Abstract: Systems and methods for conducting designated reactions utilizing a base instrument and a removable cartridge. The removable cartridge includes a fluidic network that receives and fluidically directs a biological sample to conduct the designated reactions. The removable cartridge also includes a flow-control valve that is operably coupled to the fluidic network and is movable relative to the fluidic network to control flow of the biological sample therethrough. The removable cartridge is configured to separably engage a base instrument. The base instrument includes a valve actuator that engages the flow-control valve of the removable cartridge. A detection assembly held by at least one of the removable cartridge or the base instrument may be used to detect the designated reactions.

Abstract: In order to provide a component manufacturing apparatus and a component manufacturing method that can normally chuck and fix a component holding film to a chuck table in a heated state, the present component manufacturing apparatus 1 includes a chucking and fixing means 20 that chucks and fixes a component holding film to a heated chucking surface 21a, and a preventing means 30 that prevents heat convection, occurring on the chucking surface 21a, from contacting the film. The present component manufacturing method includes a setting step of chucking and fixing the film to the heated chucking surface 21a, and the setting step includes a preventing step of preventing heat convection, occurring on the chucking surface 21a, from contacting the film.

Abstract: A temperature control system and method for devices under test and an image sensor-testing apparatus having the system are provided. The temperature control method for devices under test mainly comprises the steps of regulating the temperatures of a plurality of devices under test (DUTs) to a specific temperature in a temperature control zone; transferring the plurality of devices under test to a test plate and placing them into a plurality of test slots respectively; and measuring the temperatures of the device under test by the temperature-sensing elements in the test slots, wherein when at least one temperature-sensing element of the temperature-sensing elements detects that the device under test in the test slot corresponding to said at least one temperature-sensing element fails to meet the specific temperature, a temperature control element corresponding to the test slot regulates the temperature of the device under test.

Abstract: A heat exchanger apparatus has a heating stage with a product side and a hot water side and a cooling stage with a product side and a coolant side, and also regeneration stages with treated and un-treated product sides. There are valves including a cooling stage outlet valve, and pressure sensors, and pumps for pumping process liquid through the product sides. A PLC controller is programmed to operate the pumps with outlet valves closed to pressurize the product sides of the stages at a pressure dynamically maintained by control of the pumps in response to sensed pressure. The valves are controlled to firstly vent the heating and cooling sides of the heating and cooling stages with the product sides pressurized, and then in a second phase to vent the downstream (treated) product sides of regeneration stages. Also, an in-line holding time test is performed by monitoring time for step rises in temperature to reach a temperature sensor and the outlet end of a holding tube.

Abstract: A processing apparatus includes a processing unit, a control unit, and a temperature detecting unit. The processing unit includes a cutting blade and a spindle assembly, the spindle assembly including a spindle having the cutting blade mounted on a distal end of the spindle and a spindle housing through which the spindle is inserted. A cooling fluid passage is formed in the spindle housing, the cooling fluid passage cooling the spindle assembly, and having one end connected to a cooling fluid supply source and having another end communicating with a cooling fluid outlet of the spindle housing. The temperature detecting unit detects the temperature of the spindle housing. The control unit determines whether a state of cooling of the spindle assembly is normal or abnormal on the basis of the temperature detected by the temperature detecting unit.

Abstract: A system for controlling a temperature a within an interior volume of a cargo trailer adapted to transport perishable goods is described herein. The system includes a fluid distribution assembly and a monitoring system. The fluid distribution assembly is configured to selectively channel a flow of cryogenic cooling fluid into the cargo trailer interior volume to facilitate adjusting a temperature within the interior volume. The monitoring system includes at least one sensor for sensing an environmental parameter of the cargo trailer, and a controller coupled to the sensor and to the fluid distribution assembly. The controller is configured to receive a monitoring signal indicative of the sensed environmental parameter, determine an environmental condition of the cargo trailer as a function of the environmental parameter, and provide a notification signal if the determined environmental condition is different than a predefined environmental condition.

Abstract: Provided is a machine tool (1) which is capable of measuring machining accuracy of a workpiece (W) with high accuracy and enables the time required from machining to measurement of machining accuracy to be greatly reduced. The machine tool (1) machining a workpiece (W) while moving a tool and the workpiece (W) relative to each other includes a cover (2) separating from outside a machining area for machining the workpiece (W) therein, and temperature adjusting means (30) used in machining of the workpiece (W) to adjust an ambient temperature of the machining area.

Abstract: A temperature display and/or control system is disclosed for a cooing apparatus, such as a grill, comprising a plurality of individual zones to provide individual zone temperatures. Each zone of the grill is associated with a temperature sensor, such as a thermocouple, and a visual indicator to indicate the zone temperature, such as control knob bearing a multi-color LED. A controller obtains a signal from the temperature sensor indicating a raw temperature and converts the raw temperature to an actual zone temperature based on a temperature profile selected for the zone. The temperature profile is configurable for each zone based on a configuration of the zone in order to maintain an accurate temperature conversion despite alterations to an environment.

Abstract: A reinforcing clinical wrap is provided with integral thermal management. The clinical wrap includes a fluid circuit for a heat transfer medium to circulate between a fluid inlet and a fluid outlet. A shape conforming medium is disposed within a portion of the clinical wrap providing selective reinforcement support of the portion of the clinical wrap to conform to a surface of a patient. Non-limiting examples of the shape conforming medium may include a magnetorheological elastomer, a magnetorheological elastomer, a magnetorheological foam, a UV curable resin, and a phase change material.

Abstract: A freezer cabinet (10) for storing frozen confectionery products, the freezer cabinet comprising: a chamber having an opening substantially sealed by an upper surface panel (18, 20); and a further panel (22, 24) inside the chamber being spaced away from the upper surface panel and substantially parallel to the upper surface panel in at least one direction and creating a quiescent region between the upper surface panel and further panel wherein the quiescent region is in gaseous communication with the air in the chamber. The upper surface panel comprises at least one slideably openable section (18, 20); the further panel comprises at least one slideably openable section (22, 24); and the chamber comprises a side wall (12, 14) and a coolant evaporator (40) mounted in and/or on the side wall. The height distance (H) between the further panel, measured from the lowest face of the further panel facing the chamber, and the highest part of the evaporator is at least 5 mm.

Abstract: A semiconductor processing system may include a substrate pedestal. The system may also include at least one fluid channel having a delivery portion configured to deliver a temperature controlled fluid to the substrate pedestal, and having a return portion configured to return the temperature controlled fluid from the substrate pedestal. The system may also include a heater coupled with the delivery portion of the at least one fluid channel. The system may also include a temperature measurement device coupled with the return portion of the at least one fluid channel, and the temperature measurement device may be communicatively coupled with the heater.

Abstract: Sensor stations and related systems and methods to monitor and measure properties of food products in food processing structures such as cure rooms, smokehouses, ovens, and related structures. The sensor stations allow real-time, local collection of product properties and their surrounding environmental conditions in order to improve efficiency, reduce product waste and guesswork, and to provide data-based analysis for decision making. Sensor stations can be mounted to food supports and can be in electronic communication with each other and with intermediate nodes that provide a connection to other external computing devices that provide analysis and alerts to users and technicians. Various non-destructive modeling systems for determining water activity and pH of changing products are also provided.

Abstract: A magnetic resonance imaging apparatus according to an embodiment is a magnetic resonance imaging apparatus including a gradient coil unit configured to generate a gradient magnetic field in an imaging space in which a subject is placed. The gradient coil unit includes a cooling layer configured to cool the gradient coil. The cooling layer includes a first cooling pipe configured to cool the gradient coil entirely and a second cooling pipe configured to locally cool the gradient coil.

Abstract: A refrigerating appliance includes a refrigerant line having a compressor and a condenser. A thermal exchange media is delivered from the condenser and through the refrigerant line to at least a freezer evaporator of a plurality of evaporators, wherein the thermal exchange media leaving the freezer evaporator defines spent media that is returned to the compressor. A multi-directional outlet valve selectively delivers the thermal exchange media to the freezer evaporator, wherein the multi-directional outlet valve also selectively delivers the thermal exchange media to at least one secondary evaporator of the plurality of evaporators to define a partially-spent media that is delivered to the freezer evaporator.

Abstract: A reaction container control system including a reaction container, a sealing lid, a temperature control block, and a heater. The reaction container includes a lower side wall section, an upper side wall section, and an aperture. The sealing lid seals the reaction container by fitting to the aperture of the reaction container. When the sealing lid is fitted to the aperture, light based on an optical state within the reaction container is receivable by a measuring device via the sealing lid. The temperature control block contacts or extends adjacent the lower side wall section, and includes a temperature source operable to increase or decrease a temperature inside the reaction container. The heater contacts or extends adjacent the upper side wall section, and includes a heat source operable to heat the reaction container to prevent condensation on the sealing lid fitted to the aperture.

Abstract: A method of performing a lithographic exposure of a substrate, the substrate being held on a substrate table, the substrate table comprising a cooling system operative to cool the substrate table, the method comprising performing an alignment measurement of the substrate, applying heat to the substrate table to reduce cooling of the substrate table provided by the cooling system, the heat being applied between a time at which the alignment measurement is performed and a time at which the lithographic exposure is performed and performing the lithographic exposure of the substrate.

Abstract: A numerical-control machine tool is provided and includes a load-bearing beam which extends horizontally, has two axial ends resting in sliding manner on two lateral shoulders that rise from a basement and extend horizontally side by side so as to define a longitudinal corridor orthogonal to the longitudinal axis of the beam; a spindle-holding carriage which is movable on the load-bearing beam parallel to the longitudinal axis of the beam; a spindle-holding shaft which is fixed to the spindle-holding carriage in a vertical position, and is movable on the spindle-holding carriage parallel to its longitudinal axis; a front wall and a rear wall that close the two ends of the longitudinal corridor; an upper cover which closes the longitudinal corridor at the top; and an ambient conditioning unit which is adapted to bring and maintain the temperature of the air present inside the machining chamber around a given target value.

Abstract: The invention relates to an automatic response/light measurement device and a method therefor, and the purpose is to effectively and quickly perform an optical measurement relating to a reaction with high reliability without increasing a device size. The device is configured to have: a container group in which a plurality of reaction containers are arranged; a measurement mount provided with a plurality of coupling ends that are joinable with apertures of the reaction containers, and have light guide portions that optically connect with the interior of the joined reaction containers; a mount transfer mechanism; a measuring device having a measuring end having at least one light guide portion that is optically connectable to the light guide portions of the coupling ends, that is able to receive light based on an optical state within the reaction containers; an on-mount measuring end transfer mechanism; and a measurement control portion.

Abstract: A constant temperature water supply system that adjusts water from a water supply source to a constant temperature by a constant temperature water supply apparatus and supplies the water to a processing apparatus. The constant temperature water supply apparatus is provided with water temperature adjusting units that adjust processing water and cooling water to predetermined temperatures and temperature adjustment control units that reset predetermined temperatures of the water temperature adjusting units. The processing apparatus is provided with water temperature detectors that detect the water temperatures of the processing water and the cooling water and water temperature managing units that each calculate the temperature difference between the water temperature detected by the water temperature detector and a desired temperature set in advance.

Abstract: Provided is a machine tool with a machine rack constructed of structural parts and components mounted thereon, the components including functional components. The functional components generate heat during the operation of the machine tool which is input into the structural parts and/or the components by heat transport. The machine tool may also include a flow channel system disposed on the structural parts and/or the components of the machine tool in which a tempering medium is circulated such that the heat generated by the functional components is distributed in the machine rack and/or the components as a result of the passage of the tempering medium.

Abstract: Disclosed herein is a cyclonic system for performing subtractive machining in microgravity systems. The cyclonic system comprises: an enclosure, a blower, and a debris collection module to collect the debris from the milling machine. The enclosure includes a top plate, a base plate, and a tapered side wall joining the top plate to the base plate. The enclosure defines a chamber to house a milling machine having a cutter tool. The blower generates an airstream that induces a cyclonic airflow to achieve cyclonic separation of debris within the enclosure. In operation, the cyclonic airflow urges the debris from the milling machine toward the base plate and into the milling machine.

Abstract: A heat exchange system 62 includes heat exchangers 69a and 69b that heat or cool a fluid passing therethrough; a fluid supply unit 81 that supplies the heating target fluid or the cooling target fluid into lower portions thereof; and a fluid discharge unit 82 that discharges the heated fluid or the cooled fluid from upper portions thereof. The fluid supply unit includes inlet lines 85 and 86 through which the fluid is introduced; a first manifold 87 located above the upper end portion of the heat exchangers and connected with the inlet lines; a gas exhaust line 88 that is connected to the first manifold and exhausts a gas mixed in the fluid; a supply line 89 that supplies the fluid from the first manifold. While passing through the heat exchangers from the lower portions toward the upper portions thereof, the fluid is heated or cooled.

Abstract: A system for controlling a temperature a within an interior volume of a cargo trailer adapted to transport perishable goods is described herein. The system includes a fluid distribution assembly and a monitoring system operatively coupled to the fluid distribution assembly for selectively channeling a flow of cryogenic cooling fluid into the cargo trailer interior volume to facilitate adjusting a temperature within the interior volume. The monitoring system includes at least one sensor for sensing an environmental parameter of the cargo trailer, and a controller coupled to the sensor and to the fluid distribution assembly. The controller is configured to receive a monitoring signal indicative of the sensed environmental parameter, determine an environmental condition of the cargo trailer as a function of the environmental parameter, and provide a notification signal if the determined environmental condition is different than a predefined environmental condition.

Abstract: Analysis instruments and sensors, particularly micro-electro mechanical sensor (MEMS) devices, for molecular analysis of chemicals and other materials, including, for example, polymers, drugs, nanomaterials, biological samples including proteins, and environmental samples including water suspected of contamination, and the like in vapor, liquid, and/or solid form.

Abstract: An image forming apparatus including a hinge assembly to mutually hinge-connect a main body and a cover unit of the image forming apparatus and the hinge assembly is provided. The image forming apparatus includes a main body, a cover unit configured to be disposed on an upper side of the main body to press a manuscript, and at least one hinge assembly configured to connect the cover unit to the main body, wherein the hinge assembly includes a first body detachably mounted on the main body, a second body of which a part is fastened to the cover unit and another part is hinge-connected with the first body, a pressing unit accommodated in the first body to press the second body upward, and a pressing force adjuster configured to adjust a hinge force between the first body and the second body.

Abstract: Disclosed are methods and a system for manufacturing a lead or lead alloy plate lattice for a lead-acid battery, comprising continuous extrusion of a melt of lead or lead alloy under temperatures lower by 10-100° C. than the melting point of lead, or the lead alloy, the extrudate being subsequently subjected to a flattening process under a temperature lower by more than at least 230° C. than the melting point of lead or the lead alloy, with a total draft rate less than 10%, and thereafter the extrudate may be processed so as to manufacture a plate lattice.

Abstract: A temperature control pin, and the device and the method for supporting a substrate in the ultraviolet (UV) solidifying alignment process are disclosed. The temperature control pins includes a supporting pin for supporting a substrate, a heater being arranged within the supporting pin and is close to a top of the supporting pin, and a cooling system. The heater is controlled by the temperature control system to heat up the supporting pin. The cooling system is controlled by the temperature control system to cool down the supporting pin, and cooperatively operates with the heater to dynamically adjust the temperature of the supporting pins. When being heated, the temperature of the temperature control pins is adjusted by the temperature control system, and the substrate is heated uniformly such that the “Pin Mura” phenomenon is reduced or decreased.

Abstract: An apparatus controls a temperature of a device by circulating a fluid through a heat sink in thermal contact with the device. The apparatus includes an adjustable cold input, which inputs a cold portion of the fluid having a first temperature, and an adjustable hot input, which inputs a hot portion of the fluid having a second temperature higher than the first temperature. The apparatus further includes a chamber, connected to the cold input and hot input, in which the cold and hot portions of the fluid mix in a combined fluid portion that impinges on the heat sink. The combined fluid portion has a combined temperature that directly affects a temperature of the heat sink. The cold input and hot input are adjusted to dynamically control the combined temperature, enabling the heat sink temperature to compensate for changes in the device temperature, substantially maintaining a set point temperature of the device.

Abstract: The invention relates to a system for regulating temperature of an electronic component, the system comprising: a local heater for heating the electronic component; a heat pipe for cooling the electronic component; and a heat sink for dissipating heat from the heat pipe; wherein the electronic component is adhered to an end of the heat pipe, and the heat sink is adhered to another end of the heat pipe. The invention also relates to a method for regulating temperature of an electronic component by the system.

Abstract: A climate management system for a power supply system including a plurality of cabinets is disclosed. The climate management system comprises a plurality of climate control units connected and in communication with each other, wherein each climate control unit is disposed in a corresponding cabinet to monitor, manage and control the corresponding cabinet, wherein one of the climate control units is defined as a master climate control unit and the other of the climate control units are defined as slave climate control units; and a control system unit connected and in communication with the master climate control unit. The master climate control unit is configured to collect, process and integrate the information transmitted from the slave climate control units and report the collected, processed and integrated information to the control system unit.

Abstract: Disclosed is a temperature conditioning system including several thermal transfer blocks, where each is associated with one of several components requiring thermal management. Each of the components is associated with a different time dependent thermal management profile. A fluid path, with a heat transfer fluid, connects one or more transports to the thermal transfer blocks. For each thermal transfer block, at least one thermo-responsive valve is located downstream from the thermal transfer block. The thermo-responsive valve is passive in that it does not require energy other than thermal energy to move from a starting position to an ending position and the thermo-responsive valve is free of any exterior control lines. A method of temperature conditioning components is also disclosed including circulating a heat transfer fluid and optimizing the flow rate of the heat transfer fluid in response to differential changes in temperature of the heat transfer fluid by actuating one or more thermo-responsive valves.

Abstract: A temperature controlling apparatus that controls the temperature of a temperature-controlling object is disclosed. The temperature controlling apparatus includes an atmospheric coolant circulating line that circulates a coolant through a cooling path arranged at the temperature-controlling object; a heat transfer plate heater that heats the temperature-controlling object; and a coolant discharge part that discharges the coolant remaining in the cooling path when the circulation of the coolant is stopped. When the temperature of the temperature-controlling object is to be controlled to change from a low temperature to a high temperature, the circulation of the coolant is stopped and the coolant discharge part discharges the coolant remaining in the cooling path.

Abstract: A temperature control system for a machine tool capable of quickly responding to an ambient temperature change. A mechanical section of the machine tool is surrounded by a machine cover. Gas of which temperature is controlled by a temperature controller is discharged from bearing portions of gas bearings in the mechanical section to a region surrounded by the machine cover through a pipe and a gas bearing channel. A branch pipe is provided for directly introducing a part of gas discharged from the temperature controller to a temperature sensor inside the machine cover. The temperature sensor measures the temperature of gas mixture obtained by mixing the gas introduced directly from the pipe with air inside the machine cover in a predetermined ratio. The result of measurement by the temperature sensor is fed back to the temperature controller to control the temperature of the gas supplied to the gas bearings.

Abstract: A fluid heating system configured to regulate a temperature of a fluid within a fluid receptacle having a fluid reservoir includes a processing unit, at least one fluid temperature sensor in electrical communication with the processing unit, and a heating element in electrical communication with the processing unit. The at least one fluid temperature sensor is configured to detect a temperature of one or both of the fluid receptacle and/or fluid retained within the fluid receptacle. The processing unit selectively activates and deactivates the heating element to regulate the temperature of the fluid within the fluid receptacle.

Abstract: A period required for a time-consuming cross-contamination test is cut down or omitted, and a burden imposed on the customer by the costs of samples, reagents, etc. used in the test are reduced. A data failure caused by cross-contamination can be efficiently prevented. A maintenance service office establishes a connection via a communication line between a computer installed in the maintenance service office for maintenance of automatic analyzers and a customer's automatic analyzer or a personal computer placed in a customer's facility. The maintenance service office receives information regarding cross-contamination from reagent manufacturers and other customers (such as clinical examination rooms or centers) and validates it. The validated information is transmitted from the maintenance service office to the customer's automatic analyzer or personal computer via the communication line.

Abstract: A method of cooling a plurality of devices operated in parallel and heated by relatively long duration pulses using a single coolant flow channel to the devices in series that transports the heat from the several devices in a contiguous series of heat pulses to the heat exchanger.

Abstract: A continuous flow pasteurization apparatus for a liquid product includes a pasteurization area divided into plural pasteurization zones, each with a connection for heating and/or cooling the product, so that if production stops, it is possible to hold the temperature below the pasteurizing temperature. Upon restarting, the product is reheated to a temperature close to the pasteurizing temperature. The apparatus provides for the control and monitoring of pasteurization units (PU's).

Abstract: The invention relates to an apparatus and methods for preventing condensation on the interior surfaces of sample tubes which are being exposed to temperature cycles, such as during a PCR amplification reaction. In particular, the invention relates to apparatus comprising a sample block comprising a plurality of sample wells for receiving sample tubes and heating elements disposed in the sample wells for heating at least a portion of the sides of sample tubes (e.g., at least the portion which forms the head space after a tube is filled with a PCR reaction mixture). In a preferred aspect, the sample block is part of a thermocycling device for performing PCR and the side-wall heater is used to enhance uniformity and speed of amplification reactions. For example, by decreasing or eliminating condensation, signal strength jumps in a real-time PCR assay can be minimized as can reaction non-homogeneity.

Abstract: A temperature control system for a semiconductor processing facility includes a common cooling unit for controlling the temperature of a cooling fluid and multiple remote temperature control modules that separately control temperatures of multiple process components. The temperature control modules are near process components and include a circulation loop for cooling fluid from the common cooling unit and a circulation loop for a heat transfer fluid received from a component. A heat exchanger within the temperature control module allows heat transfer between heat transfer fluid and cooling fluid, thereby cooling the component. A heat source may also be within the temperature control module to heat the heat transfer fluid and the component. The cooling unit may be a refrigeration unit that provides compressed refrigerant to the temperature control modules which may include an upstream thermal expansion valve and a downstream refrigerant flow control valve that form an evaporation chamber.

Abstract: The sample temperature regulator is provided with a heating block (3) having a sample container holder (6) and a temperature-controllable heater (7) and with a cooling block (4) having a cooling mechanism (11). These two blocks are combined with each other through a connecting plate (15) made of a material having a thermal conductivity lower than those of these blocks. This constitution can reduce heat transfer between the heating block and the cooling block and allows them to have wide temperature regulating ranges, as well as increased heating capacity and cooling capacity, respectively. Further, this constitution makes the structure of the temperature regulator simple and compact, so that the regulator has increased durability and can be offered at a low price.

Abstract: A temperature control system having a re-circulation loop that uses valves to selectively circulate a temperature control fluid through a cooling system, through a heating system, or through a through passage so as to controlling the temperature of the temperature control fluid, which, in turn, controls the temperature of a target. A temperature sensor monitors the target's temperature. A controller controls valve operation in response to the temperature measured by the temperature sensor to obtain a predetermined target temperature. Beneficially, the controller controls the target's temperature according to a predetermined temperature profile. Continuous etching along a predetermined temperature profile is possible.

Abstract: A combined refrigerator-oven (20) includes an enclosed chamber (28) having a top wall (22), a bottom wall (24), and vertical side walls (26). The refrigerator-oven (20) further includes a heating unit (50) and a refrigeration unit (70). A controller (118) is in communication with the heating unit (50) and the refrigeration unit (70). When a cooling mode is selected, the controller (118) activates the refrigeration unit (70) to deliver cool air (62) into the enclosed chamber (28). When a heating mode is selected, the controller (118) activates the heating unit (50) to produce heat (66) in the enclosed chamber (28).

Abstract: A cooling system is configured to supply individually metered amounts of cooling fluid to heat generating components, e.g., processors, micro-controllers, high speed video cards, disk drives, semi-conductor devices, and the like, of an electronic system. The cooling system includes at least one variable speed fan, e.g., blower, configured to supply fluid through a centralized plenum and thereafter through a plurality of nozzles to the components of the electronic system. Each of the nozzles contains a valve to control the amount of fluid flow through the each of the nozzles. A controller is provided to control the operation of the variable speed fan and the operation of each of the valves is also controlled by a controller.

Abstract: A mold temperature control unit with which piping connection for supply and drain of cooling water in unit setup can be extremely simply made. In a mold temperature control unit 1 which unit body 2 comprises a plurality of cooling water systems performing supply and drain of cooling water to/from a plurality of elements to be cooled in a mold, a single cooling water supply port 11 and a single cooling water drain port 12 for said plurality of cooling water systems are disposed on the outer panel of the unit body 2.

Abstract: A temperature control system for multiple process components in a semiconductor processing facility includes a common cooling unit for controlling the temperature of a cooling fluid and multiple remote temperature control modules in fluid communications with the common cooling unit that separately control the temperature of the multiple process components. The remote temperature control modules are located near the process components and each remote temperature control module includes a circulation loop for the cooling fluid from the common cooling unit and a circulation loop for a heat transfer fluid that received from a process component. A heat exchanger within the remote temperature control module allows heat transfer between the heat transfer fluid and the cooling fluid, thereby cooling the process component. A heat source may also be included within the remote temperature control module to provide heat to the heat transfer fluid and to the process component.

Abstract: A heating unit having a heat pipe structure includes a heater and a cooling pipe disposed in an inner space of a holding table. The holding table and the cooling pipe are thermally insulated by a heat-insulating member, so that it is possible to prevent direct heat transfer from the cooling pipe to the holding table. Therefore, it is possible to rapidly perform a cooling processing while keeping the evenness of the temperature distribution of the mounting face and the temperature distribution of the substrate mounted on the mounting face, and consequently to appropriately keep the evenness of the film thickness and the line width of a wiring layer formed on the substrate upon heat processing.

Abstract: A brine supply unit for supplying brine to at least one load after controlling the brine so as to meet a target temperature of the load comprises: a heat exchanger disposed at a brine-cooling channel, through which the brine returned from the load flows, for cooling the brine with water for industrial use; a heater disposed at a brine-heating channel formed in parallel with the brine-cooling channel, through which the brine flows, for heating the brine; a mixing section disposed at a connecting portion between the brine-cooling channel and the brine-heating channel, for mixing the cooled brine and the heated brine; and a tank disposed between the mixing section and the load, which has a capacity of about 10 liters or more and is constructed so that the brine can pass therethrough slowly to relieve a sudden temperature change of the brine.

Abstract: The sample temperature regulator is provided with a heating block (3) having a sample container holder (6) and a temperature-controllable heater (7) and with a cooling block (4) having a cooling mechanism (11). These two blocks are combined with each other through a connecting plate (15) made of a material having a thermal conductivity lower than those of these blocks. This constitution can reduce heat transfer between the heating block and the cooling block and allows them to have wide temperature regulating ranges, as well as increased heating capacity and cooling capacity, respectively. Further, this constitution makes the structure of the temperature regulator simple and compact, so that the regulator has increased durability and can be offered at a low price.

Abstract: A system and method for reducing temperature variation among components in a multi-component system. In this respect, component temperatures are controlled to remain relatively constant (approximately within 5° C.) with respect to other components, while allowing for multiple fluctuating heat loads between components. A refrigeration system possessing a variable capacity (speed) compressor and a thermostatic expansion valve is utilized to control the flow of refrigerant through the refrigeration system. The temperatures of the components are reduced by metering the mass flow rate of the refrigerant cooling the components to compensate for the heat load applied to the refrigeration system. The temperature variation among the components is reduced by supplemental heaters independently providing heat to each respective component.

Abstract: A cooling device for cooling an object to be processed to a target temperature comprises a plurality of contact members mounted on a placing table, for supporting the object such that the object opposes a top surface of the placing table with an interval, temperature sensors for outputting temperature information of the object supported by the contact members, a first cooling unit for cooling the placing table to a temperature lower than the target temperature to cool the object, a second cooling unit for heating the object cooled by the first cooling unit to a temperature almost equal to the target temperature, and a contrast circuit for performing a switching operation between cooling by the first cooling unit and heating by the second cooling unit on the basis of the temperature information from the temperature sensors.