Abstract: An electrochemical machining apparatus being capable of performing multiple points and multiple angles machining is provided. The electrochemical machining apparatus includes at least one electrode member, a guiding member and an actuation member. The electrode member includes a conductive end and a free end, wherein the electrode member is rigid and unbendable. The guiding member is for limiting and guiding the electrode member to move. The actuation member is for exerting a force to the free end of the electrode member, thereby enabling the conductive end of the electrode member to form angle variations. A force-exerting direction from the actuation member to the free end is parallel to a central axis of the electrode member or deflects off the central axis so as to form the angle variations.

Abstract: By providing a honeycomb electrode, i.e., an electrode for a honeycomb structure forming die including a thick plate-like electrode base body made of an electricity discharging material and having two main surfaces, only one surface of two main surfaces of the electrode base body is provided with a plurality of electrode cells partitioned by electrode partition walls, and a shape of the electrode cells in the one surface is analogous to that of flow-through cells of the honeycomb structure.

Abstract: Conventional electrochemical machining process requires fixed shaped tool cathodes, which makes retooling time consuming and expensive. Flexible tool cathodes include elastically deformable cathodes that can deform in two or three dimensions and can adapt to the contour of the workpiece while the workpiece is moving relative to the flexible tool cathode. That is, the flexible tool cathode can perform tracing. Certain flexible tool cathodes can be also used for special configurations such corners and edges. The flexible tool cathodes can be used to polish, finish, or shape the workpiece through electrochemical processes.

Abstract: Disclosed is an electrode arrangement for the defined rounding or deburring of edges of electrically conductive components, in particular turbine components, by means of electrochemical machining with at least one working electrode (5), which has a tubular electrode carrier, through which an electrolyte inflow line (10) is provided, the electrode carrier having on the front end a closure (13, 18), which is arranged such that the electrolyte inflow line in the axial direction of the electrode carrier is closed, and at least one outlet opening (19) being arranged in the radial direction. Also disclosed is a self-centering electrode arrangement and an installation for the defined rounding or deburring of edges of electrically conductive components by means of electrochemical machining with at least one corresponding electrode arrangement and also a method using the electrode arrangements and the described installation.

Abstract: The invention concerns a surface treatment electrode (11) to treat at least one object (1). It comprises at least one cavity (23) enclosing the object (1) to be treated during the treatment, having a geometry ensuring free movement of the object (1), this cavity (23) being delimited by a wall (24) comprising at least one opening (25) communicating the inside of the cavity (23) with a treatment solution (5) in which the electrode (11) is immersed during the surface treatment. The cavity (23) is substantially cylindrical and its diameter is approximately 50 to 100 micrometers larger than a maximum size of the object (1).

Abstract: An electrode and method for the electrochemical machining of a workpiece is disclosed. The electrode is designed as a cathodically polarized tool electrode. It has a geometry that corresponds to the geometry to be removed from the workpiece, at least in a machining range, and perviousnesses in the electrode to allow an electrolyte to flow through and exit at the electrode surface, at least in the area of the machining range. The perviousnesses are formed by a porous design of the electrode and/or by artificially created openings in the electrode or the electrode surface. The porosity distribution and/or the number, arrangement and configuration of the openings is selected such that a uniform electrolyte flow and/or electrolyte exchange at the electrode surface is ensured at least in the machining range of the electrode.

Abstract: An electrode containing a dielectric layer on a surface of the electrode and an active zone containing a metal embedded below the surface of the electrode, wherein the electrode is configured to form a groove pattern on a workpiece by an electrochemical machining process is disclosed. The electrode is capable of manufacturing a workpiece such as a counter plate, a sleeve journal or a conical bearing containing a groove pattern for fluid dynamics bearing, the groove pattern having a pitch of less than 80 microns. The electrode could be made by a method including depositing a dielectric layer on a surface of a metal, depositing a photoresist layer on the dielectric layer, printing a groove pattern on the photoresist layer, etching or physico-chemically removing portions of the dielectric photoresist layers to form grooves in the dielectric layer; removing the photoresist layer; and filling the grooves with a metal to produce the electrode.

Abstract: An apparatus and method for manufacturing and refurbishing a conductive polishing pad assembly for performing an electrochemical process on a substrate is disclosed. The conductive polishing pad assembly is formed using a contact surface as a foundation that is coated with a metallic coating to create a conductive contact surface. In one embodiment, the metallic coating is a high purity tin/zinc alloy that is sprayed on the contact surface. The contact surface contains abrasive particles while the metallic coating provides at least conductive qualities to the contact surface.

Abstract: A polishing pad includes a guide plate having a plurality of holes therein and being affixed to a compressible under-layer; and a plurality of conducting polishing elements each affixed to the compressible under-layer and passing through a sealed contact with a proton exchange membrane and corresponding hole in the guide plate so as to be maintained in a substantially vertical orientation with respect to the compressible under-layer but being translatable in a vertical direction with respect to the guide plate. The polishing pad may also include a slurry distribution material fastened to the guide plate by an adhesive. Pad wear sensors may also be provided in the polishing pad.

Abstract: A device and method for increasing the mass transport rate of a chemical or electrochemical process at the solid and fluid interface in a fluid cell. The device includes a membrane in close contact with surface of the work piece, to separate the process cell into two chambers, so that fluid velocity at the work piece is controlled separately from the main cell flow. Thus the diffusion boundary layer is controlled and minimized by the rate that fluid is withdrawn from the work piece chamber.

Abstract: A tandem blisk is mounted in a multiaxis electrochemical machine. A first row of blades is electrochemically machined in sequence. A second row of blades is then electrochemically machined in sequence while the blisk is still mounted in the machine. The machine is initially set up for machining both stages without removal of the blisk between the machining sequences.

Abstract: An apparatus, method and means is provided for electrochemical machining of hydrodynamic bearing assemblies in spindle motors. In an aspect, a cartridge is provided that receives and accurately positions an electrode in three dimensions in a near frictionless manner. The electrode reaches and maintains an equilibrium position in response to a first and second predetermined force, the equilibrium position being a predetermined three dimensional orientation relative to the work piece and defining a critical orifice with the work piece. In an aspect, a hydrostatic bearing is employed within the electrode for radially adjusting the electrode.

Abstract: A particular anode assembly can be used to supply a solution for any of a plating operation, a planarization operation, and a plating and planarization operation to be performed on a semiconductor wafer. The anode assembly includes a rotatable shaft disposed within a chamber in which the operation is performed, an anode housing connected to the shaft, and a porous pad support plate attached to the anode housing. The support plate has a top surface adapted to support a pad which is to face the wafer, and, together with the anode housing, defines an anode cavity. A consumable anode may be provided in the anode cavity to provide plating material to the solution. A solution delivery structure by which the solution can be delivered to said anode cavity is also provided. The solution delivery structure may be contained within the chamber in which the operation is performed. A shield can also be mounted between the shaft and an associated spindle to prevent leakage of the solution from the chamber.

Abstract: A perforated electrode has strategically distributed flushing holes through which a flushing medium is discharged. The electrode can be used for either electrochemical machining (ECM) or electrodischarge machining (EDM). The flushing medium is either electrolyte in ECM or a dielectric fluid in EDM. It is discharged from the tool electrode directly against the workpiece surface or surfaces which are undergoing material removal. This removes heat and sludge or debris.

Abstract: The present invention is an electropolishing process and device for electropolishing an inner surface of a long tube, especially applied to a long tube of greater than two meters and a diameter range between 0.3 and 5 cm. Wherein, the present invention comprises at least one tube, and one complex electrode. An inner surface of the tube is for electropolishing process, and it is an anode as well. The electrode is a cathode and placed on a center of a partition. An end of electrode connects to a cable, the cable is driven by an axial mechanism to be moved the electrode toward the axial mechanism itself. Inside of the tube is full o electrolyte, which is an electrifying medium to connect both anode and cathode. Further, electrolyte cooperates with the electrode to perform the electropolishing process on the inner surface of tube.

Abstract: The method according to the invention comprises a macrographic etching step followed by a “bleaching” step by electrolytic etching by means of a bath containing at least phosphoric acid and a weak acid. This method allows components made of superalloys to be easily and effectively inspected, including when they contain elements such as rhenium or ruthenium.

Abstract: A method for producing a separator in which a recessed gas path is formed. Depth fluctuations of the gas path can be reduced. The gas path having plural depths or gradation can be formed easily. An electrically conductive member 3, as a separator, and a processing electrode 16, having patterned electrode projections 20, are immersed in an electrolytic solution facing each other. Current is fed between member 3 and electrode 16 for electrolytic processing to dissolve the portion of the member 3 facing projections 20, thus forming a gas path 30 having a surface roughness Rz on this bottom surface 30e not larger than 1 &mgr;m.

Abstract: An electrochemical planarization apparatus for planarizing a metallized surface on a workpiece includes a polishing pad and a platen. The platen is formed of conductive material, is disposed proximate to the polishing pad and is configured to have a negative charge during at least a portion of a planarization process. At least one electrical conductor is positioned within the platen. The electrical conductor has a first end connected to a power source. A workpiece carrier is configured to carry a workpiece and press the workpiece against the polishing pad. The power source applies a positive charge to the workpiece via the electrical conductor so that an electric potential difference between the metallized surface of the workpiece and the platen is created to remove at least a portion of the metallized surface from the workpiece.

Abstract: A workholder for an ECM process comprises a set of jaws which define an interior workpiece holding region are mounted on the surface of a diaphragm which is movable under air pressure from a flat to a more generally spheroid shape with the injection of pressurized air between the diaphragm and a backing plate. As the air is injected, and the diaphragm becomes more spheroid, the jaws are moved a substantially equal distance away from the center axis of the workholding region. The workpiece, which typically incorporates or is mounted on a circular shaft, is placed in the center of the workholding region, and the air pressure is removed, causing the diaphragm to return to its original flat shape and the jaws to snap back to their original positions resting against the shaft.

Abstract: An electrolyte is circulated between the surface to be machined, raised to an anode potential, and a tool electrode (9') raised to a cathode potential. The electrolyte contains lithium nitrate as a unique active product with a concentration of between 20 g/l and 2350 g/l and preferably between 50 g/l and 250 g/l. The process can be applied to the machining of the surface of any metallic component and in particular to the machining of the internal surface of tubular components (5) such as penetrations in the vessel bottom or closure head of a nuclear reactor; in this case the electrochemical machining cell consists of a cylindrical tool electrode (9') placed inside the component to be machined.