Electrode Feeding Or Withdrawal Means Patents (Class 204/225)
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Patent number: 6017437Abstract: A processing chamber for depositing and/or removing material onto/from a semiconductor wafer when the wafer is subjected to an electrolyte and in an electric field. A hollow sleeve is utilized to form a containment chamber for holding the electrolyte. A wafer residing on a support is moved vertically upward to engage the sleeve to form an enclosing floor for the containment chamber. One electrode is disposed within the containment chamber while the opposite electrode is comprised of several electrodes distributed around the circumference of the wafer. The electrodes are also protected from the electrolyte when the support is raised and engaged to the sleeve. In one embodiment, the support and the sleeve are stationary during processing, while in another embodiment, both are rotated or oscillated during processing.Type: GrantFiled: August 22, 1997Date of Patent: January 25, 2000Assignee: Cutek Research, Inc.Inventors: Chiu H. Ting, William H. Holtkamp, Wen C. Ko, Kenneth J. Lowery, Peter Cho
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Patent number: 5997701Abstract: The invention relates to an apparatus for the galvanic deposition of a metal layer on a substrate and comprises a substrate holder connected to a drive shaft that extends in a direction perpendicular to a surface of the substrate. The cathode current is supplied to the substrate by the drive shaft. The drive shaft has an outer insulating layer. The substrate is held in contact with a contact plate by a supporting ring on the outer periphery of a supporting plate. The contact plate rests on a base of the supporting plate and has a central sleeve connectable with the drive shaft. A mounting portion is provided in the base around the sleeve and a tube portion is inserted into the mounting portion in a sealing and detachable manner. An internally threaded ring is arranged on the drive shaft and is shiftable along the longitudinal axis of the drive shaft.Type: GrantFiled: February 9, 1998Date of Patent: December 7, 1999Assignee: Sono Press Produktionsgesellschaft Fur Ton-Und Informationstrager mbHInventor: Michael Bock
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Patent number: 5985127Abstract: A method of removing a metallic erosion shield secured by a layer of non-metallic adhesive to a leading edge structure of a helicopter rotor blade comprising, the step of providing an electric field between the metallic component and an electrode, in the presence of an electrolyte between the metallic component and the electrode whereby the erosion shield is removed by an electrochemical process.Type: GrantFiled: January 14, 1998Date of Patent: November 16, 1999Assignee: GKN Westland Helicopters LimitedInventor: Richard David Greenslade
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Patent number: 5976329Abstract: This invention relates to an apparatus for the galvanic deposition of a ml layer on a substrate. The apparatus comprises a container for holding an electrolyte, and an anode container filled with an anode material and having an essentially planar exit surface for the metal ions of the anode material. A substrate holder is connected to a drive shaft that is supported in a drive means mounted on a cover of the container. The cover is pivotable about a pivoting axis of a pivoting means mounted on the side of the container opposite to the anode container. An adjusting plate permits the substrate surface to be adjusted with respect to the exit surface of the anode container facing the substrate surface. The invention provides a more uniform deposition of metal ions on the substrate surface.Type: GrantFiled: March 13, 1998Date of Patent: November 2, 1999Assignee: Sono Press Produktionsgesellschaft Fur Ton-Und Informationstrager MBHInventors: Michael Bock, Wittold Krawczyk, Klaus Prenzel, Rudolf Opitz
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Patent number: 5958195Abstract: The tube inner surface electropolishing device includes an electrolyte delivery system to cause electrolyte to flow through the tube whose inner surface must be electropolished. An electrical cable having an electrode engaged to its distal end is slowly moved through the tube while an electrical current from a power supply passes through the electrode and the tube wall and the electrolyte flowing therebetween. Several electrode embodiments are disclosed including electrodes that include a chain of elements having alternating insulator and electrode elements, an electrode including a quantity of metallic wool enclosed in a permeable insulating member, and a flexible insulating member formed from a cylindrical tubular section which is axially compressible to produce a series of projecting flexible arms, so that any one section can be compressed to enter a smaller opening than the tube to be polished.Type: GrantFiled: May 22, 1997Date of Patent: September 28, 1999Assignee: Therma Corporation, Inc.Inventors: Thomas A. Lorincz, Joseph P. Parisi
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Patent number: 5948219Abstract: A lithographic apparatus and method are presented which use an electric field to form features from a desired material upon an upper topography of a semiconductor substrate. A layer of an electric field resist material is formed over a layer of the desired material upon the upper topography of the semiconductor substrate. The electric field resist layer is then patterned by exposure to an electric field via the apparatus. The apparatus includes a plate and a voltage source. In one embodiment, the plate is electrically conductive and a lower surface of the plate has one or more raised portions with recessed portions existing between adjacent raised portions. The lower surface of the conductive plate is positioned above and in close proximity to the exposed surface of the electric field resist layer. The voltage source applies an electrical voltage between the electrically conductive plate and the semiconductor substrate, creating the electric field.Type: GrantFiled: May 7, 1997Date of Patent: September 7, 1999Assignee: Advanced Micro Devices, Inc.Inventor: Don R. Rohner
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Patent number: 5904820Abstract: The holding clamp of the invention has a first elongated arm and a second shorter arm both being electrically conducting and interconnected in parallel spaced-apart fashion by a transverse pivotal bracket intermediate their lengths. The first elongated arm is fixedly attached at its upper end to a cathode frame bar and downwardly depends therefrom. A lever pivotally attached to the first arm intermediate the cathode bar and the pivotal bracket engage the upper end of the second arm in clamming fashion to forcibly tilt same between a first limit position, in which the lower ends of the two arms are spaced-apart, and a second limit position, in which the arms lower ends abut one another under the action of coil springs. The lower ends of the arm members form a pair of jaws provided with electrically conducting studs engageable axially to one another, the studs and arms lower ends being otherwise enveloped with a fluid-tight and electrically insulating sleeve, except at the studs outer free ends.Type: GrantFiled: January 13, 1998Date of Patent: May 18, 1999Inventors: Howard Brown, Horst Mallok
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Patent number: 5900134Abstract: A method and apparatus is described for producing a large number of identical parts from a bar of material by electrochemical machining without the intervention of an operator. The apparatus comprises a spindle for supporting the bar and periodically feeding it in the direction of its axis, and an electrochemical machining assembly comprising cathodes for shaping the leading end portion of the bar to form the part. After the part has been shaped, it is electrochemically cut from the bar, and the bar is advanced longitudinally by the spindle in order to proceed with the machining of the next part.Type: GrantFiled: December 31, 1996Date of Patent: May 4, 1999Assignee: Societe Nationale d'Etude et de Construction de Monteurs d'Aviation "SNECMA"Inventors: Jacques Marie Pierre Stenneler, Pierre Marc Serge Lechervy
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Patent number: 5885434Abstract: A method for performing fine working of a material by electrochemical reaction comprises a two-step scanning operation in which a surface topography of the material is obtained during a first scan which is used to control the position of a probe during a second scan in which an electrochemical reaction is performed. During the first scan, an electrochemical cell is constructed with a four-electrode system, including the probe, a material to be worked, a reference electrode and a counter electrode. The potential of each of the probe and the material to be worked is set so that no electrochemical reaction occurs during the first scan. Data representative of the surface topography is stored and used to control the position of the probe during the second scan in which an electrochemical cell is constructed with a three-electrode system, including the probe, the material, and the reference electrode.Type: GrantFiled: April 1, 1997Date of Patent: March 23, 1999Assignee: Seiko Instruments Inc.Inventors: Masayuki Suda, Toshihiko Sakuhara, Tatsuaki Ataka
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Patent number: 5877388Abstract: An insulating shield plate (1) divides a room of an electrolysis bath (2) into an anode chamber (13) and a cathode chamber (14). An anode (5) is disposed in the anode chamber (13), and a cathode (6), metallic waste (7) and heater (4) are disposed in the cathode chamber (14). An electrolyte (3) stored in the electrolysis bath (2) flows in a circulation path from a circulating pump (10) through a circulating line (12) and filter (11) to return the electrolysis bath (2). An exhaust gas processing device 9 is connected to the electrolysis bath (2). When a voltage is supplied to the anode (5) and cathode (6), a surface of the metallic waste (7) is charged in a positive polar to dissolve a base metal of the metallic waste (7). Further, a cylindrical anode (33) is arranged in an electrolyte (32) in an electrolysis bath (31), and a cylindrical metal (34) as a metallic waste is arranged in the cylindrical anode (33).Type: GrantFiled: June 6, 1997Date of Patent: March 2, 1999Assignee: Kabushiki Kaisha ToshibaInventors: Masami Enda, Katsumi Hosaka, Hitoshi Sakai, Hideaki Heki
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Patent number: 5837109Abstract: The present invention relates to an apparatus for treating a strip such as a steel strip. The first object is to provide an electrode opening and closing mechanism having a simple construction. The second object is to uniform the flow of a solution around the electrode. The third object is to prevent causing irregularities in the treatment, caused by the variation of surface level of the solution between the electrodes. To attain the first object, one of the mutually facing electrodes is stationarily secured, and there is provided an opening and closing mechanism for moving the other electrode. To attain the second object, stabilizing members for solution flow are provided on the electrodes, a fluid-storing room is formed between the stabilizing member for solution flow and the electrode, and a slit-shaped hole for uniformly flowing the solution between the electrodes from the fluid-storing room, is formed at right angles to the travelling direction of the strip.Type: GrantFiled: January 31, 1997Date of Patent: November 17, 1998Assignee: Toyo Kohan Co., Ltd.Inventors: Tadashi Fujii, Eiichiro Sugioka
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Patent number: 5820744Abstract: Electrochemical machining (ECM) techniques utilizing real-time parameter monitoring, alarms and feedback control for improved machining of a workpiece are disclosed. The ECM device utilizes one or more cathodes, an electrolyte and a positively charged workpiece to achieve electrolytic action. A number of controlling variables, such as cathode feed rate, electrolyte flow rate and voltage, are balanced in response to measured system parameters. The following parameters are preferably monitored in order to adjust the controlling variables: the drive parameters of feed rate and cathode depth; the pump parameters of flow rate and pressure; and the power components of voltage and current. The flow rate in each of the cathodes, or a corresponding Reynolds number, is preferably utilized to provide an alarm to the operator if a statistically significant change in flow is detected.Type: GrantFiled: September 30, 1996Date of Patent: October 13, 1998Assignee: Doncasters, Turbo Products DivisionInventors: Clifton Vedantus Edwards, Frank P. Simkowski
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Patent number: 5792325Abstract: Electric arc material-processing system wherein an underwater spark gap is defined in a reactor by spaced graphite electrodes and a conductive carbon rod provided endwise to the gap. The electrodes are rotated by mechanical means, intermittently or continuously. Carbon and water are thereby converted into fuel gas, evolving from the arc, and comprising hydrogen as the major constituent and carbon monoxide as predominant minor constituent. Both the fuel and its combustion products are substantially free from contaminants found customarily in petroleum-based fuels and their combustion products. Surplus heat enables water from any source to be rendered potable.Type: GrantFiled: September 5, 1996Date of Patent: August 11, 1998Inventor: William H. Richardson, Jr.
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Patent number: 5779864Abstract: Disclosed herein are methods of measuring, adjusting and uniformalizing a sectional area ratio of a metal-covered electric wire, a method of cleaning an electric wire, a method of manufacturing a metal-covered electric wire, an apparatus for measuring a sectional area ratio of a metal-covered electric wire, and an apparatus for electropolishing a metal-covered electric wire.Electric resistance values of first and second materials are previously stored respectively so that a sectional area ratio of a metal-covered electric wire is calculated on the basis of the as-stored values and an actually measured electric resistance value of the metal-covered electric wire. Measurement and uniformalization of a sectional area ratio of a metal-covered electric wire and cleaning of an electric wire are carried out by dissolving surface layer parts of the electric wires by electropolishing.Type: GrantFiled: January 28, 1997Date of Patent: July 14, 1998Assignee: Sumitomo Electric Industries, Ltd.Inventors: Akira Mikumo, Kenichi Takahashi, Masanobu Koganeya
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Patent number: 5759384Abstract: A halogen generator produces a halogen sanitizing agent to sanitize water in a spa or other water feature. A coaxial wall fitting desirably couples the halogen generator to the water feature. The halogen generator desirably includes a bipolar electrolytic cell in which a center electrode plate rotates between stationary anode and cathode plates. The bipolar electrode includes a plurality of vanes which motivate water flow between the anode and the cathode. The vanes on the rotating electrode also produce a flow of water through the generator. In this manner, the bipolar electrode functions as a impeller to pump water through the halogen generator. The vanes are positioned between the electrode and cathode, and are sufficiently spaced from the cathode to inhibit scale formation on the cathode. The vanes, however, generally do not contact the cathode when rotating.Type: GrantFiled: May 13, 1996Date of Patent: June 2, 1998Assignee: BioquestInventor: Michael A. Silveri
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Patent number: 5736014Abstract: The device for the selective treatment of the surface of workpieces by flooding the workpieces with a treatment liquid comprises a bath (1), interchangeable holders (10) in the bath for the workpieces, at least one pip (15-21) leading into the bath (1) taking the liquid to the holders (10) and at least one outlet pipe (26) for the liquid leaving the bath (1). The holders (10) are fitted on an extractor (7) and in the side walls of the bath (10) there is a closable access (31) through which the extractor (7) can be removed.Type: GrantFiled: April 1, 1996Date of Patent: April 7, 1998Assignee: Stohrer-Doduco GmbH & Co.Inventors: Hermann A. Drese, Werner Emde, Klaus Knorr
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Patent number: 5736015Abstract: An electrical discharge machining apparatus is disclosed having a frame with a base and a vertical support secured to and extending upwardly from the base. A tank adapted to contain an electrolytic liquid is secured to the vertical support by an adjustment mechanism which enables the vertical position of the tank to be varied. A work holder is optionally pivotally secured to the top of the vertical support and movable between a work position in which the work support and work are aligned with the tank and an inspection position in which the work holder is laterally spaced from the tank. Electrical discharge electrodes are contained within the tank while a servo motor vertically moves the work support with its attached work against the electrodes to perform the machining operation. The electrical discharge apparatus is particularly suited for dental prosthesis applications.Type: GrantFiled: September 6, 1996Date of Patent: April 7, 1998Assignee: Pilot Industries, Inc.Inventors: Charles Armentrout, Lesley A. Calvert, Lawrence Davies, John Jarchow, Michael Pulka, Jon Thomson
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Patent number: 5730855Abstract: An anode positioning hoist supported on an overhead crane used in a smelting apparatus including a cathode with an upwardly facing surface and an anode with a downwardly facing surface. The anode positioning hoist includes a pair of channel members defining opposed vertical channels and a cylinder/piston assembly including a cylinder located between the channel members and a piston rod extending downwardly from the cylinder. A carrier is fixed to the piston rod for movement therewith and includes rollers guided in the channels. A connector assembly is mounted on the carrier to releasably secure the anode to the carrier. A control system including a counterbalance valve mounted on the cylinder and a pressure switch operates to cause extension of the piston rod until the downwardly facing surface of the anode engages the upwardly facing surface of the cathode. The control system thereafter causes retraction of the piston rod a predetermined distance to provide a desired anode-cathode gap.Type: GrantFiled: January 16, 1996Date of Patent: March 24, 1998Assignee: Harnischfeger CorporationInventors: Roger D. Luebke, Randy H. Khoury
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Patent number: 5695621Abstract: A resonating electroplating anode electrode for electroplating the inside surfaces of steam generator tubing. The resonating electroplating anode electrode is formed from a plurality of tubular ceramic resonating material pieces glued to the inside and/or to one end of an anode tube to create a single resonating volume. In operation, an electrolyte solution is fed to the outside of the electrode in an annulus formed between the steam generator tube and the anode and returns through a hollow center in the anode. During use, the resonating materials resonate within the electrolyte solution during the electroplating process, thus creating an ultrasound enhanced-electroplating process.Type: GrantFiled: July 31, 1996Date of Patent: December 9, 1997Assignee: Framatome Technologies, Inc.Inventors: Mihai G. M. Pop, James E. Galford, Donald R. Stewart
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Patent number: 5685971Abstract: A method and apparatus for forming a passage with a variable diameter along its length in a conductive workpiece are disclosed. The workpiece is mounted in a fixture and an externally insulated hollow electrode is positioned proximate to a surface location of the workpiece into which the passage is to be formed. A first selected voltage is connected between the electrode and the workplace with the voltage being connected to cause the electrode to act as a cathode and the workpiece to act as an anode. A pump causes an acidic electrolyte to flow through the electrode at a chosen pressure and onto the workpiece surface. The electrode is moved toward the workpiece at a first selected feed rate by a CNC controller to cause a portion of the passage to be formed at a first predetermined diameter.Type: GrantFiled: September 30, 1991Date of Patent: November 11, 1997Assignee: General Electric CompanyInventors: Lawrence Joseph Schroder, Lathan Merriman Wayman, Oleg Edelman
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Patent number: 5667646Abstract: A dressing apparatus comprises at least two electrode pieces each having an arcuate inner surface and being arranged around a grinding stone to define a gap therebetween. A gap adjusting mechanism adjusts the gap between the arcuate inner surface of each of the electrodes and the grinding stone and maintains the gap between the arcuate inner surface of each electrode and the grinding stone equal to each other.Type: GrantFiled: April 10, 1996Date of Patent: September 16, 1997Assignee: Seiko Seiki Kabushiki KaishaInventor: Katsura Tomotaki
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Patent number: 5662783Abstract: An electrode assembly (10) for an electrochemical machining apparatus comprises a plurality of electrodes (18,20) for location adjacent a workpiece (12) to be machined, at least one of the electrodes (18,20) being movable towards the workpiece (12) during an electrochemical machining operation. The moveable electrodes (18,20) have a machining face (19,21) shaped to a desired contour and at least one side member (32,34) arranged to move with the electrodes (18,20) as the electrodes approach the workpiece (12). The side members (32,34) are fixed to and move with the electrodes (18,20) at all times during the electrochemical machining operation.Type: GrantFiled: April 23, 1996Date of Patent: September 2, 1997Assignee: Rolls-Royce plcInventors: Alan J. Cannon, Alan D. Staines
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Patent number: 5658441Abstract: An apparatus for spraying electroplating of metal onto a panel surface that moves through a plating chamber employs roller brushes positioned between electrolyte spray heads and the panel. Metal anodes are positioned to contact the fluffy, absorbent outer layer of the roller brushes while they are being wet by the electrolyte to provide for electrical contact between the anodes and the panel being plated. A suitable power supply has its positive terminal connected to the anodes and its negative terminal connected to the moving panel.Type: GrantFiled: December 18, 1995Date of Patent: August 19, 1997Assignee: CFC, Inc.Inventors: Robert J. Spain, Steven P. Glassman
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Patent number: 5620586Abstract: The present invention is concerned with a method for electrorefining silver in a Moebius cell whereby the anode is completely dissolved and the gold mud is removed without handling of any partially dissolved anodes. The cell is conventional except that the anodes are placed in a basket made of a thermoplastic material and surrounded by a cloth, the electrical contact between the anode and the power source takes place outside the electrolyte. The bottom of the basket is provided with apertures allowing the gold mud produced to tall into the cloth until the anode is completely dissolved.Type: GrantFiled: November 27, 1995Date of Patent: April 15, 1997Assignee: Noranda, Inc.Inventors: Pierre Claessens, John L. Cromwell
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Patent number: 5614076Abstract: An electroetching tool using scanned localized application of flowing electrolyte against a workpiece such as a large area mask having high density features for the fabrication of microelectronic components. A masked molybdenum plate is suspended in a vertical direction within a tank which functions as a reservoir for a recirculating electrobyte. The electrolyte in the reservoir is filtered and pumped to a pair of travelling cathode assemblies from which the flowing electrolyte is simultaneously applied through respective charged orifices to both sides of the workpiece. The workpiece is masked on its opposite sides with mirror imaged mask apertures having corresponding opposite-sided features in registration with each other.Each orifice through which the electrolyte is applied comprises an open groove in the surface of a block of polyvinal chloride material which groove extends in a vertical direction relative to the tank. The bottom of the groove is adjacent to a conductive plate.Type: GrantFiled: February 29, 1996Date of Patent: March 25, 1997Assignee: International Business Machines CorporationInventors: Denis J. Brophy, Madhav Datta, Derek B. Harris, Frank S. Ryan, Frank A. Spera
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Patent number: 5571389Abstract: Device for the electrochemical treatment, in particular localized, of a conducting substrate, which comprises a casing provided with an opening and delimiting a space, an electrode arranged in this space and intended to be connected to one of the terminals of a source of electric current, the conducting substrate being intended to be connected to the other terminal of this source, and an electrolyte inlet and an electrolyte outlet, both communicating with the said space, characterized in that it moreover comprises a body made of absorbent, flexible material which does not conduct electricity and which is permeable to gases and liquids, this body being in contact with the said electrode and closing off the said opening, projecting beyond the latter, a first pump mounted on the said electrolyte inlet and a second pump mounted on the said electrolyte outlet, the flow rate of the second pump being greater than that of the first pump and fixed in relation to that of the first pump, so as to create an underpressureType: GrantFiled: December 13, 1994Date of Patent: November 5, 1996Assignee: DalicInventor: Patrick K. Kerampran
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Patent number: 5567300Abstract: A high speed electrochemical metal removal technique provides for planarization of multilayer copper interconnection in thin film modules. The process uses a neutral salt solution, is compatible with the plating process and has minimum safety and waste disposal problems. The process offers tremendous cost advantages over previously employed micromilling techniques for planarization.Type: GrantFiled: September 2, 1994Date of Patent: October 22, 1996Assignee: IBM CorporationInventors: Madhav Datta, Terrence R. O'Toole
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Patent number: 5549799Abstract: An anode positioning hoist supported on an overhead crane used in a smelting apparatus including a cathode with an upwardly facing surface and an anode with a downwardly facing surface. The anode positioning hoist includes a pair of channel members defining opposed vertical channels and a cylinder/piston assembly including a cylinder located between the channel members and a piston rod extending downwardly from the cylinder. A carrier is fixed to the piston rod for movement therewith and includes rollers guided in the channels. A connector assembly is mounted on the carrier to releasably secure the anode to the carrier. A control system including a counterbalance valve mounted on the cylinder and a pressure switch operates to cause extension of the piston rod until the downwardly facing surface of the anode engages the upwardly facing surface of the cathode. The control system thereafter causes retraction of the piston rod a predetermined distance to provide a desired anode-cathode gap.Type: GrantFiled: December 31, 1992Date of Patent: August 27, 1996Assignee: Harnischfeger CorporationInventors: Roger D. Luebke, Randy H. Khoury
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Patent number: 5543028Abstract: An electroforming/electrodeposition process and apparatus includes a first electrode, a second electrode spaced from the first electrode, a channel defined by the first and second electrodes and at least one electrically nonconductive or poorly conductive shield disposed adjacent at least one electrode. The shield(s) define(s) a region of the channel wherein the surface of a mandrel placed in that region experiences substantially uniform current density. The apparatus may contain additional electroforming/electrodeposition and/or other steps and may be arranged in a carousel apparatus with one or more mandrels to permit continuous operation of the apparatus.Type: GrantFiled: November 23, 1994Date of Patent: August 6, 1996Assignee: Xerox CorporationInventors: William G. Herbert, Patricia Bischoping, Robert P. Altavela, Lawrence Kotowicz, Peter J. Schmitt, Ronald E. Jansen, John H. Lennon, Henry G. Grey
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Patent number: 5531874Abstract: An electroetching tool using scanned localized application of flowing electrolyte against a workpiece such as a large area mask having high density features for the fabrication of microelectronic components. A masked molybdenum plate is suspended in a vertical direction within a tank which functions as a reservoir for a recirculating electrobyte. The electrolyte in the reservoir is filtered and pumped to a pair of travelling cathode assemblies from which the flowing electrolyte is simultaneously applied through respective charged orifices to both sides of the workpiece. The workpiece is masked on its opposite sides with mirror imaged mask apertures having corresponding opposite-sided features in registration with each other.Each orifice through which the electrolyte is applied comprises an open groove in the surface of a block of polyvinal chloride material which groove extends in a vertical direction relative to the tank. The bottom of the groove is adjacent to a conductive plate.Type: GrantFiled: June 17, 1994Date of Patent: July 2, 1996Assignee: International Business Machines CorporationInventors: Denis J. Brophy, Madhav Datta, Derek B. Harris, Frank S. Ryan, Frank A. Spera
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Patent number: 5516412Abstract: An electroplating cell includes a floor, ceiling, front wall, and back wall forming a box having first and second opposite open ends. A rack for supporting an article to be electroplated is removably positioned vertically to close the first open end and includes a thief laterally surrounding the article to define a cathode. An anode is positioned vertically to close the second open end, with the assembly defining a substantially closed, six-sided inner chamber for receiving an electrolyte therein for electroplating the article. The article and surrounding thief are coextensively aligned with the anode, with the floor, ceiling, front and back walls being effective for guiding electrical current flux between the cathode and the anode. In a preferred embodiment, the cell is disposed as an inner cell inside an outer cell substantially filled with the electrolyte, and a paddle is disposed inside the inner cell for agitating the electrolyte therein.Type: GrantFiled: May 16, 1995Date of Patent: May 14, 1996Assignee: International Business Machines CorporationInventors: Panayotis C. Andricacos, Kirk G. Berridge, John O. Dukovic, Matteo Flotta, Jose Ordonez, Helmut R. Poweleit, Jeffrey S. Richter, Lubomyr T. Romankiw, Otto P. Schick, Frank Spera, Kwong-Hon Wong
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Patent number: 5507923Abstract: An apparatus is provided for electrolytically polishing the inside surface of tubular products such as rifled stock, or fiream or artillery barrels. The apparatus comprises a first and second reservoir in fluid communication through the tubular product with an electrolyte flow system. A cathode head is provided that is displaced from one reservoir to the other in the presence of flowing electrolyte and at a current density of between 1 and 5 amp-min/sq. in. A method of electrolytically polishing tubular products is also provided.Type: GrantFiled: November 9, 1993Date of Patent: April 16, 1996Inventors: Henry J. Stouse, Mark D. Stouse, R. Keith Raney
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Patent number: 5507924Abstract: Disclosed herein are methods of measuring, adjusting and uniformalizing a sectional area ratio of a metal-covered electric wire, a method of cleaning an electric wire, a method of manufacturing a metal-covered electric wire, an apparatus for measuring a sectional area ratio of a metal-covered electric wire, and an apparatus for electropolishing a metal-covered electric wire.Electric resistance values of first and second materials are previously stored respectively so that a sectional area ratio of a metal-covered electric wire is calculated on the basis of the as-stored values and an actually measured electric resistance value of the metal-covered electric wire. Measurement and uniformalization of a sectional area ratio of a metal-covered electric wire and cleaning of an electric wire are carried out by dissolving surface layer parts of the electric wires by electropolishing.Type: GrantFiled: January 31, 1994Date of Patent: April 16, 1996Assignee: Sumitomo Electric Industries, Ltd.Inventors: Akira Mikumo, Kenichi Takahashi, Masanobu Koganeya
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Patent number: 5458756Abstract: A system for making porous silicon on blank and patterned Si substrates by "immersion scanning", particularly suitable for fabricating light-emitting Si devices and utilizing an open electolytic cell having a cathode and an opposing anode consisting of a Si substrate on which the porous silicon is to be formed, both disposed, with their opposing surfaces in parallel, in an aqueous HF solution electrolyte contained in the cell. The substrate anode is mounted to be movable relative to the electrolyte so as to be mechanically cycled or scanned in and out of the electrolyte at a programmable rate during anodization. The uniformity, thickness and porosity of the resulting anodized layer on the substrate are determined by the scanning speed, number of cycles, current density, and HF-based electrolyte parameters of the system, and the Si substrate resistivity, conductivity type, and crystal orientation.Type: GrantFiled: June 27, 1994Date of Patent: October 17, 1995Assignee: International Business Machines CorporationInventors: Ernest Bassous, Jean-Marc Halbout, Subramanian S. Iyer, Vijay P. Kesan
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Patent number: 5456812Abstract: A device for silverizing water comprises an electrode head provided with two electrodes of which at least one electrode is a silver containing electrode, means for supplying current to said electrodes, a housing provided with a cavity, and connecting means for connecting said electrode head with said housing turnably between a working position in which said electrode head is located outside said housing so that said electrode can be introduced in a reservoir with water, and a storage position in which said electrode head is turned back into said cavity of said housing.Type: GrantFiled: June 14, 1994Date of Patent: October 10, 1995Inventor: Maryan Chak
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Patent number: 5441629Abstract: An electroplating apparatus includes a casing having a large opening at the bottom, a substrate being electroplated in the casing, a plating solution injector penetrating through an upper part of the casing for introducing a plating solution into the casing, an exhaust port penetrating through an upper part of the casing for draining the plating solution, a vertically movable substrate stage disposed beneath the casing for holding the substrate and having an opening smaller than the substrate, and a spin chuck for carrying the substrate to the substrate stage. In this apparatus, initially, the substrate is put on the spin chuck. Then, the substrate stage moves up and closes the casing from the bottom, and the substrate is electroplated in the casing. After the electroplating, the substrate stage moves down, and the substrate is transferred to the spin chuck. Automatic transfer of the substrate is possible using a uniaxial robot that moves only in the vertical or horizontal directions.Type: GrantFiled: February 7, 1994Date of Patent: August 15, 1995Assignee: Mitsubishi Denki Kabushiki KaishaInventor: Katsuya Kosaki
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Patent number: 5409593Abstract: A device is provided for brush electroplating a surface of a workpiece. The device includes an anode generally composed of a metal to be electroplated on the surface of the workpiece. The anode is selectively retained within a cavity formed in a lower surface of a carrier piece composed of a generally electrical non-conductive material. The lower surface of the carrier piece is shaped to conform to at least a portion of the surface of the workpiece. An absorbent material extends over the lower surface of the carrier piece to form a brush. The cover material and lower surface of the anode are spaced from each other to form a chamber. The device also includes an assembly, fluidly connected to the space between the anode and absorbent material, to inject a flow of the electrolytic fluid into the chamber.Type: GrantFiled: December 3, 1993Date of Patent: April 25, 1995Assignee: Sifco Industries, Inc.Inventor: Michael Moskowitz
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Patent number: 5395503Abstract: Methods and apparatuses are described for determining the presence of an analyte in a sample suspected of containing the analyte. The method comprises contacting a concentrate of a determinable element capable of being detected by means of a semiconductive electrode with the electrode in the presence of a relatively large volume of an assay medium. The determinable element is present in the concentrate in the amount related to the amount of analyte present in the sample. The volume of the medium in diffusive communication with the concentrate is then reduced and the determinable element is detected by means of the effect that the determinable element has on the semiconductive electrode.Type: GrantFiled: September 29, 1993Date of Patent: March 7, 1995Assignee: Molecular Devices CorporationInventors: John W. Parce, Robert F. Zuk
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Patent number: 5391276Abstract: The invention relates to a device for screening off lines of electric flux in an installation for electrolytic processing of substantially plate-shaped material in the form of one or more workpieces which is held underneath a goods carrier and immersed in a bath when the goods carrier is lowered. A screen is provided which is adjustable in the vertical direction by a hold-down mechanism which is coupled with the movement of the goods carrier. The hold-down mechanism includes rods which project downward from the goods carrier to bear on two end regions of the screen. The lower ends of the rods and the end regions of the screen are constructed in such a way that the screen cannot be displaced relative to the rods at least in its longitudinal direction. The distance between the rods is greater than the width of the material to be processed which is located between the rods during processing.Type: GrantFiled: October 28, 1993Date of Patent: February 21, 1995Assignee: Atotech Deutschland GmHInventors: Kurt Astor, Peter Haase, Manfred Gute
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Patent number: 5387331Abstract: A wafer cutting device has a plurality of individually highly tensioned diamond impregnated wires that are mounted in a translatable head. Each wire has a tension monitor connected thereto for the purpose of insuring uniform tension and also alerting to breakage. Further, a differential DC voltage is applied to the wires and the crystal with the assistance of electrolytes to improve the removal of material for minimizing damage to the surfaces. The crystal is mounted on a two dimensional stage. During normal cutting the crystal is moved vertically into the cutting wire. The vertical cutting rate is adjusted due to the configuration of the crystal. At the end of cutting, the crystal is moved laterally so as to place a notch in the wafers for the purpose of removing the wafer in a clean break.Type: GrantFiled: May 19, 1994Date of Patent: February 7, 1995Assignee: The United States of America as represented by the Secretary of the Air ForceInventors: Brian S. Ahern, David W. Weyburne, Gerald W. Iseler, Harry R. Clark, Jr.
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Patent number: 5382343Abstract: A plating head includes a prismatic body containing a series of ducts connected via a supply duct to a source of pressurized electrolyte, and a series of ducts connected via a discharge channel to a suction source provided by a venturi in which a partial vacuum is generated by the flow of pressurized electrolyte through a branch duct.Type: GrantFiled: February 8, 1993Date of Patent: January 17, 1995Assignee: EESA Electroplating Engineers S.A.Inventor: Eric Zwerner
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Patent number: 5362366Abstract: A novel anode-cathode arrangement for the electrowinning of aluminum from alumina dissolved in molten sales, consisting of an anode-cathode double-polar electrode assembly unit or a continuous double polar assembly in which the anode and cathode are bound together and their interelectrode gap is maintained substantially constant by connections made of materials of high electrical, chemical, and mechanical resistance. Novel, multi-double-polar cells for the electrowinning of aluminum contain two or more of such anode-cathode double-polar electrode assembly units. This arrangement permits the removal of reimmersion into any of the anode-cathode double-polar electrode assembly units during operation of the multi-double-polar cell whenever the anode and or the cathode or any part of the electrode unit needs reconditioning for efficient cell operation.Type: GrantFiled: April 27, 1992Date of Patent: November 8, 1994Assignee: Moltech Invent S.A.Inventors: Vittorio de Nora, Jainagesh A. Sekhar
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Patent number: 5324406Abstract: An automatic electrodeposition apparatus is disclosed. The desired substrate is brush plated by moving the brush on top of the plate. The brush may be selectively, and sequentially supplied with any one of a number of working solutions comprising conventional cleaning and plating solutions. De-ionized water and pressurized air may also be selectively fed to the brush for cleaning at desired time or job intervals throughout operation of the machine. A programmable logic controller controls feed of working solution, water, and air flow to the brush. It also controls brush movement and monitors electrodeposition through measurement of ampere-hours spent during operation.Type: GrantFiled: September 10, 1992Date of Patent: June 28, 1994Assignee: Tosoh SMD, Inc.Inventors: Edward M. Anderson, Martin L. Blazic, Susan M. Lannutti
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Patent number: 5314598Abstract: A method of electrochemically machining a workpiece made of electrically conductive material so as to provide a radius on an edge of the workpiece comprises, (a) providing a cathodic tool comprising a cathode section sandwiched between two anode sections and separated therefrom by insulation, (b) locating the tool adjacent to but separate from the workpiece so that the cathode section is positioned centrally over the edge of the workpiece to be radiused and the anode sections lie facing opposite sides of the edge, (c) causing electrolyte to flow between the tool and the workpiece, (d) applying a cathodic voltage to the cathode section, (e) applying preselected anodic voltages simultaneously to the workpiece and the anode sections so that electrical field null points between the cathodic tool and the workpiece lie either side of the edge to be radiused, and (f) varying the electrical field between the tool and the workpiece so as to cause the null points in the electrical field to move with respect to each othType: GrantFiled: September 29, 1992Date of Patent: May 24, 1994Assignee: Rolls Royce PLCInventors: Derek A. Glew, Alan D. Staines, Alan J. Cannon, Roger N. Dunlop
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Patent number: 5294306Abstract: Method and apparatus for controlling the temperature of a molten salt, electrolytic demagging cell wherein an operating condition of the cell (e.g., current, temperature, etc.) is measured and a cathode immersed in the cell's electrolyte is moved to and fro the aluminum melt in the cell in response to the measured condition to vary the heat input to the cell.Type: GrantFiled: November 23, 1992Date of Patent: March 15, 1994Assignee: General Motors CorporationInventors: Norman E. Howard, Basant L. Tiwari
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Patent number: 5288383Abstract: A method and apparatus for adjusting the distance between the anodes and cathodes in an electrolysis cell includes first and second anode beams, movably disposed in an upper and lower relationship. The anode beams are interconnected by a spindle having upper and lower portions which are oppositely threaded such that rotating the spindle in a first direction moves the beams towards each other and rotating the spindle in the other direction moves the beams away from each other. Cell anodes are selectively attached to one of the anode beams, dependant on the desired direction of adjustment. By attaching the anodes to one or the other anode beam, as they are cycled towards and away from each other, individual anode adjustment in either direction can be achieved. If desired, an essentially constant downward motion may also be provided, without requiring a halt in cell operation. Consequently, cell efficiency is increased and the cell remains on-line for longer periods, increasing production capacity.Type: GrantFiled: March 8, 1990Date of Patent: February 22, 1994Assignee: VAW Aluminum AktiengesellschaftInventors: Volker Sparwald, Gerald Peychal-Heiling
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Patent number: 5287060Abstract: A conductivity sensor adapted for use in the conductimetric analysis of liquids includes a pair of conductivity electrodes incorporated into a conductivity cell assembly having a liquid flow control chamber, sensing chamber, and liquid exit chamber. Liquids to be measured are pumped into the liquid flow control chamber, where any turbulence in the liquid is dampened. The non-turbulent liquid is passed from the liquid flow control chamber to the sensing chamber, where the conductivity of the liquid is determined. The sensing chamber is adapted for changing the height of a column of liquid between the pair of conductivity electrodes in order to vary the cell constant of the sensor. The non-turbulent liquid is passed from the sensing chamber to the liquid exit chamber, where it exits the sensor. The sensor is well-suited for use in measuring conductivities of plating bath solutions and monitoring concentrations of major constituents of plating bath solutions.Type: GrantFiled: November 17, 1992Date of Patent: February 15, 1994Assignee: Hughes Aircraft CompanyInventors: Vilambi N. Reddy, Bruce M. Eliash, Frank A. Ludwig, Nguyet H. Phan
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Patent number: 5286355Abstract: The invention is a process for making sharp tips. A computer controlled instrument and process characterizes the tip while in formation and reliably produces tips having a radius of curvature of approximately 100 nm. In the invention, the position of the wire during the etching operation is mechanically controlled while the etching current is monitored. When the current reaches a predetermined level, the process is halted.Type: GrantFiled: August 12, 1991Date of Patent: February 15, 1994Assignee: The Johns Hopkins UniversityInventors: Raul Fainchtein, Paul R. Zarriello
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Patent number: 5284554Abstract: The present invention describes a high speed, high precision electrochemical micromachining tool, chemical solution and method for the one sided through-mask micropatterning of conducting foils and films supported by insulating material. The tool of the present invention can include either a movable plate means allowing for the movement of the workpiece to and fro above the cathode assembly, or a movable cathode assembly means allowing for the movement of said cathode assembly to and fro beneath the workpiece. Said cathode assembly also consists of a nozzle assembly from which the electrolytic solution emerges as electrolytic shower and impinges upon the workpiece. Methods to resolve the problems related to the loss of electrical contact during the electrochemical micromachining process are also described.Type: GrantFiled: January 9, 1992Date of Patent: February 8, 1994Assignee: International Business Machines CorporationInventors: Madhav Datta, Lubomyr T. Romankiw
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Patent number: 5244548Abstract: An apparatus for electrochemically machining a workpiece having first and second platforms and an airfoil extending transversely therebetween includes a first cathode trio having a center cathode disposed between first and second cathodes. The center cathode is configured for electrochemically machining a first side of the airfoil, and the first and second cathodes are configured for electrochemically machining at least the first and second platforms adjacent to the airfoil first side. The first and second cathodes are movable relative to the center cathode so that they move away from each other and toward the opposing platforms during machining. A second cathode trio is provided for electrochemically machining the airfoil second side.Type: GrantFiled: May 6, 1992Date of Patent: September 14, 1993Assignee: Lehr Precision Inc.Inventors: Norbert A. Bruns, Edward C. Bruns, Richard F. Fussner, John S. Reynolds