Heating Substrate Other Than By Contact With Liquid Patents (Class 205/209)
  • Patent number: 11047861
    Abstract: The disclosure provides a cell-based, label-free assay compatible with high-throughput screening (HTS) that can report quantitatively on enzyme activities by measuring mass changes of substrates with MALDI-mass spectrometry.
    Type: Grant
    Filed: August 8, 2016
    Date of Patent: June 29, 2021
    Assignee: NORTHWESTERN UNIVERSITY
    Inventors: Milan Mrksich, Eric J. Berns, Maria D. Cebezas
  • Patent number: 10920331
    Abstract: A film deposition device (1A) of a metal film (F) includes a positive electrode (11), a solid electrolyte membrane (13), and a power supply part (14) that applies a voltage between the positive electrode (11) and a base material (B) to be a negative electrode. The solid electrolyte membrane (13) allows a water content to be 15% by mass or more and is capable of containing a metal ion. The power supply part (14) applies a voltage between the positive electrode and the base material in a state where the solid electrolyte membrane is disposed on a surface of the positive electrode such that metal made of metal ions contained inside the solid electrolyte membrane (13) is precipitated on a surface of the base material (B).
    Type: Grant
    Filed: August 4, 2014
    Date of Patent: February 16, 2021
    Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHA
    Inventors: Yuki Sato, Hiroshi Yanagimoto, Motoki Hiraoka
  • Patent number: 10658326
    Abstract: A bonding wire includes a wire core including a silver-palladium alloy. A coating layer is disposed on a sidewall of the wire core. A palladium content of the silver-palladium alloy ranges from about 0.1 wt % to about 1.5 wt %.
    Type: Grant
    Filed: June 7, 2017
    Date of Patent: May 19, 2020
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Won-Gil Han, Sangho An, Yong Je Lee, Jae Heung Lee, Seungweon Ha
  • Patent number: 9499919
    Abstract: An aqueous electrolyte solution including a concentration of citric acid in the range of about 1.6 g/L to about 982 g/L and an effective concentration of ammonium bifluoride (ABF), and being substantially free of a strong acid. Methods of treating the surface of a non-ferrous metal workpiece include exposing the surface to a bath of an aqueous electrolyte solution including a concentration of citric acid less than or equal to about 300 g/L and a concentration of ammonium bifluoride greater than or equal to about 10 g/L, and having no more than about 3.35 g/L of a strong acid, controlling the temperature of the bath to be greater than or equal to about 54° C., connecting the workpiece to the anode of a DC power supply and immersing a cathode of the DC power supply in the bath, and applying a current across the bath.
    Type: Grant
    Filed: November 7, 2013
    Date of Patent: November 22, 2016
    Assignee: METCON LLC
    Inventors: James L. Clasquin, Thomas J. Christensen
  • Publication number: 20150147593
    Abstract: An electrode for use in bio-electrochemical systems is described, including: a substantially planar electrode material; a frame comprising a non-conductive substance; and one or more first conductive substances linked or secured to the frame. Bio-electrochemical systems, racks for inserting the electrode, and methods of using the racks are also described.
    Type: Application
    Filed: November 24, 2014
    Publication date: May 28, 2015
    Inventors: Matthew SILVER, Justin BUCK, Casey CHARTIER, Mark BAROSKY, James Ryan HAWKINS, Zhen HUANG, Quynh Anh Le TRAN, Tzipora WAGNER
  • Publication number: 20140332330
    Abstract: A treated rotor is provided by a method in which a surface of a ferrous rotor having cooling elements is heat-treated to produce a microporous, outermost surface layer, then the heat-treated rotor is coated by electrodepositing a coating layer of an electrocoat coating composition on the heat-treated the surface of to provide a electrocoat coating directed on the surface of the heat-treated rotor. The electrocoat coating layer has a throwpower of at least about 40% and the coating layer is continuous on cooling elements of the rotor. The microporous outermost layer is a controlled iron oxide layer.
    Type: Application
    Filed: November 16, 2012
    Publication date: November 13, 2014
    Inventors: Charles P. Orr, Patrick L. Fox
  • Publication number: 20140050931
    Abstract: A thermoplastic composition is described that can be directly coated with a metal according to a metallization process with no intervening base coat formation process necessary. The thermoplastic composition includes a polyarylene sulfide and a filler having a selectively controlled average length and aspect ratio. Molded articles formed of the thermoplastic composition can have an ultra-smooth surface so as to directly accept a metallization coating.
    Type: Application
    Filed: August 14, 2013
    Publication date: February 20, 2014
    Applicant: Ticona LLC
    Inventor: Ke Feng
  • Publication number: 20140020881
    Abstract: A composite article (1; 10; 40) comprises a plurality of inclusions (5) of a magnetocalorically active material embedded in a matrix (4) of a magnetocalorically passive material. The inclusions (5) and the matrix (4) have a microstructure characteristic of a compacted powder.
    Type: Application
    Filed: September 16, 2013
    Publication date: January 23, 2014
    Applicant: Vacuumschmeize GmbH & Co. KG
    Inventors: George Werner REPPEL, Matthias KATTER
  • Publication number: 20130213817
    Abstract: A method for shrinking a linewidth on a substrate includes the steps of applying a stretching force on the substrate, defining a line on a top surface of the substrate and releasing the applied stretching force. The applied force is executed by mechanical stretching or thermal expansion and has a direction parallel to the line.
    Type: Application
    Filed: May 11, 2012
    Publication date: August 22, 2013
    Inventors: Cheng-Yao LO, Kuan-Hsun Liao
  • Publication number: 20130143060
    Abstract: A curved, three-dimensional, ordered micro-truss structure comprising: a plurality of first struts extending along a first direction; a plurality of second struts extending along a second direction; and a plurality of third struts extending along a third direction, wherein the first, second, and third struts interpenetrate one another at a plurality of nodes, wherein the pluralities of first struts, second struts, third struts, and nodes form a plurality of ordered unit cells within the micro-truss structure, and wherein the plurality of ordered unit cells define a curved surface.
    Type: Application
    Filed: December 6, 2011
    Publication date: June 6, 2013
    Inventors: Alan J. Jacobsen, Tobias A. Schaedler, Christopher S. Roper
  • Publication number: 20120305291
    Abstract: Disclosed are a primer layer for plating process exhibiting high adhesiveness to an electroless copper plating and capable of coping with high density of wirings of semiconductor packages; a laminate for wiring board having the primer layer and a method for manufacture thereof; and a multilayer wiring board having the primer layer and a method for manufacture thereof. The primer layer is formed of a resin composition including (A) a polyfunctional epoxy resin, (B) an epoxy resin curing agent, and (C) a phenolic hydroxyl group-containing polybutadiene-modified polyamide resin having specified structural units, wherein a blending proportion of the component (C) is 5 parts by mass or more and less than 25 parts by mass based on 100 parts by mass of a total sum of the component (A) and the component (B).
    Type: Application
    Filed: May 31, 2012
    Publication date: December 6, 2012
    Inventors: Daisuke FUJIMOTO, Kunpei Yamada, Nobuyuki Ogawa, Hikari Murai
  • Publication number: 20120219735
    Abstract: Disclosed are methods for producing carbon, metal and/or metal oxide porous materials that have precisely controlled structures on the nanometer and micrometer scales. The methods involve the single or repeated infiltration of porous templates with metal salts at controlled temperatures, the controlled drying and decomposition of the metal salts under reducing conditions, and optionally the removal of the template. The carbon porous materials are involve the infiltration of a carbon precursor into a porous template, followed by polymerization and pyrolysis. These porous materials have utility in separations, catalysis, among others.
    Type: Application
    Filed: February 27, 2012
    Publication date: August 30, 2012
    Applicant: THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ALABAMA
    Inventors: Martin Bakker, Franchessa Maddox Sayler, Amy Grano, Jan-Henrik Smått
  • Patent number: 8129077
    Abstract: A method of manufacturing a fuel cell includes thermally treating a hydrogen permeable membrane in a given temperature higher than an actual operating temperature of the fuel cell, and forming an electrolyte layer on the hydrogen permeable membrane subjected to the thermal treatment. The hydrogen permeable membrane is composed of a polycrystalline metal.
    Type: Grant
    Filed: December 6, 2006
    Date of Patent: March 6, 2012
    Assignee: Toyota Jidosha Kabushiki Kaisha
    Inventor: Satoshi Aoyama
  • Publication number: 20110097498
    Abstract: A method for inhibiting growth of tin whiskers is provided. The method includes providing a metal substrate, treating the metal substrate by an annealing process, and forming a tin layer to cover a surface of the metal substrate, wherein the surface of the tin layer has no tin whisker.
    Type: Application
    Filed: February 9, 2010
    Publication date: April 28, 2011
    Applicant: NATIONAL TAIWAN UNIVERSITY OF SCIENCE & TECHNOLOGY
    Inventors: Yee-Wen Yen, Chao-Kang Li, Meng-Yu Tsou
  • Publication number: 20110000793
    Abstract: The invention relates to a coating method for a workpiece, including the following method steps: a) applying a coating liquid to the workpiece, wherein the coating liquid comprises an ionic liquid containing ions of at least one element, b) electrochemically depositing a layer of the at least one element from the coating liquid on the workpiece, c) removing the workpiece from the coating liquid, d) removing excess coating liquid from the workpiece. In order to suggest an industrially suitable coating process, particularly for workpieces having at least a partial metal surface, using stable, durable baths, it is provided that the temperature of the workpiece is set such that the temperature of the coating liquid deviates by no more than 10° C.
    Type: Application
    Filed: February 20, 2009
    Publication date: January 6, 2011
    Applicant: EWALD DOERKEN AG
    Inventors: Thomas Kruse, Gerhard Reusmann, Sandra Boehm
  • Patent number: 7854788
    Abstract: A filter membrane includes a substrate, a polymer layer provided on the substrate and a plurality of filter openings each having a width of from about 2 nanometers to about 5 nanometers provided in the polymer layer. A method of controlling pore size of a filter membrane and a method of decontaminating a filter membrane are also disclosed.
    Type: Grant
    Filed: June 6, 2007
    Date of Patent: December 21, 2010
    Assignee: The Boeing Company
    Inventors: Norman R. Byrd, James P. Huang, Gwen Gross
  • Publication number: 20100280599
    Abstract: This invention relates to novel calcium phosphate coated implantable medical devices, and electrochemical deposition processes for making same. A process of coating an implantable medical device with a calcium phosphate coating comprising: (a) subjecting a substrate to a surface pretreatment whereby adhesion of the calcium phosphate coating to the substrate is enhanced; (b) immersing the pretreated substrate in an electrolyte comprising calcium and phosphate species; and (c) coating calcium phosphate onto the substrate by electrochemical deposition.
    Type: Application
    Filed: June 20, 2007
    Publication date: November 4, 2010
    Inventors: Pui Hung Manus Tsui, Tomasz Trocynski
  • Publication number: 20090311483
    Abstract: Articles having a first substance, naturally having a first crystalline structure, confined between surfaces of a second substance having a second crystalline structure, whereby the first substance has a third (unusual) crystalline structure different from said first crystalline structure and methods of making same. Substances having unusual crystalline structures and methods of making same.
    Type: Application
    Filed: April 10, 2007
    Publication date: December 17, 2009
    Applicant: Technion Research & Development Foundation Ltd.
    Inventors: Wayne D. Kaplan, Yaron Kauffmann
  • Publication number: 20090200172
    Abstract: A method of manufacturing a fuel cell includes thermally treating a hydrogen permeable membrane in a given temperature higher than an actual operating temperature of the fuel cell, and forming an electrolyte layer on the hydrogen permeable membrane subjected to the thermal treatment. The hydrogen permeable membrane is composed of a polycrystalline metal.
    Type: Application
    Filed: December 6, 2006
    Publication date: August 13, 2009
    Inventor: Satoshi Aoyama
  • Patent number: 7445885
    Abstract: A process is described for analyzing enzyme-catalyzed conversions of nonpolymeric substrates to nonpolymeric products with the aid of MALDI-TOF mass spectrometry, preferably in the presence of an internal standard on a specific carrier material.
    Type: Grant
    Filed: June 6, 2001
    Date of Patent: November 4, 2008
    Assignee: BASF Aktiengesellschaft
    Inventors: Elmar Heinzle, Min-Jung Kang, Andreas Tholey, Klaus Hollemeyer, Bernhard Hauer
  • Patent number: 7141274
    Abstract: A substrate processing apparatus and method which employs the so-called batch processing method of processing a plurality of substrates simultaneously, thereby increasing the throughput, and which can carry out processing, such as electroless plating, stably and securely with a relatively simple apparatus. The substrate processing apparatus includes: a processing bath (14) for holding a processing liquid (12); and a substrate holder (16) which is vertically movable relative to the processing bath (14) and which includes a plurality of substrate holding portions (40) for holding a plurality of substrates (W) in parallel.
    Type: Grant
    Filed: November 6, 2002
    Date of Patent: November 28, 2006
    Assignee: Ebara Corporation
    Inventors: Xinming Wang, Kenichi Abe, Koji Mishima
  • Patent number: 7082366
    Abstract: In the case of connecting a line for making connection between communication unit 12 mounted in a vehicle-mounted terminal 10 and center communication unit 21 of an information center 20 and acquiring information accumulated in storage unit 23 of the information center 20, control unit 13 of the vehicle-mounted terminal 10 predicts the necessity for connection between the communication unit 12 and the information center 20 and when it is decided that there is a possibility of the connection and there is the necessity, start processing of line connection to the information center is previously started and information can be immediately sent via a line in which the connection is completed at a point in time of actually sending information from the side of the vehicle-mounted terminal 10 to the side of the information center 20.
    Type: Grant
    Filed: September 8, 2003
    Date of Patent: July 25, 2006
    Assignee: Pioneer Corporation
    Inventor: Takeharu Arakawa
  • Patent number: 7070687
    Abstract: Apparatus and method for treating a surface of a substrate for electrolytic or electroless plating of metals in integrated circuit manufacturing. In one embodiment the method includes forming a barrier layer on a substrate. A metal-seed layer is then formed on the barrier layer. The method continues by performing in situ surface treatment of the metal-seed layer to form a passivation layer on the metal-seed layer. In another embodiment of a method of this invention, a substrate is provided into an electroplating tool chamber. The substrate has a barrier layer formed thereon, a metal seed layer formed on the barrier layer and a passivation layer formed over the metal seed layer. The method continues by annealing the substrate in forming gas to reduce the passivation layer. A conductive material is deposited on the substrate using an electrolytic plating or electroless plating process.
    Type: Grant
    Filed: August 14, 2001
    Date of Patent: July 4, 2006
    Assignee: Intel Corporation
    Inventors: Vinay B. Chikarmane, Chi-Hwa Tsang
  • Patent number: 6926818
    Abstract: A method of forming a bump structure through the use of an electroplating solution, comprising the following steps. A substrate having an overlying conductive structure is provided. A patterned dry film resist is formed over the conductive structure. The patterned dry film resist having a trench exposing a portion of conductive structure. The patterned dry film resist adhering to the conductive structure at an interface. The structure is treated with a treatment that increases the adherence of the patterned dry film resist to the conductive structure at the interface. A conductive plug is over the exposed portion of the conductive structure within the trench through the use of the electroplating solution. The increased adhesion of the patterned dry film resist to the conductive structure at the interface preventing the electroplating solution from penetrating the interface of the patterned dry film resist and the conductive structure during the formation of the conductive plug.
    Type: Grant
    Filed: September 24, 2001
    Date of Patent: August 9, 2005
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yih-Ann Lin, Tung-Heng Shie, Kai-Ming Ching, Sheng-Liang Pan, Kuo-Liang Lu
  • Patent number: 6811656
    Abstract: A method for creating a material library of surface areas having different properties in which a substrate is coated. The substrate is subjected to a combined pretreatment procedure.
    Type: Grant
    Filed: June 20, 2002
    Date of Patent: November 2, 2004
    Assignee: Robert Bosch GmbH
    Inventors: Thomas Brinz, Ilona Ullmann
  • Publication number: 20040159555
    Abstract: A process for forming a multilayer composite coating on a substrate is provided. The process includes forming an electrodeposition coating layer on the substrate by electrodeposition of a curable electrodepositable coating composition over at least a portion of the substrate. Optionally, the coated substrate is heated to a temperature and for a time sufficient to cure the electrodeposition coating layer. A basecoating layer is formed on the electrodeposition coating layer by depositing an aqueous curable basecoating composition directly onto at least a portion of the electrodeposition coating layer. Optionally, the basecoating layer is dehydrated. A top coating layer is formed on the basecoating layer by depositing a curable top coating composition which is substantially pigment-free directly onto at least a portion of the basecoating layer. The top coating layer, the basecoating layer, and, optionally, the electrodeposition coating layer are cured simultaneously.
    Type: Application
    Filed: February 13, 2003
    Publication date: August 19, 2004
    Inventors: Sean Purdy, Dennis A. Simpson, Richard J. Foukes, David M. Aiken, James P. Rowley
  • Patent number: 6766576
    Abstract: The method for producing a printed wiring board comprising the steps of preparing a conductive substrate, forming an insulating layer on one surface of the said substrate, forming at least one via hole in the insulating layer, thermally curing the insulating layer, and reducing at least one oxidized layer formed on the other conductive surface of the substrate during the curing operation. Alternatively, the thermal cure may be accomplished in an atmosphere (e.g., reducing gas, inactive gas, or mixtures thereof) not conducive to oxide formation on metallized circuit surfaces.
    Type: Grant
    Filed: May 9, 2003
    Date of Patent: July 27, 2004
    Assignee: International Business Machines Corporation
    Inventors: Takayuki Haze, Tsuneo Yabuuchi
  • Patent number: 6726829
    Abstract: Disclosed herewithin is an apparatus for fabricating a stent which involves processing a tubular member whereby no connection points to join the edges of a flat pattern are necessary. The process includes the steps of: a) preparing the surface of a tubular member, b) coating the outside surface of the tubular member with a photo-sensitive resist material, c) placing the tubular member in an apparatus designed to simultaneously rotate the tubular member while passing a specially configured photographic frame negative between a light source and the tubular member, d) exposing the tubular member to a photoresist developer, e) rinsing the excess developer and uncured resist from the exposed tubular member, f) sealing the inner lumen of the tubular member, and g) treating the tubular member with a chemical or electro-chemical process to remove uncovered metal. By modifying the photographic negative, this process can be employed to fabricate a virtually unlimited number of stent designs and configurations.
    Type: Grant
    Filed: November 1, 2001
    Date of Patent: April 27, 2004
    Assignee: SciMed Life Systems, Inc.
    Inventor: Thomas Trozera
  • Patent number: 6571467
    Abstract: The method for producing a printed wiring board comprising the steps of preparing a conductive substrate, forming an insulating layer on one surface of the said substrate, forming at least one via hole in the insulating layer, thermally curing the insulating layer, and reducing at least one oxidized layer formed on the other conductive surface of the substrate during the curing operation. Alternatively, the thermal cure may be accomplished in an atmosphere (e.g., reducing gas, inactive gas, or mixtures thereof) not conducive to oxide formation on metallized circuit surfaces.
    Type: Grant
    Filed: July 21, 1999
    Date of Patent: June 3, 2003
    Assignee: International Business Machines Corporation
    Inventors: Takayuki Haze, Tsuneo Yabuuchi
  • Patent number: 6546751
    Abstract: A method of providing a decorative metal pattern on an electrically non-conductive substrate, such as a glass or plastic substrate, which includes applying a mixture of heat fusible material, such as glass or plastic, with a metal having a particle size less than about 500 mesh constituting at least 50% of the mixture, to the substrate in the desired pattern, heating the so-applied mixture until the heat fusible material fuses and bonds to the substrate, cleaning the substrate with the pattern thereon, and a electroplating the pattern with the desired finish metal. In one method in which the mixture includes glass, a negative resist is adhesively secured to the substrate and the mixture is applied. The resist disintegrates upon heating. In another method, used when the substrate is plastic, a mixture of plastic and metal in past form is applied to the substrate by silk screening or pad printing to form the pattern.
    Type: Grant
    Filed: August 16, 1999
    Date of Patent: April 15, 2003
    Inventor: Peter Jaeger
  • Patent number: 6533917
    Abstract: Disclosed are a method for producing an aluminum support for lithographic printing plates, comprising subjecting an aluminum plate in sequence to (1) a surface roughening treatment, (2) a heat treatment, (3) a treatment of dissolving from 0.01 to 5 g/m2 of said aluminum plate, and then (4) an anodization treatment; a method for producing an aluminum support for lithographic printing plates, comprising subjecting an aluminum plate to an electrochemical surface roughening treatment both before and after an electrolytic treatment in an aqueous neutral salt solution using the aluminum plate as a cathode.
    Type: Grant
    Filed: April 21, 2000
    Date of Patent: March 18, 2003
    Assignee: Fuji Photo Film Co., Ltd.
    Inventors: Atsuo Nishino, Yoshitaka Masuda, Akio Uesugi
  • Patent number: 6527937
    Abstract: Methods to at least partially reduce a niobium oxide are described wherein the process includes heat treating the niobium oxide in the presence of a getter material and in an atmosphere which permits the transfer of oxygen atoms from the niobium oxide to the getter material, and for a sufficient time and at a sufficient temperature to form an oxygen reduced niobium oxide. Niobium oxides and/or suboxides are also described as well as capacitors containing anodes made from the niobium oxides and suboxides.
    Type: Grant
    Filed: February 19, 2002
    Date of Patent: March 4, 2003
    Assignee: Cabot Corporation
    Inventor: James A. Fife
  • Publication number: 20030034251
    Abstract: Apparatus and method for treating a surface of a substrate for electrolytic or electroless plating of metals in integrated circuit manufacturing. In one embodiment the method includes forming a barrier layer on a substrate. A metal-seed layer is then formed on the barrier layer. The method continues by performing in situ surface treatment of the metal-seed layer to form a passivation layer on the metal-seed layer.
    Type: Application
    Filed: August 14, 2001
    Publication date: February 20, 2003
    Inventors: Vinay B. Chikarmane, Chi-Hwa Tsang
  • Publication number: 20030000845
    Abstract: A method for creating a material library of surface areas having different properties in which a substrate is coated. The substrate is subjected to a combined pretreatment procedure.
    Type: Application
    Filed: June 20, 2002
    Publication date: January 2, 2003
    Inventors: Thomas Brinz, Ilona Ullmann
  • Patent number: 6475368
    Abstract: A method of anodizing an aluminum substrate comprising heating the substrate to a first temperature of 200° C. to about 380° C.; suspending the substrate into a first electrolyte and applying a first anodizing current to the first electrolyte; rinsing the substrate; heating the substrate to a second temperature of 200° C. to about 380° C.; and suspending the substrate into a second electrolyte and applying a second anodizing current to the second electrolyte, wherein the first electrolyte and second electrolyte each comprise an aqueous solution of at least one salt of alpha-hydroxy acid.
    Type: Grant
    Filed: March 7, 2001
    Date of Patent: November 5, 2002
    Assignee: Kemet Electronics Corporation
    Inventors: Albert Kennedy Harrington, Brian John Melody, John Tony Kinard, Philip Michael Lessner, David Alexander Wheeler
  • Publication number: 20020130046
    Abstract: A method of forming a copper layer with increased electromigration resistance. A doped copper layer is formed by controlling the incorporation of a non-metallic dopant during copper electroplating.
    Type: Application
    Filed: March 15, 2001
    Publication date: September 19, 2002
    Applicant: Applied Materials, Inc.
    Inventors: Robin Cheung, Liang-Yuh Chen
  • Publication number: 20020125143
    Abstract: A method of anodizing an aluminum substrate comprising heating the substrate to a first temperature of 200° C. to about 380° C.; suspending the substrate into a first electrolyte and applying a first anodizing current to the first electrolyte; rinsing the substrate; heating the substrate to a second temperature of 200° C. to about 380° C.; and suspending the substrate into a second electrolyte and applying a second anodizing current to the second electrolyte, wherein the first electrolyte and second electrolyte each comprise an aqueous solution of at least one salt of alpha-hydroxy acid.
    Type: Application
    Filed: March 7, 2001
    Publication date: September 12, 2002
    Inventors: Albert Kennedy Harrington, Brian John Melody, John Tony Kinard, Philip Michael Lessner, David Alexander Wheeler
  • Patent number: 6409932
    Abstract: A method is disclosed for speeding workpiece thoughput in low pressure, high temperature semiconductor processing reactor. The method includes loading a workpiece into a chamber at atmospheric pressure, bringing the chamber down to an intermediate pressure, and heating the wafer while under the intermediate pressure. The chamber is then pumped down to the operating pressure. The preferred embodiments involve single wafer plasma ashers, where a wafer is loaded onto lift pins at a position above a wafer chuck, the pressure is rapidly pumped down to about 40 Torr by rapidly opening and closing an isolation valve, and the wafer is simultaneously lowered to the heated chuck. Alternatively, the wafer can be pre-processed to remove an implanted photoresist crust at a first temperature and the chamber then backfilled to about 40 Torr for further heating to close to the chuck temperature. At 40 Torr, the heat transfer from the chuck to the wafer is relatively fast, but still slow enough to avoid thermal shock.
    Type: Grant
    Filed: December 27, 2000
    Date of Patent: June 25, 2002
    Assignee: Matrix Integrated Systems, Inc.
    Inventors: Albert Wang, Scott Baron, Prasad Padmanabhan, Gerald M. Cox
  • Patent number: 6379524
    Abstract: A process for manufacturing a composite membrane for separation of hydrogen gas using palladium, which employs the step of electroplating under vacuum an alloy of a palladium compound and a transition metal.
    Type: Grant
    Filed: June 23, 2000
    Date of Patent: April 30, 2002
    Assignee: Korea Research Institute of Chemical Technology
    Inventors: Kew Ho Lee, Seung Eun Nam, Sang Hak Lee
  • Patent number: 6378338
    Abstract: Magnetic disk substrates are produced by subjecting glass substrates to at least steps of degreasing, etching, sensitization with tin chloride, activation and sensitivity-enhancing treatment in that order, then plating the pretreated substrates with a nickel/phosphorus film, and thereafter polishing the plated substrates. In the process, the substrates being processed are washed with hot pure water at a temperature of not lower than 50° C. for a period of from 20 to 90 seconds, after the sensitization step but before the activation step, and heated at a temperature of not lower than 70° C. for a period of from 5 to 100 minutes, after the sensitization step but before the nickel/phosphorus-plating step.
    Type: Grant
    Filed: August 30, 1999
    Date of Patent: April 30, 2002
    Assignee: Showa Denko K.K.
    Inventors: Kurata Awaya, Kazuyoshi Nishizawa, Kiyoshi Tada
  • Publication number: 20020027081
    Abstract: There is provided a copper-plating liquid free from an alkali metal and a cyanide which, when used in plating of a substrate having an outer seed layer and fine recesses of a high aspect ratio, can reinforce the thin portion of the seed layer and can embed copper completely into the depth of the fine recesses.
    Type: Application
    Filed: June 29, 2001
    Publication date: March 7, 2002
    Inventors: Mizuki Nagai, Shuichi Okuyama, Ryoichi Kimizuka, Takeshi Kobayashi
  • Patent number: 6221437
    Abstract: A heated platen or chuck is employed in connection with a wet chemistry process cell, such as a plating cell for plating a flat substrate. A flow of electrolyte or other wet process solution is introduced into the cell across the surface of the substrate which is mounted on a the chuck or holder. A cathode ring may be disposed to make electrical contact with the substrate. The cathode ring can include a thin metal thieving ring. A fluid-powered rotary blade or wiper may be employed to draw bubbles or other impurities from the substrate, and a megasonic transducer can apply megasonic acoustic energy to the solution. The cell can be used for electroless or galvanic plating. A heater in the chuck heats the substrate to a temperature significantly above that of the electrolyte. Heating the substrate during plating improves the grain structure of the plated metal.
    Type: Grant
    Filed: April 12, 1999
    Date of Patent: April 24, 2001
    Assignee: Reynolds Tech Fabricators, Inc.
    Inventor: H. Vincent Reynolds
  • Patent number: 6042712
    Abstract: According to one aspect of the invention, a plating system is provided which includes a tank for containing a plating solution, a substrate holder, and a temperature control device. The substrate holder is configured to support a substrate in position so that at least a first face of the substrate is exposed to the plating solution in the tank. The temperature control device provides selective control of temperature in various regions of the substrate during plating so as to control plating over the first face of the substrate.
    Type: Grant
    Filed: May 21, 1998
    Date of Patent: March 28, 2000
    Assignee: FormFactor, Inc.
    Inventor: Gaetan L. Mathieu
  • Patent number: 5873992
    Abstract: Disclosed is an electroplating method and products made therefrom, which in one embodiment includes using a current density J.sub.O, to form a conductive metal layer having a surface roughness no greater than the surface roughness of the underlying member. In another embodiment of electroplating a substrate surface having peaks and valleys, the method includes electroplating a conductive metal onto the peaks to cover the peaks with the conductive metal, and into the valleys to substantially fill the valleys with the conductive metal.
    Type: Grant
    Filed: March 24, 1997
    Date of Patent: February 23, 1999
    Assignee: The Board of Trustees of the University of Arkansas
    Inventors: John H. Glezen, Hameed A. Naseem, William D. Brown, Leonard W. Schaper, Ajay P. Malshe
  • Patent number: 5773087
    Abstract: A coated article comprising a stainless steel base having an etched surface and having on the etched surface a coated layer. The coating layer may comprise a fluororesin and can be provided: after sensitizing the stainless steel base through heating, treating with an acid, subjecting to etching, and subjecting to a solution treatment; after immersing in an aqueous acid solution or an aqueous ferric chloride solution to cause the base to be dissolved to such an extent that the gloss of the surface disappears; after uniformly abrading the surface of the base through buffing or blasting to the weight corresponding to a thickness of 1.0 .mu.m or more of the base, immersing in an aqueous acid solution or an aqueous ferric chloride solution to cause the base to be dissolved to such an extent that the gloss of the surface disappears, and subjecting to etching; or after subjecting to electrolytic etching at 15.degree. C. or less.
    Type: Grant
    Filed: July 29, 1996
    Date of Patent: June 30, 1998
    Assignee: Sumitomo Electric Industries, Ltd.
    Inventors: Hideki Kashihara, Katsuya Yamada
  • Patent number: 5503732
    Abstract: A method for manufacturing a substrate useful as a color filter for LCD and having window-shaped coating films and a frame-shaped, functional coating film at the regions not occupied with the window-shaped coating films, which comprises the steps of:(a) forming a functional coating film on a transparent substrate having electrically conductive circuits on a surface thereof,(b) superposing a photomask having a predetermined pattern on the surface of the coating film formed in step (a), and exposing the thus masked coating film to light,(c) subjecting the intermediate product to developing to leave a frame-shaped coating film, and(d) subjecting the resulting substrate formed through steps (a) to (c) to electro-deposition to form electro-deposition coating films on the electrically conductive circuits, enables production of coating films of fine pattern with improved precision.
    Type: Grant
    Filed: July 12, 1994
    Date of Patent: April 2, 1996
    Assignee: Shinto Paint Co., Ltd.
    Inventors: Susumu Miyazaki, Tsuyoshi Nakano, Yoshikatsu Okada, Yasuhiko Teshima, Miki Matsumura
  • Patent number: 5456816
    Abstract: A method for manufacturing a nickel alloy electroplated cold-rolled steel sheet excellent in press-formability and phosphating-treatability, which comprises the steps of: (a) cold-rolling a hot-rolled steel sheet at a reduction ratio of from 60 to 85% to prepare a cold-rolled steel sheet consisting essentially of: up to 0.06 wt. % carbon, up to 0.5 wt. % silicon, up to 2.5 wt. % manganese, up to 0.1 wt. % phosphorus, up to 0.025 wt. % sulfur, up to 0.10 wt. % soluble aluminum, up to 0.05 wt. % nitrogen, and the balance being iron and incidental impurities; then, (b) subjecting the cold-rolled steel sheet to a continuous annealing treatment which comprises heating the cold-rolled steel sheet to a recrystallization temperature and then slowly cooling same; then, (c) forming, on at least one surface of the annealed cold-rolled steel sheet, a nickel alloy electroplating layer having a plating weight of from 5 to 60 mg/m.sup.
    Type: Grant
    Filed: April 28, 1994
    Date of Patent: October 10, 1995
    Assignee: NKK Corporation
    Inventors: Toyofumi Watanabe, Akihiko Furuta, Tadashi Ono, Yoshinori Yomura, Shuichi Iwado
  • Patent number: 5456818
    Abstract: A method of preventing galling between first and second metallic surfaces which are disposed in contacting, substantially stationary relation, one to each other, includes coating at least one of the first and second metallic surfaces with a layer of hard chromium plating.
    Type: Grant
    Filed: September 16, 1994
    Date of Patent: October 10, 1995
    Assignee: Ingersoll-Rand Company
    Inventors: Russell A. Houston, Louis Chiang
  • Patent number: 5403468
    Abstract: A process for the manufacture of tinplates comprising electroplating a substrate in a fused-chloride tin plating bath at a temperature of about 150.degree. to 350.degree. C., a current density of about 100 to 500 A/dm.sup.2 in an atmosphere of a non-oxidizing gas. This process may be converted to a process for the manufacture of reflow type tinplates by only changing the bath temperature, and vice versa. For the manufacture of no-reflow type tinplates, the bath is kept at 150.degree. to 232.degree. C., while for the manufacture of reflow type tinplates, the bath is kept at 233.degree. to 350.degree. C. In these cases, the bath includes SnCl.sub.2 and at least one member selected from the group consisting of KCl, NaCl, LiCl and AlCl.sub.3, and may preferably be operated while flowing the bath at a flow rate of about 0.1 m/sec higher.
    Type: Grant
    Filed: March 10, 1992
    Date of Patent: April 4, 1995
    Assignee: Kawasaki Steel Corporation
    Inventors: Hisatada Nakakoji, Seiji Nakajima, Shuji Gomi, Nobuyuki Morito
  • Patent number: 5334306
    Abstract: A graphite path is formed along the surface of a diamond plate, preferably a CVD diamond plate, by means of a laser or ion-implantation induced conductivity. The path advantageously can be the surface of a sidewall of a via hole drilled by the laser through the plate or a path running along a side surface of the plate from top to bottom opposed major surfaces of the plate. The graphite path is metallized, as by electroplating or electroless plating. In this way, for example, an electrically conducting connection can be made between a metallized backplane located on the bottom surface of the plate and a wire-bonding pad located on the top surface of the plate.
    Type: Grant
    Filed: November 19, 1992
    Date of Patent: August 2, 1994
    Assignee: AT&T Bell Laboratories
    Inventors: William C. Dautremont-Smith, Leonard C. Feldman, Rafael Kalish, Avishay Katz, Barry Miller, Netzer Moriya