Electrode Oscillator, Reciprocator Or Agitator Patents (Class 204/222)
  • Patent number: 11846035
    Abstract: Provided is a technique that allows suppressing a liquid splash of a plating solution. A plating apparatus includes a plating tank 10 including an inner tank 11, a substrate holder, and a paddle 50 configured to agitate the plating solution accumulated in the inner tank 11 by reciprocating in a horizontal direction. The paddle 50 is arranged to be inserted through a hole provided in an outer peripheral wall of the inner tank and to build a bridge between an inside of the inner tank and an outside of the inner tank, and the paddle 50 includes a first portion 51 configured to agitate the plating solution accumulated in the inner tank, a second portion 53 arranged outside the inner tank and disposed above the first portion, and a connecting portion 52 arranged outside the inner tank to connect the first portion to the second portion.
    Type: Grant
    Filed: February 8, 2022
    Date of Patent: December 19, 2023
    Assignee: EBARA CORPORATION
    Inventors: Masaya Seki, Shao Hua Chang
  • Patent number: 11274378
    Abstract: The present disclosure concerns an array of chemical and electrochemical treatment cells. The cells include electrochemical cells that individually include a plating tank, a power supply, and an anode. A flight bar for supporting a cathode is moved from one tank to another for treating and plating a cathode surface. Within an electrochemical tank, the power supply operates a circuit with metal ions being eroded from the anode and being deposited onto the cathode surface. A plating apparatus is configured to simultaneously provide mechanical support, a cathodic connection, and agitation to a cathode in a plating tank. The plating apparatus includes an agitator which rotates the cathode about a fixed pivot connection to provide motion along a lateral axis and a vertical axis.
    Type: Grant
    Filed: April 24, 2020
    Date of Patent: March 15, 2022
    Assignee: Engineering and Software System Solutions, Inc.
    Inventors: Kelly V. Smith, Josh J. Ault, Jeremy J. Hall
  • Patent number: 11267060
    Abstract: A device for machining a work piece creates an electrical potential between an electrode and the work piece or another conducting body proximate to the work piece. The electrical potential establishes an electrical field within the work piece that is expected to repel electrons and create a region of positively charged ions which repel one another. This region is expected to be weakened and material is expected to be removable from this region of the work piece using less force and energy than when machined by traditional machining techniques.
    Type: Grant
    Filed: May 16, 2017
    Date of Patent: March 8, 2022
    Assignee: The Board of Regents of the Nevada System of Higher Education on Behalf of the University of Nevada, Las Vegas
    Inventor: Zhiyong Wang
  • Patent number: 10823707
    Abstract: Systems and methods are provided for ultrasonic inspection. One embodiment is a method for ultrasonic inspection. The method includes selecting an ultrasonic probe having an array of transducers arranged in an arc, placing the ultrasonic probe atop a surface of a part having a first radius of curvature, dynamically aligning the transducers of the array with respect to the surface, forming an ultrasonically conductive pathway between the transducers and the part, and inspecting the part via ultrasonic waves transmitted from the transducers.
    Type: Grant
    Filed: May 25, 2018
    Date of Patent: November 3, 2020
    Assignee: The Boeing Company
    Inventors: Fred D. Young, Hien Thuong Bui
  • Patent number: 10323331
    Abstract: The present disclosure provides a valuable metal selectively adsorbing electrode, including: an electrode formed by a carbon-containing material; and a protein of a bacterium of genus Tepidimonas immobilized on the electrode formed by a carbon-containing material to form the valuable metal selectively adsorbing electrode, wherein the valuable metal includes gold, palladium, silver or indium.
    Type: Grant
    Filed: December 29, 2016
    Date of Patent: June 18, 2019
    Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Li-Ching Chung, Chia-Heng Yen, Teh-Ming Liang, Ren-Yang Horng, Min-Chao Chang, Hsin Shao, Po-I Liu, Chih-Hsiang Fang, Yin-Lung Han, Kai-Chun Fan
  • Patent number: 10109512
    Abstract: A photovoltaic cell is proposed. The photovoltaic cell includes a substrate of semiconductor material, and a plurality of contact terminals each one arranged on a corresponding contact area of the substrate for collecting electric charges being generated in the substrate by the light. For at least one of the contact areas, the substrate includes at least one porous semiconductor region extending from the contact area into the substrate for anchoring the whole corresponding contact terminal on the substrate. In the solution according to an embodiment of the invention, each porous semiconductor region has a porosity decreasing moving away from the contact area inwards the substrate. An etching module and an electrolytic module for processing photovoltaic cells, a production line for producing photovoltaic cells, and a process for producing photovoltaic cells are also proposed.
    Type: Grant
    Filed: September 21, 2017
    Date of Patent: October 23, 2018
    Assignee: Rise Technology S.R.L.
    Inventor: Marco Balucani
  • Patent number: 10030316
    Abstract: There is provided a production method for a stainless steel containing member, including the steps of: blasting a surface of a hollow starting member having a long side direction and a short side direction, the surface being composed of stainless steel; and electropolishing the surface having been blasted, in the step of electropolishing, the starting member being immersed in an electropolishing solution with the long side direction of the starting member being inclined relative to a horizontal direction.
    Type: Grant
    Filed: April 28, 2016
    Date of Patent: July 24, 2018
    Assignee: ARAYA INDUSTRIAL CO., LTD.
    Inventors: Hiroshi Fujita, Yu Imada
  • Patent number: 9943891
    Abstract: The present invention is a rack system for transporting and retaining powder coat hangers during a cleaning process to remove built-up coating materials from the powder coating process.
    Type: Grant
    Filed: November 3, 2015
    Date of Patent: April 17, 2018
    Assignee: Production Plus Corp.
    Inventor: Donovan Dixon
  • Patent number: 9890063
    Abstract: The present invention relates to provide a carbon bed electrolyzer (CBE) unit for electrochemical treatment. More particularly the present invention relates to the treatment of recalcitrant wastewater, e.g. from chemical industry. Further the said CBE unit is useful for electrolytic treatment of liquid effluent having very high concentrations of Chemical oxygen Demand (COD), Total Kjeldahl Nitrogen (TKN) and Biochemical Oxygen Demand (BOD), and Total Dissolved Solids (TDS), and for improving biodegradability of the effluent. More particularly, the present invention relates to an electro oxidation process wherein the carbon bed gets regenerated in-situ continuously.
    Type: Grant
    Filed: March 21, 2011
    Date of Patent: February 13, 2018
    Assignee: COUNCIL OF SCIENTIFIC & INDUSTRIAL RESEARCH
    Inventors: Nageswara Rao Neti, Tapas Nandy
  • Patent number: 9744609
    Abstract: An electrochemical machining device includes an electrode bundle, an electrode sleeve used for receiving the electrode bundle therein, and an electrolytic tank. The electrode bundle includes a number of columnar electrodes. Each of the columnar electrodes can move along an axial direction of the electrode sleeve. The electrode sleeve includes sidewalls, and two pressing plates positioned corresponding to two adjacent sidewalls. The sidewalls of the electrode sleeve include a number of screws to adjust a distance between the pressing plates and the corresponding sidewalls. The pressing plates can be moved to press the electrode bundle, and fix the electrode bundle between the pressing plates and the corresponding sidewalls of the electrode sleeve. A shape of the electrode bundle can be adjusted according to a shape of a molding surface.
    Type: Grant
    Filed: September 25, 2014
    Date of Patent: August 29, 2017
    Assignee: HON HAI PRECISION INDUSTRY CO., LTD.
    Inventor: Shao-Han Chang
  • Patent number: 9745665
    Abstract: For improving the current transfer during the electrolytic metallization of workpieces, a method is proposed: (a) providing a metal depositing apparatus 17, in which the workpiece, at least one anode 40, 41 and a metal deposition electrolyte AE are arranged and which has a device for electric current generation 60 and at least one current feeding device 31 with in each case at least one electrical contact element 34, 35 for making electrical contact with the workpiece; (b) bringing the at least one electrical contact element 34, 35 into contact with the workpiece; and (c) feeding electric current to the workpiece via the at least one electrical contact element 34, 35 in order that the deposition metal deposits on the workpiece. Before method step (b), in a further method step (d), deposition metal is deposited on the at least one electrical contact element 34, 35.
    Type: Grant
    Filed: April 16, 2013
    Date of Patent: August 29, 2017
    Assignee: ATOTECH DEUTSCHLAND GmbH
    Inventors: Dominik Britz, Bernd Schmitt, Bernd Böse, Frank Mücklich, Christian Selzner
  • Patent number: 9647267
    Abstract: A rechargeable cell comprising h combination a bipolar electrode, a zinc electrolyte, a copper electrolyte and metal-ion impermeable, polymer electrochemical membrane separator, wherein the zinc electrolyte and the copper electrolyte are separated from each other by the bipolar electrode on one side and by the membrane separator on the other side. A battery comprising at least one said rechargeable cell.
    Type: Grant
    Filed: February 17, 2014
    Date of Patent: May 9, 2017
    Assignee: CUMULUS ENERGY STORAGE LIMITED
    Inventors: Michael David Hurwitz, Darron Rolfe Brackenbury
  • Patent number: 9458547
    Abstract: A method for anodizing and dyeing a metallic article including a first dipped end, a second dipped end opposite to the first dipped end, and a decorated surface located between the first dipped end and the second dipped end, includes steps as follows: anodizing the metallic article to form an anodization layer on the decorated surface by an anodizing treatment, in which the anodization layer is porous with a number of holes, an immersion time of the decorated surface immersed in the electrolyte solution changes gradually from the first dipped end toward the second dipped end, and a depth of the plurality of holes of the anodization layer after the anodizing step thereby changes gradually from the first dipped end toward the second dipped end; and coloring the metallic article sealed in a dyeing treatment.
    Type: Grant
    Filed: March 19, 2013
    Date of Patent: October 4, 2016
    Assignees: Fu Tai Hua Industry (Shenzhen) Co., Ltd., HON HAI PRECISION INDUSTRY CO., LTD.
    Inventors: Li-Ming Shen, Kai-Bo Cao, Zhi-Yong Fan, Wei-Chao Li, Jia-Xiong Wang
  • Patent number: 9303328
    Abstract: An electroplating system and method has a needle anode associated with an XYZ or multi-direction positioning device and is configured for plating internal surfaces of holes in metal products. The needle anode is positioned such that an insertion portion of the needle anode is centered over a hole and inserted to a predetermined depth in the hole, with a discharge end located a predetermined distance from the inner end of the hole. Plating solution is supplied to the needle anode and flows continuously during plating from the discharge end of the needle, through a gap between the needle anode and inner surface of the hole, and out of the open end of the hole into a drain. In one example, the metal object is a terminal of an electrical connector and the hole is a solder cup at a terminal end of the connector.
    Type: Grant
    Filed: January 9, 2014
    Date of Patent: April 5, 2016
    Assignee: Teledyne Instruments, Inc.
    Inventors: John Bradley Hunter, Chester P. Piechowiak, Theodore M. Heummler
  • Patent number: 9163323
    Abstract: A vibration feeding device includes a mounting seat, a vibration feeding mechanism, and a pressing mechanism. The vibration feeding mechanism includes a driving member, a rotating shaft, a rotation wheel, and at least one adjusting member. The rotating shaft is rotatably connected to the driving member. The rotation wheel is non-rotatably sleeved on the rotating shaft. The at least one adjusting member is fixed between the rotating shaft and the rotation wheel to adjust an eccentricity of the rotation wheel. The vibration feeding mechanism is mounted on the mounting seat. The pressing mechanism is connected to the rotation wheel of the vibration feeding mechanism and is driven by the vibration to adjustably move close to and then away from a workpiece.
    Type: Grant
    Filed: April 18, 2013
    Date of Patent: October 20, 2015
    Assignees: HONG FU JIN PRECISION INDUSTRY (ShenZhen) CO., LTD., HON HAI PRECISION INDUSTRY CO., LTD.
    Inventors: Lin-Jun Liu, Wen-Li Wang, Tian-Feng Huang, Zhen-Dong Wei
  • Publication number: 20140346035
    Abstract: One embodiment provides an electroplating apparatus, which includes a tank filled with an electrolyte solution, a number of anodes situated around edges of the tank, a cathode situated above the tank, and a plurality of wafer-holding jigs attached to the cathode. A respective wafer-holding jig includes a common connector electrically coupled to the cathode and a pair of wafer-mounting frames electrically coupled to the common connector. Each wafer-mounting frame includes a plurality of openings, and a respective opening provides a mounting space for a to-be-plated solar cell, thereby facilitating simultaneous plating of front and back surfaces of the plurality of the solar cells.
    Type: Application
    Filed: May 23, 2014
    Publication date: November 27, 2014
    Inventors: Jianming Fu, Wen Zhong Kong
  • Patent number: 8801906
    Abstract: The invention relates to a device (10) for electrochemically removing a surface of a component (2), in particular a blade of an integrally bladed rotor, comprising at least one electrode (12), which has an outer contour that corresponds to a surface of the component to be produced, and a hydraulic pressure device (14), which has a pressure piston (16) coupled to the electrode (12) and a hydraulic chamber (18) in operative connection with the pressure piston (16) for receiving the hydraulic medium, wherein the pressure piston can be loaded with an actuating force and moved relative to the hydraulic pressure device (14) by means of the hydraulic medium, wherein the hydraulic chamber (18) is fluidically encapsulated relative to the pressure piston (16). The invention further relates to a method for electrochemically removing a surface of a component (2).
    Type: Grant
    Filed: July 8, 2010
    Date of Patent: August 12, 2014
    Assignee: MTU Aero Engines AG
    Inventors: Albin Platz, Roland Huttner
  • Patent number: 8545687
    Abstract: Apparatus for the electrolytic treatment of the product L using a treatment agent is used to make the treatment of a plate-shaped product more uniform. This apparatus includes devices 40, 42 for retaining the product L in the apparatus, one or more flow devices 10, which each include at least one nozzle 15 and are disposed situated opposite the product L, one or more counter electrodes 30, which are inert relative to the treatment agent and are disposed parallel to at least one treatment surface, eccentric motor means for generating a relative movement 44 between the product L, on the side, and the flow devices 10 and/or the counter electrodes 30, on the other side, in at least one direction parallel to a treatment surface. The product L can be immersed in the treatment agent during treatment.
    Type: Grant
    Filed: June 3, 2008
    Date of Patent: October 1, 2013
    Assignee: Atotech Deutschland GmbH
    Inventors: Reinhard Schneider, Henry Kunze, Ferdinand Wiener
  • Publication number: 20130248374
    Abstract: A highly polished surface on an aluminum substrate is formed using any number of machining processes. During the machining process, intermetallic compounds are typically generated at a top surface area of the aluminum substrate caused by spot heat generated between the tool edge and the cut tip of the aluminum substrate during the cutting process. The intermetallic compounds can leave surface imperfections after conventional mechanical polishing operations that render the surface of the aluminum substrate difficult to obtain a desired high glossiness due to exfoliation of the intermetallic compounds from the top surface. In order to remove the effect of the intermetallic compounds, an acid etching solution is applied to the surface resulting in removal of intermetallic compounds across a surface portion of the aluminum substrate.
    Type: Application
    Filed: September 26, 2012
    Publication date: September 26, 2013
    Applicant: Apple Inc.
    Inventors: Simon R. Lancaster- Larocque, Purwadi Raharjo, Kensuke Uemura
  • Patent number: 8409408
    Abstract: An apparatus for electrochemical modification of liquid streams employing an electrolytic cell having an oxidation site defined by an anode, an anode compartment comprising liquid electrolyte anolyte where oxidation is effected, a cathode compartment comprising liquid electrolyte catholyte where reduction is effected, a cathode comprising conducting cathode particulates forming a cathode particulates bed and a current feeder device in at least intermittent contact with said cathode particulates where the cathode particulates are in motion and the particulates motion is substantially independent of bulk electrolyte flow, a separator which confines the cathode particulates to the cathode compartment, constrains electrolyte flow through the cathode particulates bed and permits ionic conduction of current between the anode and cathode, a cathode particulates conveyance system arranged to manipulate cathode particulates motion including a magnetic subsystem having at least one source of magnetic field arranged to
    Type: Grant
    Filed: October 3, 2011
    Date of Patent: April 2, 2013
    Assignee: Blue Planet Strategies, L.L.C.
    Inventors: Patrick I. James, George Stejic
  • Patent number: 8372252
    Abstract: In a method for setting the distance between an electrode and a workpiece in electrochemical metal working, the electrode is moved by an oscillating drive system, in which an acceleration signal of the oscillating drive system is picked up, the acceleration signal is divided into individual sections, characteristic magnitudes of the individual sections of the acceleration signal are determined, the characteristic magnitudes of the individual sections are compared to one another and the distance of the electrode from the workpiece is adjusted in response to a deviation of the characteristic magnitudes from the specified values. A device for carrying out the method includes an electrode, that is connected to a drive axis, an oscillating motion being able to be transferred to the electrode via the drive axis. A sensor is situated on the drive axis which picks up acceleration signals.
    Type: Grant
    Filed: September 6, 2007
    Date of Patent: February 12, 2013
    Assignee: Robert Bosch GmbH
    Inventors: Herbert Gruhn, Norman Krings, Juergen Hackenberg, Alexander Reitzle
  • Patent number: 8277618
    Abstract: The present invention relates to an electrochemical cell comprising a vibratile electrode (eg a vibratile microelectrode).
    Type: Grant
    Filed: May 9, 2007
    Date of Patent: October 2, 2012
    Assignee: The University of Liverpool
    Inventors: Conrad S. Chapman, Constant M. G. Van Den Berg
  • Publication number: 20120103830
    Abstract: The invention relates to a device (10) for electrochemically removing a surface of a component (2), in particular a blade of an integrally bladed rotor, comprising at least one electrode (12), which has an outer contour that corresponds to a surface of the component to be produced, and a hydraulic pressure device (14), which has a pressure piston (16) coupled to the electrode (12) and a hydraulic chamber (18) in operative connection with the pressure piston (16) for receiving the hydraulic medium, wherein the pressure piston can be loaded with an actuating force and moved relative to the hydraulic pressure device (14) by means of the hydraulic medium, wherein the hydraulic chamber (18) is fluidically encapsulated relative to the pressure piston (16). The invention further relates to a method for electrochemically removing a surface of a component (2).
    Type: Application
    Filed: July 8, 2010
    Publication date: May 3, 2012
    Applicant: MTU AERO ENGINES GMBH
    Inventors: Albin Platz, Roland Huttner
  • Publication number: 20120085643
    Abstract: In one embodiment of the present invention an electrolytic cell is provided comprising a containment vessel; a first electrode; a second electrode; a source of electrical current in electrical communication with the first electrode and the second electrode; an electrolyte in fluid communication with the first electrode and the second electrode; a gas, wherein the gas is formed during electrolysis at or near the first electrode; and a separator; wherein the separator includes an inclined surface to direct flow of the electrolyte and the gas due to a difference between density of the electrolyte and the combined density of the electrolyte and the gas such that the gas substantially flows in a direction distal to the second electrode.
    Type: Application
    Filed: December 9, 2011
    Publication date: April 12, 2012
    Applicant: McAlister Technologies, LLC
    Inventor: Roy E. McAlister
  • Publication number: 20120052325
    Abstract: The invention relates to electrochemical machining of metals and alloys and, more particularly, to high-precision dimensional electrochemical machining. The invention may be used for forming a regular nanometric and micrometric layers on an intricately shaped surface. Disclosed is a method of electrochemical machining in neutral electrolytes using current pulses which are synchronized with oscillation phases corresponding to the electrolyte pressure maximum in the interelectrode gap, wherein the oscillation mode of the machining electrode and electrode approach speed are set in a specific way for a predetermined frequency and amplitude, characterized in that the electrode approach speed is set in a way that the maximum value Pmax (t) of the electrolyte pressure at the interelectrode gap does not exceed an acceptable maximum value Pmax of the electrolyte pressure at the interelectrode gap.
    Type: Application
    Filed: April 29, 2011
    Publication date: March 1, 2012
    Applicant: PECM INDUSTRIAL, LLC
    Inventors: Alexandr Nickolaevich ZAYTSEV, Rinat Miyassarovich SALAKHUTDINOV, Timofei Vladimirovich KOSAREV, Nickolay Valerievich SERAVKIN
  • Patent number: 7998322
    Abstract: A liquid treatment chamber having an elongate housing through which liquid flows longitudinally from an inlet port to an outlet port thereof is disclosed. An elongate ultrasonic waveguide assembly extends within the housing and is operable at a predetermined ultrasonic frequency and a predetermined electrode potential to ultrasonically energize and electrolyze liquid within the housing. An elongate ultrasonic horn of the waveguide assembly is disposed at least in part intermediate the inlet and outlet ports, and has a plurality of discrete agitating members in contact with and extending transversely outward from the horn intermediate the inlet and outlet ports in longitudinally spaced relationship with each other.
    Type: Grant
    Filed: July 12, 2007
    Date of Patent: August 16, 2011
    Assignee: Kimberly-Clark Worldwide, Inc.
    Inventors: Robert Allen Janssen, John Glen Ahles, Thomas David Ehlert, John Gavin MacDonald, Earl C. McCraw, Jr., Patrick Sean McNichols, Paul Warren Rasmussen, Steve Roffers
  • Publication number: 20110174742
    Abstract: With a method for renovating wastewater, the wastewater is fed into an electro flocculation cell (E) and is subject to electro flocculation. The electro flocculate (WF) processed in the electro flocculation cell is fed into a ripening tank (R) and remains there. The electro flocculate (WF) originating from the ripening tank is filtered in a filter (F). The device for renovating wastewater comprises an electro flocculation cell (E), a ripening tank (R) connected downstream of the electro flocculation cell (E), and a filter (F) connected downstream of the ripening tank. The electro flocculation cell (E) is provided with moveable electrodes. The ripening tank (R) comprises a ventilation element (R18) for feeding air.
    Type: Application
    Filed: June 12, 2009
    Publication date: July 21, 2011
    Inventor: Holger Blum
  • Patent number: 7967967
    Abstract: An apparatus and a method for electrochemical modification of liquid streams employing an electrolytic cell which utilizes an oxidation site defined by an anode, an anode compartment comprising liquid electrolyte anolyte where oxidation is effected, a cathode compartment comprising liquid electrolyte catholyte where reduction is effected, a cathode comprising conducting cathode particulates forming a cathode particulates bed and a current feeder device in at least intermittent contact with said cathode particulates where the cathode particulates are in motion and the particulates motion is substantially independent of bulk electrolyte flow, a separator which confines the cathode particulates to the cathode compartment, constrains electrolyte flow through the cathode particulates bed and permits ionic conduction of current between the anode and cathode, a cathode particulates conveyance system that manipulates cathode particulates motion.
    Type: Grant
    Filed: January 16, 2007
    Date of Patent: June 28, 2011
    Inventors: Patrick Ismail James, George Stejic
  • Publication number: 20110006012
    Abstract: A method of decomposing an organic liquid, having a solubility in water of 0 or less than 50 g/l at 25° C., comprising: a) emulsifying an amount of the organic liquid in an amount of an aqueous medium to form an emulsion of the organic liquid in the aqueous medium; and b) electrochemically decomposing the emulsified organic liquid on a surface of an oscillating electrode in an electrochemical cell, wherein the electrode is oscillating at a frequency of at least 5 KHz.
    Type: Application
    Filed: December 17, 2007
    Publication date: January 13, 2011
    Applicant: WINDSOR SCIENTIFIC LIMITED
    Inventors: Clive Edward Hall, Keith William Dawes
  • Publication number: 20100224483
    Abstract: Disclosed is a unit for producing sterilized water. The unit comprises an electrode module, a pair of electrode rods and a frame. The electrode module includes a pair of electrode plates and a hollow electrode separator positioned between the electrode plates to separate the electrode plates from each other. Each of the electrode plates has a plurality of elongated slots formed therein. The electrode rods apply different voltages to the respective electrode plates. The frame is positioned at one side of the electrode module and has portions for receiving the respective electrode rods. Each of the electrode plates has a pair of holes formed at the circumference thereof. The electrode rods penetrate through the respective holes. The holes have different sizes. The electrode plates are stacked in such a manner that the holes having different sizes overlap each other. This stack enables the application of different voltages to the electrode plates through the respective electrode rods.
    Type: Application
    Filed: March 1, 2010
    Publication date: September 9, 2010
    Inventor: Keum-il Cho
  • Publication number: 20100163428
    Abstract: There are provided apparatuses for increasing dryness of a substance. The apparatuses comprise at least one module, each of the module(s) comprising at least two electrodes adapted to submit the substance to an electric current. The electrodes are also adapted to compress the substance. There are also provided processes for increasing dryness of a substance.
    Type: Application
    Filed: June 13, 2007
    Publication date: July 1, 2010
    Applicant: LES TECHNOLOGIES ELCOTECH INC.
    Inventors: Abderrahmane Dermoune, Abdelaziz Bourega, Roger Paradis, Dany Sarrazin-Sullivan, Jean-Pierre Dionne, Mostafa Chamouni
  • Publication number: 20100155261
    Abstract: A deionization apparatus for regenerating electrodes using vibration and a method of controlling the same. The deionization apparatus includes electrodes to which ions contained in a fluid are absorbed, and a piezoelectric element to separate the ions absorbed to the electrodes by vibration. Since the ions absorbed to the electrodes are separated using mechanical energy generated by the piezoelectric element, it may be possible to more rapidly perform regeneration of the electrodes.
    Type: Application
    Filed: July 30, 2009
    Publication date: June 24, 2010
    Applicant: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Andrey Troshin, Dae Wook Park, Hideo Nojima, Seon Uk Na
  • Patent number: 7736474
    Abstract: A plating apparatus securely carries out a flattening plating of a substrate to form a plated film having a flat surface without using a costly mechanism, and without applying an extra plating to the substrate. The plating apparatus includes a substrate holder; a cathode section having a seal member for watertightly sealing a peripheral portion of the substrate, and a cathode electrode for supplying an electric current to the substrate; an anode disposed in a position facing the surface of the substrate; a porous member disposed between the anode and the surface of the substrate; a constant-voltage control section for controlling a voltage applied between the cathode electrode and the anode at a constant value; and a current monitor section for monitoring an electric current flowing between the cathode electrode and the anode, and feeding back a detection signal to the constant-voltage control section.
    Type: Grant
    Filed: October 7, 2005
    Date of Patent: June 15, 2010
    Assignees: Ebara Corporation, International Business Machines Corporation
    Inventors: Keiichi Kurashina, Mizuki Nagai, Satoru Yamamoto, Hiroyuki Kanda, Koji Mishima, Shinya Morisawa, Junji Kunisawa, Kunihito Ide, Hidenao Suzuki, Emanuel Cooper, Philippe Vereecken, Brett Baker-O'Neal, Hariklia Deligianni
  • Publication number: 20100101932
    Abstract: The present invention relates an electrochemical processing apparatus and a processing method thereof. A reciprocating swing unit is used to drive the processing electrode to process a workpiece, and thus simplifying fabrication of the processing electrode, and shortening processes and reducing costs. In addition, by using a high-frequency reciprocating twist and micro-vibrating unit to drive the processing electrode to perform high-frequency reciprocating twists and micro-vibrations, the processing electrode can perform twist without varying the processing gap. Thereby, the electrolyte in the gap can be perturbed and renewed continuously. Accordingly, bubbles and products produced during electrolysis can be removed sufficiently, enhancing processing precision and surface quality using the processing electrode on processing the workpiece.
    Type: Application
    Filed: December 23, 2008
    Publication date: April 29, 2010
    Inventors: Jung-Chou HUNG, Dayu Lin
  • Publication number: 20100078323
    Abstract: A vibrator has a large strength of a standing wave even with a low driving voltage, thereby improving the accuracy of component separation. A device according to the present invention includes a substrate having a channel groove provided in an upper surface of the substrate, a seal provided above the substrate so as to cover an upper opening of the channel groove, a projection provided on an outer side wall opposite to the channel groove, and a vibrator causing the projection to warp and vibrate in a depth direction of the channel groove. The warping vibration of the projection is amplified due to effect of leverage, and generates a large stress on the outer wall of the channel groove having the projection provided thereon. Consequently, the strength of a standing wave in the channel groove increases even for a low driving voltage, thereby improving the accuracy of component separation.
    Type: Application
    Filed: November 15, 2007
    Publication date: April 1, 2010
    Applicant: Panasonic Corporation
    Inventors: Makoto Takahashi, Masaya Nakatani
  • Patent number: 7686927
    Abstract: The orientation of a wafer with respect to the surface of an electrolyte is controlled during an electroplating process. The wafer is delivered to an electrolyte bath along a trajectory normal to the surface of the electrolyte. Along this trajectory, the wafer is angled before entry into the electrolyte for angled immersion. A wafer can be plated in an angled orientation or not, depending on what is optimal for a given situation. Also, in some designs, the wafer's orientation can be adjusted actively during immersion or during electroplating, providing flexibility in various electroplating scenarios.
    Type: Grant
    Filed: August 25, 2006
    Date of Patent: March 30, 2010
    Assignee: Novellus Systems, Inc.
    Inventors: Jonathan D. Reid, Steven T. Mayer, Seshasayee Varadarajan, David C. Smith, Evan E. Patton, Dinesh S. Kalakkad, Gary Lind, Richard S. Hill
  • Publication number: 20100065437
    Abstract: In a method for setting the distance between an electrode and a workpiece in electrochemical metal working, the electrode is moved by an oscillating drive system, in which an acceleration signal of the oscillating drive system is picked up, the acceleration signal is divided into individual sections, characteristic magnitudes of the individual sections of the acceleration signal are determined, the characteristic magnitudes of the individual sections are compared to one another and the distance of the electrode from the workpiece is adjusted in response to a deviation of the characteristic magnitudes from the specified values. A device for carrying out the method includes an electrode, that is connected to a drive axis, an oscillating motion being able to be transferred to the electrode via the drive axis. A sensor is situated on the drive axis which picks up acceleration signals.
    Type: Application
    Filed: September 6, 2007
    Publication date: March 18, 2010
    Inventors: Herbert Gruhn, Norman Krings, Juergen Hackenberg, Alexander Reitzle
  • Publication number: 20100025233
    Abstract: When forming metallic components, in particular three-dimensionally curved blades, which constitute a single piece with the blading of turbomachine rotor wheels, the linear oscillation of the electrode acting as a tool is superimposed by a circular oscillation, enabling the electrode to turn into the workpiece conformally with its shape. Further forming is performed by circular oscillation with circular feed in the one and/or the other direction. An embodiment of the corresponding apparatus comprises an electrode holder (9) with linear feed (Zvor) and linear oscillation (Zosz) and a workpiece holder (5) with circular oscillation (Cosz) and circular feed (Cvor).
    Type: Application
    Filed: October 23, 2008
    Publication date: February 4, 2010
    Inventor: Rainer Mielke
  • Patent number: 7462273
    Abstract: When forming metallic components, in particular three-dimensionally curved blades, which constitute a single piece with the blading of turbomachine rotor wheels, the linear oscillation of the electrode acting as a tool is superimposed by a circular oscillation, enabling the electrode to turn into the workpiece conformally with its shape. Further forming is performed by circular oscillation with circular feed in the one and/or the other direction. An embodiment of the corresponding apparatus comprises an electrode holder (9) with linear feed (Zvor) and linear oscillation (Zosz) and a workpiece holder (5) with circular oscillation (Cosz) and circular feed (Cvor).
    Type: Grant
    Filed: December 12, 2003
    Date of Patent: December 9, 2008
    Assignee: Rolls-Royce Deutschland Ltd & Co KG
    Inventor: Rainer Mielke
  • Patent number: 7338586
    Abstract: An insulated vibration-stirring apparatus comprising a vibration generating means containing a vibration motor and a vibrating member attached to that motor, and a vibrating rod attached by an installation piece to allow vibration linked with the vibration generating means, and vibrating vanes installed on this vibrating rod. An electrical insulation area made from hard rubber is installed on a section nearer to the installation section to the installation piece than the section where the vibrating vanes are mounted on the vibrating rod. An electrical line is connected to the lower section of the vibrating rod on the electrical insulation area side where the vibrating vanes are installed. This electrical line conducts power to the vibrating vanes by way of the lower section of the vibrating rod.
    Type: Grant
    Filed: June 21, 2002
    Date of Patent: March 4, 2008
    Assignee: Japan Techno Co., Ltd.
    Inventor: Ryushin Omasa
  • Patent number: 7200920
    Abstract: The substrate (2) containing the via-hole (3) is inserted into an electrophoretic cell (1) and an electrode (6) (the “first electrode”) is placed on top of a first orifice of the via-hole(s) (3), to be implemented with electrical component(s), so that the electrode (6) totally covers the first orifice. Electrically charged either conductive and/or non-conductive particles are provided by immersing the volume of the via-hole(s) (3) in a conductive medium (17) consisting of the electrically charged particles. An electric field is created between the first electrode (6) and a second electrode (4) through the via-hole(s) (3) and the conductive medium (17) and the electrically charged particles are precipitated on the inner surface of the first electrode (6) that is directed to the second orifice of the via-hole(s) (3), until a desired portion of the volume of the via-hole(s) (3) is filled with a first layer of the charged particles having a desired thickness.
    Type: Grant
    Filed: October 25, 2001
    Date of Patent: April 10, 2007
    Inventor: Israel Schuster
  • Patent number: 7090750
    Abstract: An apparatus and method for treating a substrate to deposit, clean or etch material on a substrate using a first horizontal chuck to which a plurality of substrates is attached and electrically charged. Spaced closely to the first horizontal chuck is a coextensive horizontal second chuck which receives and showers reaction solution over all portions of each substrate. During the reaction process, both chucks are substantially submerged in reaction solution within a tank. At least one of the chucks is attached and controllable from a control arm. At least one of the chucks is rotated about a vertical axis at a slow speed during the reaction process. The axes of rotation of the two chucks may be coincident, or the axes may be offset from each other, and/or one or both axes may be offset from the chuck centerpoint(s). One of the chucks may also be periodically moved in a vertical direction relative to the other chuck.
    Type: Grant
    Filed: August 26, 2002
    Date of Patent: August 15, 2006
    Assignee: Micron Technology, Inc.
    Inventors: Salman Akram, David R. Hembree
  • Patent number: 6936142
    Abstract: A vessel for contacting a plurality of objects with a fluid. An upwardly directed stream of fluid and a portion of the objects are confined in a conduit such that the fluid stream causes the objects to flow upward from a moving bed thereof to a disengaging position from where they fall onto a distribution shield and move downward to a feed position. The vessel may be used for treating electrically conductive objects wherein the fluid is an electrolyte, an electrode is positioned to contact the moving bed, and a counterelectrode is positioned in spaced relation to the moving bed. The vessel may be fixed or portable.
    Type: Grant
    Filed: June 20, 2002
    Date of Patent: August 30, 2005
    Inventors: George Hradil, Edward Hradil
  • Patent number: 6929723
    Abstract: An apparatus for electroplating a rotogravure cylinder out of a plating solution is disclosed. The apparatus includes a plating tank adapted to support the cylinder and to contain a plating solution so that the cylinder is at least partially disposed into the plating solution. The apparatus also includes a non-dissolvable anode at least partially disposed within the plating solution. A current source is electrically connected to the non-dissolvable anode and to the cylinder. An ultrasonic system may be provided to introduce wave energy into the plating solution includes at least one transducer element mountable within the tank and a power generator adapted to provide electrical energy to the transducer element. A holding tank having a circulation pump, a mixing system and heating and cooling elements for the plating solution may be provided.
    Type: Grant
    Filed: November 6, 2001
    Date of Patent: August 16, 2005
    Inventor: Hubert F. Metzger
  • Patent number: 6835299
    Abstract: An electrochemical machining technique involves moving a cathode (2) towards an anodic workpiece (1). A current is passed through an electrolyte which flows between the cathode (2) and workpiece (1) so as to cause material to be removed electrolytically from the workpiece (1). A vibratory movement is imposed on the cathode (2) and the current passed between the cathode (2) and workpiece (1) is also varied. The vibratory movement may consist of a main sinusoidal oscillation and a secondary ultrasonic vibration, and the current variation is synchronized with the main vibration so that current pulses, and ultrasonic vibration pulses, coincide, with a predetermined small phase shift, with peaks of the main vibration corresponding to the smallest gap between the cathode (2) and workpiece (1).
    Type: Grant
    Filed: September 3, 2002
    Date of Patent: December 28, 2004
    Assignee: Ultra Systems Limited
    Inventor: Boris Tchugunov
  • Patent number: 6821405
    Abstract: The invention relates to a device for conveying electrodes, used in the electrolytic refining or electrowinning of metals, from one station to another, particularly when the electrodes are conveyed in an essentially perpendicular direction with respect to the line connecting the electrode support points. According to the invention, in order to convey an electrode, the device is provided with mutually separate members, at least one lift member for a vertical motion of the electrode and at least one conveyor member for the horizontal motion of the electrode.
    Type: Grant
    Filed: November 27, 2001
    Date of Patent: November 23, 2004
    Assignee: Outokumpu Oyj
    Inventor: Tom Marttila
  • Patent number: 6797135
    Abstract: The present invention relates to a method of forming a conductive layer and an electroplating device, and in particular, to a method of forming a conductive layer that provides an electrically-conductive layer having both characteristics of increased adhesiveness to an electroplated body and increased uniformity. The electroplating apparatus and method can produce supersonic waves for electroplating. Thus, the electroplating device can include a wave generator. The electroplating device can further include a plating bath filled with an electrolyte solution that can propagate super sonic waves, a power supply, a plated body connected electrically to a first terminal of the power supply, and a plating body connected electrically to a second terminal of the power supply where the plating body provides ions the same as dissolved in the electrolyte solution to maintain a desired concentration of dissolved ions.
    Type: Grant
    Filed: March 6, 2002
    Date of Patent: September 28, 2004
    Assignee: Hyundai Microelectronics Co., Ltd.
    Inventors: Do-Heyoung Kim, Jae-Jeong Kim, Jae-Hee Ha
  • Patent number: 6776885
    Abstract: An apparatus for plating and planarizing metal on a substrate includes a plurality of dispensing segments, each having at least one hole for dispensing electroplating solution onto the substrate. The dispensing segments form a circular counterelectrode and are movable with respect to each other during an electroplating process, so that the counterelectrode has a variable diameter. The electroplating solution is thus dispensed on an annular portion of the substrate having a diameter corresponding to the diameter of the counterelectrode; accordingly, the variable-diameter counterelectrode permits localized delivery of the plating solution to the substrate.
    Type: Grant
    Filed: November 14, 2002
    Date of Patent: August 17, 2004
    Assignee: International Business Machines Corporation
    Inventors: Laertis Economikos, Hariklia Deligianni, John M. Cotte, Panayotis C. Andricacos
  • Publication number: 20040154927
    Abstract: An improved plating system comprises a plurality of non-electrically conductive shields forming an elongated upper channel and an elongated lower channel, the upper and lower channels each having a width less than or equal to one inch; a plurality of part holding clamps electrically coupled to a power source and positioned within the upper channel or the lower channel; a plating solution sparger comprising a series of inlets oriented to direct any plating solution flowing through the inlets into the lower channel and towards the upper channel; and a plurality of anodes positioned outside and along the length of the upper and lower channels.
    Type: Application
    Filed: January 26, 2004
    Publication date: August 12, 2004
    Inventors: Paul Silinger, Mark Fery
  • Patent number: 6773559
    Abstract: Although there are several inventions disclosed herein, the present application is directed to a reactor for electrochemically processing a microelectronic workpiece. The reactor comprises a movable electrode assembly that is disposed for movement along a motion path. The motion path includes at least a portion thereof over which the electrode assembly is positioned for processing at least one surface of the microelectronic workpiece. A cleaning electrode is located along the motion path of the movable electrode assembly. In one embodiment, a programmable controller is connected to direct the movable electrode assembly to move to the cleaning electrode during a cleaning cycle. At that time, the programmable controller connects the movable electrode assembly as an anode and the cleaning electrode as a cathode for cleaning of the movable electrode assembly.
    Type: Grant
    Filed: February 13, 2001
    Date of Patent: August 10, 2004
    Assignee: Semitool, Inc.
    Inventors: Daniel Woodruff, Steve Eudy, James Erickson, Thomas Oberlitner, Matthew Egloff