With Means For Regeneration Or Replenishment Of Coating Bath Or Electrolyte Patents (Class 204/626)
  • Patent number: 11569102
    Abstract: A method includes flowing gas comprising an oxidation inhibiting gas into a chamber of a semiconductor processing system. The chamber includes one or more of a factory interface of the semiconductor processing system or an adjacent chamber that is mounted to the factory interface. The method further includes receiving, via one or more sensors coupled to the chamber, sensor data indicating at least one of a current oxygen level within the chamber or a current moisture level within the chamber. The method further includes determining, based on the sensor data, whether to perform an adjustment of a current amount of the oxidation inhibiting gas entering into the chamber. The method further includes, responsive to determining to perform the adjustment, causing the adjustment of the current amount of the oxidation inhibiting gas entering into the chamber.
    Type: Grant
    Filed: February 14, 2020
    Date of Patent: January 31, 2023
    Assignee: Applied Materials, Inc.
    Inventors: Murali Narasimhan, Patrick Pannese, Kunal Jain
  • Patent number: 8858765
    Abstract: An improved device and method for the creation of acidic electrolyzed water is described. The device has an flow-through anode chamber and a static cathode chamber. The static cathode chamber contains a fixed amount of salt-containing electrolyte, which is renewed as needed. The flow rate of water through the anode is restricted to a range of about 5 to 40 ml per ampere of current passed through the electrode. Electrolyzed water flowing from the anode is diluted to obtain the desired concentration of hypochlorous acid, and is collected in a tank or other vessel. The electrolysis reaction is terminated when a preset amount of current has passed through the anode. Water circulation may be one pass or recycling. In a preferred embodiment, the membrane is anion-selective.
    Type: Grant
    Filed: May 22, 2006
    Date of Patent: October 14, 2014
    Assignee: Ecolab USA Inc.
    Inventors: Yoichi Sano, Barry R. Taylor
  • Patent number: 8262890
    Abstract: Electrodeposition painting systems may include an electrodeposition bath containing an electrodeposition paint solution, wherein the electrodeposition paint solution is in contact with an electrodeposition bath anode that charges the paint such that it electrocoats parts submerged therein to form electrocoated parts, a rinse tank that rinses the electrocoated parts, wherein a rinse tank reservoir of the rinse tank is capable of fluid communication with the electrodeposition bath, a filter that filters the electrodeposition paint solution to separate filtered water from the paint, and an ionizer assembly including one or more electrodes in contact with the filtered water and a power supply connected to the one or more electrodes, wherein the power supply causes a plurality of electrode ions from the one or more electrodes to enter the filtered water to produce filtered water including electrode ions such that the filtered water including electrode ions flows into and sterilizes the electrodeposition paint solu
    Type: Grant
    Filed: June 1, 2010
    Date of Patent: September 11, 2012
    Assignee: Toyota Motor Engineering & Manufacturing North America, Inc.
    Inventor: James Walter Meade
  • Patent number: 8197658
    Abstract: In order to solve various problems such as a reduction in a paint resin with the progress of electrodeposition coating treatment and remelting of a coating film or the occurrence of pinholes caused by an increased concentration of an electrolyte as a result of the reduction, upsizing of a hollow electrode with a membrane for electrodeposition coating combined with a barrier membrane (e.g., an ion exchange membrane) and an increase in the number of components should be avoided. In order to realize this, a barrier membrane 20 such as an ion exchange membrane is attached to the exterior surface of an electrode main body 10, which is in a hollow state made of a conductive material and configured so as to allow a liquid to pass through freely between the inside and outside of the electrode serving as a support.
    Type: Grant
    Filed: April 13, 2007
    Date of Patent: June 12, 2012
    Assignees: Daiso Co., Ltd., AGC Engineering Co., Ltd.
    Inventors: Shouhei Matsui, Yasushi Yoshida, Nobuyoshi Shoji, Yukio Matsumura
  • Patent number: 8182693
    Abstract: A method and apparatus for purifying water are provided. A feed water such as seawater can be fed to a filter such as a microporous or nanofiltration membrane to produce a permeate that can, in turn, be fed to an electrodeionization system to produce fresh water.
    Type: Grant
    Filed: December 16, 2009
    Date of Patent: May 22, 2012
    Assignee: Siemens Industry, Inc.
    Inventors: Frederick C. Wilkins, Anil Jha, Gary C. Ganzi
  • Patent number: 8128791
    Abstract: In a copper electroplating apparatus having separate anolyte and catholyte portions, the concentration of anolyte components (e.g., acid or copper salt) is controlled by providing a diluent to the recirculating anolyte. The dosing of the diluent can be controlled by the user and can follow a pre-determined schedule. For example, the schedule may specify the diluent dosing parameters, so as to prevent precipitation of copper salt in the anolyte. Thus, precipitation-induced anode passivation can be minimized.
    Type: Grant
    Filed: October 30, 2006
    Date of Patent: March 6, 2012
    Assignee: Novellus Systems, Inc.
    Inventors: Bryan Buckalew, Jonathan Reid, John Sukamto, Zhian He, Seshasayee Varadarajan, Steven T. Mayer
  • Patent number: 8083919
    Abstract: Described are novel systems for electrodeposition of paint on counter-electrodes, and membrane electrode assemblies for incorporation into such systems. In certain embodiments of the invention, electrode enclosures such as C-shaped or box-shaped enclosures include membranes sealed to secondary structural members by bonding. In other embodiments, membrane electrode cells having bumpers are mounted within paint baths in a manner wherein the bumpers are forcibly biased against the exterior wall of the bath, thereby stabilizing the position of the cells. In still further embodiments, tubular electrode cells are provided with internal valves allowing the release of liquid trapped within the tubular electrodes into the membrane shell. In this manner, removal of the electrodes for maintenance, replacement or other purposes is facilitated.
    Type: Grant
    Filed: September 8, 2008
    Date of Patent: December 27, 2011
    Inventors: H. Frederick Hess, Jr., H. Frederick Hess, III, Steven Jovanovic, James E. Rittel, Jr.
  • Patent number: 7422673
    Abstract: Described are novel systems for electrodeposition of paint on counter-electrodes, and membrane electrode assemblies for incorporation into such systems. In certain embodiments of the invention, electrode enclosures such as C-shaped or box-shaped enclosures include membranes sealed to secondary structural members by bonding. In other embodiments, membrane electrode cells having bumpers are mounted within paint baths in a manner wherein the bumpers are forcibly biased against the exterior wall of the bath, thereby stabilizing the position of the cells. In still further embodiments, tubular electrode cells are provided with internal valves allowing the release of liquid trapped within the tubular electrodes into the membrane shell. In this manner, removal of the electrodes for maintenance, replacement or other purposes is facilitated.
    Type: Grant
    Filed: May 22, 2003
    Date of Patent: September 9, 2008
    Assignee: UFS Corporation
    Inventors: H. Frederick Hess, Jr., H. Frederick Hess, III, Steven Jovanovic, James E. Rittel, Jr.
  • Patent number: 7413644
    Abstract: An installation for the cataphoretic dip coating of articles, in particular of vehicle bodies, comprises in known manner a dip tank, into which the articles can be immersed. The negative terminal of a coating voltage source can be connected with the immersed articles; the positive terminal of the voltage source is connected with at least one anode immersed in the coating liquid present in the dip tank. This anode has a cross-sectional profile which, in at least one portion, is adapted as a curved surface to the outline of the articles to be treated in such a manner that the anode follows the outline of said article in approximately parallel manner. This is made possible by the electrodialysis apparatus, by means of which the acid formed during the coating operation is removed from the coating liquid and which is necessary for such installations, being arranged outside the dip tank.
    Type: Grant
    Filed: July 30, 2003
    Date of Patent: August 19, 2008
    Assignee: Eisenmann Anlagenbau GmbH & Co. KG
    Inventors: Apostolos Katefidis, Werner Mai
  • Patent number: 7244342
    Abstract: A membrane electrode cell is disclosed which has a membrane cartridge that can readily be removed from the cell without disassembling the framework of the cell. Also, a membrane electrode cell is disclosed which has a water flow arrangement that removes debris from the bottom of the cell.
    Type: Grant
    Filed: June 28, 2004
    Date of Patent: July 17, 2007
    Inventor: Brian Wood
  • Patent number: 7229541
    Abstract: A processing solution tank of forming an agitating flow by flowing and circulating a processing solution in directions opposite to each other between the side of a liquid surface and the side of a tank bottom, in which a guide plate substantially of an arcuate shape is formed to an end of the tank situated at least to the downstream on the side of the liquid surface or the downstream on the side of the tank bottom in the agitating flow for reversing the flow downward to the tank bottom or upward to the liquid surface, and a swirl chamber having a swirl generating portion of a substantially arcuate face for capturing dusts is provided at the bottom of the tank, whereby high quality surface treatment, for example, electrodeposition coating can be conducted by uniformly stirring the processing solution so as not to cause backflow or turbulence in the processing solution tank while dipping a work on a conveyor in the processing solution.
    Type: Grant
    Filed: July 23, 2004
    Date of Patent: June 12, 2007
    Assignee: Trinity Industrial Corporation
    Inventors: Hideaki Hara, Toshinori Watanabe
  • Patent number: 7169280
    Abstract: The present invention provides a system that enables the use of electrophoretic resists in the microfabrication industry for the production of microelectronic devices and is of sufficiently high quality to be used as a replacement for, or supplement to, current photoresist deposition technology. This system enables the application of electrophoretic resists in automated equipment that meets the standards for cleanliness and production throughput desired by the microelectronic fabrication industry.
    Type: Grant
    Filed: September 3, 2002
    Date of Patent: January 30, 2007
    Assignee: Semitool, Inc.
    Inventors: John L. Klocke, Kyle M. Hanson
  • Patent number: 7150816
    Abstract: The present invention provides a system that enables the use of electrophoretic resists in the microfabrication industry for the production of microelectronic devices and is of sufficiently high quality to be used as a replacement for, or supplement to, current photoresist deposition technology. This system enables the application of electrophoretic resists in automated equipment that meets the standards for cleanliness and production throughput desired by the microelectronic fabrication industry.
    Type: Grant
    Filed: September 3, 2002
    Date of Patent: December 19, 2006
    Assignee: Semitool, Inc.
    Inventors: John L. Klocke, Kyle M. Hanson
  • Patent number: 7147765
    Abstract: The present invention provides a system that enables the use of electrophoretic resists in the microfabrication industry for the production of microelectronic devices and is of sufficiently high quality to be used as a replacement for, or supplement to, current photoresist deposition technology. This system enables the application of electrophoretic resists in automated equipment that meets the standards for cleanliness and production throughput desired by the microelectronic fabrication industry.
    Type: Grant
    Filed: September 3, 2002
    Date of Patent: December 12, 2006
    Assignee: Semitool, Inc.
    Inventors: John Klocke, Kyle Hanson
  • Publication number: 20040226823
    Abstract: An installation for the cataphoretic dip coating of articles (4), in particular of vehicle bodies, comprises in known manner a dip tank (1), into which the articles (4) can be immersed. The negative terminal of a coating voltage source (5) can be connected with the immersed articles (4); the positive terminal of the voltage source is connected with at least one anode (6) immersed in the coating liquid present in the dip tank (1). This anode (6) has a cross-sectional profile which, in at least one portion (6a, 6b, 6c), is adapted as a curved surface to the outline of the articles (4) to be treated in such a manner that the anode follows the outline of said article (4) in approximately parallel manner. This is made possible by the electrodialysis apparatus (19), by means of which the acid formed during the coating operation is removed from the coating liquid and which is necessary for such installations, being arranged outside the dip tank (1).
    Type: Application
    Filed: July 30, 2003
    Publication date: November 18, 2004
    Inventors: Apostolos Katefidis, Werner Mai
  • Publication number: 20040069640
    Abstract: A tubular electrodeposition and electrodialysis cell (1), in particular for painting processes by immersion in a paint bath, having preferably a rigid supporting structure (8), at least one electrode (7), to separate the paint bath from a dialysis liquid circulating in the cell; members (21, 24, 41, 42, 46) are provided which cooperate with the supporting structure (8) to fit the membrane (9) hermetically to the supporting structure (8) and permit removal of the membrane.
    Type: Application
    Filed: October 27, 2003
    Publication date: April 15, 2004
    Inventors: Roberto Pizzamiglio, Claudio Moretti, J?uuml;rgen Weschke
  • Patent number: 6544301
    Abstract: (a) supplying a capacitor element manufacturing apparatus, in which the capacitor element manufacturing apparatus includes a polymerization tank, a polymerization solution contained in the polymerization tank, and a negative electrode put in the polymerization solution in the polymerization tank, (b) supplying a core material having a plurality of capacitor elements, in which each capacitor element of the plurality of capacitor elements has an anode lead-out portion and a cathode lead-out portion, (c) forming a formation film on the surface of the core material, (d) installing a conductive substance on the formation film, (e) adhering each anode lead-out portion of the plurality of capacitor elements having the conductive substance to a conductive tape, (f) immersing the core material having the anode lead-out portion adhered to the adhesive tape in the polymerization solution, and (g) forming a polymerization film on the cathode lead-out portion of the capacitor element by applying a voltage to the conductiv
    Type: Grant
    Filed: May 21, 2001
    Date of Patent: April 8, 2003
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Yasuhiro Kobatake, Yukari Shimamoto, Mitsuo Tadokoro, Isao Kaneko
  • Patent number: 6436263
    Abstract: Electrodeposition (ED) systems and methods are disclosed where acid control is possible without adding acid from outside when acid tends to be depleted. A mixture of high neutralizer removal type membrane electrodes and low neutralizer removal type membrane electrodes are placed in an ED tank. To each of these two types of electrodes separate and independent electrolyte circulation systems are connected. To each of these circulation system are connected each correspondingly first and second electrolyte conductivity control means, each of which works to add D.I. water, as a dilution media, to corresponding electrolyte circulation system, when the conductivity exceeds pre-set reference conductivity values. The reference conductivity set point at which value the second electrolyte control means will add D.I. water to the second electrolyte circulation system preferably is set higher than the reference conductivity set point at which value the first electrolyte control means will add D.I.
    Type: Grant
    Filed: April 21, 2000
    Date of Patent: August 20, 2002
    Assignee: Polytechs, Inc.
    Inventor: Akito Inoue
  • Publication number: 20010011635
    Abstract: An apparatus for manufacturing a solid electrolytic capacitor includes an anodization part, a polymerization part, a cathode layer formation part, an assembly part, and a molding part. The polymerization part includes a plurality of polymerization baths of a substantially same structure and a conveyance mechanism. In addition the plurality of polymerization baths are placed around the conveyance mechanism within a conveyance range.
    Type: Application
    Filed: January 25, 2001
    Publication date: August 9, 2001
    Inventors: Mitsuo Terada, Motonobu Ueno, Masaki Shiragami
  • Patent number: 6139708
    Abstract: The invention relates to a system for treating a surface of an article with a liquid material by dipping. This system includes (a) a major tank having therein the liquid material for dipping the article thereinto; and (b) a circulatory mechanism for circulating the liquid material through the major tank. The circulatory mechanism is arranged to make a flow of the liquid material through the major tank such that the majority of the flow is in one direction that is substantially along the longitudinal direction of the major tank. Thus, contaminants and/or bubbles are not distributed over the entire major tank, but are effectively promptly removed from the major tank. The flow of the liquid material may include a first flow of the liquid material in the major tank and a second flow that is lower than the first flow in position. The first and second flows run substantially in parallel with each other, before the first and second flows reach a downstream end thereof in the major tank.
    Type: Grant
    Filed: August 7, 1998
    Date of Patent: October 31, 2000
    Assignees: Nissan Motor Co., Ltd., Taikisha Ltd.
    Inventors: Hiromi Nonomura, Hirokazu Sugiyama, Yasuo Takamizu, Shigeyoshi Okada, Toshihiko Koike