Vacuum Delaminating Means (e.g., Vacuum Chamber, Etc.) Patents (Class 156/758)
  • Patent number: 10155368
    Abstract: A method and an apparatus for manufacturing an object which involve a separation technique are provided. A first substrate provided with an object is attached to a second substrate and is then suction-fixed by using a suction chuck (also referred to as a suction stage or a vacuum chuck) including portions with different suction capabilities or by using its functional equivalent, and the second substrate is separated from the first substrate. Accordingly, the object is separated from the first substrate and transferred to the second substrate. An apparatus for achieving this is also provided. A substrate fixture surface of the suction chuck or its functional equivalent includes a plurality of portions provided with suction micro-holes and a portion provided with no holes. Owing to the plurality of portions provided with suction micro-holes, a plurality of objects can be transferred from the first substrate to the second substrate.
    Type: Grant
    Filed: May 6, 2014
    Date of Patent: December 18, 2018
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Yoshiharu Hirakata, Akihiro Chida, Kohei Yokoyama
  • Patent number: 9555979
    Abstract: A device for transferring electronic components from a first carrier to a second carrier. A first receiving portion positions the first carrier on a support, wherein the electronic components are provided on a side of the first carrier, which faces away from the support. A second receiving portion positions the second carrier. The first receiving portion and the second receiving portion are arranged with respect to each other in such a manner that a gap separates the first carrier from the second carrier. A cap and/or the second receiving portion move from a first position into a second position to make the gap smaller. At least one slide lifts the first carrier, which is applied against the support, away from the support, and to move an electronic component provided on the first carrier, in the direction of the second carrier.
    Type: Grant
    Filed: April 12, 2012
    Date of Patent: January 31, 2017
    Assignee: Muehlbauer GmbH & Co. KG
    Inventors: Thomas Courts, Sigmund Niklas, Gerhard Schiller, Markus Dogariu
  • Patent number: 9028649
    Abstract: Provided is a semiconductor die pick-up apparatus including a stage, a suction opening, a cover that opens and closes a suction opening, and projections and primary holes arranged at a circumferential edge of the suction opening and project from a contact surface. When picking up a semiconductor die, in a state in which at least a portion of a contour of the semiconductor die sticks out from the projections toward the outer circumference of the stage, a retaining sheet at the portion sticking out from the primary holes is suctioned, a tip end of the cover is caused to advance upward, the cover is caused to slide while pushing the retaining sheet and the semiconductor die upward to open the suction opening sequentially, the opened suction opening is caused to suction the retaining sheet sequentially to separate the retaining sheet from the semiconductor die.
    Type: Grant
    Filed: March 15, 2013
    Date of Patent: May 12, 2015
    Assignee: Shinkawa Ltd.
    Inventors: Motoki Nakazawa, Shinichi Sasaki, Akiko Fujii
  • Publication number: 20150122427
    Abstract: A flexible display panel peeling apparatus for peeling a flexible display panel attached to a top surface of a substrate includes a stage fixed to the substrate and a peeling plate comprising a bottom surface that is convex toward the flexible display panel and a plurality of adsorption units defined in the bottom surface to adsorb the flexible display panel to the bottom surface. Since the flexible display panel is successively peeled through the peeling plate, the flexible display panel may be peeled from the substrate without being damaged.
    Type: Application
    Filed: June 26, 2014
    Publication date: May 7, 2015
    Inventors: Hyunwoo KOO, Jusuck LEE, Taewoong KIM, Danbi CHOI, Sunho KIM, Kyungmin CHOI, Hayk KHACHATRYAN
  • Publication number: 20150114572
    Abstract: The embodiments described herein provide an apparatus and method for separating dies from adhesive tape. In general, these techniques use applied vacuum and one or more channels in an extractor base surface to progressively peel adhesive tape away from the die. When the adhesive tape has been peeled away from the entire die the die can be removed and packaged. Such a technique can reduce the strain the die and thus may reduce the probability of cracks occurring in the die, and is thus particularly applicable to removing adhesive tape from relatively thin dies.
    Type: Application
    Filed: October 28, 2013
    Publication date: April 30, 2015
    Applicant: Freescale Semiconductor, Inc.
    Inventors: Audel A. SANCHEZ, David F. ABDO, Michael L. ELEFF
  • Patent number: 9010398
    Abstract: A carrier substrate removing apparatus configured to separate a flexible substrate bonded to a carrier substrate includes a carrier substrate holding unit configured to hold the carrier substrate separated from the flexible substrate; an inclined separation unit configured, with the carrier substrate holding unit, to separate the flexible substrate from the carrier substrate and to transport the flexible substrate at an angle; and a transmittance measuring unit configured to measure a transmittance of the separated carrier substrate.
    Type: Grant
    Filed: March 5, 2013
    Date of Patent: April 21, 2015
    Assignee: Samsung Display Co., Ltd.
    Inventors: Jin-Keon Kweon, Kyung-Hoe Heo, Ki-Taek Kim
  • Patent number: 8997822
    Abstract: According to an embodiment of the present disclosure, a substrate inverting device for inverting front and rear surfaces of a substrate is provided. The substrate includes a first holding unit configured to hold one surface of the substrate and a second holding unit disposed to face the first holding unit and configured to hold one surface of the substrate. Further, the substrate includes a moving mechanism configured to relatively move at least one of the first holding unit and the second holding unit to approach each other and stay spaced apart from each other, and a transfer mechanism configured to hold the one surface of the substrate. In this case, a support of the substrate in the first holding unit, the second holding unit and the transfer mechanism is performed by a Bernoulli chuck.
    Type: Grant
    Filed: January 12, 2012
    Date of Patent: April 7, 2015
    Assignee: Tokyo Electron Limited
    Inventors: Yasuharu Iwashita, Osamu Hirakawa, Masaru Honda, Akira Fukutomi
  • Patent number: 8991464
    Abstract: A method of peeling an electronic component. The method includes a step of, when the electronic component is adhered onto a first main surface of a tape member, bringing a bellowphragm into contact with a second main surface, which is the other main surface of the tape member; and a step of, after the bellowphragm is brought into contact with the second main face, deforming the bellowphragm and the tape member by supplying a fluid to the bellowphragm to thereby peel the electronic component from the tape member.
    Type: Grant
    Filed: August 17, 2012
    Date of Patent: March 31, 2015
    Assignee: Fujitsu Semiconductor Limited
    Inventors: Yoshito Konno, Yutaka Yamada
  • Patent number: 8945344
    Abstract: Systems and methods of separating bonded wafers are disclosed. In one embodiment, a system for separating bonded wafers includes a support for the bonded wafers and means for applying a sheer force to the bonded wafers. The system also includes means for applying a vacuum to the bonded wafers.
    Type: Grant
    Filed: July 20, 2012
    Date of Patent: February 3, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Xin-Hua Huang, Ping-Yin Liu, Hung-Hua Lin, Yuan-Chih Hsieh, Lan-Lin Chao, Chia-Shiung Tsai
  • Patent number: 8932432
    Abstract: A substrate separating method includes: holding, in a predetermined position, a substrate sandwiched between a first holder and a second holder opposed to each other; and relatively moving the first holder and the second holder while the substrate is held in the predetermined position. In holding the substrate, the substrate may be held in the predetermined position by effecting a pressurizing force or a suction force onto the substrate. Also in holding the substrate, the substrate may be held in contact with one of the first holder and the second holder.
    Type: Grant
    Filed: August 24, 2012
    Date of Patent: January 13, 2015
    Assignee: Nikon Corporation
    Inventors: Keiichi Tanaka, Masahiro Yoshihashi
  • Publication number: 20140332150
    Abstract: A method and an apparatus for manufacturing an object which involve a separation technique are provided. A first substrate provided with an object is attached to a second substrate and is then suction-fixed by using a suction chuck (also referred to as a suction stage or a vacuum chuck) including portions with different suction capabilities or by using its functional equivalent, and the second substrate is separated from the first substrate. Accordingly, the object is separated from the first substrate and transferred to the second substrate. An apparatus for achieving this is also provided. A substrate fixture surface of the suction chuck or its functional equivalent includes a plurality of portions provided with suction micro-holes and a portion provided with no holes. Owing to the plurality of portions provided with suction micro-holes, a plurality of objects can be transferred from the first substrate to the second substrate.
    Type: Application
    Filed: May 6, 2014
    Publication date: November 13, 2014
    Applicant: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Yoshiharu Hirakata, Akihiro Chida, Kohei Yokoyama
  • Patent number: 8864938
    Abstract: The invention relates generally to a vacuum peeling apparatus and a vacuum peeling method. The vacuum peeling apparatus may include a chamber, a sealing maintain frame disposed inside the chamber, a first air tube disposed along a bottom end of the sealing maintain frame and configured to be expandable, a peeling prevention panel configured so as to be inserted into a center of the sealing maintain frame, and a second air tube disposed along an end of the peeling prevention panel.
    Type: Grant
    Filed: May 10, 2012
    Date of Patent: October 21, 2014
    Assignee: Samsung Display Co., Ltd.
    Inventor: Dong-Sul Kim
  • Patent number: 8858859
    Abstract: Disclosed are an apparatus and method for fabricating a flat panel display device to realize easy separation of a substrate from an imprinting mold. The apparatus includes an imprinting mold connected to a substrate to form a thin film pattern on the substrate, a first adsorption pad to vacuum-adsorb the center of the imprinting mold, a second adsorption pad to vacuum-adsorb the periphery of the imprinting mold, and a connector connected to vacuum pins to vertically move in different regions of the first and second adsorption pads.
    Type: Grant
    Filed: April 15, 2011
    Date of Patent: October 14, 2014
    Assignee: LG Display Co., Ltd.
    Inventors: Tae-Joon Song, Dhang Kwon, Hang-Sup Cho, Seong-Pil Cho, Ho Su Kim, Doo-Hee Jang
  • Publication number: 20140290864
    Abstract: A delamination apparatus includes a stage mounted with a lower supporting member, an acceptor substrate positioned on the lower supporting member, and a donor film laminated along with the lower supporting member via the acceptor substrate interposed therebetween according to the edge of the acceptor substrate, a gripper positioned at an end side of the stage to grip the end of the donor film and moving in a direction away from the acceptor substrate, and a peeling roll positioned on the donor film, including a supporting region supporting a portion of the donor film positioned between the acceptor substrate and the gripper, and including a peeling roll main body rotating itself in a direction of the gripper and a blind selectively covering the supporting region.
    Type: Application
    Filed: March 25, 2014
    Publication date: October 2, 2014
    Inventor: Kyung-Hyun Ahn
  • Publication number: 20140283999
    Abstract: A film releasing device includes at least one transport member configured to transport a stack of a substrate and a film and to discharge the stack, a negative-pressure-generating unit provided on a discharge side of the transport member and configured to attract the film with a negative pressure generated on a surface of the film, and a communicating portion communicating with atmosphere and provided in a region of the film that is on a side facing the substrate, the region overlapping a part of a negative-pressure-generated area of the film. The film is released from the substrate in such a manner as to be guided in a direction that is different from a direction of discharge while the film is attracted to the negative-pressure-generating unit.
    Type: Application
    Filed: August 22, 2013
    Publication date: September 25, 2014
    Applicant: FUJI XEROX CO., LTD.
    Inventor: Toshimasa SAKAE
  • Publication number: 20140262053
    Abstract: Disclosed are systems, devices and methodologies for debonding wafers from carrier plates. In certain wafer processing operations, it is desirable to temporarily mount a wafer on a carrier plate for support and ease of handling. Such a mounting can be achieved by bonding the wafer and the carrier plate with an adhesive. Once such operations are completed, the wafer needs to be debonded from the carrier plate. Such a debonding process can be achieved by applying a suction force to the wafer-carrier plate assembly. Various debonding systems, devices and methodologies, and related features, are disclosed.
    Type: Application
    Filed: May 27, 2014
    Publication date: September 18, 2014
    Applicant: Skyworks Solutions, Inc.
    Inventors: Steve Canale, David J. Zapp, Daniel Eduardo Sanchez, Hung V. Phan, Hyong Yong Lee
  • Patent number: 8833422
    Abstract: A semiconductor production apparatus includes a supporting substrate having an upper surface to which a semiconductor substrate is bonded and a lower surface to which a back side grinding (BSG) tape is bonded, a stage having an upper surface on which a peeling tape is positioned such that an adhesive surface of the peeling tape is oriented upwards, and a handler which transfers the supporting substrate to the stage in a state such that the BSG tape bonded to the lower surface of the supporting substrate is oriented downwards toward the stage and positioned onto the peeling tape. A peeling unit draws the peeling tape to peel the BSG tape from the lower surface of the supporting substrate.
    Type: Grant
    Filed: February 28, 2013
    Date of Patent: September 16, 2014
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Daisuke Yamashita
  • Patent number: 8828186
    Abstract: A method of peeling an electronic component. The method includes a step of, when the electronic component is adhered onto a first main surface of a tape member, bringing a bellowphragm into contact with a second main surface, which is the other main surface of the tape member; and a step of, after the bellowphragm is brought into contact with the second main face, deforming the bellowphragm and the tape member by supplying a fluid to the bellowphragm to thereby peel the electronic component from the tape member.
    Type: Grant
    Filed: March 25, 2009
    Date of Patent: September 9, 2014
    Assignee: Fujitsu Semiconductor Limited
    Inventors: Yoshito Konno, Yutaka Yamada
  • Publication number: 20140238617
    Abstract: A system includes a first drive unit used for driving at least one of a release device, a gripper device, and a second drive unit used for driving a support device. The release device is a vacuum device. The vacuum device is coupled to a vacuum source and applies a suction force against an edge portion of one layer among a first layer disposed on a second layer. Another layer among the first layer and the second layer is held by a support surface of the support device. The vacuum device and/or the support device are movable upwards and downwards for peeling the edge portion of the one layer from the other layer. The gripper device holds the peeled edge portion of the one layer and the support device or the gripper device is movable along at least one axis for removing the one layer from the other layer.
    Type: Application
    Filed: February 28, 2013
    Publication date: August 28, 2014
    Applicant: GENERAL ELECTRIC COMPANY
    Inventors: Sultan Shair, Martin Petersen
  • Patent number: 8800631
    Abstract: Provided is a laminated body comprising a substrate to be ground and a support, where the substrate is ground to a very small thickness and can then be separated from the support without damaging the substrate. One embodiment of the present invention is a laminated body comprising a substrate to be ground, a joining layer in contact with the substrate to be ground, a photothermal conversion layer comprising a light absorbing agent and a heat decomposable resin, and a light transmitting support. After grinding the substrate surface which is opposite that in contact with the joining layer, the laminated body is irradiated through the light transmitting layer and the photothermal conversion layer decomposes to separate the substrate and the light transmitting support.
    Type: Grant
    Filed: August 19, 2011
    Date of Patent: August 12, 2014
    Assignee: 3M Innovative Properties Company
    Inventors: Kazuki Noda, Masaru Iwasawa
  • Patent number: 8758552
    Abstract: Disclosed are systems, devices and methodologies for debonding wafers from carrier plates. In certain wafer processing operations, it is desirable to temporarily mount a wafer on a carrier plate for support and ease of handling. Such a mounting can be achieved by bonding the wafer and the carrier plate with an adhesive. Once such operations are completed, the wafer needs to be debonded from the carrier plate. Such a debonding process can be achieved by applying a suction force to the wafer-carrier plate assembly. Various debonding systems, devices and methodologies, and related features, are disclosed.
    Type: Grant
    Filed: October 5, 2010
    Date of Patent: June 24, 2014
    Assignee: Skyworks Solutions, Inc.
    Inventors: Steve Canale, David J. Zapp, Daniel E. Sanchez, Hung V. Phan, Hyong Y. Lee
  • Patent number: 8715457
    Abstract: The detachment and removal of a semiconductor chip from a foil occurs in accordance with the invention in three phases. In the first phase there is a partial detachment of the semiconductor chip from the foil with mechanical means, but without the participation of a chip gripper. In the second phase the semiconductor chip is further detached from the foil, with the semiconductor chip being held by the chip gripper. In the third phase the chip gripper is lifted and moved away.
    Type: Grant
    Filed: November 3, 2009
    Date of Patent: May 6, 2014
    Assignee: Esec AG
    Inventor: Stefan Behler
  • Patent number: 8701734
    Abstract: A separating apparatus according to the present invention includes a clamp for gripping an outer peripheral end of a supporting plate. The clamp grips the outer peripheral end of the supporting plate and separates the supporting plate from a wafer by gripping the supporting plate. This makes it possible to separate a supporting plate from a wafer without breaking the wafer. With this, a supporting plate can be separated from a wafer to which the supporting plate has been attached, without breaking the wafer.
    Type: Grant
    Filed: May 22, 2009
    Date of Patent: April 22, 2014
    Assignee: Tokyo Ohka Kogyo Co., Ltd
    Inventor: Akihiko Nakamura
  • Patent number: 8679289
    Abstract: A first holding table suction-holds an annular projection of a wafer remaining on a rear face thereof for surrounding a back grinding region. A second holding table having an outer peripheral wall adjacent to an inner wall of the annular projection is inserted into a flat portion inside the annular projection for joining a separating adhesive tape to a protective tape on a surface of the wafer while a flat plane of the flat portion is suction-held. Thereafter, the adhesive tape is separated. Accordingly, the adhesive tape is separated from the surface of the wafer together with the protective tape.
    Type: Grant
    Filed: October 17, 2011
    Date of Patent: March 25, 2014
    Assignee: Nitto Denko Corporation
    Inventors: Chouhei Okuno, Masayuki Yamamoto
  • Publication number: 20140060748
    Abstract: A film peeling apparatus includes a peeling pin that push-lifts a first end portion of a cut portion of a film toward a second end portion of the cut portion, a peeling roller that push-lifts the second end portion of the cut portion toward the first end portion of the cut portion by closely contacting the second end portion of the cut portion and rotating, and an absorbing unit that absorbs and removes the cut portion of the film push-lifted by the peeling pin and peeling roller.
    Type: Application
    Filed: February 6, 2013
    Publication date: March 6, 2014
    Inventors: Il-Young JEONG, Gyoo-Wan HAN, Jeong-Hun WOO
  • Publication number: 20140060751
    Abstract: A die bonding apparatus includes a work supply/transfer portion for transferring a substrate; a bonding portion for conducting bonding of a die on the substrate; a wafer supply portion for supplying a wafer having the die thereon; and a controller portion for controlling equipment, wherein the wafer supply portion has a push-up unit for pushing up a dicing tape from a lower part, for separating the die from the dicing tape, and the push-up unit has a suction opening portion, which is configured to suck the dicing tape with vacuum, a push-up portion, which is made of an elastic body, sealing a fluid or a power therein, and is configured to push up the dicing tape, a cylinder, which is configured to apply pressure to the push-up portion, and an air supply means for supplying an air for changing the pressure within the cylinder through control of the controller portion.
    Type: Application
    Filed: February 28, 2013
    Publication date: March 6, 2014
    Applicant: HITACHI HIGH-TECH INSTRUMENTS CO., LTD.
    Inventors: Keita YAMAMOTO, Naoki OKAMOTO
  • Publication number: 20140020818
    Abstract: Systems and methods of separating bonded wafers are disclosed. In one embodiment, a system for separating bonded wafers includes a support for the bonded wafers and means for applying a sheer force to the bonded wafers. The system also includes means for applying a vacuum to the bonded wafers.
    Type: Application
    Filed: July 20, 2012
    Publication date: January 23, 2014
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Xin-Hua Huang, Ping-Yin Liu, Hung-Hua Lin, Yuan-Chih Hsieh, Lan-Lin Chao, Chia-Shiung Tsai
  • Publication number: 20130299098
    Abstract: In a chip pick-up process after dicing in an assembly process during manufacture of a semiconductor integrated circuit device it is an important subject to diminish a pick-up defect caused by the reduction in thickness of each chip which is proceeding in quick tempo. Particularly, bending of the chip peripheral portion caused by a peeling operation is very likely to induce cracking and chipping of the chip. In the present invention, to solve these problems, in case of peeling a chip from a dicing tape (adhesive tape) or the like while vacuum-chucking the chip by a chucking collet, the flow rate of a vacuum chucking system in the chucking collet is monitored to check a bent state of the chip before complete separation of the first chip from the adhesive tape.
    Type: Application
    Filed: July 14, 2013
    Publication date: November 14, 2013
    Inventors: Hiroshi MAKI, Tsuyoshi YOKOMORI, Tatsuyuki OKUBO
  • Patent number: 8561664
    Abstract: An object of the present invention is to provide a pickup device that can securely peel a die or to provide a reliable die bonder or a pickup method using the pickup device. To achieve the object, the present invention is provided with a characteristic that when a die to be peeled out of plural dies (semiconductor chips) applied to a dicing film is thrust up and is peeled from the dicing film, the dicing film in a predetermined part in a circumference of the die is thrust up and a peeling starting point is formed, the dicing film in a part except the predetermined part is thrust up, and the die is peeled from the dicing film.
    Type: Grant
    Filed: September 13, 2010
    Date of Patent: October 22, 2013
    Assignee: Hitachi High-Tech Instruments Co., Ltd.
    Inventors: Hiroshi Maki, Naoki Okamoto
  • Patent number: 8551291
    Abstract: A debonder apparatus for debonding a temporary bonded wafer pair. The clam shell reactor includes first and second isolated chambers. An upper chuck is contained within the first chamber and has a lower surface protruding into the second chamber. A lower chuck is contained within the second chamber and has an upper surface oriented parallel and opposite to the lower surface of the upper chuck. The debonder includes means for holding an unbounded surface of the first wafer onto the lower surface of the upper chuck. The first chamber pressurizing means applies pressure onto an upper surface of the upper chuck and thereby causes the lower surface of the upper chuck and the attached wafer pair to bow downward. The debonder apparatus also includes means for initiating a separation front at a point of the bonding interface of the temporary bonded wafer pair.
    Type: Grant
    Filed: April 14, 2011
    Date of Patent: October 8, 2013
    Assignee: Suss Microtec Lithography, GmbH
    Inventor: Gregory George
  • Patent number: 8499813
    Abstract: A system is disclosed for ejecting a semiconductor die from a tape to which the die is affixed during the wafer dicing process. In embodiments, the system includes an ejector tool including a support table, ejector pins and a pick-up arm. The support table is connected to a vacuum source for creating a negative pressure at an interface between the tape and support table. The support table further includes an aperture with one or more chamfered sidewalls. The vacuum source is connected to the aperture so that, upon placement of the tape on the support table with a die centered over the aperture, the vacuum source pulls a portion of the tape around the edges of the semiconductor die away from the die and into the space created by the chamfered edges.
    Type: Grant
    Filed: February 16, 2012
    Date of Patent: August 6, 2013
    Assignee: SanDisk Technologies Inc.
    Inventors: Jack Chang Chien, King Hoo Ong, Weili Wang, Li Wang, XingZhi Liang, Shicai Ma
  • Publication number: 20130186574
    Abstract: The fiber batt reclaiming method and apparatus separates the fiber batt portion of surplus or defective fiberglass insulation from the paper backing material attached to the fiber batt. As the insulation is fed to a perforated roller, a vacuum means draws the backing material to the roller so that the backing material adheres to the roller. As the roller rotates the fiber batt portion of the insulation is separated from the backing material by a separation tool. In accordance with various embodiments of the apparatus, the separation tool may be an elongated knife, a pressurized air bar, a circular saw bar, or an elongated wire brush.
    Type: Application
    Filed: January 25, 2012
    Publication date: July 25, 2013
    Inventors: Kevin D. Baker, Sidney E. Hughs
  • Patent number: 8470129
    Abstract: The present invention provides a method and machine for separating a liquid crystal panel and a liner pad. The method includes (1) providing a separation machine and a combination of the liquid crystal panel and liner pad to be separated, the separation machine including a separation device that includes a suction device, air blasting devices and shaking devices; (2) the suction device moving toward the combination; (3) a central suction nozzle first engaging and sucking a liner pad of the combination and later the first suction nozzles engaging the sucking the liner pad of the combination; (4) the shaking devices being operated to subject the combination to vibration and the air blasting devices being operated to eject air streams to side edges of the combination; and (5) the combination, after being subjected to vibration and air streams, being separated so as to realize separation of the liquid crystal panel and liner pad.
    Type: Grant
    Filed: May 8, 2012
    Date of Patent: June 25, 2013
    Assignee: Shenzhen China Star Optoelectronics Technology Co., Ltd.
    Inventor: Xingang Wang
  • Patent number: 8470130
    Abstract: A die detachment apparatus for partially delaminating a die from an adhesive tape on which it is mounted comprises a cover having a support surface that is operative to support the adhesive tape, the support surface including a set of cover holes. A movable pin chuck is positioned below the support surface and includes a set of pin holes that are arranged coaxially with the cover holes. The movable pin chuck is configured for detachably inserting a set of pins in a first desired configuration on some of the pin holes, and the pins are also operable to be relocated on the pin chuck to form another desired configuration. The pins are operative to protrude from the cover by passing through the cover holes to contact and lift the die.
    Type: Grant
    Filed: October 14, 2010
    Date of Patent: June 25, 2013
    Assignee: ASM Assembly Automation Ltd
    Inventors: Chi Ming Chong, Jin Hui Meng, Man Wai Chan, Yuk Cheung Au
  • Patent number: 8470131
    Abstract: Apparatus and a method for operating the apparatus to remove at least one chip-type semiconductor component from an adhesive film. The method comprises: arranging a lifting device with respect to the film, wherein a contact region of the lifting device bears against a second main surface of the film, opposite a chip-type semiconductor component that is arranged on a first main surface and is to be lifted off. Then, applying either a constant vacuum to a plurality of suction cutouts of the lifting device, by means of an assigned vacuum regulating device, or applying different values of the vacuum for different suction cutouts or groups of suction cutouts. Next, partially deforming the film in the contact region by using lifting means arranged in assigned cutouts of the lifting device to lift the film. Finally, using a removal device to remove the at least one semiconductor component from the film.
    Type: Grant
    Filed: February 17, 2012
    Date of Patent: June 25, 2013
    Assignee: Semikron Elektronik GmbH & Co., KG
    Inventor: Armin Studt
  • Patent number: 8464773
    Abstract: An apparatus and method is provided for removing a selected portion of tape material from backing paper. One embodiment of an apparatus may include a supply reel, at least one cutting member, at least one bending member, and first and second vacuum rollers. The apparatus may further include pinch rollers, scraping members, and scrap bins. The apparatus may allow for the removal of scrap tape material from the backing paper.
    Type: Grant
    Filed: July 22, 2011
    Date of Patent: June 18, 2013
    Assignee: The Boeing Company
    Inventor: Thomas J. Hagman
  • Publication number: 20130133838
    Abstract: The invention relates generally to a vacuum peeling apparatus and a vacuum peeling method. The vacuum peeling apparatus may include a chamber, a sealing maintain frame disposed inside the chamber, a first air tube disposed along a bottom end of the sealing maintain frame and configured to be expandable, a peeling prevention panel configured so as to be inserted into a center of the sealing maintain frame, and a second air tube disposed along an end of the peeling prevention panel.
    Type: Application
    Filed: May 10, 2012
    Publication date: May 30, 2013
    Applicant: Samsung Mobile Display Co., Ltd.
    Inventor: Dong-Sul KIM
  • Publication number: 20130126100
    Abstract: A sheet peeling device includes: a feeder that feeds a material sheet and a peeling unit that peels the adhesive sheet from the peeling sheet. The peeling unit includes: a peeling member having a bending edge for folding back the peeling sheet; and a following unit that forms an anti-bending area with irregularities at least on the adhesive sheet in the feeding direction. The peeling member includes a guide surface continuous to the bending edge and guides the material sheet; and a first irregularity formed on the guide surface in the feeding direction and is open on the bending edge. The following unit includes a guide member interposing the material sheet with the peeling member and having a second irregularity to fit to the first irregularity. The second irregularity includes a convex portion that extends to the bending edge in the feeding direction corresponding to the first irregularity.
    Type: Application
    Filed: June 30, 2011
    Publication date: May 23, 2013
    Applicant: LINTEC CORPORATION
    Inventor: Toshihiro Fujita
  • Patent number: 8443863
    Abstract: Methods and apparatus provide for imparting a controlled supply of gas to at least one Bernoulli chuck to provide a balanced draw and repellant gas flow to a material sheet; and at least one of: elevating a temperature of the supply of gas to the at least one Bernoulli chuck such that the gas flow to the material sheet is provided at the elevated temperature providing a stream of gas to an insulator substrate to promote separation of an exfoliation layer from a donor semiconductor wafer, and providing a stream of gas to a junction of the insulator substrate and any support structure to promote separation of the insulator substrate and the supporting structure.
    Type: Grant
    Filed: October 23, 2008
    Date of Patent: May 21, 2013
    Assignee: Corning Incorporated
    Inventors: Michael Yoshiya Nishimoto, William Edward Lock
  • Patent number: 8443864
    Abstract: Device and method for stripping a wafer from a carrier that is connected to the wafer by an interconnect layer. The device includes a receiving means for accommodating the carrier-wafer combination consisting of the carrier and the wafer, a connection release means for breaking the connection provided by the interconnect layer between the carrier and the wafer, and stripping means for stripping the wafer from the carrier, or for stripping the carrier from the wafer. The connection release means operates in a temperature range from 0° to 350° C., especially from 10° to 200° C., preferably from 20° to 80° C., and more preferably at ambient temperature. The method includes the steps of accommodating the carrier-wafer combination on a receiving means, breaking the connection provided by the interconnect layer by a connection release means, and stripping the wafer from the carrier, or stripping the carrier from the wafer by stripping means.
    Type: Grant
    Filed: March 16, 2010
    Date of Patent: May 21, 2013
    Assignee: EV Group GmbH
    Inventor: Erich Thallner
  • Patent number: 8408271
    Abstract: A system, apparatus, and method for removing pressure adhesive indicia, such as labels or stamps, from their backing and affixing the same to a target substrate is provided. The automated process affixes stamps, for example, to the target substrate with both speed and precision of placement. Desired stamps can be selectively removed from a backing, for example, can be placed on variable locations upon the target substrate, and can be affixed in the desired orientation with precise spacing between stamps. The precision of affixation afforded by this system is commensurate with philatelic standards and is suitable for all pressure adhesive indicia where rapid and precise placement is desired for aesthetic or other reasons.
    Type: Grant
    Filed: February 2, 2007
    Date of Patent: April 2, 2013
    Assignee: The United States Postal Service
    Inventors: Khalid X. Hussain, David C. Faulkner
  • Publication number: 20130048222
    Abstract: A substrate separating method includes: holding, in a predetermined position, a substrate sandwiched between a first holder and a second holder opposed to each other; and relatively moving the first holder and the second holder while the substrate is held in the predetermined position. In holding the substrate, the substrate may be held in the predetermined position by effecting a pressurizing force or a suction force onto the substrate. Also in holding the substrate, the substrate may be held in contact with one of the first holder and the second holder.
    Type: Application
    Filed: August 24, 2012
    Publication date: February 28, 2013
    Inventors: Keiichi TANAKA, Masahiro YOSHIHASHI
  • Patent number: 8366873
    Abstract: A debonder apparatus includes a chuck assembly, a flex plate assembly, a contact roller and a resistance roller. The chuck assembly includes a chuck and a first wafer holder holding a first wafer of a bonded wafer pair in contact with the chuck. The flex plate assembly includes a flex plate and a second wafer holder holding a second wafer of the bonded wafer pair in contact with the flex plate. The flex plate is placed above the chuck. The contact roller is arranged adjacent to a first edge of the chuck and pushes and lifts up a first edge of the flex plate, while the resistance roller traverses horizontally over the flex plate and applies a downward force upon the flex plate and thereby the bonded wafer pair delaminates along a release layer and the first and second wafers are separated from each other.
    Type: Grant
    Filed: April 12, 2011
    Date of Patent: February 5, 2013
    Assignee: SUSS MICROTEC LITHOGRAPHY, GmbH
    Inventor: Gregory George
  • Patent number: 8349129
    Abstract: The present invention provides a debonding apparatus, a system comprising such apparatus, and methods for using such apparatus or system for the removal of flexible substrates (14) post-processing without damage to fabricated devices.
    Type: Grant
    Filed: March 25, 2009
    Date of Patent: January 8, 2013
    Assignee: Arizona Board of Regents, a body corporate of the State of Arizona acting for and on behalf of Arizona State University
    Inventors: Robert Blanchard, R. Steve Rednour, Douglas Loy
  • Patent number: 8343300
    Abstract: An improved apparatus for debonding temporary bonded wafers includes a debonder, a cleaning module and a taping module. A vacuum chuck is used in the debonder for holding the debonded thinned wafer and remains with the thinned debonded wafer during the follow up processes steps of cleaning and mounting onto a dicing tape. In one embodiment the debonded thinned wafer remains onto the vacuum chuck and is moved with the vacuum chuck into the cleaning module and then the taping module. In another embodiment the debonded thinned wafer remains onto the vacuum chuck and first the cleaning module moves over the thinned wafer to clean the wafer and then the taping module moves over the thinned wafer to mount a dicing tape onto the wafer.
    Type: Grant
    Filed: December 22, 2010
    Date of Patent: January 1, 2013
    Assignee: Suss Microtec Lithography, GmbH
    Inventor: James Hermanowski
  • Publication number: 20120312482
    Abstract: A method of peeling an electronic component. The method includes a step of, when the electronic component is adhered onto a first main surface of a tape member, bringing a bellowphragm into contact with a second main surface, which is the other main surface of the tape member; and a step of, after the bellowphragm is brought into contact with the second main face, deforming the bellowphragm and the tape member by supplying a fluid to the bellowphragm to thereby peel the electronic component from the tape member.
    Type: Application
    Filed: August 17, 2012
    Publication date: December 13, 2012
    Applicant: FUJITSU SEMICONDUCTOR LIMITED
    Inventors: Yoshito KONNO, Yutaka YAMADA
  • Patent number: 8297331
    Abstract: A separating apparatus includes a sucking plate for sticking to a support plate by suction. The sucking plate has sucking holes for expelling gas from a space between the sucking plate and the support plate. Each of the sucking holes has a diameter of not less than 0.3 mm and not more than an outer diameter of the support plate. This makes it possible to separate a supporting plate from a wafer without breaking the wafer.
    Type: Grant
    Filed: June 26, 2009
    Date of Patent: October 30, 2012
    Assignee: Tokyo Ohka Kogyo Co., Ltd.
    Inventors: Yoshihiro Inao, Akihiko Nakamura, Yasumasa Iwata
  • Patent number: 8267143
    Abstract: An apparatus for debonding two temporary bonded wafers includes a chuck assembly, a flex plate assembly and a contact roller. The chuck assembly includes a chuck and a first wafer holder to hold wafers in contact with the top surface of the chuck. The flex plate assembly includes a flex plate and a second wafer holder configured to hold wafers in contact with a first surface of the flex plate. The flex plate comprises a first edge arranged adjacent to a first edge of the chuck and connected to a hinge. The flex plate is configured to swing around the hinge and to be placed above the top surface of the chuck. The contact roller is arranged adjacent to a second edge of the chuck, which is diametrically opposite to its first edge. A debond drive motor moves the contact roller vertical to the plane of the chuck top surface.
    Type: Grant
    Filed: April 15, 2010
    Date of Patent: September 18, 2012
    Assignee: Suss Microtec Lithography, GmbH
    Inventors: Gregory George, Hale Johnson, Patrick Gorun, James Hermanowski, Matthew Stiles
  • Publication number: 20120227909
    Abstract: The present invention provides a removal roller (12) for detaching a film (2) from a disc-shaped workpiece (3), in particular from a mould wafer (3), comprising a film handling portion (13) for non-positively taking up or for expelling a portion (14) of the film (2). The present invention also provides a device (1) for detaching a film (2) from a disc-shaped workpiece (3), in particular from a mould wafer (3), comprising: a mounting means (4) for non-positively mounting the disc-shaped workpiece (3); a removal roller (12) of this type; a displacement means (17) for moving the removal roller (12) horizontally and/or vertically to a surface (10) of the mounting means (4); and a rotation means (24) for rotating the removal roller (12) about a centre axis (25) of the removal roller (12). Furthermore, the present invention also provides a method for detaching a film (2) from a disc-shaped workpiece (3), in particular from a mould wafer (3), by means of a device (1) of this type.
    Type: Application
    Filed: September 14, 2010
    Publication date: September 13, 2012
    Applicant: ERS electronic GmbH
    Inventor: Rüdiger Schindler
  • Patent number: 8261804
    Abstract: An IC layers separator includes a bed; two sets of two opposite seats secured onto the bed; two guide bars each interconnecting the two opposite seats of either set; a carrier assembly secured onto the bed and including a lower vacuum device and an upper vacuum device including a ramp at one end; an IC layer assembly including an upper layer and a lower layer; and a blade assembly moveably mounted on the guide bars and including a pressing roller pressing the IC layer assembly on the ramp, a spring biased blade for separating the upper layer from the lower layer, and two opposite rolls for conveying the separated upper layer and the lower layer.
    Type: Grant
    Filed: October 28, 2011
    Date of Patent: September 11, 2012
    Assignee: Meicer Semiconductor Inc.
    Inventor: Sheng Chang Huang