Diverse Rolling Patents (Class 172/151)
  • Patent number: 11812682
    Abstract: An agricultural implement system having: a row unit coupled to a tool bar of an agricultural implement; an opener system coupled to a chassis of the row unit and configured to engage soil to form a trench; a downforce system configured to apply a downforce to the row unit to adjust a contact force between the row unit and the soil; a soil condition sensor configured to detect a condition of the soil and/or an operational sensor configured to detect operation of the agricultural implement system; a closing system, configured to close the trench created by the opener system; and a controller coupled to the soil condition sensor and/or the operational sensor, wherein the controller is configured to control the downforce system and the closing system in response to feedback from the soil condition sensor and/or the operational sensor.
    Type: Grant
    Filed: October 26, 2020
    Date of Patent: November 14, 2023
    Assignee: Precision Planting LLC
    Inventors: Michael Strnad, Jeremy Hodel, Dale Koch, Todd Swanson, Dillon Sloneker
  • Patent number: 11785876
    Abstract: An agricultural implement system having: a row unit coupled to a tool bar of an agricultural implement; an opener system coupled to the row unit and configured to engage soil to form a trench; a soil condition sensor; a closing system, configured to close the trench created by the opener system, the closing system comprises: a first disk configured to engage the soil and close the trench; a second disk configured to engage the soil and close the trench; and a controller configured to couple to the soil condition sensor and control a position or orientation of the first disk or the second disk in response to feedback from the soil condition sensor.
    Type: Grant
    Filed: October 26, 2020
    Date of Patent: October 17, 2023
    Assignee: Precision Planting LLC
    Inventors: Michael Strnad, Jeremy Hodel, Dale Koch, Todd Swanson, Dillon Sloneker
  • Publication number: 20150107862
    Abstract: Agricultural planter row units feature soil finishing assemblies for closing a seed groove after seed is placed in the soil. An adjustable furrow closing assembly enhances upper seed groove coverage and closure with soil resulting in sustained relative humidity levels and optimum seed-to-soil contact for faster seed germination. The furrow closing assembly includes a closing wheel assembly having at least one closing wheel and a press wheel assembly having a press wheel following behind the closing wheels. The closing wheels and press wheel are attached to the planter row unit in a manner allowing the press wheel to move vertically relative to the closing wheels. Adjustable down-force systems are provided to vary the down force applied to the closing wheels and the press wheel to maintain optimum soil contact in irregular terrain and in varying soil densities and conditions to provide optimum soil coverage and compaction of the seed bed.
    Type: Application
    Filed: January 6, 2015
    Publication date: April 23, 2015
    Inventor: Brian Freed
  • Patent number: 8813662
    Abstract: An illustrative embodiment of a vertical floating row cleaner may include a mounting bracket configured to engage a row unit frame, which mounting bracket may have a receiver engaged therewith. An extension member may have first and second ends, with one end configured as an adjustor interface and the opposite end configured to pivotally engage at least one row cleaner wheel. An adjustor may engage the extension member at the adjustor interface such that the adjustor prevents the extension member from moving with respect to the receiver past a certain point in at least one direction.
    Type: Grant
    Filed: April 22, 2013
    Date of Patent: August 26, 2014
    Inventor: Howard D. Martin
  • Publication number: 20140216771
    Abstract: An agricultural row unit assembly includes an attachment frame configured for attachment to a tow bar that is movable in a direction of travel. A proximal end of a swing-arm is coupled to the attachment frame, and an opener disk is mounted to and offset from a distal end of the swing-arm for forming a furrow. The opener disk is configured to rotate about a first axis relative to the direction of travel. A deflecting disk is mounted to the distal end for deflecting debris from entering the furrow, and is mounted between the distal end of the swing-arm and the opener disk. The deflecting disk is configured to rotate about a second axis, which is different than the first axis, relative to the direction of travel. A closing wheel is coupled to the attachment frame for closing the furrow.
    Type: Application
    Filed: October 22, 2013
    Publication date: August 7, 2014
    Applicant: Dawn Equipment Company
    Inventor: Joseph D. Bassett
  • Patent number: 8627898
    Abstract: A tillage system has a first set of deep tilling tines and a second set of shallow tilling coulter tines present in a number more than twice that of the deep tilling tines. The deep tilling tines till the field to a depth of about 5 to 12 inches at row planting locations, loosening the soil for easy plant growth. This deep grooving action builds mounds of soil at both sides of the deep groove which are cleared by a second set of shallow tilling curved coulter tines followed by a third set of plurality of rows of shallow tilling toothed coulters that till the space between grooves to a depth of about 1 to 4 inches, providing a water reservoir space and clearing plant debris. A last row of shallow tilling ruffled coulters are provided to mix and incorporate into soil plant debris and plant stocks, anchoring tilled soil.
    Type: Grant
    Filed: February 8, 2010
    Date of Patent: January 14, 2014
    Inventor: John D. Nance
  • Patent number: 8534373
    Abstract: A mount for carrying a plurality of field-conditioning implements selected from trash whipping implements, rolling baskets and coulters for connection to a planter or other multi-row implement is disclosed. A height and force adjustable mounting system is also disclosed that enables the force of such an implement on the soil to be modulated as desired.
    Type: Grant
    Filed: August 27, 2012
    Date of Patent: September 17, 2013
    Assignee: L & B Manufacturing, Inc.
    Inventors: Loyd C. Van Buskirk, Brian R. Meldahl, Dylan C. Van Buskirk
  • Patent number: 8528656
    Abstract: The combination of a rolling basket tillage implement and a seed distribution implement is disclosed. A height-adjustable mounting system for a rolling basket soil tillage implement is also disclosed for use with a planter that enables such an implement to be raised above the soil as needed to avoid wet conditions.
    Type: Grant
    Filed: June 13, 2011
    Date of Patent: September 10, 2013
    Assignee: L & B Manufacturing, Inc.
    Inventors: Loyd C. Van Buskirk, Brian R. Meldahl
  • Publication number: 20130206431
    Abstract: Agricultural planter row units feature soil finishing assemblies for closing a seed groove after seed is placed in the soil. An adjustable furrow closing assembly enhances upper seed groove coverage and closure with soil resulting in sustained relative humidity levels and optimum seed-to-soil contact for faster seed germination. The furrow closing assembly includes a closing wheel assembly having at least one closing wheel and a press wheel assembly having a press wheel following behind the closing wheels. The closing wheels and press wheel are attached to the planter row unit in a manner allowing the press wheel to move vertically relative to the closing wheels. Adjustable down-force systems are provided to vary the down force applied to the closing wheels and the press wheel to maintain optimum soil contact in irregular terrain and in varying soil densities and conditions to provide optimum soil coverage and compaction of the seed bed.
    Type: Application
    Filed: February 14, 2013
    Publication date: August 15, 2013
    Inventor: Brian Freed
  • Patent number: 8430179
    Abstract: The combination of a rolling basket tillage implement and a seed distribution implement is disclosed. A height-adjustable mounting system for a rolling basket soil tillage implement is also disclosed for use with a planter that enables such an implement to be raised above the soil as needed to avoid wet conditions.
    Type: Grant
    Filed: April 30, 2010
    Date of Patent: April 30, 2013
    Assignee: L & B Manufacturing, Inc.
    Inventors: Loyd C. Van Buskirk, Brian R. Meldahl
  • Patent number: 8006775
    Abstract: A strip tillage implement includes a plurality of forward disk gang members for sizing plant residue. An upright tool support bracket extends rearwardly from the rear frame member and defines a downwardly opening accommodation space at a top portion of the bracket for a closing disk assembly rockshaft or support. The bracket includes a lower end supporting a parallel linkage that carries a clearing tool assembly in a generally constant horizontal attitude as the linkage pivots with movement of the clearing disks over obstacles. A tool support arm is pivotally connected to the bracket adjacent the parallel linkage and below the rear frame member. A closing disk arm supported from the rockshaft can be rotated to adjust down pressure or to lift the closing disk is completely out of ground contact. Closing disk spacing and disk angle are adjustable to provide the desired berm shape.
    Type: Grant
    Filed: April 18, 2008
    Date of Patent: August 30, 2011
    Assignee: Deere & Company
    Inventors: David L. Steinlage, Jarrod Ray Ruckle
  • Publication number: 20100294182
    Abstract: In an embodiment, an agricultural implement includes a frame configured to couple to a tool bar, a parallel linkage coupled to the frame and a ground engaging tool extending from a shank, where the shank is coupled to the parallel linkage. The agricultural implement also includes a packer wheel configured to control a depth of a valley opened in a soil region by the ground engaging tool and is configured to pack the soil region as the implement is towed through a field and a soil shaping assembly disposed between the ground engaging tool and the packer wheel, wherein the soil shaping assembly is configured to close the valley prior to packing by the packer wheel.
    Type: Application
    Filed: May 21, 2009
    Publication date: November 25, 2010
    Applicant: CNH Canada, Ltd.
    Inventor: Jim Henry
  • Patent number: 7806197
    Abstract: A strip tillage implement includes a single, center-mounted arm located directly above the row area of a strip-till berm. Basket halves are rotatably connected to opposite sides of the arm in cantilever fashion to eliminate outer support arms. Residue flow encounters rolling baskets rather than fixed arms so that catching, flipping and twisting of residue is minimized and plugging in high residue conditions is reduced. A single, center-mounted bearing and simplified basket halves reduce the cost and complexity of the implement.
    Type: Grant
    Filed: September 12, 2007
    Date of Patent: October 5, 2010
    Assignee: Deere & Company
    Inventors: David L. Steinlage, Vernon Eugene Friedley
  • Patent number: 6712155
    Abstract: Carriage (10) attachable to a prime mover (41) for travel over turf or grass wherein the carriage (10) has idler rollers (12, 13 and 14) and a ground aeration mechanism in the form of a support axle (15) having a plurality of slicer blades (16) attached thereto. There is also provided a housing (11) having a hollow interior (33) which houses rollers (12, 13 and 14) and ground aeration mechanism (15 and 16). In use, when carriage (10) travels over turf or grass, both rollers (12, 13 and 14) and the ground aeration mechanism (15 and 16) operate simultaneously to not only roll the grass but also slice it for the purpose of facilitating moisture penetration.
    Type: Grant
    Filed: November 30, 2001
    Date of Patent: March 30, 2004
    Assignee: Forestfield Pty. Ltd.
    Inventor: Raymond Jeffrey Dufty
  • Patent number: 6612378
    Abstract: A one-pass field tillage implement and method which maintains a uniform soil density throughout the crop root zone for greater root development, improved plant health and greater yields by eliminating tillage of the soil at seed planting depths. The implement includes a wheeled frame operably supporting at least three longitudinally spaced tillage tool assemblies which first chops crop surface residue, then aggressively lifts and redistributes the chopped surface crop residue and breaks up the soil surface crust, and then levels the soil so that the soil surface is substantially smooth and ready for planting, all in a single-pass without tilling the soil at seed planting depths.
    Type: Grant
    Filed: August 22, 2001
    Date of Patent: September 2, 2003
    Inventor: Gregg A. Sauder
  • Publication number: 20030037935
    Abstract: A one-pass field tillage implement and method which maintains a uniform soil density throughout the crop root zone for greater root development, improved plant health and greater yields by eliminating tillage of the soil at seed planting depths. The implement includes a wheeled frame operably supporting at least three longitudinally spaced tillage tool assemblies which first chops crop surface residue, then aggressively lifts and redistributes the chopped surface crop residue and breaks up the soil surface crust, and then levels the soil so that the soil surface is substantially smooth and ready for planting, all in a single-pass without tilling the soil at seed planting depths.
    Type: Application
    Filed: August 22, 2001
    Publication date: February 27, 2003
    Inventor: Gregg A. Sauder
  • Patent number: 6497534
    Abstract: The method of treating hydrocarbon contamination, in soil, that includes providing and operating a rotary tiller having tilling elements that rotate into and out of the soil to till and loosen the soil, and to elevate soil upwardly so that loosened elevated soil then drops downwardly, and is aerated, and dispersing into the soil aqueous streams that contain microbes or chemicals characterized as reacting with hydrocarbon in the loosened soil to produce CO2 and water, thereby to decontaminate the soil.
    Type: Grant
    Filed: July 2, 2001
    Date of Patent: December 24, 2002
    Inventor: Charles McCoy
  • Patent number: 6068061
    Abstract: An apparatus and method for tilling a seedbed with a soil manipulation device comprising a tilling shank for forming a groove in the soil followed a pair of coulter blades for closing the groove and a rear finishing device such as a rolling basket for further tilling and firming of the soil with improved coulter downward pressure and shank head. Downward pressure on the coulter blades is provided by a coulter spring attached to a lever arm pivotally attached to the framework which applies downward pressure to the framework supporting the coulter blades. The rear finishing device is connected to the same coulter support framework by a pivotal rear arm and a rear arm spring such that when the rear finishing device is displaced upward by changing field conditions, an upward force is imparted to the coulter support framework thus raising the coulter blades in response to changing field conditions.
    Type: Grant
    Filed: April 9, 1998
    Date of Patent: May 30, 2000
    Assignee: Unverferth Manufacturing Co., Inc.
    Inventors: David R. Smith, William C. Maenle
  • Patent number: 5797460
    Abstract: A tillage implement includes straight bar ripper structure with a main forward toolbar supporting subsoiler shanks from special brackets which can also support coulters ahead of the shanks independently of additional toolbar structure. An optional rear or secondary toolbar is attached by four-bar linkages to the main toolbar. The four-bar linkages allow the operator to adjust the height of the secondary toolbar relative to the main toolbar to accommodate changes in the operating depth of the rippers. The linkages may also be released to allow the secondary toolbar to float relative to the main toolbar. The secondary toolbar accommodates different attachments behind the rippers, such as disk bedders, lister bedders and strip till rigs which can operate at optimum attack angles and penetration regardless of the operating depth of the ripper.
    Type: Grant
    Filed: October 22, 1996
    Date of Patent: August 25, 1998
    Assignee: Deere & Company
    Inventors: Paul David Parker, Jason Daniel Wattonville
  • Patent number: 5622227
    Abstract: A farm implement has a rigid frame from which is supported a mechanism for breaking and loosening compacted soil. A first plurality of S-tines are supported by the frame and disposed behind the breaking and loosening mechanism. Each S-tine has a sweep disposed on a lower end thereof. A reel is supported by the frame and disposed behind the first plurality of S-tines. The reel has a plurality of blades for chopping debris and breaking soil clods. A second plurality of S-tines are supported by the frame and disposed in offset rows behind the reel. Each S-tine has a sweep disposed on a lower end thereof. A roller mechanism is rotatably supported by the frame and disposed behind the second plurality of S-tines. The roller mechanism mixes and blends the soil with a rolling action. A finished roller breaks down remaining dirt clods and seals moisture in the ground.
    Type: Grant
    Filed: September 15, 1994
    Date of Patent: April 22, 1997
    Inventor: Kevin G. McDonald
  • Patent number: 5499685
    Abstract: A movable, row crop soil conditioner apparatus for conditioning soil prior to planting including a mechanism for first cutting a row length furrow opening in the soil when the soil conditioner is moved. A subsoiler is positioned behind the first cutting mechanism. It is selectively inserted into the furrow opening when the subsoiler is moved. The subsoiler includes a tooth, and a first pressure applicator for maintaining pressure on the soil directly and laterally on the subsoiler tooth when the tooth is inserted into the furrow opening. The tooth causes an eruption furrow in the furrow opening. The pressure applicator then controls the eruption soil wakes on either side of the subsoiler when the row crop conditioner is moved down a row. The subsoiler also includes a mechanism for turning the soil wakes on either side of the furrow inwardly towards each other to crush and shear the soil and to urge it downwardly into the eruption furrow, thereby closing the eruption furrow.
    Type: Grant
    Filed: July 13, 1993
    Date of Patent: March 19, 1996
    Inventor: James H. Downing, Jr.
  • Patent number: 5474135
    Abstract: A tillage implement for preparing seed beds for planting seeds for row crops. The implement includes deep tillage units for loosening soil behind the wheels of a tractor, additional deep tillage units for loosening soil in the areas where seed beds are located, seed bed shaping units, and ribbed wheels for providing guide tracks in the soil for use in aligning a planter with the seed beds.
    Type: Grant
    Filed: February 22, 1994
    Date of Patent: December 12, 1995
    Assignee: Schlagel Manufacturing, Inc.
    Inventor: Ronald L. Schlagel
  • Patent number: 4836295
    Abstract: An apparatus for leveling and conditioning baseball infields and the like includes a scarifier, pulverizer, drag, and roller, all mounted on a common frame. The frame and at least some of the implements may be adjusted to adjust or disable the scarifier, pulverizer, and drag individually. The apparatus may be pulled by a small garden tractor.
    Type: Grant
    Filed: December 4, 1987
    Date of Patent: June 6, 1989
    Inventor: Rodger E. Estes
  • Patent number: 4703809
    Abstract: An apparatus for soil working, consisting of a frame (1) drawn over the ground by a vehicle, a first roller (7) mounted rotatably in the frame (1), extending transversely to the travelling direction, a second rotatably supported roller (19) arranged parallel to and behind the first roller (7) and driven thereby through a transmission (17), and two or more rows of soil working members (6) fixed to the frame, wherein the first roller (7) extends between two rows of soil working members (6), and is mounted adjustably in height an securably with respect to the frame (1), the second roller (19) being coupled either to the frame (1) or to the first roller (7) by two or more vertically moveable swing arms (20), so effectuating a precise pressure on the ground of the first (1) or alternatively the second roller (19) independently of one another, and also by maintaining an exact setting of the soil working members (6) at a specific level.
    Type: Grant
    Filed: February 4, 1986
    Date of Patent: November 3, 1987
    Assignee: 501 Vandenende B.V. Borssele
    Inventor: Anthony Van den Ende
  • Patent number: 4601248
    Abstract: A minimum tillage planting apparatus includes a soil conditioning device comprising a coulter for cutting through surface residue and slicing into the soil, a plow element behind and in alignment with the coulter for penetrating and lifting the soil, and a pair of spaced-apart pressure wheels located above the point of the plow element for exerting a downward pressure on the soil and, in cooperation with the plow element, creating a crushing, shearing action on the soil. A pair of filler wheels are provided rearwardly of the plow element to fill the furrow formed by the plow element and to level the row zone for a furrow opening means, seed depositing means for depositing seeds in the opened furrow and seed covering and soil firming or compacting means, all of which follow the pair of filler wheels.
    Type: Grant
    Filed: June 13, 1984
    Date of Patent: July 22, 1986
    Assignee: North Carolina State University
    Inventor: Eustace O. Beasley
  • Patent number: 4537262
    Abstract: A soil cultivating machine comprises two transverse rows of fixed tines and three transversely extending rollers. The front roller has discs which cut parallel slits in the soil. The two following rollers have transversely extending releasable blades mounted on angle-irons which form shallow V's pointed in the direction of the rollers' rotation and which are twisted about 90.degree. from their outboard ends to their centers. The rollers are drivingly interconnected by a chain transmission so that the middle roller rotates slower than the other two and the rear roller rotates faster than it would if freely rotating on the ground. The tines are in rows between the rollers and their depth of soil penetration relative to the underlying soil is adjustable. The rollers are mounted on a generally horizontal framework which is adjustable, however, so it can be inclined slightly either forward or aft to increase or decrease the penetration of the front roller's discs.
    Type: Grant
    Filed: June 15, 1983
    Date of Patent: August 27, 1985
    Inventor: Cornelis van der Lely
  • Patent number: 4377979
    Abstract: The planter includes a number of forward tillage units each followed by an aligned planting unit. Both units are independently mounted by four-bar linkages to the planter frame. Each tillage unit includes a leading banded coulter followed by a pair of rolling row cleaning discs which are, in turn, followed by a fluted coulter. The system may be used in any of the following planting modes: (1) no-till planting, in which the fluted coulter only is used to prepare a narrow band of soil for planting with no trash removal; (2) ridge planting or till-planting, in which the row cleaning discs clear a deeper wide band before the fluted coulter while leaving bands between the row crops untilled; (3) minimum tillage planting, in which the row cleaning discs may be used to clear a shallow band of surface trash before the fluted coulter; and (4) conventional planting, in which the tillage units are raised and not used.
    Type: Grant
    Filed: March 31, 1981
    Date of Patent: March 29, 1983
    Assignee: Hiniker Company
    Inventors: Richard L. Peterson, James A. Johnson, Richard W. Steinberg, Roger J. Scheurer
  • Patent number: 4361191
    Abstract: Through adaptation of and improvement upon secondary, minimum tillage techniques, there is provided a single pass, seedbed method and agricultural machine, utilizing reduction, incorporation, aeration and other procedures, capable of effectively handling all types of adverse field conditions, ground compositions and soil makeup in such manner as to quickly, easily and inexpensively convert all materials and substances therein contained or to be added thereto from a state generally unsuited for seeding and satisfactory plant development to a finished condition wherein any desired seed type may be thereupon planted, sowed or set thereinto without difficulty and with an assurance of good germination and strong, healthy crop growth unimpaired by wind and soil erosion, ineffective moisture retention and other impediments which otherwise normally reduce or destroy profitable harvesting results.
    Type: Grant
    Filed: February 27, 1981
    Date of Patent: November 30, 1982
    Assignee: Landoll Corporation
    Inventors: Donald R. Landoll, David J. Kongs
  • Patent number: 4280564
    Abstract: A cultivating machine includes a forward row of subsoil tools and a pair of elongated cultivating rollers having support plates to which soil penetrating T-section bars or knife edged bars are attached. To the rear of the cultivating rollers, a trailing supporting roller is journalled on the frame and adjusting arms to the roller can be interconnected with the frame to raise or lower same and thereby set the soil working levels of the subsoil. Each cultivating roller can have its soil penetrating depth controlled through pivot arm connections that move the roller through an arc centered on the pivot axes which extend transverse to the direction of machine travel. The cultivating rollers can be moved towards or away from one another. The machine frame has a coupling that is connectable to the lifting hitch of a tractor and tanks of liquid soil treating material are at least partly supported by frame connections to the tractor, adjacent the coupling.
    Type: Grant
    Filed: August 8, 1978
    Date of Patent: July 28, 1981
    Inventor: Cornelis van der Lely
  • Patent number: 4231305
    Abstract: A cultivating machine includes a forward row of subsoil tools and a plurality of elongated cultivating rollers having support plates to which soil penetrating T-section bars or knife edged bars are attached. To the rear of the cultivating rollers, a trailing roller is mounted on the frame and adjusting arms to the roller can be interconnected with the frame to raise or lower same and thereby set the soil working levels of the subsoil. Each cultivating roller can have its soil penetrating depth controlled through pivot arm connections that move the roller through an arc centered on the pivot axes which extend transverse to the direction of machine travel. The machine frame has a coupling that is connectable to the lifting hitch of a tractor and tanks of liquid soil treating material are mounted on the tractor adjacent the coupling.
    Type: Grant
    Filed: August 8, 1978
    Date of Patent: November 4, 1980
    Inventor: Cornelis van der Lely
  • Patent number: 4211284
    Abstract: An improved earth working implement is disclosed which is particularly suitable for surgarcane cultivation, said implement having four main pluralities of saucer shaped cultivator discs carried by a trailer, each of said pluralities being individually adjustable to vary the angular relationship of the discs relative to the longitudinal axis of the trailer as well as the lateral spacing between the discs and said axis. A pair of retractable wheels are provided to permit the trailer to be towed between a storage area and the sugarcane fields. An adjustable soil deflector disc is disposed adjacent to and rearwardly of each plurality of discs to deflect the soil removed by the cultivator discs in a loosened condition back into the general area from which it was removed. Two additional pairs of cultivator discs are rotatably, angularly, adjustably attachable to the rear end of the trailer.
    Type: Grant
    Filed: May 2, 1978
    Date of Patent: July 8, 1980
    Inventor: Hugo Collado
  • Patent number: 4088083
    Abstract: A tillage machine includes a main frame that supports rotary soil working tined members and various additional tools that can be detachably fastened to the main frame in combination with the rotary tined members to landscape in one pass. For primary use, a ripper assembly is detachably fastened at the front of the frame in advance of the rotary soil working members. A pulverizer-support roller is detachably fastened to the frame in a trailing position and a leveler bar supported between the roller and the rotary members to prevent ridging. A seed box with delivery system can be mounted on the roller frame and driven by a transmission connected to the roller axle. A packer roller is detachably pivoted to the frame to leave the ground in a finished condition.
    Type: Grant
    Filed: November 5, 1976
    Date of Patent: May 9, 1978
    Assignee: C. van der Lely N.V.
    Inventors: John P. Dail, Jr., Pieter VAN DEN Berg
  • Patent number: 5066533
    Abstract: A laminated structure includes a wafer member with a membrane attached thereto, the membrane being formed of substantially hydrogen-free boron nitride having a nominal composition B.sub.3 N. The structure may be a component in a mechanical device for effecting a mechanical function, or the membrane may form a masking layer on the wafer. The structure includes a body formed of at least two wafer members laminated together with a cavity formed therebetween, with the boron nitride membrane extending into the cavity so as to provide the structural component such as a support for a heating element or a membrane in a gas valve. In another aspect borom is selectively diffused from the boron nitride into a <100> surface of a silicon wafer. The surface is then exposed to EDP etchant to which the diffusion layer is resistant, thereby forming a channel the wafer member with smooth walls for fluid flow.
    Type: Grant
    Filed: June 21, 1990
    Date of Patent: November 19, 1991
    Assignee: The Perkin-Elmer Corporation
    Inventors: William G. America, Richard R. Poole