crystal display component to remove residual matter from the liquid crystal display component.

Abstract: An integrated, yet divisible shop vacuum and air compressor system is provided with a blower, a wet and dry vacuuming section and a compressor section, each of which is mounted on a easy to relocate trolley. The vacuum system has a separate motor from the compressor and is independently operable with full capacity. A filter in front of the vacuum suction prevents debris and moisture from entering the vacuum-generating unit. The vacuum hose decreases in diameter as a function of distance from the unit to increase airflow velocity. Air pressure within a compressed air storage tank in the compressor section is sensed and controlled. The integrated shop vacuum and air compressor system provides dry vacuuming, wet vacuuming, high pressure air delivery and air blowing capability from a single, mobile unit. The unit is fully integrated into a single, yet divisible platform which may come with or have available via after market purchase, a second set of wheels for total independence.

Abstract: A longitudinal cutting device, that is usable for cutting a length of material such as a fabric or a paper web, includes a cylinder which supports the length of fabric or web. A blade cooperates with the cylinder to cut the fabric or web. A blower nozzle is used to direct a flow of fluid against the surface covering the cylinder. A suction nozzle is provided for suctioning the flow of fluid from the covering surface before it touches the length of fabric or the web.

Abstract: A semiconductor device is inspected and cleaned by applying a vacuum to the area in which the semiconductor device is positioned. Micro-sized particulates that are brushed off the semiconductor device during cleaning are drawn off by the vacuum.

Abstract: A fluid particle cleaner and method are disclosed. The invention provides a partition to a side of a fluid nozzle to form: a central cavity configured to define the fluid departing the surface into a central cavity vortex; and a side cavity adjacent the central cavity to define fluid escaping from the central cavity into a side vortex. The vortices interact in a counter-rotating and stationary fashion. The strong and smaller central vortex creates an upward air velocity field that forces any airborne particle to move away from the surface. The side vortex is designed to: connect the central vortex velocity field to the vacuum flow and allow airborne particles to remain suspended until they reach the vacuum flow; and create a decelerating field for high speed particles traveling parallel (horizontally) to the surface to increase the residence time in the central vortex with positive vertical velocity.

Abstract: An automatic air-blown cleaning apparatus for cleaning a liquid crystal display (LCD) component in an LCD assembly process. The automatic air-blown cleaning apparatus has an assembly station for receiving and assembling the liquid crystal display component, a conveying device for delivering the liquid crystal display component to the next assembly station, and an air filtering blower provided on the conveying device. The air filtering blower sends an air flow toward the liquid crystal display component to remove residual matter from the liquid crystal display component.

Abstract: The cleaning of particles from an electrostatic chuck. In one embodiment, a method of cleaning an electrostatic chuck in a processing chamber is disclosed. The method comprises directing a flow of gas across the electrostatic chuck to dislodge particles from the electrostatic chuck and removing the flow of gas and particles through an exhaust port in the processing chamber. In this embodiment, the vacuum integrity of the chamber is not compromised during the cleaning of the electrostatic chuck.

Abstract: A cleaner is provided for cleaning the end surface area of a ferrule of a fiber optic connector. The cleaner includes a housing having a mating portion for mating the cleaner with the connector. A cleaning head is movably mounted on the housing for movement across the end surface area. A motor is mounted on the housing and is coupled to the cleaning head for moving the cleaning head in response to operation of the motor. An air jet is mounted on the housing for directing a stream of a cleaning medium toward the cleaning head to remove residue from the end surface area. An exhaust is provided on the housing for removing and evacuating residue from the end surface area. A plurality of the cleaners are mounted on a dummy circuit board for cleaning the end surface areas of the ferrules of a plurality of fiber optic connectors mounted in a given pattern on a backplane of a chassis.

Abstract: In this disclosure, air flow is formed above chemical liquid film and a move of the chemical liquid is generated by making the air flow into a contact with the surface of chemical liquid. Further, a negative pressure is generated in a space between a processing object substrate and a plate by rotating the plate. Consequently, uniformity of processing of chemical liquid is improved, so that liquid removing step can be carried out effectively. As a result, yield rate of chemical liquid treatment can be improved.

Abstract: An apparatus and method for extracting soiled cleaning solution from carpets and other surfaces utilizing a low-profile pick-up head is disclosed. The apparatus includes a vacuum chamber or enclosed space positioned in a fluid recovery device to provide a uniform vacuum along the entire width of the device. Also disclosed is a low-profile push-pull fluid recovery device which includes a positive pressure chamber and a vacuum chamber in the push-pull head to distribute positive and vacuum pressures, respectively, along the width of the push-pull head. Methods for using such pick-up heads are also disclosed.

Abstract: An improvement to a Novellus HDP SPEED reactor chamber is described. An evacuation port of the Novellus SPEED Chamber is at one location in the chamber to remove injected cleaning gas from the chamber and there is a single input for cleaning gas connection into the chamber. In accordance an improvement a plurality of clean gas injectors is positioned on an adapter in the chamber and connected to the single input gas connection for distributing the cleaning gas in the chamber with the injectors spaced away from the evacuation port. The adapter is a U-shaped adapter and is positioned in the chamber with the adapter connected at the base to the single input gas connection. The adapter has two semicircular branch legs extending in opposite directions about the chamber to free ends that are connected to gas injectors. The free ends with the injectors are located in the chamber almost on the opposite end of the chamber from the evacuation port.

Abstract: A cleaning device for use in the production of semiconductor components comprises two feed devices with which a fluid medium is guided across a respective surface of an object to be cleaned so that different faces of the object are simultaneously cleaned. At least two gas feeding devices, having one means each for directing a gas flow onto the surface of the object to be cleaned, open into a cleaning chamber supplying a pressurized cleaning gas. At least two extraction means are connected to the outside of the cleaning chamber for discharging the gas fed to the cleaning chamber. The object can be introduced into the cleaning chamber through at least one gap. At least two ionization means are used to ionize the gas and the particles that are present in the cleaning chamber. One ionization means each is mounted between a direction means and an extraction means.

Abstract: The present invention discloses an apparatus for cleaning ophthalmic devices. The apparatus has a conveying system for transporting lens mold carriers to a cleaning station. The cleaning station has at least one movable cleaning assembly which is situated above the lens mold carrier and has a recess. When the cleaning assembly is lowered to the lens mold carrier, a substantially enclosed or enclosed cavity containing the lens mold is created by the carrier and the recess of the cleaning assembly. Compressed gas is injected into the cavity to dislodge any debris that may be present on the lens molds, and a vacuum is employed to remove gas and debris from the cavity.

Abstract: The present invention relates to upright and cannister vacuum cleaners. The improved vacuum cleaners utilize toroidal vortex technology to provide efficient airflow in a sealed system. The sealed system prevents dust from escaping into the atmosphere and retains kinetic energy of flowing air. The present invention is also quieter, lighter, and simpler than conventional designs.

Abstract: A de-duster for a moving printing material web includes at least one blower nozzle assigned to a first side of the printing material web, and at least one blower nozzle assigned to a second side of the printing material web. The blower nozzles are set counter to web travel direction at an angle ?. The de-duster further includes at least one extraction nozzle assigned to the first side of the printing material web, and at least one extraction nozzle assigned to the second side of the printing material web. The extraction nozzles are set counter to the web travel direction at an acute angle ?. Each of the at least one blower nozzle is disposed between the at least one extraction nozzle at a respective side of the printing material web and the respective side of the printing material web. A combination of the de-duster and a cutting device, a folder with the combination, and a web-processing printing press in combination with the folder, are also provided.

Abstract: A system cleans a set of optical connectors. The system includes a fluid source, a vacuum source, a support member which defines a cleaning device edge, and a set of cleaning devices. Each cleaning device includes (i) a fluid intake member which connects to the fluid source, (ii) a fluid output member which connects to the vacuum source, and (iii) a cleaning head which connects to the fluid intake member and the fluid output member. Each cleaning device is disposed along the cleaning device edge of the support member. The set of cleaning devices is configured to (a) align over a set of optical interfaces of the set of optical connectors, (b) direct fluid (e.g., gas, gaseous snow, etc.) from the fluid source toward the set of optical interfaces, and (c) draw the directed fluid away from the set of optical interfaces and toward the vacuum source.

Abstract: A vacuum cleaner includes working elements of cleaner, that is, a blower and a dust collection unit disposed in a nozzle section of which casing is composed of an upper unit and a lower unit, and having a handle coupled to the nozzle section. At least one of the working elements is supported by the upper unit and a support unit provided in the lower unit or by the lower unit and a support unit provided in the upper unit. Therefore, the cleaner can be repaired without having all screws removed, thus repaired conveniently.

Abstract: The present invention discloses a method for cleaning contact lens molds. The method comprises the steps of placing a contact lens mold within an enclosed or substantially enclosed area, directing an inflow of gas under pressure into the enclosed area against the contact lens mold, and providing an outflow of gas from the enclosed area, thereby dislodging and removing debris.

Abstract: Embodiments of the invention generally provide a processing system for removing contaminant particles from substrates. The processing system generally includes at least one processing enclosure having a particle removal assembly positioned therein. The particle removal assembly generally includes a substrate support member, a broadband actuator in communication with the substrate support member, and an air knife assembly positioned proximate the substrate support member. The air knife assembly is generally configured to generate a high pressure laminar flow of gas across the surface of the substrate.

Abstract: A substrate cleaning device is provided, which comprises a first cleaning room including a first cleaning portion for cleaning a substrate placed therein, and a second cleaning room including a second cleaning portion for cleaning a substrate provided therein. The first cleaning room is stacked on the second cleaning room so that at least a portion of the first cleaning room overlaps at least a portion of the second cleaning room.

Abstract: A fluid recirculating cleaning device includes an exhaust port defining an exhaust port longitudinal axis, a fluid source end and an exhaust end defining a first cross-sectional area. A suction port includes a suction port longitudinal axis, a fluid exit end and a fluid entrance end defining a second cross-sectional area greater than the first cross-sectional area. The suction port includes a second outer surface that extends from the entrance end toward the fluid exit end. A vacuum blower motor sucks fluid in through the suction port to create fluid flow away from the vacuum motor and toward the exhaust port exhaust end. The exhaust port exhaust end is recessed from the suction port fluid entrance end and the two ports are located with respect to one another so that fluid flow from the exhaust port will be effectively drawn into the suction port.

Abstract: A detection/cleaning device for reticles employed in the production of electronic components, wherein the detection/cleaning device has a cleaning unit, in which a cleaning chamber is constructed. At least one gas feed for introducing a pressurized fluid cleaning medium opens into the cleaning chamber, and at least one suction means, by means of which the gas can be discharged from the cleaning chamber, leads from the cleaning chamber. The cleaning chamber has at least one first opening for introducing and removing a reticle. A detection unit for detecting contaminants on articles used in semiconductor production is provided. The detection unit has a detection means, into which a reticle can be introduced from one feed side of the detection unit. The first opening of the cleaning chamber and the feed side lie opposite each other. A feeding device is provided for exchanging a reticle between the cleaning unit and the detection unit.

Abstract: An air sweeping apparatus having a head assembly, a debris conveyer and a receptacle. The head assembly includes a front skirt which is selectively positionable away from a surface to be cleaned to enable debris of different densities and sizes to be collected. After the front skirting of the head assembly is moved past debris, the debris becomes entrained within a flow of air formed by a line of pressurized air as it traverses the surface and the interior surface of the main chamber of the head assembly. Preferably the air flow in the head assembly is skewed with respect to the direction of travel to urge the entrained debris towards an output end of the main chamber. When debris reaches the output end of the main chamber it is transported to a debris receptacle by a low pressure conduit which discharges entrained debris into a first hopper or bin.

Abstract: An improved vacuum cleaner wherein the hand tools have improved cleaning capacity by addition of air jets to the to the hand tools. The air jets dislodge debris and dust from inaccessible spaces to be scavenged by the vacuum stream. The jets are powered by an additional blower (23) housed in the vacuum cleaner body. The blower runs continuously and by drawing air through filter (19) boosts the vacuum power of the machine. A manual switch (5, 5a, 5b) on the vacuum cleaner body turns control plate and control vanes (24, 24a) directing air to the jets and controlling the volume of the air flow from zero to maximum. Air is pushed through tool hose body terminus (2), hose (37), tool hose tool end terminus (40), and tool (46). Vacuum stream is drawn back through channels (36).

Abstract: A method and apparatus for cleaning generally hard-to-reach or inaccessible areas uses a turbine blower attached to at least one duct for blowing debris located in the hard-to-reach or inaccessible area into an accessible area. The apparatus is most typically mounted on a street-cleaning machine that collects debris as the machine is driven over the debris. The duct can be directionally adjusted from a driver's position of the street-cleaning machine. Air flow volume per unit time can be adjusted from the driver's position. The debris is moved using the apparatus from the inaccessible or hard-to-reach area into an area that permits the street-cleaning machine to be driven over the debris to collect the debris.

Abstract: Please add the Abstract Of The Disclosure, as set forth on the separate accompanying sheet. That Abstract Of The Disclosure is essentially the same, in content, as the Abstract which is a part of the published PCT application WO 02/066212. No new matter is being added by the presentation of this Abstract Of The Disclosure.

Abstract: The [invention relates to a method and equipment for cleaning rolls of a paper machine or board machine. In the method, the ]surface of a web is monitored by a fault detection system (20), a machine condition monitoring system, a quality measurement system, a web moisture measurement and/or a web temperature measurement and the soiled part of the surface of the roll is detected and localized by means of a soiling monitoring apparatus (31, 35; 60). [Information on the detection and location of soiling is delivered from the soiling monitoring apparatus (31, 35; 60) to a]A control system (41) [of the cleaning device, which ]controls [the]a cleaning device (40) to remove the detected soiling. [The equipment for cleaning rolls comprises of a soiling monitoring apparatus (31, 35; 60), a cleaning device (40) and a control system (41) for controlling the cleaning device (40).

Abstract: The present invention provides a mobile filter cleaning system allowing movement to a site where dirty filters are located. The filter cleaning system includes a trailer or truck, an air compressor, an aftercooler, an air drier, a filter cleaning station, a compressed air tank, a dust collector, a fan and fan motor, and an airflow verification unit. Along a first fluid communication, compressed air is used to clean dirty filters in the cleaning station and filter cartridges in the dust collector. Along a second fluid communication dirt, liberated from the dirty filter is pulled from the cleaning station to the dust collector by a fan-induced draft. The compressor creates the first fluid communication and the fan creates a second fluid communication.

Abstract: A venturi tube attachment for dusting in extreme conditions. The inner panel is used with the forced air source for the triggering of aspiration through the venturi tube of airborne dust from the ingress opening, a vacuum hose in communication with the atmosphere and the ingress opening by narrow air gap to synergistically combine the features of a forced air component and a vacuum component. The forced air component acting as a trigger at the egress end of the venturi tube to start aspiration through the venturi tube at its ingress end which is in close proximity by narrow air gap to the vacuum hose intake. The aspiration of the venturi draws in airborne dust quickly and from a greater distance than the vacuum component acting alone. The forced air component can be used with the venturi tube alone to direct airborne dust to the floor, open window, or door.

Abstract: In a dust removal apparatus, a front air nozzle unit emits air jets onto a region of a workpiece surface near a rotary brush along a linear front end edge of a hood covering an upper half portion of the rotary brush. Rear air nozzle unit emits air jets onto another region of the workpiece surface near the rotary brush along a linear rear end edge of the hood.

Abstract: A method and system for in-situ cleaning of a reticle. Ionized gas is directed onto the reticle by a delivery device. The ionized gas neutralizes electro-static attraction between the reticle and particulate contaminants on the reticle and thereby dislodges them from the reticle. The ionized gas and particulate contaminants are then removed from the reticle by a vacuuming pump and transported from the system by a contaminant collector. As a result of the in-situ cleaning method and system, the overall risk of chip defects due to reticle particulate contaminants is reduced, and chip and wafer yield is improved.

Abstract: This invention relates to a steam/vacuum cleaning apparatus comprised of a head case assembly, an air/water separating device and at least one external connecting member; wherein the head case assembly includes a housing, an electrical steam generator and an electrical drafting fan assembly both contained in the housing. The fan assembly has a suction section and a discharge section. The air/water separating device is arranged upstream of the suction section of the fan assembly for inducing air flow and collecting condensed water.

Abstract: A vacuum cleaning and/or drying systems having heaters which provide drying air to aid in drying or combined cleaning and drying. The system is particularly adapted and beneficial for use on carpets, but can also be used to clean other surfaces such as smooth floors or upholstery. The heaters are on a portable cleaning unit used within the room being cleaned. A support unit is preferably provided outside the room or building to generate vacuum and remove moisture from the room. The support unit is typically mounted on a vehicle and can provide compressed air or other gases and cleaning fluids. Compressed air can be used to agitate and facilitate both cleaning and drying. Compressed air can also be used to apply one or more additives, such as deodorizers and fragrances. The portable unit can also be used for drying flooded carpets and the like.

Abstract: A web trim collection system having an air pressure system to move web trim. A divert bin operable in a first position to allow the web trim to be deposited in a collection bin. The divert bin is also operable in a second position to intercept the web trim, so as to allow the collection bin to be removed from the collection system while the collection system continues to collect trim.

Abstract: A mobile air cleaner for removing particulate materials from a chamber of a railcar or container is mounted on a motor truck operable to locate the air cleaner adjacent a railcar. The cleaner has an air hose connected to a motor driven fan for moving air through the hose and into the chamber of the railcar to move particulate material into a box located below the railcar. A lift device mounted on the truck has articulated booms and a work person carrier that can be located in the chamber of the railcar allowing the work person to move the hose adjacent the particulate material in the chamber and visually observe the cleaning operation.

Abstract: An air suction manifold device for removal of fibers/debris from the photoreceptor surface, which may otherwise attach to the development electrode wires causing a print defect(s). The device incorporating a secondary channel perpendicular to the main channel, formed by the manifold flange(s) proximity to the photoreceptor surface. The secondary channel supplying a specific volume of air at a specific mean velocity in a direction perpendicular to the flow direction of the main channel. The volume and velocity of secondary channel air being of such magnitude that it crosses the main channel gap and impinges on the photoreceptor surface, causing a zone of maximum shear stress prior to completely mixing with the main channel air. The maximum sheer stress zone resulting in improved fiber/debris removal performance from the photoreceptor surface.

Abstract: A gumming applicator (1) rotatable about a central axis (A) is cleaned by a device (4) comprising a nozzle (13) connected to a source (11) of pressurized fluid (50) and calibrated so as to deliver an atomized jet (14) which is directed at the gumming applicator (1) to the end of removing residues (60) of the gumming adhesive (2) from the applicator (1); the nozzle (13) is also capable of movement in a direction (D) parallel with the axis (A) of rotation of the applicator (1).

Abstract: A vacuum cleaner that generates an output air stream to agitate dirt and other debris on the surface being cleaned.

Abstract: A vehicle vacuum cleaning system for cleaning the interior of a vehicle having an access opening therein includes a movable bellows housing assembly having a movable bellows frame with a pair of spring biased pivotable sealing members attached thereto. An inlet box having a suction air inlet opening is attached to the bellow frame. Each of the sealing members has a first sealing flap for engaging an inside edge of the access opening on one side thereof and a second sealing flap for engaging a portion around an outer edge of the access opening adjacent the one side. A duct is connected to the air inlet opening and a motor driven fan is connected to the duct for drawing air from inside the vehicle through the access opening and suction air inlet whereby loose material from the vehicle is removed.

Abstract: A vacuum cleaning and/or drying systems having heaters which provide drying air to aid in drying or combined cleaning and drying. The system is particularly adapted and beneficial for use on carpets, hut can also be used to clean other surfaces such as smooth floors or upholstery. The heaters are on a portable cleaning unit used within the room being cleaned. A support unit is preferably provided outside the room or building to generate vacuum and remove moisture from the room. The support unit is typically mounted on a vehicle and can provide compressed air or other gases and cleaning fluids. Compressed air can be used to agitate and facilitate both cleaning and drying. Compressed air can also be used to apply one or more additives, such as deodorizers and fragrances. The portable unit can also be used for drying flooded carpets and the like.

Abstract: A vehicle vacuum cleaning system for cleaning the interior of a vehicle having an access opening therein includes a movable bellows housing assembly having a movable bellows frame. An inlet box having a suction air inlet opening is attached to the bellow frame and a pair of pivotable sealing members are attached to the sides of the bellows frame. Each of the sealing members has a first sealing flap for engaging an inside edge of the access opening on one side thereof and a second sealing flap for engaging a portion around an outer edge of the access opening adjacent the one side. Spring means are provided for biasing the sealing members into sealing engagement with the vehicle. A duct is connected to the air inlet opening and a motor driven fan is connected to the duct for drawing air from inside the vehicle through the access opening and suction air inlet whereby loose material from the vehicle is removed by the air and discharged into the duct for collection in a container.

Abstract: A nozzle applies fluid (e.g., heated gas) to a solder region of a circuit board component having a set of fluid-delivery edges and a set of fluid-escape edges. The nozzle includes a top member to connect with a fluid source, and a set of fluid-delivery side members coupled to the top member. Each fluid-delivery side member extends from the top member and around a respective fluid-delivery edge of the circuit board component when the circuit board component engages with the nozzle. Each fluid-delivery side member defines (i) at least a portion of a fluid-delivery channel that extends from a vicinity adjacent the top member toward the solder region of the circuit board component when the circuit board component engages with the nozzle, and (ii) a barrier that substantially prevents fluid from escaping from the solder region along the respective fluid-delivery edge for that fluid-delivery side member.

Abstract: A purge/vent system (10) for and method of purging/venting a brush arm bearing. The purge/vent system includes a driven mechanism (12) and a support member (14) having a first cavity (48) for containing the driven mechanism. A gas supply system (24) is in fluid communication with the first cavity proximate the upper end (18) of the driven mechanism, and an evacuation system (26) is in fluid communication with the first cavity proximate the lower end (20) of the driven mechanism. In operation, the gas supply system supplies a gas to the first chamber and the evacuation system draws the gas from the first chamber. As the evacuation system draws the gas from the first chamber, the gas is drawn across and/or through the driven mechanism to keep the driven mechanism dry and/or remove foreign material from the first chamber.

Abstract: An apparatus and method for cleaning objects having generally irregular, undulating surface features, such as reloadable photographic cameras, has a partial enclosure having opposing side walls, and a top wall joining the opposing side walls. A pair of air ionizing members are arranged on the interior of the opposing side walls and a source of a curtain-like stream of air is arranged in the top wall.

Abstract: The invention relates to a method and an apparatus for cleaning from the outer surface of an endless transport belt the ink, not ejected for printing purposes, of an inkjet printer, said method and apparatus serving for completely removing and collecting the ink adhering to the transport belt, while retaining a high transport belt speed. The method is characterized by the application of a converging compressed-air stream onto the outer surface of the ink-wetted transport belt by means of an air conduit, comprising a suction nozzle, of a pressure nozzle, and by extraction of the resulting ink-air mixture by means of the suction nozzle, the two steps being performed simultaneously.

Abstract: A vacuum cleaning and/or drying systems having heaters which provide drying air to aid in drying or combined cleaning and drying. The system is particularly adapted and beneficial for use on carpets, but can also be used to clean other surfaces such as smooth floors or upholstery. The heaters are on a portable cleaning unit used within the room being cleaned. A support unit is preferably provided outside the room or building to generate vacuum and remove moisture from the room. The support unit is typically mounted on a vehicle and can provide compressed air or other gases and cleaning fluids. Compressed lair can be used to agitate and facilitate both cleaning and drying. Compressed air can also be used to apply one or more additives, such as deodorizers and fragrances. The portable unit can also be used for drying flooded carpets and the like.

Abstract: The present invention provides a method and system for blowing dust and other foreign particles off semiconductor substrate surfaces. The system may blow ionized air, which neutralizes electrostatic charges on the substrate surface thereby facilitating the release of particles from the substrate and reducing the risk of damage to semiconductor substrates from electrostatic discharge. The system also provides a vacuum for capturing dust particles blown off the surface, thus preventing the particles from contaminating clean room environments and redepositing on the cleaned substrate or other substrates.