And Additional Electrical Conductor Of Diverse Material Patents (Class 204/288.2)
  • Patent number: 11444296
    Abstract: A membrane humidifier has multiple stacking units mounted one on top of the other, where an individual stacking unit includes a flow plate and diffusion unit, where a circumference of the diffusion unit is formed by two oppositely situated first edge sides and two oppositely situated second edge sides. The diffusion unit includes: a top layer on a top side of the diffusion unit, a bottom layer on a bottom side of the diffusion unit, a moisture-permeable membrane, two oppositely situated upper receiving elements at the two first edge sides, on the top side of the diffusion unit, and two oppositely situated lower receiving elements at the two second edge sides, on the bottom side of the diffusion unit, where the flow plate of the stacking unit is inserted into the two lower receiving elements, and where the next stacking unit is inserted into the two upper receiving elements.
    Type: Grant
    Filed: June 7, 2019
    Date of Patent: September 13, 2022
    Assignee: Bayerische Motoren Werke Aktiengesellschaft
    Inventors: Marc Becker, Thomas Hoefler, Hubert Wimmer
  • Patent number: 10611651
    Abstract: An electrode module including electrode plates spaced from one another by spacing means, a plurality of support members each extending through each electrode plate and at least one spacing means between two adjacent electrode plates for releasable securing of the electrode plates together, and each electrode plate includes a plate portion. Each electrode plate includes one supporting and connection lug portion configured to support each electrode plate at a first busbar or a second busbar in an electrochemical reactor for electrically connecting each electrode plate of the electrode module with a first busbar or a second busbar for supplying electrical current between one of the first busbar and the second busbar and each electrode plate of the electrode module.
    Type: Grant
    Filed: December 21, 2016
    Date of Patent: April 7, 2020
    Assignee: OUTOTEC (FINLAND) OY
    Inventors: Mika Martikainen, Mikko Karhu, Matti Luukkonen, Niko Isomäki, Tuomas Van Der Meer
  • Patent number: 9388501
    Abstract: An electrolytic cathode assembly includes a hollow hanger bar, and a deposition plate including an upper edge attached to the hanger bar. The hanger bar can be formed substantially of copper. At least one supporting element can be configured to support the hanger bar. The supporting element(s) can be internally disposed within the hanger bar, and can extend partially between bar ends of the hanger bar. The supporting element(s) can include first and second supporting elements, with each disposed adjacent to a respective one of the bar ends. The hanger bar can include an overhanging portion, and the supporting element(s) can be at least partially disposed within the overhanging portion. The supporting element(s) can include an inward end that is offset inwardly relative to the plate edges of the deposition plate.
    Type: Grant
    Filed: October 18, 2011
    Date of Patent: July 12, 2016
    Assignee: EPCM SERVICES LTD.
    Inventors: Robert Stanley Jickling, Gordon Steven Iverson, John Douglas Jickling
  • Patent number: 9222183
    Abstract: An electrolytic cell anode, including an encasing conductive material configured to encase a dense conductive material and define the electrolytic cell anode, wherein the dense conductive material has an electrical conductivity greater than that of the encasing conductive material.
    Type: Grant
    Filed: July 30, 2013
    Date of Patent: December 29, 2015
    Assignee: Alcoa Inc.
    Inventor: Leroy E. D'Astolfo, Jr.
  • Patent number: 8961751
    Abstract: A cell for direct treatment of liquid using electrolysis uses a modular construction of electrode plates and spacer assemblies positioned between end plates. Changes in the liquid flow capacity of the cell may be made by changing the number of module housing sections and electrode plate assemblies. The design includes electrode plates that lock into a mating module housing section to resist the pressure of the fluid being treated. The design further provides for multiple fluid flow paths and for automatic cleaning of the cell using standard clean-in-place methods.
    Type: Grant
    Filed: September 30, 2010
    Date of Patent: February 24, 2015
    Assignee: Biolonix, Inc.
    Inventors: James A. Tretheway, Myron F. Miller, Karl W. Marschke, Brian R. Hale, Ajit K. Chowdhury, Jeremy J. Vogel
  • Patent number: 8869873
    Abstract: A method for assembling anodes used in electro winning processes that increases corrosion resistance. The method includes pre-coating the copper bus bar, introducing the copper bar into a mold, peripherally coating the copper bar with a lead-antimony alloy, moving the copper bar to the assembly table, filling a slot in the copper bus bar with a lead-bismuth alloy, introducing the end of a plate into the slot while the lead-bismuth alloy is in a liquid state, and once the lead-bismuth alloy in the slot has solidified, applying reinforcement solder.
    Type: Grant
    Filed: April 4, 2011
    Date of Patent: October 28, 2014
    Inventor: Horacio Rafart Mouthon
  • Publication number: 20130327639
    Abstract: An electrolytic cathode assembly includes a hollow hanger bar, and a deposition plate including an upper edge attached to the hanger bar. The hanger bar can be formed substantially of copper. At least one supporting element can be configured to support the hanger bar. The supporting element(s) can be internally disposed within the hanger bar, and can extend partially between bar ends of the hanger bar. The supporting element(s) can include first and second supporting elements, with each disposed adjacent to a respective one of the bar ends. The hanger bar can include an overhanging portion, and the supporting element(s) can be at least partially disposed within the overhanging portion. The supporting element(s) can include an inward end that is offset inwardly relative to the plate edges of the deposition plate.
    Type: Application
    Filed: October 18, 2011
    Publication date: December 12, 2013
    Applicant: EPCM Services LTD.
    Inventors: Robert Stanley Jickling, Gordon Steven Iverson, John Douglas Jickling
  • Patent number: 8372255
    Abstract: The invention relates to a current collector for electrochemical diaphragm or membrane-type cells, comprising a layer obtained by interlacing or weaving of a multiplicity of first sets of metal wires with a multiplicity of single metal wires or of second sets of metal wires and provided with substantially parallel corrugations. Such layer is coupled to a planar element consisting of a cloth or a flattened stocking formed by weaving of a single metal wire. The current collector is characterised by a low angular coefficient of the pressure/thickness ratio over a wide range of compression levels.
    Type: Grant
    Filed: July 8, 2008
    Date of Patent: February 12, 2013
    Assignee: Uhdenora S.p.A.
    Inventors: Michele Perego, Leonello Carrettin, Dario Oldani, Angelo Ottaviani
  • Patent number: 8337679
    Abstract: The present invention relates to electrolytic cathode assemblies typically used in the refining or winning of metals and to methods of manufacturing and using same. The cathode assembly comprises an electrically conductive hanger bar and a deposition plate attached along an upper end to the hanger bar to define a joint. The cathode assembly further comprises a protective covering having lateral edges and surrounding the hanger bar and a portion of the upper end of the deposition plate so as to substantially enclose the joint and to leave end portions of the hanger bar exposed outside of the lateral edges of the protective covering. Each end of the protective covering includes a corrosion resistant material positioned to form a substantially continuous seal between the protective covering and the hanger bar, thereby to at least hinder fluid flow into the protective covering. Methods of manufacturing and using the electrolytic cathode assemblies are also described.
    Type: Grant
    Filed: August 24, 2007
    Date of Patent: December 25, 2012
    Assignee: EPCM Services Ltd.
    Inventors: Robert Stanley Jickling, Gordon Steven Iverson
  • Patent number: 8303793
    Abstract: The invention relates to a method of providing an electric current taker made from silver and having a highly electroconductive contact surface into an aluminium support bar to be used in electrolysis.
    Type: Grant
    Filed: June 25, 2009
    Date of Patent: November 6, 2012
    Assignee: Valvas Oy
    Inventor: Niko Hagner
  • Patent number: 8147662
    Abstract: The invention concerns a capping board assembly and its multiple connectable sections. Each pair of sections is connected with an interlocking joint, each of which comprises at least one projection and at least one recess that cooperate and prevent the longitudinal and lateral movement of the sections. Each interlocking joint is reinforced by a rod embedded within the section and extending within the projection. The rod has a tip that anchors the projection. The interlocking joints allow precision assembly of the sections of the capping board which greatly benefits strength, installation, replacement and transportation.
    Type: Grant
    Filed: January 29, 2008
    Date of Patent: April 3, 2012
    Assignee: Pultrusion Technique Inc.
    Inventor: Robert Dufresne
  • Patent number: 8137513
    Abstract: In a sulfuric acid electrolytic cell to electrolyze sulfuric acid supplied to an anode compartment and a cathode compartment comprising a diaphragm, said anode compartment and said cathode compartment separated by said diaphragm, a cathode provided in said cathode compartment and a conductive diamond anode provided in said anode compartment, as said conductive diamond anode, a conductive diamond film is formed on the surface of said conductive substrate, the rear face of said conductive substrate is pasted, with conductive paste, on an current collector comprising a rigid body with size equal to, or larger than, said conductive substrate, an anode compartment frame constituting said anode compartment is contacted via gasket with the periphery on the side of the conductive diamond film of said diamond anode, said diaphragm is contacted with the front face of said anode compartment, further, with the front face of said diaphragm, the cathode compartment frame constituting said cathode compartment, a gasket, and
    Type: Grant
    Filed: June 26, 2009
    Date of Patent: March 20, 2012
    Assignees: Chlorine Engineers Corp., Ltd., Toshiba Corp., Ltd., Shibaura Mechatronics Corp., Ltd.
    Inventors: Masaaki Kato, Yoshiyuki Seya, Naoya Hayamizu, Makiko Tange, Yoshiaki Kurokawa, Nobuo Kobayashi
  • Patent number: 8012320
    Abstract: The invention relates to a device for supporting electrodes in an electrolysis installation, said support comprising a busbar having electrodes fastened thereto, said electrodes being disposed on either side of the busbar and extending vertically below said busbar, the busbar and said electrodes being designed to be immersed at least in part in an electrolyte that gives off one or more gaseous species of a corrosive nature. The device further comprises a protective element of carbon/carbon material placed under the busbar, the protective element being of length and width that are not less than the length and the width of the busbar.
    Type: Grant
    Filed: December 16, 2008
    Date of Patent: September 6, 2011
    Assignee: Snecma Propulsion Solide
    Inventor: Jean-Pierre Maumus
  • Patent number: 7914651
    Abstract: A cathode plate and method for electro-refining or electro-winning of metal. The cathode includes a cathode blade and hanger bar. A quantity of electrically conductive material is wrapped around the hanger bar and along the cathode blade to a position, in use, proximate the level of electrolyte in the electrolytic bath. The provision of a deeper and preferably thicker coating of electrically conductive material, as compared with conventional cathode plates, reduces power consumption in the electrolytic circuit.
    Type: Grant
    Filed: March 14, 2008
    Date of Patent: March 29, 2011
    Assignee: Mount Isa Mines Limited
    Inventors: Nigel James Aslin, Wayne Keith Webb, Reville Wayne Armstrong, Tim Robinson
  • Publication number: 20110062018
    Abstract: An anode device for an electro-f locculation cell, is provided comprising a bed of metal granules (1c) through which raw water is flown from the bottom to the top, is loosely provided in a cell box (3) out of insulating material on an electrically conducting electrode (1) plate provided with insulating material nozzles (Da1-Dc1) and serving as current feeding means to the metal granules (1c), further comprising non-conducting, hydraulic tube connections (6a-6c) which are provided from the insulating material nozzles (Da1-Dc1) to outlet sockets of the tubular manifold (7) for raw water, and at least two gas injectors (9) for the supply of driving a gas which are protruding into the tubular manifold (7) and are connected to a gas supply device (8), wherein fluid connections for the driving gas and the raw water are provided from the outlet sockets (7a1-7c1) of the tubular manifold (7) through to the non-conducting tube connections and the insulating material nozzles to the metal granules (Ic) provided within th
    Type: Application
    Filed: September 25, 2008
    Publication date: March 17, 2011
    Inventor: Holger Blum
  • Patent number: 7754058
    Abstract: An ion exchange membrane electrolyzer comprises electrodes at least either of which is held in contact with leaf springs formed integrally with a leaf spring holding member arranged in an electrode chamber so as to extend toward the electrode and remain electrically energized at the respective electrode touching sections thereof, each of the leaf springs having a crooked section arranged at a position separated from its connecting section connecting itself to the leaf spring holding member and adapted to be bent toward the leaf spring holding member when the electrode touching section is pressed toward the leaf spring holding member side.
    Type: Grant
    Filed: June 4, 2007
    Date of Patent: July 13, 2010
    Assignee: Chlorine Engineers Corp., Ltd.
    Inventor: Kiyohito Asaumi
  • Patent number: 7691242
    Abstract: The present invention describes an electrochemical half-cell, comprising a gas space, an electrolyte space and a gas diffusion electrode in the form of a cathode or anode. The gas diffusion electrode separates the gas space from the electrolyte space and comprises an electrically conductive substrate and an electrochemically active coating. The gas diffusion electrode includes a coating-free edge region and is connected to a support structure in the coating-free edge region via an electrically conductive plate, which covers at least the coating-free edge region as well as a coated edge region.
    Type: Grant
    Filed: June 18, 2008
    Date of Patent: April 6, 2010
    Assignee: Bayer MaterialScience AG
    Inventors: Andreas Bulan, Fritz Gestermann, Peter Fabian
  • Patent number: 7597787
    Abstract: Methods and apparatuses for electrochemically depositing a metal layer onto a substrate. An electrochemical deposition apparatus comprises a substrate holder assembly including a substrate chuck and a relatively soft cathode contact ring. The cathode contact ring comprises an inner portion and an outer portion, wherein the inner portion directly contacts the substrate. An anode is disposed in an electrolyte container. A power supply connects the substrate holder assembly and the anode.
    Type: Grant
    Filed: March 4, 2005
    Date of Patent: October 6, 2009
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Hung-Wen Su, Ming-Hsing Tsai
  • Patent number: 7344624
    Abstract: A cathode plate and method for electro-refining or electro-winning of metal. The cathode includes a cathode blade and hanger bar. A quantity of electrically conductive material is wrapped around the hanger bar and along the cathode blade to a position, in use, proximate the level of electrolyte in the electrolytic bath. The provision of a deeper and preferably thicker coating of electrically conductive material, as compared with conventional cathode plates, reduces power consumption in the electrolytic circuit.
    Type: Grant
    Filed: May 2, 2003
    Date of Patent: March 18, 2008
    Assignee: Mount Isa Mines Limited
    Inventors: Nigel James Aslin, Wayne Keith Webb, Reville Wayne Armstrong, Tim Robinson
  • Patent number: 7332064
    Abstract: A hangar bar for a cathode plate and a method of producing a cathode for electrolytic recovery of metal. The hanger bar comprises a support element which is preferably stainless steel and hollow. An electrically conductive metal cladding is affixed the stainless steel bar by any appropriate mechanism, eg interference fit, welding, chemical or mechanical fastening or coextrusion or roll forming. Affixing the cladding to the stainless steel support element has significant advantages over conventional electroplating techniques including that a more precise engineering specification can be applied to the cladding thickness. This is important to maintain vertical alignment of the cathode plate in the electrolytic cell.
    Type: Grant
    Filed: January 28, 2003
    Date of Patent: February 19, 2008
    Assignee: Mount Isa Mines Limited
    Inventor: Wayne Keith Webb
  • Patent number: 7285193
    Abstract: A cathode for use in the refining or winning of metals, typically used in the electro-refining or winning of copper, comprising a substantially flat deposition plate fixedly attached along an upper edge thereof to an elongate hanger bar thereby defining a connection. A protective cladding is attached to the deposition plate and at least partially surrounding the hanger bar such that a cavity is defined in the region of the connection. A corrosion resistant material fills the cavity. In this manner the corrosion resistant material prevents corrosive substances from penetrating the connection. The corrosion resistant material prevents corrosive electrolytic solution and other liquids from corroding the conductive connection between the deposition plate and the hanger bar which would otherwise reduce efficiency of the cathode.
    Type: Grant
    Filed: June 17, 2003
    Date of Patent: October 23, 2007
    Assignee: Falconbridge Limited
    Inventors: Victor Robinson, James Joseph Detulleo, Gordon S. Iverson, Ian J. Beales
  • Patent number: 7223324
    Abstract: Disclosed in a capping board for use to support hanging legs of anodes and cathodes within adjacent electrolytic cells. This capping board has a main body having a bottom surface shaped to fit onto upper edges of the adjacent cells, and a top surface. A first set of spaced part insulating blocks project from the top surface. This first set of blocks extends in line all over the length of the capping board on one side of the main body. A second set of spaced part insulating blocks also projects from the top surface. This second set of blocks also extends in line all over the length of the capping board at a given lateral distance from the first set of blocks. Thus, the two sets of blocks form two rows that together define a central path on the top surface. Each of the blocks has a recess forming an upwardly and laterally opening compartment to receive and support one of the hanging legs of the anodes and cathodes.
    Type: Grant
    Filed: November 26, 2004
    Date of Patent: May 29, 2007
    Assignee: Pultrusion Technique Inc.
    Inventor: Robert P. Dufresne
  • Patent number: 7204919
    Abstract: Disclosed is a capping board for use to support anodes and cathodes within adjacent electrolytic cells, which has a plurality of individual seats positioned in spaced apart relationship all along its length to receive and support hanging legs projecting from these anodes and cathodes. This capping board is improved in that it has at least one sheet or wire of electrically conductive material embedded therein. This sheet or wire extends over the length of the board and is shaped and positioned so that part of its extends externally within at least some of the seats so as to allow electrical contact of the legs of either the anodes or the cathodes and to allow fast dissipation of heat in the case of a short circuit.
    Type: Grant
    Filed: December 3, 2003
    Date of Patent: April 17, 2007
    Assignee: Pultrusion Technique Inc.
    Inventor: Robert P. Dufresne
  • Patent number: 6937167
    Abstract: A method for joining a highly electroconductive core element (2) to a jacket element (1) made of refined steel. In said method, the electroconductive core element (2), such as a copper bar, and the joining agent element (3) are inserted in the jacket element (1), and at least the juncture area of the elements to be joined is thermally treated, so that there is created a metallurgical joint between the electroconductive core element (2) and the refined-steel jacket element (1).
    Type: Grant
    Filed: November 13, 2001
    Date of Patent: August 30, 2005
    Assignee: Outokumpu Technology Oy
    Inventors: Veikko Polvi, Veijo Halminen, Tuomo Kivistö
  • Publication number: 20040251128
    Abstract: The invention relates to a gas diffusion electrode support structure that receives a gas diffusion electrode (10) for an electrochemical reactor. Said support structure has a base structure (8) to whose fin (11) a connecting element is connected via a weld seam (20) in an electrically conductive way. The connecting element is configured as a bent structure and encloses an edge area (15) of the gas diffusion electrode (10). The edge area (15) of the gas diffusion electrode (10), in an external section (32), is not coated, and in an interior section (33) is provided with an electrochemically active coating.
    Type: Application
    Filed: April 23, 2004
    Publication date: December 16, 2004
    Inventors: Peter Weuta, Fritz Gestermann, Hans-Dieter Pinter, Walter Klesper
  • Publication number: 20040045814
    Abstract: A solid polymer electrolyte composite for an electrochemical reaction apparatus that possesses satisfactory ion conduction properties and has excellent mechanical strength and heat resistance, is provided the solid polymer electrolyte composite is characterized in that a solid polymer electrolyte is contained in the continuous pores of an expanded porous polytetrafluoroethylene sheet which has continuous pores and in which the inner surfaces defining the pores are covered with a functional material such as a metal oxide. An electrochemical reaction apparatus containing an electrolyte, wherein said electrochemical reaction apparatus is characterized in that the aforementioned solid polymer electrolyte composite is used as this electrolyte is also provided.
    Type: Application
    Filed: September 9, 2003
    Publication date: March 11, 2004
    Inventors: Bamdad Bahar, Greg Rusch, Jeffrey Kolde, Hiroshi Kato
  • Patent number: 6656341
    Abstract: In a method of etching a substrate having a surface layer of conductive material, a circuit pattern is transferred to the surface layer in a central surface area portion of the substrate by electrochemical etching. To prevent excessive current densities from forming at the periphery of the central surface area portion during the etching step, a frame adapted to attract electrical field is provided adjacent to the central surface area portion. The frame can be part of a separate frame element which is placed on the substrate before the etching step, or be incorporated in a resist coating on the substrate. The frame can be transferred to the resist coating by any suitable means, for example by photolithographic exposure through a mask with a suitable frame pattern. Alternatively, the frame can be incorporated in a prefabricated substrate element, to which the circuit pattern is transferred in the etching step.
    Type: Grant
    Filed: September 18, 2001
    Date of Patent: December 2, 2003
    Assignee: Obducat Aktiebolag
    Inventors: Per Petersson, Mikael Gustavsson, Jenny Sjöberg, Bin Xie, Bjarni Bjarnason, Gust Bierings, Göran Frennesson
  • Publication number: 20030205477
    Abstract: An electrode assembly arrangement for improving an electrodeposition process and method for using the same the electrode assembly arrangement including a first electrode assembly and a second electrode assembly positioned to carry a metal containing electrolyte from the first electrode assembly to the second electrode assembly for deposition of the metal upon applying an electrical potential therebetween; at least one additional electrode assembly including a means for selectively applying an electrical potential thereto the at least one additional electrode assembly positioned to attract an electrolyte flow upon applying an electrical potential between the at least one additional electrode assembly and the second electrode assembly.
    Type: Application
    Filed: May 6, 2002
    Publication date: November 6, 2003
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Shih-Wei Chou, Ming-Hsing Tsai
  • Publication number: 20030141185
    Abstract: Contact assemblies for electrochemical processing of microelectronic workpieces. The contact assemblies can comprise a support member that includes an inner wall which defines an opening configured to receive the workpiece and a plurality of contacts. The individual contacts include a conductor and a cover. The conductor can comprise a proximal section projecting inwardly into the opening relative to the support member, a distal section extending from the proximal section, and an inert exterior at least at the distal section. The cover comprises a dielectric element that covers at least the proximal section of the conductor, but does not cover at least a portion of the distal section of the core. The exposed portion of the distal section of the core, accordingly, defines a conductive contact site for contacting a conductive layer (e.g., a seed layer) on the workpiece.
    Type: Application
    Filed: December 5, 2001
    Publication date: July 31, 2003
    Inventors: Gregory J. Wilson, John M. Pedersen, Steve L. Eudy
  • Patent number: 6569300
    Abstract: An electrolytic cathode consists of a solid copper hanger bar and a stainless-steel mother plate attached to a receiving groove in the underside of the hanger bar. In the preferred embodiment of the invention, the entire length of connection is welded, thereby establishing a large boundary surface for good electrical conductance. The solid hanger bar further includes a cladding of stainless steel wrapped over the copper bar and the upper portion of the mother plate, leaving only the ends of the copper bar exposed for electrical connection with conventional bus-bars. The lower edges of the cover are attached to the mother plate by a steel-to-steel weld that produces a strong and durable connection. The lateral edges of the cover are also connected to the copper bar by a conventional copper weld that completely seals the cover over the copper bar, thereby preventing contamination from the electrolytic solution. The cover is then welded to the mother plate and sealed around the copper bar.
    Type: Grant
    Filed: February 15, 2000
    Date of Patent: May 27, 2003
    Assignee: T. A. Caid Industries Inc.
    Inventor: William Assenmacher
  • Patent number: 6527923
    Abstract: An electrode of use in electrolytic cells, particularly water electrolyser cells for the production of hydrogen, and comprising an electrically conductive first metal sheet having an electrochemically active gas-evolving planar surface; an electrically conductive second metal electrochemically active gas-evolving screen intimately adjacent and parallel to the planar surface to define an electrolyte and gas-evolving chamber between the sheet and the screen having a narrow width. The electrode provides improvements in voltage and efficiency, longer-term electrode stability and opportunity for periodic depolarization.
    Type: Grant
    Filed: March 22, 2001
    Date of Patent: March 4, 2003
    Inventors: Donald W. Kirk, John W Graydon
  • Patent number: 6471835
    Abstract: The invention relates to an electrode assemblage clamping device for an electrode comprising two parallel, essentially flat and rectangular electrode members, and at least one current supply rod/conductor bar, arranged between and in conductive contact with said electrode members. The device comprises a clamping means provided along at least a part of the vertical peripheral edges of said electrode elements, said clamping means comprising a resilient member and an abutment member. The latter are configured such that each electrode member is clamped between one respective part each of the abutment member and of the resilient member.
    Type: Grant
    Filed: October 17, 2000
    Date of Patent: October 29, 2002
    Assignee: Permascand AB
    Inventors: Maria Sjöberg, Anders Ullman, Karl Axel Hugosson, Mikael Tenfält, Martin Kroon, Jostein Per Saetre, Tor Haakon Groesle
  • Patent number: 6251238
    Abstract: A plating apparatus, anode assembly, and method therefor are disclosed herein that improves the uniformity of the plating deposition across the surface of a wafer, substrate or article. This improvement is accomplished by compensating for the uneven plating deposition caused by a seed layer disposed on the article. The seed layer typically has a high resistance. As a result of the high resistance characteristic of the seed layer, plating currents that flow through substantial portion of the seed layer to the cathode contact encounter more resistance than plating currents that flow through less seed layer. This produces non-uniformity in the plating currents across the surface of the wafer, which results in an uneven plating deposition across the surface of the wafer. The plating apparatus, anode, and method therefor provide an anode having a plurality of separate anode sections designed to plate different surface regions of the wafer.
    Type: Grant
    Filed: September 28, 1999
    Date of Patent: June 26, 2001
    Assignee: Technic Inc.
    Inventors: Robert Kaufman, Gary C. Downes